CN111579213A - MDTD-based microscopic thermal imaging system performance evaluation method and system - Google Patents
MDTD-based microscopic thermal imaging system performance evaluation method and system Download PDFInfo
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Abstract
The invention relates to a method and a system for evaluating the performance of a microscopic thermal imaging system based on MDTD. The method comprises the steps of obtaining optical path parameters of target radiation to be detected, optical path parameters of background radiation and parameters of a microscopic thermal imaging system; determining the spectral radiation flux difference of the target to be detected and the background on the detector unit according to the optical path parameter of the target to be detected radiation and the optical path parameter of the background radiation; determining a noise equivalent temperature difference of the micro thermal imaging system according to the spectral radiation flux difference and the parameters of the micro thermal imaging system; determining a minimum detectable temperature difference according to the noise equivalent temperature difference and parameters of the microscopic thermal imaging system; and evaluating the temperature resolution capability of the microscopic thermal imaging system according to the minimum detectable temperature difference. The method and the system for evaluating the performance of the micro thermal imaging system based on the MDTD improve the accuracy of evaluating the performance of the micro thermal imaging system.
Description
Technical Field
The invention relates to the field of performance detection of a microscopic thermal imaging system, in particular to a method and a system for evaluating the performance of the microscopic thermal imaging system based on MDTD.
Background
The microscopic thermal imaging technology is used in the fields of scientific research and public security criminal investigation, and provides a new analysis tool and a new technical means for science and technology personnel. The microscopic thermal imaging technology in biomedical diagnosis can provide a technical means for the diagnosis and growth analysis of cancer cells. In the basic research of thermophysics, the dynamic micro thermal imaging technology can observe and research the phenomena of micro-area thermal diffusion, thermal conduction and the like very intuitively. In the research of the field of material science, the method can be used for detecting and analyzing the stress fatigue failure of materials such as aluminum alloy, steel and the like. In the aspect of microelectronic devices, defects and faults of tiny parts of electronic products which cannot be observed by human eyes can be observed through a microscopic thermal imaging technology, the parts are repaired in time, and the reliability of the products is improved.
The achievement in the development aspect of the micro thermal imaging system is remarkable abroad, different types of products appear, but the theoretical research on the micro thermal imaging system is rarely reported. The research field of the micro thermal imaging technology in China is in a lagged state compared with the research field in foreign countries, but the technical field is rapidly developed along with the increase of market demands.
However, there is no unified quantitative index to measure the performance of the microscopic thermal imaging system internationally, and in the existing performance evaluation method of the telescopic thermal imaging system, for example: instantaneous field of view (IFOV), Modulation Transfer Function (MTF), Minimum Detectable Temperature Difference (MDTD) and the like, and the characteristics of radiation of an observation target of the microscopic thermal imaging system are not considered, so that the performance evaluation directly applied to the microscopic thermal imaging system has larger errors, thereby not only limiting the research and development of the microscopic thermal imaging system and the improvement of the system performance, but also influencing the popularization and application of the microscopic thermal imaging technology. Therefore, a method for evaluating the performance of the microscopic thermal imaging system more accurately and effectively is needed.
Disclosure of Invention
The invention aims to provide a method and a system for evaluating the performance of a micro thermal imaging system based on MDTD (minimization of drive-by-time) and improve the accuracy of evaluating the performance of the micro thermal imaging system.
