CN111536150A - 一种表面节流的流体静压轴承、流体静压转台和流体静压主轴 - Google Patents

一种表面节流的流体静压轴承、流体静压转台和流体静压主轴 Download PDF

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CN111536150A
CN111536150A CN202010421285.1A CN202010421285A CN111536150A CN 111536150 A CN111536150 A CN 111536150A CN 202010421285 A CN202010421285 A CN 202010421285A CN 111536150 A CN111536150 A CN 111536150A
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annular
slot
annular hole
shaft sleeve
hole
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CN111536150B (zh
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吴言功
王波
乔政
韩睿
丁飞
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Harbin Bozhongtaida Optical Precision Machinery Co ltd
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Harbin Institute of Technology Shenzhen
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
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    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/70—Stationary or movable members for carrying working-spindles for attachment of tools or work
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    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0625—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via supply slits
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    • F16C32/0629—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion
    • F16C32/064—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being supplied under pressure
    • F16C32/0651—Details of the bearing area per se
    • F16C32/0655—Details of the bearing area per se of supply openings
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    • F16C32/064—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being supplied under pressure
    • F16C32/0651—Details of the bearing area per se
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    • F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
    • F16C32/0696—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for both radial and axial load
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Abstract

为了提供一种结构稳定性好、超高精度的流体静压轴承，本发明记载一种表面节流的流体静压轴承，包括轴套、主轴、上辐板和下辐板，轴套套设在主轴上，上辐板和下辐板分别位于轴套的上方和下方并均固定在主轴上，上辐板、下辐板与主轴承“工字型”结构，轴套与主轴之间上下设置有相互连通的环形孔缝Ⅰ和环形孔缝Ⅱ，环形孔缝Ⅰ和环形孔缝Ⅱ结构相同且相互对称，环形孔缝Ⅰ和环形孔缝Ⅱ的纵剖面均呈阶梯状结构；轴套上设置有进孔和出孔，进孔与环形孔缝Ⅰ或环形孔缝Ⅱ连通，出孔与环形孔缝Ⅰ或环形孔缝Ⅱ连通。本发明润滑介质可以是液体或气体，本发明无需额外安装节流器，极大的提高了装配效率和可靠度，轴承结构简单可靠，易于加工。

Description

一种表面节流的流体静压轴承、流体静压转台和流体静压 主轴
技术领域
本发明涉及一种轴承，具体涉及一种表面节流的流体静压轴承、流体静压转台和流体静压主轴。
背景技术
流体静压轴承是一种滑动轴承，以流体(包括液体、气体)作为润滑。依靠外部通入的高压流体，在轴周围形成高压润滑膜，提供支撑刚度，抵御外界载荷变化。流体静压轴承的最显著特征是回转精度高，润滑膜能够实现误差均化，补偿零件的加工误差，使回转误差小于加工误差。当润滑介质为气体时，轴承摩擦系数小，可以极低速运动，无爬行现象，有着高定位精度和重复定位精度，正常工作状态没有磨损，发热量很小，主要缺点是刚度小、阻尼差、承载能力弱。当润滑介质为液体时，流体的压力可以更高，因此轴承的承载能力、刚度、阻尼均比气体润滑轴承高。无论是气体润滑还是液体润滑，静压轴承在精密和超精密设备中有着广泛的应用。
目前气体静压轴承的节流方式主要有三种，小孔式节流、多孔质节流和狭缝节流。小孔式节流的节流器通常是带有小孔的柱塞，用环氧树脂将其粘接在轴承气道孔末端，节流器数量众多，小孔制造加工困难，无法保证小孔直径统一，粘接时也很难保证节流器深度相同，四周可能漏气，通入高压气体后容易产生气锤现象；多孔质节流的节流器通常是表面分布众多小孔的多孔质材料，但是耗气量大，无法保证各处小孔数量分布均匀、气体渗透率相同，若气体中含有杂质颗粒会堵塞气孔，造成轴承失效，不能长期保证精度，供气压力变化时，响应较慢；狭缝节流要求的狭缝间隙在10μm附近，加工制造较为困难。
目前，有关表面节流的研究非常少，美国专利US3305282提出了在轴承表面加工浅槽作为节流部件，中国发明专利CN86105066B也提出了类似的想法。浅槽的加工非常困难，难以保证加工精度，因此限制了表面节流的应用。
发明内容
本发明的第一个目的是提供一种结构简单、零部件少、结构稳定性好、超高精度的流体静压轴承，避开了其余节流方式加工制造的缺点。
本发明的第二个目的是提供一种表面节流的流体静压转台。
本发明的第三个目的是提供一种表面节流的流体静压主轴。
为实现上述目的，本发明采取的技术方案如下：
