CN111506464B - System for generating chart report rapidly aiming at WAT data - Google Patents

System for generating chart report rapidly aiming at WAT data Download PDF

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CN111506464B
CN111506464B CN201910098945.4A CN201910098945A CN111506464B CN 111506464 B CN111506464 B CN 111506464B CN 201910098945 A CN201910098945 A CN 201910098945A CN 111506464 B CN111506464 B CN 111506464B
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data
configuration file
chart
items
item
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CN111506464A (en
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杨文浩
邵康鹏
杨慎知
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Hangzhou Guangli Test Equipment Co ltd
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Hangzhou Guangli Microelectronics Co ltd
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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00Error detection; Error correction; Monitoring
    • G06F11/22Detection or location of defective computer hardware by testing during standby operation or during idle time, e.g. start-up testing
    • G06F11/2268Logging of test results
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/30Computing systems specially adapted for manufacturing

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  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Hardware Design (AREA)
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Abstract

The invention relates to a system for quickly generating a chart report aiming at WAT data, which comprises a distributed system, a Web server and an application program, wherein the distributed system is used for generating a chart report aiming at WAT data; the distributed system can store data, can calculate according to the received configuration item information, and sends the calculation result to the Web server; the Web server can receive the configuration item information sent by the application program, analyze the configuration item information and send the configuration item information to the distributed system, and feed back the configuration item information to the application program after receiving a calculation result of the distributed system; the application can generate a configuration file. The invention can generate the report according to the fixed configuration item, thereby improving the data processing speed.

Description

System for generating chart report rapidly aiming at WAT data
Technical Field
The invention relates to the field of semiconductor design and production, in particular to a system for quickly generating a chart report aiming at WAT data.
Background
In the chip manufacturing process, after all the process steps are completed on the semiconductor silicon wafer, electrical tests performed on various test structures on the silicon wafer are called Wafer Acceptance Test (WAT). Through analysis of WAT data, problems in the semiconductor manufacturing process can be found, thereby helping the manufacturing process to adjust. Conventional analysis methods include generating a graph using Excel processing data, generating a graph using R language script processing data, or using specialized EDA data analysis software. These several methods are data and drawings combined.
However, as the chip integration level is higher and higher, the number of test items required by the WAT is rapidly expanded, and the magnitude of one day can reach the PB level. In the face of this level of large data volume, the above methods are very time consuming to perform, inefficient, or even inoperable. In addition, the user is required to repeatedly manually screen the data and manually configure the corresponding chart to generate the chart report for statistical analysis, so that the engineer spends huge time cost in manually configuring the layer.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provides a system for quickly generating a chart report aiming at WAT data, wherein in the system, a user can solidify configuration items after applying practice for a plurality of times, and when WAT test data of the same node come in, the report can be quickly sent out, so that the time cost and the practice cost of data analysis are reduced. In order to achieve the technical purpose, the technical scheme of the invention is as follows:
the system for quickly generating the chart report aiming at WAT data comprises a distributed system, a Web server and an application program;
the distributed system can store data, can calculate according to the received configuration item information, and sends the calculation result to the Web server;
the Web server can receive configuration item information sent by the application program, analyze the configuration item information and send the configuration item information to the distributed system, and feed back the configuration item information to the application program after receiving a calculation result of the distributed system;
the application program can generate a configuration file, wherein the configuration file comprises the following components: data screening items, data calculation analysis items, chart attribute items and report template items; the data screening item is used for determining data needing to be calculated and analyzed, the data calculation and analysis item is used for determining a calculation mode of the data, the chart attribute item is used for determining a chart display mode of a calculation result, and the report template item is used for determining a template of a test report;
the manner in which the application program generates the configuration file includes:
1) The manual configuration mode comprises the following steps: setting each configuration item, and manually setting to form a configuration file;
2) The full-automatic generation mode comprises the following steps: calling a configuration file for generating a test report in the previous time, and setting the configuration file as a target configuration file; identifying the configuration of a data screening item and a data calculation analysis item in a target configuration file, and determining data needing calculation analysis and a calculation mode thereof; if the number of times of configured occurrence in the historical configuration file exceeds a threshold value, automatically taking the target configuration file as a current configuration file;
the application program sends the data screening items and the data calculation analysis items in the configuration file to the Web server, draws a corresponding data chart according to the chart attribute items in the configuration file after receiving the calculation result fed back by the Web server, and then generates a test report by utilizing the data chart according to the report template items in the configuration file.