In order to achieve the purpose, the invention provides the following scheme:
a performance evaluation method of a micro thermal imaging system based on MDTD comprises the following steps:
acquiring the light path parameters of target radiation to be detected, the light path parameters of background radiation and the parameters of a microscopic thermal imaging system; the light path parameters comprise a waiting temperature, an object space aperture angle between an object space micro element and the microscope objective, atmospheric attenuation on a path between the object space micro element and the microscope objective, blackbody spectral radiance, a transmittance of a microthermal imaging system, a target specific radiance, a refractive index of an object space of the microscope objective, an image space aperture angle between the image space micro element and the detector unit, atmospheric attenuation on a path between the image space micro element and the detector unit, a refractive index of an image space of the microscope objective, an image distance and a radiance; the parameters of the micro thermal imaging system comprise the responsivity of the detector unit, the area of the detector unit, the measurement bandwidth, the working wavelength, the noise power spectrum, the noise voltage, the system bandwidth of the human eye filtering and the human eye integration time;
determining the spectral radiation flux difference of the target to be detected and the background on the detector unit according to the optical path parameter of the target to be detected radiation and the optical path parameter of the background radiation;
determining a noise equivalent temperature difference of the micro thermal imaging system according to the spectral radiation flux difference and the parameters of the micro thermal imaging system;
determining a minimum detectable temperature difference according to the noise equivalent temperature difference and parameters of the microscopic thermal imaging system;
and evaluating the temperature resolution capability of the microscopic thermal imaging system according to the minimum detectable temperature difference.
Optionally, the determining, according to the optical path parameter of the target to be detected radiation and the optical path parameter of the background, a spectral radiation flux difference between the target to be detected and the background on the detector unit specifically includes:
determining the radiation flux emitted by the micro surface element of the target to be detected in the object space to the micro objective lens according to the optical path parameter radiated by the target to be detected, so as to obtain a first radiation flux;
determining the irradiance of the target to be detected, which is irradiated on the detector unit through the microscope objective lens, according to the first radiant flux to obtain a first irradiance;
determining spectral radiant flux of the target to be detected on the detector unit according to the first irradiance and the area of the detector unit to obtain first spectral radiant flux;
determining the radiation flux emitted by the object space micro element of the background to the microscope objective according to the light path parameter of the background radiation to obtain a second radiation flux;
determining the irradiance of the background, which is irradiated on the detector unit through the microscope objective lens, according to the second radiant flux to obtain second irradiance;
determining spectral radiant flux of the background on the detector unit according to the second irradiance and the area of the detector unit to obtain second spectral radiant flux;
determining a spectral radiant flux difference from the first spectral radiant flux and the second spectral radiant flux.
Optionally, the determining the noise equivalent temperature difference of the micro thermal imaging system according to the spectral radiant flux difference and the parameter of the micro thermal imaging system specifically includes:
determining an image signal-to-noise ratio of the micro-thermal imaging system according to the spectral radiant flux difference and parameters of the micro-thermal imaging system;
and determining the noise equivalent temperature difference of the micro thermal imaging system according to the image signal-to-noise ratio and the parameters of the micro thermal imaging system.
Optionally, the determining a minimum detectable temperature difference according to the noise equivalent temperature difference further includes:
determination using a formula
Determining the relation between the microscopic mode of the microscopic thermal imaging system and the minimum detectable temperature difference in the telescopic mode, wherein MDTD is the minimum detectable temperature difference in the microscopic mode, MDTD' is the minimum detectable temperature difference in the telescopic mode, and tau0Is the transmittance in the microscopic mode, τ0' transmittance in telescope mode, DNAIs the image-side numerical aperture of the microscopic thermal imaging,
f is the number of lenses F;
and readjusting the parameters of the microscopic thermal imaging system according to the relation between the microscopic mode of the microscopic thermal imaging system and the minimum detectable temperature difference in the telescopic mode.
An MDTD-based microscopic thermal imaging system performance evaluation system comprises:
the parameter acquisition module is used for acquiring the light path parameters of the target radiation to be detected, the light path parameters of the background and the parameters of the microscopic thermal imaging system; the light path parameters comprise a waiting temperature, an object space aperture angle between an object space micro element and the microscope objective, atmospheric attenuation on a path between the object space micro element and the microscope objective, blackbody spectral radiance, a transmittance of a microthermal imaging system, a target specific radiance, a refractive index of an object space of the microscope objective, an image space aperture angle between the image space micro element and the detector unit, atmospheric attenuation on a path between the image space micro element and the detector unit, a refractive index of an image space of the microscope objective, an image distance and a radiance; the parameters of the micro thermal imaging system comprise the responsivity of the detector unit, the area of the detector unit, the measurement bandwidth, the working wavelength, the noise power spectrum, the noise voltage, the system bandwidth of the human eye filtering and the human eye integration time;
the spectral radiation flux difference determining module is used for determining the spectral radiation flux difference of the target to be detected and the background on the detector unit according to the optical path parameter of the target to be detected radiation and the optical path parameter of the background;
the noise equivalent temperature difference determining module is used for determining the noise equivalent temperature difference of the micro thermal imaging system according to the spectral radiation flux difference and the parameters of the micro thermal imaging system;
the minimum detectable temperature difference determining module is used for determining the minimum detectable temperature difference according to the noise equivalent temperature difference and the parameters of the microscopic thermal imaging system;
and the evaluation module is used for evaluating the temperature resolution capability of the micro thermal imaging system according to the minimum detectable temperature difference.
