CN111504940A - Biosensor with terahertz metamaterial and microfluid technology combined and application of biosensor in liquid-phase biological sample detection - Google Patents
Biosensor with terahertz metamaterial and microfluid technology combined and application of biosensor in liquid-phase biological sample detection Download PDFInfo
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
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- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
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- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
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Abstract
The invention relates to a biosensor combining a terahertz metamaterial and a microfluid technology and application thereof in liquid-phase biological sample detection. The terahertz microfluidic biosensor chip is manufactured by integrating a microfluidic technology on the basis of the terahertz metamaterial biosensor chip, has the characteristics of controllable liquid flow, less sample and reagent consumption and high analysis speed, and can be used for sample introduction and sample change integrated circulating operation in a sample detection pool. Due to the fact that the micro-fluid technology is adopted to control a micro-sample to enter the micro-channel, the high sensitivity of the terahertz metamaterial is combined, the water sensitivity of terahertz waves is overcome, the unmarked, rapid and high-sensitivity detection of the biological sample in the liquid phase state is achieved, and the biological sample can be recycled. Therefore, the method and the device adopting the combination of the terahertz metamaterial and the microfluid technology can be developed into a novel terahertz biological sensing technology for detecting the liquid-phase biological sample with high sensitivity and automation, and have a higher application prospect.
Description
Technical Field
The invention belongs to the technical field of biological detection, and relates to a biosensor combining a terahertz metamaterial and a microfluid technology and application of the biosensor in liquid-phase biological sample detection.
Background
Terahertz (THz) waves are located between microwaves and infrared rays in an electromagnetic spectrum, the frequency range of the THz waves is 0.1 to 10THz (1THz is 1012Hz, or 1THz is 4.14meV photon energy), and the wavelength range of the THz waves is 30 μm to 3 mm. The THz wave technology integrates the characteristics of electronics and photonics, belongs to a typical interdisciplinary subject, has wide and open application prospect in the fields of biomedicine, security national defense, environmental monitoring, aerospace and the like, and is a new means which is purely physical and does not need any chemical and biological markers.
At present, the research focus of the THz wave technology in the biomedical field is mainly focused on the detection and identification of biological organic molecules, cells or tissues, and the technology is characterized in that: on one hand, the frequency spectrums of low-frequency motions (van der waals force, hydrogen bonds, molecular vibration, molecular rotation and the like) between biological molecules and in molecules fall in a terahertz waveband, and different biological molecules can be distinguished by analyzing and identifying unique terahertz characteristic spectrums generated by the motions. On the other hand, the application of the THz metamaterial provides technical support for improving the sensitivity of THz wave detection on biological samples. The surface plasma polarization effect of metal materials such as gold and silver mainly occurs in a visible light wave band, and the skin depth of a surface plasma electric field of THz wave in metal is small, the electric field binding is weak, and the plasma effect cannot be directly generated on the metal surface. The THz metamaterial is characterized in that the metal surface is made into a certain structure so as to increase the skin depth of THz waves in metal, the processed metal surface can generate a surface plasma effect in a THz wave band, and the THz metamaterial has high detection sensitivity on target substances covered on the surface.
The popularization and application of the THz wave technology in the aspect of biological sample detection at present need to solve the following key technical problems:
1) detection sensitivity of THz wave: the sensitivity characteristics of the THz wave technology, such as detection speed, signal-to-noise ratio, detection depth and the like, need to be further improved from the aspects of light source and detection receiving, and the detection sensitivity of micro or low-concentration biological samples is still to be broken through.
2) Water sensitivity of THz wave: since THz wave is very sensitive to water, the strong absorption of water may mask the nature of the substance to be detected, and previous research is mostly limited to sample analysis in solid phase or dry state, therefore, THz spectrum detection must overcome the interference and annihilation of water sensitivity to the detection signal.
Disclosure of Invention
In view of the above, the present invention provides a biosensor using a terahertz metamaterial and a microfluid technology, and an application of the biosensor in liquid phase biological sample detection.
