CN111551880B - High-sensitivity magnetic conductivity sensor based on cavity local field enhancement - Google Patents
High-sensitivity magnetic conductivity sensor based on cavity local field enhancement Download PDFInfo
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- 229910052751 metal Inorganic materials 0.000 claims abstract description 39
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- 230000005284 excitation Effects 0.000 claims abstract description 14
- 230000035699 permeability Effects 0.000 claims description 27
- 230000005540 biological transmission Effects 0.000 claims description 14
- 230000008859 change Effects 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 14
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- 238000001514 detection method Methods 0.000 abstract description 3
- 238000012360 testing method Methods 0.000 description 10
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- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
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- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/12—Measuring magnetic properties of articles or specimens of solids or fluids
- G01R33/1223—Measuring permeability, i.e. permeameters
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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Abstract
A high-sensitivity magnetic conductivity sensor based on cavity local field enhancement is a two-port network and comprises an excitation waveguide with an electromagnetic wave incident port and a receiving waveguide with an electromagnetic wave emergent port, wherein the excitation waveguide and the receiving waveguide are respectively connected with two opposite ends of a metal cavity filled with air, a macroscopic doping column body with a hollow structure is arranged in the center of the metal cavity, a micro-flow pipeline for loading a sample to be detected is arranged in the macroscopic doping column body along the length direction of the column, four side walls of the macroscopic doping column body are made of metal, one side wall of the macroscopic doping column body is provided with a groove along the length direction of the column, a plurality of lumped capacitors are welded and loaded on the groove, the electromagnetic wave incident port and the electromagnetic wave emergent port are oppositely arranged, and the length direction of the column is vertical to the electromagnetic wave incident and emergent directions, the invention has good application prospect in the aspects of magnetic substance detection, metal flaw detection and micro-channel biomedical chips.
Description
Technical Field
The invention belongs to the technical field of material magnetic conductivity characteristic sensing, and particularly relates to a high-sensitivity magnetic conductivity sensor based on cavity local field enhancement.
Background
The measurement and monitoring of magnetic properties of materials has important applications in a number of fields. In the field of metallurgy, the magnetic permeability of a metallic material can reflect the quality of the metallic material and the internal defect conditions. The urban pollution can bring magnetic elements such as iron, cobalt, nickel and the like into the environment to change the magnetic permeability of the soil, so that the monitoring of the magnetic properties of the soil also plays an important role in monitoring and protecting the ecological environment. In addition, the health condition of the organism can be regularly reflected by the magnetic permeability fluctuation of biological tissues (such as blood, brain tissues and the like), and clinical medical diagnosis is facilitated.
However, conventional permeability testing schemes suffer from drawbacks in terms of sensitivity, operating frequency or structural simplicity. The magnetic scale test scheme can only aim at ferromagnetic materials with large magnetic permeability, and the working frequency is usually limited to direct current and low-frequency alternating current frequency bands. The coil method is another commonly used permeability test method. The principle is that the induced electromotive force or the induced current of the electrified coil is tested, and the magnetic property of a substance to be tested in the coil is calculated. However, the multi-turn coil structure is often large in size, difficult to integrate with a planar circuit/system, and subject to crosstalk of an external electromagnetic environment, and faces a limitation of low test frequency. The magnetic permeability of the material in the microwave band can be tested by measuring the change of the scattering parameter of the transmission line loaded with the magnetic medium, but the scheme is not sensitive to the tiny change of the magnetic permeability, so that the method is difficult to be applied to the precise test and sensing of the magnetic permeability of weak magnetic substances (such as biological tissues, soil and the like). It is seen that the development of high frequency, high sensitivity, easy to integrate permeability sensors is essential.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide a high-sensitivity magnetic conductivity sensor based on cavity local field enhancement.
