CN110787983B - Micro-beam nonlinear vibration combination signal generation device based on multi-frequency excitation - Google Patents
Micro-beam nonlinear vibration combination signal generation device based on multi-frequency excitation Download PDFInfo
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- CN110787983B CN110787983B CN201911035424.0A CN201911035424A CN110787983B CN 110787983 B CN110787983 B CN 110787983B CN 201911035424 A CN201911035424 A CN 201911035424A CN 110787983 B CN110787983 B CN 110787983B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B3/00—Methods or apparatus specially adapted for transmitting mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
Abstract
The micro-beam nonlinear vibration combination signal generating device based on multi-frequency excitation comprises a signal driving device and a signal collecting device. The signal driving device consists of an upper polar plate driving direct current power supply, an upper polar plate driving alternating current power supply, an upper polar plate, a micro beam, a lower polar plate driving alternating current power supply, a lower polar plate driving direct current power supply and a fixed end. The signal acquisition device consists of a piezoresistive vibration signal acquisition device, a voltage division resistor, a signal acquisition power supply, a signal power amplifier, a frequency multiplication signal and a band-pass filter. When the frequency of the combined signal is close to the natural frequency of the vibration system, the micro beam generates nonlinear combined resonance to generate a combined resonance signal, the combined resonance signal consists of a fundamental wave signal and a combined signal, and a frequency doubling signal is generated after filtering by a band-pass filter.
Description
Technical Field
The invention relates to a combined signal generating device, in particular to a micro-beam nonlinear vibration combined signal generating device based on multi-frequency excitation, belonging to the field of vibration signal generation.
Background
With the development of microwave technology, microwave frequency multipliers are widely used in communication, radar, frequency synthesis, measurement and other technologies, and are also widely applied in technologies of low-power high-stability oscillators, frequency synthesizers, phase-locked oscillators, nanosecond pulse generators and the like. In recent years, high and new technical equipment such as ultrahigh frequency signal transmitting and receiving devices, new generation high-speed computer clock signal generating devices and the like have or will enter the lives of people, and become core components in the fields of high-speed communication, unmanned driving, high-end robots, big data information processing and the like. The frequency doubling technology based on the signal frequency doubling principle becomes one of the main methods for microwave frequency amplification, and the performance research and preparation of circuits and key devices become the focus of research in recent years. However, the static operating point of the electronic oscillation frequency multiplier is easily affected by temperature, electromagnetic field, and other factors, which results in poor operating stability of the frequency multiplier circuit. In addition, the working stability of the circuit board is also affected by factors such as circuit performance, the type of copper foil used as a material, the surface roughness of the copper foil, the change of the dielectric constant with temperature, the moisture absorption of the material and the like, so that the circuit structure is complex, the signal stability is poor, and the development of the high-frequency signal frequency multiplication amplification technology is restricted.
Disclosure of Invention
The micro-beam nonlinear vibration combination signal generating device based on multi-frequency excitation comprises a signal driving device and a signal collecting device. The signal driving device consists of an upper polar plate driving direct current power supply, an upper polar plate driving alternating current power supply, an upper polar plate, a micro beam, a lower polar plate driving alternating current power supply, a lower polar plate driving direct current power supply and a fixed end. The micro beam is fixedly connected with the left and right fixed ends to form two-end fixed beams; an upper polar plate is arranged right above the micro-beam, the left end of the upper polar plate is connected with an upper polar plate driving direct current power supply and an upper polar plate driving alternating current power supply in series, the upper polar plate driving direct current power supply is grounded, and the micro-beam and the upper polar plate form a capacitor; the upper polar plate drives the direct current power supply to charge direct current voltage to the capacitor, and the upper polar plate drives the alternating current power supply to charge and discharge the capacitor, so that the micro-beam is driven to vibrate. A lower polar plate is arranged under the micro-beam, the left end of the lower polar plate is connected with a lower polar plate driving direct current power supply and a lower polar plate driving alternating current power supply in series, the lower polar plate driving direct current power supply is grounded, and the micro-beam and the lower polar plate form a capacitor; the lower pole plate drives the direct current power supply to charge direct current voltage to the capacitor, and the lower pole plate drives the alternating current power supply to charge and discharge the capacitor, so that the micro-beam is driven to vibrate.