In order to achieve the purpose, the invention provides the following technical scheme:
1. a biosensor combining terahertz metamaterial with microfluid technology comprises PDMS (polydimethylsiloxane) and a silicon substrate which are adhered into a whole up and down, and a micro-machined gold film SRRs array is deposited on the silicon substrate and is a double-opening ring which is periodically arranged, the included angle of the double openings is 120 degrees, and the arrangement period is 90 micrometers; and processing a microfluidic channel on the silicon substrate to enable the gold film SRRs array to be positioned in the microfluidic channel, wherein two ends of the microfluidic channel are respectively communicated with a pair of micro-pipelines, and the pair of micro-pipelines are assembled on the PDMS.
Preferably, the thickness of PDMS is 1mm, the thickness of the silicon substrate is 500 μm, and the unit area is 15mm by 15 mm; the array area of the gold film SRRs array is 5mm, the thickness is 120nm, the outer diameter of the circular ring is 60 μm, the inner diameter is 48 μm, and the opening gap G of the double opening is 3 μm.
Preferably, a microfluidic channel mold is prepared on a silicon substrate by using an SU-8 photoresist lithography process, the height of the microfluidic channel mold is 50 μm, and then a PDMS microfluidic channel is manufactured according to the mold.
Preferably, the material of the micro-pipeline is stainless steel connected transparent plastic.
Preferably, the inner diameter of the micro-pipe is 0.6mm, and the outer diameter is 0.8 mm.
2. The application of the biosensor in liquid-phase biological sample detection.
3. The application method of the biosensor comprises the following specific steps:
(1) injecting a liquid-phase biological sample through a micro-pipeline to perform terahertz detection;
(2) sucking away the biological sample;
(3) injecting a cleaning solution for cleaning, repeating the step (1) and detecting a new biological sample.
3. The method for detecting the liquid-phase biological sample based on the combination of the terahertz metamaterial and the microfluid technology and realized by the biosensor comprises the steps of injecting the liquid-phase biological sample through a micro-pipeline, collecting a time-domain signal of the detected sample in a transmission mode of a terahertz time-domain spectrometer (TAS7500SP, ADVANTEST company of Japan), and expressing the collected signal in Transmittance [ transmittivity (L og) ].
The invention has the beneficial effects that:
1. the invention is high-sensitivity, the terahertz metamaterial biological sensing chip is manufactured based on the metamaterial, a micromachined gold film SRRs array is deposited on a silicon substrate by utilizing artificial electromagnetic material particles under the excitation of a magnetic field and a coupling resonance ring (SRR) and an electric field under the excitation of a coupling resonance unit (E L C), the signal of local surface plasma resonance in a terahertz waveband is enhanced, the resonance frequency of the metamaterial E L C is obviously shifted according to the difference of the number of biological sample molecules attached to the surface of the metamaterial, and the high-sensitivity detection of a biological sample is realized.
2. The problem of water sensitivity is solved: the microfluidic chip is manufactured by integrating a microfluidic technology on the basis of the terahertz metamaterial biosensing chip, has the characteristics of controllable liquid flow, less consumed samples and reagents and high analysis speed, and can be used for sample introduction and sample changing integrated circulation operation in the microfluidic chip. Due to the fact that the micro-fluid technology is adopted to control the micro-samples to enter the micro-channel, the high sensitivity of the terahertz metamaterial is combined, the water sensitivity of THz waves is overcome, the unmarked, rapid and high-sensitivity detection of the biological samples in the liquid phase state is achieved, and the biological samples can be recycled. Therefore, the method and the device adopting the combination of the terahertz metamaterial and the microfluid technology can be developed into a novel terahertz biological sensing technology for detecting the liquid-phase biological sample with high sensitivity and automation, and have a higher application prospect.
