CN111644754B - High-precision laminated grating unit and preparation method thereof - Google Patents
High-precision laminated grating unit and preparation method thereof Download PDFInfo
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- CN111644754B CN111644754B CN202010442233.2A CN202010442233A CN111644754B CN 111644754 B CN111644754 B CN 111644754B CN 202010442233 A CN202010442233 A CN 202010442233A CN 111644754 B CN111644754 B CN 111644754B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
Abstract
The invention provides a high-precision laminated grating unit and a preparation method thereof, and solves the problems that the grating laminating precision of the conventional grating unit is low and the laminating precision requirement of +/-3 mu m is difficult to meet. The grating unit comprises a plurality of single gratings which are sequentially stacked from top to bottom, each single grating is provided with 2 rectangular positioning holes, the positioning holes of the single gratings are overlapped, and the length direction of the rectangular positioning holes is parallel to the length direction of a slit of the single gratings; the 2 rectangular positioning holes are positioned in the peripheral area of the slit and are arranged in an axisymmetric manner, and the symmetric axis passes through the center of the single-chip grating and is vertical to the slit. The preparation method comprises the following steps: 1) processing a grating slit on the grating sheet by adopting a laser processing process, and simultaneously processing a rectangular positioning hole on the grating sheet by adopting the same processing process as the grating slit; 2) processing a plurality of grating sheets by adopting the same process conditions as the step 1) to obtain a plurality of single-sheet gratings; 3) and (3) carrying out grating lamination by taking the rectangular positioning hole of the single grating as a mechanical reference to obtain a grating unit.
Description
Technical Field
The invention relates to a grating unit and a preparation method thereof, in particular to a high-precision laminated grating unit and a preparation method thereof.
Background
The optical grating is an important structure for hard X-ray detection, and the collimator based on the double-grating detection principle can complete the modulation of the photon transmittance of the hard X-ray, so as to detect the non-thermal physical processes such as solar flare and the like. At present, the development of the grating for hard X-ray detection is limited by the technical level of high-precision grating processing, and 20 single-layer grating sheets with the thickness of 0.1mm need to be laminated into an independent grating unit. In order to complete the development of the grating unit, firstly, the high-precision grating sheet processing is carried out on the single-sheet grating with the corresponding pitch, after the processing is completed, the single-sheet grating is laminated according to a specific process, and the deviation between the grating slit width and the grating pitch meets the laminating precision requirement of +/-3 mu m after the lamination of the grating unit is completed. The grating lamination with the thickness of 0.1mm and the requirement of ensuring the precision of the grating lamination with the thickness of 3 mu m provide a challenge for the lamination of the grating, and in order to ensure the precision of the grating lamination, a high-precision and high-efficiency lamination method needs to be found for carrying out the lamination of the grating sheet.
At present, a positioning circular hole 02 is usually processed on a grating sheet 01, a monolithic grating structure comprising the positioning circular hole 02 is shown in fig. 1, the monolithic grating structure comprises a grating slit 03, the grating pitch is d, grating lamination is performed by taking the positioning circular hole 02 as a mechanical reference of lamination, a grating unit structure formed after the grating sheet based on the positioning circular hole structure is laminated is shown in fig. 2, the grating unit structure comprises a first grating sheet 05 and a … … nth grating sheet 06 which are sequentially laminated from top to bottom, and a circular positioning pin 04 is used as a lamination reference, the processing position precision is limited by the processing technology level, the processing position precision of the positioning circular hole on the monolithic grating is difficult to guarantee, and the actual measurement result shows that: on the single-chip grating, the processing position deviation among the plurality of positioning circular holes can reach 0.03 mm; the precision of grating lamination by taking the positioning round hole 02 as a mechanical reference is poor, and the requirement of the lamination precision of +/-3 microns is difficult to meet.
Therefore, it is urgently needed to design a new single-chip grating positioning mode for grating lamination so as to meet the lamination precision of the grating.
Disclosure of Invention
The invention provides a high-precision laminated grating unit and a preparation method thereof, and aims to solve the technical problems that the grating laminating precision of the conventional grating unit is low and the laminating precision requirement of +/-3 mu m is difficult to meet.
