CN111504547A - Integrated pressure sensor with pressure remote transmission function - Google Patents
Integrated pressure sensor with pressure remote transmission function Download PDFInfo
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- CN111504547A CN111504547A CN202010317760.0A CN202010317760A CN111504547A CN 111504547 A CN111504547 A CN 111504547A CN 202010317760 A CN202010317760 A CN 202010317760A CN 111504547 A CN111504547 A CN 111504547A
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- pressure end
- cavity
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- 230000005540 biological transmission Effects 0.000 title claims abstract description 86
- 238000002955 isolation Methods 0.000 claims description 30
- 229920002545 silicone oil Polymers 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 3
- 238000005452 bending Methods 0.000 claims description 2
- 238000005070 sampling Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 2
- 239000003990 capacitor Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000003129 oil well Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/08—Means for indicating or recording, e.g. for remote indication
- G01L19/086—Means for indicating or recording, e.g. for remote indication for remote indication
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention provides an integrated pressure sensor with a pressure remote transmission function, which comprises a pressure sensor body, a high-pressure end and a low-pressure end, wherein the high-pressure end and the low-pressure end are connected through a pressure transmission pipe; one end of the pressure transmission pipe is arranged at the closed top end of the high-pressure end shell and is communicated with the closed pressure transmission cavity of the high-pressure end; the other end of the pressure transmission pipe extends into the low-pressure end shell and is communicated with the low-pressure end closed pressure transmission cavity, the communicated high-pressure end closed pressure transmission cavity, the pressure transmission pipe and the low-pressure end closed pressure transmission cavity are filled with pressure transmission media, and pressure collected from the high-pressure end pressure collection cavity is transmitted to the top of the pressure sensor body. The pressure sensor of the invention transmits the measured pressure to the measuring diaphragm of the pressure sensor body through the integrated capillary pressure transmitting pipe, thereby realizing the remote pressure transmission type measurement.
Description
Technical Field
The invention belongs to the field of pressure detection, relates to a pressure sensor, and particularly relates to an integrated pressure sensor with a pressure remote transmission function.
Background
The differential capacitance type pressure sensor is a pressure sensor which utilizes a capacitance sensitive element to convert the measured pressure into electric quantity in a certain relation with the measured pressure and output the electric quantity. It generally uses circular metal film or metal-plated film as the capacitor electrode, the pressed diaphragm electrode is positioned between two fixed electrodes to form two capacitors, under the action of pressure the capacity of one capacitor is increased, and the other capacitor is correspondingly decreased, and the measured result is outputted by differential circuit.
The differential capacitance type pressure sensor is widely applied to the fields of industry, water conservancy and hydropower, railway transportation, petrifaction, oil wells and the like, but is not suitable for places with complex field environment, high temperature of a measured medium, high-viscosity liquid of the measured medium, corrosive gas or liquid of the measured medium and the like.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide an integrated pressure sensor with a pressure remote transmission function, and solve the technical problems that the pressure sensor in the prior art is difficult to be directly used in a field environment, is complex and is not suitable for directly measuring pressure.
In order to solve the technical problems, the invention adopts the following technical scheme:
an integrated pressure sensor with a pressure remote transmission function comprises a pressure sensor body, a high-pressure end and a low-pressure end, wherein the high-pressure end and the low-pressure end are connected through a pressure transmission pipe;
the high-pressure end comprises a high-pressure end shell, the bottom of the high-pressure end shell is open, a high-pressure end isolation diaphragm is arranged in the high-pressure end shell, the high-pressure end isolation diaphragm divides a cavity in the high-pressure end shell into two independent cavities, a high-pressure end closed pressure transmission cavity is formed between the high-pressure end isolation diaphragm and the closed top of the high-pressure end shell, and a high-pressure end pressure collection cavity is formed between the high-pressure end isolation diaphragm and the open bottom of the high-pressure end shell;
the low-pressure end comprises a low-pressure end shell, a pressure sensor body is fixed in the low-pressure end shell, and a low-pressure end closed pressure transmission cavity is fixedly arranged at the top of the pressure sensor body;
one end of the pressure transmission pipe is arranged at the closed top end of the high-pressure end shell and is communicated with the closed pressure transmission cavity of the high-pressure end; the other end of the pressure transmission pipe extends into the low-pressure end shell to be communicated with the low-pressure end closed pressure transmission cavity, the communicated high-pressure end closed pressure transmission cavity, the pressure transmission pipe and the low-pressure end closed pressure transmission cavity are filled with pressure transmission media, and pressure collected from the high-pressure end pressure collection cavity is transmitted to the top of the pressure sensor body.
The invention also has the following technical characteristics:
the pressure transmission pipe is a flexible pipe capable of being bent.
