CN111571431A - Pipe fitting fixing device for grinding inner circle of fragile thin-wall pipe fitting - Google Patents
Pipe fitting fixing device for grinding inner circle of fragile thin-wall pipe fitting Download PDFInfo
- Publication number
- CN111571431A CN111571431A CN202010367815.9A CN202010367815A CN111571431A CN 111571431 A CN111571431 A CN 111571431A CN 202010367815 A CN202010367815 A CN 202010367815A CN 111571431 A CN111571431 A CN 111571431A
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- China
- Prior art keywords
- grinding
- pipe fitting
- centering
- fixed sleeve
- sleeve
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
- B24B41/067—Work supports, e.g. adjustable steadies radially supporting workpieces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
- B24B5/36—Single-purpose machines or devices
- B24B5/40—Single-purpose machines or devices for grinding tubes internally
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
The invention discloses a pipe fitting fixing device for grinding the inner circle of a fragile thin-wall pipe fitting, and relates to the technical field of new materials.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of new materials, in particular to a pipe fitting fixing device for grinding an inner circle of a fragile thin-wall pipe fitting.
[ background of the invention ]
The new material industry has the characteristics of high technology density, high research and development investment, high added value of products, strong international property of production and market, wide application range, good development prospect and the like, the research and development level and the industrialization scale of the new material industry become important marks for measuring national economy, social development, scientific and technological progress and national defense strength, and all countries in the world, particularly developed countries, pay attention to the development of the new material industry. Taking a target as an example, a sputtering coating process based on the physical vapor deposition principle is widely applied to the technical fields of liquid crystal display equipment, solar cells, solar vacuum tubes, semiconductor chips and the like; the rotary target is a commonly used coating consumable material in a sputtering coating process, generally consists of a tubular metal base material and a coating material layer, and is prepared by the normal method that the coating material layer is directly sprayed after surface cleaning or sand blowing is carried out on the outer surface of the tubular metal base material; meanwhile, due to the specific requirements of the spraying process, the purity of the used silicon powder is not enough, so that the overall purity of the target material is low, and the coating quality is affected.
The other process is to dig a hollow tube material on a complete ingot or bar-shaped material by using a digging device, and bind the tube material on a tubular metal base material after grinding and polishing, and the process has the defects of low production efficiency, high production cost, short tube material length limited by the digging process and the like, and the cost limitation cannot be popularized and applied in a large range, so that the device for drawing the tubular crystal becomes the research direction of technical personnel in the field.
[ summary of the invention ]
In view of the defects in the prior art, the invention discloses a pipe fitting fixing device for grinding the inner circle of a fragile thin-wall pipe fitting.
In order to achieve the purpose of the invention, the invention adopts the following technical scheme:
the utility model provides a pipe fitting fixing device for circle in fragile thin-walled tube of grinding, includes fixed sleeving, centering subassembly, right hold-down flange and left hold-down flange the equipartition is equipped with at least three centering subassembly respectively on the outer fringe face of fixed sleeving both ends head, the lower extreme head of the last lift nut of centering subassembly passes fixed sleeving's outer fringe face and sets up the pipe fitting outer fringe face contact in fixed sleeving, is equipped with left hold-down flange and right hold-down flange formation respectively at fixed sleeving left and right both ends head be used for the interior pipe fitting fixing device of circle of fragile thin-walled tube of grinding.
The pipe fitting fixing device for grinding the inner circle of the fragile thin-wall pipe fitting is characterized in that a sleeve is arranged between the inner edge surface of the fixing sleeve and the outer edge surface of the pipe fitting.
The pipe fitting fixing device for grinding the inner circle of the fragile thin-wall pipe fitting is characterized in that a left limiting sleeve is arranged between the left pressing flange and the sleeve.
The pipe fitting fixing device for grinding the inner circle of the fragile thin-wall pipe fitting is characterized in that the left pressing flange is fixed on the left end face of the fixing sleeve through a bolt.
The pipe fitting fixing device for grinding the inner circle of the fragile thin-wall pipe fitting is characterized in that a right limiting sleeve is arranged between the right pressing flange and the sleeve.
