CN111624706B - TM and TE mode forbidden band adjustable hybrid plasmon waveguide Bragg grating and design method thereof - Google Patents
TM and TE mode forbidden band adjustable hybrid plasmon waveguide Bragg grating and design method thereof Download PDFInfo
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Abstract
The invention discloses a mixed plasmon waveguide Bragg grating with adjustable TM and TE mode forbidden bands and a design method thereof 2 A high refractive index material Si of width w is placed centrally over the substrate, on SiO 2 Both sides above the substrate are provided with an infinite width metal Ag layer through a supporting layer ZnO layer, and a transition layer Si is filled between the supporting layer ZnO layer and the metal Ag layer 3 N 4 The widths w of the two hybrid plasmon waveguide structures are different. The hybrid plasmon waveguide Bragg grating is simple in structure, high in structural integration degree and easy to prepare, the width of a specific high-refractive-index dielectric layer can be selected according to a polarization effect to be achieved, the period and the periodicity of a grating unit are properly adjusted, and dynamic selection of a pass band in a specified waveband can be achieved.
Description
Technical Field
The invention relates to a mixed plasmon waveguide Bragg grating with adjustable TM and TE mode forbidden bands and a design method thereof, which can be used in the technical fields of optical communication, integrated optics and the like.
Background
In recent years, various nanometer optical waveguide structures are developed to meet the high integration requirement in the field of integrated photonic devices, such as photonic crystal waveguides, plasmon waveguides and the like. Among them, the surface plasmon waveguide is widely spotlighted because of its scale breaking the diffraction limit and the material characteristics of photoelectric integration. However, the loss caused by the metal causes the propagation distance of the waveguide mode to be very small, and the application of the surface plasmon waveguide and the waveguide device is limited. Thus, a hybrid plasmon waveguide structure capable of effectively reducing loss and increasing a transmission distance is proposed. The key point of the Hybrid Plasmon Waveguides (HPWs) is to introduce a low-refractive-index gap between metal and a high-refractive-index medium, so that the waveguide structure can obtain a better compromise between the low loss of the medium waveguide and the mode confinement capability of the surface plasmon waveguide. For this reason, various HPWs-based integrated photonic devices have been designed, such as surface plasmon nanolens, efficient optical modulators, polarizing beamers, and the like.
Among them, as a wavelength-dependent photonic device bragg grating, combining the HPWs structure with outstanding filtering characteristics and low loss characteristics has attracted many researchers' research. Xiao Jig et al designed an HPSW-based ultra-compact broadband Bragg grating (Xiao J, liu J, zheng Z, et al. Design and analysis of a nanostructured grating a hybrid planar waveguide grating [ J ]. Journal of Optics,2011,13 (10): 105001.), which can have 75% transmittance at the center wavelength of 1550nm and superior effective mode area, and has wide application prospect in the direction of high-integration optoelectronics. Importantly, an optical device with the characteristics of high integration and high utilization rate can realize multiple functions by performing fine adjustment on a certain structure, so that the problem of how to solve the problem of the singleness of a forbidden band mode on the basis of an original band-pass filter is very meaningful to research.
Disclosure of Invention
The invention aims to solve the problems in the prior art and provides a mixed plasmon waveguide Bragg grating with adjustable TM and TE mode forbidden bands and a design method thereof.
The purpose of the invention is realized by the following technical scheme: a mixed plasmon waveguide Bragg grating with adjustable TM and TE mode forbidden bands is formed by alternately arranging two mixed plasmon waveguide structures,
the two mixed plasmon waveguide structures are both in SiO 2 A high refractive index material Si with a width w is placed centrally on the substrate, on SiO 2 Both sides above the substrate are provided with an infinite width metal Ag layer through a supporting layer ZnO layer, and a transition layer Si is filled between the supporting layer ZnO layer and the metal Ag layer 3 N 4 The widths w of the two hybrid plasmon waveguide structures are different.
Preferably, the number of the alternately arranged hybrid plasmon waveguide bragg gratings is N, and the number of the periods N =10.5.
