CN111505764B - Method for preparing arrayed optical waveguide flexible touch sensor - Google Patents
Method for preparing arrayed optical waveguide flexible touch sensor Download PDFInfo
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Abstract
The touch sensor comprises a flexible optical waveguide touch sensitive layer, a flexible circuit layer and a flexible substrate layer which are sequentially glued. The flexible optical waveguide touch sensitive layer comprises a plurality of optical waveguide inner cores distributed in an array mode and an optical waveguide cladding layer for integrally cladding the optical waveguide inner cores. The flexible circuit layer comprises a light-emitting power supply end and an optical signal receiving and processing end, the light-emitting power supply end generates an optical signal, the optical signal is transmitted to the optical signal receiving and processing end through an optical waveguide, the optical signal is converted into an electric signal by the optical signal receiving and processing end, and the electric signal is sent out in a wireless signal mode. The flexible substrate layer is made of flexible materials and plays a role in protection and auxiliary fixation. The touch sensor can be used for touch information acquisition and processing, and has the advantages of high flexibility, high sensitivity, high spatial resolution density and the like. The sensor has the advantages of simple structure, low power consumption, convenience in integration with an environment to be detected, and low data cost when the sensing area is increased.
Description
Technical Field
The invention belongs to the technical field of flexible touch sensors and soft robots, and particularly relates to an arrayed optical waveguide flexible touch sensor and a preparation method and application thereof.
Background
The touch sensor is generally used for collecting touch information such as force, shape and pressure intensity, and has wide application in the fields of robots, wearable equipment, virtual reality, intelligent artificial limbs, man-machine interaction and the like. Conventional tactile sensors are often fabricated using silicon-based semiconductor technology or MEMS (micro electro Mechanical Systems) technology, and are mostly rigid, and use layouts arranged at joints or other locations of interest to measure or calculate tactile information during interaction. However, compared with the biological contrast body skin with the sense of touch, the information acquired in such a way is often discrete and single-point, and the acquired tactile information is incomplete. The information presented at the centralized tactile sensor may be the same but for a variety of different stimuli. This is obviously not in accordance with the characteristics of the real tactile information that the space density is high and the continuous distribution area is large. Current discrete rigid tactile sensors limit the possibility of collecting more complex tactile interaction information.
Based on the research on rigid tactile sensors, combined with soft robotics, researchers have proposed the use of flexible tactile sensors as a solution. To collect continuous high-density tactile information, the use of flexible materials has certain advantages: first, flexible materials can become a finite number of sensitive nodes approaching infinity, thereby obtaining more comprehensive tactile information. Second, flexible materials can transform force interactions into large deformations of the material, with the potential to achieve higher sensitivity. And the flexible material has a certain shock absorption and buffering effect in the aspect of interactive safety protection.
In order to realize the most important flexible sensing unit in the flexible touch sensor, the existing flexible sensor adopts the principles of resistance type, piezoresistive type, piezoelectric type, capacitance type, electromagnetic type and the like to convert touch information into an output electric signal. And liquid metal, conductive hydrogel, carbon nanotubes, island bridge circuits, etc. are used to maintain the flexibility of the sensor. However, different working principles and materials have certain defects in the aspects of sensitivity, working environment, processing circuit and the like. For example, a common capacitive flexible touch sensor often has crosstalk between different sensitive nodes, and a special reading strategy and circuit need to be designed. The electromagnetic flexible touch sensor well solves the problem that a towing cable is removed from the sensor, but the requirement of a professional detection environment is introduced, so that the integration usability is reduced, and the application scenes are reduced. The liquid metal can keep the follow-up property along with the soft base material, and the tactile information is reflected through the change of the resistance value, but the liquid metal has the defects of high packaging difficulty and easiness in leakage, and meanwhile, the static working zero point can be continuously changed along with the deformation. Meanwhile, one problem that different touch sensors are difficult to avoid is that as the sensing area is continuously increased and the number of sensitive nodes is continuously increased, the amount of data to be processed is also increased geometrically, which presents a great challenge to a processing circuit and brings resistance to large-scale array of the touch sensors.
In summary, in the field of flexible touch sensors, sensor solutions with the advantages of high sensitivity, high spatial resolution, wireless performance, easy integration and transplantation, and low data processing cost are still needed.
