CN111546135A - Off-axis aspheric mirror milling model establishing method - Google Patents

Off-axis aspheric mirror milling model establishing method Download PDF

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Publication number
CN111546135A
CN111546135A CN202010268479.2A CN202010268479A CN111546135A CN 111546135 A CN111546135 A CN 111546135A CN 202010268479 A CN202010268479 A CN 202010268479A CN 111546135 A CN111546135 A CN 111546135A
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axis
mirror
aspheric
model
coordinate system
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马占龙
刘国淦
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SHANGHAI MODERN ADVANCED ULTRA PRECISION MANUFACTURING CENTER CO LTD
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SHANGHAI MODERN ADVANCED ULTRA PRECISION MANUFACTURING CENTER CO LTD
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor

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  • Mechanical Engineering (AREA)
  • Lenses (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

The invention relates to a method for establishing an off-axis aspheric mirror milling model, which comprises the steps of establishing an aspheric bus, converting the aspheric bus into a master mirror surface model, establishing a sub-mirror reference coordinate system and finally constructing the off-axis aspheric model. The method has the advantages of simple modeling and suitability for manufacturing the off-axis aspheric reflector.

Description

Off-axis aspheric mirror milling model establishing method
Technical Field
The invention belongs to the technical field of optical cold machining, and particularly relates to a method for establishing a milling model of an off-axis aspheric reflector.
Background
The off-axis aspheric reflection optical system has the characteristics of no central blocking problem, larger effective clear aperture, capability of avoiding diffraction phenomenon generated by the off-axis aspheric reflection optical system, improvement on imaging quality and the like, effectively meets the urgent requirements of the modern optical imaging system on large view field, long focal length and near diffraction limit image quality, and is widely applied to high-resolution remote sensing satellite imaging systems and extreme ultraviolet lithography projection systems.
The off-axis aspheric mirror processing process comprises the following steps: milling, grinding, pre-polishing and fine polishing. In the milling and grinding stage, the CAM technology is generally adopted to directly mill and grind the off-axis aspheric mirror model at present, so that a craftsman is required to provide the off-axis aspheric mirror model with high precision. The existing off-axis aspheric reflector model has multiple steps and high difficulty, and has high requirements on the capability of process personnel.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and solve the problems of difficult establishment of a milling model of an off-axis aspheric reflector and complex calculation derivation.
In order to achieve the aim, the invention provides a method for establishing a milling model of an off-axis aspheric mirror, which comprises the following steps:
step one, establishing an aspheric surface bus: establishing an aspheric surface bus in a YZ plane of a reference coordinate system of the aspheric surface bus according to a standard aspheric surface equation of the surface to be processed of the product;
the standard aspheric equation takes the vertex O of the aspheric primary mirror as the origin of coordinates, and the Z axis as the optical axis, and is expressed as follows:
Figure BDA0002442249580000021
in the formula: r is the vertex curvature radius, K is a quadratic constant, and A, B, C, D, E is a high-order aspheric coefficient; r, K, A, B, C, D, E are all known entries;
step two, transforming the non-spherical bus into a master mirror surface model: the aspheric surface bus rotates for 360 degrees around the Z axis of the reference coordinate system of the mother lens to form a surface which is a mother lens surface model;
step three, establishing a reference coordinate system of the sub-mirror: setting points on the mirror surface model of the master mirror according to the off-axis amount and the off-axis angle of the target off-axis aspheric surface product, wherein the set points extend out of a sub-mirror reference coordinate system Z of the target off-axis aspheric surface along the off-axis angle1Axis, at fixed point, towards Z1Origin O of reference coordinate system of position setting mirror with target mirror surface center thickness spaced in axial direction1(ii) a Z as referred to herein1The axial direction is selected to be positive or negative according to the design requirements of the mirror surface.
Step four, constructing an off-axis aspheric model: around the origin O according to the shape of the target off-axis aspheric product1X in reference coordinate system of sub-mirror1Y1Drawing a bottom edge contour line of the target off-axis aspheric surface product in a plane; the contour line of the bottom edge extends to the mirror surface model of the mother mirror and is formed with the mirror surface modelThe intersection line is the top edge contour line of the target off-axis aspheric surface product; and closing the bottom edge contour line and the top edge contour line to form an off-axis aspheric model.
The off-axis aspheric surface model has three surfaces which are respectively a bottom plane formed by drawing or sealing the top surface contour line, the bottom edge contour line and the top edge contour line cut from the mirror surface model of the mother mirror and sealing the inside of the side edge contour line and the bottom edge contour line.
Preferably, in step four, the bottom edge contour line follows Z1The axis direction is extended to the mirror surface model of the mother mirror.
Through stretching along the shaft, the side surface of the product can be smooth, and the processing is convenient.
Preferably, a machining code generated by the CAM technology is derived according to the off-axis aspheric surface model formed in the fourth step, and is input into a multi-axis machine tool to mill and machine the off-axis aspheric surface reflector.
Preferably, it is based on NX8.0 software.
Preferably, it is based on AUTOCAD software.
The method has the advantages of simple modeling and suitability for manufacturing the off-axis aspheric reflector.