Optionally, the spectral radiant flux difference determining module specifically includes:
the first radiation flux determining unit is used for determining the radiation flux emitted by the micro surface element of the target to be detected in the object space to the microscope objective according to the optical path parameter of the target to be detected to obtain a first radiation flux;
the first irradiance determining unit is used for determining the irradiance of the target to be detected on the detector unit through the microscope objective according to the first radiant flux to obtain first irradiance;
the first spectral radiant flux determining unit is used for determining the spectral radiant flux of the target to be measured on the detector unit according to the first irradiance and the area of the detector unit to obtain a first spectral radiant flux;
the second radiation flux determining unit is used for determining the radiation flux emitted to the microscope objective by the object space micro element of the background according to the light path parameter of the background radiation to obtain a second radiation flux;
the second irradiance determining unit is used for determining the irradiance of the background on the detector unit through the microscope objective according to the second radiant flux to obtain second irradiance;
the second spectral radiant flux determining unit is used for determining the spectral radiant flux of the background on the detector unit according to the second irradiance and the area of the detector unit to obtain a second spectral radiant flux;
a spectral radiant flux difference determination unit for determining a spectral radiant flux difference from the first spectral radiant flux and the second spectral radiant flux.
Optionally, the noise equivalent temperature difference determining module specifically includes:
the image signal to noise ratio determining unit is used for determining the image signal to noise ratio of the micro thermal imaging system according to the spectral radiant flux difference and the parameters of the micro thermal imaging system;
and the noise equivalent temperature difference determining unit is used for determining the noise equivalent temperature difference of the micro thermal imaging system according to the image signal-to-noise ratio and the parameters of the micro thermal imaging system.
Optionally, the method further includes:
a relation determination module of the minimum detectable temperature difference between the microscopic mode and the telescopic mode for determining by formula
Determining the relation between the microscopic mode of the microscopic thermal imaging system and the minimum detectable temperature difference in the telescopic mode, wherein MDTD is the minimum detectable temperature difference in the microscopic mode, MDTD' is the minimum detectable temperature difference in the telescopic mode, and tau0Is the transmittance in the microscopic mode, τ0' transmittance in telescope mode, DNAIs the image-side numerical aperture of the microscopic thermal imaging,
f is the number of lenses F;
and the parameter adjusting module is used for readjusting the parameter of the microscopic thermal imaging system according to the relation between the microscopic mode of the microscopic thermal imaging system and the minimum detectable temperature difference in the telescopic mode.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
according to the method and the system for evaluating the performance of the micro thermal imaging system based on the MDTD, the spectral radiation flux difference of the target to be measured and the background on the detector unit is determined, the radiation characteristics of the target to be measured are considered, the error of directly determining the minimum detectable temperature difference is reduced, the accuracy of the minimum detectable temperature difference is improved, the phenomenon that the performance evaluation of the micro thermal imaging system has larger error due to the direct application of the minimum detectable temperature difference is avoided, and the accuracy of the performance evaluation of the micro thermal imaging system is improved.