In order to achieve the purpose, the invention adopts the technical scheme that:
a high-sensitivity magnetic conductivity sensor based on cavity local field enhancement is a two-port network and comprises an excitation waveguide 2 with an electromagnetic wave incident port 1 and a receiving waveguide 7 with an electromagnetic wave exit port 8, wherein the excitation waveguide 2 and the receiving waveguide 7 are respectively connected with two opposite ends of a metal cavity 3 filled with air, a macroscopic doping column body 4 with a hollow structure is arranged at the center of the metal cavity 3, a micro-flow pipeline 5 for loading a sample to be detected is arranged in the macroscopic doping column body 4 along the column length direction, four side walls of the macroscopic doping column body 4 are made of metal, a groove in the column length direction is formed in one side wall, a plurality of lumped capacitors 6 are welded and loaded on the groove, the electromagnetic wave incident port 1 and the electromagnetic wave exit port 8 are arranged oppositely, and the column length direction is vertical to the electromagnetic wave incident and exit directions.
The excitation waveguide 2 and the receiving waveguide 7 both operate in a fundamental mode TE10 mode, and electromagnetic waves are fed from the electromagnetic wave input port 1 and received at the electromagnetic wave output port 8.
The height of the metal cavity 3 and the macroscopic doped column 4 is h, the working wavelength of the sensor is about twice of the height h, and near the working wavelength, the metal cavity 3 works in a critical conduction mode to present sensitivity and generate strong resonance with the macroscopic doped column 4 loaded with the lumped capacitor 6 to generate 103Transmission peak of magnitude.
According to the macroscopic doping theory, the distribution rule of the magnetic field in the cross section of the metal cavity 3 is as follows: the magnetic field of the area outside the macroscopic doping column 4 is uniformly distributed; the magnetic field inside the macro-doped column 4 is hundreds times stronger than the magnetic field outside the macro-doped column, and the magnetic field enhancement factor is proportional to the ratio of the cross-sectional area of the metal cavity 3 to the cross-sectional area of the macro-doped column 4.
The metal cavity 3 is made by a numerical control cavity milling process, the adopted material is aluminum alloy, and the conductivity is 3.5 multiplied by 107S/m, the excitation waveguide 2 and the receiving waveguide 7 are filled with Teflon material with dielectric constant of 2.1.
The groove is arranged on the side wall of the macroscopic doping column body 4 far away from the electromagnetic wave incident port 1, the lumped capacitor 6 is a lumped patch capacitor packaged by three 0603, the placing heights of the three capacitors are respectively 5/6h,1/2h and 1/6h, and the capacitance value of each capacitor is 0.7 pF.
The macro-scale doped column 4 may also be a solid column structure compacted with microwave ceramic powder.
Compared with the prior art, the invention has the beneficial effects that:
1. due to the obvious magnetic field enhancement effect in the doped cylinder, the weak change of the magnetic conductivity of the substance in the micro-channel can cause the transmission peak of the system to obviously move, thereby improving the detection sensitivity.
2. The whole size is comparable to the wavelength, the volume is small, the structure is compact, and the packaging and integration with waveguide circuits and other planar systems are convenient.
3. The sensor is based on a closed cavity structure, is not influenced by an external electromagnetic environment, and has the advantages of low crosstalk and high signal-to-noise ratio.
4. Compared with a coil structure adopted in the traditional magnetic conductivity test, the metal cavity has high working frequency and can reach microwave and millimeter wave bands.
5. The waveguide cavity can work in millimeter wave and other high frequency bands, so that the waveguide cavity is suitable for testing and sensing the material magnetic conductivity in the high frequency band, and a platform is provided for the high-sensitivity and high-integration microfluidic magnetic conductivity sensing chip.
Drawings
Fig. 1 shows an example of a permeability sensor based on cavity local field enhancement according to the present invention.
Fig. 2 shows the magnetic field amplitude distribution of the permeability sensor of fig. 1 in a section plane (z ═ h/2).