一种表面节流的流体静压轴承，包括轴套、主轴、上辐板和下辐板，所述轴套套设在主轴上，所述上辐板和下辐板分别位于轴套的上方和下方并均固定在主轴上，所述轴套与主轴之间上下设置有相互连通的环形孔缝Ⅰ和环形孔缝Ⅱ，所述环形孔缝Ⅰ和环形孔缝Ⅱ结构相同且相互对称，所述环形孔缝Ⅰ和环形孔缝Ⅱ的纵剖面均呈阶梯状结构；所述轴套上设置有进孔和出孔，所述进孔与环形孔缝Ⅰ或环形孔缝Ⅱ连通，所述出孔与环形孔缝Ⅰ或环形孔缝Ⅱ连通。所述上辐板与轴套之间设置有环形孔缝Ⅲ，所述下辐板与轴套之间设置有环形孔缝Ⅳ，所述环形孔缝Ⅲ和环形孔缝Ⅳ的纵剖面均呈阶梯状结构，所述环形孔缝Ⅲ与环形孔缝Ⅰ连通，所述环形孔缝Ⅳ与环形孔缝Ⅱ连通。
一种表面节流的流体静压转台，包括所述的流体静压轴承和转台底座，所述转台底座位于轴套的下方且与轴套固定连接。
一种表面节流的流体静压主轴，包括所述的流体静压轴承和主轴底座，所述主轴底座位于轴套的下方且与轴套固定连接。
本发明相对于现有技术的有益效果是：
1)主轴周围形成压力均匀的支撑润滑膜，主轴运行更加平稳，误差均化效果更好，工作精度更高。
2)不需要节流器即可提供支撑刚度，无需精心设计、加工流体通道，也无需额外安装节流器，极大的提高了装配效率和可靠度，轴承结构简单可靠，易于加工。
3)当选择气体作为润滑介质时，轴承可承受0.2-2.5MPa的压缩空气，不会产生气锤现象，大大提高了轴承的承载能力。
附图说明
图1为本发明纵向剖视图。
图2为本发明流体流动方向示意图。
图3为本发明应用于转台的结构示意图。
图4为本发明应用于卧式主轴的结构示意图。
图中：1、轴套，2、主轴，3、上辐板，4、下辐板，5、环形孔缝Ⅰ，6、环形孔缝Ⅱ，7、进孔，8、出孔，9、环形孔缝Ⅲ，10、环形孔缝Ⅳ，11、退刀槽Ⅰ，12、退刀槽Ⅱ，13、环形凹槽，14、转台底座，15、主轴底座。
具体实施方式
下面结合具体实施方式和附图对本发明的技术方案作进一步的说明，但并不局限于此，凡是对本发明技术方案进行修改或者等同替换，而不脱离本发明技术方案的精神和范围，均应涵盖在本发明的保护范围中。在本发明的描述中，需要理解的是：术语“上”“下”“水平”“纵向”等指示方位的词语只是为了便于描述本发明，而不是指示或暗示所指的元件必须具有特定的方位，因此不能理解为对本发明的具体限定。
本发明中，主轴是个圆柱面，圆柱面的母线方向称为轴向，同一圆截面上的半径方向称为径向。
具体实施方式一
一种表面节流的流体静压轴承，包括轴套1、主轴2、上辐板3和下辐板4，所述轴套1套设在主轴2上，所述上辐板3和下辐板4分别位于轴套1的上方和下方并均通过螺栓固定在主轴2上，所述主轴2、上辐板3和下辐板4呈“工”字型的一体结构，并保持主轴2、上辐板3和下辐板4具有
Figure BDA0002496968510000031
同轴度，所述轴套1与上辐板3、下辐板4、主轴2之间间隙均为2-30μm，所述轴套1与主轴2之间上下设置有相互连通的环形孔缝Ⅰ5和环形孔缝Ⅱ6，所述环形孔缝Ⅰ5和环形孔缝Ⅱ6结构相同且相互对称，所述环形孔缝Ⅰ5和环形孔缝Ⅱ6的纵剖面均呈阶梯状结构；所述环形孔缝Ⅰ5和环形孔缝Ⅱ6的缝隙宽度为2-30μm，所述轴套1上设置有进孔7和出孔8，所述进孔7与环形孔缝Ⅰ5或环形孔缝Ⅱ6连通，所述出孔8与环形孔缝Ⅰ5或环形孔缝Ⅱ6连通。
进一步的，所述环形孔缝Ⅰ5和环形孔缝Ⅱ6均设置在轴套1的内侧壁上，或者，所述环形孔缝Ⅰ5和环形孔缝Ⅱ6均设置在主轴2的外侧壁上。
进一步的，所述环形孔缝Ⅰ5从轴套1的上端至中间，阶梯的走向从高至低；所述环形孔缝Ⅱ6从轴套1的下端至中间，阶梯的走向从高至低。
优选的，阶梯状结构的环形孔缝Ⅰ5和环形孔缝Ⅱ6的台阶有两个。
进一步的，所述上辐板3与轴套1之间设置有环形孔缝Ⅲ9，所述下辐板4与轴套1之间设置有环形孔缝Ⅳ10，所述环形孔缝Ⅲ9和环形孔缝Ⅳ10的结构相同，且其纵剖面均呈阶梯状结构，所述环形孔缝Ⅲ9与环形孔缝Ⅰ5连通，所述环形孔缝Ⅳ10与环形孔缝Ⅱ6连通，所述环形孔缝Ⅲ9和环形孔缝Ⅳ10的缝隙宽度为2-30μm。
优选的，阶梯状结构的环形孔缝Ⅲ9和环形孔缝Ⅳ10的台阶有两个。
进一步的，所述环形孔缝Ⅲ9设置在上辐板3的下表面或者轴套1的上表面，所述环形孔缝Ⅳ10设置在下辐板4的上表面或者轴套1的下表面。