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In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
FIG. 1 is a schematic flow chart of a method for evaluating the performance of a micro thermal imaging system based on MDTD according to the present invention;
FIG. 2 is a schematic diagram of an imaging optical path of a microscopic thermal imaging microscopy system provided by the present invention;
fig. 3 is a schematic structural diagram of a performance evaluation system of a micro thermal imaging system based on MDTD provided by the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide a method and a system for evaluating the performance of a micro thermal imaging system based on MDTD (minimization of drive-by-time) and improve the accuracy of evaluating the performance of the micro thermal imaging system.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Fig. 1 is a schematic flow chart of a method for evaluating performance of a micro thermal imaging system based on MDTD provided by the present invention, and as shown in fig. 1, the method for evaluating performance of a micro thermal imaging system based on MDTD provided by the present invention includes:
s101, acquiring light path parameters of target radiation to be detected, light path parameters of background radiation and parameters of a microscopic thermal imaging system; the light path parameters comprise a waiting temperature, an object space aperture angle between an object space micro element and the microscope objective, atmospheric attenuation on a path between the object space micro element and the microscope objective, blackbody spectral radiance, a transmittance of a microthermal imaging system, a target specific radiance, a refractive index of an object space of the microscope objective, an image space aperture angle between the image space micro element and the detector unit, atmospheric attenuation on a path between the image space micro element and the detector unit, a refractive index of an image space of the microscope objective, an image distance and a radiance; the parameters of the micro thermal imaging system comprise the responsivity of the detector unit, the area of the detector unit, the measurement bandwidth, the working wavelength, the noise power spectrum, the noise voltage, the system bandwidth of the human eye filtering and the human eye integration time; the imaging optical path of the microscopic thermal imaging microscope system is shown in fig. 2.
In a specific embodiment, the detector unit in the micro thermal imaging system adopts an uncooled focal plane detector imaging device, the micro objective adopts a 2-time micro infrared objective, and D of the micro thermal imaging system isNA＝0.24。
S102, determining the spectral radiation flux difference of the target to be detected and the background on the detector unit according to the optical path parameter of the target to be detected radiation and the optical path parameter of the background radiation.
And determining the radiation flux emitted by the micro surface element of the target to be detected in the object space to the micro objective lens according to the optical path parameter of the target to be detected, so as to obtain a first radiation flux.
Using the formula d Φ (λ, T) ═ λ, T) M0(λ,T)τa(λ)ds0sin2u0Determining a first radiant flux; (lambda, T) is the target specific radiance, 2u0Is the object space aperture angle, tau, between the object space micro-surface element and the micro-objectiveaThe atmospheric attenuation on the path between the object space micro-surface element (lambda) and the microscope objective lens is set to taua＝1，M0(λ, T) is the blackbody spectral radiant exitance.
c1Is a first radiation constant, c1＝3.7418×10-16W·m2，c2Is a second radiation constant, c2At 1.4388 × 10-2m · K, λ is the radiation wavelength and T is the thermodynamic temperature (K) of the object.
And determining the irradiance of the target to be measured on the detector unit through the microscope objective according to the first radiant flux to obtain a first irradiance.
Determining the first irradiance specifically includes:
using formulas
Determining a first irradiance; wherein, tau0Is the spectral transmittance, ds, of the microscope objective0Is a micro-surface element of object space, ds1Is a detector unit.
The above formula is based on the Helmholtz-Lagrangian invariance n0·r0·sinu0＝n1·r1·sinu1To obtain
τ0(lambda) is the transmission ratio of the microscopic thermal imaging system, n0Refractive index of object space, n, of a microscope objective1Refractive index of image space of microscope objective, 2u1Is the image-wise aperture angle between the image-space micro-bins and the detector unit.
And determining the spectral radiant flux of the target to be detected on the detector unit according to the first irradiance and the area of the detector unit to obtain a first spectral radiant flux.
The first spectral radiant flux is determined by the following formula:
And determining the radiation flux emitted by the background object space micro surface element to the micro objective lens according to the light path parameter of the background radiation to obtain a second radiation flux.
And determining the irradiance of the background on the detector unit through the microscope objective according to the second radiant flux to obtain a second irradiance.
And determining the spectral radiant flux of the background on the detector unit according to the second irradiance and the area of the detector unit to obtain a second spectral radiant flux.
Determining a spectral radiant flux difference from the first spectral radiant flux and the second spectral radiant flux.
Using formulas
Spectral radiant flux difference.