The pipe fitting fixing device for grinding the inner circle of the fragile thin-wall pipe fitting is characterized in that the right pressing flange is fixed on the right end face of the fixing sleeve through a bolt.
The pipe fitting fixing device for grinding the inner circle of the fragile thin-wall pipe fitting is characterized in that at least three centering assembly mounting platforms are respectively and uniformly distributed on the outer edge surfaces of the two ends of the fixing sleeve, and a lifting nut through hole penetrating to the inner edge surface of the fixing sleeve is formed in each centering assembly mounting platform.
The pipe fitting fixing device for grinding the inner circle of the fragile thin-wall pipe fitting is characterized in that the centering assembly comprises a screw, a centering main body and a lifting nut, the lifting nut is arranged in the middle of the centering main body, and an internal thread of the lifting nut is in threaded connection with the screw arranged on the upper portion of the centering main body.
The pipe fitting fixing device for grinding the inner circle of the fragile thin-wall pipe fitting is characterized in that an anti-rotation screw is arranged on the outer edge surface of the centering main body, and the end part of the anti-rotation screw is inserted into a groove in the outer edge surface of the lifting nut.
The pipe fitting fixing device for grinding the inner circle of the fragile thin-wall pipe fitting is characterized in that a flange plate extending outwards is arranged on the outer edge surface of the left end of the fixing sleeve, and a plurality of connecting holes are formed in the flange plate.
Due to the adoption of the technical scheme, the invention has the following beneficial effects:
according to the invention, the pipe fitting to be ground is arranged on the inner edge surface of the fixed sleeve, then the pipe fitting is fixed in the fixed sleeve through the right pressing flange, the left pressing flange and the centering assembly, the centering assembly can be independently adjusted, the concentric arrangement of the pipe fitting and the fixed sleeve can be ensured, and the like.
[ description of the drawings ]
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic cross-sectional structural view of the present invention;
FIG. 3 is a schematic structural view of a centering assembly of the present invention;
in the figure: 1. a flange plate; 2. fixing the sleeve; 3. a centering assembly; 3-1, a screw; 3-2, centering the main body; 3-3, anti-rotation screws; 3-4, lifting nuts; 3-5, a groove; 4. a right hold-down flange; 5. a right stop collar; 6. a left hold-down flange; 7. a left stop collar; 8. a sleeve; 9. a pipe fitting.
[ detailed description ] embodiments
The present invention can be explained in more detail with reference to the following examples; however, the present invention is not limited to these examples.
It should be noted that the directions or positional relationships indicated by "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., used in describing the structure of the present invention are based on the directions or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and thus, should not be construed as limiting the present invention.
Combine figure 1 ~ 3 a pipe fitting fixing device for circle in fragile thin-walled tube of grinding, including adapter sleeve 2, centering subassembly 3, right flange 4 and left flange 6 the equipartition is equipped with at least three centering subassembly 3 on the outer fringe face of 2 both ends heads of adapter sleeve respectively, during concrete implementation, the preferred equipartition of centering subassembly 3 sets up to four, and the centering subassembly 3 of four directions can be adjusted alone to guarantee that adapter sleeve 2 and pipe fitting 9 set up with one heart, the lower extreme head of the last lifting nut 3-4 of centering subassembly 3 passes the outer fringe face of adapter sleeve 2 and sets up the contact of the 9 outer fringe faces of pipe fitting in adapter sleeve 2, is equipped with left flange 6 and right flange 4 formation respectively at the left and right both ends head of adapter sleeve 2 the pipe fitting fixing device for circle in the fragile thin-walled tube of grinding.
During concrete implementation, can be equipped with the sleeve pipe 8 of plastics material between the inner edge face of fixed sleeve 2 and the outer edge face of pipe fitting 9, then set up the lifting nut respectively and perforate in 8 both ends of sleeve pipe corresponding 3 positions of centering assembly, be equipped with the left stop collar 7 of nylon material between left hold-down flange 6 and sleeve pipe 8. A right limit sleeve 5 made of nylon is arranged between the right hold-down flange 4 and the sleeve 8.