Disclosure of Invention
The invention aims to provide an arrayed optical waveguide flexible touch sensor and a preparation method and application thereof. The flexible touch sensor disclosed by the invention has the functions of detecting touch information such as the magnitude of in-plane contact force, the direction of the contact force, the spatial distribution form of the contact force, the time sequence change of the contact force and the like, and has the advantages of high flexibility, high sensitivity, high spatial resolution, high response speed, wireless property and the like. The system has the advantages of simple structure, low cost, low power consumption, convenient integration with the environment to be tested and low data cost in large-area touch information acquisition.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention discloses a preparation method of an arrayed optical waveguide flexible touch sensor, which comprises the following steps:
step S1, manufacturing the flexible optical waveguide touch sensitive layer, which specifically comprises the following steps: manufacturing an outline mold and an optical waveguide inner core mold of the flexible optical waveguide touch sensitive layer; assembling the outline mold and the optical waveguide inner core mold to form a mold of the flexible optical waveguide touch sensitive layer; injecting a first liquid elastomer into a die cavity of the flexible optical waveguide touch sensitive layer, standing and heating until the first liquid elastomer is completely cured, opening an outline die, and taking out an optical waveguide inner core die to obtain an optical waveguide cladding; injecting the second liquid elastomer into the hollow hole in the optical waveguide cladding, standing and heating until the second liquid elastomer is completely cured to obtain an optical waveguide inner core;
step S2, fabricating a flexible circuit layer and assembling the flexible circuit layer with the flexible optical waveguide touch sensitive layer, specifically including: designing circuits of a light-emitting power supply end and an optical signal receiving and processing end, printing the circuits on a flexible circuit board, welding and debugging circuit elements, and aligning and fixedly connecting two ends of an optical waveguide inner core with the optical waveguide power supply end and the optical signal receiving and processing end respectively;
step S3, fabricating and packaging a flexible substrate layer, specifically including: and preparing a mould of the flexible substrate layer, injecting the third liquid elastomer into the mould of the flexible substrate layer after uniform defoaming treatment, heating and standing until the third liquid elastomer is completely cured, taking out the flexible substrate layer and packaging the flexible substrate layer at the bottom of the prepared flexible circuit layer.
Further, in step S1, in the wavelength range of the optical signal generated by the light-emitting power supply end, the refractive index of the optical waveguide core obtained by completely curing the second liquid elastomer is larger than the refractive index of the optical waveguide cladding obtained by completely curing the first liquid elastomer.
The invention has the characteristics and beneficial effects that:
(1) the arrayed optical waveguide flexible touch sensor provided by the invention detects touch information by adopting an optical waveguide total reflection principle, comprises the contact force magnitude, the contact force direction, the contact force spatial distribution form, the contact force time sequence change and the like, can be further used for realizing contact force perception, object hardness perception, object texture perception, object surface quality perception and the like of a robot hand, and is applied to scenes such as robots, wearable equipment, virtual reality, intelligent artificial limbs, human-computer interaction and the like.
(2) The arrayed optical waveguide flexible touch sensor has the advantages of high flexibility, high sensitivity, high spatial resolution, high response speed, low power consumption and the like. The system has a simple structure, can realize no cable, is convenient to integrate with the environment to be tested, and has the advantage of low data cost in large-area touch information acquisition.
(3) The preparation method of the arrayed optical waveguide flexible touch sensor has the advantages of simple process, low cost, high finished product stability and the like, and can be used for quickly, massively and stably manufacturing the touch sensor.
(4) The arrayed optical waveguide flexible touch sensor has data collection and processing functions, and can analyze and calculate a large amount of collected touch information so as to obtain more abstract experience or knowledge. The flexible touch sensor is worn on a robot or a human finger, the surface of an object to be detected is brushed, surface texture detection or defect detection is carried out on the object to be detected, and a large amount of collected data are sent to a neural network for learning, so that the purpose of extracting surface quality information is achieved, and automatic detection is achieved.
