CN111487763A - Electromagnetic integrated MEMS scanning micro-mirror - Google Patents
Electromagnetic integrated MEMS scanning micro-mirror Download PDFInfo
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- CN111487763A CN111487763A CN202010470724.8A CN202010470724A CN111487763A CN 111487763 A CN111487763 A CN 111487763A CN 202010470724 A CN202010470724 A CN 202010470724A CN 111487763 A CN111487763 A CN 111487763A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
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Abstract
The invention relates to an electromagnetic integrated MEMS scanning micro-mirror, belonging to the technical field of micro-opto-electro-mechanical systems, comprising a fixed frame and a crystal orientation silicon-based micro-mirror plate which is arranged at the inner side of the fixed frame and is integrated with a driving coil and an angle sensing coil at the back, wherein a connecting plate which extends along one side edge of the crystal orientation silicon-based micro-mirror plate is connected between the fixed frame and the crystal orientation silicon-based micro-mirror plate. The driving coil and the angle sensing coil are both non-closed rectangular single loops and are respectively distributed in parallel and equidistantly in a stripe shape in the extending direction parallel to the connecting plate. The connecting plate has a stable structure and is not easy to break; only one permanent magnet needs to be arranged outside, so that the occupied volume is reduced; the driving coils and the angle sensing coils are distributed in parallel in a stripe shape, so that coil materials are saved, and power consumption, processing difficulty and cost are reduced.
Description
Technical Field
The invention belongs to the technical field of micro-opto-electro-mechanical systems, and relates to an electromagnetic integrated MEMS scanning micro-mirror.
Background
The MEMS scanning Micro-mirror is an optical single chip integrated with a Micro-mirror reflector and a driver by using an optical MEMS (Micro-Electro-Mechanical Systems, Micro-optical-Electro-Mechanical Systems) manufacturing technology, and a spectral analysis technology developed at a rapid pace with the MEMS scanning Micro-mirror as a core component can perform qualitative and quantitative detection on components and contents of unknown substances, and is widely applied to various fields such as consumer electronics, industrial and agricultural production, national defense and military, and a lot of colleges and universities and scientific research institutes at home and abroad develop deep research on scanning Micro-mirrors working at high performance.
Patent No. CN105301764B discloses a "MOEMS scanning grating micromirror system" applied to near-infrared spectrometer, which has the following disadvantages: (1) the two torsion beams are symmetrically arranged, the silicon substrate rotates around the torsion beams, the rotating central axis of the silicon substrate is parallel to the length direction of the torsion beams, and the two ends of the torsion beams are respectively connected with the silicon substrate and the fixed frame, so that the torsion beams are designed to be thin, the contact area of the connection part is small, the structural stability is poor, cracks and even fractures are easily generated under the influence of a processing process and a working environment, and the development of the portability of a spectrometer is not facilitated; (2) the silicon substrate is driven to rotate by adopting double sides, and two permanent magnets are required to be arranged outside, so that the system is large in size; (3) the driving coils and the angle sensing coils are arranged in an involute mode in a multi-coil mode, the coil structures are complicated, too many coils are occupied by the driving coils which do not provide driving force directions and the angle sensing coils which do not generate induced electromotive force parts, and therefore challenges are brought to process machining and waste of materials is caused.
Disclosure of Invention
In view of the above, an object of the present invention is to provide an electromagnetic integrated MEMS scanning micro mirror, in which a structure at a rotation axis of the scanning micro mirror is optimally designed, a connection plate extending along one side edge of a monotectic silicon-based micro mirror plate is disposed between a fixed frame and the monotectic silicon-based micro mirror plate, and the two are connected to increase a connection area, enhance a connection strength, improve a structural stability, and solve a problem in the prior art that a torsion beam is easy to crack due to a small connection area.
In order to achieve the purpose, the invention provides the following technical scheme:
an electromagnetic integrated MEMS scanning micro-mirror comprises a fixed frame and a crystal orientation silicon-based micro-mirror plate which is arranged on the inner side of the fixed frame and is integrated with a driving coil and an angle sensing coil on the back, wherein a connecting plate which extends along one side edge of the crystal orientation silicon-based micro-mirror plate is connected between the fixed frame and the crystal orientation silicon-based micro-mirror plate.
