CN111618666A - Treatment method for inner wall of steel cylinder filled with high-purity halogen mixed gas - Google Patents
Treatment method for inner wall of steel cylinder filled with high-purity halogen mixed gas Download PDFInfo
- Publication number
- CN111618666A CN111618666A CN202010557383.8A CN202010557383A CN111618666A CN 111618666 A CN111618666 A CN 111618666A CN 202010557383 A CN202010557383 A CN 202010557383A CN 111618666 A CN111618666 A CN 111618666A
- Authority
- CN
- China
- Prior art keywords
- steel cylinder
- polishing
- wall
- steel
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
- B24C1/086—Descaling; Removing coating films
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/08—Cleaning containers, e.g. tanks
- B08B9/093—Cleaning containers, e.g. tanks by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/02—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving rotary barrels
- B24B31/0224—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving rotary barrels the workpieces being fitted on a support
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The treatment method of the inner wall of the steel cylinder filled with the high-purity halogen mixed gas comprises the following sequential steps: the suction head through vacuum apparatus sucks the residue in the steel bottle totally, and the sand blasting head through sand blasting device sprays the steel ball to the steel bottle inner wall, polishes the steel bottle inner wall through making the polishing material in the steel bottle rotate, washes the steel bottle inner wall with deionized water, sweeps the steel bottle inner wall with dry air, installs a bottleneck valve on the steel bottle bottleneck, to steel bottle inner chamber evacuation. The roughness Ra of the inner wall of the steel cylinder filled with the high-purity halogen mixed gas treated by the treatment method is less than 0.4 micron, and an unexpected technical effect is achieved.
Description
Technical Field
The invention relates to treatment of an inner wall of a gas filling steel cylinder, in particular to a treatment method of an inner wall of a high-purity halogen mixed gas filling steel cylinder.
Background
The electronic grade high-purity fluorine-based excimer laser mixed gas is widely used as photoetching gas of semiconductor chips and gas for medical ophthalmic excimer laser surgery, and the hydrogen chloride-based excimer laser mixed gas is mainly used for the annealing and quenching process of OLEDs. Fluorine gas is the most active oxidant, reacts with almost all substances, and hydrogen chloride is highly corrosive, so that halogen compound gas has special requirements for filling steel cylinders. The unpolished inner wall of the steel cylinder is rough, various impurities such as moisture are adsorbed by the rough inner wall of the steel cylinder, and react with fluorine components or hydrogen chloride components in the halogen mixed gas to generate more impurities, so that the purity of the halogen mixed gas is seriously influenced, and therefore, the inner wall of the steel cylinder for filling the high-purity halogen mixed gas needs to be treated.
At present, a treatment technology for filling the inner wall of a high-purity halogen mixed gas steel cylinder is not found.
Disclosure of Invention
The invention provides a method for treating the inner wall of a steel cylinder filled with high-purity halogen mixed gas.
