CN111567896A - Circumferential surface acoustic wave heating element - Google Patents
Circumferential surface acoustic wave heating element Download PDFInfo
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- CN111567896A CN111567896A CN202010490419.5A CN202010490419A CN111567896A CN 111567896 A CN111567896 A CN 111567896A CN 202010490419 A CN202010490419 A CN 202010490419A CN 111567896 A CN111567896 A CN 111567896A
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- piezoelectric substrate
- interdigital electrode
- heating element
- surface acoustic
- electrode structure
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 59
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 31
- 239000000758 substrate Substances 0.000 claims abstract description 42
- 230000001681 protective effect Effects 0.000 claims abstract description 10
- 239000010409 thin film Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 5
- 239000010408 film Substances 0.000 claims description 5
- 239000013078 crystal Substances 0.000 claims description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- 235000019504 cigarettes Nutrition 0.000 abstract description 32
- 230000008901 benefit Effects 0.000 abstract description 4
- 230000005284 excitation Effects 0.000 abstract description 3
- 241000208125 Nicotiana Species 0.000 description 3
- 235000002637 Nicotiana tabacum Nutrition 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 150000001720 carbohydrates Chemical class 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 235000011389 fruit/vegetable juice Nutrition 0.000 description 2
- 230000036541 health Effects 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000779 smoke Substances 0.000 description 2
- 230000000391 smoking effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000001960 triggered effect Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003205 fragrance Substances 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920000052 poly(p-xylylene) Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000001953 sensory effect Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Images
Classifications
-
- A—HUMAN NECESSITIES
- A24—TOBACCO; CIGARS; CIGARETTES; SIMULATED SMOKING DEVICES; SMOKERS' REQUISITES
- A24F—SMOKERS' REQUISITES; MATCH BOXES; SIMULATED SMOKING DEVICES
- A24F40/00—Electrically operated smoking devices; Component parts thereof; Manufacture thereof; Maintenance or testing thereof; Charging means specially adapted therefor
- A24F40/40—Constructional details, e.g. connection of cartridges and battery parts
- A24F40/46—Shape or structure of electric heating means
Landscapes
- Resistance Heating (AREA)
Abstract
The invention discloses a circumferential surface acoustic wave heating element, which mainly comprises: the piezoelectric device comprises a piezoelectric substrate (11), an interdigital electrode structure and a protective base (3); the piezoelectric substrate (11) is cylindrical, and the inner wall of the cylinder at one end of the piezoelectric substrate is provided with a plurality of interdigital electrode structures; the upper end of the protection base (3) is sleeved in a cylinder of the piezoelectric substrate (11) with an interdigital electrode structure end, and an interdigital electrode structure is arranged between the outer wall of the upper end of the protection base (3) and the inner wall of the cylinder of the piezoelectric substrate (11). The circumferential surface acoustic wave heating element has the advantages of high heating efficiency, good thermal uniformity, no contact between a surface acoustic wave excitation source and a cigarette core, high safety coefficient and the like.
Description
Technical Field
The invention belongs to the technical field of heating non-burning cigarettes, and particularly relates to a circumferential surface acoustic wave heating element.
Background
In recent years, with the increasingly severe global cigarette control situation and the gradual rise of health consciousness of consumers, the defects of the traditional cigarette become more and more prominent, the cigarette which is not burnt by heating has the remarkable advantage of reducing the release amount of harmful ingredients, so that the cigarette is attracted by the global scope, and becomes the competitive focus of various big tobacco companies at home and abroad.
The heating element is a core component for heating the non-combustible cigarette, and the quality of the heating performance of the heating element directly influences the smoking experience and the safe health condition of a user. In the prior art, the common heating elements for heating the non-burning cigarettes are resistance type heating, which is divided into central resistance type heating and circumferential resistance type heating; the circumferential resistance heating generally utilizes a stainless steel pipe to wrap a flexible circuit board to circumferentially heat the cigarette which is not combusted. Although the technical application of circumferential resistance heating is mature, the following technical defects are generally existed: 1. the cigarette is heated by heat conduction, the heat generated by a heating element is conducted from the periphery of the heated non-combustible cigarette to the inside, the cigarette core close to a heat source part is easy to carbonize due to excessive heating, the cigarette core far away from the heat source part is insufficient in fragrance and effective component release amount due to insufficient heating, and the overall sensory quality is poor; 2. the heating element stainless steel tube is in large-area contact with the cigarette core, tar substances generated in the heating process of heating the non-burning cigarette are easy to sinter and adhere to the inner wall of the stainless steel tube, so that the electric heating performance of the heating element is gradually reduced, and the smoking experience of a user is influenced; 3. when the heating element is triggered to work by mistake under the condition that the cigarette is not heated and not combusted, the heat can be accumulated continuously, the continuous temperature rise can reach 500-600 ℃, and the safety risk is high.
The acoustic surface wave is a mechanical wave propagating along the surface of an elastic medium, and the acoustic surface wave is used by the applicant to actively pump the tobacco juice and perform non-contact atomization on the tobacco juice, so that a good effect is achieved, and the acoustic surface wave is disclosed in patent ZL 2018100769411. The applicant has made elaborate efforts to find that surface wave based heating elements can be used to achieve heating of non-combustible cigarettes.
Disclosure of Invention
The invention provides a circumferential surface acoustic wave heating element for heating a non-combustible cigarette, which realizes heating of the non-combustible cigarette by utilizing a heat effect generated by interaction between surface acoustic waves and polar molecules in the non-combustible cigarette.
The technical scheme adopted by the invention for solving the technical problems is as follows:
a circumferential surface acoustic wave heating element, comprising: the piezoelectric substrate 11, the interdigital electrode structure and the protective base 3;
the piezoelectric substrate 11 is cylindrical, and one or more interdigital electrode structures are arranged on the inner wall of the cylinder at one end of the piezoelectric substrate;
the upper end of the protection base 3 is sleeved in a cylinder of the piezoelectric substrate 11 with an interdigital electrode structure end, an interdigital electrode structure is arranged between the outer wall of the upper end of the protection base 3 and the inner wall of the cylinder of the piezoelectric substrate 11, and the outer wall of the protection base 3 and the inner wall of the cylinder of the piezoelectric substrate 11 form a seal to protect the interdigital electrode structure, but the operation of the interdigital electrode structure is not influenced.
Preferably, the inner wall of the piezoelectric substrate 11 and the surface of the interdigital electrode structure are coated with a protective film layer 14.
Preferably, the material of the piezoelectric substrate 11 includes a piezoelectric single crystal, a piezoelectric ceramic, or a piezoelectric thin film with a non-piezoelectric material as a supporting substrate.
Preferably, the interdigital electrode structure is a metal thin film of aluminum, gold, silver, platinum, or copper having a finger-crossing shape deposited on the surface of the piezoelectric substrate 11.
Compared with the prior art, the invention has the beneficial effects that:
1. the circumferential surface acoustic wave heating element heats the cigarette core through the 'internal friction heat' generated by the interaction between the surface acoustic wave and polar molecules such as water, alcohols, saccharides and the like in the heated non-combustible cigarette, and forms smoke, and the heating mechanism of the circumferential surface acoustic wave heating element is different from that of the conventional circumferential resistance heating element.
2. When the circumferential surface acoustic wave heating element is used, a cigarette which is not burnt and is heated is inserted into the cylinder body of the piezoelectric substrate 11, the surface acoustic waves are simultaneously excited by the plurality of interdigital electrode structures in the cylinder body, sound energy is absorbed in an all-around manner in the circumferential direction of the cigarette which is not burnt and is heated, polar molecules are promoted to move in a high frequency and collide with each other, and then the cigarette which is not burnt and is heated at different depths to generate heat. Therefore, the circumferential surface acoustic wave heating element has the advantages of high energy density, high heating efficiency and good thermal uniformity.
3. After the circumferential surface acoustic wave heating element is assembled, the surface acoustic wave excitation source, namely a plurality of interdigital electrode structures are not in contact with cigarettes for heating non-combustible cigarettes, so that the problem that tar substances are sintered and adhered on the surface acoustic wave excitation source and further the working performance of the heating element is influenced is effectively solved.
4. When the circumferential surface acoustic wave heating element is triggered to work by mistake under the condition that a cigarette is not heated and not burnt, the surface acoustic wave heating element shows a non-absorption normal propagation state on the piezoelectric substrate, the self heating value of the heating element is small, the surface temperature of the heating element is only introduced by the vibration damping loss of the piezoelectric substrate, and the safety risk of high temperature and high heat is avoided. The resistive heating element in the prior art is easy to cause high-temperature and high-heat safety risk due to dry burning.
Drawings
FIG. 1 is a schematic view of a circumferential surface acoustic wave heating element of the present invention.
Description of reference numerals: 1. circumferential surface acoustic wave heating element, 11, piezoelectric substrate, 12, first interdigital electrode structure, 121, first tab, 122, second tab, 13, second interdigital electrode structure, 131, third tab, 132, fourth tab, 14, protective film layer, 151, first lead, 152, second lead, 3, protective base, 31, first electrode pad, 32, second electrode pad.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the accompanying drawings and embodiments.
A schematic structural diagram of the circumferential surface acoustic wave heating element of the present embodiment is shown in fig. 1, the circumferential surface acoustic wave heating element is cylindrical, and has two interdigital electrode structures, namely a first interdigital electrode structure 12 and a second interdigital electrode structure 13, which are located on the inner wall of the cylinder at one end of the cylindrical piezoelectric substrate 11; the surfaces of the piezoelectric substrate 11, the first interdigital electrode structure 12 and the second interdigital electrode structure 13 are provided with a protective film layer 14, and the protective film material is generally silicon dioxide, teflon, parylene or SU8-2002 photoresist and the like; the piezoelectric substrate 11 is made of piezoelectric single crystals (such as quartz, lithium niobate, lithium tantalate, bismuth germanate, etc.), piezoelectric ceramics (such as lead zirconate titanate ceramics, etc.), or piezoelectric thin films (such as zinc oxide thin films, aluminum nitride thin films, lithium niobate thin films, etc.) using non-piezoelectric materials such as monocrystalline silicon, diamond, etc. as supporting substrates, in the specific embodiment of the invention, the piezoelectric substrate 11 is preferably made of lithium niobate piezoelectric single crystals with Y-cut X128.68 DEG direction, the thickness, the electromechanical coupling coefficient, the temperature coefficient and the sound surface wave propagation speed are respectively 0.495mm, 5.5%, -72X10-6/° C and 3992m/s, the interdigital electrode structure is formed by depositing an aluminum thin film with a finger-crossing shape on the inner wall of the piezoelectric substrate 11 through a micro-nano processing technology, the electrode is led out from bus bars at two sides of the interdigital electrode structure, and the electrode tabs at two sides of the first interdigital electrode structure 12 are first electrode tabs 121, second electrode tabs, The second pole lug 122, the pole lugs on both sides of the second interdigital electrode structure 13 are a third pole lug 131 and a fourth pole lug 132; wherein the first tab 121 and the third tab 131 are connected together to be electrically connected with the first lead 151, and the second tab 122 and the fourth tab 132 are connected together to be electrically connected with the second lead 152; the protection base 3 is cylindrical, the upper end of the protection base is sleeved in a cylinder with an interdigital electrode structure end of the piezoelectric substrate 11, an interdigital electrode structure is arranged between the outer wall of the upper end of the protection base 3 and the inner wall of the cylinder of the piezoelectric substrate 11, the outer wall of the upper end of the protection base 3 and the inner wall of the cylinder of the piezoelectric substrate 11 form sealing to protect the interdigital electrode structure, but the operation of the interdigital electrode structure is not influenced, two electrodes which can be respectively connected with an external signal source are arranged at the bottom end of the protection base 3 and are two electrode pads, namely a first electrode pad 31 and a second electrode pad 32, and the first electrode pad 31 and the second electrode pad 32 are respectively and electrically connected with a first lead 151 and a second lead 152; the sleeve base 3 is made of non-conductive high-temperature resistant materials, such as ceramics, high polymer materials and the like.
The working principle of the circumferential surface acoustic wave heating element for heating the non-combustible cigarette in the embodiment is as follows: inserting a cigarette which is not burnt and is heated into the cylinder body of the piezoelectric substrate 11, wherein the outer wall of the upper end of the protective base 3 and the inner wall of the cylinder of the piezoelectric substrate 11 form a sealed space, and the first interdigital electrode structure 12 and the second interdigital electrode structure 13 are in the sealed space without influencing the work of the first interdigital electrode structure and the second interdigital electrode structure; an external power supply is electrified, the first interdigital electrode structure 12 and the second interdigital electrode structure 13 are electrically connected with an external signal source through a first electrode pad 31 and a second electrode pad 32 at the bottom end of the sleeve base 3, the first interdigital electrode structure 12 and the second interdigital electrode structure 13 are driven by alternating electric signals, the piezoelectric substrate 11 can generate periodic deformation due to the deflection of a charge center, an elastic sound field is excited in the inner wall of the piezoelectric substrate 11 through the inverse piezoelectric effect, the electric signals are converted into acoustic signals, then surface acoustic waves propagating along the inner wall surface of the piezoelectric substrate 11 are formed, when the surface acoustic waves are in contact with polar molecules such as water, alcohols and saccharides in the non-combustible heated cigarette, polar molecules can move violently and rub against each other, the non-combustible heated cigarette can generate heat quickly, and smoke capable of being sucked by a user can be generated.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It will be understood by those skilled in the art that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (4)
1. A circumferential surface acoustic wave heating element, comprising: the piezoelectric device comprises a piezoelectric substrate (11), an interdigital electrode structure and a protective base (3);
the piezoelectric substrate (11) is cylindrical, and one or more interdigital electrode structures are arranged on the inner wall of the cylinder at one end of the piezoelectric substrate;
the upper end of the protection base (3) is sleeved in a cylinder of the piezoelectric substrate (11) with an interdigital electrode structure end, and an interdigital electrode structure is arranged between the outer wall of the upper end of the protection base (3) and the inner wall of the cylinder of the piezoelectric substrate (11).
2. A circumferential surface acoustic wave heating element, as set forth in claim 1, characterized in that said piezoelectric substrate (11) inner wall and interdigital electrode structure surface are coated with a protective film layer (14).
3. A circumferential surface acoustic wave heating element according to claim 1, wherein the material of said piezoelectric substrate (11) comprises piezoelectric single crystal, piezoelectric ceramic or piezoelectric thin film with non-piezoelectric material as a supporting substrate.
4. A circumferential surface acoustic wave heating element, as set forth in claim 1, wherein said interdigital electrode structure is a metal thin film of aluminum, gold, silver, platinum or copper having a finger-crossing shape deposited on the inner wall of said piezoelectric substrate (11).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202010490419.5A CN111567896B (en) | 2020-06-02 | Circumferential surface acoustic wave heating element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN202010490419.5A CN111567896B (en) | 2020-06-02 | Circumferential surface acoustic wave heating element |
Publications (2)
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CN111567896A true CN111567896A (en) | 2020-08-25 |
CN111567896B CN111567896B (en) | 2024-11-19 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113712265A (en) * | 2021-10-08 | 2021-11-30 | 海南摩尔兄弟科技有限公司 | Aerosol raw product, electronic atomizer and atomization system |
CN114009838A (en) * | 2021-11-25 | 2022-02-08 | 云南中烟工业有限责任公司 | High-conductivity oil surface acoustic wave atomizer with flexible connection structure |
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JP2008238058A (en) * | 2007-03-27 | 2008-10-09 | Matsushita Electric Works Ltd | Elastic surface wave atomizer |
JP2008304310A (en) * | 2007-06-07 | 2008-12-18 | Toppan Printing Co Ltd | Surface acoustic wave device and spherical surface acoustic wave element |
CN106174706A (en) * | 2016-08-31 | 2016-12-07 | 云南中烟工业有限责任公司 | A kind of acoustic surface wave atomizer |
CN206025223U (en) * | 2016-08-31 | 2017-03-22 | 云南中烟工业有限责任公司 | Oil storage formula surface acoustic wave atomizer |
CN107230819A (en) * | 2016-03-24 | 2017-10-03 | 成都灯岛科技有限公司 | It is integrated with the surface acoustic wave force sensors of antenna structure |
CN111165896A (en) * | 2020-02-26 | 2020-05-19 | 云南中烟工业有限责任公司 | Surface acoustic wave electron cigarette with adjustable smog particle diameter |
CN212414744U (en) * | 2020-06-02 | 2021-01-29 | 云南中烟工业有限责任公司 | Circumferential surface acoustic wave heating element |
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2008238058A (en) * | 2007-03-27 | 2008-10-09 | Matsushita Electric Works Ltd | Elastic surface wave atomizer |
JP2008304310A (en) * | 2007-06-07 | 2008-12-18 | Toppan Printing Co Ltd | Surface acoustic wave device and spherical surface acoustic wave element |
CN107230819A (en) * | 2016-03-24 | 2017-10-03 | 成都灯岛科技有限公司 | It is integrated with the surface acoustic wave force sensors of antenna structure |
CN106174706A (en) * | 2016-08-31 | 2016-12-07 | 云南中烟工业有限责任公司 | A kind of acoustic surface wave atomizer |
CN206025223U (en) * | 2016-08-31 | 2017-03-22 | 云南中烟工业有限责任公司 | Oil storage formula surface acoustic wave atomizer |
CN111165896A (en) * | 2020-02-26 | 2020-05-19 | 云南中烟工业有限责任公司 | Surface acoustic wave electron cigarette with adjustable smog particle diameter |
CN212414744U (en) * | 2020-06-02 | 2021-01-29 | 云南中烟工业有限责任公司 | Circumferential surface acoustic wave heating element |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113712265A (en) * | 2021-10-08 | 2021-11-30 | 海南摩尔兄弟科技有限公司 | Aerosol raw product, electronic atomizer and atomization system |
CN114009838A (en) * | 2021-11-25 | 2022-02-08 | 云南中烟工业有限责任公司 | High-conductivity oil surface acoustic wave atomizer with flexible connection structure |
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