As a further improvement, the method for generating the configuration file by the application program further comprises a semi-automatic generation mode: calling a configuration file for generating a test report in the previous time, and setting the configuration file as a target configuration file; identifying the configuration of a data calculation analysis item in a target configuration file, and if the configured data calculation analysis item exceeds a threshold value in the historical configuration file, opening a data screening item to enable a user to manually set; and after the user completes the confirmation of the data screening items, the manually determined data screening items, the data calculation analysis items, the chart attribute items and the report template items in the target configuration file are used as the current configuration file.
In the above semiautomatic generation mode, when the number of times of the configuration of the data calculation analysis item in the target configuration file exceeds the threshold, the setting of the data screening item in the target configuration file is taken as the default setting, and the user opens the data screening item to manually modify the setting of the data screening item, so as to improve the configuration speed.
As a further improvement, in the manner of generating the configuration file by the application program, the priorities from high to low are respectively: full-automatic generation mode, semi-automatic generation mode and manual configuration mode. That is, the application program matches the full-automatic generation mode first, when the generation of the configuration file fails or the user does not adopt the generated configuration file, the application program matches the semi-automatic generation mode again, and when the generation of the configuration file fails or the user does not choose to adopt the semi-automatic generation mode, the manual configuration mode is provided finally.
As a further improvement, the application program transmits the configuration item information to the Web server in the form of a URL request by combining the data filtering item and the data calculation analysis item design into a URL. URL, collectively Uniform Resource Locator, chinese called URL, is an address on the internet for identifying a resource, and may contain very rich information, and according to the data filtering term and the data calculation analysis term configured by the user, the URL is designed and combined into a URL with a specific meaning.
As a further improvement, the data screening options include wafer number, coordinate location and cell name for locating data requiring computational analysis in a distributed system.
As a further improvement, the data calculation analysis item provides a plurality of calculation mode selectable items for being used as the calculation mode of the selected data after being selected; and the user can customize the manner of computation to generate selectable items.
As a further improvement, WAT test data is stored in the distributed system in a unit table form, wherein the unit table comprises lot information, wafer information, die coordinates, test items and test values, and WAT test data in the corresponding unit table can be extracted according to the lot information, wafer information and die coordinates. The design of the unit table refers to inherent characteristic layering of WAT test data: lot, wafer, die, test items and test values.
As a further improvement, the distributed system invokes data according to the received data screening item, calculates an analysis item according to the data, and realizes distributed calculation by accessing Spark to obtain a calculation result. The Spark is accessed, and the high-efficiency distributed computing capacity is utilized, so that the computing speed is improved.
As a further improvement, the distributed system utilizes a plurality of servers (more than 3 servers) to form a local area network, and a Cassandra distributed data framework is adopted to form a distributed cluster.
As a further improvement, the Web server adopts a Spring MVC framework, and Spring Web MVC is a Java-based lightweight Web framework for realizing the request driving type of the Web MVC design pattern.
Compared with the prior art, the invention has the beneficial effects that:
1. the invention adopts the distributed system to store data, and has the advantages that when the data is accumulated to a huge amount, the capacity can be expanded by only adding the server, the data is not easy to lose, and the completeness is ensured.
2. After the system of the invention is adopted by a user to carry out data analysis, after multiple application practices, the configuration items can be solidified, a fixed configuration file and a specific URL (uniform resource locator) are generated, when the conditions of the solidified configuration items are matched, WAT test data of the same node can be reported in quickly, and the time cost and the practice cost of data analysis are reduced.
Drawings
FIG. 1 is a system architecture diagram of the present invention.
Detailed Description
The invention is described in further detail below with reference to the attached drawings and detailed description:
a system for quickly generating a chart report for WAT data as shown in fig. 1 includes a distributed system, a Web server, and an application program installed at a local end.
The distributed system forms a local area network by using more than 3 servers, and forms a distributed cluster by adopting a Cassandra distributed data framework for data storage and distributed computation. The WAT test data is stored in the distributed system in a unit table form, wherein the unit table comprises lot information, wafer information, die coordinates, test items and test values, and the WAT data is led into the distributed system after being led out from the test machine. The distributed system invokes data according to the received data screening items, calculates analysis items according to the data, realizes distributed calculation by accessing Spark, and sends calculation results to the Web server.