In order to achieve the purpose, the technical scheme provided by the invention is as follows:
the utility model provides a high accuracy stromatolite grating unit, includes a plurality of monolithic gratings that top-down stacked in proper order, all is equipped with the locating hole on every monolithic grating, and the locating hole of all monolithic gratings overlaps, and its special character lies in: the positioning holes are rectangular positioning holes, and the number of the positioning holes is 2;
the length direction of the rectangular positioning hole is parallel to the length direction of the single grating slit;
the 2 rectangular positioning holes are positioned in the peripheral area of the single-chip grating slit and are arranged in an axial symmetry mode, and corresponding symmetry axes pass through the center of the single-chip grating and are perpendicular to the single-chip grating slit.
Furthermore, the width of the rectangular positioning hole is 0.3-0.8 mm, and the length is 2-3 mm.
The invention provides another high-precision laminated grating unit, which comprises a plurality of single gratings stacked from top to bottom in sequence, wherein each single grating is provided with a positioning hole, and the positioning holes of all the single gratings are overlapped, and the high-precision laminated grating unit is characterized in that: the positioning holes are rectangular and are 4 in number;
the length direction of the rectangular positioning hole is parallel to the length direction of the single grating slit;
the 4 rectangular positioning holes are positioned in the peripheral area of the single grating slit and are arranged at four corners of the same rectangle.
Furthermore, the width of the rectangular positioning hole is 0.3-0.8 mm, and the length is 2-3 mm.
Meanwhile, the invention also provides a preparation method of the high-precision laminated grating unit, which is characterized by comprising the following steps of:
1) processing a grating slit on the grating sheet by adopting a laser processing process, and simultaneously processing a rectangular positioning hole on the grating sheet by adopting the same processing process as the grating slit;
the length direction of the rectangular positioning hole is parallel to the length direction of the slit;
2) processing a plurality of grating sheets by adopting the same process conditions as the step 1) to obtain a plurality of single gratings with the same structure;
3) taking a rectangular positioning hole of the single grating as a mechanical reference, and carrying out grating lamination on a lamination tool to obtain a grating unit;
the lamination tool is a rectangular positioning pin with the same structure and size as the rectangular positioning hole.
Further, in step 1), before the grating slit is processed, the grating sheet is fixed on the laser processing machine tool by an adsorption method.
Compared with the prior art, the invention has the advantages that:
1. the grating unit comprises a plurality of single gratings, the single gratings are provided with high-precision rectangular positioning holes, the rectangular positioning holes are processed by the same processing technology as the grating slits, the processing precision of the rectangular positioning holes is high, and the lamination precision of the grating unit is further improved.
2. In order to ensure accurate positioning, the high-precision rectangular positioning hole provided by the invention can obviously improve the lamination precision by more than one order of magnitude compared with the traditional circular positioning hole.
3. The grating unit preparation method of the invention processes the grating slit of the grating sheet, and simultaneously processes the high-precision rectangular positioning hole, the rectangular positioning hole can be regarded as an independent grating, the precision of the rectangular positioning hole can be controlled within the error range of 2 mu m as the precision of the grating slit, therefore, the high-precision rectangular positioning hole is used as a mechanical reference for lamination, the lamination precision of the grating can be improved, and the lamination precision requirement of 3 mu m can be met.
4. The grating unit preparation method can process the rectangular positioning hole while processing the grating slit, does not need to independently process the positioning hole, and is simple.
Drawings
FIG. 1 is a schematic diagram of a conventional monolithic grating structure;
FIG. 2 is a schematic diagram of a conventional grating unit structure;
in fig. 1 and 2, the reference numerals are as follows:
01-grating sheet, 02-positioning round hole, 03-grating slit, 04-round positioning pin, 05-first grating sheet, 06-nth grating sheet and d-grating pitch;
FIG. 3 is a schematic structural diagram of a grating sheet in the method for manufacturing a high-precision stacked grating unit according to the present invention;
FIG. 4 is a schematic structural diagram of a monolithic grating in the method for manufacturing a high-precision stacked grating unit according to the present invention;
FIG. 5 is a schematic diagram of a single-chip grating stack in the method for manufacturing a high-precision stacked grating unit according to the present invention;
FIG. 6 is a schematic diagram of the structure of a high-precision stacked grating unit according to the present invention;
wherein the reference numbers are as follows:
the grating structure comprises a grating sheet 1, a rectangular positioning hole 2, a grating slit 3, a single grating 4, a rectangular positioning pin 5, a grating pitch d, a rectangular positioning hole b and a grating slit width L.
Detailed Description
The invention is described in further detail below with reference to the figures and specific embodiments.
