CN111488022A - Automatic source control system that leads to of trichloroethylene - Google Patents

Abstract

The trichloroethylene automatic source control system provided by the embodiments of the present application relates to the technical field of semiconductor manufacturing. In the present application, the gas pipeline is designed, and the same source temperature control system is used for multiple transmission pipelines. Road transportation pipelines provide trichloroethylene source solution for different diffusion furnaces. The above scheme, on the one hand, only needs one set of source temperature control system to realize the supply of trichloroethylene source liquid for multiple diffusion furnaces, saving the production cost of purchasing multiple sets of source temperature control systems; The state control of the multi-channel transmission pipeline realizes the automatic control of the multi-channel trichloroethylene source liquid transportation, avoids the safety accident that may be caused by manual disassembly or connection of the gas pipeline, and ensures the production safety.

Description

Trichloroethylene automatic source control system

technical field

The present application relates to the technical field of semiconductor manufacturing, and in particular, to a trichloroethylene automatic source control system.

Background technique

Diffusion furnace is an indispensable equipment in the process of making semiconductor wafers. When dry cleaning the pipes in the diffusion furnace, diffusion operators need to pass the trichloroethylene source liquid into the pipes to be dry cleaned. Since the source temperature control system containing the trichloroethylene source liquid is relatively expensive, if each diffusion furnace is to be equipped with a source temperature control system, the production cost of the factory will be greatly increased.

If a set of source temperature control system is used, diffusion operators need to share the same set of source temperature control system by manual disassembly and transportation back and forth to provide trichloroethylene source solution for diffusion furnaces in different buildings. This method is inconvenient and prone to safety or quality accidents caused by improper connection during disassembly or connection of gas pipelines. For example, because the gas pipeline is not tightly connected, it is not connected with the trichloroethylene source liquid, which causes the pipeline to be unclean and affects the quality of the product. Or, after turning on the trichloroethylene source liquid, the diffusion operator did not replace the igniter in time to make the film, which caused the Teflon connecting pipe fittings to burn out, resulting in a safety accident of hydrogen leakage and combustion.

In view of this, how to overcome the above technical problems has become a technical problem that those skilled in the art urgently need to solve.

SUMMARY OF THE INVENTION

In order to overcome the technical problems mentioned in the above technical background, the embodiments of the present application provide a trichloroethylene automatic source control system that can save production costs and ensure safe production.

The embodiments of the present application provide a trichloroethylene automatic source control system, including: gas pipelines, gas pipeline control components, and a source temperature control system;

The source temperature control system includes a source liquid storage device for storing trichloroethylene source liquid;

The gas pipeline includes an input main pipeline, an output main pipeline and at least two conveying pipelines, each conveying pipeline includes an input pipeline and an output pipeline, and the input pipeline of each conveying pipeline is connected to the external air source and the input pipeline. Between the main pipelines, the input main pipeline extends into the trichloroethylene source liquid of the source liquid storage device;

The main output pipeline is communicated with the internal space of the source liquid storage device, and the output pipeline of each conveying pipeline is connected between the main output pipeline and the pipeline to be dry-cleaned in the external diffusion furnace;

The gas circuit control assembly includes a pipeline switch valve and a control valve used to control the working state of the pipeline switch valve. The pipeline switch valve is arranged on the input pipeline and the output pipeline of each conveying pipeline, and is used to control all the pipelines. Describe the on-off status of the input pipeline and output pipeline.

In a possible embodiment of the present application, the gas circuit control assembly further includes a gas flow controller for controlling the gas flow rate of the pipeline, and the gas flow controller is arranged on the input pipeline of each of the conveying pipelines.

In a possible embodiment of the present application, the gas flow controller includes a rotameter.

In a possible embodiment of the present application, the gas path control assembly further includes a one-way valve, the one-way valve is disposed on the input pipe of each conveying pipe, and is used to control the one-way direction of the input pipe on.