FIG. 3 is a transmission spectrum of the sensor in the microchannel (5) of FIG. 1 when substances having different magnetic permeability are placed therein.
Detailed Description
The embodiments of the present invention will be described in detail below with reference to the drawings and examples.
As shown in fig. 1, the high-sensitivity permeability sensor based on cavity local field enhancement of the present invention is a two-port network, and includes an excitation waveguide 2 having an electromagnetic wave incident port 1 and a receiving waveguide 7 having an electromagnetic wave exit port 8, wherein electromagnetic waves are fed from the electromagnetic wave incident port 1 and received at the electromagnetic wave exit port 8. The excitation waveguide 2 and the receiving waveguide 7 are respectively connected with two opposite ends of a metal cavity 3 filled with air (dielectric constant is 1), and a macroscopic doped column 4 is arranged in the center of the metal cavity 3.
The macro-doping column 4 can adopt a solid column structure compacted by microwave ceramic powder, and can also adopt a hollow structure with four side walls all made of metal, for example, the hollow structure is connected with the upper and lower metal surfaces of the metal cavity 3. A micro-flow pipeline 5 for loading a sample to be detected is arranged in the macro-doping column 4 along the column length direction (z direction in the figure), a groove along the column length direction is formed in one side wall of the macro-doping column 4, three lumped capacitors 6 are welded and loaded on the groove, and an electromagnetic wave incident port 1 and an electromagnetic wave emergent port 8 are oppositely arranged along the x direction in the figure.
The width of the input waveguide 2 and the output waveguide 7 is w, the height (z direction in the figure) of the metal cavity 3 and the macro-doped column 4 is h, and the cross-sectional area (xy plane in the figure) of the metal cavity 3 is l1×l1The cross-sectional area (xy-plane in the figure) of the macroscopically doped column 4 is l2×l2The groove width is g and the diameter of the microfluidic channel 5 is d. One specific parameter value selected in this example is listed in table 1.
TABLE 1 specific values for the various dimensional parameters in the examples of the invention
| w | h | l1 | l2 | g | d |
| 50mm | 125mm | 250mm | 25mm | 1mm | 8mm |
The metal cavity 3 is made by a numerical control cavity milling process, the adopted material is aluminum alloy, and the conductivity is 3.5 multiplied by 107S/m, the excitation waveguide 2 and the receiving waveguide 7 are filled with Teflon material with dielectric constant of 2.1. The groove sets up on the macroscopical lateral wall of doping cylinder 4 keeping away from electromagnetic wave incident port 1, and lumped capacitor 6 is the lumped patch capacitor of three 0603 encapsulation, and the height of placing of three electric capacity is 5/6h,1/2h,1/6h respectively for z, and the capacitance value of every electric capacity is 0.7 pF.
The magnetic conductivity sensor provided by the invention is based on transmission type test, and the working wavelength of the sensor is about twice of the height h. In this example, the operating wavelength of the permeability sensor is 250mm (corresponding to a frequency of 1.2 GHz). When excited from the electromagnetic wave incident port 1, the excitation waveguide 2 and the receiving waveguide 7 work in a fundamental mode TE10 mode, and in the vicinity of the working wavelength, the metal cavity 3 works in a critical conduction zero-order mode resonance mode: with a uniform magnetic field distribution at the interface parallel to the x-y plane (outside the macroscopic doping column 4). The macroscopic doped column 4 loaded with the lumped capacitor 6 presents the capacitive property, while the metal cavity 3 as the doping background is the inductive property, and the two strongly resonate, and a quality factor of 10 is generated on the frequency spectrum due to the resonance3A resonant transmission peak of (a); meanwhile, due to resonance, the magnetic field in a small area surrounded by the macroscopic doping column 4 is enhanced by about 100 times compared with the incident magnetic field, and the magnetic field enhancement factor is proportional to the ratio of the cross section area of the metal cavity 3 to the cross section area of the macroscopic doping column 4. Under the condition of enhancing the local magnetic field, the disturbance of the tiny magnetic permeability of the substance to be measured in the macroscopic doping column 4 can cause the obvious change of the energy storage of the magnetic field of the cavity, so that the transmission peak is obviously deviated. Thereby realizing high sensitivity of the cavity structure based on macroscopic dopingThe waveguide cavity structure adopted by the sensor has the advantages of low crosstalk, easiness in integration and packaging, high working frequency and the like.