Drawings
FIG. 1 is a flow chart of a method for establishing a milling model of an off-axis aspherical mirror according to the present invention;
FIG. 2 is a schematic view of a bus bar built in the present invention;
FIG. 3 is a schematic view of a mirror surface model of a master mirror constructed in the present invention;
FIG. 4 is a schematic diagram of a process for creating an off-axis aspheric model according to the present invention;
FIG. 5 is a schematic diagram of an off-axis aspheric model constructed in the present invention.
In the figure: 1. the system comprises a master mirror reference coordinate system, 2, an aspheric surface bus, 3, a master mirror surface model, 4, a slave mirror reference coordinate system, 5, a bottom edge contour line, 6 and an off-axis aspheric surface model.
Detailed Description
The invention is further described below with reference to the following figures and specific examples.
According to the method for establishing the milling model of the off-axis aspheric mirror shown in fig. 1 to 5, the method is based on NX8.0 software or AUTOCAD software and comprises the following steps:
step one, establishing an aspheric surface bus 2: establishing an aspheric surface bus 2 in a YZ plane of an aspheric surface bus reference coordinate system 1 according to a standard aspheric surface equation of a surface to be processed of a product;
the standard aspheric equation takes the vertex O of the aspheric primary mirror as the origin of coordinates, and the Z axis as the optical axis, and is expressed as follows:
Figure BDA0002442249580000041
in the formula: r is the vertex curvature radius, K is a quadratic constant, and A, B, C, D, E is a high-order aspheric coefficient;
step two, the aspheric surface bus 2 is converted into a master mirror surface model 3: the aspheric surface bus 2 rotates for 360 degrees around the Z axis of the master mirror reference coordinate system 1 to form a surface which is a master mirror surface model 3;
step three, establishing a reference coordinate system 4 of the sub-mirror: setting points on the mirror surface model 3 of the master mirror according to the off-axis amount and the off-axis angle of the target off-axis aspheric surface product, wherein the fixed points extend out of the Z of the sub-mirror reference coordinate system 4 of the target off-axis aspheric surface along the off-axis angle1Axis, at fixed point, towards Z1Origin O of position setting mirror reference coordinate system 4 with target mirror surface center thickness spaced in axial direction1
Step four, constructing an off-axis aspheric model 6: around the origin O according to the shape of the target off-axis aspheric product1X in the reference coordinate system 4 of the sub-mirror1Y1Drawing a bottom edge contour line 5 of the target off-axis aspheric surface product in a plane; the bottom edge contour line 5 is stretched to the mirror surface model 3 of the mother mirror and forms an intersection line with the mirror surface model 3 as a top edge contour line of the target off-axis aspheric surface product; and closing the bottom edge contour line 5 and the top edge contour line to form an off-axis aspheric model 6.
In step four, the bottom edge contour 5 follows Z1The axis direction is extended to the mirror surface model 3 of the mother mirror.
And (4) deriving a processing code generated by the CAM technology according to the off-axis aspheric surface model 6 formed in the fourth step, and inputting the processing code into a multi-axis machine tool to perform milling processing on the off-axis aspheric surface reflector.
Take an NX8.0 software based job as an example:
as shown in fig. 2, an aspherical bus is established: the standard aspheric equation with the aspheric surface primary mirror vertex O as the origin of coordinates and the Z axis as the optical axis is as follows:
Figure BDA0002442249580000051
in the formula: r is the vertex radius of curvature, R-340.68, K is a quadratic constant, K-10, A, B, C, D, E is a high-order aspheric coefficient, where a-1.8066E-8, B-5.6158E-13, C-7.2946E-18, D-0, and E-0.
The method comprises the steps of building a model in NX8.0 software, selecting an expression in a tool menu, opening an expression dialog box, inputting aspheric coefficients and a standard aspheric equation (1) in the expression dialog box, then selecting an insertion rule curve in the tool menu, opening the rule curve dialog box, selecting a constant X rule type, setting a value to be 0, selecting a Y rule type according to the equation, setting a parameter to be t, setting a function to be yt, selecting a Z rule type according to the equation, setting the parameter to be t, setting the function to be zt, and generating an aspheric bus model 2 after clicking is determined.
As shown in fig. 3, the aspherical bus 2 is converted into a mirror surface model 3 of a mother mirror: and (3) adopting a rotation function, and rotating the aspheric surface bus 2 in the step one by 360 degrees around the Z axis of the master mirror reference coordinate system 1 to establish a master mirror surface model 3.
As shown in fig. 4, a reference coordinate system 1 of a mother mirror is eccentrically and rotationally established to establish a reference coordinate system 4 of a sub mirror of the off-axis aspheric surface according to an off-axis amount 46.3mm, an off-axis angle 8 ° and a mirror surface center thickness 17mm of the off-axis aspheric surface, a bottom edge contour 5 is drawn under the reference coordinate system 4 of the sub mirror and a reference coordinate system of the bottom edge contour 5 of the off-axis aspheric surface is obtained by following the Z-1Stretching in the axial direction until the mirror surface model 3 of the mother mirror establishes an off-axis aspheric surface model 6
Hiding the reference coordinate system 1 of the mother mirror, the aspheric surface bus 2, the mirror surface model 3 of the mother mirror and the reference coordinate system 4 of the son mirror, and obtaining the off-axis aspheric surface model 6 shown in figure 5.
While the preferred embodiments of the present invention have been described in detail, it will be understood by those skilled in the art that the invention is not limited to the embodiments disclosed, but is capable of numerous equivalents and substitutions, all of which are within the scope of the invention as defined by the appended claims.