The invention provides a method for treating the inner wall of a steel cylinder filled with high-purity halogen mixed gas, which is characterized by comprising the following steps in sequence:
step 1, an optical inspection lamp passes through a steel cylinder mouth of a gas to be filled with high-purity halogen mixture, the steel cylinder mouth comprises a new steel cylinder and a steel cylinder which is used at least once, the steel cylinder extends into an inner cavity of the steel cylinder, whether residues, tiny water drops and other residues exist on the inner wall of the steel cylinder is checked through the naked eye of the steel cylinder mouth, a vacuum device is started, the residues are sucked completely through a suction head of the vacuum device, and then the vacuum device is stopped;
step 2, fixing the steel cylinder treated in the step 1 on a sand blasting rotary drum of a sand blasting device, starting the sand blasting device, enabling the steel cylinder and the sand blasting rotary drum to rotate together, continuously spraying steel balls with the diameter of 0.8 mm to 1.2 mm to the inner wall of the steel cylinder through a sand blasting head of the sand blasting device, lasting for 13 minutes to 18 minutes, removing rust on the inner wall of the steel cylinder, then stopping the sand blasting device, unloading the steel cylinder from the sand blasting rotary drum, and pouring the steel balls and the rust slag with the diameter of 0.8 mm to 1.2 mm out of the steel cylinder;
step 3, putting the polishing material into the steel cylinder processed in the step 2, wherein the volume of the polishing material is 75 to 85 percent of the volume of the steel cylinder, sealing the mouth of the steel cylinder, fixing the sealed steel cylinder on a polishing rotary drum of a polishing device, starting the polishing device, rotating the steel cylinder and the polishing rotary drum together according to a first rotation direction for 4 hours, then rotating for 4 hours according to the second rotating direction, finally rotating for 4 hours according to the first rotating direction, wherein the rotating speed of the polishing rotary drum and the steel cylinder is 20 to 30 revolutions per minute, removing metal rust and metal burr on the inner wall of the steel cylinder by polishing materials, polishing the inner wall of the steel cylinder to meet the requirement of smooth finish, removing grease on the inner wall of the steel cylinder by polishing materials, then stopping the polishing device, unloading the steel cylinder from the polishing rotary drum, and pouring out the polishing material, metal rust, metal burr powder and oil stain from the steel cylinder;
the polishing material composition was as follows:
(1) polishing agent
The polishing agent is composed of the following materials:
sodium hydroxide: 20 to 30% by mass;
② potassium hydroxide: 10 to 20% by mass;
③ polyoxyethylene nonyl phenyl ether: 0.1 to 0.8 mass%;
and fourthly, deionized water used as a solvent: 50 to 65 mass%;
(2) polishing powder
The polishing powder is composed of the following materials:
sodium carbonate: 50 to 60 mass%;
② sodium metasilicate: 10 to 20% by mass;
③ sodium hydroxide: 5 to 15% by mass;
sodium nitrite: 5 to 10% by mass;
alkyl polyether alcohol: 3 to 5% by mass;
(3) stainless steel ball: a diameter of 4.0 mm to 4.5 mm;
(4) deionized water for dissolving polishing powder: the resistance is 1 megaohm to 1.5 megaohm, the PH value is 5.5 to 6.5, and the temperature is normal temperature;
the polishing materials were used as follows:
(1) polishing agent: 2 to 6.07 parts by mass;
(2) polishing powder: 1 to 2.86 parts by mass;
(3) stainless steel ball: 283.21 to 1023.43 parts by mass;
(4) deionized water for dissolving polishing powder: 35.71 to 250 parts by mass;
step 4, washing the inner wall of the steel cylinder treated in the step 3 by using washing deionized water, wherein the washing time is 140 seconds to 160 seconds, the washing flow is 0.45 kg/second to 0.55 kg/second, the resistance of the deionized water for washing is 1 megaohm to 1.5 megaohm, the pH value is 5.5 to 6.5, and the temperature is 80 ℃ to 100 ℃;
5, blowing the inner wall of the steel cylinder treated in the step 4 by using dry air, wherein the blowing time is 190-210 seconds;
step 6, mounting a bottleneck valve on the bottleneck of the steel cylinder treated in the step 5;
and 7, connecting a suction pipe of the vacuum device with a steel bottle mouth valve, starting the vacuum device, reducing air in the steel bottle inner cavity when the vacuum degree of the steel bottle inner cavity is below 10 millitorr, stopping the vacuum device, and closing the steel bottle mouth valve.
The roughness Ra of the inner wall of the steel cylinder filled with the high-purity halogen mixed gas after the treatment by the treatment method for the inner wall of the steel cylinder filled with the high-purity halogen mixed gas is less than 0.4 micron, and the roughness Ra of the inner wall of the steel cylinder filled with the high-purity halogen mixed gas before the treatment is 2.5 to 3.5 microns.