The magnetic field amplitude distribution over the cross-section z ═ h/2 of the sensor obtained from full-wave simulations is shown in fig. 2, clearly demonstrating the significant enhancement of the local magnetic field achieved by macroscopic doping of the cavity.
Since the macroscopic doping column 4 is a hollow cylindrical structure and the magnetic field is uniformly distributed in the doping body as shown in fig. 2, the microfluidic channel 5 carrying the substance to be measured can be conveniently placed at any position therein. In this example, one microfluidic channel 5 at the center is chosen. Full-wave simulations were performed on the transmission response of the permeability sensor, and fig. 3 shows the transmission spectrum when different permeability materials were placed in the microfluidic channel 5. In the simulation results of this example, a ± 2% change in the permeability of the material in the microfluidic channel 5 will cause a 5MHz shift in the transmission peak frequency around 1.2 GHz. By inspecting the frequency corresponding to the transmission peak when the relative magnetic permeability is 1 at a fixed frequency point: 1.2026 GHz; when the magnetic permeability changes by +/-2%, the transmissivity of the frequency point is reduced from 1 to 0.4. Such significant spectral feature changes can be more easily detected by a vector network analyzer or a spectrometer. The cross section area of the metal cavity 3 parallel to the x-y plane is increased, so that the quality factor of the transmission resonance peak can be further improved, and the sensitivity of the metal cavity 3 to the change of the magnetic conductivity of the material in the microfluidic pipeline 5 is improved.
The magnetic conductivity sensor provided by the invention only needs to test the transmission coefficient, has simpler post-processing and can be used for monitoring the change of the magnetic conductivity of the substance in real time. If the absolute value of the magnetic permeability needs to be obtained, only the difference calibration between the transmission peak frequency obtained by testing and the transmission peak generated by a sample with known magnetic permeability needs to be carried out.
The magnetic conductivity sensor provided by the invention integrally adopts a metal waveguide cavity structure, the volume of a main component metal cavity 3 is only 0.5 lambda multiplied by lambda (lambda is the electromagnetic wave free space wavelength corresponding to the working frequency of 1.2GHz), and the sensor can be integrated in a waveguide circuit and a system. The metal material has very low loss in the microwave and millimeter wave frequency band, and the magnetic conductivity sensor can support larger power capacity. In addition, because the waveguide cavity structure is a closed structure, leakage of an electromagnetic field can not be generated, and therefore the magnetic conductivity sensor is not interfered by an external electromagnetic environment and has the advantages of low crosstalk and high signal-to-noise ratio.
In conclusion, the invention provides a high-sensitivity magnetic conductivity sensor based on a cavity local field enhancement effect. The magnetic field sensor structure comprises a metal resonant cavity, a macroscopic doping body loaded with a capacitor, an input-output waveguide and a micro-flow pipeline loaded with substances to be detected. When the micro-channel magnetic field energy storage micro-channel works, the macro-doped structure and the background cavity generate strong resonance, and the magnetic field in the doped structure is obviously enhanced, so that the micro-magnetic conductivity change in the micro-channel can cause the obvious change of the magnetic field energy storage of the system, and the change of the output response of the system is caused. The change of the magnetic conductivity can be obtained by testing the frequency of the transmission peak movement on a frequency spectrum or observing the change of the transmissivity of the sensor on a fixed frequency point. The size and the working wavelength of the whole sensor are comparable, and the sensor has the characteristic of small volume. The waveguide cavity structure adopted in the whole design can work in high frequency bands such as microwave and millimeter wave, has the advantages of low crosstalk and easy packaging and integration, and provides a reliable platform for a high-efficiency micro-fluidic magnetic conductivity sensing chip.