Drawings
FIG. 1 is a schematic structural diagram of a first embodiment of an arrayed optical waveguide flexible tactile sensor according to the present invention;
FIG. 2 is an exploded view of the structure of FIG. 1;
FIG. 3(a) is a top view of the flexible optical waveguide touch sensitive layer of FIG. 1;
FIG. 3(b) is a cross-sectional view of the flexible optical waveguide touch sensitive layer of FIG. 1;
FIG. 4 is a schematic diagram of the flexible circuit layer structure of FIG. 1;
FIG. 5 is a schematic diagram of the signal conversion process of FIG. 1;
FIG. 6(a) is a bottom view of the flexible circuit layer of FIG. 1;
FIG. 6(b) is a side view of the flexible circuit layer of FIG. 1;
FIG. 7 is a schematic structural diagram of a second embodiment of an arrayed optical waveguide flexible tactile sensor according to the present invention;
FIG. 8 is an exploded view of the structure of FIG. 7;
FIG. 9(a) is a top view of the flexible sensitive layer of FIG. 7;
FIG. 9(b) is a cross-sectional view of the flexible sensitive layer of FIG. 7;
FIG. 10(a) is a top view of the flexible optical waveguide tactile sensitive layer of a third embodiment of the arrayed optical waveguide flexible tactile sensor of the present invention;
FIG. 10(b) is a cross-sectional view of FIG. 10 (a);
FIG. 11(a) is a top view of the flexible optical waveguide tactile sensitive layer of a fourth embodiment of the arrayed optical waveguide flexible tactile sensor of the present invention;
FIG. 11(b) is a cross-sectional view of FIG. 11 (a);
FIG. 12(a) is a top view of the flexible optical waveguide tactile sensitive layer of the fifth embodiment of the arrayed optical waveguide flexible tactile sensor of the present invention;
FIG. 12(b) is a cross-sectional view of FIG. 12 (a);
FIG. 13(a) is a top view of a flexible optical waveguide tactile sensitive layer of a sixth embodiment of an arrayed optical waveguide flexible tactile sensor of the present invention;
FIG. 13(b) is a cross-sectional view A-A of FIG. 13 (a);
FIG. 13(c) is a cross-sectional view B-B of FIG. 13 (a);
FIG. 14 is a schematic view of a seventh embodiment of the present invention;
fig. 15 is a schematic diagram of an eighth embodiment of the present invention.
The reference numerals are explained below:
1. the flexible optical waveguide touch sensitive layer comprises a flexible optical waveguide touch sensitive layer 11, an optical waveguide inner core 111, an upper optical waveguide inner core 112, a lower optical waveguide inner core 12, an optical waveguide cladding layer 2, a flexible circuit layer 21, a light source 22, a photoelectric triode 23, a battery 24, A/D conversion 25, a micro control unit 26, a wireless transmitting module 27, a resistor matched with the photoelectric triode 28, a capacitor 29, a resistor matched with the light source 3 and a flexible substrate layer.
DETAILED DESCRIPTION OF EMBODIMENT (S) OF INVENTION
The embodiments of the present disclosure are described in detail below with reference to the accompanying drawings.
The embodiments of the present disclosure are described below with specific examples, and other advantages and effects of the present disclosure will be readily apparent to those skilled in the art from the disclosure in the specification. It is to be understood that the described embodiments are merely illustrative of some, and not restrictive, of the embodiments of the disclosure. The disclosure may be embodied or carried out in various other specific embodiments, and various modifications and changes may be made in the details within the description without departing from the spirit of the disclosure. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict. All other embodiments, which can be derived by a person skilled in the art from the embodiments disclosed herein without making any creative effort, shall fall within the protection scope of the present disclosure.
Example one
As shown in fig. 1 and fig. 2, the arrayed optical waveguide flexible tactile sensor comprises a flexible optical waveguide tactile sensitive layer 1, a flexible circuit layer 2 and a flexible substrate layer 3 which are distributed in layers from top to bottom. The flexible optical waveguide touch sensitive layer 1 comprises a plurality of optical waveguide cores 11 and an optical waveguide cladding 12 integrally covering the optical waveguide cores 11. Wherein the optical waveguide core 11 is distributed in an array. The flexible circuit layer 2 comprises a light-emitting power supply end and a light signal receiving and processing end. The flexible substrate layer 3 is made of flexible materials with adaptive shapes, and plays a role in protection and auxiliary fixation. The flexible optical waveguide touch sensitive layer 1, the flexible circuit layer 2 and the flexible substrate layer 3 are formed by bonding and packaging silicon rubber glue. In this embodiment, the three-layered structure is a part of the spherical shell, and the cone angle of the corresponding conical surface is 30 °.
The invention discloses a flexible optical waveguide touch sensitive layer 1 which is a core touch sensitive element of a touch sensor. The flexible circuit layer 2 and the flexible substrate layer 3 are auxiliary elements that provide functional integrity and protective support for the tactile sensor. The flexible optical waveguide touch sensitive layer provided by the invention is used as a touch sensitive element, and whether the flexible touch sensor comprises the flexible circuit layer 2 and/or the flexible substrate layer 3 or not, the flexible optical waveguide touch sensitive layer is within the protection scope of the application.