The pressure transmission pipe is sleeved with a flexible sleeve.
The pressure transmission pipe adopts a capillary, the inner diameter of the capillary is 0.7-1 mm, and the outer diameter of the capillary is 2-3.2 mm.
The top end of the high-pressure end shell body and the side wall of the top of the low-pressure end shell body are respectively provided with a fixing sleeve for fixing a pressure transmission pipe.
The pressure sensor body is a differential capacitance type pressure sensor.
The pressure sensor body comprises a first isolation diaphragm of a low-pressure end, a first sensor base, a central diaphragm, a second sensor base, a second isolation diaphragm of the low-pressure end and a base, wherein the first isolation diaphragm of the low-pressure end, the central diaphragm, the second sensor base, the second isolation diaphragm of the low-pressure end and the base are sequentially and fixedly arranged from top to bottom, the first isolation diaphragm is a bottom sealing surface of a closed pressure transmission cavity of the low-pressure end, and the base is fixed at the bottom in.
The pressure transmission medium is silicone oil.
Compared with the prior art, the invention has the following technical effects:
the pressure sensor transmits the measured pressure to the measuring diaphragm of the pressure sensor body through the integrated capillary pressure transmitting pipe, so that the pressure remote transmission type measurement is realized.
Tests show that the pressure sensor has the accuracy of +/-0.25% fs, the long-term stability of +/-0.25% fs/year, the insulation impedance of more than 500M omega @100Vdc, the influence of static pressure on a zero point of +/-0.5% fs, and the influence of static pressure on sensitivity of +/-0.5% fs.
The pressure sensor fills the blank of the remote transmission differential pressure transmitter in the market, and has wide market prospect.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
Fig. 2 is a schematic view of the internal structure of the low-voltage terminal.
The meaning of the individual reference symbols in the figures is: 1-a pressure sensor body, 2-a high-pressure end, 3-a low-pressure end, 4-a pressure transmission pipe, 5-a flexible sleeve and 6-a fixed sleeve;
101-low pressure side first isolation diaphragm, 102-first sensor base, 103-center diaphragm, 104-second sensor base, 105-low pressure side second isolation diaphragm, 106-base, 107-fill tube, 108-wire;
201-high pressure end shell, 202-high pressure end isolation diaphragm, 203-high pressure end closed pressure transmission cavity, and 204-high pressure end pressure production cavity;
301-low pressure end housing, 302-low pressure end closed pressure transfer chamber.
The present invention will be explained in further detail with reference to examples.
Detailed Description
The invention aims to provide an integrated pressure sensor with a pressure remote transmission function, namely a pressure remote transmission type metal differential capacitance pressure sensor.
The invention aims to improve the working reliability of the sensor, the pressure remote transmission device and the sensor are integrally designed, the number of movable parts is small, all connecting parts are welded, mechanical fastening connection is not needed, and the stability and the reliability of long-term working are greatly improved.
The following embodiments of the present invention are provided, and it should be noted that the present invention is not limited to the following embodiments, and all equivalent changes based on the technical solutions of the present invention are within the protection scope of the present invention.
Example 1:
the embodiment provides an integrated pressure sensor with a pressure remote transmission function, as shown in fig. 1 and fig. 2, which includes a pressure sensor body 1, a high-pressure end 2 and a low-pressure end 3, wherein the high-pressure end 2 and the low-pressure end 3 are connected through a pressure transmission pipe 4;
the high-pressure end 2 comprises a high-pressure end shell 201, the bottom of the high-pressure end shell 201 is open, a high-pressure end isolation diaphragm 202 is arranged in the high-pressure end shell 201, the high-pressure end isolation diaphragm 202 divides a cavity in the high-pressure end shell 201 into two independent cavities, a high-pressure end closed pressure transmission cavity 203 is arranged between the high-pressure end isolation diaphragm 202 and the closed top of the high-pressure end shell 201, and a high-pressure end pressure collection cavity 204 is arranged between the high-pressure end isolation diaphragm 202 and the open bottom of the high-pressure end shell 201;
the low-pressure end 3 comprises a low-pressure end shell 301, a pressure sensor body 1 is fixed in the low-pressure end shell 301, and a low-pressure end closed pressure transmission cavity 302 is fixedly arranged at the top of the pressure sensor body 1;
one end of the pressure transmission pipe 4 is arranged at the closed top end of the high-pressure end shell 201, and the pressure transmission pipe 4 is communicated with the high-pressure end closed pressure transmission cavity 203; the other end of the pressure transmission pipe 4 extends into the low-pressure end shell 301 and is communicated with the low-pressure end closed pressure transmission cavity 302, the communicated high-pressure end closed pressure transmission cavity 203, the pressure transmission pipe 4 and the low-pressure end closed pressure transmission cavity 302 are filled with pressure transmission media, and pressure collected from the high-pressure end pressure collection cavity 204 is transmitted to the top of the pressure sensor body 1.