In a possible embodiment of the present application, the gas pipeline further includes a pressure relief pipeline branch, and the pressure relief pipeline branch communicates with the output main pipeline;

The air circuit control assembly further includes a pressure relief valve, the pressure relief valve is arranged on the branch of the pressure relief pipeline, and the pressure relief valve is opened when the pressure in the air circuit pipeline is higher than a preset pressure threshold value, and is suitable for The air pipeline is depressurized.

In a possible embodiment of the present application, the pipeline switch valve includes a pneumatic valve, and the control valve includes a solenoid valve;

The solenoid valve is connected with the two pneumatic valves on the same conveying pipeline through a three-way pipeline, and the solenoid valve controls the on-off state of the two pneumatic valves by releasing compressed gas when receiving an electrical signal.

In a possible embodiment of the present application, the source temperature control system further includes a source temperature controller for maintaining the source liquid in the source liquid storage device at a set temperature, and a source temperature controller arranged in the source liquid temperature sensor in

The temperature sensor is connected to the source temperature controller, and is used for feeding back the detected source liquid temperature to the source temperature controller, so that the source temperature controller controls the source liquid to maintain at a temperature according to the feedback source liquid temperature. set temperature.

In a possible embodiment of the present application, the gas source is a nitrogen source.

In a possible embodiment of the present application, the trichloroethylene automatic source control system further includes: a control terminal that is electrically connected to the control valve, and the control terminal controls the control valve by sending electrical signals. working status.

In a possible embodiment of the present application, the control terminal further includes a display screen, and the display screen is used to display the working state of the control valve and/or the on-off state of the pipeline switch valve controlled by the control valve .

In the trichloroethylene automatic source control system provided by the embodiment of the present application, by designing the gas pipelines, the multi-channel transmission pipelines are used to share the same source temperature control system, and at the same time, the multi-channel transmission pipelines are checked by means of the gas pipeline control components. control, so that the same source temperature control system is used to provide trichloroethylene source solution for different diffusion furnaces through different pipelines. The above scheme, on the one hand, only needs one set of source temperature control system to realize the supply of trichloroethylene source liquid for multiple diffusion furnaces, saving the production cost of purchasing multiple sets of source temperature control systems; The state control of the multi-channel transmission pipeline realizes the automatic control of the multi-channel trichloroethylene source liquid transportation, avoids the safety accident that may be caused by manual disassembly or connection of the gas pipeline, and ensures the production safety.

Description of drawings

In order to illustrate the technical solutions of the embodiments of the present application more clearly, the following drawings will briefly introduce the drawings that need to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore do not It should be regarded as a limitation of the scope, and for those of ordinary skill in the art, other related drawings can also be obtained according to these drawings without any creative effort.

Fig. 1 is one of the structural representations of the trichloroethylene automatic source control system provided by the embodiment of the application;

Fig. 2 is the second structural representation of the trichloroethylene automatic source control system provided by the embodiment of the application;

Fig. 3 is the third schematic structural diagram of the trichloroethylene automatic source control system provided by the embodiment of the application;

FIG. 4 is the fourth schematic structural diagram of the trichloroethylene automatic source control system provided by the embodiment of the application.

Detailed ways

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, but not all of the embodiments. The components of the embodiments of the present application generally described and illustrated in the drawings herein may be arranged and designed in a variety of different configurations.

Thus, the following detailed description of the embodiments of the application provided in the accompanying drawings is not intended to limit the scope of the application as claimed, but is merely representative of selected embodiments of the application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.

It should be noted that like numerals and letters refer to like items in the following figures, so once an item is defined in one figure, it does not require further definition and explanation in subsequent figures.

In the description of this application, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", etc. is based on the orientation or positional relationship shown in the accompanying drawings, or is usually placed when the product of the application is used. The orientation or positional relationship is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the indicated device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the present application.

In order to solve the technical problems in the background art, the inventors innovatively designed the following technical solutions.

Please refer to FIG. 1 , which shows a schematic structural diagram of a trichloroethylene automatic source control system 10 provided by an embodiment of the present application.

The trichloroethylene automatic source control system 10 may include: gas pipelines, gas pipeline control components and a set of source temperature control system 130 .