Furthermore, the connecting plate is composed of a plurality of connecting beams which are arranged in parallel at equal intervals.
Furthermore, the connecting plate is provided with holes arranged in a net shape.
Furthermore, a plurality of parallel rectangular grooves which are arranged at equal intervals are arranged on the connecting plate.
Furthermore, the driving coil and the angle sensing coil are both non-closed rectangular single loops and are respectively distributed in parallel and equidistantly in a stripe shape in the extending direction parallel to the connecting plate.
Further, the angle sensing coil is located at the periphery or inside of the driving coil.
Further, the driving coil and/or the angle sensing coil are provided with at least one layer in a superposed manner.
Furthermore, the outer side of the fixed frame, which is far away from the connecting plate, is provided with a permanent magnet in parallel with the extending direction of the connecting plate.
Further, electrodes connected with the open-end terminals of the driving coil and the angle sensing coil are arranged on the fixed frame.
Furthermore, the front surface of the silicon-based micro mirror plate is etched with blazed gratings.
The invention has the beneficial effects that:
(1) according to the invention, the connecting plate is arranged on one side of the silicon-based micro mirror plate and extends along one side edge of the silicon-based micro mirror plate, and the extending direction of the connecting plate is parallel to the rotating axis of the silicon-based micro mirror plate, so that on one hand, the connecting area is greatly increased in the extending direction of the connecting plate, the connecting strength is enhanced, and the structural stability is improved; on the other hand, based on the structure and the arrangement mode of the connecting plate, a constant magnetic field can be provided for the work of the scanning micro-mirror by arranging the permanent magnet on the outer side of the fixed frame, and the volume of a packaging body of the scanning micro-mirror is reduced.
(2) The driving coil and the angle sensing coil are distributed in a parallel stripe shape, an involute multi-coil arrangement mode in the prior art is replaced, the length of the coil in the direction of non-provided driving force and non-generated induced electromotive force is reduced to the maximum extent, coil materials are saved, the impedance of the driving coil is reduced, and power consumption, process processing difficulty and manufacturing cost are effectively reduced.
(3) The driving coils can be overlapped to form a plurality of layers, so that the resistance of the driving coils can be effectively reduced, the volume of the permanent magnet can be reduced, and the volume of a packaging body of the scanning micro-mirror can be further reduced; in order to enhance the signal output of the angle sensing coil, the angle sensing coil may be stacked in multiple layers.
Drawings
In order to make the objects, technical solutions and advantages of the present invention more clear, the present invention is illustrated by the following drawings:
FIG. 1 is a schematic front view of an integrated MEMS scanning micro-mirror of the present invention;
FIG. 2 is a schematic diagram of a backside structure of the first embodiment;
FIG. 3 is a schematic front view of the second embodiment;
fig. 4 is a schematic front structure diagram of the third embodiment.
Reference numerals: the device comprises a fixed frame 1, an electrode 2, a connecting plate 3, a crystal orientation silicon-based micro mirror plate 4, a permanent magnet 5, an angle sensing coil 6 and a driving coil 7.
Detailed Description
Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
The first embodiment is as follows:
as shown in fig. 1 and fig. 2, the present embodiment provides an electromagnetic integrated MEMS scanning micro mirror, which is integrally manufactured by an MEMS processing technology, and includes a fixed frame 1 and a polarization silicon-based micro mirror plate 4 disposed inside the fixed frame 1 and having a driving coil 7 and an angle sensing coil 6 integrated on a back surface thereof, wherein a connection plate 3 extending along one side edge of the polarization silicon-based micro mirror plate 4 is connected between the fixed frame 1 and the polarization silicon-based micro mirror plate 4.