The invention does not limit the material of the flexible optical waveguide touch sensitive layer, and any material which can meet the working requirement of the flexible optical waveguide can be used as the flexible optical waveguide. The working requirement of the flexible optical waveguide is that the flexible optical waveguide touch sensitive layer is made of a flexible material, and the refractive index of the optical waveguide inner core is larger than that of the external optical waveguide cladding in the wavelength range of selected light or other electromagnetic waves (in the invention, light signals generated by the light-emitting power supply end), so that the light or other electromagnetic waves with the selected wavelength can be totally reflected at the interface of the optical waveguide inner core and the optical waveguide cladding, and finally, the light or other electromagnetic waves are propagated along the waveguide direction through the propagation medium. It should be noted that the optical waveguide needs to satisfy the principle requirement of the present invention, that is, the optical waveguide can be deformed under the external force stimulation, so that the propagation of the optical signal is changed. Illustratively, the material of the flexible optical waveguide can select the polyurethane material or nylon fish wire provided by the invention as the inner core of the optical waveguide, and can select the silicon rubber material or air as the cladding of the optical waveguide.
As shown in fig. 2, the flexible optical waveguide touch sensitive layer 1 has a groove on the side for aligning the light source 21 and the phototransistor 22 with the optical waveguide core at the groove and realizing a firm assembly.
As shown in fig. 3(a) and 3(b), the flexible optical waveguide touch sensitive layer 1 includes an upper optical waveguide core 111 and a lower optical waveguide core 112, the optical waveguide cores 11 are distributed in two layers in an array manner, the optical waveguide cores in each layer are distributed in parallel, the two optical waveguide cores do not intersect and are distributed vertically in space, and the optical waveguide cores 11 are coated with an integral optical waveguide cladding 12.
The flexible circuit layer 2 comprises a light-emitting power supply end and a light signal receiving and processing end. The light-emitting power supply end of the flexible circuit layer 2 refers to a transmitting device capable of providing light (or other electromagnetic waves) of a selected operating wavelength to the optical waveguide. Illustratively, the light-emitting power supply terminal of the present invention can be implemented in a manner of supplying power to the infrared LED by using a battery and a resistor to provide infrared electromagnetic waves to the optical waveguide. The optical signal receiving and processing end of the flexible circuit layer 2 refers to a device for receiving optical signals transmitted by the optical waveguide, converting the optical signals into electric signals and transmitting the electric signals in a wireless mode, and a system for subsequently receiving the wireless signals and restoring the tactile information. Illustratively, the optical signal receiving and processing terminal of the present invention may employ a circuit structure composed of a photoelectric conversion module, a signal processing module, a wireless transmitting module, and a wireless receiving and processing module to implement the functions.
As shown in fig. 4 to 6(b), the flexible circuit layer 2 includes a light-emitting power supply terminal and a light signal receiving processing terminal. The light-emitting power supply end and the optical signal receiving and processing end are welded on the flexible printed circuit board to form a flexible circuit layer 2. Specifically, the light-emitting power supply end includes a power supply and a plurality of light sources, the power supply is used for supplying power to the light-emitting power supply end, including supplying power in a manner of a battery, a power supply line, wireless power supply, and the like, and the battery 23 is taken as an example in the embodiment for explanation. The light source 21 converts the electrical energy into an optical signal via a resistor 29 that is matched to the light source, and provides the optical signal to the optical waveguide. The light source includes an infrared LED, an LED with other wavelengths, or other emission sources, etc., and the present embodiment takes the infrared LED as an example for description. The optical signal receiving and processing end comprises a power supply, a photoelectric conversion module, a signal processing module, a wireless transmitting module and a wireless receiving and processing module. The power supply is used for supplying power to the optical signal receiving and processing terminal, and includes supplying power in a battery, a power supply line, a wireless power supply mode, and the like, and the battery 23 is taken as an example in the embodiment for description. The photoelectric conversion module includes a plurality of phototriodes 22, or a plurality of photodiodes and operational amplifiers. The signal processing module comprises an a/D converter 24 and a micro control unit 25. The wireless transmitting module is composed of a bluetooth or WiFi or NFC antenna, and bluetooth is taken as an example in this embodiment. The wireless receiving and processing module comprises a wireless receiver matched with the wireless transmitting module and a subsequent signal processing program, such as a neural network. The same power supply or different power supplies can be used for the light-emitting power supply and the optical signal receiving processing terminal, and in this embodiment, the same power supply battery 23 is used for illustration. All circuit components are arranged along with the change of the spherical angle, so that the circuit components are tightly attached to the polyimide flexible printed circuit board. The infrared LED light source 21 of luminous feed end and the phototriode 22 of light signal reception processing end inlay in the recess of flexible optical waveguide sense of touch sensitive layer 1 side, make two terminal surfaces of optical waveguide inner core 11 firmly laminate with infrared LED, phototriode 22, use the polyurethane material to bond, and this design can improve the propagation quality of light path, promotes light signal stability. The circuit structure realizes the following functions: the light source 21 emits light signals, the phototriode 22 receives light signals and converts the light signals into analog electric signals through a resistor 27 matched with the phototriode 22 and a capacitor 28 matched with the phototriode and used for signal filtering, the analog electric signals are converted into digital electric signals through an A/D converter 24, the digital electric signals are converted into wireless signals through a wireless sending module 26 and then sent out after passing through a micro control unit 25, and the wireless receiving and processing module obtains the wireless signals and analyzes and processes the wireless signals to restore touch information.