Detailed Description
The treatment method of the inner wall of the steel cylinder filled with the high-purity halogen mixed gas comprises the following steps:
step 1, an optical inspection lamp passes through a steel cylinder mouth of a gas to be filled with high-purity halogen mixture, the steel cylinder mouth comprises a new steel cylinder and a steel cylinder which is used at least once, the steel cylinder extends into an inner cavity of the steel cylinder, whether residues, tiny water drops and other residues exist on the inner wall of the steel cylinder is checked through the naked eye of the steel cylinder mouth, a vacuum device is started, the residues are sucked completely through a suction head of the vacuum device, and then the vacuum device is stopped;
step 2, fixing the steel cylinder treated in the step 1 on a sand blasting rotary drum of a sand blasting device, starting the sand blasting device, enabling the steel cylinder and the sand blasting rotary drum to rotate together, continuously spraying steel balls with the diameter of 0.8 mm to 1.2 mm to the inner wall of the steel cylinder through a sand blasting head of the sand blasting device, lasting for 13 minutes to 18 minutes, removing rust on the inner wall of the steel cylinder, then stopping the sand blasting device, unloading the steel cylinder from the sand blasting rotary drum, and pouring the steel balls and the rust slag with the diameter of 0.8 mm to 1.2 mm out of the steel cylinder;
step 3, putting the polishing material into the steel cylinder processed in the step 2, wherein the volume of the polishing material is 75 to 85 percent of the volume of the steel cylinder, sealing the mouth of the steel cylinder, fixing the sealed steel cylinder on a polishing rotary drum of a polishing device, starting the polishing device, rotating the steel cylinder and the polishing rotary drum together according to a first rotation direction for 4 hours, then rotating for 4 hours according to the second rotating direction, finally rotating for 4 hours according to the first rotating direction, wherein the rotating speed of the polishing rotary drum and the steel cylinder is 20 to 30 revolutions per minute, removing metal rust and metal burr on the inner wall of the steel cylinder by polishing materials, polishing the inner wall of the steel cylinder to meet the requirement of smooth finish, removing grease on the inner wall of the steel cylinder by polishing materials, then stopping the polishing device, unloading the steel cylinder from the polishing rotary drum, and pouring out the polishing material, metal rust, metal burr powder and oil stain from the steel cylinder;
the polishing material composition was as follows:
(1) polishing agent
The polishing agent is composed of the following materials:
the polishing agent is chemically reacted with the metal rust and the metal burrs on the inner wall of the steel cylinder, so that the metal surface cannot be bitten and corroded when the metal rust and the metal burrs are removed, hydrogen cannot be generated, hydrogen quenching cannot be generated, and the structure of the inner wall of the steel cylinder is not influenced.
Examples of polishing agents:
polishing agent 1: 0.85 kg
Sodium hydroxide: 0.17 kg, potassium hydroxide: 0.17 kg, nonylphenol polyoxyethylene ether: 0.0068 kg, iv deionized water as solvent: 0.5032 kg.
Polishing agent 2: 0.72 kg
Sodium hydroxide: 0.216 kg, potassium hydroxide: 0.072 kg, nonylphenol polyoxyethylene ether: 0.00072 kg, iv deionized water as solvent: 0.43128 kg.
Polishing agent 3: 0.58 kg
Sodium hydroxide: 0.1131 kg,. potassium hydroxide: 0.087 kg, polyoxyethylene nonyl phenyl ether: 0.0029 kg, iv deionized water as solvent: 0.377 kg.
Polishing agent 4: 0.43 kg
Sodium hydroxide: 0.129 kg, potassium hydroxide: 0.08342 kg, polyoxyethylene nonyl phenyl ether: 0.00258 kg, deionized water as solvent: 0.215 kg.
Polishing agent 5: 0.29 kg
Sodium hydroxide: 0.0725 kg, potassium hydroxide: 0.05684 kg, polyoxyethylene nonyl phenyl ether: 0.00116 kg, deionized water as solvent: 0.1595 kg.
(2) Polishing powder
The polishing powder is composed of the following materials:
removing metal rust and metal burrs on the inner wall of the steel cylinder and removing grease dirt on the inner wall of the steel cylinder.
Examples of polishing powders:
polishing powder 1: 0.40 kg
Sodium carbonate: 0.2 kg, sodium metasilicate: 0.08 kg, sodium hydroxide: 0.06 kg, sodium nitrite: 0.04 kg, # alkyl polyether alcohol: 0.02 kg.
