CN111474683A - High numerical aperture long wave infrared microscope head - Google Patents
High numerical aperture long wave infrared microscope head Download PDFInfo
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- CN111474683A CN111474683A CN202010474830.3A CN202010474830A CN111474683A CN 111474683 A CN111474683 A CN 111474683A CN 202010474830 A CN202010474830 A CN 202010474830A CN 111474683 A CN111474683 A CN 111474683A
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- 230000005499 meniscus Effects 0.000 claims abstract description 24
- 230000003287 optical effect Effects 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims description 7
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims description 3
- 229910052732 germanium Inorganic materials 0.000 claims description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 abstract description 10
- 238000003331 infrared imaging Methods 0.000 abstract description 3
- 230000004075 alteration Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 206010010071 Coma Diseases 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0015—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design
- G02B13/002—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design having at least one aspherical surface
- G02B13/0045—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design having at least one aspherical surface having five or more lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/14—Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/18—Optical objectives specially designed for the purposes specified below with lenses having one or more non-spherical faces, e.g. for reducing geometrical aberration
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Lenses (AREA)
Abstract
The invention relates to a long-wave infrared microscope lens with high numerical aperture, which is characterized in that a first lens, a second lens, a third lens, a fourth lens, a fifth lens and a sixth lens are sequentially arranged between an object plane O and an image plane I along the same optical axis; wherein the first, second and third lenses are combined into a first group of lenses and the fourth, fifth and sixth lenses are combined into a second group of lenses; the first lens is a positive meniscus lens, the second lens is a negative meniscus lens, and the third lens is a positive meniscus lens; the fourth lens is a positive meniscus lens, the fifth lens is a negative meniscus lens, and the sixth lens is a positive meniscus lens; the object side surface of the first group of three lenses is a concave surface, and the other side surface of the first group of three lenses is a convex surface; the object side surface of the second group of three lenses is a convex surface, and the other side surface of the second group of three lenses is a concave surface. The invention can realize near-distance infrared imaging of a target, the numerical aperture can reach 0.65, and the problems that the conventional long-wave infrared lens is difficult to realize near-distance high-definition imaging and the resolution is seriously limited by the numerical aperture are solved.
Description
Technical Field
The invention belongs to the technical field of lenses, and relates to a microscope lens working in a long-wave infrared band and having a high numerical aperture.
Background
The thermal infrared imager can convert thermal radiation energy emitted by an object into an electronic signal, and then temperature distribution information of the object is obtained. When current passes through the electronic component, part of the electric energy is converted into internal energy, and a strong or weak heating phenomenon is generated. In many cases, the efficiency of the circuit can be evaluated or a fault can be diagnosed by the heating condition of the electronic element, and the thermal infrared microscope becomes an essential tool. Since the price of the long-wave infrared detector is usually far lower than that of the medium-wave infrared detector, the long-wave infrared microscope has higher price advantage and is favored.
With the continuous improvement of the device technology and the process level of semiconductor devices, printed circuit boards and the like, the size and the density of devices on the circuit boards are smaller and smaller, and the connection points between the devices are also smaller and smaller, which brings great challenges to a thermal imager imaging system. The common long-wave infrared imaging lens cannot perform high-performance imaging in a short distance due to the limitation of working distance and magnification, and cannot distinguish the temperature distribution details of a common circuit board element; and because the numerical aperture of the commonly used long-wave infrared lens is usually between 0.3 and 0.5, the calculation formula of the airy spot diameter is as follows:
DAiry＝1.22λ/NA
wherein DAiryFor a long-wave infrared operating wavelength of 10 μm, NA is 0.5, the airy spot diameter is 24.4 μm, while the current mainstream infrared detector pixel size is 17 μm × 17 μm.
The invention content is as follows:
the invention aims to solve the technical problem of providing a long-wave infrared microscope lens with a high numerical aperture, which can overcome the problems of low imaging magnification and small numerical aperture of the conventional long-wave infrared lens and is beneficial to acquiring thermal infrared images of micro details of objects such as a circuit board and the like.
In order to solve the technical problem, the high numerical aperture long-wave infrared microscope lens is provided with a first lens, a second lens, a third lens, a fourth lens, a fifth lens and a sixth lens which are sequentially arranged between an object plane and an image plane along the same optical axis; the first lens, the second lens and the third lens are combined into a first group of lenses, and the fourth lens, the fifth lens and the sixth lens are combined into a second group of lenses; the first lens is a positive meniscus lens, the second lens is a negative meniscus lens, and the third lens is a positive meniscus lens; the fourth lens is a positive meniscus lens, the fifth lens is a negative meniscus lens, and the sixth lens is a positive meniscus lens; the object side surface of the first group of three lenses is a concave surface, and the other side surface of the first group of three lenses is a convex surface; the object side surface of the second group of three lenses is a convex surface, and the other side surface of the second group of three lenses is a concave surface.
The combined focal length range of the first group of lenses and the second group of lenses is 25-35 mm, and the two groups of lenses have the same focal length and can realize the magnification of 1: 1.
