CN111478678A - Frequency doubling amplification device and method based on super harmonic and synchronous resonance signals - Google Patents
Frequency doubling amplification device and method based on super harmonic and synchronous resonance signals Download PDFInfo
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- CN111478678A CN111478678A CN202010091760.3A CN202010091760A CN111478678A CN 111478678 A CN111478678 A CN 111478678A CN 202010091760 A CN202010091760 A CN 202010091760A CN 111478678 A CN111478678 A CN 111478678A
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H17/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves, not provided for in the preceding groups
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B19/00—Generation of oscillations by non-regenerative frequency multiplication or division of a signal from a separate source
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H2009/155—Constructional features of resonators consisting of piezoelectric or electrostrictive material using MEMS techniques
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Abstract
A frequency multiplication amplifying device based on super-harmonic and synchronous combined resonance signals comprises an electrostatic excitation vibration device and a super-harmonic synchronous resonance frequency multiplication signal extraction device. The electrostatic exciting vibrator consists of low frequency micro beam, fixed end, electrostatic driving electrode, base, DC voltage power source, signal source and conducting wire. The super harmonic synchronous resonance frequency multiplication signal extraction device is composed of a low-frequency micro beam, a fixed end, a high-frequency micro beam, a signal acquisition sensor, a coupling connection block and a wire. The alternating current signal generates harmonic vibration with the excitation frequency of 3N times through super harmonic and synchronous combined resonance, and frequency-doubled vibration of super harmonic synchronous resonance is realized; the signal acquisition sensor acquires frequency multiplication vibration signals, and high-frequency multiplication signals are generated after the frequency multiplication vibration signals are filtered by the band-pass filter.
Description
Technical Field
The invention relates to a vibration signal frequency multiplication amplifying device, in particular to a frequency multiplication amplifying device and method based on super-harmonic and synchronous combined resonance signals, and belongs to the field of vibration signal generation.
Background
The frequency doubling technology based on the signal frequency doubling principle becomes one of the main methods for microwave frequency amplification, and the performance research and preparation of circuits and key devices become the focus of research in recent years. However, the vacuum electronic signal source has the problems of large volume, high driving voltage and the like; the nonlinear circuit of semiconductor electronics produces power series signals, has the problem that intermodulation signal is intensive and leads to difficult filtering and energy dispersion and cause the signal-to-noise ratio low. In addition, the signal sources are easily interfered, for example, a mobile phone signal can cause GPS signal loss of a civil aviation passenger plane, and radio interference can trap an unmanned aerial vehicle and the like. The super-harmonic resonance, the synchronous resonance and the like can realize frequency-doubled vibration, amplitude surge, energy dissipation inhibition and the like, and the performance index of the sensor is improved. The electrostatic driving is a non-contact driving method, and is used as a driving excitation source of the cantilever beam, so that the influence of driving on vibration signal extraction can be reduced, and the signal measurement accuracy and the measurement resolution can be improved. The invention can be widely applied to the vibration signal detection and extraction work in the fields of mechanical vibration, mechanical analysis and the like.
Disclosure of Invention
The invention provides a device for extracting vibration signals, aiming at the current situation that the vibration signals are difficult to extract.
The technical scheme adopted by the invention for solving the technical problems is as follows: the frequency doubling and amplifying device based on the super-harmonic and synchronous resonance signals comprises an electrostatic excitation vibration device and a super-harmonic synchronous resonance frequency doubling signal extraction device. The electrostatic excitation vibration device is composed of a low-frequency micro beam, a fixed end, an electrostatic driving electrode, a base, a direct-current voltage power supply, a signal source and a lead. The left end and the right end of the low-frequency micro beam are fixedly connected with the fixed end; the electrostatic driving electrode is positioned right below the low-frequency micro beam and fixedly connected to the base, and the length of the electrostatic driving electrode is consistent with that of the low-frequency micro beam; the left end of the low-frequency micro-beam is connected with the left end of the alternating current signal source through a lead, the left end of the alternating current signal source is connected with the upper end of the direct current voltage power supply through a lead, and the lower end of the direct current voltage power supply is grounded.
The super-harmonic synchronous resonance frequency multiplication signal extraction device is composed of a low-frequency micro beam, a fixed end, a high-frequency micro beam, a signal acquisition sensor, a coupling connection block and a wire. The right end of the high-frequency micro beam is fixedly connected with the fixed end; the left end of the low-frequency micro beam is fixedly connected with the upper end of the coupling connecting block, and the lower end of the coupling connecting block is fixedly connected with the high-frequency micro beam; the signal acquisition sensor is adhered and fixed on the upper surface of the high-frequency micro beam, and when the high-frequency micro beam vibrates, the signal acquisition sensor acquires vibration signals and generates high-frequency multiplication signals after being filtered by the band-pass filter.
The low-frequency micro-beam generates forced vibration under the excitation action of an alternating current signal; when the excitation frequency of the alternating current signal source is close to one third of the natural frequency of the low-frequency micro-beam, the low-frequency micro-beam can generate super-harmonic resonance; when the natural frequency of the high-frequency micro beam is N times of the natural frequency of the low-frequency micro beam, the high-frequency micro beam and the low-frequency micro beam generate synchronous resonance, and the high-frequency micro beam generates harmonic vibration with the excitation frequency being 3N times, so that the frequency-doubled vibration of the super-harmonic synchronous resonance is realized; the signal acquisition sensor acquires frequency multiplication vibration signals, and high-frequency multiplication signals are generated after the frequency multiplication vibration signals are filtered by the band-pass filter.
Compared with the prior art, the invention has the following advantages:
1. the electrostatic driving method is a non-contact driving method, and has the advantages of less measurement interference factors and high measurement sensitivity.
2. The frequency doubling amplifying device based on the super harmonic and synchronous combined resonance signals is simple in structure and can be integrated with a micro electro mechanical system chip for manufacturing.
Drawings
FIG. 1 is a diagram of an electrostatic actuator for a micro-beam;
FIG. 2 is a diagram of a frequency doubling device for micro-beam combined resonance signals;
in the figure, 1, a low-frequency micro-beam 2, a fixed end 3, an electrostatic driving electrode 4, a base 5, a direct-current voltage power supply 6, an alternating-current signal source 7, a high-frequency micro-beam 8, a signal acquisition sensor 9 and a coupling connecting block
Detailed Description
The following is further detailed in conjunction with the accompanying drawings:
the main structure of the embodiment comprises an electrostatic excitation vibration device of a cantilever beam and an ultraharmonic synchronous resonance frequency doubling signal extraction device. The electrostatic excitation vibration device is composed of a low-frequency micro beam 1, a fixed end 2, an electrostatic driving electrode 3, a base 4, a direct-current voltage power supply 5, a signal source 6 and a lead. The left end and the right end of the low-frequency micro beam 1 are fixedly connected with the fixed end 3; the electrostatic driving electrode 4 is positioned right below the low-frequency micro-beam 1 and fixedly connected to the base 4, and the length of the electrostatic driving electrode 4 is consistent with that of the low-frequency micro-beam 1; the left end of the low-frequency micro-beam 1 is connected with the left end of an alternating current signal source 6 through a lead, the left end of the alternating current signal source 6 is connected with the upper end of a direct current voltage power supply 5 through a lead, and the lower end of the direct current voltage power supply 6 is grounded.
The super-harmonic synchronous resonance frequency-doubling signal extraction device is composed of a low-frequency micro beam 1, a fixed end 2, a high-frequency micro beam 7, a signal acquisition sensor 8, a coupling connection block 9 and a wire. The right end of the high-frequency micro-beam 7 is fixedly connected with the fixed end 2; the left end of the low-frequency micro beam 1 is fixedly connected with the upper end of a coupling connecting block 9, and the lower end of the coupling connecting block 9 is fixedly connected with a high-frequency micro beam 7; the signal acquisition sensor 8 is fixedly adhered to the upper surface of the high-frequency micro beam 7, and when the high-frequency micro beam 7 vibrates, the signal acquisition sensor 8 acquires vibration signals and generates high-frequency doubling signals after filtering by the band-pass filter.
The low-frequency micro-beam 1 generates forced vibration under the excitation action of an alternating current signal; when the excitation frequency of the alternating current signal source is close to one third of the natural frequency of the low-frequency micro-beam 1, the low-frequency micro-beam 1 can generate super-harmonic resonance; when the natural frequency of the high-frequency micro beam 7 is N times of the natural frequency of the low-frequency micro beam 1, the high-frequency micro beam 7 and the low-frequency micro beam 1 generate synchronous resonance, and the high-frequency micro beam 7 generates harmonic vibration with the excitation frequency of 3N times, so that the frequency-doubled vibration of super-harmonic synchronous resonance is realized; the signal acquisition sensor 8 acquires frequency doubling vibration signals, and generates high-frequency doubling signals after filtering by a band-pass filter.