Polishing powder 2: 0.34 kg
Sodium carbonate: 0.204 kg, sodium metasilicate: 0.068 kg, sodium hydroxide: 0.034 kg, sodium nitrite: 0.0238 kg, # alkyl polyether alcohol: 0.0102 kg.
Polishing powder 3: 0.29 kg
Sodium carbonate: 0.1479 kg, sodium metasilicate: 0.058 kg, sodium hydroxide: 0.0406 kg, sodium nitrite: 0.029 kg, alkyl polyether alcohol: 0.0145 kg.
Polishing powder 4: 0.23 kg
Sodium carbonate: 0.138 kg, sodium metasilicate: 0.023 kg, sodium hydroxide: 0.0345 kg, sodium nitrite: 0.023 kg, # alkyl polyether alcohol: 0.0115 kg.
Polishing powder 5: 0.14 kg
Sodium carbonate: 0.084 kg, sodium metasilicate: 0.028 kg, sodium hydroxide: 0.007 kg, sodium nitrite: 0.014 kg, # alkyl polyether alcohol: 0.007 kg.
(3) Stainless steel ball with diameter of 4.0 mm to 4.5 mm
In the rotation process of the polishing drum, the inner wall of the steel cylinder is polished by utilizing gravity and centrifugal force to ensure that the inner wall of the steel cylinder reaches the required smooth finish;
(4) deionized water for dissolving polishing powder
The resistance is 1 megaohm to 1.5 megaohm, the PH value is 5.5 to 6.5, and the temperature is normal temperature;
the polishing materials were used as follows:
(1) polishing agent: 2 to 6.07 parts by mass;
(2) polishing powder: 1 to 2.86 parts by mass;
(3) stainless steel ball: 283.21 to 1023.43 parts by mass;
(4) deionized water for dissolving polishing powder: 35.71 to 250 parts by mass;
polishing materials examples:
1. polishing materials used for processing a steel cylinder with the capacity of 50 liters:
(1) polishing agent: 0.85 kg, (2) polishing powder: 0.40 kg, (3) stainless steel beads with a diameter of 4.5 mm: 153.28 kg, (4) dissolving the polishing powder with deionized water: 35 kg.
2. The materials used for the treatment of the cylinders with a capacity of 49 litres:
(1) polishing agent: 0.72 kg, (2) polishing powder: 0.34 kg, (3) stainless steel beads with a diameter of 4.4 mm: 127.36 kg, (4) dissolving the polishing powder with deionized water: 34 kg.
3. The material used for the treatment of 44 liter steel cylinders:
(1) polishing agent: 0.58 kg, (2) polishing powder: 0.29 kg, (3) stainless steel beads with a diameter of 4.3 mm: 111.02 kg, (4) dissolving the polishing powder with deionized water: 30 kg.
4. The steel cylinder with the capacity of 20 liters is treated by the following materials:
(1) polishing agent: 0.43 kg, (2) polishing powder: 0.23 kg, (3) stainless steel ball with diameter of 4.2h mm: 55.51 kg, (4) dissolving the polishing powder with deionized water: 13 kg.
5. The materials used for the treatment of 10 liter capacity cylinders:
(1) polishing agent: 0.29 kg, (2) polishing powder: 0.14 kg, (3) stainless steel beads with a diameter of 4.0 mm: 39.65 kg, (4) dissolving the polishing powder with deionized water: 5 kg.
Step 4, washing the inner wall of the steel cylinder treated in the step 3 by using washing deionized water, wherein the washing time is 140 seconds to 160 seconds, the washing flow is 0.45 kg/second to 0.55 kg/second, the resistance of the deionized water for washing is 1 megaohm to 1.5 megaohm, the pH value is 5.5 to 6.5, and the temperature is 80 ℃ to 100 ℃;
5, blowing the inner wall of the steel cylinder treated in the step 4 by using dry air, wherein the blowing time is 190-210 seconds;
step 6, mounting a bottleneck valve on the bottleneck of the steel cylinder treated in the step 5;
and 7, connecting a suction pipe of the vacuum device with a steel bottle mouth valve, starting the vacuum device, reducing air in the steel bottle inner cavity when the vacuum degree of the steel bottle inner cavity is below 10 millitorr, stopping the vacuum device, and closing the steel bottle mouth valve.