Specifically, the front and back surfaces of the crystal oriented silicon-based micromirror plate 4 are rectangular with a surface area of 7 × 6mm2The thickness is 0.4 mm. The fixed frame 1 provides freedom constraint for the operation of the scanning micro-mirrorAnd a support, the size of the fixed frame 1 is designed corresponding to the size of the crystal orientation silicon-based micro mirror plate 4 and the connecting plate 3, the cross section of a frame rod forming the frame is square, the thickness of the fixed frame 1 is the same as that of the crystal orientation silicon-based micro mirror plate 4, and the crystal orientation silicon-based micro mirror plate 4 is suspended in the fixed frame 1.
The connecting plate 3 is located on the left side, the extending direction of the connecting plate 3 is the vertical direction in fig. 1 and 2, and the connecting plate 3 is composed of a plurality of connecting beams which are arranged in parallel and equidistantly. The connecting plate 3 is manufactured by etching the silicon-based micro mirror plate 4 with the crystal orientation by an ICP dry etching process, and the total length, width and thickness of the etched connecting plate 3 are 7000 mu m, 400 mu m and 80 mu m respectively. For ease of processing, the connecting plate 3 is flush with the front surface of the silicon-based polarizer plate 4. A permanent magnet 5 for providing a constant magnetic field is arranged on the right outer side of the fixed frame 1 and is parallel to the extending direction of the connecting plate 3. And an electrode 2 connected with the open wire ends of the driving coil 7 and the angle sensing coil 6 is arranged on the left frame of the fixed frame 1 close to the connecting plate 3.
In this embodiment, the extending direction of the connecting plate 3 is parallel to the rotation axis of the monotectic silicon-based micromirror plate 4, on one hand, the connecting area is greatly increased in the extending direction of the connecting plate 3, the connecting strength is enhanced, and the structural stability is improved; on the other hand, based on the structure and the arrangement mode of the connecting plate 3, a constant magnetic field can be provided for the work of the scanning micro-mirror by arranging the permanent magnet 5 at the outer side of the fixed frame 1, and the volume of a packaging body of the scanning micro-mirror is reduced.
The driving coil 7 and the angle sensing coil 6 are fabricated by depositing a thin film of Si3N4 on the back side of the off-crystal silicon-based mirror plate 4 and RIE etching and then sputtering Al. The driving coil 7 and the angle sensing coil 6 are both non-closed rectangular single loops and are respectively distributed in parallel and equidistantly in a stripe shape in the extending direction parallel to the connecting plate 3. Both open ends of each of the driving coil 7 and the angle sensing coil 6 face the connection plate 3. The angle sensing coil 6 is located at the periphery of the driving coil 7 (the angle sensing coil 6 may also be arranged inside the driving coil 7). The line width, the thickness and the coil interval of the driving coil 7 and the angle sensing coil 6 are both 80 μm and 4 μm, respectively, and the distance between the rightmost coil of the angle sensing coil 6 and the rightmost edge of the off-crystal silicon-based micro mirror plate 4 is 20 μm in order to make the coil distribution more reasonable, as shown in fig. 2.
In this embodiment, the extending direction of the connecting plate 3 is the direction of providing driving force and generating induced electromotive force, that is, in the direction of providing driving force and generating induced electromotive force, the driving coil 7 and the angle sensing coil 6 are uniformly provided with a plurality of coils distributed in parallel in a stripe shape, and in the direction of not providing driving force and not generating induced electromotive force, only one circle of non-closed coil is provided, thereby reducing the coil length in the direction of not providing driving force and not generating induced electromotive force to the maximum extent, not only saving coil material, but also reducing impedance of the driving coil 7, and effectively reducing power consumption, process difficulty and manufacturing cost.
After alternating current is introduced into the driving coil 7, under the action of the magnetic field of the externally-arranged permanent magnet 5, the driving coil 7 can generate Lorentz force to drive the silicon-based micro mirror plate 4 with the crystal orientation to swing back and forth by taking a joint line of the connecting plate 3 and the fixed frame 1 as a deflection central line; meanwhile, the angle sensing coil 6 performs cutting magnetic induction line motion in a magnetic field to generate induced electromotive force, the induced electromotive force is led out to the corresponding electrode 2 through the connecting plate 3 and is finally output to the peripheral control circuit, the peripheral control circuit converts the induced electromotive force into a mechanical deflection angle signal of the silicon-based micro mirror plate 4 from the crystal orientation and outputs the mechanical deflection angle signal, and finally real-time dynamic monitoring of the scanning state of the scanning micro mirror is achieved.