In the embodiment of the present application, the source temperature control system 130 may include a source liquid storage device 131 for storing the trichloroethylene source liquid.

The gas pipeline may include an input main pipeline 111 , an output main pipeline 112 and at least two conveying pipelines. Each delivery pipeline may include an input pipeline 113a and an output pipeline 113b. The input port of each input pipe 113a is connected to an external gas source, and the output port of each input pipe 113a is connected to the input main pipe 111, which extends to the trichloroethylene source liquid of the source liquid storage device 131. In the embodiment of the present application, the external gas source is selected as a gas source that does not chemically react with the trichloroethylene source liquid, for example, the external source can be a nitrogen gas source.

FIG. 1 shows a schematic structural diagram of a trichloroethylene automatic source control system 10 including two-way transmission pipelines. It can be understood that, for multi-channel transmission pipelines, the trichloroethylene automatic source control system 10 provided in the embodiment of the present application is The same is also applicable, the schematic structural diagram given in FIG. 1 is only an example for the convenience of those skilled in the art to understand the solution of the present application, and should not be construed as a specific limitation to the technical solution of the present application.

The output main circuit 112 is communicated with the internal space of the source liquid storage device 131, the input port of the output pipe 113b of each conveying pipe is connected with the output main circuit 112, and the output port of the output pipe 113b of each conveying pipe is connected with the output port of a diffusion furnace. The pipes to be dry cleaned (not shown) are connected.

In the embodiment of the present application, the gas circuit control assembly may include a pipeline switch valve 121 and a control valve 122 for controlling the working state of the pipeline switch valve 121. The pipeline switch valve 121 is provided on the input pipeline 113a and the output of each conveying pipeline. On the pipeline 113b, it is used to control the on-off state of the conveying pipeline at the same time.

The working principle of the above-mentioned trichloroethylene automatic source control system 10 is as follows: when one transmission pipeline is turned on, the gas input from the input pipeline 113a is transported to the source liquid storage device 131 via the input main circuit 111, because the input main pipeline 111 extends to In the trichloroethylene source liquid of the source liquid storage device 131, after the gas enters the source liquid storage device 131, bubbles will be formed, and the bubbles will rise up to the surface of the source liquid and then burst, so that there are more trichloroethylene in the internal space of the source liquid storage device 131. Vinyl chloride source liquid molecules. In addition, the gas entering the source liquid storage device 131 will increase the pressure of the internal space of the source liquid storage device 131, so that the gas can carry the trichloroethylene source liquid molecules through the output main circuit 112 to the output pipeline 113b, and through the output pipeline 113b. The output port is sent to the pipeline to be dry-cleaned corresponding to the diffusion furnace, and the pipeline to be dry-cleaned of the diffusion furnace is dry-cleaned to ensure that there is no pollution source in the production environment and affect the quality of the production.

The above scheme, on the one hand, only needs one set of source temperature control system 130 to realize the supply of trichloroethylene source liquid for multiple diffusion furnaces, saving the production cost of purchasing multiple sets of source temperature control systems 130; on the other hand, through the gas circuit control The component controls the state of the multi-channel transmission pipeline, realizes the automatic control of the multi-channel trichloroethylene source liquid transportation, avoids the safety accident that may be caused by manual disassembly or connection of the gas pipeline, and ensures the production safety.

Please refer to FIG. 2 , which shows a schematic structural diagram of another possible trichloroethylene automatic source control system 10 provided by an embodiment of the present application. In FIG. 2 , the gas circuit control assembly may further include a gas flow controller 123 for controlling the gas flow of the pipeline, and the gas flow controller 123 is arranged on the input pipeline 113a of each conveying pipeline. In the embodiment of the present application, the gas flow controller 123 can use a rotameter with a flow rate of 0-500 ccL/min. The rotameter uses a float in a vertical conical tube to rise and fall with the flow change, changing the flow between them. A volumetric flow meter that measures the flow area.