The signal acquisition device consists of a piezoresistive vibration signal acquisition device, a voltage division resistor, a signal acquisition power supply, a signal power amplifier, a frequency multiplication signal and a band-pass filter. The piezoresistive vibration signal collector is bonded with the micro beam, and the resistance of the piezoresistive vibration signal collector is periodically changed when the piezoresistive vibration signal collector vibrates along with the micro beam; the voltage dividing resistor is connected with the piezoresistive vibration signal collector in series to form a bridge circuit, a signal collection power supply provides direct current power supply voltage, and vibration voltage signals are amplified by a signal power amplifier and then filtered by a band-pass filter to form frequency-doubled signals.
According to the micro-beam nonlinear vibration combined signal generating device based on multi-frequency excitation, when the frequency of a combined signal is close to the natural frequency of a vibration system, the micro-beam generates nonlinear combined resonance to generate a combined resonance signal, the combined resonance signal is composed of a fundamental wave signal and a combined signal, and a frequency doubling signal is generated after the combined resonance signal is filtered by a band-pass filter
Wherein m, c, k1And k3Respectively representing the equivalent mass, damping, linear and nonlinear stiffness of the system, which are related to the material and structural parameters of the beam, ρ, w, h and l are the density, width, height and length per unit length of the micro-beam, respectively, E is the modulus of elasticity of the micro-beam, I is the moment of inertia of the micro-beam,
is the signal phase, n is the signal amplification factor, C is the capacitor capacitance, Vac1And Vac2The voltages of the upper plate driving AC power supply and the lower plate driving AC power supply are Vdc；Ω1、Ω2And ω0The driving frequency of the upper polar plate driving alternating current power supply voltage, the driving frequency of the lower polar plate driving alternating current power supply voltage and the natural frequency of the micro-beam are respectively set;
m＝0.396ρwhl，
compared with the prior art, the invention has the following advantages:
1. the electrostatic driving method is a non-contact driving method, and the mechanical method generates an electric signal and has strong anti-interference capability.
Drawings
FIG. 1 is a micro-beam nonlinear vibration combination signal generation device based on multi-frequency excitation;
in the figure, 1, an upper polar plate driving direct current power supply 2, an upper polar plate driving alternating current power supply 3, an upper polar plate 4, a piezoresistive vibration signal collector 5, a micro-beam 6, a divider resistor 7, a signal collecting power supply 8, a signal power amplifier 9, a frequency multiplication signal 10, a band-pass filter 11, a lower polar plate 12, a lower polar plate driving alternating current power supply 13, a lower polar plate driving direct current power supply 14, a fixed end
Detailed Description
The following is made in further detail with reference to the accompanying drawings:
the main structure of the embodiment comprises a signal driving device and a signal acquisition device. The signal driving device is composed of an upper polar plate driving direct current power supply 1, an upper polar plate driving alternating current power supply 2, an upper polar plate 3, a micro beam 5, a lower polar plate 11, a lower polar plate driving alternating current power supply 12, a lower polar plate driving direct current power supply 13 and a fixed end 14. The micro beam 5 is fixedly connected with the left and right fixed ends 14 to form a fixed beam at two ends; an upper polar plate 3 is arranged right above the micro-beam 5, the left end of the upper polar plate 3 is connected with an upper polar plate driving direct current power supply 1 and an upper polar plate driving alternating current power supply 2 in series, the upper polar plate driving direct current power supply 1 is grounded, and the micro-beam 5 and the upper polar plate 3 form a capacitor; the upper pole plate drives the direct current power supply 1 to charge direct current voltage to the capacitor, the upper pole plate drives the alternating current power supply 2 to charge and discharge the capacitor, and the micro-beam 5 is driven to vibrate. A lower polar plate 11 is arranged under the micro-beam 5, the left end of the lower polar plate 11 is connected with a lower polar plate driving direct current power supply 13 and a lower polar plate driving alternating current power supply 12 in series, the lower polar plate driving direct current power supply 13 is grounded, and the micro-beam 5 and the lower polar plate 11 form a capacitor; the lower pole plate drives the direct current power supply 13 to charge direct current voltage to the capacitor, and the lower pole plate drives the alternating current power supply 12 to charge and discharge the capacitor, so that the micro-beam 5 is driven to vibrate.