In this embodiment, the high pressure side housing 201 and the low pressure side housing 301 are both made of stainless steel.
As a preferable mode of the present embodiment, the pressure transmission pipe 4 is a flexible pipe capable of bending. The pressure transmission pipe 4 is made of metal nickel.
As a preferable scheme of this embodiment, the pressure transmission pipe 4 is sleeved with a flexible sleeve 5. The flexible sleeve 5 is made of stainless steel.
As a preferred scheme of this embodiment, the pressure transmission pipe 4 is a capillary, the inner diameter of the capillary is 0.7-1 mm, and the outer diameter of the capillary is 2-3.2 mm.
As a preferable solution of this embodiment, the fixed sleeve 6 for fixing the pressure transmission pipe 4 is provided on both the closed top end of the high pressure end housing 201 and the top side wall of the low pressure end housing 301.
As a preferable aspect of this embodiment, the pressure transmission medium is silicone oil. Silicone oil is a commonly used pressure transmission medium in pressure sensors.
As a preferable mode of the present embodiment, the pressure sensor body 1 is a differential capacitance type pressure sensor. Differential capacitive pressure sensors are known as differential capacitive pressure sensors. For example: the pressure sensor body 1 comprises a first isolation diaphragm 101, a first sensor base 102, a central diaphragm 103, a second sensor base 104, a second isolation diaphragm 105 and a base 106, wherein the first isolation diaphragm 101, the first sensor base 102, the central diaphragm 103, the second sensor base 104, the second isolation diaphragm 105 and the base 106 are sequentially and fixedly arranged from top to bottom, the first isolation diaphragm 101 is a bottom sealing surface of a low-pressure-end closed pressure transmission cavity 302, and the base 106 is fixed at the bottom in a low-pressure-end shell 301. The first sensor base 102 and the second sensor base 104 have the same structure, and are both known base structures in a known differential capacitive pressure sensor, for example, a capacitive sensor base disclosed in the chinese utility model patent with the publication number CN 203116758U and the patent name "a capacitive sensor base" is adopted.
When the integral type pressure sensor with pressure teletransmission function in this embodiment uses, place high-pressure end 2 in the pressure acquisition department of distal end, it has pressure to adopt pressure chamber 204 to connect the collection through the high-pressure end, under the pressure effect, high-pressure end isolation diaphragm 202 takes place to deform and passes the pressure conduction for the pressure medium in the high-pressure end seals the pressure chamber 203, then pass the pressure medium in the pressure pipe 4 and transmit the pressure medium in the low-pressure end seals the pressure chamber 302, first isolation diaphragm 101 in the pressure medium extrusion pressure sensor body 1, realize transmitting distal end pressure to pressure sensor body 1 promptly, output signal of telecommunication after the detection through pressure sensor body 1.
Claims (8)
1. An integrated pressure sensor with a pressure remote transmission function comprises a pressure sensor body (1) and is characterized by further comprising a high-pressure end (2) and a low-pressure end (3), wherein the high-pressure end (2) is connected with the low-pressure end (3) through a pressure transmission pipe (4);
the high-pressure end (2) comprises a high-pressure end shell (201), the bottom of the high-pressure end shell (201) is open, a high-pressure end isolation diaphragm (202) is arranged in the high-pressure end shell (201), the high-pressure end isolation diaphragm (202) divides a cavity in the high-pressure end shell (201) into two independent cavities, a high-pressure end closed pressure transmission cavity (203) is arranged between the high-pressure end isolation diaphragm (202) and the closed top of the high-pressure end shell (201), and a high-pressure end pressure sampling cavity (204) is arranged between the high-pressure end isolation diaphragm (202) and the open bottom of the high-pressure end shell (201);
the low-pressure end (3) comprises a low-pressure end shell (301), a pressure sensor body (1) is fixed in the low-pressure end shell (301), and a low-pressure end closed pressure transmission cavity (302) is fixedly arranged at the top of the pressure sensor body (1);
one end of the pressure transmission pipe (4) is arranged at the closed top end of the high-pressure end shell (201), and the pressure transmission pipe (4) is communicated with the high-pressure end closed pressure transmission cavity (203); the other end of the pressure transmission pipe (4) extends into the low-pressure end shell (301) and is communicated with the low-pressure end closed pressure transmission cavity (302), the communicated high-pressure end closed pressure transmission cavity (203), the pressure transmission pipe (4) and the low-pressure end closed pressure transmission cavity (302) are filled with pressure transmission media, and pressure collected from the high-pressure end pressure collection cavity (204) is transmitted to the top of the pressure sensor body (1).