Claims (1)
1. The treatment method for filling the inner wall of the high-purity halogen mixed gas steel cylinder is characterized by comprising the following sequential steps of:
step 1, an optical inspection lamp passes through a steel cylinder mouth of a gas to be filled with high-purity halogen mixture, the steel cylinder mouth comprises a new steel cylinder and a steel cylinder which is used at least once, the steel cylinder extends into an inner cavity of the steel cylinder, whether residues, tiny water drops and other residues exist on the inner wall of the steel cylinder is checked through the naked eye of the steel cylinder mouth, a vacuum device is started, the residues are sucked completely through a suction head of the vacuum device, and then the vacuum device is stopped;
step 2, fixing the steel cylinder treated in the step 1 on a sand blasting rotary drum of a sand blasting device, starting the sand blasting device, enabling the steel cylinder and the sand blasting rotary drum to rotate together, continuously spraying steel balls with the diameter of 0.8 mm to 1.2 mm to the inner wall of the steel cylinder through a sand blasting head of the sand blasting device, lasting for 13 minutes to 18 minutes, removing rust on the inner wall of the steel cylinder, then stopping the sand blasting device, unloading the steel cylinder from the sand blasting rotary drum, and pouring the steel balls and the rust slag with the diameter of 0.8 mm to 1.2 mm out of the steel cylinder;
step 3, putting the polishing material into the steel cylinder processed in the step 2, wherein the volume of the polishing material is 75 to 85 percent of the volume of the steel cylinder, sealing the mouth of the steel cylinder, fixing the sealed steel cylinder on a polishing rotary drum of a polishing device, starting the polishing device, rotating the steel cylinder and the polishing rotary drum together according to a first rotation direction for 4 hours, then rotating for 4 hours according to the second rotating direction, finally rotating for 4 hours according to the first rotating direction, wherein the rotating speed of the polishing rotary drum and the steel cylinder is 20 to 30 revolutions per minute, removing metal rust and metal burr on the inner wall of the steel cylinder by polishing materials, polishing the inner wall of the steel cylinder to meet the requirement of smooth finish, removing grease on the inner wall of the steel cylinder by polishing materials, then stopping the polishing device, unloading the steel cylinder from the polishing rotary drum, and pouring out the polishing material, metal rust, metal burr powder and oil stain from the steel cylinder;
the polishing material composition was as follows:
(1) polishing agent
The polishing agent is composed of the following materials:
sodium hydroxide: 20 to 30% by mass;
② potassium hydroxide: 10 to 20% by mass;
③ polyoxyethylene nonyl phenyl ether: 0.1 to 0.8 mass%;
and fourthly, deionized water used as a solvent: 50 to 65 mass%;
(2) polishing powder
The polishing powder is composed of the following materials:
sodium carbonate: 50 to 60 mass%;
② sodium metasilicate: 10 to 20% by mass;
③ sodium hydroxide: 5 to 15% by mass;
sodium nitrite: 5 to 10% by mass;
alkyl polyether alcohol: 3 to 5% by mass;
(3) stainless steel ball: a diameter of 4.0 mm to 4.5 mm;
(4) deionized water for dissolving polishing powder: the resistance is 1 megaohm to 1.5 megaohm, the PH value is 5.5 to 6.5, and the temperature is normal temperature;
the polishing materials were used as follows:
(1) polishing agent: 2 to 6.07 parts by mass;
(2) polishing powder: 1 to 2.86 parts by mass;
(3) stainless steel ball: 283.21 to 1023.43 parts by mass;