Wherein, TTAnd TBTemperatures of the target to be measured and the background, respectively, when TTAnd TBWhen the difference is not large, the spectral radiation flux difference of the target to be detected and the background on the detector unit is
S103, determining the noise equivalent temperature difference of the micro thermal imaging system according to the spectral radiation flux difference and the parameters of the micro thermal imaging system.
And determining the image signal-to-noise ratio of the micro thermal imaging system according to the spectral radiant flux difference and the parameters of the micro thermal imaging system.
Image signal-to-noise ratio
The Δ T is obtained as NETD, where NETD is the system noise equivalent temperature difference.
And determining the noise equivalent temperature difference of the micro thermal imaging system according to the image signal-to-noise ratio and the parameters of the micro thermal imaging system.
Because of the fact that
Wherein Δ Φ (λ) represents a radiation flux difference of the target and the background; r (lambda) is the responsivity of the detector; s' (f) is the noise power spectrum of the system; MTFe(f) Representing the electronic filter transfer function.
So whenT＝B1, let τ0(λ)＝τ0When the constant value is obtained, the obtained working wavelength is in [ lambda ]1,λ2]Δ T of the range
If it is assumed that the normalized detection rate D is measured, VnIs the noise voltage corresponding to the unit bandwidth at the measurement point f, Δ f is the measurement bandwidth, AdAb is the detector area, the relation between D and R is expressed as
Further, obtain
Let s (f) be s '(f)/s' (f)0) Is a normalized noise power spectrum; Δ fnIs a noise equivalent bandwidth expressed as
Therefore, the expression of NETD of the micro thermal imaging system can be obtained through arrangementIs composed of
And S104, determining the minimum detectable temperature difference according to the noise equivalent temperature difference and the parameters of the micro thermal imaging system.
Wherein, Δ feyeTo account for the system bandwidth of the human eye filtering; t is teThe integration time of human eye is generally between 0.1 and 0.25, wherein
Determination using a formula
Determining the relation between the microscopic mode of the microscopic thermal imaging system and the minimum detectable temperature difference in the telescopic mode, wherein MDTD is the minimum detectable temperature difference in the microscopic mode, MDTD' is the minimum detectable temperature difference in the telescopic mode, and tau0Is the transmittance in the microscopic mode, τ0' transmittance in telescope mode, DNAIs the image-side numerical aperture of the microscopic thermal imaging,
f is the number of lenses F;
the noise equivalent temperature difference in the telescope mode is
And readjusting the parameters of the microscopic thermal imaging system according to the relation between the microscopic mode of the microscopic thermal imaging system and the minimum detectable temperature difference in the telescopic mode.
And S105, evaluating the temperature resolution capability of the micro thermal imaging system according to the minimum detectable temperature difference.
Fig. 3 is a schematic structural diagram of a performance evaluation system of a micro thermal imaging system based on MDTD provided by the present invention, and as shown in fig. 3, the performance evaluation system of a micro thermal imaging system based on MDTD provided by the present invention includes: a parameter acquisition module 301, a spectral radiant flux difference determination module 302, a noise equivalent temperature difference determination module 303, a minimum detectable temperature difference determination module 304, and an evaluation module 305.
The parameter acquiring module 301 is configured to acquire a light path parameter of a target to be detected, a light path parameter of a background, and a parameter of a microscopic thermal imaging system; the light path parameters comprise a waiting temperature, an object space aperture angle between an object space micro element and the microscope objective, atmospheric attenuation on a path between the object space micro element and the microscope objective, blackbody spectral radiance, a transmittance of a microthermal imaging system, a target specific radiance, a refractive index of an object space of the microscope objective, an image space aperture angle between the image space micro element and the detector unit, atmospheric attenuation on a path between the image space micro element and the detector unit, a refractive index of an image space of the microscope objective, an image distance and a radiance; the parameters of the micro thermal imaging system comprise the responsivity of the detector unit, the area of the detector unit, the measurement bandwidth, the working wavelength, the noise power spectrum, the noise voltage, the system bandwidth of the human eye filtering and the human eye integration time.
The spectral radiation flux difference determining module 302 is configured to determine a spectral radiation flux difference between the target to be detected and the background on the detector unit according to the optical path parameter of the target to be detected radiation and the optical path parameter of the background radiation.