Example two:
as shown in fig. 3, the difference between the second embodiment and the first embodiment is that the specific structure of the connecting plate 3 is different, and in the second embodiment, the connecting plate 3 is provided with holes arranged in a net shape to improve the bending deflection performance of the connecting plate 3.
Example three:
as shown in fig. 4, the difference between the third embodiment and the first embodiment is that the specific structure of the connecting plate 3 is different, and in the third embodiment, a plurality of parallel rectangular slots are arranged at equal intervals on the connecting plate 3 to improve the bending deflection performance of the connecting plate 3.
As an improvement of the above embodiment, the driving coil 7 is stacked in multiple layers, the driving operation of the scanning micromirror is related to the magnitude of the driving current and the magnetic field strength, the number of the driving coil 7 is increased, the resistance of the driving coil 7 can be effectively reduced, correspondingly, the volume of the permanent magnet 5 can be reduced, and the volume of the package of the scanning micromirror can be further reduced. In order to enhance the signal output of the angle sensing coil 6, the angle sensing coil 6 may be stacked in multiple layers.
As a modification of the above embodiment, the blazed grating may be anisotropically wet etched on the front surface of the polarizer-si-based micromirror plate 4 by using TMAH solution to perform light splitting.
Finally, the above embodiments are only intended to illustrate the technical solutions of the present invention and not to limit the present invention, and although the present invention has been described in detail with reference to the preferred embodiments, it will be understood by those skilled in the art that modifications or equivalent substitutions may be made on the technical solutions of the present invention without departing from the spirit and scope of the technical solutions, and all of them should be covered by the claims of the present invention.
Claims (10)
1. An electromagnetic integrated MEMS scanning micro-mirror comprises a fixed frame and a polarization silicon-based micro-mirror plate which is arranged on the inner side of the fixed frame and is integrated with a driving coil and an angle sensing coil on the back surface.
2. The electromagnetic integrated MEMS scanning micro-mirror of claim 1, wherein the connecting plate is comprised of a plurality of connecting beams arranged in parallel and equidistant.
3. The electromagnetic integrated MEMS scanning micro-mirror of claim 1, wherein the connecting plate has a mesh-like arrangement of holes.
4. The electromagnetic integrated MEMS scanning micro-mirror of claim 1, wherein the connecting plate has a plurality of parallel rectangular slots arranged equidistantly.
5. The electromagnetic integrated MEMS scanning micro-mirror of claim 1, wherein the drive coil and the angle sensor coil are each a non-closed rectangular single loop and are each parallel and equidistantly distributed in a stripe pattern in a direction parallel to the extension of the connecting plate.
6. The electromagnetic integrated MEMS scanning micro-mirror of claim 1, wherein the angle sensing coil is located at a periphery or inside of the driving coil.
7. The electromagnetic integrated MEMS scanning micro-mirror of claim 1, wherein the drive coil and/or the angle sensing coil are stacked with at least one layer.
8. The electromagnetic integrated MEMS scanning micro-mirror of claim 1, wherein the outer side of the fixed bezel facing away from the connecting plate is provided with a permanent magnet parallel to the extending direction of the connecting plate.
9. The electromagnetic integrated MEMS scanning micro-mirror of claim 1, wherein the fixed bezel has electrodes connected to open ends of the driving coil and the angle sensing coil.
10. The electromagnetic integrated MEMS scanning micro-mirror of claim 1, wherein the front side of the crystal-oriented silicon-based micro-mirror plate is etched with a blazed grating.
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| CN202010470724.8A CN111487763A (en) | 2020-05-28 | 2020-05-28 | Electromagnetic integrated MEMS scanning micro-mirror |
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| CN202010470724.8A CN111487763A (en) | 2020-05-28 | 2020-05-28 | Electromagnetic integrated MEMS scanning micro-mirror |
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