(4) deionized water for dissolving polishing powder: 35.71 to 250 parts by mass;
step 4, washing the inner wall of the steel cylinder treated in the step 3 by using washing deionized water, wherein the washing time is 140 seconds to 160 seconds, the washing flow is 0.45 kg/second to 0.55 kg/second, the resistance of the deionized water for washing is 1 megaohm to 1.5 megaohm, the pH value is 5.5 to 6.5, and the temperature is 80 ℃ to 100 ℃;
5, blowing the inner wall of the steel cylinder treated in the step 4 by using dry air, wherein the blowing time is 190-210 seconds;
step 6, mounting a bottleneck valve on the bottleneck of the steel cylinder treated in the step 5;
and 7, connecting a suction pipe of the vacuum device with a steel bottle mouth valve, starting the vacuum device, reducing air in the steel bottle inner cavity when the vacuum degree of the steel bottle inner cavity is below 10 millitorr, stopping the vacuum device, and closing the steel bottle mouth valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010557383.8A CN111618666B (en) | 2020-06-16 | 2020-06-16 | Treatment method for inner wall of steel cylinder filled with high-purity halogen mixed gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010557383.8A CN111618666B (en) | 2020-06-16 | 2020-06-16 | Treatment method for inner wall of steel cylinder filled with high-purity halogen mixed gas |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111618666A true CN111618666A (en) | 2020-09-04 |
| CN111618666B CN111618666B (en) | 2023-02-28 |
Family
ID=72256504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010557383.8A Active CN111618666B (en) | 2020-06-16 | 2020-06-16 | Treatment method for inner wall of steel cylinder filled with high-purity halogen mixed gas |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111618666B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111618667A (en) * | 2020-06-16 | 2020-09-04 | 岳阳凯美特电子特种稀有气体有限公司 | Treatment method for inner wall of steel cylinder filled with high-purity halogen mixed gas and polishing powder used by same |
| CN111618668A (en) * | 2020-06-16 | 2020-09-04 | 岳阳凯美特电子特种稀有气体有限公司 | Treatment method for inner wall of steel cylinder filled with high-purity halogen mixed gas and used polishing agent |
Citations (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5085745A (en) * | 1990-11-07 | 1992-02-04 | Liquid Carbonic Corporation | Method for treating carbon steel cylinder |
| JPH06270065A (en) * | 1993-03-23 | 1994-09-27 | Kawasaki Steel Corp | Blast method for steel pipe inside surface |
| WO2000073722A1 (en) * | 1999-05-28 | 2000-12-07 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Corrosion resistant container and gas delivery system |
| US20080271380A1 (en) * | 2007-05-03 | 2008-11-06 | National Central University | Method of fabricating abrasive having sliding and grinding effects |
| CN101922004A (en) * | 2010-08-20 | 2010-12-22 | 南京特种气体厂有限公司 | Method for treating inner wall of high-pressure seamless steel gas cylinder |
| CN102580967A (en) * | 2012-02-24 | 2012-07-18 | 南京亚格泰新能源材料有限公司 | Method for cleaning high-purity silane cylinder and matching cleaning system |
| RU118241U1 (en) * | 2012-04-17 | 2012-07-20 | Федеральное государственное унитарное предприятие "Центральный институт авиационного моторостроения им. П.И. Баранова" | DEVICE FOR STRENGTHENING PROCESSING BY SURFACE PLASTIC DEFORMATION OF THE FEATURE OF THE GC COMPRESSOR BLADES |
| US20150344818A1 (en) * | 2014-05-30 | 2015-12-03 | The Procter & Gamble Company | Water cluster-dominant alkali surfactant compositions and their use |
| CN105690039A (en) * | 2016-04-05 | 2016-06-22 | 山东天海高压容器有限公司 | Preparation method of high-pressure seamless steel cylinder |