The noise equivalent temperature difference determining module 303 is configured to determine a noise equivalent temperature difference of the micro thermal imaging system according to the spectral radiation flux difference and the parameter of the micro thermal imaging system.
The minimum detectable temperature difference determination module 304 is configured to determine a minimum detectable temperature difference based on the noise equivalent temperature difference and a parameter of the microscopic thermal imaging system.
The evaluation module 305 is configured to evaluate a temperature resolution capability of the micro-thermography system based on the minimum detectable temperature difference.
The spectral radiant flux difference determining module 302 specifically includes: the device comprises a first radiant flux determining unit, a first irradiance determining unit, a first spectral radiant flux determining unit, a second irradiance determining unit, a second spectral radiant flux determining unit and a spectral radiant flux difference determining unit.
The first radiation flux determining unit is used for determining the radiation flux emitted by the micro surface element of the target to be detected in the object space to the micro objective lens according to the optical path parameter radiated by the target to be detected, so as to obtain the first radiation flux.
The first irradiance determining unit is used for determining the irradiance of the target to be measured on the detector unit through the microscope objective according to the first radiant flux to obtain first irradiance.
The first spectral radiant flux determining unit is used for determining the spectral radiant flux of the target to be measured on the detector unit according to the first irradiance and the area of the detector unit to obtain a first spectral radiant flux.
The second radiation flux determining unit is used for determining the radiation flux emitted by the object space micro element of the background to the microscope objective according to the light path parameter of the background radiation to obtain a second radiation flux.
And the second irradiance determining unit is used for determining the irradiance of the background on the detector unit through the microscope objective according to the second radiant flux to obtain second irradiance.
The second spectral radiant flux determining unit is used for determining the spectral radiant flux of the background on the detector unit according to the second irradiance and the area of the detector unit to obtain a second spectral radiant flux.
The spectral radiant flux difference determining unit is used for determining the spectral radiant flux difference according to the first spectral radiant flux and the second spectral radiant flux.
The noise equivalent temperature difference determining module 303 specifically includes: the device comprises an image signal-to-noise ratio determining unit and a noise equivalent temperature difference determining unit.
The image signal to noise ratio determining unit is used for determining the image signal to noise ratio of the micro thermal imaging system according to the spectral radiant flux difference and the parameters of the micro thermal imaging system.
And the noise equivalent temperature difference determining unit is used for determining the noise equivalent temperature difference of the micro thermal imaging system according to the image signal-to-noise ratio and the parameters of the micro thermal imaging system.
The invention provides a performance evaluation method of a micro thermal imaging system based on MDTD, which further comprises the following steps: the device comprises a relation determination module of the minimum detectable temperature difference between a microscopic mode and a telescopic mode and a parameter adjustment module.
The relation determination module of the minimum detectable temperature difference between the microscopic mode and the telescopic mode is used for determining the relation between the microscopic mode and the telescopic mode by using a formula
Determining the relation between the microscopic mode of the microscopic thermal imaging system and the minimum detectable temperature difference in the telescopic mode, wherein MDTD is the minimum detectable temperature difference in the microscopic mode, MDTD' is the minimum detectable temperature difference in the telescopic mode, and tau0Is the transmittance in the microscopic mode, τ0' transmittance in telescope mode, DNAIs the image-side numerical aperture of the microscopic thermal imaging,
f is the number of lenses F.
The parameter adjusting module is used for readjusting the parameter of the microscopic thermal imaging system according to the relation between the microscopic mode of the microscopic thermal imaging system and the minimum detectable temperature difference in the telescopic mode.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. For the system disclosed by the embodiment, the description is relatively simple because the system corresponds to the method disclosed by the embodiment, and the relevant points can be referred to the method part for description.