Further, the left hold-down flange 6 is fixed on the left end face of the fixed sleeve 2 through bolts. And the right pressing flange 4 is fixed on the right end surface of the fixed sleeve 2 through a bolt.
Further, as shown in fig. 1, at least three centering assembly mounting platforms are respectively and uniformly arranged on the outer edge surfaces of the two ends of the fixed sleeve 2, and lifting nut through holes penetrating to the inner edge surface of the fixed sleeve 2 are formed in the centering assembly mounting platforms.
Further, the centering assembly 3 comprises a screw rod 3-1, a centering main body 3-2 and a lifting nut 3-4, the lifting nut 3-4 is arranged in the middle of the centering main body 3-2, internal threads of the lifting nut 3-4 are connected with the screw rod 3-1 arranged on the upper portion of the centering main body 3-2 in a threaded mode, an anti-rotation screw 3-3 is arranged on the outer edge face of the centering main body 3-2, and the end portion of the anti-rotation screw 3-3 is connected in a groove 3-5 in the outer edge face of the lifting nut 3-4 in an inserted mode.
Furthermore, the outer edge surface of the left end of the fixed sleeve 2 is provided with a flange plate 1 extending outwards, and the flange plate 1 is provided with a plurality of connecting holes. The flange 1 is used primarily for connecting two fixed sleeves 2 together, and for grinding longer pipe sections 9.
The use method of the centering component 3 in the invention is that, as shown in fig. 3, a screw 3-1 is firstly screwed, at this time, because the screw 3-1 can only rotate and can not move up and down, when the screw 3-1 is screwed, a lifting nut 3-4 is driven to ascend or descend, in the use process, in order to prevent the lifting nut 3-4 from rotating along with the screw 3-1, a groove 3-5 is arranged on the outer edge surface of the lifting nut 3-4, and then an anti-rotation screw 3-3 is inserted into the groove 3-5, so that the anti-rotation effect can be achieved, the ascending and descending stroke of the lifting nut 3-4 can also be limited, and the specific stroke depends on the length of the groove 3-5.
When the device is specifically implemented, firstly, a plastic sleeve 8 is arranged in a fixed sleeve 2, two groups of centering assemblies 3 are arranged on the excircle of the fixed sleeve 2, each group of centering assemblies 3 comprises four centering assemblies 3, the four centering assemblies 3 are uniformly distributed on the outer edge surface of the fixed sleeve 2, two groups of four holes which need to be distributed are arranged on the sleeve 8, a pipe fitting 9 is arranged in the inner hole of the sleeve 8, and lifting nuts 3-4 on the centering assemblies 3 penetrate through the two groups of holes on the sleeve 8 and extend into the fixed sleeve 2 to support the excircle of the pipe fitting 9. The four centring elements 3 can be adjusted individually, ensuring that the breakable tube 9 is concentric with the fixed sleeve 2.
When the device is implemented, the two ends of the fixed sleeve 2 are respectively provided with a section of outer edge surface with the same size, and the outer edge surfaces are used for positioning the V-shaped blocks during assembly, so that the fragile pipe fitting 9 can be conveniently adjusted to be concentric with the fixed sleeve 2; when in processing, the clamping device is used for clamping the chuck and supporting the center frame, and is convenient for the concentric rotation of the fragile pipe fitting 9 and the main shaft of the processing equipment, and the like.
The invention is not only suitable for fixing the silicon rotary target material during grinding, but also suitable for fixing and supporting monocrystalline silicon, polycrystalline silicon, sapphire, silicon carbide, silicon nitride, ceramics, quartz and other materials during grinding.
The present invention is not described in detail in the prior art.
The embodiments selected for the purpose of disclosing the invention, are presently considered to be suitable, it being understood, however, that the invention is intended to cover all variations and modifications of the embodiments which fall within the spirit and scope of the invention.
