CN111552024A - Special-shaped core fiber grating preparation technology based on 120-degree included angle reflection exposure superposition - Google Patents

Special-shaped core fiber grating preparation technology based on 120-degree included angle reflection exposure superposition Download PDF

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CN111552024A
CN111552024A CN202010233353.1A CN202010233353A CN111552024A CN 111552024 A CN111552024 A CN 111552024A CN 202010233353 A CN202010233353 A CN 202010233353A CN 111552024 A CN111552024 A CN 111552024A
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optical fiber
fiber
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phase mask
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CN111552024B (en
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汪杰君
胡挺
苑立波
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Guilin University of Electronic Technology
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02Optical fibres with cladding with or without a coating
    • G02B6/02057Optical fibres with cladding with or without a coating comprising gratings
    • G02B6/02076Refractive index modulation gratings, e.g. Bragg gratings
    • G02B6/02123Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
    • G02B6/02133Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference
    • G02B6/02138Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference based on illuminating a phase mask

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Abstract

The invention provides a device and a method for preparing a special-shaped core fiber grating based on reflection exposure superposition with an included angle of 120 degrees, wherein the device comprises a phase mask plate, a quartz slice, a fiber support plate and fiber matching liquid, wherein one surface of the fiber support plate is provided with a V-shaped groove plated with a metal reflection film and used for placing an optical fiber to be inscribed, the quartz slice covers the fiber support plate, the phase mask plate covers the quartz slice, and the fiber matching liquid is used for filling a gap between the V-shaped groove on the fiber support plate and the optical fiber to be inscribed. The method comprises the steps of device installation, device adjustment, optical fiber preparation, grating inscription, preparation completion and the like, can effectively improve the light intensity distribution of an inscription beam in the cross section of the optical fiber, and is suitable for grating inscription of various special-shaped core optical fibers.

Description

基于120度夹角反射曝光叠加的异形芯光纤光栅制备技术Fabrication technology of special-shaped core fiber grating based on 120-degree angle reflection and exposure stacking

(一)技术领域(1) Technical field

本发明涉及光纤光栅制备技术领域,具体涉及一种适用于异形芯光纤的光纤光栅制备技术。The invention relates to the technical field of fiber grating preparation, in particular to a fiber grating preparation technology suitable for special-shaped core fibers.

(二)背景技术(2) Background technology

光纤光栅指通过一定技术手段在光纤纤芯上构造折射率周期性变化而形成的光栅结构。刻写在单模光纤上的布拉格光纤光栅(FBG)是目前研究最成熟的光纤光栅,该类光栅具有优异的光学窄带滤波特性与传感特性,已经在光电子领域和光纤传感领域有着广泛的应用。近些年来,为满足通信与传感的需求,很多特殊光纤被设计和制作出来,如少模光纤、多芯光纤、环形芯光纤、多包层光纤等等,开展特殊光纤的光栅特性研究也逐年增多,如:魏颖(魏颖,焦明星.保偏光纤Bragg光栅传感特性的实验研究[J].红外与激光工程,2008(37):107-110.)指出在保偏光纤的快轴和慢轴上刻写的FBG对横向负载灵敏度存在差异,可应用到称重等领域;包维佳(包维佳.新型光纤布拉格光栅矢量应变传感器研究[D].西北大学,2018.)研究了在多包层光纤上刻写FBG并实现矢量应变测量;E.Lindley(LINDLEY E,MIN S-S,LEON-SAVAL S,et al.Demonstration of uniform multicorefiber Bragg gratings[J].Optics Express,2014,22(25):31575.)开展了多芯光纤的FBG刻写技术研究,该FBG可用于抑制太空探测中的噪声信号,在天体光子学领域有着非常重要的应用前景。Fiber grating refers to a grating structure formed by periodically changing the refractive index on the fiber core by certain technical means. Fiber Bragg gratings (FBGs) written on single-mode fibers are the most mature fiber gratings currently studied. This type of grating has excellent optical narrowband filtering and sensing properties, and has been widely used in the field of optoelectronics and fiber sensing. . In recent years, in order to meet the needs of communication and sensing, many special fibers have been designed and produced, such as few-mode fibers, multi-core fibers, ring-core fibers, multi-clad fibers, etc. Increasing year by year, such as: Wei Ying (Wei Ying, Jiao Xingxing. Experimental study on the sensing characteristics of polarization-maintaining fiber Bragg gratings [J]. Infrared and Laser Engineering, 2008(37): 107-110.) pointed out that in the polarization-maintaining fiber The FBGs written on the fast axis and the slow axis have different sensitivity to lateral loads, which can be applied to fields such as weighing; Bao Weijia (Bao Weijia. Research on New Fiber Bragg Grating Vector Strain Sensor [D]. Northwestern University, 2018.) Researched writing FBG on multi-clad fiber and realized vector strain measurement; E. Lindley (LINDLEY E, MIN S-S, LEON-SAVAL S, et al. Demonstration of uniform multicorefiber Bragg gratings [J]. Optics Express, 2014, 22 (25):31575.) carried out the research on the FBG writing technology of multi-core fiber, which can be used to suppress the noise signal in space exploration, and has a very important application prospect in the field of astrophotonics.