The Web server adopts a Spring MVC framework, and the Spring Web MVC is a Java-based lightweight Web framework for realizing the request driving type of the Web MVC design mode. After the basic mapping relation is configured, the Web server can receive the URL request sent by the application program and analyze the URL request, then the analyzed configuration item information is sent to the distributed system, and the calculation result of the distributed system is received and fed back to the application program.
The application program can generate a configuration file, wherein the configuration file comprises the following components: data screening items, data calculation analysis items, chart attribute items, and report template items. The data screening options comprise a plurality of configuration items such as wafer numbers, coordinate positions, cell names and the like, and the data needing to be calculated and analyzed in the distributed system are positioned by setting the configuration items. The data calculation analysis item provides a plurality of calculation mode selectable items which are used for being selected as the calculation mode of the selected data; and the application program also provides a self-defining function of the calculation mode, and a user can self-define the required calculation mode to generate selectable options. The chart attribute item is used for determining a chart display mode of the calculation result. The report template item is used to determine a template for the test report.
The application program provides three types of configuration file generation modes, namely:
1) Manual configuration: setting each configuration item, and manually setting to form a configuration file;
2) The full-automatic generation mode comprises the following steps: calling a configuration file for generating a test report in the previous time, and setting the configuration file as a target configuration file; identifying the configuration of a data screening item and a data calculation analysis item in a target configuration file, and determining data needing calculation analysis and a calculation mode thereof; if the number of times of configured occurrence in the historical configuration file exceeds a threshold value, automatically taking the target configuration file as a current configuration file;
3) Semi-automatic generation mode: calling a configuration file for generating a test report in the previous time, and setting the configuration file as a target configuration file; identifying the configuration of a data calculation analysis item in a target configuration file, if the configured data calculation analysis item exceeds a threshold value, setting a data screening item in the target configuration file as a default setting, and opening the data screening item to enable a user to manually modify the setting; and after the user completes the confirmation of the data screening items, the manually determined data screening items, the data calculation analysis items, the chart attribute items and the report template items in the target configuration file are used as the current configuration file.
In the generation modes of the three configuration files, the priorities are respectively from high to low: a full-automatic generation mode, a semi-automatic generation mode and a manual configuration mode; the application program is matched with the full-automatic generation mode firstly, when the generation of the configuration file fails or the user does not adopt the generated configuration file, the application program is matched with the semi-automatic production mode again, and when the generation of the configuration file fails or the user does not choose to adopt the semi-automatic generation mode, the manual configuration mode is provided finally.
The application program combines the data screening item and the data calculation analysis item design in the configuration file into a URL, sends configuration item information to the Web server in the form of a URL request, draws a corresponding data chart according to the chart attribute item in the configuration file after receiving the calculation result fed back by the Web server, and then generates a test report by utilizing the data chart according to the report template item in the configuration file.
The following examples will enable those skilled in the art to more fully understand the present invention and are not intended to limit the same in any way.
Example 1
For the first streaming piece of data, 25 pieces of wafer data are imported in the distributed system.
Opening an application program, wherein the generation of configuration files by a full-automatic generation mode and a semi-automatic generation mode fails (the frequency thresholds of the full-automatic generation mode and the semi-automatic generation mode are preset to be 2), and a user performs the following manual configuration:
data screening options: select slot=7 (slice 7); coordinate position: x, y=21, 35; cellName: nch_double_015_vga, nch_double_015_ida.
Data calculation analysis item: raw data (original value was used, no secondary calculation analysis was done).
Chart attribute item: and drawing an IV curve.
Report template item: only IV map import PPT is set.
After the configuration items are set, a configuration file a is generated.
According to the configuration file a, the system for quickly generating the chart report aiming at WAT data automatically generates and outputs an analysis report on an application program after completing the calculation and analysis of the selected data.
Example 2
For the second streaming piece of data, 25 pieces of wafer data are imported in the distributed system.
Opening an application program, wherein the generation of configuration files by a full-automatic generation mode and a semi-automatic generation mode fails (the frequency thresholds of the full-automatic generation mode and the semi-automatic generation mode are preset to be 2), and a user performs the following manual configuration:
data screening options: select slot=7 (slice 7); coordinate position: x, y=21, 35; cellName: nch_double_015_vga, nch_double_015_ida.