Drawings
In order to make the object, technical scheme and beneficial effect of the invention more clear, the invention provides the following drawings for explanation:
FIG. 1 is a schematic diagram of a detection system of a THz metamaterial microfluidic biosensor chip;
FIG. 2 is a diagram of a THz metamaterial microfluidic biosensor chip;
FIG. 3 is a schematic diagram of the detection of a biological sample using a THz microfluidic biosensing chip;
FIG. 4 is a detection result of BSA in terahertz liquid phase detection.
Detailed Description
Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
Example (b):
the first step is as follows: manufacturing terahertz metamaterial biological sensing chip
Depositing a micro-machined gold film SRRs array on a silicon substrate, wherein the specific parameters are as follows: 1. substrate silicon wafer material: thickness 500 μm, cell area 15 mm; 2. array of gold film SRRs: SRR: the thickness is 120nm, the inner diameter of the structure is 48 mu m, the outer diameter is 60 mu m, the double-opening is circular, the opening gap (G) is 3 mu m wide, and the included angle (theta) of the double openings is 120 degrees; array of SRRs: the centers are 90 μm apart and the array area is 5 x 5 mm.
The second step is that: fabrication of PDMS microfluidic channels
Firstly, preparing a microfluid channel mould on a silicon substrate by using an SU-8 photoresist photoetching process, wherein the thickness of the microfluid channel mould is 50 micrometers; next, PDMS microfluidic channels were fabricated according to the mold.
The third step: assembled micro-pipeline
The THz metamaterial biosensing microfluidic chip detection system is formed by assembling stainless steel and transparent plastic microchannels onto PDMS (the inner diameter of the microchannels is 0.6mm, the outer diameter of the microchannels is 0.8mm), and a structural schematic diagram and a physical diagram are respectively shown in fig. 1 and fig. 2.
The fourth step: detection of biological samples using THz biosensing microfluidic chips
Firstly, injecting a trace biological sample into a sample pool through a micro-pipeline for detection; secondly, the biological sample is aspirated away; thirdly, injecting cleaning fluid for cleaning; finally, injecting new biological samples again for detection, and repeatedly and circularly realizing the renewable recycling of the microfluidic chip, wherein the detection schematic diagram is shown in fig. 3.
The fifth step: THz spectrum acquisition
In the transmission mode of a terahertz time-domain spectrometer (TAS7500SP, ADVANTEST corporation, japan), a time-domain signal of a test sample is collected, and the collected signal is expressed in Transmittance [ transmissibility (L og) ].
The experimental results are as follows:
terahertz spectroscopy detects Bovine Serum Albumin (BSA):
as shown in FIG. 4, BSA solutions (1.25mg/m L, 2.5mg/m L and 5mg/m L) with different concentrations are injected into the terahertz metamaterial microfluidic chip, and along with the increase of the BSA concentration, the frequency of a resonance peak of the terahertz metamaterial generates red shift (leftward shift), which indicates that when a biological sample is on the surface of the microfluidic chip, the dielectric environment of a metamaterial-liquid sample interface is changed, so that the sensitivity of detecting a liquid-phase biological sample by terahertz waves is improved, and the detection of the liquid sample based on the combination of the terahertz metamaterial and the microfluidic technology is realized.
Finally, it is noted that the above-mentioned preferred embodiments illustrate rather than limit the invention, and that, although the invention has been described in detail with reference to the above-mentioned preferred embodiments, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the scope of the invention as defined by the appended claims.
Claims (8)
1. A biosensor combining terahertz metamaterial with microfluidics is characterized by comprising PDMS and a silicon substrate which are adhered into a whole up and down, and a micro-machined gold film SRRs array is deposited on the silicon substrate, wherein the gold film SRRs array is a double-opening ring which is periodically arranged, the included angle of the double openings is 120 degrees, and the arrangement period is 90 micrometers; and processing a microfluidic channel on the silicon substrate to enable the gold film SRRs array to be positioned in the microfluidic channel, wherein two ends of the microfluidic channel are respectively communicated with a pair of micro-pipelines, and the pair of micro-pipelines are assembled on the PDMS.