Referring to FIG. 2 again, the air circuit control assembly may further include a one-way valve 124, and the one-way valve 124 is disposed on the input pipe 113a of each conveying pipe. The one-way valve 124 provided on the input pipeline 113a of each conveying pipeline can ensure one-way flow of gas or source liquid in the conveying pipeline, and can prevent backflow of gas or trichloroethylene source liquid.

Referring to FIG. 3 , FIG. 3 shows a schematic structural diagram of another possible trichloroethylene automatic source control system 10 provided by an embodiment of the present application. The gas line pipeline may further include a pressure relief pipeline branch 114 that communicates with the output main pipeline 112 .

The air circuit control assembly further includes a pressure relief valve 125, the pressure relief valve 125 is arranged on the pressure relief pipeline branch 114, and the pressure relief valve 125 is opened when the pressure in the air circuit pipeline is greater than a preset pressure threshold, and the air circuit pipeline is unloaded. to prevent the source liquid storage device 131 from collapsing due to excessive pressure during the supply process of the trichloroethylene source liquid.

In the embodiment of the present application, the pipeline switch valve 121 includes a pneumatic valve, and the control valve 122 includes a solenoid valve.

Specifically, one solenoid valve can be connected to two pneumatic valves on the same conveying pipeline through a three-way pipeline, and the solenoid valve controls the on-off state of the two pneumatic valves by releasing compressed gas when receiving an electrical signal.

In the embodiment of the present application, the gas pipeline may include a plurality of solenoid valves, and one solenoid valve is used to control the on-off states of different transport pipes through pneumatic valves on the same transport pipe.

Referring to FIG. 3 again, the source temperature control system 130 may further include a source temperature controller (not shown in the figure) for maintaining the source liquid in the source liquid storage device 131 at a set temperature, and a source temperature controller (not shown in the figure) set in the trichloroethylene Temperature sensor in the source fluid (not shown).

The temperature sensor is connected with the source temperature controller, and is used for feeding back the detected temperature of the source liquid to the source temperature controller, so that the source temperature controller can control the source liquid to maintain the set temperature according to the feedback source liquid temperature.

Referring to FIG. 4 , in the embodiment of the present application, the trichloroethylene automatic source control system 10 may further include: a control terminal 140 electrically connected to the control valve 122 , and the control terminal 140 controls the control valve 122 by sending an electrical signal. working status. Specifically, the control terminal 140 may be electrically connected to the control valve 122 in a wired manner, or may be electrically connected with the control valve 122 in a wireless communication manner.

In this embodiment of the present application, a software program may be preconfigured on the control terminal 140, and an electrical signal may be sent through the software program to control the corresponding control valve 122. For example, the configured software program may detect the flake-making process in each diffusion furnace. When a diffusion furnace needs to dry-clean the pipelines in the furnace, the control terminal 140 controls the conduction of the conveying pipeline that provides the trichloroethylene source solution for the diffusion furnace through the software program. At the same time, after the dry cleaning of the pipeline is completed, the conveying pipeline for supplying the trichloroethylene source solution to the diffusion furnace is controlled to be closed.

It can be understood that, in the embodiment of the present application, the trichloroethylene automatic source control system 10 can simultaneously control the conduction of multiple conveying pipelines, and simultaneously perform pipeline dry cleaning for a plurality of diffusion furnaces to ensure the quality of film making.

In this embodiment of the present application, the control terminal 140 may further include a display screen (not shown in the figure), where the display screen is used to display the working state of the control valve and/or the on-off state of the pipeline switch valve controlled by the control valve. Through the display screen, it is convenient for diffusion operators to understand the scene information in real time.

To sum up, the trichloroethylene automatic source control system provided in the embodiment of the present application adopts the design of the gas pipeline, adopts the same set of source temperature control system with the multi-channel transmission pipeline, and at the same time uses the gas pipeline control component to control the multiple The state control is carried out by using the same source temperature control system to provide trichloroethylene source solution for different diffusion furnaces through different pipelines. The above scheme, on the one hand, only needs one set of source temperature control system to realize the supply of trichloroethylene source liquid for multiple diffusion furnaces, saving the production cost of purchasing multiple sets of source temperature control systems; The state control of the multi-channel transmission pipeline realizes the automatic control of the multi-channel trichloroethylene source liquid transportation, avoids the safety accident that may be caused by manual disassembly or connection of the gas pipeline, and ensures the production safety.