The first lens, the third lens, the fourth lens and the sixth lens are all made of single crystal germanium materials; the second lens and the fifth lens are made of zinc selenide materials. By the material combination, the first group of lenses and the second group of lenses can respectively correct axial chromatic aberration, and the two groups of lenses are combined to correct vertical-axis chromatic aberration.
The surface of each lens adopts a spherical surface or an aspherical surface.
Further, the radii of curvature of the optical surfaces of the six lenses, the thickness of the lenses and the spacing between adjacent lenses are shown in the following table, wherein RiDenotes the radius of curvature of the ith optical surface, i ═ 1,2, …, 12; t is tjDenotes the thickness of the j-th lens, j ═ 1,2, …, 6; dnDenotes an air space from the back surface of the nth lens to the front surface of the next lens, where n is 1,2, …, 5, and D6 denotes a distance from the back surface of the sixth lens 6 to the image plane of the detector:
TABLE 1
When the invention works, the lens images the object to be measured at a ratio of 1:1, and when the invention is used with a detector with the pixel size of 17 mu m × 17 mu m, the spatial resolution can reach 17 mu m.
Advantageous effects
The invention adopts two groups of lens groups which are combined and have the same focal length and a structure of plus-minus + focal power, each lens in the front group of lens group is bent to an object plane, and each lens in the rear group of lens group is bent to an image plane, so that the structure is favorable for correcting spherical aberration, coma and astigmatism under large aperture, the structure can realize near-distance infrared imaging of a target aiming at a long-wave infrared detector with the pixel size of 17 mu m × 17 mu m, the numerical aperture can reach as high as 0.65, and the problems that the conventional long-wave infrared lens is difficult to realize near-distance high-definition imaging and the resolution is seriously limited by the numerical aperture are solved.
Drawings
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a graph of the modulation transfer function of the present invention.
Fig. 3 is an image spot diagram of the present invention.
In the figure, an object plane, 1, a first lens, 2, a second lens, 3, a third lens, 4, a fourth lens, 5, a fifth lens, 6, a sixth lens, and an I image plane.
Detailed Description
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
As shown in fig. 1, in the medium-wave infrared microscope lens of the present invention, a first lens 1, a second lens 2, a third lens 3, a fourth lens 4, a fifth lens 5, and a sixth lens 6 are sequentially disposed between an object plane O and an image plane I along a same optical axis; wherein the first lens 1, the second lens 2 and the third lens 3 are combined into a first group of lenses, and the fourth lens 4, the fifth lens 5 and the sixth lens 6 are combined into a second group of lenses. Wherein: the first lens is a meniscus positive lens, the object side surface is a concave surface, and the other side surface is a convex surface; the second lens is a negative meniscus lens, the object side surface is a concave surface, and the other side surface is a convex surface; the third lens is a meniscus positive lens, the object side surface is a concave surface, and the other side surface is a convex surface; the fourth lens is a meniscus positive lens, the object side surface is a convex surface, and the other side surface is a concave surface; the fifth lens is a meniscus negative lens, the object side surface is a convex surface, and the other side surface is a concave surface; the sixth lens element is a meniscus positive lens element, the object side surface of which is convex and the other side surface of which is concave.
The combined focal length range of the first group of lenses and the second group of lenses is 25 mm-35 mm, and the focal lengths of the two groups of lenses are the same.
The first lens 1, the third lens 3, the fourth lens 4 and the sixth lens 6 are made of single crystal germanium materials; the second lens 2 and the fifth lens 5 are made of zinc selenide materials.
The system of the invention is designed with a selected wave band of 8-12 μm, a suitable detector with a photosensitive surface size of 10.88mm × 8.704mm, a magnification of 1, and specific parameters of each lens as shown in Table 1, wherein R isiDenotes the radius of curvature of the ith optical surface, i ═ 1,2, …, 12; t is tjDenotes the thickness of the j-th lens, j ═ 1,2, …, 6; dnDenotes an air space from the back surface of the nth lens to the front surface of the next lens, where n is 1,2, …, 5, and D6 denotes a distance from the back surface of the sixth lens 6 to the image plane of the detector:
TABLE 1
Each lens surface may be spherical or aspherical. The aspheric surface is high in cost, but better imaging effect can be obtained.
The modulation transfer function curves of the present invention at central field of view, 1.4mm, 2mm, 3mm, 4.8mm, 5.5mm, 6.8mm and 6.98mm target heights are shown in FIG. 2. The modulation transfer function value of each field of view in the graph is higher than 0.6 at 30lp/mm, and almost reaches the diffraction limit, which shows that the lens has better imaging quality in the full field of view in the working waveband.
An imaging dot pattern of the present invention is shown in fig. 3. The circles in the figure indicate the airy disk size at each angle of view. As can be seen from the figure, the root-mean-square diameter of the geometric imaging light spot of the lens under each field of view is smaller than the size of the Airy spot, and the imaging quality reaches the diffraction limit.