Example 1: the first-order natural frequency of the low-frequency micro beam 1 is 3KHz, the first-order natural frequency of the high-frequency micro beam 7 is 9KHz, the excitation frequency of an alternating current signal source is 999.8Hz, the alternating current signal excites the low-frequency micro beam 1 to generate super-harmonic resonance, and the triple frequency vibration frequency of the low-frequency micro beam 1 is 2999.4 Hz; the high-frequency micro-beam 7 generates synchronous vibration, and the vibration frequency is 8998.2 Hz; the signal acquisition sensor 8 acquires frequency doubling vibration signals, and generates high-frequency doubling signals after filtering by a band-pass filter.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (2)
1. The frequency doubling and amplifying device based on the super-harmonic and synchronous resonance signals comprises an electrostatic excitation vibration device and a super-harmonic synchronous resonance frequency doubling signal extraction device; the super-harmonic synchronous resonance frequency multiplication signal extraction device consists of a low-frequency micro beam (1), a fixed end (2), a high-frequency micro beam (7), a signal acquisition sensor (8), a coupling connection block (9) and a wire; the right end of the high-frequency micro beam (7) is fixedly connected with the fixed end (2); the left end of the low-frequency micro beam (1) is fixedly connected with the upper end of a coupling connecting block (9), and the lower end of the coupling connecting block (9) is fixedly connected with the high-frequency micro beam (7); the signal acquisition sensor (8) is fixedly adhered to the upper surface of the high-frequency micro beam (7), and when the high-frequency micro beam (7) vibrates, the signal acquisition sensor (8) acquires vibration signals and generates high-frequency doubling signals after being filtered by the band-pass filter.
2. The device according to claim 1, characterized in that the low frequency micro-beam (1) is forced to vibrate under the excitation of AC signal; when the excitation frequency of the alternating current signal source is close to one third of the natural frequency of the low-frequency micro beam (1), the low-frequency micro beam (1) can generate super harmonic resonance; when the natural frequency of the high-frequency micro beam (7) is N times of the natural frequency of the low-frequency micro beam (1), the high-frequency micro beam (7) and the low-frequency micro beam (1) generate synchronous resonance, and the high-frequency micro beam (7) generates harmonic vibration with the excitation frequency being 3N times, so that the frequency-doubled vibration of the super-harmonic synchronous resonance is realized; the signal acquisition sensor (8) acquires frequency doubling vibration signals and generates high-frequency doubling signals after filtering by a band-pass filter.
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| CN202010091760.3A CN111478678B (en) | 2020-02-14 | 2020-02-14 | Frequency doubling and amplifying device based on super harmonic and synchronous resonance signals |
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| CN202010091760.3A CN111478678B (en) | 2020-02-14 | 2020-02-14 | Frequency doubling and amplifying device based on super harmonic and synchronous resonance signals |
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| CN111478678B CN111478678B (en) | 2023-04-07 |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009118281A (en) * | 2007-11-08 | 2009-05-28 | Sanyo Electric Co Ltd | Micro mechanical resonator |
| CN101694901A (en) * | 2009-08-21 | 2010-04-14 | 成都九洲迪飞科技有限责任公司 | Multi-doubling frequency harmonic inhibiting waveguide wave filter |
| JP2013074594A (en) * | 2011-09-29 | 2013-04-22 | Nippon Telegr & Teleph Corp <Ntt> | Micro-mechanical vibrator and micro-mechanical vibrator control method |
| CN107147304A (en) * | 2017-04-27 | 2017-09-08 | 山东理工大学 | A kind of signal frequency amplifying device of superharmonic resonances |
| CN108471297A (en) * | 2018-03-21 | 2018-08-31 | 东南大学 | Low-heat elastic damping both-end fine beam resonator with through-hole structure |
| CN110429827A (en) * | 2019-08-14 | 2019-11-08 | 山东理工大学 | A kind of superharmonic resonances signal frequency multiplication amplification frequency tuner |
-
2020
- 2020-02-14 CN CN202010091760.3A patent/CN111478678B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009118281A (en) * | 2007-11-08 | 2009-05-28 | Sanyo Electric Co Ltd | Micro mechanical resonator |
| CN101694901A (en) * | 2009-08-21 | 2010-04-14 | 成都九洲迪飞科技有限责任公司 | Multi-doubling frequency harmonic inhibiting waveguide wave filter |
| JP2013074594A (en) * | 2011-09-29 | 2013-04-22 | Nippon Telegr & Teleph Corp <Ntt> | Micro-mechanical vibrator and micro-mechanical vibrator control method |
| CN107147304A (en) * | 2017-04-27 | 2017-09-08 | 山东理工大学 | A kind of signal frequency amplifying device of superharmonic resonances |
| CN108471297A (en) * | 2018-03-21 | 2018-08-31 | 东南大学 | Low-heat elastic damping both-end fine beam resonator with through-hole structure |
| CN110429827A (en) * | 2019-08-14 | 2019-11-08 | 山东理工大学 | A kind of superharmonic resonances signal frequency multiplication amplification frequency tuner |
Non-Patent Citations (2)
| Title |
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| 刘灿昌等: "悬臂梁智能结构主共振响应的最优化控制" * |
| 刘灿昌等: "纳米梁非线性振动的静电反馈控制" * |
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