Claims (8)
1. A high-sensitivity magnetic conductivity sensor based on cavity local field enhancement is a two-port network and comprises an excitation waveguide (2) with an electromagnetic wave incident port (1) and a receiving waveguide (7) with an electromagnetic wave exit port (8), and is characterized in that the excitation waveguide (2) and the receiving waveguide (7) are respectively connected with two opposite ends of a metal cavity (3) filled with air inside, a macroscopic doped column body (4) with a hollow structure is arranged in the center of the metal cavity (3), a microfluidic pipeline (5) for loading a sample to be measured is arranged in the macroscopic doped column body (4) along the column length direction, four side walls of the macroscopic doped column body (4) are made of metal, a groove along the column length direction is formed in one side wall, a plurality of lumped capacitors (6) are welded and loaded on the groove, and the electromagnetic wave incident port (1) and the electromagnetic wave exit port (8) are arranged oppositely, the column length direction is vertical to the incident and emergent directions of the electromagnetic waves.
2. The sensor with high sensitivity and permeability based on cavity local field enhancement as claimed in claim 1, wherein the excitation waveguide (2) and the receiving waveguide (7) both work in a fundamental mode TE10 mode, electromagnetic waves are fed from the electromagnetic wave incident port (1) and received at the electromagnetic wave exit port (8).
3. The sensor of claim 1, wherein the height of the metal cavity (3) and the macro-doped column (4) is h, the operating wavelength of the sensor is twice the height h, and the metal cavity (3) operates in critical conduction mode around the operating wavelength, exhibiting inductive behavior, and strongly resonates with the macro-doped column (4) loaded with the lumped capacitor (6), generating 103Transmission peak of magnitude.
4. The sensor with high sensitivity and permeability based on cavity local field enhancement is characterized in that according to the macroscopic doping theory, the distribution rule of the magnetic field in the cross section of the metal cavity (3) is as follows: the magnetic field of the area outside the macroscopic doping column (4) is uniformly distributed; the magnetic field inside the macroscopic doping column (4) is hundreds times stronger than the magnetic field outside the macroscopic doping column, and the magnetic field enhancement factor is proportional to the ratio of the cross section area of the metal cavity (3) to the cross section area of the macroscopic doping column (4).
5. The sensor of claim 1, wherein the metal cavity (3) is made by a numerical control cavity milling process, the adopted material is aluminum alloy, the conductivity is 3.5 x 107S/m, and Teflon materials with the dielectric constant of 2.1 are filled in the excitation waveguide (2) and the receiving waveguide (7).
6. The sensor of claim 1, wherein the slot is disposed on the side wall of the macro-doped cylinder (4) far from the electromagnetic wave incident port (1), the lumped capacitor (6) is a 0603-packaged lumped patch capacitor, the three capacitors are respectively placed at a height z equal to 5/6h,1/2h and 1/6h, and the capacitance value of each capacitor is 0.7 pF.
7. The sensor of claim 1, wherein the macro-doped column (4) is a solid column structure compacted with microwave ceramic powder.
8. The sensor with high sensitivity and permeability based on cavity local field enhancement is characterized in that the sensitivity of the metal cavity (3) to the change of the permeability of the material in the microfluidic pipeline (5) is improved by increasing the cross-sectional area of the metal cavity (3) to further improve the quality factor of the transmission resonance peak.
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| CN110133376A (en) * | 2019-05-10 | 2019-08-16 | 杭州电子科技大学 | For measuring the microwave remote sensor of magnetic media material dielectric constant and magnetic conductivity |
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| CN109030956A (en) * | 2018-07-24 | 2018-12-18 | 北京工业大学 | A kind of reflective rectangular cavity |
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