| CN106222672A (en) * | 2016-08-22 | 2016-12-14 | 青岛文创科技有限公司 | Copper facing wolfram steel polishing agent |
| CN206689906U (en) * | 2017-03-22 | 2017-12-01 | 淄博安泽特种气体有限公司 | Burnishing device in hyperpure gas steel cylinder |
| CN206882302U (en) * | 2017-04-24 | 2018-01-16 | 安徽亚格盛电子新材料有限公司 | Automate steel cylinder cleaning device |
| CN108687574A (en) * | 2018-05-31 | 2018-10-23 | 苏州金宏气体股份有限公司 | A kind of high-purity gas steel cylinder treatment process |
| CN208187464U (en) * | 2018-05-31 | 2018-12-04 | 苏州金宏气体股份有限公司 | A kind of high-purity gas steel cylinder processing system |
| CN108977818A (en) * | 2018-08-02 | 2018-12-11 | 成都格瑞特高压容器有限责任公司 | Stainless steel gas cylinder forms plication region acid washing method |
| CN209060798U (en) * | 2018-10-08 | 2019-07-05 | 福建福源凯美特气体有限公司 | Gas chromatograph compressed air purifier |
| CN110238609A (en) * | 2018-03-07 | 2019-09-17 | 恩凯 | The ultra-high purity gas filling processing method of gas cylinder |
| CN111618667A (en) * | 2020-06-16 | 2020-09-04 | 岳阳凯美特电子特种稀有气体有限公司 | Treatment method for inner wall of steel cylinder filled with high-purity halogen mixed gas and polishing powder used by same |
| CN111618668A (en) * | 2020-06-16 | 2020-09-04 | 岳阳凯美特电子特种稀有气体有限公司 | Treatment method for inner wall of steel cylinder filled with high-purity halogen mixed gas and used polishing agent |
-
2020
- 2020-06-16 CN CN202010557383.8A patent/CN111618666B/en active Active
Patent Citations (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5085745A (en) * | 1990-11-07 | 1992-02-04 | Liquid Carbonic Corporation | Method for treating carbon steel cylinder |
| JPH06270065A (en) * | 1993-03-23 | 1994-09-27 | Kawasaki Steel Corp | Blast method for steel pipe inside surface |
| WO2000073722A1 (en) * | 1999-05-28 | 2000-12-07 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Corrosion resistant container and gas delivery system |
| US20080271380A1 (en) * | 2007-05-03 | 2008-11-06 | National Central University | Method of fabricating abrasive having sliding and grinding effects |
| CN101922004A (en) * | 2010-08-20 | 2010-12-22 | 南京特种气体厂有限公司 | Method for treating inner wall of high-pressure seamless steel gas cylinder |
| CN102580967A (en) * | 2012-02-24 | 2012-07-18 | 南京亚格泰新能源材料有限公司 | Method for cleaning high-purity silane cylinder and matching cleaning system |
| RU118241U1 (en) * | 2012-04-17 | 2012-07-20 | Федеральное государственное унитарное предприятие "Центральный институт авиационного моторостроения им. П.И. Баранова" | DEVICE FOR STRENGTHENING PROCESSING BY SURFACE PLASTIC DEFORMATION OF THE FEATURE OF THE GC COMPRESSOR BLADES |
| US20150344818A1 (en) * | 2014-05-30 | 2015-12-03 | The Procter & Gamble Company | Water cluster-dominant alkali surfactant compositions and their use |
| CN105690039A (en) * | 2016-04-05 | 2016-06-22 | 山东天海高压容器有限公司 | Preparation method of high-pressure seamless steel cylinder |
| CN106222672A (en) * | 2016-08-22 | 2016-12-14 | 青岛文创科技有限公司 | Copper facing wolfram steel polishing agent |
| CN206689906U (en) * | 2017-03-22 | 2017-12-01 | 淄博安泽特种气体有限公司 | Burnishing device in hyperpure gas steel cylinder |
| CN206882302U (en) * | 2017-04-24 | 2018-01-16 | 安徽亚格盛电子新材料有限公司 | Automate steel cylinder cleaning device |
| CN110238609A (en) * | 2018-03-07 | 2019-09-17 | 恩凯 | The ultra-high purity gas filling processing method of gas cylinder |
| CN108687574A (en) * | 2018-05-31 | 2018-10-23 | 苏州金宏气体股份有限公司 | A kind of high-purity gas steel cylinder treatment process |
| CN208187464U (en) * | 2018-05-31 | 2018-12-04 | 苏州金宏气体股份有限公司 | A kind of high-purity gas steel cylinder processing system |