The signal transmission and energy conversion processes generated in the flexible circuit layer are as follows: the battery supplies power to the infrared LED, and the electric energy is converted into light energy; original optical signals emitted by the infrared LED are transmitted in the flexible optical waveguide, when a force stimulus acts on the optical waveguide, the optical waveguide deforms, so that the original optical signals in the optical waveguide are attenuated and become lossy optical signals, the lossy optical signals are detected by a photoelectric triode arranged at the tail end of the optical waveguide, and the lossy optical signals are converted into analog electrical signals at the position; the wireless receiving module which is connected with the analog electric signal captures the transmitted wireless signal, receives, records and analyzes the wireless signal, and decodes and restores the original force stimulation information through the operation of the neural network. If the photoelectric conversion module is a photodiode and an operational amplifier, the information conversion mode is that the photodiode detects the optical signal change at the tail end of the optical waveguide, converts the optical signal change into a tiny analog electric signal, amplifies the analog electric signal by the operational amplifier and then sends the tiny analog electric signal to the signal processing module.
The circuit substrate of the flexible circuit layer can be replaced according to the requirements of application scenes. Illustratively, the flexible circuit substrate based on polyimide material provided by the present invention, or a rigid printed circuit board substrate, or other stretchable flexible circuit substrate material, can be selected to accommodate tactile measurement application requirements of surfaces of different curvatures and different stiffnesses.
The optical waveguide cladding 12 is made of silicon rubber, the optical waveguide inner core 11 is made of polyurethane, and the flexible circuit layer 2 is printed on a polyimide film.
The flexible backing layer 3 of the invention, which provides protection for the tactile sensor and assists its secure attachment in the area where it is arranged, is made of a flexible material with a conformable shape, for example a silicone rubber material.
The working principle of the invention is as follows:
the arrayed optical waveguide flexible touch sensor can be easily arranged on a plane to be measured and used for collecting touch information at the position. Through the flexible substrate layer 3, the sensor can be tightly and firmly attached to a plane to be measured. In a working state, the circuit of the flexible circuit layer 2 is awakened, the light-emitting power supply end provides an input light source for the optical waveguide, and the optical signal acquisition processing end receives an optical signal transmitted from the optical waveguide. When the flexible touch sensitive area or the plane to be measured of the sensor is deformed by the force stimulation, the optical waveguide is deformed correspondingly, so that optical signals in the optical waveguide are lost to different degrees. The change of the optical signal is recorded at the optical signal acquisition and processing end, converted into an electric signal and sent to a computer through a wireless sending module in real time, and the electric signal is resolved through a neural network and reduced into tactile information, namely, the tactile perception is completed.
Specifically, when the flexible sensor is stimulated by an external force, the optical waveguide inner core 11 mainly changes in cross-sectional area and also partially changes in length, so that optical signal propagation loss occurs, the phototriode 22 detects the changed optical signal, and then outputs different electrical signals to detect the occurrence of tactile interaction.
The invention can detect all the crossed and mutually extruded optical waveguide intersections by adopting the optical waveguide sensing principle and the arrayed arrangement of the optical waveguides, and can sense the tactile information in a certain range near the sensitive nodes by taking the optical waveguide intersections as the sensitive nodes, and only the optical signal receiving and processing end needs to be arranged at the tail end of each optical waveguide. By means of the strategy, the flexible touch sensor provided by the invention achieves the advantage of acquiring the sensing area with geometric grade increase at the data processing cost of linear increase, namely, the sensing area has low data cost when the sensing area is increased.
The preparation method of the arrayed optical waveguide flexible touch sensor comprises the following steps:
and S1, manufacturing the flexible optical waveguide touch sensitive layer.
Step S101, manufacturing an outer shape die and an optical waveguide inner core die of the flexible optical waveguide touch sensitive layer, wherein the inner contour of the outer shape die is the same as the outer contour of the flexible optical waveguide touch sensitive layer 1 to be manufactured, and the outer contour of the optical waveguide inner core die is the same as the outer contour of the optical waveguide inner core 11 to be manufactured.