The two parts of the signal acquisition device are composed of a piezoresistive vibration signal acquisition device 4, a divider resistor 6, a signal acquisition power supply 7, a signal power amplifier 8 and a band-pass filter 10. The piezoresistive vibration signal collector 4 is bonded with the micro-beam 5, and when the piezoresistive vibration signal collector 4 vibrates along with the micro-beam 5, the resistance of the piezoresistive vibration signal collector changes periodically; the divider resistor 6 is connected with the piezoresistive vibration signal collector 4 in series to form a bridge circuit, a signal collection power supply 7 provides direct current supply voltage, and vibration voltage signals are amplified by a signal power amplifier 8 and then filtered by a band-pass filter 10 to form frequency doubling signals.
According to the micro-beam nonlinear vibration combined signal generating device based on multi-frequency excitation, when the frequency of a combined signal is close to the natural frequency of a vibration system, the micro-beam 5 generates nonlinear combined resonance to generate a combined resonance signal, the combined resonance signal is composed of a fundamental wave signal and a combined signal, and a frequency doubling signal is generated after filtering through the band-pass filter 10
Wherein m, c, k1And k3Respectively representing the equivalent mass, damping, linear and nonlinear stiffness of the system, which are related to the material and structural parameters of the beam, ρ, w, h and l being the density, width, height and length, respectively, of the micro-beam 5, E being the modulus of elasticity of the micro-beam 5, I being the moment of inertia of the micro-beam 5,
is the signal phase, n is the signal amplification factor, C is the capacitance of the micro-beam 5 capacitor, Vac1And Vac2The voltages of an upper polar plate driving alternating current power supply 2 and a lower polar plate driving alternating current power supply 12 are respectively V, and the voltages of an upper polar plate driving direct current power supply 1 and a lower polar plate driving direct current power supply 13 are respectively Vdc；Ω1、Ω2And ω0The voltage driving frequency of the upper polar plate driving alternating current power supply 2, the voltage driving frequency of the lower polar plate driving alternating current power supply 12 and the natural frequency of the micro-beam 5 are respectively;
m＝0.396ρwhl
calculation example: the length, width and height of the micro-beam 5 were 400 microns, 45 microns and 2 microns, respectively, and the vacuum absolute dielectric constant was 8.85 x 10-12F/m, density 2330kg/m3Young's modulus of 1.65 x 1011N/m2Damping coefficient of 8.96 x 10-8kg/s, the natural frequency of the micro-beam 5 is 85898 Hz. Excitation frequencies of alternating current voltages of an upper polar plate driving alternating current power supply 2 and a lower polar plate driving alternating current power supply 12 are 25000Hz and 35898Hz respectively, amplitude values of direct current voltages of an upper polar plate driving direct current power supply 1 and a lower polar plate driving direct current power supply 13 are 0.5V respectively, alternating current voltages of the upper polar plate driving alternating current power supply 2 and the lower polar plate driving alternating current power supply 12 are 0.15V respectively, a signal amplification ratio of a signal power amplifier 8 is 20, upper and lower cut-off frequencies of a band-pass filter 10 are 80KHz and 90KHz respectively, and the signal amplitude value is obtained through calculation and is 1.0245 x 10-2V, phase 0.16.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (2)
1. The micro-beam nonlinear vibration combination signal generation device based on multi-frequency excitation is characterized by comprising a signal driving device and a signal acquisition device; the signal driving device consists of an upper polar plate driving direct current power supply (1), an upper polar plate driving alternating current power supply (2), an upper polar plate (3), a micro beam (5), a lower polar plate (11), a lower polar plate driving alternating current power supply (12), a lower polar plate driving direct current power supply (13) and a fixed end (14); the micro beam (5) is fixedly connected with the left and right fixed ends (14) to form a fixed beam at two ends; an upper polar plate (3) is arranged right above the micro beam (5), the left end of the upper polar plate (3) is connected with an upper polar plate driving direct current power supply (1) and an upper polar plate driving alternating current power supply (2) in series, the upper polar plate driving direct current power supply (1) is grounded, and the micro beam (5) and the