Claims (5)

1. A method for establishing a milling model of an off-axis aspheric reflector is characterized by comprising the following steps:
step one, establishing an aspheric surface bus: establishing an aspheric surface bus in a YZ plane of a reference coordinate system of the aspheric surface bus according to a standard aspheric surface equation of the surface to be processed of the product;
the standard aspheric equation takes the vertex O of the aspheric primary mirror as the origin of coordinates, and the Z axis as the optical axis, and is expressed as follows:
Figure FDA0002442249570000011
in the formula: r is the vertex curvature radius, K is a quadratic constant, and A, B, C, D, E is a high-order aspheric coefficient;
step two, transforming the non-spherical bus into a master mirror surface model: the aspheric surface bus rotates for 360 degrees around the Z axis of the reference coordinate system of the mother lens to form a surface which is a mother lens surface model;
step three, establishing a reference coordinate system of the sub-mirror: setting points on the mirror surface model of the master mirror according to the off-axis amount and the off-axis angle of the target off-axis aspheric surface product, wherein the set points extend out of a sub-mirror reference coordinate system Z of the target off-axis aspheric surface along the off-axis angle1Axis, at fixed point, towards Z1Origin O of reference coordinate system of position setting mirror with target mirror surface center thickness spaced in axial direction1
Step four, constructing an off-axis aspheric model: around the origin O according to the shape of the target off-axis aspheric product1X in reference coordinate system of sub-mirror1Y1Off-axis aspheric object rendering in planeThe bottom edge contour line of the flour product; the bottom edge contour line extends to the mirror surface model of the master mirror and forms an intersection line with the mirror surface model as a top edge contour line of the target off-axis aspheric surface product; and closing the bottom edge contour line and the top edge contour line to form an off-axis aspheric model.
2. The off-axis aspheric mirror milling model creation method as claimed in claim 1, characterized in that in step four, the bottom edge contour line is along Z1The axis direction is extended to the mirror surface model of the mother mirror.
3. The off-axis aspherical mirror milling model establishing method according to claim 1, wherein a processing code generated by a CAM technique is derived from the off-axis aspherical model formed in step four and is input to a multi-axis machine tool to mill the off-axis aspherical mirror.
4. The off-axis aspheric mirror milling model building method according to claim 1, characterized by being based on NX8.0 software.
5. The off-axis aspheric mirror milling model building method according to claim 1, characterized by being based on AUTOCAD software.
CN202010268479.2A 2020-04-08 2020-04-08 Off-axis aspheric mirror milling model establishing method Pending CN111546135A (en)