The above descriptions are only preferred embodiments of the present application, and are not intended to limit the present application. For those skilled in the art, the present application may have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of this application shall be included within the protection scope of this application.

Claims (10)

1. a trichloroethylene automatic source control system, is characterized in that, comprises: gas circuit pipeline, gas circuit control assembly and a set of source temperature control system; The source temperature control system includes a source liquid storage device for storing trichloroethylene source liquid; The gas pipeline includes an input main pipeline, an output main pipeline and at least two conveying pipelines, each conveying pipeline includes an input pipeline and an output pipeline, and the input pipeline of each conveying pipeline is connected to the external air source and the input pipeline. Between the main pipelines, the input main pipeline extends into the trichloroethylene source liquid of the source liquid storage device; The main output pipeline is communicated with the internal space of the source liquid storage device, and the output pipeline of each conveying pipeline is connected between the main output pipeline and the pipeline to be dry-cleaned in the external diffusion furnace; The gas circuit control assembly includes a pipeline switch valve and a control valve for controlling the working state of the pipeline switch valve. The pipeline switch valve is arranged on the input pipeline and output pipeline of each conveying pipeline, and is used to control all the pipelines. Describe the on-off status of the input pipeline and output pipeline. 2. The trichloroethylene automatic source control system according to claim 1, wherein the gas circuit control assembly further comprises a gas flow controller for controlling the gas flow rate of the pipeline, and the gas flow controller is arranged on the on the input pipeline of each conveying pipeline. 3. The trichloroethylene automatic source control system according to claim 2, wherein the gas flow controller comprises a float flowmeter. 4. The trichloroethylene automatic source control system according to claim 1, wherein the gas circuit control assembly further comprises a one-way valve, and the one-way valve is arranged on the input pipeline of each channel of the conveying pipeline is used to control the unidirectional conduction of the input pipeline. 5. The trichloroethylene automatic source control system according to claim 1, wherein the gas pipeline further comprises a pressure relief pipeline branch, and the pressure relief pipeline branch is communicated with the output main pipeline; The air circuit control assembly further includes a pressure relief valve, the pressure relief valve is arranged on the branch of the pressure relief pipeline, and the pressure relief valve is opened when the pressure in the air circuit pipeline is higher than a preset pressure threshold value, and is suitable for The air pipeline is depressurized. 6. The trichloroethylene automatic source control system according to any one of claims 1-5, wherein the pipeline switch valve comprises a pneumatic valve, and the control valve comprises a solenoid valve; The solenoid valve is connected with the two pneumatic valves on the same conveying pipeline through a three-way pipeline, and the solenoid valve controls the on-off state of the two pneumatic valves by releasing compressed gas when receiving an electrical signal. 7. The trichloroethylene automatic source control system according to claim 6, wherein the source temperature control system further comprises a source for maintaining the source liquid in the source liquid storage device at a set temperature a temperature controller, and a temperature sensor arranged in the source liquid; The temperature sensor is connected to the source temperature controller, and is used for feeding back the detected source liquid temperature to the source temperature controller, so that the source temperature controller controls the source liquid to maintain at a temperature according to the feedback source liquid temperature. set temperature. 8. The trichloroethylene automatic source control system according to claim 7, wherein the gas source is a nitrogen source. 9. The trichloroethylene automatic source control system according to claim 8, wherein the trichloroethylene automatic source control system further comprises: a control terminal electrically connected to the control valve, the control The terminal controls the working state of the control valve by sending electrical signals. 10. The trichloroethylene automatic source control system according to claim 9, wherein the control terminal further comprises a display screen, and the display screen is used to display the working state of the control valve and/or the The on-off state of the pipeline switch valve controlled by the control valve.

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