upper polar plate (3) form a capacitor; the upper polar plate drives the direct current power supply (1) to charge direct current voltage to the capacitor, the upper polar plate drives the alternating current power supply (2) to charge and discharge the capacitor, and the micro-beam (5) is driven to vibrate; a lower polar plate (11) is arranged right below the micro-beam (5), the left end of the lower polar plate (11) is connected with a lower polar plate driving direct current power supply (13) and a lower polar plate driving alternating current power supply (12) in series, the lower polar plate driving direct current power supply (13) is grounded, and the micro-beam (5) and the lower polar plate (11) form a capacitor; the lower pole plate drives a direct current power supply (13) to charge direct current voltage to the capacitor, the lower pole plate drives an alternating current power supply (12) to charge and discharge the capacitor, and the micro-beam (5) is driven to vibrate; the signal acquisition device consists of a piezoresistive vibration signal acquisition device (4), a divider resistor (6), a signal acquisition power supply (7), a signal power amplifier (8) and a band-pass filter (10); the piezoresistive vibration signal collector (4) is bonded with the micro beam (5), and the resistance of the piezoresistive vibration signal collector (4) changes periodically when the piezoresistive vibration signal collector (4) vibrates along with the micro beam (5); the voltage dividing resistor (6) is connected with the piezoresistive vibration signal collector (4) in series to form a bridge circuit, a signal collection power supply (7) provides direct current supply voltage, and vibration voltage signals are amplified by a signal power amplifier (8) and then filtered by a band-pass filter (10) to form frequency doubling signals.
2. The apparatus of claim 1, wherein the micro-beam nonlinear vibration combination signal generating apparatus generates a nonlinear combination resonance signal when the frequency of the combination signal is close to the natural frequency of the vibration system, the micro-beam (5) generates a nonlinear combination resonance signal, the combination resonance signal is composed of a fundamental wave signal and a combination signal, and the frequency multiplication signal is generated after the frequency combination signal is filtered by the band-pass filter (10)
Wherein m, c, k1And k3Respectively representing the equivalent mass, damping, linear and nonlinear stiffness of the system, which are related to the material and structural parameters of the beam, ρ, w, h and l are the density, width, height and length, respectively, of the micro-beam (5), E is the modulus of elasticity of the micro-beam (5), I is the moment of inertia of the micro-beam (5),
is signal phase, n is signal amplification factor, C is capacitance value of the micro-beam (5) capacitor, Vac1And Vac2The voltages of an upper polar plate driving alternating current power supply (2) and a lower polar plate driving alternating current power supply (12) are respectively V, and the voltages of an upper polar plate driving direct current power supply (1) and a lower polar plate driving direct current power supply (13) are respectively Vdc；Ω1、Ω2And ω0The voltage driving frequency of an upper polar plate driving alternating current power supply (2), the voltage driving frequency of a lower polar plate driving alternating current power supply (12) and the inherent frequency of the micro-beam (5) are respectively;
m＝0.396ρwhl，
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| CN108534887A (en) * | 2018-04-13 | 2018-09-14 | 山东理工大学 | A kind of vibration measurement device based on graphene film displacement sensing |
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2019
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Patent Citations (8)
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| JP2004105816A (en) * | 2002-09-17 | 2004-04-08 | Tokyo Parts Ind Co Ltd | Electromagnetic acoustics conversion-vibration generator and mobile communicating device equipped therewith |
| JP2011173074A (en) * | 2010-02-25 | 2011-09-08 | Sanyo Electric Co Ltd | Vibration motor |
| CN103607138A (en) * | 2013-11-01 | 2014-02-26 | 南京航空航天大学 | Self-powered type nonlinear piezoelectric vibration energy extraction circuit |
| CN105207643A (en) * | 2015-09-16 | 2015-12-30 | 山东理工大学 | Electrostatic control device for resonator nanometer beam |
| CN106851514A (en) * | 2017-02-25 | 2017-06-13 | 中山市天键电声有限公司 | Nonlinear loudspeaker parameter test device system and method for testing |
| CN107147304A (en) * | 2017-04-27 | 2017-09-08 | 山东理工大学 | A kind of signal frequency amplifying device of superharmonic resonances |
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