2. The biosensor of claim 1, wherein the PDMS has a thickness of 1mm, the silicon substrate has a thickness of 500 μm, and the unit area is 15mm x 15 mm; the array area of the gold film SRRs array is 5mm, the thickness is 120nm, the outer diameter of the circular ring is 60 μm, the inner diameter is 48 μm, and the opening gap G of the double opening is 3 μm.
3. The biosensor as claimed in claim 1, wherein a microfluidic channel mold is prepared on a silicon substrate with a height of 50 μm using SU-8 photoresist photolithography, and then a PDMS microfluidic channel is fabricated according to the mold.
4. The biosensor of claim 1, wherein the microchannel is made of stainless steel bonded transparent plastic.
5. The biosensor of claim 1, wherein the inner diameter of the microchannel is 0.6mm and the outer diameter is 0.8 mm.
6. Use of the biosensor in accordance with any one of claims 1 to 5 in liquid phase biological sample detection.
7. The use method of the biosensor in any one of claims 1 to 5, comprising the following steps:
(1) injecting a liquid-phase biological sample through a micro-pipeline to perform terahertz detection;
(2) sucking away the biological sample;
(3) injecting a cleaning solution for cleaning, repeating the step (1), and detecting a new biological sample.
8. The method for detecting the liquid phase biological sample based on the combination of the terahertz metamaterial and the microfluidics, which is realized by the biosensor as claimed in any one of claims 1 to 5, comprises the steps of injecting the liquid phase biological sample through a micro-pipeline, and collecting a time domain signal of the detected sample in a transmission mode of a terahertz time domain spectrometer, wherein the collected signal is expressed by a Transmittance [ transmittivity (L og) ].
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113058668A (en) * | 2021-03-20 | 2021-07-02 | 山东大学 | Artificial surface plasmon micro-fluidic detection chip structure based on capacitive metamaterial structure and preparation and detection methods thereof |
| CN113670848A (en) * | 2021-08-23 | 2021-11-19 | 中国人民解放军军事科学院国防科技创新研究院 | High-resolution broadband terahertz detector based on pixelized structure and detection method |
| CN113996360A (en) * | 2021-11-05 | 2022-02-01 | 中山大学 | Metamaterial micro-fluidic chip for capturing circulating tumor cells and preparation method thereof |
| CN117524372A (en) * | 2023-11-16 | 2024-02-06 | 浙江大学 | Micro-channel metamaterial design method based on genetic algorithm, electronic equipment and medium |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110017910A1 (en) * | 2008-03-28 | 2011-01-27 | Dritte Patentportolio Beteiligungsgesellschaft mbH | Production method for a surface sensor, system and use of a surface sensor |
| CN104764711A (en) * | 2015-04-17 | 2015-07-08 | 中国科学院重庆绿色智能技术研究院 | Terahertz metamaterial biosensing chip and testing method thereof |
| US20160116402A1 (en) * | 2013-07-25 | 2016-04-28 | Suzhou Institute Of Nano-Tech And Nano-Bionics Of Chinese Academy Of Science | High-Sensitivity Terahertz Micro-Fluidic Channel Sensor and Preparation Method Thereof |
| CN106475158A (en) * | 2016-10-17 | 2017-03-08 | 首都师范大学 | Micro-fluidic chip for transmission-type terahertz time-domain spectroscopy system and manufacture method |
| CN108507969A (en) * | 2018-03-08 | 2018-09-07 | 电子科技大学 | A kind of highly sensitive Terahertz microfluidic sensor based on band gap plasma resonance |