| CN108977818A (en) * | 2018-08-02 | 2018-12-11 | 成都格瑞特高压容器有限责任公司 | Stainless steel gas cylinder forms plication region acid washing method |
| CN209060798U (en) * | 2018-10-08 | 2019-07-05 | 福建福源凯美特气体有限公司 | Gas chromatograph compressed air purifier |
| CN111618667A (en) * | 2020-06-16 | 2020-09-04 | 岳阳凯美特电子特种稀有气体有限公司 | Treatment method for inner wall of steel cylinder filled with high-purity halogen mixed gas and polishing powder used by same |
| CN111618668A (en) * | 2020-06-16 | 2020-09-04 | 岳阳凯美特电子特种稀有气体有限公司 | Treatment method for inner wall of steel cylinder filled with high-purity halogen mixed gas and used polishing agent |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111618667A (en) * | 2020-06-16 | 2020-09-04 | 岳阳凯美特电子特种稀有气体有限公司 | Treatment method for inner wall of steel cylinder filled with high-purity halogen mixed gas and polishing powder used by same |
| CN111618668A (en) * | 2020-06-16 | 2020-09-04 | 岳阳凯美特电子特种稀有气体有限公司 | Treatment method for inner wall of steel cylinder filled with high-purity halogen mixed gas and used polishing agent |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111618666B (en) | 2023-02-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111618666B (en) | Treatment method for inner wall of steel cylinder filled with high-purity halogen mixed gas | |
| CN111618667A (en) | Treatment method for inner wall of steel cylinder filled with high-purity halogen mixed gas and polishing powder used by same | |
| CN111618668A (en) | Treatment method for inner wall of steel cylinder filled with high-purity halogen mixed gas and used polishing agent | |
| CN102218705B (en) | Treatment method of gas cylinder used for storing electronic grade ultra-pure gas | |
| TWI414589B (en) | Abrasive composition and a grinding method | |
| TW201615589A (en) | Anti-glare glass manufacturing method | |
| CN102533118B (en) | Chemical mechanical polishing size | |
| CN103865401A (en) | Application of chemo-mechanical polishing liquid | |
| JP2012119655A (en) | Ultra high-speed wet etching apparatus | |
| EP1218466B1 (en) | Compositions for and methods of reducing/eliminating scratches and defects in silicon dioxide cmp process | |
| JP4933071B2 (en) | Cleaning method of silicon wafer | |
| CN109234723A (en) | A kind of environment-friendly type aluminum alloy die casting process of surface treatment and treatment agent formula | |
| KR102012794B1 (en) | Cylinder treatment method for ultra-high purity gas filling | |
| CN101588896B (en) | Process for surface preparation of parts to be coated | |
| JP2000257795A (en) | Inner surface treatment method of high pressure gas container | |
| CN105288728A (en) | Titanium metal osseointegration implant and titanium metal osseointegration implant surface treatment method | |
| CN113649598A (en) | SLM (selective laser melting) -based surface cleaning treatment method for formed metal and alloy sample thereof | |
| CN111300275B (en) | Sand blasting process for titanium metal container | |
| CN111251193B (en) | Surface hardening treatment method for material for eccentric shaft | |
| CN102453637B (en) | A kind of scavenging solution | |
| CN115213159B (en) | Cleaning method for removing phosphorus, arsenic and boron dopant of silicon epitaxial quartz bell jar | |
| JP2003126794A (en) | Method for cleaning ceramic member | |
| CN114940866B (en) | Chemical mechanical polishing liquid for silicon wafer, preparation method and application thereof | |
| KR102625872B1 (en) | Method for Surface Treatment of Aluminum Remote Plasma Source Chamber Comprising Physical Polishing and Anodizing | |
| JPH06106480A (en) | Cleaning of semiconductor manufacturing device and the like |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |