CN111487038A - Integrated micro-dispersion lens array panel and parallel chromatic confocal measurement system - Google Patents
Integrated micro-dispersion lens array panel and parallel chromatic confocal measurement system Download PDFInfo
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- CN111487038A CN111487038A CN202010328182.0A CN202010328182A CN111487038A CN 111487038 A CN111487038 A CN 111487038A CN 202010328182 A CN202010328182 A CN 202010328182A CN 111487038 A CN111487038 A CN 111487038A
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- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
The invention relates to an integrated micro-dispersion lens array panel and a parallel color confocal measurement system. The integrated micro-dispersion lens array panel includes: the micro-dispersion lens array is arranged on the substrate and used for splitting and parallel dispersing light emitted by the polychromatic light source, and the substrate is used for fixing the micro-dispersion lens array. The invention can realize multi-point parallel measurement and improve the measurement efficiency and precision.
Description
Technical Field
The invention relates to the technical field of micro-optical elements, in particular to an integrated micro-dispersion lens array panel and a parallel chromatic confocal measurement system.
Background
The measurement of the three-dimensional shape of the surface of the object is an important means for obtaining the shape characteristics of the object, and has important significance and wide application prospect in the fields of automatic processing, machine vision, industrial detection, product quality control and the like. With the development of science and technology and productivity, more and more scientific researchers invest in this field and research many high-tech measurement methods applied to the field of measuring the three-dimensional topography of the surface of an object.
In a plurality of measuring methods, based on a color confocal principle, a color confocal three-dimensional shape measuring system adopting polychromatic light as a light source has axial chromatography capacity and has certain advantages in the aspect of detection speed compared with the traditional three-dimensional shape measuring system. Chromatic confocal technology is an emerging important technology for realizing the measurement of the three-dimensional topography of the surface of an object, and the core of the technology is the design of a dispersive lens, which is a key factor of the measurement range of an absolute system and also influences the axial resolution of the system to a great extent.
In 2012, jinbo stone et al in the text of "design of dispersive lens group in spectral confocal measurement system", designed a set of dispersive lens for spectral confocal, this dispersive lens group utilized the stronger dispersive power of diffractive lens and the focusing power of refractive lens, the spectral range that this design utilized was 500 ~ 700nm, and the displacement measurement range was 2.2mm, and the linearity is better. The dispersive lens group well meets the requirements of a spectrum confocal system on the dispersive lens group, and important performances of the measurement system such as high precision, high resolution and the like are ensured.
In 2017, in the text of 'design of modulatable dispersion objective lens of color confocal system' by chairman et al, aiming at the problem of modulation of measurement range and resolution in a color confocal distance measurement system, a dispersion objective lens is designed by adopting the idea of separation of dispersion and focusing, the dispersion function of the dispersion objective lens is realized by a dispersion tube lens consisting of pure spherical refraction lenses, the focusing function is realized by a commercial objective lens, and the dispersion tube lens can have an axial dispersion area with high linearity by combining objective lenses with different focusing capacities. The dispersive objective lens realizes the modulation of the measuring range and the resolution.
However, both of the above-mentioned designs related to the dispersive lens can only realize single-point axial dispersion, and the dispersion characteristic is poor at a position far away from the optical axis, and the measurement efficiency is low.
Disclosure of Invention
The invention aims to provide an integrated micro-dispersion lens array panel and a parallel chromatic confocal measurement system, which can realize multi-point parallel measurement and improve the measurement efficiency and precision.
In order to achieve the purpose, the invention provides the following scheme:
an integrated micro-dispersed lens array panel comprising: the micro-dispersion lens array is arranged on the substrate and used for splitting and parallel dispersing light emitted by the polychromatic light source, and the substrate is used for fixing the micro-dispersion lens array.
Optionally, the micro-dispersion lens array is formed by arranging a plurality of micro-dispersion lens units in an array manner.
Optionally, each micro-dispersion lens unit adopts a refraction type lens, the refraction type lens includes an incident light surface and an exit light surface, the incident light surface is attached to the substrate, and the exit light surface faces to the object to be measured.
Optionally, the substrate is a glass substrate.
Optionally, the substrate surface is attached to the micro-dispersion lens array by coupling.
A parallel chromatic confocal measurement system, comprising: the integrated micro-dispersion lens array panel comprises a substrate and a micro-dispersion lens array, wherein the micro-dispersion lens array is arranged on the substrate, the micro-dispersion lens array is used for splitting beams and carrying out parallel dispersion on light emitted by a polychromatic light source, and the substrate is used for fixing the micro-dispersion lens array;
the parallel color confocal measurement system body comprises a polychromatic light source, a spectroscope and an objective table which are sequentially arranged from top to bottom, and a focusing lens, an aperture array and a color camera which are sequentially arranged on one side of the spectroscope;
the integrated micro-dispersion lens array panel is positioned between the spectroscope and the objective table; the object to be measured is placed on the object stage;
the polychromatic light source emits polychromatic light, the polychromatic light reaches the integrated micro-dispersion lens array panel through the spectroscope, the integrated micro-dispersion lens array panel simultaneously achieves light splitting and parallel dispersion, light with different wavelengths is focused at different axial heights, the light reaches the surface of a measured object and is reflected to the spectroscope by the surface of the measured object, the light is reflected again by the spectroscope, the light with the wavelength focused on the surface of the measured object is focused by the focusing lens after being reflected, and the corresponding color image is received by the color camera through the small hole array.
Optionally, the stage is a two-dimensional motion stage.
Optionally, the light spots imaged on the color camera by the small hole array and the micro-dispersion lens array have a one-to-one conjugate correspondence relationship.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
1. the measurement efficiency is high: the array of the micro-dispersion lens unit can realize parallel measurement, thereby greatly improving the measurement efficiency;
2. the measurement accuracy is high: in the color confocal measurement device, stray signals except for a non-focal plane are filtered through the small hole array, and sharp signals located in the focal plane are obtained, so that the system has high measurement precision and measurement resolution;
3. the structure is simple: compared with the prior art, the glass substrate and the micro-dispersion lens can be integrated through direct coupling, the technology is simple, liquid is not needed for filling, and the method is simple and convenient.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
FIG. 1 is a perspective view of an integrated micro-dispersed lens array panel according to the present invention;
FIG. 2 is a plan view of an integrated micro-dispersed lens array panel of the present invention;
FIG. 3 is a diagram illustrating a parallel chromatic confocal measurement system according to the present invention;
fig. 4 is a diagram of a dispersive optical path of an integrated micro-dispersion lens array panel according to the present invention.
Description of the symbols: 1 is a substrate, 2 is a micro-dispersion lens array unit, 3 is a polychromatic light source, 4 is a spectroscope, 5 is a measured object, 6 is an objective table, 7 is a focusing lens, 8 is an aperture array, and 9 is a color camera.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide an integrated micro-dispersion lens array panel and a parallel chromatic confocal measurement system, which can realize multi-point parallel measurement and improve the measurement efficiency and precision.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Example 1:
the micro lens array is a common array composed of lenses with micron-sized clear aperture and relief depth, namely, the same lenses are arranged on a plane according to a certain period to form the lens array. The microlens array for dividing and focusing light beams is one of important devices in the micro-optics field, and is widely applied to various fields such as optical communication, optical calculation, optical interconnection, photoelectric detection array, imaging, light beam shaping and control, optical display, sensing and the like.
But in recent years no product has emerged that can build a dispersive tube mirror like a microlens array. The present invention thus provides an integrated micro-dispersed lens array panel. Fig. 1 is a perspective view of an integrated micro-dispersion lens array panel according to the present invention. Fig. 2 is a plan view of an integrated micro-dispersed lens array panel according to the present invention. As shown in fig. 1-2, an integrated micro-dispersion lens array panel includes: the light source comprises a substrate 1 and a micro dispersion lens array 2, wherein the micro dispersion lens array 2 is arranged on the substrate 1, the micro dispersion lens array 2 is used for splitting and parallel dispersion of light emitted by the polychromatic light source, and the substrate 1 is used for fixing the micro dispersion lens array 2.
As a preferred embodiment, the micro-dispersion lens array 2 is composed of several micro-dispersion lens units arranged in an array. Each micro-dispersion lens unit adopts a refraction type lens, the refraction type lens comprises an incident light surface and an emergent light surface, the incident light surface is attached to the substrate 1, and the emergent light surface faces to an object to be measured 5.
As a preferred embodiment, a glass substrate is used as the substrate 1. The surface of the substrate 1 is attached to the micro-dispersion lens array 2 by coupling.
The integrated micro-dispersion lens array panel provided by the embodiment has the functions of beam splitting and parallel dispersion. Each micro-dispersion lens unit can be regarded as a subsystem for realizing dispersion individually, and the whole micro-dispersion lens array is equivalent to a collection of a plurality of subsystems. On one hand, the polychromatic light emitted by the polychromatic light source is divided into a plurality of beams of polychromatic light according to an array arrangement mode; on the other hand, each micro-dispersion lens unit realizes dispersion of split light along the optical axis, namely, focuses light with different wavelengths to different height positions of the respective optical axis, thereby realizing the functions of splitting and parallel dispersion of polychromatic light, so that the invention can be used for a parallel chromatic confocal measurement system and obtains the three-dimensional morphology of the whole measured object surface by combining with transverse scanning.
Example 2:
FIG. 3 is a diagram of a parallel chromatic confocal measurement system according to the present invention. As shown in fig. 3, a parallel chromatic confocal measurement system includes: the integrated micro-dispersion lens array panel comprises a substrate 1 and a micro-dispersion lens array 2, the micro-dispersion lens array 2 is arranged on the substrate 1, the micro-dispersion lens array 2 is used for splitting beams and performing parallel dispersion on light emitted by a polychromatic light source, and the substrate 1 is used for fixing the micro-dispersion lens array 2.
The parallel color confocal measurement system body comprises a polychromatic light source 3, a spectroscope 4, an objective table 6, a focusing lens 7, an aperture array 8 and a color camera 9, wherein the polychromatic light source, the spectroscope and the objective table are sequentially arranged from top to bottom, and the focusing lens 7, the aperture array 8 and the color camera are sequentially arranged on one side of the spectroscope. The integrated micro-dispersion lens array panel is positioned between the spectroscope 4 and the objective table 6; the object 5 to be measured is placed on the object table 6.
The polychromatic light source 3 emits polychromatic light which reaches the integrated micro-dispersion lens array panel through the spectroscope 4, the integrated micro-dispersion lens array panel simultaneously realizes light splitting and parallel dispersion, light with different wavelengths is focused at different axial heights, the light reaches the surface of the object to be measured and is reflected to the spectroscope 4 by the surface of the object to be measured 5, the light is reflected again by the spectroscope 4, the light with the wavelength focused on the surface of the object to be measured 5 is focused by the focusing lens 7 after being reflected, and the corresponding color image is received by the color camera 9 through the small hole array 8. Light rays having wavelengths not focused on the surface of the object to be measured are filtered by the aperture array 8. And finally, carrying out image processing on the color image through a computer, and restoring the three-dimensional topography characteristics of the surface of the measured object 5.
In a preferred embodiment, the light spots imaged on the color camera 9 by the pinhole array 8 and the micro-dispersion lens array unit have a one-to-one conjugate relationship, so that only light rays with wavelengths focused on the surface of the object 5 to be measured are reflected and focused by the focusing lens 7, and a corresponding color image is received by the color camera 9 through the pinhole array 8. The arrangement is such as to filter out the effects of stray and interfering light and to avoid lateral interference between adjacent spots.