Data calculation analysis item: raw data (original value was used, no secondary calculation analysis was done).
Chart attribute item: and drawing an IV curve.
Report template item: only IV map import PPT is set.
After the configuration items are set, generating a configuration file b.
According to the configuration file b, the system for quickly generating the chart report aiming at WAT data automatically generates and outputs an analysis report on an application program after completing the calculation and analysis of the selected data.
Example 3
For the third time of streaming slice data, 25 slices of wafer data are imported in the distributed system.
Opening an application program, wherein the generation of configuration files by a full-automatic generation mode and a semi-automatic generation mode fails (the frequency thresholds of the full-automatic generation mode and the semi-automatic generation mode are preset to be 2), and a user performs the following manual configuration:
data screening options: select slot=7 (slice 7); coordinate position: x, y=21, 35; cellName: nch_double_016_vga, nch_double_016_ida.
Data calculation analysis item: raw data (original value was used, no secondary calculation analysis was done).
Chart attribute item: and drawing an IV curve.
Report template item: only IV map import PPT is set.
After the configuration items are set, a configuration file c is generated.
According to the configuration file c, the system for quickly generating the chart report aiming at WAT data automatically generates and outputs an analysis report on an application program after completing the calculation and analysis of the selected data.
Example 4
For the fourth streaming piece of data, 25 pieces of wafer data are imported in the distributed system.
In the application program opening, the full-automatic generation mode fails to generate the configuration file (the full-automatic generation mode is preset to be 2), the semi-automatic generation mode (the frequency threshold of the semi-automatic generation mode is preset to be 2) is started, after the user sets the data screening options, the configuration file d is generated, and each configuration item in the configuration file d is as follows:
data screening options: select slot=7 (slice 7); coordinate position: x, y=21, 35; cellName: nch_double_015_vga, nch_double_015_ida; nch_double_016_vga, nch_double_016_ida.
Data calculation analysis item: raw data (original value was used, no secondary calculation analysis was done).
Chart attribute item: and drawing an IV curve.
Report template item: only IV map import PPT is set.
According to the configuration file d, the system for quickly generating the chart report aiming at WAT data automatically generates and outputs an analysis report on an application program after completing the calculation and analysis of the selected data.
Example 5
For the fifth streaming piece of data, 25 pieces of wafer data are imported in the distributed system.
In the application program opening process, the full-automatic generation mode is started (the full-automatic generation mode is preset to be 2), a configuration file e is automatically generated, and each configuration item in the configuration file e is as follows:
data screening options: select slot=7 (slice 7); coordinate position: x, y=21, 35; cellName: nch_double_015_vga, nch_double_015_ida; nch_double_016_vga, nch_double_016_ida.
Data calculation analysis item: raw data (original value was used, no secondary calculation analysis was done).
Chart attribute item: and drawing an IV curve.
Report template item: only IV map import PPT is set.
When the user confirms that the configuration file e is adopted, the system for quickly generating the chart report aiming at WAT data automatically generates and outputs an analysis report on an application program after completing the calculation analysis of the selected data.
Example 6
For the sixth streaming piece of data, 25 pieces of wafer data are imported in the distributed system.
Starting a full-automatic generation mode (the full-automatic generation mode is preset as 2) in an application program, automatically generating a configuration file, and giving up the configuration file by a user; starting a semi-automatic generation mode (the threshold of the times of the semi-automatic generation mode is preset to be 2), and generating a configuration file f after a user sets data screening options, wherein each configuration item in the configuration file f is as follows:
data screening options: select slot=7 (slice 7); coordinate position: x, y=21, 35; cellName: nch_double_016_vga, nch_double_016_ida.
Data calculation analysis item: raw data (original value was used, no secondary calculation analysis was done).
Chart attribute item: and drawing an IV curve.
Report template item: only IV map import PPT is set.
According to the configuration file f, the system for quickly generating the chart report aiming at WAT data automatically generates and outputs an analysis report on an application program after the calculation and analysis of the selected data are completed.
According to the embodiment, when WAT test data of the same node comes in, a report can be quickly sent out, the process of manually screening the data and configuring the chart by a user is omitted, and the time cost and the practice cost of data analysis are reduced.