The precision of the grating pitch processed by the grating sheet is easy to guarantee, and the pitch processing error can be easily controlled within the error range of 2 μm, so the invention combines the process and the precision guarantee characteristic of a grating laser processing machine tool, and provides a method for preparing a high-precision laminated grating unit, which comprises the following steps:
1) preparing a grating sheet 1 to be processed with the thickness of 0.1mm and the diameter R of 46mm, wherein the structure of the grating sheet 1 is shown in figure 3, and adsorbing the grating sheet 1 with the thickness of 0.1mm on a processing workbench of a laser machine tool through an adsorption tool;
the adsorption tool is characterized in that a plurality of through holes are formed in a machining workbench of a machine tool, a pneumatic element communicated with the through holes is arranged on the lower surface of the workbench, a grating sheet 1 is placed on the workbench, the pneumatic element and the grating sheet 1 form a temporary closed space, and the grating sheet 1 is tightly adsorbed on the machining workbench of the laser machine tool by pumping away or rarefiing the space in the sealed space;
2) and (3) processing the grating slit 3 of the adsorbed grating sheet 1 by adopting a laser processing method, wherein the processed grating pitch d is 1.224mm, the grating slit width L is 0.612mm, and the grating processing direction is as shown by an arrow in figure 4.
When the grating slit 3 is machined, a rectangular positioning hole 2 is machined on the grating sheet 1 by the same machining process as the grating slit 3 at the same time, and a single grating 4 is obtained, wherein the single grating structure is shown in fig. 4; the length direction of the rectangular positioning holes 2 is parallel to the length direction of the slit, the number of the rectangular positioning holes 2 is 4, and the 4 rectangular positioning holes 2 are located in the peripheral area of the slit and are arranged at four corners of the same rectangle; in other embodiments, the number of the rectangular positioning holes 2 can also be 2, and the 2 rectangular positioning holes below the position shown in fig. 4 are removed; the 2 rectangular positioning holes 2 are positioned in the peripheral area of the slit of the grating sheet 1 and are arranged in axial symmetry, and the corresponding symmetry axes pass through the center of the grating sheet and are vertical to the slit of the grating sheet 1;
dimension and specification of the rectangular positioning hole 2: the width direction of the rectangular positioning hole is parallel to the grating processing direction, the length direction of the slit parallel to the grating sheet 1 is the length direction of the rectangular positioning hole 2, the width b of the rectangular positioning hole is 0.3-0.8 mm, and the length b of the rectangular positioning hole is 2-3 mm; the width b of the rectangular positioning hole is 0.5mm generally; the length of the rectangular positioning hole 2 is 2.5mm, the circle center of the grating plate is defined as the original point, the direction parallel to the length direction of the rectangular positioning hole is an X axis, and the distance c from the rectangular positioning hole to the X axis is 15.525 mm; in order to ensure the lamination precision of the grating in the vertical grating direction, the processing direction of the grating, namely the size direction of 0.5mm, needs to be ensured, and the processing precision meets the size tolerance of +/-0.003 mm;
3) in order to ensure the consistency of grating processing and eliminate the error of the inconsistency of the precision of a processing machine tool, a plurality of grating sheets 1 with the grating pitch of 1.224mm are processed on the same laser machine tool, and the processing number of the grating sheets 1 can be 20;
4) after the processing of the 1.224mm grating pitches on all the grating sheets 1 is finished, taking the 2.5mm × 0.5mm high-precision rectangular positioning holes 2 on the grating sheets 1 as a mechanical reference, and stacking 20 single gratings on a rectangular positioning pin 5 stacking tool with the same structure and size as those of the rectangular positioning holes 2, as shown in fig. 5; after the lamination is completed, the rectangular positioning pin 5 is taken out to obtain a grating unit, the grating unit comprises a plurality of single gratings 4 which are sequentially stacked from top to bottom as shown in fig. 5 and 6 (the rectangular positioning pin is removed in fig. 5), each single grating 4 is provided with 4 rectangular positioning holes 2 or 2 rectangular positioning holes, and the rectangular positioning holes 2 of all the single gratings 4 are overlapped.
5) After lamination is finished, indexes of the laminated grating slit width of 0.612mm and the grating pitch of 1.224mm of the grating unit are detected under an optical microscope, and the detection result shows that the grating unit can meet the technical index requirement that the slit width and pitch indexes of 20 gratings meet the precision of 0.003 mm.
The above description is only for the purpose of describing the preferred embodiments of the present invention and does not limit the technical solutions of the present invention, and any known modifications made by those skilled in the art based on the main technical concepts of the present invention fall within the technical scope of the present invention.