相位掩模板法是目前广泛使用的光纤光栅刻写方法,该方法通常使用紫外光照射相位掩模板形成衍射条纹,利用±1级衍射条纹侧面曝光光敏光纤制备FBG。该方法大大减低了对光源的相干性要求,而且制备的FBG的布拉格波长只取决于相位掩模板的条纹周期,减低了光栅制备工艺难度。基于紫外激光的相位掩模板法作为最普遍采用的FBG制备方法,为FBG的实用化与产业化奠定了基础。The phase mask method is a widely used method for writing fiber gratings. This method usually uses ultraviolet light to irradiate the phase mask to form diffraction fringes, and uses the ±1st order diffraction fringes to laterally expose the photosensitive fiber to prepare FBG. The method greatly reduces the coherence requirement of the light source, and the Bragg wavelength of the prepared FBG only depends on the fringe period of the phase mask, which reduces the difficulty of the grating preparation process. As the most commonly used FBG preparation method, the phase mask method based on ultraviolet laser has laid the foundation for the practical and industrialization of FBG.

基于紫外激光的相位掩模板方法也被尝试用于特殊光纤的光栅刻写,但由于特殊光纤的结构与单模光纤存在很大不同,部分特殊光纤属于异形芯光纤,即这类光纤的波导纤芯未处在光纤中心,而是分布在整个光纤界面内。因此,在采用相位掩模板制备光纤光栅时,由于光纤本身的柱状透镜效应,使得从掩模板出射的±1级衍射光束难于在整个光纤横截面上形成均匀光强分布,因而难以制备出高质量的光纤光栅。The phase mask method based on ultraviolet laser has also been tried to write gratings for special fibers. However, because the structure of special fibers is very different from that of single-mode fibers, some special fibers belong to special-shaped core fibers, that is, the waveguide core of such fibers. Not in the center of the fiber, but distributed throughout the fiber interface. Therefore, when a phase mask is used to prepare fiber gratings, due to the cylindrical lens effect of the fiber itself, it is difficult for the ±1st order diffracted beams emitted from the mask to form a uniform light intensity distribution on the entire fiber cross section, so it is difficult to prepare high-quality fiber gratings. fiber grating.

为解决上述问题,目前可查阅到两种方法:To solve the above problems, there are currently two methods available:

(1)文献(LINDLEY E,MIN S-S,LEON-SAVAL S,et al.Demonstration of uniformmulticore fiber Bragg gratings[J].Optics Express,2014,22(25):31575.)提出了一种改进方法:选择一段尺寸合适的石英毛细管,将毛细管一侧打磨一定厚度后抛光,将待刻写光纤插入该毛细管内,使相位掩模板的衍射光束从毛细管的侧抛面照射,以消除光纤本身的柱状透镜效应。(1) Literature (LINDLEY E, MIN S-S, LEON-SAVAL S, et al.Demonstration of uniformmulticore fiber Bragg gratings[J].Optics Express,2014,22(25):31575.) proposed an improved method: select A section of quartz capillary with a suitable size, grind one side of the capillary to a certain thickness and then polish it, insert the optical fiber to be written into the capillary, and make the diffracted beam of the phase mask irradiate from the side of the capillary to eliminate the cylindrical lens effect of the optical fiber itself.

(2)专利(授权号:CN 106249348B)提出一种切趾光纤光栅刻写方法,该方法建议在刻写光栅的同时旋转待刻写光纤,消除由于大芯径导致的光感折射率调制不对称性。(2) The patent (authorization number: CN 106249348B) proposes a method for writing an apodized fiber grating, which proposes to rotate the optical fiber to be written while writing the grating, so as to eliminate the asymmetry of the photosensitive refractive index modulation caused by the large core diameter.

在上述方法(1)中,对石英毛细管实现侧抛的工序复杂,加工时间长,并且为了能让光纤插入毛细管,毛细管内径必然要比光纤直径大,这两者之间填充的空气依然会对刻写结果产生影响;方法(2)中,FBG刻写的同时旋转待刻写光纤,光路的细微不对称性或旋转马达的轻微震动都会影响到FBG的刻写效果。In the above method (1), the process of side-throwing the quartz capillary is complicated, and the processing time is long, and in order to allow the optical fiber to be inserted into the capillary, the inner diameter of the capillary must be larger than the diameter of the optical fiber, and the air filled between the two will still affect the The writing result has an impact; in method (2), the fiber to be written is rotated while the FBG is writing, and the slight asymmetry of the optical path or the slight vibration of the rotating motor will affect the writing effect of the FBG.