In a preferred embodiment, in order to facilitate movement and satisfy full coverage of the surface of the object 5 to be measured, the stage 6 in the parallel color confocal measurement system is a two-dimensional moving stage, and the two-dimensional moving stage is used for driving the object 5 to be measured to perform two-dimensional movement.
In the present invention, fig. 4 is a diagram of a dispersive optical path of the integrated micro-dispersion lens array panel of the present invention. As shown in fig. 4, after the polychromatic light passes through each micro-dispersion lens unit, the lights with different wavelengths are focused on different height positions in the respective axial directions, so as to achieve the effect of parallel dispersion.
As a preferred embodiment, the micro-dispersion lens array 2 is composed of several micro-dispersion lens units arranged in an array. Each micro-dispersion lens unit adopts a refraction type lens, the refraction type lens comprises an incident light surface and an emergent light surface, the incident light surface is attached to the substrate 1, and the emergent light surface faces to an object to be measured 5.
As a preferred embodiment, a glass substrate is used as the substrate 1. The surface of the substrate 1 is attached to the micro-dispersion lens array 2 by coupling. The substrate 1 is used for fixing and is coupled with the micro-dispersion lens array 2.
The array of the micro-dispersion lens unit can realize parallel measurement, thereby greatly improving the measurement efficiency; in a parallel color confocal measurement system, stray signals except for a focal plane are filtered through a small hole array, and sharp signals located on the focal plane are obtained, so that the system has high measurement precision and measurement resolution; compared with the prior art, the integration can be realized through the direct coupling between the substrate and the micro-dispersion lens array, the technology is simple, liquid is not needed for filling, and the method is simple and convenient.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to assist understanding of the system and its core concepts; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (8)
1. An integrated micro-dispersed lens array panel, comprising: the micro-dispersion lens array is arranged on the substrate and used for splitting and parallel dispersing light emitted by the polychromatic light source, and the substrate is used for fixing the micro-dispersion lens array.
2. The integrated micro-dispersion lens array panel according to claim 1, wherein the micro-dispersion lens array is composed of a plurality of micro-dispersion lens units arranged in an array.
3. The integrated micro-dispersion lens array panel of claim 2, wherein each of the micro-dispersion lens units employs a refractive lens, the refractive lens comprising an entrance surface and an exit surface, the entrance surface being attached to the substrate, the exit surface facing the object.
4. The integrated micro-dispersed lens array panel according to claim 1, wherein the substrate is a glass substrate.
5. The integrated micro-dispersed lens array panel of claim 1, wherein the substrate surface is attached to the micro-dispersed lens array by coupling.
6. A parallel chromatic confocal measurement system, comprising: the integrated micro-dispersion lens array panel comprises a substrate and a micro-dispersion lens array, wherein the micro-dispersion lens array is arranged on the substrate, the micro-dispersion lens array is used for splitting beams and carrying out parallel dispersion on light emitted by a polychromatic light source, and the substrate is used for fixing the micro-dispersion lens array;
the parallel color confocal measurement system body comprises a polychromatic light source, a spectroscope and an objective table which are sequentially arranged from top to bottom, and a focusing lens, an aperture array and a color camera which are sequentially arranged on one side of the spectroscope;
the integrated micro-dispersion lens array panel is positioned between the spectroscope and the objective table; the object to be measured is placed on the object stage;
the polychromatic light source emits polychromatic light, the polychromatic light reaches the integrated micro-dispersion lens array panel through the spectroscope, the integrated micro-dispersion lens array panel simultaneously achieves light splitting and parallel dispersion, light with different wavelengths is focused at different axial heights, the light reaches the surface of a measured object and is reflected to the spectroscope by the surface of the measured object, the light is reflected again by the spectroscope, the light with the wavelength focused on the surface of the measured object is focused by the focusing lens after being reflected, and the corresponding color image is received by the color camera through the small hole array.
7. The parallel confocal color measurement system of claim 6, wherein the stage is a two-dimensional motion stage.
8. The system of claim 6, wherein the aperture array and the micro-dispersion lens array have a one-to-one conjugate correspondence of the spots imaged on the color camera.
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