Claims (6)
1. The utility model provides a high accuracy stromatolite grating unit, includes a plurality of monolithic gratings (4) that top-down stacked in proper order, all is equipped with the locating hole on every monolithic grating (4), and the locating hole of all monolithic gratings (4) overlaps its characterized in that: the positioning holes are rectangular positioning holes (2), and the number of the positioning holes is 2;
the length direction of the rectangular positioning hole (2) is parallel to the length direction of the slit of the single grating (4);
the 2 rectangular positioning holes (2) are positioned in the peripheral area of the slit of the single grating (4) and are arranged in an axial symmetry mode, and the corresponding symmetry axis passes through the center of the single grating and is vertical to the slit of the single grating (4);
the rectangular positioning hole (2) is manufactured by the same laser processing technology as the slit on the single-chip grating (4).
2. The high-precision stacked grating unit of claim 1, wherein: the width of the rectangular positioning hole (2) is 0.3-0.8 mm, and the length of the rectangular positioning hole is 2-3 mm.
3. The utility model provides a high accuracy stromatolite grating unit, includes a plurality of monolithic gratings (4) that top-down stacked in proper order, all is equipped with the locating hole on every monolithic grating (4), and the locating hole of all monolithic gratings (4) overlaps its characterized in that: the positioning holes are rectangular positioning holes (2) and are 4 in total;
the length direction of the rectangular positioning hole (2) is parallel to the length direction of the slit of the single grating (4);
the 4 rectangular positioning holes (2) are positioned in the peripheral area of the slit of the single grating (4) and are arranged at four corners of the same rectangle;
the rectangular positioning hole (2) is manufactured by the same laser processing technology as the slit on the single-chip grating (4).
4. The high-precision stacked grating unit of claim 3, wherein: the width of the rectangular positioning hole (2) is 0.3-0.8 mm, and the length of the rectangular positioning hole is 2-3 mm.
5. A preparation method of a high-precision laminated grating unit is characterized by comprising the following steps:
1) processing a grating slit (3) on the grating sheet (1) by adopting a laser processing technology, and simultaneously processing a rectangular positioning hole (2) on the grating sheet (1) by adopting the same processing technology as the grating slit (3);
the length direction of the rectangular positioning hole (2) is parallel to the length direction of the slit;
2) processing a plurality of grating sheets (1) by adopting the same process conditions as the step 1) to obtain a plurality of single-sheet gratings (4) with the same structure;
3) taking the rectangular positioning hole (2) of the single grating (4) as a mechanical reference, and carrying out grating lamination on a lamination tool to obtain a grating unit;
the lamination tool is a rectangular positioning pin (5) which has the same structure and size with the rectangular positioning hole (2).
6. The method for manufacturing a high-precision stacked grating unit according to claim 5, wherein: in the step 1), before the grating slit (3) is processed, the grating sheet (1) is fixed on a laser processing machine tool in an adsorption mode.
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| US4288697A (en) * | 1979-05-03 | 1981-09-08 | Albert Richard D | Laminate radiation collimator |
| JPH06310273A (en) * | 1993-04-21 | 1994-11-04 | Seikosha Co Ltd | Manufacture of el element |
| JP4379102B2 (en) * | 2003-12-12 | 2009-12-09 | セイコーエプソン株式会社 | Manufacturing method of semiconductor device |
| CN1896784A (en) * | 2005-11-24 | 2007-01-17 | 中国科学院长春光学精密机械与物理研究所 | Integrated assembly and substrate structure and its production for polymer ultraviolet/visible-light collimator |
| US20080165922A1 (en) * | 2007-01-09 | 2008-07-10 | Brian David Yanoff | Laminated ct collimator and method of making same |
| CN202539811U (en) * | 2012-03-30 | 2012-11-21 | 京东方科技集团股份有限公司 | Optical grating alignment cutting device |
| CN106226916A (en) * | 2016-07-26 | 2016-12-14 | 中国科学院高能物理研究所 | Optics collimator and processing method thereof |
| CN108966501B (en) * | 2018-08-03 | 2020-05-26 | 诚亿电子（嘉兴）有限公司 | PCB manufacturing method for improving HDI board through blind hole alignment precision |
| CN110626043B (en) * | 2019-08-02 | 2021-05-07 | 西安飞机工业（集团）有限责任公司 | Machining method of butterfly-shaped composite material sandwich part |
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