进一步的，所述环形孔缝Ⅲ9从轴套1的内侧壁处至上辐板3的外侧壁处，阶梯的走向从高至低；所述环形孔缝Ⅳ10从轴套1的内侧壁处到下辐板4的外侧壁处，阶梯的的走向从高至低。
进一步的，所述进孔7设置有两个，两个进孔7关于轴套1中心的水平面上下对称设置在轴套1的外侧壁上，位于上方的进孔7通过流道与环形孔缝Ⅰ5和环形孔缝Ⅲ9的交界处连通；位于下方的进孔7通过流道与环形孔缝Ⅱ6和环形孔缝Ⅳ10的交界处连通；所述出孔8设置在与进孔7相对的轴套1的外侧壁上且位于轴套1中心的水平面上，所述出孔8通过流道与环形孔缝Ⅰ5和环形孔缝Ⅱ6的交界处连通。
进一步的，所述环形孔缝Ⅰ5和环形孔缝Ⅲ9的交界处设置有退刀槽Ⅰ11，所述环形孔缝Ⅱ6和环形孔缝Ⅳ10的交界处设置有退刀槽Ⅱ12，所述退刀槽Ⅰ11与退刀槽Ⅱ12均设置在轴套1的内侧壁上；位于上方的进孔7通过流道与退刀槽Ⅰ11连通，位于下方的进孔7通过流道与退刀槽Ⅱ12连通。所述退刀槽Ⅰ11和退刀槽Ⅱ12的设置是将点状压力源变为线性压力源，使润滑膜压力分布更加均匀，退刀槽Ⅰ11和退刀槽Ⅱ12的设置还可以防止杂质、灰尘进入轴套1与主轴2之间的缝隙、轴套1与上、下辐板之间的缝隙中。
进一步的，所述环形孔缝Ⅰ5和环形孔缝Ⅱ6的交界处设置有环形凹槽13，所述环形凹槽13设置在主轴2的外侧壁上或者轴套1的内侧壁上，所述出孔8通过流道与环形凹槽13连通，所述环形凹槽13汇集出流的流体。高压流体通入后，经过退刀槽Ⅰ11和退刀槽Ⅱ12后变成线性压力源，一部分流向上辐板3、下辐板4与轴套1之间的间隙，形成止推阶梯润滑膜，一部分流向轴套1与主轴2之间的间隙，形成径向支撑阶梯润滑膜，所述阶梯润滑膜可在无节流器的情况下提供径向支撑刚度与闭式轴向刚度，使得主轴2在承受外界载荷时仍然能够平稳运行，保证转台具有高承载能力。
进一步的，所述轴套1、主轴2、上辐板3和下辐板4均为圆环型的中空结构，当轴承作为转台使用时，中空的结构可用来通过电缆；当轴承作为切削主轴使用时，中空的结构可用来作为真空气道吸附工件、或者加工出锥面安装工件。
润滑介质可以是液体(液压油等)，也可以是气体(空气、氮气等)，如果对高转速下的发热非常敏感，润滑介质选择气体。如果对承载力及刚度要求非常高，润滑介质选择液体，当选择气体作为润滑介质时，气体压力根据需求可在0.2-2.5MPa之间选择，而不会产生气锤现象；当选择液体作为润滑介质时，压力根据需求可在0.5-5.0MPa之间选择。
流体的流动路线参照图2，轴套1固定，高压流体通过两个进孔7分别进入退刀槽Ⅰ11和退刀槽Ⅱ12，然后通入环形孔缝Ⅰ5、环形孔缝Ⅱ6、环形孔缝Ⅲ9和环形孔缝Ⅳ10，在轴套1与主轴2之间、轴套1与上辐板3之间、轴套1与下辐板4之间形成阶梯状的润滑膜，经过润滑膜的减压后分别由出孔8及上辐板和下辐板的边缘流出。阶梯状结构的环形孔缝Ⅰ5、环形孔缝Ⅱ6、环形孔缝Ⅲ9和环形孔缝Ⅳ10用于节流，阶梯状的润滑膜可以在无节流器的情况下提供支撑刚度。
本发明提出，流体静压轴承表面节流不需要外部附加的节流器，通过表面的阶梯结构产生压力降，提供支撑刚度，在主轴2表面形成均匀润滑膜，工作精度更高。当润滑介质为空气时，可通入更高压气体，不产生气锤现象，有着更高的承载力。
本发明采用表面节流的原理，仅采用微型的阶梯结构的孔缝作为节流元件，加工制造简单。从台阶节流的原理亦可知，本发明的承载力、刚度与流体的粘度无关，因此同一轴承中的润滑介质既可以是液体、亦可以是气体。
具体实施方式二
一种表面节流的流体静压转台：包括具体实施方式一所述的流体静压轴承和转台底座14，所述转台底座14位于轴套1的下方并通过螺栓与轴套1固定连接定位，如图3所示。
具体实施方式三
一种表面节流的流体静压主轴：包括具体实施方式一所述的流体静压轴承和主轴底座15，所述主轴底座15位于轴套1的下方且与轴套1固定连接，如如图4所示。