The outline mold can be manufactured by a 3D printing method or other methods. The selection of the optical waveguide inner core die with the proper morphology is the key for ensuring that the prepared optical waveguide can successfully realize the function of transmitting optical signals. Because the optical waveguide inner core die is immersed in the first liquid elastomer, after the first liquid elastomer is cured into the optical waveguide cladding, the shape of a cavity left by taking out the optical waveguide inner core die is consistent with the shape of the optical waveguide inner core die; and filling a second liquid elastomer in the hollow cavity, and after the second liquid elastomer is cured, enabling the shape of the formed optical waveguide inner core to be consistent with that of the hollow cavity. The morphology requirements of the optical waveguide inner core mold include: the optical waveguide core has a proper cross-sectional shape, so that the optical waveguide core has consistent sensitivity in different directions; the diameter of the light-emitting power supply end is proper, and the light-emitting power supply end and the light signal receiving processing end are matched in size; the optical waveguide has high surface quality, so that optical signals can be mostly propagated along the optical waveguide in a total reflection mode, and large power loss is not generated between the interface of the optical waveguide inner core and the optical waveguide cladding, so that enough allowance is left for optical loss brought by sensing touch information. Illustratively, a straight wire of spring or a pre-tensioned fishing line may be used as the optical waveguide core mold.
And S102, assembling the outline mold and the optical waveguide inner core mold to form a mold of the flexible optical waveguide touch sensitive layer.
Step S103, manufacturing an optical waveguide cladding.
After uniform defoaming treatment, a liquid elastomer Ecoflex 0030 (the name of an elastomer is known in the field) is injected into a cavity of a mould of a flexible optical waveguide touch sensitive layer, the flexible optical waveguide touch sensitive layer is placed into an oven to stand and heat until the liquid elastomer Ecoflex 0030 is completely cured, an outline mould is opened, and an optical waveguide inner core mould is taken out to obtain an optical waveguide cladding layer with a hollow cavity structure.
And step S104, manufacturing the optical waveguide inner core.
And (3) after uniform defoaming treatment of the liquid elastomer polyurethane, injecting the liquid elastomer polyurethane into a cavity left by the optical waveguide inner core mold in the optical waveguide cladding, and placing the cavity in an oven for standing and heating until the liquid elastomer polyurethane is completely cured to obtain the flexible optical waveguide touch sensitive layer.
And S2, manufacturing a flexible circuit layer and assembling the flexible circuit layer and the flexible optical waveguide touch sensitive layer.
Step S201, designing a circuit of a light-emitting power supply end and a light signal receiving and processing end to enable the circuit to be matched with the positions of two ends of a light waveguide inner core in the flexible optical waveguide touch sensitive layer, wherein the size of the overall layout of the circuit is not larger than that of the flexible optical waveguide touch sensitive layer.
Step S202, printing a circuit on the flexible circuit board, and welding and debugging circuit elements.
And S203, aligning and fixedly connecting two ends of the optical waveguide inner core with the optical waveguide power supply end and the optical signal receiving and processing end respectively. Two end faces of the optical waveguide inner core 11 are firmly attached to a light source 21 and a phototriode 22 in a circuit, and polyurethane materials are used for bonding.
And S3, manufacturing the flexible substrate layer and packaging.
And preparing the mould of the flexible substrate layer according to the shape of the surface to be arranged of the touch sensor, so that the shape of the mould of the flexible substrate layer is the same as that of the surface to be arranged. And (3) after the third liquid elastomer is subjected to uniform defoaming treatment, injecting the third liquid elastomer into a mould of the flexible substrate layer, heating and standing until the third liquid elastomer is completely cured, taking out the flexible substrate layer 3 and packaging the flexible substrate layer at the bottom of the prepared flexible circuit layer 2. The flexible substrate layer is made of flexible materials, and the flexible substrate layer can be made of silicon rubber materials by way of example.
Example two
As shown in fig. 7 to 9(b), one of the differences between the present embodiment and the first embodiment is that the surface curvatures of the flexible optical waveguide touch sensitive layer 1, the flexible circuit layer 2 and the flexible substrate 3 are different, and the three layers are all planar; the other difference is that the number of the optical waveguide cores in the flexible optical waveguide touch sensitive layer is different and is 8. The technical effect of the present embodiment is different from that of the first embodiment in that the present embodiment is more suitable for a working environment in which the sensitive area is a plane.
In addition, other contents of this embodiment, including the internal structures and functions of the flexible optical waveguide touch sensitive layer 1, the flexible circuit layer 2, and the flexible substrate 3, the working principle and the manufacturing method of the touch sensor, are the same as those of the first embodiment, and are not described herein again.
