CN111534857A - Furnace capable of generating large temperature gradient - Google Patents
Furnace capable of generating large temperature gradient Download PDFInfo
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- CN111534857A CN111534857A CN202010416946.1A CN202010416946A CN111534857A CN 111534857 A CN111534857 A CN 111534857A CN 202010416946 A CN202010416946 A CN 202010416946A CN 111534857 A CN111534857 A CN 111534857A
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- furnace
- ladder block
- outer shell
- large temperature
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
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- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
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- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a furnace generating a large temperature gradient, which mainly comprises a bottom plate, an outer shell, a seed rod, a crucible, an upper ladder block and a lower ladder block, wherein the top end of the bottom plate is fixedly provided with the outer shell, the middle part of the inner side of the outer shell is fixedly provided with a heat conduction frame, a heat insulator is filled between the outer side wall of the heat conduction frame and the inner wall of the outer shell, the middle part of the heat conduction frame is fixedly provided with an inner shell, a furnace wire is fixedly arranged between the side wall of the inner shell and the side wall of the heat conduction frame, the top end cover is arranged at the top end of the outer shell, the middle part of the top cover is fixedly provided. The invention has reasonable structural design, adopts the design of the inverted triangular-cone-shaped hearth, can effectively increase the convection of a temperature field in the hearth and generate larger temperature gradient, is simple and feasible, can change the height of the crucible, ensures that the equipment has better stability and flexibility, has good sealing effect, saves energy, is simple to open and close, has good processing effect, is convenient to observe the internal process, and ensures the internal sealing after observation.
Description
Technical Field
The invention relates to a crystallization furnace, in particular to a furnace generating a large temperature gradient.
Background
The principle of crystal growth is based on the rational maintenance of a quasi-equilibrium relationship between the chemical potential of a species' crystalline phase and the chemical potential of that species in the relevant phase. Crystal growth as in solution requires a certain suitable supersaturation of the solute in the vicinity of equilibrium solubility. The crystal growth method is various, such as the hydrothermal method for growing artificial crystal, the zone melting method for growing silicon and germanium single crystal, the oxyhydrogen flame melting method for growing bearing gem, the aerospace weightlessness method for crystal culture and sublimation method, the homoepitaxial or heteroepitaxial growth method, etc.
The temperature field is very critical to crystal growth, and directly relates to the nucleation number, the growth size and the final quality of crystals, and the growth of some crystals needs very large temperature gradient, while the general method for generating large temperature gradient is complex and difficult to realize, and the temperature regulation operation of the existing equipment is complex, so that the crystal crystallization quality is poor.
Disclosure of Invention
The object of the present invention is to provide a furnace that generates a large temperature gradient, in order to solve the problems set forth in the background art described above.
In order to achieve the purpose, the invention provides the following technical scheme:
a furnace capable of generating a large temperature gradient mainly comprises a bottom plate, an outer shell, a seed rod, a crucible, an upper ladder block and a lower ladder block, wherein the top end of the bottom plate is fixedly provided with the outer shell, the middle part of the inner side of the outer shell is fixedly provided with a heat conducting frame, a heat insulator is filled between the outer side wall of the heat conducting frame and the inner wall of the outer shell, the middle part of the heat conducting frame is fixedly provided with an inner shell, a furnace wire is fixedly arranged between the side wall of the inner shell and the side wall of the heat conducting frame, the top end cover of the outer shell is provided with a top cover, the middle part of the left side of the top cover is fixedly provided with a middle frame, the upper part of the inner side of the middle frame is slidably provided with an upper sliding rod, the lower part of the inner side of the middle frame is slidably provided with a lower sliding rod, the, the inner parts of the upper sliding rod and the lower sliding rod are provided with sliding openings matched with the stop rod, the left side of the top cover is fixedly provided with symmetrically arranged upper clamping heads, and the upper part of the left side of the shell is fixedly provided with symmetrically arranged lower clamping heads;
the middle part of the top cover is fixedly provided with a wear-resistant sleeve in a penetrating way, the middle part of the wear-resistant sleeve is provided with a seed rod in a penetrating and inserting way, the bottom end of the seed rod is fixedly provided with seed materials, the lower part of the inner side of the inner shell is provided with a liner, the middle part of the top end of the liner is slidably connected with a lower ladder block, an upper ladder block is stacked above the lower ladder block, the bottom end of the upper ladder block is fixedly provided with plug blocks arranged at equal intervals, the top ends of the lower ladder block and the liner are provided with slots matched with the plug blocks, the top end of the upper ladder block is stacked with a crucible, the outer wall of the bottom end of the crucible and the side wall of the top end of the liner are respectively fixedly provided with symmetrically arranged sliding frames, the front and back side walls of the upper ladder block and the lower ladder block are fixedly provided with symmetrically arranged side convex strips, the, the seed material is immersed in the raw material melt, a cover plate is sleeved at the lower part of the outer side of the seed rod of the sliding connection frame, and the cover plate is covered and arranged above the crucible;
the novel multifunctional endoscope is characterized in that observation holes symmetrically arranged are formed in the top cover, an insertion tube is installed on the inner side of each observation hole in an inserted mode, a plug is installed at the top end of the insertion tube in an inserted mode, a baffle ring is fixedly installed on the upper portion of the outer side of the insertion tube, and a convex lens is fixedly installed at the bottom end of the insertion tube.