Finally, it should be noted that the above list is only specific embodiments of the present invention. Obviously, the invention is not limited to the above embodiments, but many variations are possible. All modifications directly derived or suggested to one skilled in the art from the present disclosure should be considered as being within the scope of the present invention.

Claims (10)

1. The system for quickly generating the chart report aiming at WAT data is characterized by comprising a distributed system, a Web server and an application program; the distributed system can store data, can calculate according to the received configuration item information, and sends the calculation result to the Web server;
the Web server can receive configuration item information sent by the application program, analyze the configuration item information and send the configuration item information to the distributed system, and feed back the configuration item information to the application program after receiving a calculation result of the distributed system;
the application program can generate a configuration file, wherein the configuration file comprises the following components: data screening items, data calculation analysis items, chart attribute items and report template items; the data screening item is used for determining data needing to be calculated and analyzed, the data calculation and analysis item is used for determining a calculation mode of the data, the chart attribute item is used for determining a chart display mode of a calculation result, and the report template item is used for determining a template of a test report;
the manner in which the application program generates the configuration file includes:
1) The manual configuration mode comprises the following steps: setting each configuration item, and manually setting to form a configuration file;
2) The full-automatic generation mode comprises the following steps: calling a configuration file for generating a test report in the previous time, and setting the configuration file as a target configuration file; identifying the configuration of a data screening item and a data calculation analysis item in a target configuration file, and determining data needing calculation analysis and a calculation mode thereof; if the number of times of configured occurrence in the historical configuration file exceeds a threshold value, automatically taking the target configuration file as a current configuration file;
the application program sends the data screening items and the data calculation analysis items in the configuration file to the Web server, draws a corresponding data chart according to the chart attribute items in the configuration file after receiving the calculation result fed back by the Web server, and then generates a test report by utilizing the data chart according to the report template items in the configuration file;
the distributed system calculates according to the received configuration item information, and comprises the following steps: and positioning data needing calculation and analysis in the distributed system according to the configuration item information, and calculating the selected data.
2. The system for rapid generation of chart reports for WAT data according to claim 1, wherein the means for generating the configuration file by the application further comprises semi-automatic means for generating:
calling a configuration file for generating a test report in the previous time, and setting the configuration file as a target configuration file; identifying the configuration of a data calculation analysis item in a target configuration file, and if the configured data calculation analysis item exceeds a threshold value in the historical configuration file, opening a data screening item to enable a user to manually set; and after the user completes the confirmation of the data screening items, the manually determined data screening items, the data calculation analysis items, the chart attribute items and the report template items in the target configuration file are used as the current configuration file.
3. The system for quickly generating a chart report for WAT data according to claim 2, wherein in the manner in which the application generates the configuration file, the priorities from high to low are: full-automatic generation mode, semi-automatic generation mode and manual configuration mode.
4. The system for rapid generation of a chart report for WAT data according to claim 1 wherein said application program sends configuration item information in the form of URL requests to the Web server by combining data filtering items and data calculation analysis item designs into URLs.
5. The system for rapid generation of chart reports for WAT data according to claim 1, wherein said data screening options comprise wafer number, coordinate location and cell name for locating data requiring computational analysis in a distributed system.
6. The system for rapid generation of a chart report for WAT data of claim 1 wherein said data calculation analysis term provides a number of calculation mode options for selecting as a calculation mode for selected data; and the user can customize the manner of computation to generate selectable items.
7. The system for quickly generating a chart report for WAT data according to claim 1, wherein the WAT test data is stored in the distributed system in the form of a unit table, the unit table includes lot information, wafer information, die coordinates, test items and test values, and the WAT test data in the corresponding unit table can be extracted according to the lot information, wafer information and die coordinates.
8. The system for quickly generating a chart report for WAT data according to claim 1, wherein said distributed system retrieves data according to the received data filtering term and calculates an analysis term according to the data, and performs distributed calculation by accessing Spark to obtain a calculation result.
9. The system for rapid generation of chart reports for WAT data according to claim 1, wherein the distributed system utilizes a plurality of servers to form a local area network and uses Cassandra distributed data architecture to form a distributed cluster.
10. The system for rapid generation of chart reports for WAT data according to claim 1, wherein said Web server employs a SpringMVC framework.
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