(三)发明内容(3) Contents of the invention

本发明的目的在于提供一种基于120度夹角反射曝光叠加的异形芯光纤光栅制备技术。该技术可以均匀刻写光束在光纤内的分布,提高光栅刻写质量。The purpose of the present invention is to provide a special-shaped core fiber grating preparation technology based on 120-degree angle reflection exposure stacking. This technology can evenly write the distribution of the light beam in the fiber and improve the writing quality of the grating.

本发明的目的是这样实现的:The object of the present invention is achieved in this way:

发明一种适用于异形芯光纤的光栅制备装置,该装置由相位掩模板、石英薄片、光纤载板和光纤匹配液组成,光纤载板一面有V形槽,用于放置待刻写光纤,石英薄片盖在光纤载板上,相位掩模板盖在石英薄片上,光纤匹配液,用于填充光纤载板上V形槽与待刻写光纤之间的空隙;A grating preparation device suitable for special-shaped core optical fibers is invented. The device is composed of a phase mask plate, a quartz sheet, an optical fiber carrier plate and an optical fiber matching liquid. Covered on the optical fiber carrier, the phase mask is covered on the quartz sheet, and the optical fiber matching liquid is used to fill the gap between the V-shaped groove on the optical fiber carrier and the optical fiber to be written;

上述的相位掩模板,可选各种用于FBG刻写的相位掩模板;For the above-mentioned phase mask, various phase masks for FBG writing can be selected;

上述的石英薄片,长度与宽度不小于相位掩模板、厚度为50微米,材质为石英玻璃,在刻写用紫外光波段具有高透射率,能将相位掩模板产生的衍射光束无损的传输到下层的光纤载板,同时保护相位掩模板不被光纤载板上的待刻写光纤和光纤匹配液污染;The above-mentioned quartz flakes are not less than the phase mask in length and width, and have a thickness of 50 microns. They are made of quartz glass and have high transmittance in the ultraviolet wavelength band used for writing, which can transmit the diffracted beam generated by the phase mask to the lower layer without damage. Optical fiber carrier, while protecting the phase mask from being polluted by the optical fiber to be written and the optical fiber matching liquid on the optical fiber carrier;

上述的光纤载板,长度与宽度不小于石英薄片,所用材质在刻写用紫外光波段具有高透射率,载板一面的中心区域有一V形槽,槽方向与相位掩模板栅周期方向一致,槽两侧面镀有金属反射膜,在刻写用紫外光波段具有高反射率,槽两侧面的夹角为120度,槽深H与槽宽W由待刻写光纤包层直径D决定,计算公式为:

Figure BDA0002430062840000031
The above-mentioned optical fiber carrier has a length and width not less than the quartz flakes, and the material used has high transmittance in the ultraviolet wavelength band for writing. The central area of one side of the carrier has a V-shaped groove. The two sides are coated with metal reflective film, which has high reflectivity in the ultraviolet light band for writing. The angle between the two sides of the groove is 120 degrees. The groove depth H and groove width W are determined by the diameter D of the fiber cladding to be written. The calculation formula is:
Figure BDA0002430062840000031

上述的光纤匹配液,以水为溶剂,甘油为溶质,对刻写紫外光波段具有高透射率,通过精确控制水与甘油的比例获得与光纤包层一致的折射率。The above-mentioned optical fiber matching solution uses water as a solvent and glycerin as a solute, and has high transmittance for writing in the ultraviolet wavelength band. The refractive index consistent with the optical fiber cladding can be obtained by precisely controlling the ratio of water and glycerol.

发明一种适用于异形芯光纤的光栅制备方法,包括如下步骤:A method for preparing a grating suitable for a special-shaped core fiber is invented, comprising the following steps:

步骤1,装置安装:将本发明的光栅制备装置放置到光栅刻写平台中,调节刻写光束由上向下垂直照射在光栅制备装置的相位掩模板上;Step 1, device installation: place the grating preparation device of the present invention on the grating writing platform, and adjust the writing beam to vertically irradiate the phase mask of the grating preparation device from top to bottom;

步骤2,装置调节:移除光栅制备装置的相位掩模板和石英薄片,调节光纤载板的位置和高度,使刻写紫外光束聚焦在光纤载板的V形槽内;Step 2, device adjustment: remove the phase mask and the quartz sheet of the grating preparation device, adjust the position and height of the optical fiber carrier, so that the writing ultraviolet beam is focused in the V-shaped groove of the optical fiber carrier;