EXAMPLE III
As shown in fig. 10(a) and 10(b), the present embodiment is different from the first embodiment in that the optical waveguide core 11 in the flexible optical waveguide touch sensitive layer 1 is distributed in a single layer. The technical effects produced by the embodiment and the first embodiment are different in that the number of optical waveguide inner cores in the flexible optical waveguide touch sensitive layer is reduced, the preparation difficulty is reduced, and the flexible optical waveguide touch sensitive layer is more suitable for detecting whether the sensitive surface is collided or not, rather than extracting more abundant touch information.
In addition, other contents of this embodiment, including the internal structures and functions of the flexible optical waveguide touch sensitive layer 1, the flexible circuit layer 2, and the flexible substrate 3, the working principle and the manufacturing method of the touch sensor, are the same as those of the first embodiment, and are not described herein again.
Example four
As shown in fig. 11(a) and fig. 11(b), one of the differences between this embodiment and the first embodiment is that the upper optical waveguide core 111 and the lower optical waveguide core 112 in the flexible optical waveguide touch sensitive layer 1 are not spatially distributed vertically, but are at other angles; the other difference is that the flexible optical waveguide touch sensitive layer 1 has different edge fillet angles. The technical effect of the present embodiment is different from that of the first embodiment in that the axial direction of the optical waveguide core can be arranged along the direction of the more concerned force to be measured, and higher sensitivity can be obtained in a specific direction.
In addition, other contents of this embodiment, including the internal structures and functions of the flexible optical waveguide touch sensitive layer 1, the flexible circuit layer 2, and the flexible substrate 3, the working principle and the manufacturing method of the touch sensor, are the same as those of the first embodiment, and are not described herein again.
EXAMPLE five
As shown in fig. 12(a) and 12(b), the present embodiment is different from the first embodiment in that an upper optical waveguide core 111 intersects a lower optical waveguide core 112 in the flexible optical waveguide touch-sensitive layer 1. The technical effect produced by this embodiment is different from that of the first embodiment in that two directions perpendicular to each other have uniform sensitivity on the surface of the sensitive region, rather than one direction being buried in the lower layer of the other direction in the cladding of the optical waveguide, the sensitivity is slightly lower.
In addition, other contents of this embodiment, including the internal structures and functions of the flexible optical waveguide touch sensitive layer 1, the flexible circuit layer 2, and the flexible substrate 3, the working principle and the manufacturing method of the touch sensor, are the same as those of the first embodiment, and are not described herein again.
EXAMPLE six
As shown in fig. 13(a) and fig. 13(c), the difference between this embodiment and the first embodiment is that adjacent optical waveguide cores 11 in the same layer in the flexible optical waveguide tactile sensing layer 1 intersect in one section, and do not intersect in one section, so that the number of light sources 21 and phototriodes 22 fixedly connected to the two ends of the corresponding optical waveguide cores 11 is different. The technical effects of the embodiment are different from those of the first embodiment in that the number of light sources is reduced, the difficulty in arranging the flexible circuit layer is reduced, and a larger sensitive area is still reserved.
In addition, other contents of this embodiment, including the internal structures and functions of the flexible optical waveguide touch sensitive layer 1, the flexible circuit layer 2, and the flexible substrate 3, the working principle and the manufacturing method of the touch sensor, are the same as those of the first embodiment, and are not described herein again.
EXAMPLE seven
The flexible optical waveguide touch sensitive layer of the arrayed optical waveguide flexible touch sensor is different from the first embodiment in that the flexible optical waveguide touch sensitive layer only contains an optical waveguide inner core which is distributed spirally with gradually increased radius and is arranged inside a spherical shell shape of an integral optical waveguide, a light source is arranged at the center of the spiral at one end of the optical waveguide, and a phototriode is arranged at the periphery of the spiral at the other end of the optical waveguide for detecting optical signals. The technical effect of the present embodiment and the first embodiment is that the number of the optical waveguides is greatly reduced, but the original sensitive area is reserved by modifying the arrangement form of the optical waveguides.
In addition, other contents of this embodiment, including the internal structure and function of the flexible circuit layer 2 and the flexible substrate 3, the working principle and manufacturing method of the touch sensor, are the same as those of the first embodiment, and are not described herein again.
Example eight
As shown in fig. 14, this embodiment is an application of the flexible tactile sensor according to the first to seventh embodiments. Any one of the flexible touch sensors described in the first to seventh embodiments is attached to a finger end of a robot to serve as the robot skin, and interaction information of the robot in a large area range in the environment is acquired, so that precise force feed control of the robot finger is achieved, the robot can achieve smart operation, and the robot is assisted to perform high-interactivity work more safely in an unstructured environment.