The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to help understand the method and the core concept of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (8)
1. A performance evaluation method of a micro thermal imaging system based on MDTD is characterized by comprising the following steps:
acquiring optical path parameters of target radiation to be detected, optical path parameters of background radiation and parameters of a microscopic thermal imaging system; the light path parameters comprise a waiting temperature, an object space aperture angle between an object space micro element and the microscope objective, atmospheric attenuation on a path between the object space micro element and the microscope objective, blackbody spectral radiance, a transmittance of a microthermal imaging system, a target specific radiance, a refractive index of an object space of the microscope objective, an image space aperture angle between the image space micro element and the detector unit, atmospheric attenuation on a path between the image space micro element and the detector unit, a refractive index of an image space of the microscope objective, an image distance and a radiance; the parameters of the micro thermal imaging system comprise the responsivity of the detector unit, the area of the detector unit, the measurement bandwidth, the working wavelength, the noise power spectrum, the noise voltage, the system bandwidth of the human eye filtering and the human eye integration time;
determining the spectral radiation flux difference of the target to be detected and the background on the detector unit according to the optical path parameter of the target to be detected radiation and the optical path parameter of the background radiation;
determining a noise equivalent temperature difference of the micro thermal imaging system according to the spectral radiation flux difference and the parameters of the micro thermal imaging system;
determining a minimum detectable temperature difference according to the noise equivalent temperature difference and parameters of the microscopic thermal imaging system;
and evaluating the temperature resolution capability of the microscopic thermal imaging system according to the minimum detectable temperature difference.
2. The method for evaluating performance of a micro thermal imaging system based on MDTD as claimed in claim 1, wherein the determining the difference between the spectral radiance flux of the target to be measured and the spectral radiance flux of the background on the detector unit according to the optical path parameter of the target to be measured and the optical path parameter of the background specifically includes:
determining the radiation flux emitted by the micro surface element of the target to be detected in the object space to the micro objective lens according to the optical path parameter radiated by the target to be detected, so as to obtain a first radiation flux;
determining the irradiance of the target to be detected, which is irradiated on the detector unit through the microscope objective lens, according to the first radiant flux to obtain a first irradiance;
determining spectral radiant flux of the target to be detected on the detector unit according to the first irradiance and the area of the detector unit to obtain first spectral radiant flux;
determining the radiation flux emitted by the object space micro element of the background to the microscope objective according to the light path parameter of the background radiation to obtain a second radiation flux;
determining the irradiance of the background, which is irradiated on the detector unit through the microscope objective lens, according to the second radiant flux to obtain second irradiance;
determining spectral radiant flux of the background on the detector unit according to the second irradiance and the area of the detector unit to obtain second spectral radiant flux;
determining a spectral radiant flux difference from the first spectral radiant flux and the second spectral radiant flux.
3. The method for evaluating the performance of the MDTD-based micro thermal imaging system according to claim 1, wherein the determining the noise equivalent temperature difference of the micro thermal imaging system according to the spectral radiant flux difference and the parameter of the micro thermal imaging system specifically comprises:
determining an image signal-to-noise ratio of the micro-thermal imaging system according to the spectral radiant flux difference and parameters of the micro-thermal imaging system;
and determining the noise equivalent temperature difference of the micro thermal imaging system according to the image signal-to-noise ratio and the parameters of the micro thermal imaging system.
4. The method of claim 1, wherein the determining the minimum detectable temperature difference from the noise equivalent temperature difference further comprises:
determination using a formula
Determining the relation between the microscopic mode of the microscopic thermal imaging system and the minimum detectable temperature difference in the telescopic mode, wherein MDTD is the minimum detectable temperature difference in the microscopic mode, MDTD' is the minimum detectable temperature difference in the telescopic mode, and tau0Is the transmittance in the microscopic mode, τ0' transmittance in telescope mode, DNAIs the image-side numerical aperture of the microscopic thermal imaging,
f is the number of lenses F;
and readjusting the parameters of the microscopic thermal imaging system according to the relation between the microscopic mode of the microscopic thermal imaging system and the minimum detectable temperature difference in the telescopic mode.