步骤3,光纤准备:剥离待刻写光纤上待刻写区域的涂覆层,剥离长度大于光纤载板的V形槽长度,用酒精擦拭干净后,放入V形槽内,滴入适量的光纤匹配液,轻轻移动待刻写光纤,使光纤匹配液完全填满V形槽与待刻写光纤之间的空隙,将石英薄片盖在光纤载板上,并确保排除两者之间的空气,将相位掩模板盖在石英薄片上,使用光纤夹具固定待刻写光纤,将待刻写光纤连接光栅刻写在线监测系统;Step 3, fiber preparation: strip the coating layer of the area to be written on the optical fiber to be written, the stripping length is greater than the length of the V-shaped groove of the optical fiber carrier, wipe it with alcohol, put it into the V-shaped groove, and drop an appropriate amount of optical fiber to match liquid, gently move the fiber to be written, so that the fiber matching liquid completely fills the gap between the V-groove and the fiber to be written, cover the silica sheet on the fiber carrier, and ensure that the air between the two is excluded, and the phase The mask plate is covered on the quartz sheet, and the optical fiber to be written is fixed by the optical fiber fixture, and the optical fiber to be written is connected to the grating and the on-line monitoring system;

步骤4,光栅刻写:启动激光器进行光栅刻写,使用光栅刻写在线监测系统观察光栅刻写效果,当光栅满足刻写要求后,关闭激光器和光栅刻写在线监测系统;Step 4, grating writing: start the laser for grating writing, use the grating writing online monitoring system to observe the grating writing effect, when the grating meets the writing requirements, turn off the laser and the grating writing online monitoring system;

步骤5,完成制备:断开光纤与光栅刻写在线监测系统的连接,移除光栅制备装置的相位掩模板和石英薄片,从光纤载板的V形槽内取出光纤,完成光栅制备。Step 5, complete the preparation: disconnect the optical fiber from the grating writing online monitoring system, remove the phase mask and the quartz sheet of the grating preparation device, take out the optical fiber from the V-shaped groove of the optical fiber carrier, and complete the grating preparation.

与现有技术相比,本发明的优点在于:Compared with the prior art, the advantages of the present invention are:

(1)使用光纤匹配液,消除了光束进入光纤后的会聚效应,从而使得刻写光束在光纤横截面上分布区域更广,光强分布更均匀;(1) The use of optical fiber matching liquid eliminates the convergence effect after the beam enters the optical fiber, so that the distribution area of the writing beam on the cross-section of the optical fiber is wider and the light intensity distribution is more uniform;

(2)V形槽的反射膜提高了刻写光束的利用率,实现从三个方向对光纤的照射,进一步改善了刻写光束在光纤横截面内的分布和强度;(2) The reflective film of the V-shaped groove improves the utilization rate of the writing beam, realizes the irradiation of the optical fiber from three directions, and further improves the distribution and intensity of the writing beam in the cross-section of the optical fiber;

(3)刻写装置可利用现有的微加工技术制作,制作周期短,加工精度高;(3) The writing device can be produced by using the existing micro-machining technology, with short production cycle and high machining accuracy;

(4)刻写过程操作步骤简单,可实现光栅的快速刻写、并且光栅的一致性有保证;(4) The operation steps of the writing process are simple, the rapid writing of the grating can be realized, and the consistency of the grating is guaranteed;

(四)附图说明(4) Description of drawings

图1为本发明的装置结构示意图;Fig. 1 is the device structure schematic diagram of the present invention;

图2为本发明可适用的部分光纤类型:(a)单模光纤结构示意图,(b)多模光纤结构示意图,(c)环形芯光纤结构示意图,(d)多芯光纤结构示意图;Fig. 2 is a part of optical fiber types applicable to the present invention: (a) a schematic diagram of the structure of a single-mode fiber, (b) a schematic diagram of the structure of a multi-mode fiber, (c) a schematic diagram of the structure of a ring core fiber, (d) a schematic diagram of the structure of a multi-core fiber;

图3为V形槽内刻写光束对光纤照射的原理示意图;3 is a schematic diagram of the principle of irradiating the optical fiber with the writing beam in the V-shaped groove;

图4为实施例2的俯视图;Fig. 4 is the top view of embodiment 2;

图5为实施例2的侧视图;Fig. 5 is the side view of embodiment 2;

图中:1-适用于异形芯光纤的光栅制备装置、101-相位掩模板、102-石英薄片、103-光纤载板、104-光纤匹配液、2-光学平台、3-准分子激光器、4-光阑、5-扩束镜、6-反射镜、7-柱透镜、8-三轴位移台、9-待刻写光纤、10-光纤夹具、11-光纤V形槽连接器、12-光栅刻写在线监测系统、13-刻写光束。In the figure: 1- Grating preparation device for special-shaped core fiber, 101- Phase mask, 102- Quartz sheet, 103- Fiber carrier, 104- Fiber matching liquid, 2- Optical platform, 3- Excimer laser, 4- -Aperture, 5-beam expander, 6-reflector, 7-cylindrical lens, 8-three-axis stage, 9-fiber to be written, 10-fiber clamp, 11-fiber V-groove connector, 12-grating Writing online monitoring system, 13-writing beam.