Preferably, the width of the Bragg grating high-refractive-index Si layer is w, and w takes different values when the width is w a When the width of the corresponding mixed plasmon waveguide is w, the width of the corresponding mixed plasmon waveguide is a b When the corresponding hybrid plasmon waveguide is b, and w a <w b The arrangement sequence of the mixed plasmon waveguides in the Bragg grating is babab … … bab.
Preferably, a period length in the hybrid plasmon waveguide bragg grating is Λ = d B,1 +d B,2 The specific parameter value is determined by the following formula:
wherein, re (n) eff1 ) And Re (n) eff2 ) The effective refractive indices of waveguide a and waveguide b, respectively; d B,1 And d B,2 The lengths of the waveguide a and the waveguide b in one period respectively; q is the Bragg order and is 1.
Preferably, the duty cycle of both the mixed plasmon waveguides in one period is 0.5, i.e. d B,1 ＝d B,2 ＝Λ/2。
The invention also discloses a design method of the TM and TE mode forbidden band adjustable mixed plasmon waveguide Bragg grating, which comprises the following steps:
s1: constructing a mixed plasmon waveguide structure;
s2: calculating the effective refractive index and analyzing the mode of the mixed plasmon waveguide obtained in the step S1 under the conditions of the same wavelength and different widths w;
s3: sampling and analyzing the effective refractive index data with the same central wavelength and different widths w obtained in the step S2, and selecting two widths w a And w b Preliminarily obtaining the forbidden band width according to the difference value of the effective refractive indexes, preliminarily obtaining the forbidden band center according to the sum value of the effective refractive indexes, and ensuring that the mixed plasmon mode is excited and limited in the low refractive index layer;
s4: for w selected in step S3 a 、w b Calculating effective refractive indexes under different central wavelengths; taking the incident light vertically incident into the Bragg grating as an incident direction condition;
s5: according to the effective refractive index obtained in the step S4, the period length Lambda of the mixed plasmon waveguide Bragg grating structure under the specified central wavelength can be calculated;
s6: according to the width w selected in the steps S3 and S5 a 、w b Time-corresponding hybrid plasmon waveguide structures a and b with a period length d B,1 ＝d B,2 And (5) alternately arranging the (= Lambda/2) to construct a mixed plasmon waveguide Bragg grating.
Compared with the prior art, the invention adopting the technical scheme has the following technical effects: the mixed plasmon waveguide Bragg grating is simple in structure, simple and convenient in design flow, high in structural integration degree and easy to prepare, the width w of a specific high-refractive-index dielectric layer can be selected according to a polarization effect to be realized, the period and the periodicity of a grating unit are properly adjusted, the dynamic selection of a passband in a specified waveband can be realized, the mixed plasmon waveguide Bragg grating can be used for realizing a compact optical polarization filter device, and the mixed plasmon waveguide Bragg grating has a certain application value in the fields of optical communication and integrated optics. The design method can select the structural parameters of the HPWBG according to the filtering and polarization characteristics to be filtered.
Drawings
Fig. 1 is a schematic xy cross-sectional structure view of a hybrid plasmon waveguide structure of the present invention.
Fig. 2 is a schematic xz sectional structure diagram of the hybrid plasmon waveguide bragg grating structure according to the present invention.
FIG. 3 is a schematic representation of the real part of the effective refractive index at a wavelength of 1550nm for TE and TM modes as w changes, according to the present invention.
FIG. 4 is a schematic imaginary part of the effective refractive index of TE and TM modes at 1550nm for varying w according to the invention.
Fig. 5 shows TM and TE mode transmission spectra of the hybrid plasmon waveguide bragg grating in which incident light is vertically incident from air when the widths of the high refractive index dielectric layers Si of the two waveguides of the grating of the present invention are alternately arranged in the order of bab.
Fig. 6 is a graph of the real and imaginary parts of the effective refractive index of TM and TE modes as a function of wavelength for a high refractive index material of the present invention with a Si width w =200 nm.
Fig. 7 is a graph of the real and imaginary parts of the effective refractive index of TM and TE modes as a function of wavelength for a high refractive index material of the present invention with a Si width w =350 nm.
Fig. 8 shows TM and TE mode transmission spectra of the hybrid plasmon waveguide bragg grating in which incident light is vertically incident from air when the high refractive index dielectric layers Si of the two waveguides of the grating of the present invention are alternately arranged in the order of bab.
Fig. 9 is a graph of the real and imaginary parts of the effective refractive index of TM and TE modes as a function of wavelength for a high refractive index material of the present invention with a Si width w =275 nm.
Fig. 10 is a graph of the real and imaginary parts of the effective refractive index of TM and TE modes as a function of wavelength for a high refractive index material of the present invention with Si width w =600 nm.
Detailed Description
Objects, advantages and features of the present invention will be illustrated and explained by the following non-limiting description of preferred embodiments. The embodiments are merely exemplary for applying the technical solutions of the present invention, and any technical solution formed by replacing or converting the equivalent thereof falls within the scope of the present invention claimed.
The invention discloses a mixed plasmon waveguide Bragg grating with adjustable TM and TE mode forbidden bands and a design method thereof. The two mixed plasmon waveguide structures are both in SiO with enough width 2 A high refractive index material Si with a width w is placed centrally on the substrate, on SiO 2 Both sides above the substrate are provided with an infinite width metal Ag layer through a supporting layer ZnO layer, and a transition layer Si is filled between the supporting layer ZnO layer and the metal Ag layer 3 N 4 The widths w of the two hybrid plasmon waveguide structures are different.
The number of the alternatively arranged periods of the hybrid plasmon waveguide bragg gratings is N, and the number of the periods N =10.5. The width of the Bragg grating high-refractive-index Si layer is w, and w is different in value when the width is w a When the width of the corresponding mixed plasmon waveguide is w, the width of the corresponding mixed plasmon waveguide is a b When the corresponding hybrid plasmon waveguide is b, and w a <w b The arrangement sequence of the mixed plasmon waveguides in the Bragg grating is babab … … bab.
The period length in the hybrid plasmon waveguide Bragg grating is Λ = d B,1 +d B,2 The specific parameter value is determined by the following formula:
wherein, re (n) eff1 ) And Re (n) eff2 ) The effective refractive indices of waveguide a and waveguide b, respectively; d B,1 And d B,2 The lengths of the waveguide a and the waveguide b in one period respectively; q is the Bragg order and is 1. The duty ratio of the two mixed plasmon waveguides in one period is 0.5, namely d B,1 ＝d B,2 ＝Λ/2。
The invention also discloses a design method of the TM and TE mode forbidden band adjustable mixed plasmon waveguide Bragg grating, which comprises the following steps:
s1: constructing a hybrid plasmon waveguide structure;
s2: calculating the effective refractive index and analyzing the mode of the mixed plasmon waveguide obtained in the step S1 under the conditions of the same wavelength and different widths w;
s3: sampling and analyzing the effective refractive index data with the same central wavelength and different widths w obtained in the step S2, and selecting two widths w a And w b Preliminarily obtaining the forbidden band width according to the difference value of the effective refractive indexes, preliminarily obtaining the forbidden band center according to the sum value of the effective refractive indexes, and ensuring that the mixed plasmon mode is excited and limited in the low refractive index layer;
s4: for w selected in step S3 a 、w b Calculating the effective refractive index under different central wavelengths; taking the incident light vertical incidence into the Bragg grating as the incident direction condition;
s5: according to the effective refractive index obtained in the step S4, the period length Lambda of the mixed plasmon waveguide Bragg grating structure under the specified central wavelength can be calculated;
s6: according to the width w selected in the steps S3 and S5 a 、w b Time-corresponding hybrid plasmon waveguide structures a and b with a period length d B,1 ＝d B,2 And (5) alternately arranging the (= Lambda/2) to construct a mixed plasmon waveguide Bragg grating.
In the present embodiment, the parameters are set as follows: w is a 1 ＝4000nm,w 2 ＝200nm,h 1 ＝100nm,h 2 ＝15nm,h 3 ＝450nm,h 4 Selection of w =400nm will be explained in detail in the following operation.
Fig. 2 is a schematic view of an xz sectional structure of a hybrid plasmon waveguide bragg grating. The mixed plasmon waveguide Bragg grating is formed by alternately arranging N periods of two mixed plasmon waveguides a and b with different widths w of high-refractive-index dielectric layer Si layers according to the sequence of babab … bab. The parameters are set as follows in this example: the period number N =10.5, namely the initial and tail ends of the grating are all in a waveguide b structure, and the period lengthIs Λ = d B,1 +d B,2 The parameter value is determined by the following formula:
wherein, re (n) eff1 ) And Re (n) eff2 ) The effective refractive indices of waveguide a and waveguide b, respectively; d B,1 And d B,2 The lengths of the waveguide a and the waveguide b in one period respectively; q is the Bragg order and is 1. The specific value of the period length Λ will be explained in detail in the subsequent operation.
The structure of figure 1 is subjected to mode analysis by using a finite element algorithm of Comsol software, parameter scanning is started, the width w range of the high-refractive-index medium Si layer is from 200nm to 600nm, the step length is 10nm, the effective refractive index of the structure under different widths w is calculated, and the calculation result contains the real part and the imaginary part of the effective refractive index of TE and TM modes of the structure under the condition of the central wavelength of 1550nm and different widths w.
The forbidden band width is preliminarily estimated according to the difference value of the effective refractive indexes of the two waveguides with different widths w in the graph of fig. 3 and 4 at 1550nm, and the central position of the forbidden band is preliminarily estimated according to the effective refractive indexes and the value of the two waveguides with different widths w in the graph of fig. 3 and 4 at 1550 nm. After data are actually selected, the period length lambda =2d is calculated B,1 ＝2d B,2 The parameter value is determined by the following formula:
wherein, re (n) eff1 ) And Re (n) eff2 ) The effective refractive indices of waveguide a and waveguide b, respectively; d B,1 And d B,2 The lengths of the waveguide a and the waveguide b in one period respectively; q is the Bragg order and is 1. The specific value of the period length Λ will be explained in detail in the subsequent operation.
Example 1: width w of high refractive index layer a ＝200nm，w b Two kinds of mixed plasmon waveguide at wavelength of 1550nm, where the wavelength is 350nm(n eff )＝4.62，Λ＝334nm，d B,1 ＝d B,2 =167nm, n =10.5. Fig. 5 is a graph showing the relationship between TM and TE mode transmission spectra of a hybrid plasmon waveguide bragg grating in which incident light is vertically incident from the air when the widths of high refractive index dielectric layers Si of two waveguides of the grating are alternately arranged in the order of bab. Fig. 6 and 7 show the change of the real part and the imaginary part of the effective refractive index of the hybrid plasmon waveguide with the wavelength when w =200nm and w =350nm, respectively, where the abscissa is the wavelength, the left ordinate is the real part of the effective refractive index, corresponding to the data of a solid line, and the right ordinate is the imaginary part of the effective refractive index, corresponding to the data of a dotted line.
Example 2: width w of high refractive index layer a ＝275nm，w b Σ Re (n) at 1550nm for two kinds of mixed plasmon waveguides at 600nm eff )＝5.15，Λ＝300nm，d B,1 ＝d B,2 And the transmission spectra of TM and TE modes of the mixed plasmon waveguide Bragg grating are vertically incident from the air when the widths of high-refractive-index dielectric layers Si of two waveguides of the grating are alternately arranged according to the sequence of bab.
The method specifically comprises the following steps: fig. 8 shows a relation of a transmission spectrum of a bragg grating formed by the hybrid plasmon waveguide, in which TM and TE dual mode cutoff is exhibited at a wavelength band of 1500nm to 1600nm, and TE mode cutoff and TM mode transmission are exhibited at a wavelength band of 1400nm to 1500 nm. Fig. 9 and 10 respectively show the change of the real effective refractive index part and the imaginary effective refractive index part of the mixed plasmon waveguide with the wavelength when the width w =275m and w =600nm of the high refractive index material Si, where the abscissa is the wavelength, the left ordinate is the real effective refractive index part, corresponding to the data of the solid line, and the right ordinate is the imaginary effective refractive index part, corresponding to the data of the dotted line.
The dynamic selection of the passband in the appointed waveband can be realized by changing the widths w of the high-refractive-index media of the two waveguides and properly adjusting the length and the period number of the grating, and the adjustment optimization of the positions and the transmission spectrums of the high-frequency passband and the high-frequency forbidden band can be realized.
The invention has various embodiments, and all technical solutions formed by adopting equivalent transformation or equivalent transformation are within the protection scope of the invention.
Claims (4)
1. The utility model provides a TM, TE mode forbidden band adjustable mixes plasmon waveguide Bragg grating which characterized in that:
is formed by alternately arranging two mixed plasmon waveguide structures,
the two mixed plasmon waveguide structures are both in SiO 2 A high refractive index material Si of width w is placed centrally over the substrate, on SiO 2 A metal Ag layer is erected on two sides above the substrate through a support layer ZnO layer, and a transition layer Si is filled between the support layer ZnO layer and the metal Ag layer 3 N 4 The widths w of the two mixed plasmon waveguide structures are different;
the number of the alternatively arranged periods of the mixed plasmon waveguide Bragg gratings is N, and the number of the periods N =10.5;
the width of the Bragg grating high-refractive-index Si layer is w, and w is different in value when the width is w a When the width of the corresponding hybrid plasmon waveguide is w, the corresponding hybrid plasmon waveguide is a b When the corresponding hybrid plasmon waveguide is b, and w a <w b The arrangement sequence of the mixed plasmon waveguides in the Bragg grating is babab … … bab.
2. The TM and TE mode bandgap tunable hybrid plasmon waveguide bragg grating of claim 1, wherein: the period length in the hybrid plasmon waveguide Bragg grating is Λ = d B,1 +d B,2 The specific parameter value is determined by the following formula:
wherein, re (n) eff1 ) And Re (n) eff2 ) Respectively waveguide a and waveThe effective refractive index of the guide b; d B,1 And d B,2 The lengths of the waveguide a and the waveguide b in one period respectively; q is the Bragg order and is 1.
3. The hybrid plasmon waveguide bragg grating with adjustable TM and TE mode forbidden bands according to claim 2, wherein: the duty ratio of the two mixed plasmon waveguides in one period is 0.5, namely d B,1 ＝d B,2 ＝Λ/2。
4. The design method of the TM and TE mode forbidden band adjustable hybrid plasmon waveguide bragg grating of claim 1, characterized in that: the design method comprises the following steps:
s1: constructing a hybrid plasmon waveguide structure;
s2: calculating the effective refractive index and performing mode analysis on the mixed plasmon waveguide obtained in the step S1 under the conditions of the same wavelength and different widths w;
s3: sampling and analyzing the effective refractive index data with the same central wavelength and different widths w obtained in the step S2, and selecting two widths w a And w b Preliminarily obtaining the forbidden band width according to the difference value of the effective refractive indexes, preliminarily obtaining the forbidden band center according to the sum value of the effective refractive indexes, and ensuring that the mixed plasmon mode is excited and limited in the low refractive index layer;
s4: for w selected in step S3 a 、w b Calculating the effective refractive index under different central wavelengths; taking the incident light vertically incident into the Bragg grating as an incident direction condition;
s5: according to the effective refractive index obtained in the step S4, the period length Lambda of the mixed plasmon waveguide Bragg grating structure under the specified central wavelength can be calculated;
s6: according to the width w selected in the steps S3 and S5 a 、w b Time-corresponding hybrid plasmon waveguide structures a and b with a period length d B,1 ＝d B,2 And (5) alternately arranging the (= Lambda/2) to construct a mixed plasmon waveguide Bragg grating.
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| CN108181672A (en) * | 2017-12-08 | 2018-06-19 | 南京邮电大学 | A kind of mixing phasmon waveguide bragg grating |
| CN108614325A (en) * | 2018-05-09 | 2018-10-02 | 南京邮电大学 | A kind of mixing phasmon waveguide bragg grating with double forbidden bands |
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| CN108181672A (en) * | 2017-12-08 | 2018-06-19 | 南京邮电大学 | A kind of mixing phasmon waveguide bragg grating |
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| CN208314237U (en) * | 2018-05-09 | 2019-01-01 | 南京邮电大学 | A kind of mixing phasmon waveguide bragg grating of multiband frequency-selecting |
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