As a further scheme of the invention: and an access hole matched with the furnace wire is reserved at the bottom end of the cavity surrounded by the inner shell and the heat conducting frame.
As a still further scheme of the invention: the top end edge of the shell is fixedly provided with a sealing ring, and the bottom end of the top cover is fixedly provided with a liner matched with the sealing ring.
As a still further scheme of the invention: the lower part of the guide rod is fixedly provided with a limiting pin, and the inner side of the lower part of the liner is provided with a sliding connection groove matched with the limiting pin.
As a still further scheme of the invention: the furnace wire is electrically connected with an external power supply and external control equipment through a wire harness.
As a still further scheme of the invention: and a rotating frame is fixedly arranged at the front end of the middle shaft.
As a still further scheme of the invention: and a rotary sheet is fixedly arranged at the top end of the plug.
Compared with the prior art, the invention has the beneficial effects that:
the invention has reasonable structural design, adopts the design of the inverted triangular-cone-shaped hearth, can effectively increase the convection of a temperature field in the hearth and generate larger temperature gradient, is simple and feasible, can change the height of the crucible, ensures that the equipment has better stability and flexibility, has good sealing effect, saves energy, is simple to open and close, has good processing effect, is convenient to observe the internal process, and ensures the internal sealing after observation.
Drawings
FIG. 1 is a schematic view of a furnace configuration that produces a large temperature gradient.
FIG. 2 is a schematic cross-sectional view of a furnace in which a large temperature gradient is generated between a crucible, an upper step, a lower step, and a liner.
FIG. 3 is a schematic front view of a furnace in which a large temperature gradient is generated, between a crucible, an upper block, a lower block, a guide rod and a spacer.
FIG. 4 is a schematic side view of the space between the guide rods and the spacers in a furnace producing a large temperature gradient.
Fig. 5 is a schematic side view of the clamping frame, the upper slide bar, the lower slide bar, the middle frame and the gear in the furnace generating a large temperature gradient.
FIG. 6 is a schematic side view of the furnace between the top cover, the middle frame and the clamping frame, which produces a large temperature gradient.
FIG. 7 is a schematic cross-sectional view of a furnace in which a large temperature gradient is generated between the top cover, the sight glass and the insert tube.
FIG. 8 is a schematic front view of the furnace in which a large temperature gradient is generated between the top cover, the sealing ring and the outer shell.