(五)具体实施方式(5) Specific implementation methods

本发明提出一种基于120度夹角反射曝光叠加的异形芯光纤光栅制备技术,图2列举了部分本发明可适用的光纤,本发明不仅可用于异形芯光纤的光栅制备,也可用于普通单模和多模光纤的光栅制备。光纤的选择对本发明的制备装置与制备方法没有影响,因此如下实例中未明确具体的光纤类型。The present invention proposes a special-shaped core fiber grating preparation technology based on 120-degree angle reflection and exposure stacking. Fig. 2 lists some of the applicable fibers of the present invention. Preparation of gratings for mode and multimode fibers. The selection of the optical fiber has no influence on the preparation device and preparation method of the present invention, so the specific optical fiber type is not specified in the following examples.

下面结合附图和具体实施例对本发明做进一步的详细说明。The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

实施例1:Example 1:

本实施例将结合图1和图3说明本发明的光栅制备装置结构与工作原理。In this embodiment, the structure and working principle of the grating preparation device of the present invention will be described with reference to FIG. 1 and FIG. 3 .

如图1所示,本发明的光栅制备装置1,包括相位掩模板101、石英薄片102、光纤载板103和光纤匹配液104,相位淹没板101盖在石英薄片102上,石英薄片102盖在光纤载板103上;相位掩模板101可选用各种刻写FBG的相位掩模板,石英薄片102长度与宽度不小于相位掩模板101,厚度为50微米,材质为石英玻璃,在刻写用紫外光波段具有高透射率,石英薄片102的作用在于将相位掩模板101与光纤载板103隔开一定距离,既可以保护相位掩模板101不被光纤载板103上的待刻写光纤9和光纤匹配液104污染,又能保证待刻写光纤9与相位掩模板101平行,且间距在相位掩模板101的衍射距离内。光纤载板103的长度与宽度不小于石英薄片102,厚度为2毫米,所用材质在刻写用紫外光波段具有高透射率,光纤载板103一面的中心区域有一V形槽,槽方向与相位掩模板101栅周期方向一致,槽两侧面的夹角为120度,若实现V形槽内恰好可放入光纤,即光纤包层圆截面与V形槽三边都相切,通过简单的几何关系计算可知,要求V形槽深度

Figure BDA0002430062840000051
宽度
Figure BDA0002430062840000052
式中D代表光纤包层直径,例如,针对单模光纤,其包层直径D=125±5微米,取D=130微米,计算可知槽深不小于140微米,槽宽不小于485微米。As shown in FIG. 1, the grating preparation device 1 of the present invention includes a phase mask 101, a quartz sheet 102, an optical fiber carrier 103 and an optical fiber matching liquid 104. The phase submerged plate 101 is covered on the quartz sheet 102, and the quartz sheet 102 is covered with On the optical fiber carrier 103; the phase mask 101 can be selected from various phase masks for writing FBG. The length and width of the quartz sheet 102 are not less than the phase mask 101, the thickness is 50 microns, and the material is quartz glass. With high transmittance, the function of the quartz sheet 102 is to separate the phase mask 101 from the optical fiber carrier 103 by a certain distance, which can protect the phase mask 101 from the optical fiber to be written 9 and the optical fiber matching liquid 104 on the optical fiber carrier 103. contamination, and can also ensure that the optical fiber 9 to be written is parallel to the phase mask 101 and the spacing is within the diffraction distance of the phase mask 101 . The length and width of the optical fiber carrier plate 103 are not less than the quartz flakes 102, and the thickness is 2 mm. The material used has high transmittance in the ultraviolet wavelength band used for writing. The grating period of the template 101 is in the same direction, and the angle between the two sides of the groove is 120 degrees. If the V-shaped groove can just fit the fiber, that is, the circular section of the fiber cladding is tangent to the three sides of the V-shaped groove, through a simple geometric relationship It can be seen from the calculation that the depth of the V-shaped groove is required
Figure BDA0002430062840000051
width
Figure BDA0002430062840000052
In the formula, D represents the diameter of the fiber cladding. For example, for a single-mode fiber, the cladding diameter is D=125±5 microns. Taking D=130 microns, the calculation shows that the groove depth is not less than 140 microns and the groove width is not less than 485 microns.

光纤载板103内V形槽两侧面镀有金属反射膜,能将刻写紫外光近100%的反射回V形槽内。通过精确控制光纤匹配液的折射率与光纤包层折射率一致,V形槽内可视为同一种均匀物质,如图3所示,刻写光束与V形槽两侧面的反射光束相当于三个有120度夹角的光束同时照射光纤,因此可有效的改善了均匀光束分布,提高光栅制备质量。The two sides of the V-shaped groove in the optical fiber carrier plate 103 are coated with a metal reflective film, which can reflect nearly 100% of the inscribed ultraviolet light back into the V-shaped groove. By precisely controlling the refractive index of the fiber matching liquid to be consistent with the refractive index of the fiber cladding, the V-shaped groove can be regarded as the same homogeneous material. As shown in Figure 3, the writing beam and the reflected beams on both sides of the V-shaped groove are equivalent to three The beam with an included angle of 120 degrees illuminates the optical fiber at the same time, so the uniform beam distribution can be effectively improved, and the quality of the grating preparation can be improved.

装置中使用的光纤匹配液以水为溶剂,甘油为溶剂,精确调配两者比例获得与光纤包层一致的折射率,用于填充待刻写光纤与V形槽之间的空隙,由紫外波段物质的吸收光谱特性可知,水和甘油两种物质的吸收波段都处在230nm以下的,采用248nm波长的紫外光作为刻写光源不会被该光纤匹配液吸收。The optical fiber matching liquid used in the device uses water as the solvent and glycerin as the solvent, and the ratio of the two is precisely adjusted to obtain the refractive index consistent with the optical fiber cladding, which is used to fill the gap between the optical fiber to be written and the V-shaped groove. It can be seen from the absorption spectrum characteristics of water and glycerin that the absorption bands of water and glycerin are both below 230nm, and the ultraviolet light of 248nm wavelength is used as the writing light source, which will not be absorbed by the fiber matching liquid.

实施例2Example 2

本实施例将结合图4和图5说明使用本发明的光栅制备装置进行光栅制备的步骤。In this embodiment, the steps of preparing gratings by using the grating preparation device of the present invention will be described with reference to FIG. 4 and FIG. 5 .

步骤1,光路搭建:为实现光栅制备,除本发明的光栅制备装置1外,还需要的部件包括:光学平台2、准分子激光器3、光阑4、扩束镜5、反射镜6、柱透镜7、三轴位移台8、光纤夹具10、光纤V形连接器11和光栅刻写在线监测系统12。准分子激光器3发射高能量的紫外刻写光束13,光阑4用于从准分子激光器3发出的光束13中取出光强均匀的光斑,扩束镜5用于将光阑4获取的光斑扩大到满足光栅刻写需要,反射镜6用于将刻写光束从水平方向调节成垂直方向,满足光栅制备装置1的需要,柱透镜7将刻写光束13在光纤截面方向上压缩,以提高能量密度,光栅制备装置1固定在三轴位移台8上,通过调节三轴位移台8可实现调节光栅制备装置1的位置与高度,光纤夹具10分布在三轴位移台8两侧,用于固定待刻写光纤9,避免刻写过程中光纤的位置变化影响光栅刻写质量,光纤V形连接器11用于将待刻写光纤9接入光栅刻写在线监测系统12,光栅刻写在线监测系统12用于实时监测待刻写光纤9的反射谱和透射谱,光学平台2用于固定上述光学部件,避免环境振动对光栅刻写的影响;Step 1, optical path construction: in order to realize the grating preparation, in addition to the grating preparation device 1 of the present invention, the required components include: an optical platform 2, an excimer laser 3, a diaphragm 4, a beam expander 5, a mirror 6, a column The lens 7 , the three-axis displacement stage 8 , the optical fiber clamp 10 , the optical fiber V-shaped connector 11 and the grating writing online monitoring system 12 . The excimer laser 3 emits a high-energy ultraviolet writing beam 13, the diaphragm 4 is used to take out a light spot with uniform light intensity from the beam 13 emitted by the excimer laser 3, and the beam expander 5 is used to expand the light spot obtained by the diaphragm 4 to To meet the needs of grating writing, the mirror 6 is used to adjust the writing beam from the horizontal direction to the vertical direction, to meet the needs of the grating preparation device 1, and the cylindrical lens 7 compresses the writing beam 13 in the direction of the optical fiber section to improve the energy density. The device 1 is fixed on the three-axis displacement stage 8, and the position and height of the grating preparation device 1 can be adjusted by adjusting the three-axis displacement stage 8. The optical fiber clamps 10 are distributed on both sides of the three-axis displacement stage 8, and are used for fixing the optical fiber 9 to be written. , to avoid the position change of the optical fiber during the writing process from affecting the grating writing quality, the optical fiber V-shaped connector 11 is used to connect the optical fiber 9 to be written to the grating writing online monitoring system 12, and the grating writing online monitoring system 12 is used for real-time monitoring of the optical fiber 9 to be written. The optical table 2 is used to fix the above-mentioned optical components to avoid the influence of environmental vibration on the grating writing;