以上所述仅为本发明的优选实施例而已，并不用于限制本发明，对于本领域的技术人员来说，本发明可以有各种更改和变化。凡在本发明的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。

Claims (11)

1.一种表面节流的流体静压轴承，其特征在于：包括轴套(1)、主轴(2)、上辐板(3)和下辐板(4)，所述轴套(1)套设在主轴(2)上，所述上辐板(3)和下辐板(4)分别位于轴套(1)的上方和下方并均固定在主轴(2)上，所述轴套(1)与主轴(2)之间上下设置有相互连通的环形孔缝Ⅰ(5)和环形孔缝Ⅱ(6)，所述环形孔缝Ⅰ(5)和环形孔缝Ⅱ(6)结构相同且相互对称，所述环形孔缝Ⅰ(5)和环形孔缝Ⅱ(6)的纵剖面均呈阶梯状结构；所述轴套(1)上设置有进孔(7)和出孔(8)，所述进孔(7)与环形孔缝Ⅰ(5)或环形孔缝Ⅱ(6)连通，所述出孔(8)与环形孔缝Ⅰ(5)或环形孔缝Ⅱ连通(6)。
2.根据权利要求1所述的一种表面节流的流体静压轴承，其特征在于：所述上辐板(3)与轴套(1)之间设置有环形孔缝Ⅲ(9)，所述下辐板(4)与轴套(1)之间设置有环形孔缝Ⅳ(10)，所述环形孔缝Ⅲ(9)和环形孔缝Ⅳ(10)的纵剖面均呈阶梯状结构，所述环形孔缝Ⅲ(9)与环形孔缝Ⅰ(5)连通，所述环形孔缝Ⅳ(10)与环形孔缝Ⅱ(6)连通。
3.根据权利要求1所述的一种表面节流的流体静压轴承，其特征在于：所述环形孔缝Ⅰ(5)和环形孔缝Ⅱ(6)均设置在轴套(1)的内侧壁上，或者，所述环形孔缝Ⅰ(5)和环形孔缝Ⅱ(6)均设置在主轴(2)的外侧壁上。
4.根据权利要求2所述的一种表面节流的流体静压轴承，其特征在于：所述环形孔缝Ⅲ(9)设置在上辐板(3)的下表面或者轴套(1)的上表面，所述环形孔缝Ⅳ(10)设置在下辐板(4)的上表面或者轴套(1)的下表面。
5.根据权利要求1所述的一种表面节流的流体静压轴承，其特征在于：所述环形孔缝Ⅰ(5)从轴套(1)的上端至中间，阶梯的走向从高至低；所述环形孔缝Ⅱ(6)从轴套(1)的下端至中间，阶梯的走向从高至低。
6.根据权利要求2所述的一种表面节流的流体静压轴承，其特征在于：所述环形孔缝Ⅲ(9)从轴套(1)的内侧壁处至上辐板(3)的外侧壁处，阶梯的走向从高至低；所述环形孔缝Ⅳ(10)从轴套(1)的内侧壁处到下辐板(4)的外侧壁处，阶梯的走向从高至低。
7.根据权利要求2所述的一种表面节流的流体静压轴承，其特征在于：所述进孔(7)设置有两个，两个进孔(7)上下对称设置在轴套(1)的外侧壁上，位于上方的进孔(7)通过流道与环形孔缝Ⅰ(5)和环形孔缝Ⅲ(9)的交界处连通；位于下方的进孔(7)通过流道与环形孔缝Ⅱ(6)和环形孔缝Ⅳ(10)的交界处连通；所述出孔(8)设置在与进孔(7)相对的轴套(1)的外侧壁上，所述出孔(8)通过流道与环形孔缝Ⅰ(5)和环形孔缝Ⅱ(6)的交界处连通。
8.根据权利要求7所述的一种表面节流的流体静压轴承，其特征在于：所述环形孔缝Ⅰ(5)和环形孔缝Ⅲ(9)的交界处设置有退刀槽Ⅰ(11)，所述环形孔缝Ⅱ(6)和环形孔缝Ⅳ(10)的交界处设置有退刀槽Ⅱ(12)，位于上方的进孔(7)通过流道与退刀槽Ⅰ(11)连通，位于下方的进孔(7)通过流道与退刀槽Ⅱ(12)连通。
9.根据权利要求7所述的一种表面节流的流体静压轴承，其特征在于：所述环形孔缝Ⅰ(5)和环形孔缝Ⅱ(6)的交界处设置有环形凹槽(13)，所述环形凹槽(13)设置在主轴(2)的外侧壁上或者轴套(1)的内侧壁上，所述出孔(8)通过流道与环形凹槽(13)连通。
10.一种表面节流的流体静压转台：其特征在于：包括权利要求1-9任一权利要求所述的流体静压轴承和转台底座(14)，所述转台底座(14)位于轴套(1)的下方且与轴套(1)固定连接。
11.一种表面节流的流体静压主轴：其特征在于：包括权利要求1-9任一权利要求所述的流体静压轴承和主轴底座(15)，所述主轴底座(15)位于轴套(1)的下方且与轴套(1)固定连接。
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