In the figure: the furnace comprises a bottom plate 1, an outer shell 2, a heat insulator 3, a top cover 4, a furnace wire 5, an observation hole 6, a cover plate 7, a wear-resistant sleeve 8, a seed rod 9, a raw material melt 10, an inner shell 11, a heat conducting frame 12, a seed 13, a gasket 14, a crucible 15, a sliding connection frame 16, an upper ladder block 17, a side convex strip 18, an insertion block 19, a lower ladder block 20, a guide rod 21, a limiting pin 22, a rotary vane 23, a plug 24, a sealing ring 25, a convex lens 26, a baffle ring 27, an insertion pipe 28, an upper clamping head 29, a clamping frame 30, an upper sliding rod 31, a middle frame 32, a gear 33, a sliding opening 34, a lower sliding rod 35, a baffle rod 36, a middle shaft 37, a rack 38, a lower clamping head 39, a.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
In the description of the present invention, it should be noted that unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "disposed" are to be construed broadly and can, for example, be fixedly connected, disposed, detachably connected, disposed, or integrally connected and disposed. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to fig. 1 to 4, in the embodiment of the present invention, a furnace generating a large temperature gradient mainly includes a bottom plate 1, an outer shell 2, a seed rod 9, a crucible 15, an upper step 17 and a lower step 20, the top end of the bottom plate 1 is fixedly installed with the outer shell 2, the middle portion of the inner side of the outer shell 2 is fixedly installed with a heat conducting frame 12, a heat insulator 3 is filled between the outer side wall of the heat conducting frame 12 and the inner wall of the outer shell 2, the middle portion of the heat conducting frame 12 is fixedly installed with an inner shell 11, a furnace wire 5 is fixedly installed between the side wall of the inner shell 11 and the side wall of the heat conducting frame 12, the top end of the outer shell 1 is covered with a top cover 4, the middle portion of the left side of the top cover 4 is fixedly installed with a middle frame 32, the upper slide rod 31 is slidably installed at the upper portion of the inner side of the middle frame, a gear 33 is fixedly installed in the middle of the outer side of the middle shaft 37, racks 38 matched with the gear 33 are fixedly installed on the side walls of the upper sliding rod 31 and the lower sliding rod 35, a stop rod 36 is installed on the inner side of the middle frame 33 in a penetrating mode, sliding openings 34 matched with the stop rod 36 are formed in the upper sliding rod 31 and the lower sliding rod 35, symmetrically-arranged upper clamping heads 29 are fixedly installed on the left side of the top cover 4, and symmetrically-arranged lower clamping heads 39 are fixedly installed on the upper portion of the left side of the shell 2;
the middle part of the top cover 4 is provided with a wear-resistant sleeve 8 in a penetrating and fixed mode, the middle part of the wear-resistant sleeve 8 is provided with a seed rod 9 in a penetrating and inserting mode, the bottom end of the seed rod 9 is fixedly provided with a seed material 13, the lower part of the inner side of the inner shell 11 is provided with a liner 14, the middle part of the top end of the liner 14 is provided with a lower ladder block 20 in a sliding and connecting mode, the upper ladder block 17 is stacked and installed above the lower ladder block 20, the bottom end of the upper ladder block 17 is fixedly provided with an insert 19 arranged in an equal distance, the top ends of the lower ladder block 20 and the liner 14 are provided with slots matched with the insert 19, the top end of the upper ladder block 17 is stacked and provided with a crucible 15, the outer wall of the bottom end of the crucible 15 and the side wall of the top end of the liner 14 are respectively fixedly provided with a sliding and connecting frame 16 arranged in a symmetrical mode, a sliding chute matched with the guide rod 21 is formed in the liner 14, the raw material melt 10 is filled at the upper part of the inner side of the crucible 15, the seed material 13 is immersed in the raw material melt 10, the cover plate 7 is sleeved and mounted at the lower part of the outer side of the seed rod 9 of the sliding connection frame 16, and the cover plate 7 is covered and mounted above the crucible 15;
the inside observation hole 6 of seting up the symmetry and setting up of top cap 4, the intubate 28 is installed in 6 inboard pegs graft of observation hole, and plug 24 is installed in 28 tops pegs graft of intubate, 28 outside upper portion fixed mounting of intubate has the fender ring 27, 28 bottom fixed mounting of intubate has convex lens 26.
And an access hole matched with the furnace wire 5 is reserved at the bottom end of a cavity surrounded by the inner shell 11 and the heat conducting frame 12.
The top end of the plug 24 is fixedly provided with a rotary plate 23.
The lower part of the guide rod 21 is fixedly provided with a limit pin 22, and the inner side of the lower part of the liner 14 is provided with a sliding connection groove matched with the limit pin 22.
The front end of the middle shaft 32 is fixedly provided with a rotating frame 40.
The top end edge of the shell 2 is fixedly provided with a sealing ring 25, and the bottom end of the top cover 4 is fixedly provided with a gasket 41 matched with the sealing ring 25.
The furnace wire 5 is electrically connected with an external power supply and external control equipment through a wire harness.