步骤2,参数调节:启动准分子激光器3,设置脉冲频率和能量,移除光栅制备装置1上的相位掩模板101和石英薄片102,通过三轴位移台8调节光栅制备装置1的位置和高度,使刻写光束13聚焦在光纤载板103的V形槽内;Step 2, parameter adjustment: start the excimer laser 3, set the pulse frequency and energy, remove the phase mask 101 and the quartz slice 102 on the grating preparation device 1, adjust the position and height of the grating preparation device 1 through the three-axis stage 8 , so that the writing beam 13 is focused in the V-shaped groove of the optical fiber carrier 103;

步骤3,放置光纤:剥离待刻写光纤9上待刻写区域的涂覆层,剥离长度大于光纤载板103的V形槽长度,用酒精擦拭干净后,放入光纤载板103的V形槽内,滴入适量的光纤匹配液104,轻轻移动待刻写光纤9,使光纤匹配液104完全填满V形槽与待刻写光纤9之间的空隙,将石英薄片102盖在光纤载板103上,确保排除两者之间的空气,将相位掩模板101盖在石英薄片102上,将光栅制备装置1两端的待刻写光纤9用光纤夹具10固定,用光纤V形连接器11将待刻写光纤9接入光栅刻写在线监测系统12;Step 3, placing the optical fiber: strip the coating layer of the to-be-written area on the optical fiber 9 to be written, the stripping length is greater than the length of the V-shaped groove of the optical fiber carrier 103, wipe it with alcohol, and put it into the V-shaped groove of the optical fiber carrier 103 , drop an appropriate amount of optical fiber matching liquid 104, gently move the optical fiber 9 to be written, so that the optical fiber matching liquid 104 completely fills the gap between the V-shaped groove and the optical fiber 9 to be written, and cover the quartz sheet 102 on the optical fiber carrier plate 103 , make sure to remove the air between the two, cover the phase mask 101 on the quartz sheet 102, fix the optical fibers 9 to be written at both ends of the grating preparation device 1 with the optical fiber clamp 10, and use the optical fiber V-shaped connector 11 to connect the optical fibers to be written. 9. Access the grating writing online monitoring system 12;

步骤4,刻写光栅:提高准分子激光器3的输出能量进行光栅刻写,同时使用光栅刻写在线监测系统12观察光栅刻写效果,当光栅满足刻写要求后,关闭准分子激光器3和光栅刻写在线监测系统12;Step 4, write grating: increase the output energy of the excimer laser 3 to perform grating writing, and use the grating writing online monitoring system 12 to observe the grating writing effect. When the grating meets the writing requirements, turn off the excimer laser 3 and the grating writing online monitoring system 12 ;

步骤5,完成制备:打开光纤V形连接器11,打开光纤夹具10,移除相位掩模板101和石英薄片102,从光纤载板103中取出光纤9,完成光栅制备。Step 5, complete the preparation: open the optical fiber V-shaped connector 11, open the optical fiber clamp 10, remove the phase mask 101 and the quartz sheet 102, take out the optical fiber 9 from the optical fiber carrier plate 103, and complete the grating preparation.

Claims (6)