Claims (5)
1. A high numerical aperture long-wave infrared microscope lens is characterized in that a first lens (1), a second lens (2), a third lens (3), a fourth lens (4), a fifth lens (5) and a sixth lens (6) are sequentially arranged between an object plane (O) and an image plane (I) along the same optical axis; the first lens (1), the second lens (2) and the third lens (3) are combined into a first group of lenses, and the fourth lens (4), the fifth lens (5) and the sixth lens (6) are combined into a second group of lenses; the first lens is a positive meniscus lens, the second lens is a negative meniscus lens, and the third lens is a positive meniscus lens; the fourth lens is a positive meniscus lens, the fifth lens is a negative meniscus lens, and the sixth lens is a positive meniscus lens; the object side surface of the first group of three lenses is a concave surface, and the other side surface of the first group of three lenses is a convex surface; the object side surface of the second group of three lenses is a convex surface, and the other side surface of the second group of three lenses is a concave surface.
2. The high na longwave infrared microscope as claimed in claim 1, wherein the combined focal length of the first and second lens groups is in the range of 25mm to 35mm, and the focal lengths of the two lens groups are the same.
3. The long-wave infrared microscope lens with high numerical aperture according to claim 1, characterized in that the first lens (1), the third lens (3), the fourth lens (4) and the sixth lens (6) are made of single-crystal germanium material; the second lens (2) and the fifth lens (5) are made of zinc selenide materials.
4. The high numerical aperture long wave infrared microscope lens of claim 1, wherein each lens surface is spherical or aspherical.
5. The high numerical aperture longwave infrared microscope lens of claim 2, wherein the radii of curvature of the optical surfaces of the six lenses, the thickness of the lenses and the spacing between adjacent lenses are as follows, where R isiDenotes the radius of curvature of the ith optical surface, i ═ 1,2, …, 12; t is tjDenotes the thickness of the j-th lens, j ═ 1,2, …, 6; dnDenotes an air space from the back surface of the nth lens to the front surface of the next lens, where n is 1,2, …, 5, and D6 denotes a distance from the back surface of the sixth lens 6 to the image plane of the detector:
TABLE 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010474830.3A CN111474683B (en) | 2020-05-29 | 2020-05-29 | High numerical aperture long wave infrared microscope head |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010474830.3A CN111474683B (en) | 2020-05-29 | 2020-05-29 | High numerical aperture long wave infrared microscope head |
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| CN111474683A true CN111474683A (en) | 2020-07-31 |
| CN111474683B CN111474683B (en) | 2022-05-17 |
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| CN202010474830.3A Active CN111474683B (en) | 2020-05-29 | 2020-05-29 | High numerical aperture long wave infrared microscope head |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113589498A (en) * | 2021-08-04 | 2021-11-02 | 苏州东方克洛托光电技术有限公司 | Long-wave infrared athermalization optical system |
| CN114167593A (en) * | 2021-12-07 | 2022-03-11 | 苏州东方克洛托光电技术有限公司 | Two-gear zooming long-wave infrared microscope lens |
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| US20170153418A1 (en) * | 2015-12-01 | 2017-06-01 | Calin Technology Co., Ltd. | Wide angle lens |
| CN208847940U (en) * | 2018-10-17 | 2019-05-10 | 深圳市特莱斯光学有限公司 | Wide angle optical tight shot and vehicle-mounted pick-up mould group |
| CN110501803A (en) * | 2019-08-14 | 2019-11-26 | 瑞声声学科技(深圳)有限公司 | Pick-up lens |
| CN110554486A (en) * | 2019-10-21 | 2019-12-10 | 浙江舜宇光学有限公司 | optical imaging lens |
-
2020
- 2020-05-29 CN CN202010474830.3A patent/CN111474683B/en active Active
Patent Citations (4)
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|---|---|---|---|---|
| US20170153418A1 (en) * | 2015-12-01 | 2017-06-01 | Calin Technology Co., Ltd. | Wide angle lens |
| CN208847940U (en) * | 2018-10-17 | 2019-05-10 | 深圳市特莱斯光学有限公司 | Wide angle optical tight shot and vehicle-mounted pick-up mould group |
| CN110501803A (en) * | 2019-08-14 | 2019-11-26 | 瑞声声学科技(深圳)有限公司 | Pick-up lens |
| CN110554486A (en) * | 2019-10-21 | 2019-12-10 | 浙江舜宇光学有限公司 | optical imaging lens |
Non-Patent Citations (1)
| Title |
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| 《红外与激光工程》编辑部翻译: "《光学系统设计》", 31 March 2004 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113589498A (en) * | 2021-08-04 | 2021-11-02 | 苏州东方克洛托光电技术有限公司 | Long-wave infrared athermalization optical system |
| CN113589498B (en) * | 2021-08-04 | 2022-11-18 | 苏州东方克洛托光电技术有限公司 | Long-wave infrared athermalization optical system |
| CN114167593A (en) * | 2021-12-07 | 2022-03-11 | 苏州东方克洛托光电技术有限公司 | Two-gear zooming long-wave infrared microscope lens |
| CN114167593B (en) * | 2021-12-07 | 2024-04-09 | 苏州东方克洛托光电技术有限公司 | Two-gear zoom long-wave infrared microscope lens |
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| CN111474683B (en) | 2022-05-17 |
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