5. An MDTD-based microscopic thermal imaging system performance evaluation system is characterized by comprising:
the parameter acquisition module is used for acquiring the light path parameters of the target to be detected, the light path parameters of the background and the parameters of the microscopic thermal imaging system; the light path parameters comprise a waiting temperature, an object space aperture angle between an object space micro element and the microscope objective, atmospheric attenuation on a path between the object space micro element and the microscope objective, blackbody spectral radiance, a transmittance of a microthermal imaging system, a target specific radiance, a refractive index of an object space of the microscope objective, an image space aperture angle between the image space micro element and the detector unit, atmospheric attenuation on a path between the image space micro element and the detector unit, a refractive index of an image space of the microscope objective, an image distance and a radiance; the parameters of the micro thermal imaging system comprise the responsivity of the detector unit, the area of the detector unit, the measurement bandwidth, the working wavelength, the noise power spectrum, the noise voltage, the system bandwidth of the human eye filtering and the human eye integration time;
the spectral radiation flux difference determining module is used for determining the spectral radiation flux difference of the target to be detected and the background on the detector unit according to the optical path parameter of the target to be detected radiation and the optical path parameter of the background radiation;
the noise equivalent temperature difference determining module is used for determining the noise equivalent temperature difference of the micro thermal imaging system according to the spectral radiation flux difference and the parameters of the micro thermal imaging system;
the minimum detectable temperature difference determining module is used for determining the minimum detectable temperature difference according to the noise equivalent temperature difference and the parameters of the microscopic thermal imaging system;
and the evaluation module is used for evaluating the temperature resolution capability of the micro thermal imaging system according to the minimum detectable temperature difference.
6. The system for evaluating performance of a micro thermal imaging system based on MDTD, according to claim 5, wherein the spectral radiant flux difference determining module specifically comprises:
the first radiation flux determining unit is used for determining the radiation flux emitted by the micro surface element of the target to be detected in the object space to the microscope objective according to the optical path parameter radiated by the target to be detected, so as to obtain a first radiation flux;
the first irradiance determining unit is used for determining the irradiance of the target to be detected on the detector unit through the microscope objective according to the first radiant flux to obtain first irradiance;
the first spectral radiant flux determining unit is used for determining the spectral radiant flux of the target to be measured on the detector unit according to the first irradiance and the area of the detector unit to obtain a first spectral radiant flux;
the second radiation flux determining unit is used for determining the radiation flux emitted by the background object space micro surface element to the microscope objective lens according to the light path parameter of the background radiation to obtain a second radiation flux;
the second irradiance determining unit is used for determining the irradiance of the background on the detector unit through the microscope objective according to the second radiant flux to obtain second irradiance;
the second spectral radiant flux determining unit is used for determining the spectral radiant flux of the background on the detector unit according to the second irradiance and the area of the detector unit to obtain a second spectral radiant flux;
a spectral radiant flux difference determination unit for determining a spectral radiant flux difference from the first spectral radiant flux and the second spectral radiant flux.
7. The method for evaluating the performance of the MDTD-based microscopic thermal imaging system according to claim 5, wherein the noise equivalent temperature difference determining module specifically comprises:
the image signal to noise ratio determining unit is used for determining the image signal to noise ratio of the micro thermal imaging system according to the spectral radiant flux difference and the parameters of the micro thermal imaging system;
and the noise equivalent temperature difference determining unit is used for determining the noise equivalent temperature difference of the micro thermal imaging system according to the image signal-to-noise ratio and the parameters of the micro thermal imaging system.
8. The method for evaluating the performance of the MDTD-based microscopic thermal imaging system according to claim 5, further comprising:
a relation determination module of the minimum detectable temperature difference between the microscopic mode and the telescopic mode for determining by formula
Determining the relation between the microscopic mode of the microscopic thermal imaging system and the minimum detectable temperature difference in the telescopic mode, wherein MDTD is the minimum detectable temperature difference in the microscopic mode, MDTD' is the minimum detectable temperature difference in the telescopic mode, and tau0Is the transmittance in the microscopic mode, τ0' transmittance in telescope mode, DNAIs the image-side numerical aperture of the microscopic thermal imaging,
f is the number of lenses F;
and the parameter adjusting module is used for readjusting the parameter of the microscopic thermal imaging system according to the relation between the microscopic mode of the microscopic thermal imaging system and the minimum detectable temperature difference in the telescopic mode.
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