1.一种基于120度夹角反射曝光叠加的异形芯光纤光栅制备装置,其特征是:包括相位掩模板、石英薄片、光纤载板和光纤匹配液,光纤载板一面有V形槽,用于放置待刻写光纤,石英薄片盖在光纤载板上,相位掩模板盖在石英薄片上,光纤匹配液,用于填充光纤载板上V形槽与待刻写光纤之间的空隙。1. a special-shaped core fiber grating preparation device based on 120 degree angle reflection exposure stacking, it is characterized in that: comprise phase mask plate, quartz sheet, optical fiber carrier plate and optical fiber matching liquid, the optical fiber carrier plate has V-shaped groove on one side, with For placing the optical fiber to be written, the quartz sheet is covered on the optical fiber carrier, the phase mask is covered on the quartz sheet, and the optical fiber matching liquid is used to fill the gap between the V-shaped groove on the optical fiber carrier and the optical fiber to be written. 2.根据权利要求1所述的光纤载板,其特征是:所用材质在刻写用紫外光波段具有高透射率,载板一面的中心位置有一V形槽,槽方向与相位掩模板栅周期方向一致,槽两侧面镀有金属反射膜,在刻写用紫外光波段具有高反射率,槽两侧面的夹角为120度,槽深H与槽宽W由待刻写光纤包层直径D决定,计算公式为:
Figure FDA0002430062830000011
2. The optical fiber carrier according to claim 1 is characterized in that: the material used has high transmittance in the ultraviolet wavelength band for writing, and the center position of one side of the carrier has a V-shaped groove, and the direction of the groove is the same as that of the phase mask grid period. Consistently, both sides of the groove are coated with a metal reflective film, which has high reflectivity in the ultraviolet light band for writing. The angle between the two sides of the groove is 120 degrees. The groove depth H and groove width W are determined by the diameter D of the fiber cladding to be written. Calculate The formula is:
Figure FDA0002430062830000011
3.根据权利要求1所述的石英薄片,其特征是:长度与宽度不小于相位掩模板、厚度为50微米,材质为石英玻璃,在刻写用紫外光波段具有高透射率,能将相位掩模板产生的衍射光束无损的传输到下层的光纤载板,同时保护相位掩模板不被光纤载板上的待刻写光纤和光纤匹配液污染。3. Quartz flake according to claim 1, is characterized in that: length and width are not less than phase mask plate, thickness is 50 microns, material is quartz glass, has high transmittance in the ultraviolet wave band for writing, can phase mask. The diffracted beam generated by the template is transmitted to the lower fiber carrier without damage, while protecting the phase mask from being polluted by the fiber to be written and the fiber matching liquid on the fiber carrier. 4.根据权利要求1所述的相位掩模板,其特征是:可选各种用于FBG刻写的相位掩模板。4. The phase mask according to claim 1, characterized in that: various phase masks for FBG writing can be selected. 5.根据权利要求1所述的光纤匹配液,其特征是:以水为溶剂,甘油为溶质,对刻写紫外光波段具有高透射率,通过精确控制水与甘油的比例获得与光纤包层一致的折射率。5. The optical fiber matching solution according to claim 1, characterized in that: using water as a solvent and glycerol as a solute, it has high transmittance for writing the ultraviolet wavelength band, and is obtained by accurately controlling the ratio of water and glycerol to be consistent with the optical fiber cladding. the index of refraction. 6.一种基于120度夹角反射曝光叠加的异形芯光纤光栅制备方法,其特征在于:包括如下步骤:6. A special-shaped core fiber grating preparation method based on 120-degree included angle reflection and exposure stacking, is characterized in that: comprising the following steps: 步骤1:将本发明的光栅制备装置放置到光栅刻写平台中,调节刻写光束由上向下垂直照射在光栅制备装置的相位掩模板上;Step 1: place the grating preparation device of the present invention on the grating writing platform, and adjust the writing beam to vertically irradiate the phase mask of the grating preparation device from top to bottom; 步骤2:移除光栅制备装置的相位掩模板和石英薄片,调节光纤载板的位置和高度,使刻写紫外光束聚焦在光纤载板的V形槽内;Step 2: remove the phase mask and the quartz sheet of the grating preparation device, adjust the position and height of the optical fiber carrier, so that the writing ultraviolet beam is focused in the V-shaped groove of the optical fiber carrier; 步骤3:剥离待刻写光纤上待刻写区域的涂覆层,剥离长度大于光纤载板的V形槽长度,用酒精擦拭干净后,放入V形槽内,滴入适量的光纤匹配液,轻轻移动待刻写光纤,使光纤匹配液完全填满V形槽与待刻写光纤之间的空隙,将石英薄片盖在光纤载板上,确保排除两者之间的空气,将相位掩模板盖在石英薄片上,使用光纤夹具固定待刻写光纤,将待刻写光纤连接光栅刻写在线监测系统;Step 3: Strip off the coating on the area to be written on the optical fiber to be written. The stripping length is longer than the length of the V-shaped groove of the optical fiber carrier. After wiping it with alcohol, put it into the V-shaped groove, drop an appropriate amount of fiber matching liquid, and lightly Gently move the fiber to be written, so that the fiber matching liquid completely fills the gap between the V-shaped groove and the fiber to be written, cover the quartz sheet on the fiber carrier, make sure to remove the air between the two, and cover the phase mask on the fiber carrier. On the quartz sheet, use the optical fiber fixture to fix the optical fiber to be written, and connect the optical fiber to be written to the grating and write the online monitoring system; 步骤4:启动激光器进行光栅刻写,使用光栅刻写在线监测系统观察光栅刻写效果,当光栅满足刻写要求后,关闭激光器和光栅刻写在线监测系统;Step 4: Start the laser for grating writing, use the grating writing online monitoring system to observe the grating writing effect, when the grating meets the writing requirements, turn off the laser and the grating writing online monitoring system; 步骤5:断开光纤与光栅刻写在线监测系统的连接,移除光栅制备装置的相位掩模板和石英薄片,从光纤载板的V形槽内取出光纤,完成光栅制备。Step 5: Disconnect the optical fiber from the grating writing online monitoring system, remove the phase mask and the quartz sheet of the grating preparation device, and take out the optical fiber from the V-shaped groove of the optical fiber carrier to complete the grating preparation.
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CN116520484B (en) * 2023-07-03 2023-09-22 上海频准激光科技有限公司 Fiber grating inscription method and device and fiber grating F-P cavity
CN118642222A (en) * 2024-08-16 2024-09-13 长飞(武汉)光系统股份有限公司 A roll-to-roll fiber grating and array continuous writing system

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