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Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04354668A (en) * 1991-05-30 1992-12-09 Olympus Optical Co Ltd Aspherical surface machining method
JP2006239796A (en) * 2005-03-02 2006-09-14 Matsushita Electric Ind Co Ltd Vitreous carbon machining method and device
CN101670442A (en) * 2009-09-22 2010-03-17 天津大学 Method for improving shape accuracy and processing efficiency of off-axis aspheric mirror
CN101858735A (en) * 2010-05-19 2010-10-13 中国科学院光电技术研究所 Large-caliber off-axis aspheric surface measuring and calibrating system
CN102508361A (en) * 2011-10-31 2012-06-20 北京空间机电研究所 Spatial large view field, superwide spectral band and multispectral imaging optical system
CN103034767A (en) * 2012-12-21 2013-04-10 中国科学院长春光学精密机械与物理研究所 Establishing method of off-axis non-spherical-surface reflecting mirror face CAD (Computer-Aided Design) model for use before milling and grinding
CN103056731A (en) * 2012-12-21 2013-04-24 中国科学院长春光学精密机械与物理研究所 Five-axis precision ultrasonic milling machining method of large-aperture off-axis aspheric mirror
CN105690187A (en) * 2016-02-06 2016-06-22 苏州大学 Method for machining off-axis aspherical mirror
EP1791688B1 (en) * 2004-09-07 2018-02-21 Essilor International Method of manufacturing an optical lens
CN110076680A (en) * 2019-05-27 2019-08-02 苏州大学 A kind of proximal ends distal shaft end uniform thickness off-axis aspheric surface processing method

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04354668A (en) * 1991-05-30 1992-12-09 Olympus Optical Co Ltd Aspherical surface machining method
EP1791688B1 (en) * 2004-09-07 2018-02-21 Essilor International Method of manufacturing an optical lens
JP2006239796A (en) * 2005-03-02 2006-09-14 Matsushita Electric Ind Co Ltd Vitreous carbon machining method and device
CN101670442A (en) * 2009-09-22 2010-03-17 天津大学 Method for improving shape accuracy and processing efficiency of off-axis aspheric mirror
CN101858735A (en) * 2010-05-19 2010-10-13 中国科学院光电技术研究所 Large-caliber off-axis aspheric surface measuring and calibrating system
CN102508361A (en) * 2011-10-31 2012-06-20 北京空间机电研究所 Spatial large view field, superwide spectral band and multispectral imaging optical system
CN103034767A (en) * 2012-12-21 2013-04-10 中国科学院长春光学精密机械与物理研究所 Establishing method of off-axis non-spherical-surface reflecting mirror face CAD (Computer-Aided Design) model for use before milling and grinding
CN103056731A (en) * 2012-12-21 2013-04-24 中国科学院长春光学精密机械与物理研究所 Five-axis precision ultrasonic milling machining method of large-aperture off-axis aspheric mirror
CN105690187A (en) * 2016-02-06 2016-06-22 苏州大学 Method for machining off-axis aspherical mirror
CN110076680A (en) * 2019-05-27 2019-08-02 苏州大学 A kind of proximal ends distal shaft end uniform thickness off-axis aspheric surface processing method

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Application publication date: 20200818