The working principle of the invention is as follows:
the invention relates to a furnace generating large temperature gradient, when in use, the design of an inverted triangular-cone-shaped hearth is adopted, the convection of a temperature field in the hearth can be effectively increased, a larger temperature gradient is generated, so that very favorable conditions are generated for the growth of certain special crystals, the convection of the temperature field in the hearth is effectively increased, a larger temperature gradient is generated, so that very favorable conditions are generated for the growth of certain special crystals, the growth size of the crystals and the quality of the crystals can be improved, the device is simple and easy to implement, in addition, the upper ladder block 17 and the lower ladder block 20 can be overlapped and inserted, so that the left and right sliding can be realized, the overlapping position can be changed, the height of a crucible can be changed, in addition, in the work, the upper sliding rod 31 and the lower sliding rod 35 are driven to extend by rotating a middle shaft 37, the upper clamping head 29 and the lower clamping head 39 are pressed, the sealing, energy-conservation and switching are simple, excellent in use effect, will and cooperate the size that increases the crucible through card frame 30, be fit for growing out the large size crystal, and in order to guarantee the regulation stability and the firm degree of installation grafting of device, make the stability and the flexibility of equipment better, when observing, pull out end cap 24, can enlarge the observation through the intubate 28 that has convex lens 26, the convenience is to the observation of inside process, and after the observation, pull out intubate 28, take 24 reversals of end cap to insert intubate 28 back, it dies to block up observation hole 6, guarantee inside seal.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (7)
1. A furnace generating a large temperature gradient mainly comprises a bottom plate (1), an outer shell (2), a seed rod (9), a crucible (15), an upper ladder block (17) and a lower ladder block (20), and is characterized by mainly comprising the bottom plate (1), the outer shell (2), the seed rod (9), the crucible (15), the upper ladder block (17) and the lower ladder block (20), wherein the outer shell (2) is fixedly arranged at the top end of the bottom plate (1), a heat conducting frame (12) is fixedly arranged in the middle of the inner side of the outer shell (2), a heat insulator (3) is filled between the outer side wall of the heat conducting frame (12) and the inner wall of the outer shell (2), an inner shell (11) is fixedly arranged in the middle of the heat conducting frame (12), a furnace wire (5) is fixedly arranged between the side wall of the inner shell (11) and the side wall of the heat conducting frame (12), a top cover (4) is arranged at the top end, an upper sliding rod (31) is slidably mounted at the upper part of the inner side of the middle frame (32), a lower sliding rod (35) is slidably mounted at the lower part of the inner side of the middle frame (32), the end parts of the upper sliding rod (31) and the lower sliding rod (35) are fixedly provided with clamping frames (30), a middle shaft (37) is rotatably arranged in the middle of the middle frame (32), a gear (33) is fixedly arranged in the middle of the outer side of the middle shaft (37), the side walls of the upper sliding rod (31) and the lower sliding rod (35) are fixedly provided with racks (38) matched with the gear (33), a stop lever (36) is arranged on the inner side of the middle frame (33) in a penetrating way, a sliding opening (34) matched with the stop lever (36) is arranged inside the upper sliding rod (31) and the lower sliding rod (35), the left side of the top cover (4) is fixedly provided with symmetrically arranged upper clamping heads (29), the upper part of the left side of the shell (2) is fixedly provided with symmetrically arranged lower clamping heads (39);
the middle part of the top cover (4) is provided with a wear-resistant sleeve (8) in a penetrating and fixing mode, the middle part of the wear-resistant sleeve (8) is provided with a seed rod (9) in a penetrating and inserting mode, the bottom end of the seed rod (9) is provided with a seed material (13), the lower part of the inner side of the inner shell (11) is provided with a liner (14), the middle part of the top end of the liner (14) is provided with a lower ladder block (20) in a sliding and connecting mode, an upper ladder block (17) is stacked above the lower ladder block (20), the bottom end of the upper ladder block (17) is provided with plug blocks (19) which are arranged in an equidistant mode, the top ends of the lower ladder block (20) and the liner (14) are provided with slots matched with the plug blocks (19), the top end of the upper ladder block (17) is provided with crucibles (15) in a stacking mode, the outer wall of the bottom of the crucibles (15) and the side wall of the, the side convex strips (18) are in sliding contact with the inner wall of the sliding connection frame (16), guide rods (21) which are symmetrical in the front and back are fixedly mounted on the outer wall of the bottom end of the crucible (15), a sliding chute matched with the guide rods (21) is formed in the liner (14), raw material melt (10) is filled at the upper part of the inner side of the crucible (15), the seed material (13) is immersed in the raw material melt (10), a cover plate (7) is sleeved at the lower part of the outer side of the seed rod (9) of the sliding connection frame (16), and the cover plate (7) is covered and mounted above the crucible (15);
the novel multifunctional endoscope is characterized in that an observation hole (6) symmetrically arranged is formed in the top cover (4), an insertion pipe (28) is installed on the inner side of the observation hole (6) in an inserted mode, a plug (24) is installed on the top end of the insertion pipe (28) in an inserted mode, a baffle ring (27) is fixedly installed on the upper portion of the outer side of the insertion pipe (28), and a convex lens (26) is fixedly installed at the bottom end of the insertion pipe (28.