Claims (10)
1. The utility model provides a pipe fitting fixing device for circle in fragile thin-walled tube of grinding, includes fixed sleeve (2), centering subassembly (3), right hold-down flange (4) and left hold-down flange (6), characterized by: the utility model discloses a grinding device for pipe fitting, including fixed sleeve pipe (2), the outer marginal face of fixed sleeve pipe (2) both ends head is gone up the equipartition respectively and is equipped with at least three centering subassembly (3), the lower extreme head of lifting nut (3-4) on centering subassembly (3) passes the outer marginal face of fixed sleeve pipe (2) and sets up pipe fitting (9) outer marginal face contact in fixed sleeve pipe (2), is equipped with left hold-down flange (6) and right hold-down flange (4) formation respectively at fixed sleeve pipe (2) left and right both ends head be used for the interior pipe fitting fixing device of circle of fragile thin-walled pipe fitting of grinding.
2. The tube holding device for grinding the inner circumference of a fragile thin-walled tube as set forth in claim 1, wherein: and a sleeve (8) is arranged between the inner edge surface of the fixed sleeve (2) and the outer edge surface of the pipe fitting (9).
3. The tube holding device for grinding the inner circumference of a fragile thin-walled tube as set forth in claim 1, wherein: a left limit sleeve (7) is arranged between the left pressing flange (6) and the sleeve (8).
4. The tube holding device for grinding the inner circumference of a fragile thin-walled tube as set forth in claim 1, wherein: and the left hold-down flange (6) is fixed on the left end surface of the fixed sleeve (2) through a bolt.
5. The tube holding device for grinding the inner circumference of a fragile thin-walled tube as set forth in claim 1, wherein: a right limit sleeve (5) is arranged between the right pressing flange (4) and the sleeve (8).
6. The tube holding device for grinding the inner circumference of a fragile thin-walled tube as set forth in claim 1, wherein: and the right pressing flange (4) is fixed on the right end face of the fixed sleeve (2) through a bolt.
7. The tube holding device for grinding the inner circumference of a fragile thin-walled tube as set forth in claim 1, wherein: at least three centering assembly mounting platforms are uniformly distributed on the outer edge surfaces of the two ends of the fixed sleeve (2), and lifting nut through holes penetrating to the inner edge surface of the fixed sleeve (2) are formed in the centering assembly mounting platforms.
8. The tube holding device for grinding the inner circumference of a fragile thin-walled tube as set forth in claim 1, wherein: the centering assembly (3) comprises a screw rod (3-1), a centering main body (3-2) and a lifting nut (3-4), the lifting nut (3-4) is arranged in the middle of the centering main body (3-2), and the internal thread of the lifting nut (3-4) is in threaded connection with the screw rod (3-1) arranged on the upper portion of the centering main body (3-2).
9. The tube fitting fixture for grinding the inside diameter of a frangible thin-walled tube as defined in claim 8, wherein: an anti-rotation screw (3-3) is arranged on the outer edge surface of the centering main body (3-2), and the end part of the anti-rotation screw (3-3) is inserted into a groove (3-5) on the outer edge surface of the lifting nut (3-4).
10. The tube holding device for grinding the inner circumference of a fragile thin-walled tube as set forth in claim 1, wherein: the outer edge face of the left end of the fixed sleeve (2) is provided with a flange plate (1) extending outwards, and the flange plate (1) is provided with a plurality of connecting holes.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010367815.9A CN111571431A (en) | 2020-04-30 | 2020-04-30 | Pipe fitting fixing device for grinding inner circle of fragile thin-wall pipe fitting |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010367815.9A CN111571431A (en) | 2020-04-30 | 2020-04-30 | Pipe fitting fixing device for grinding inner circle of fragile thin-wall pipe fitting |
Publications (1)
Publication Number | Publication Date |
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CN111571431A true CN111571431A (en) | 2020-08-25 |
Family
ID=72120740
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202010367815.9A Withdrawn CN111571431A (en) | 2020-04-30 | 2020-04-30 | Pipe fitting fixing device for grinding inner circle of fragile thin-wall pipe fitting |
Country Status (1)
Country | Link |
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CN (1) | CN111571431A (en) |
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2020
- 2020-04-30 CN CN202010367815.9A patent/CN111571431A/en not_active Withdrawn
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Application publication date: 20200825 |
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WW01 | Invention patent application withdrawn after publication |