| WO2019010774A1 (en) * | 2017-07-12 | 2019-01-17 | 深圳市太赫兹科技创新研究院 | Plasmon waveguide, biosensor chip and system |
| CN109374570A (en) * | 2018-11-02 | 2019-02-22 | 首都师范大学 | A kind of Terahertz biosensing device |
| CN110455743A (en) * | 2019-08-19 | 2019-11-15 | 中央民族大学 | Utilize the method for terahertz wave band Meta Materials sensor detection aflatoxin B1 and B2 |
| CN110596037A (en) * | 2019-09-29 | 2019-12-20 | 张阳 | Preparation method and application of universal nano-scale fluid biomolecule terahertz sensing chip |
| CN110609009A (en) * | 2019-09-29 | 2019-12-24 | 张阳 | Sample pretreatment system suitable for terahertz specificity detection of biological sample and application |
| CN110658154A (en) * | 2019-09-29 | 2020-01-07 | 张阳 | Preparation and application of reproducible terahertz biological sample detection cell |
| CN110908031A (en) * | 2019-11-12 | 2020-03-24 | 广州铁路职业技术学院（广州铁路机械学校） | High-frequency polarization signal conversion method |
-
2020
- 2020-05-11 CN CN202010393434.8A patent/CN111504940A/en active Pending
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110017910A1 (en) * | 2008-03-28 | 2011-01-27 | Dritte Patentportolio Beteiligungsgesellschaft mbH | Production method for a surface sensor, system and use of a surface sensor |
| US20160116402A1 (en) * | 2013-07-25 | 2016-04-28 | Suzhou Institute Of Nano-Tech And Nano-Bionics Of Chinese Academy Of Science | High-Sensitivity Terahertz Micro-Fluidic Channel Sensor and Preparation Method Thereof |
| CN104764711A (en) * | 2015-04-17 | 2015-07-08 | 中国科学院重庆绿色智能技术研究院 | Terahertz metamaterial biosensing chip and testing method thereof |
| CN106475158A (en) * | 2016-10-17 | 2017-03-08 | 首都师范大学 | Micro-fluidic chip for transmission-type terahertz time-domain spectroscopy system and manufacture method |
| WO2019010774A1 (en) * | 2017-07-12 | 2019-01-17 | 深圳市太赫兹科技创新研究院 | Plasmon waveguide, biosensor chip and system |
| CN108507969A (en) * | 2018-03-08 | 2018-09-07 | 电子科技大学 | A kind of highly sensitive Terahertz microfluidic sensor based on band gap plasma resonance |
| CN109374570A (en) * | 2018-11-02 | 2019-02-22 | 首都师范大学 | A kind of Terahertz biosensing device |
| CN110455743A (en) * | 2019-08-19 | 2019-11-15 | 中央民族大学 | Utilize the method for terahertz wave band Meta Materials sensor detection aflatoxin B1 and B2 |
| CN110596037A (en) * | 2019-09-29 | 2019-12-20 | 张阳 | Preparation method and application of universal nano-scale fluid biomolecule terahertz sensing chip |
| CN110609009A (en) * | 2019-09-29 | 2019-12-24 | 张阳 | Sample pretreatment system suitable for terahertz specificity detection of biological sample and application |
| CN110658154A (en) * | 2019-09-29 | 2020-01-07 | 张阳 | Preparation and application of reproducible terahertz biological sample detection cell |
| CN110908031A (en) * | 2019-11-12 | 2020-03-24 | 广州铁路职业技术学院（广州铁路机械学校） | High-frequency polarization signal conversion method |
Non-Patent Citations (3)
| Title |
|---|
| ZHAOXIN GENG ET AL.: "A Route to Terahertz Metamaterial Biosensor Integrated with Microfluidics for Liver Cancer Biomarker Testing in Early Stage", 《SCIENTIFIC REPORTS》, no. 7, pages 1 - 11 * |
| 郑伟 等: "基于太赫兹超材料的微流体折射率传感器", 《红外与激光工程》 * |
| 郑伟 等: "基于太赫兹超材料的微流体折射率传感器", 《红外与激光工程》, vol. 46, no. 04, 30 April 2017 (2017-04-30) * |
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