2. The integrated pressure sensor with pressure remote transmission function according to claim 1, wherein the pressure transmission tube (4) is a flexible tube capable of bending.
3. The integrated pressure sensor with pressure remote transmission function according to claim 2, wherein the pressure transmission tube (4) is sleeved with a flexible sleeve (5).
4. The integrated pressure sensor with the pressure remote transmission function according to claim 1, wherein the pressure transmission tube (4) is a capillary tube, the inner diameter of the capillary tube is 0.7-1 mm, and the outer diameter of the capillary tube is 2-3.2 mm.
5. The integrated pressure sensor with pressure remote transmission function as claimed in claim 1, wherein the top end of the high pressure end housing (201) and the top side wall of the low pressure end housing (301) are provided with fixing sleeves (6) for fixing the pressure transmission pipe (4).
6. The integrated pressure sensor with pressure remote transmission function as claimed in claim 1, wherein the pressure sensor body (1) is a differential capacitance type pressure sensor.
7. The integrated pressure sensor with the pressure remote transmission function according to claim 6, wherein the pressure sensor body (1) comprises a first low-pressure-end isolation diaphragm (101), a first sensor base (102), a central diaphragm (103), a second sensor base (104), a second low-pressure-end isolation diaphragm (105) and a base (106) which are fixedly arranged from top to bottom in sequence, the first isolation diaphragm (101) is a bottom sealing surface of the low-pressure-end closed pressure sensing cavity (302), and the base (106) is fixed at the bottom in the low-pressure-end shell (301).
8. The integrated pressure sensor with pressure remote transmission function as claimed in claim 1, wherein the pressure transmission medium is silicone oil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010317760.0A CN111504547A (en) | 2020-04-21 | 2020-04-21 | Integrated pressure sensor with pressure remote transmission function |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010317760.0A CN111504547A (en) | 2020-04-21 | 2020-04-21 | Integrated pressure sensor with pressure remote transmission function |
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| Publication Number | Publication Date |
|---|---|
| CN111504547A true CN111504547A (en) | 2020-08-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010317760.0A Pending CN111504547A (en) | 2020-04-21 | 2020-04-21 | Integrated pressure sensor with pressure remote transmission function |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004051219A1 (en) * | 2004-10-20 | 2006-05-04 | Endress + Hauser Gmbh + Co. Kg | Pressure measurement sensor has a partition membrane between two chambers with a counter-support being arranged on the side of the membrane away from the sensor to limit its movement in this direction |
| CN2901271Y (en) * | 2006-06-14 | 2007-05-16 | 中国石油天然气集团公司 | Flange diaphragm sealed liquid level and pressure transmitter |
| CN103712733A (en) * | 2012-09-28 | 2014-04-09 | 罗斯蒙德公司 | Remote seal process pressure measuring system |
| CN109580082A (en) * | 2018-08-24 | 2019-04-05 | 浙江洛丁森智能科技有限公司 | A kind of the teletransmission component and teletransmission pressure transmitter of the double isolation diaphragms of band |
| CN109655192A (en) * | 2018-12-11 | 2019-04-19 | 安徽天康(集团)股份有限公司 | A kind of teletransmission diaphragm pressure transmitter |
| CN212082693U (en) * | 2020-04-21 | 2020-12-04 | 西仪股份有限公司 | Integrated pressure sensor with pressure remote transmission function |
-
2020
- 2020-04-21 CN CN202010317760.0A patent/CN111504547A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004051219A1 (en) * | 2004-10-20 | 2006-05-04 | Endress + Hauser Gmbh + Co. Kg | Pressure measurement sensor has a partition membrane between two chambers with a counter-support being arranged on the side of the membrane away from the sensor to limit its movement in this direction |
| CN2901271Y (en) * | 2006-06-14 | 2007-05-16 | 中国石油天然气集团公司 | Flange diaphragm sealed liquid level and pressure transmitter |
| CN103712733A (en) * | 2012-09-28 | 2014-04-09 | 罗斯蒙德公司 | Remote seal process pressure measuring system |
| CN109580082A (en) * | 2018-08-24 | 2019-04-05 | 浙江洛丁森智能科技有限公司 | A kind of the teletransmission component and teletransmission pressure transmitter of the double isolation diaphragms of band |
| CN109655192A (en) * | 2018-12-11 | 2019-04-19 | 安徽天康(集团)股份有限公司 | A kind of teletransmission diaphragm pressure transmitter |
| CN212082693U (en) * | 2020-04-21 | 2020-12-04 | 西仪股份有限公司 | Integrated pressure sensor with pressure remote transmission function |
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