Example nine
As shown in fig. 15, this embodiment is another application of the flexible tactile sensor according to the first to seventh embodiments. The difference from embodiment eight is that any one of the flexible tactile sensors described in embodiments one to seven is disposed on a finger of a human body instead of a surface of a robot. For example: the flexible touch sense is arranged on the finger of a doctor, can be used for collecting touch sense data in the working process of pulse feeling, finger examination and the like of the doctor, sending a large amount of collected data to a neural network for learning, extracting key indexes of doctor disease diagnosis from the data, and is used for determining a new research scheme, culturing medical students and the like.
Example ten
This embodiment is another application of the flexible tactile sensor described in embodiments one to seven, and is different from embodiments eight and nine in that: any one of the flexible tactile sensors of embodiments one to seven is disposed on the skin surface of a human body for uninterrupted detection of various physiological tactile signals of the human body, such as heartbeat, pulse, respiration and other important vital signs.
The above description is for the purpose of illustrating embodiments of the invention and is not intended to limit the invention, and it will be apparent to those skilled in the art that any modification, equivalent replacement, or improvement made without departing from the spirit and principle of the invention shall fall within the protection scope of the invention.
Claims (2)
1. The preparation method of the arrayed optical waveguide flexible touch sensor is characterized by comprising the following steps of:
step S1, manufacturing the flexible optical waveguide touch sensitive layer, which specifically comprises the following steps: manufacturing an outline mold and an optical waveguide inner core mold of the flexible optical waveguide touch sensitive layer; assembling the outline mold and the optical waveguide inner core mold to form a mold of the flexible optical waveguide touch sensitive layer; injecting a first liquid elastomer into a die cavity of the flexible optical waveguide touch sensitive layer, standing and heating until the first liquid elastomer is completely cured, opening an outline die, and taking out an optical waveguide inner core die to obtain an optical waveguide cladding; injecting the second liquid elastomer into the hollow hole in the optical waveguide cladding, standing and heating until the second liquid elastomer is completely cured to obtain an optical waveguide inner core;
step S2, fabricating a flexible circuit layer and assembling the flexible circuit layer with the flexible optical waveguide touch sensitive layer, specifically including: designing circuits of a light-emitting power supply end and an optical signal receiving and processing end, printing the circuits on a flexible circuit board, welding and debugging circuit elements, and aligning and fixedly connecting two ends of an optical waveguide inner core with the optical waveguide power supply end and the optical signal receiving and processing end respectively;
step S3, fabricating and packaging a flexible substrate layer, specifically including: and preparing a mould of the flexible substrate layer, injecting the third liquid elastomer into the mould of the flexible substrate layer after uniform defoaming treatment, heating and standing until the third liquid elastomer is completely cured, taking out the flexible substrate layer and packaging the flexible substrate layer at the bottom of the prepared flexible circuit layer.
2. The method as claimed in claim 1, wherein in step S1, the refractive index of the optical waveguide core obtained by completely curing the second liquid elastomer is greater than the refractive index of the optical waveguide cladding obtained by completely curing the first liquid elastomer in the wavelength range of the optical signal generated by the light-emitting power supply terminal.
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| CN112129438B (en) * | 2020-08-15 | 2022-04-08 | 天津大学 | Large-angle high-resolution touch sensing device and method based on bionic compound eye |
| CN114252178B (en) * | 2020-09-25 | 2024-03-01 | 同济大学 | Touch sensor, pressure event detection method and device and intelligent robot |
| CN112229553B (en) * | 2020-10-26 | 2024-06-04 | 华中科技大学 | Flexible touch sensor based on light attenuation, array and preparation method thereof |
| WO2023019597A1 (en) * | 2021-08-20 | 2023-02-23 | 华为技术有限公司 | Tactile sensing device, and detection method and apparatus |
| CN114383765B (en) * | 2021-12-11 | 2023-08-25 | 上海精密计量测试研究所 | Infrared touch sensor |
| CN114486020B (en) * | 2022-01-25 | 2024-07-19 | 西湖大学 | Flexible surface pressure sensor based on optical waveguide |
| CN114486008B (en) * | 2022-01-26 | 2023-08-04 | 中国电子科技集团公司第七研究所 | Flexible microstrip line, back scattering touch perception system and measuring method thereof |
| CN114486011B (en) * | 2022-01-29 | 2023-07-25 | 重庆文理学院 | Preparation method of liquid metal touch pressure sensor |
| CN114700975B (en) * | 2022-04-11 | 2023-10-10 | 清华大学 | Flexible optical waveguide-based attitude sensor and robot |
| CN114800472B (en) * | 2022-05-24 | 2023-08-04 | 清华大学深圳国际研究生院 | Driving and sensing integrated software actuator |
| CN115014623B (en) * | 2022-06-10 | 2023-12-29 | 清华大学 | Optical waveguide touch sensor, sensing system, calibration method and robot |
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