2. Furnace for generating large temperature gradients according to claim 1, characterized in that the bottom of the cavity enclosed by the inner shell (11) and the heat conducting frame (12) is left with an access opening for the furnace wire (5).
3. Furnace for generating large temperature gradients according to claim 1, characterized in that the top of the stopper (24) is fixedly mounted with a rotary vane (23).
4. The furnace for generating the large temperature gradient according to claim 1, wherein a limit pin (22) is fixedly installed at the lower part of the guide rod (21), and a sliding groove matched with the limit pin (22) is formed at the inner side of the lower part of the gasket (14).
5. Furnace generating large temperature gradients according to claim 1, characterized in that the front end of the middle shaft (32) is fixedly mounted with a swivel bracket (40).
6. Furnace generating a large temperature gradient according to claim 1, characterized in that the top edge of the outer shell (2) is fixedly provided with a sealing ring (25), and the bottom end of the top cover (4) is fixedly provided with a gasket (41) cooperating with the sealing ring (25).
7. Furnace generating a large temperature gradient according to claim 1, characterized in that the furnace wires (5) are electrically connected to an external power source and external control equipment by means of a wire harness.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010416946.1A CN111534857A (en) | 2020-07-01 | 2020-07-01 | Furnace capable of generating large temperature gradient |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010416946.1A CN111534857A (en) | 2020-07-01 | 2020-07-01 | Furnace capable of generating large temperature gradient |
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| CN111534857A true CN111534857A (en) | 2020-08-14 |
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| CN202010416946.1A Pending CN111534857A (en) | 2020-07-01 | 2020-07-01 | Furnace capable of generating large temperature gradient |
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Citations (8)
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| JP2002540051A (en) * | 1999-03-19 | 2002-11-26 | フライベルガー・コンパウンド・マテリアルズ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | Equipment for manufacturing single crystals |
| CN204058655U (en) * | 2014-07-02 | 2014-12-31 | 安徽旭特电子科技有限公司 | A kind of visual lift single crystal growing furnace |
| CN204830842U (en) * | 2015-07-09 | 2015-12-02 | 佛山市技新电气有限公司 | Electric melting furnace |
| CN206204482U (en) * | 2016-10-25 | 2017-05-31 | 珠海鼎泰芯源晶体有限公司 | A kind of device of the reduction InP crystal twins based on VGF methods |
| CN206930152U (en) * | 2017-07-03 | 2018-01-26 | 宿迁学院 | A kind of novel well type resistance furnace |
| CN207313424U (en) * | 2017-09-27 | 2018-05-04 | 东海县晶品居珠宝有限公司 | A kind of quartz continuous melting furnace for reducing the inclined wall of tubing |
| CN109137066A (en) * | 2018-10-30 | 2019-01-04 | 浙江羿阳太阳能科技有限公司 | Reduce the polycrystalline silicon ingot or purifying furnace of high-purity argon gas usage amount |
| CN212955440U (en) * | 2020-03-23 | 2021-04-13 | 哈尔滨奥瑞德光电技术有限公司 | Thermal field structure for growth of large-size sapphire crystal |
-
2020
- 2020-07-01 CN CN202010416946.1A patent/CN111534857A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002540051A (en) * | 1999-03-19 | 2002-11-26 | フライベルガー・コンパウンド・マテリアルズ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | Equipment for manufacturing single crystals |
| CN204058655U (en) * | 2014-07-02 | 2014-12-31 | 安徽旭特电子科技有限公司 | A kind of visual lift single crystal growing furnace |
| CN204830842U (en) * | 2015-07-09 | 2015-12-02 | 佛山市技新电气有限公司 | Electric melting furnace |
| CN206204482U (en) * | 2016-10-25 | 2017-05-31 | 珠海鼎泰芯源晶体有限公司 | A kind of device of the reduction InP crystal twins based on VGF methods |
| CN206930152U (en) * | 2017-07-03 | 2018-01-26 | 宿迁学院 | A kind of novel well type resistance furnace |
| CN207313424U (en) * | 2017-09-27 | 2018-05-04 | 东海县晶品居珠宝有限公司 | A kind of quartz continuous melting furnace for reducing the inclined wall of tubing |
| CN109137066A (en) * | 2018-10-30 | 2019-01-04 | 浙江羿阳太阳能科技有限公司 | Reduce the polycrystalline silicon ingot or purifying furnace of high-purity argon gas usage amount |
| CN212955440U (en) * | 2020-03-23 | 2021-04-13 | 哈尔滨奥瑞德光电技术有限公司 | Thermal field structure for growth of large-size sapphire crystal |
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Application publication date: 20200814 |
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