CN116840161A - Plug-in integrated spectrum polarization real-time imaging system - Google Patents
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
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- G—PHYSICS
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- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
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Abstract
The invention provides a plug-in integrated spectrum polarization real-time imaging system, which relates to the technical field of photoelectric devices. After the incident light beam is compressed by the preposed telescope lens and spherical aberration and field curvature in a designed wave band are eliminated, the multichannel spectral polarization filter chip at the aperture carries out spectral polarization filtering on the incident light beam in a subchannel mode, and the lens array converges light beams with different spectral polarization characteristics to a corresponding area of the image sensor. The multi-channel spectrum polarization filter chip and the lens array are assembled into a pluggable spectrum polarization filter module, and the modules with different filter functions can be plugged according to the requirement of target detection. The filter chip realizes the multichannel spectrum polarization filter function by preparing a sub-wavelength metal wire grid and a multi-layer film system structure in a regional mode. The system has the advantages of high information detection dimension, dynamic real-time imaging and exchangeable spectral polarization filtering modules.
Description
Technical Field
The invention relates to the technical field of photoelectric functional devices and system integration, in particular to a plug-in integrated spectrum polarization real-time imaging system.
Background
The intensity imaging system has the advantages of good concealment, strong anti-interference capability and the like, and is widely applied to the field of military target detection. However, when the brightness of the reflection or radiation spectrum of the target and the background tends to be consistent, the contrast of the target of the intensity image and the background is extremely weak, and it is difficult to meet the detection requirement of the military target in all weather and all days. Spectrum and polarization are the dimensions of the optical information other than intensity: the spectrum information covers the physical structure and chemical components inside the substance, and the polarization information comprises the surface profile characteristics and physicochemical properties of the target. Therefore, the spectrum and the polarization can greatly enrich the dimension of scene information, and further improve the target detection capability of the imaging system. However, existing novel imaging systems generally collect only spectral or polarization single-light dimension information, and fail to fully utilize electromagnetic radiation multi-dimensional characteristic information, resulting in false detection and omission of scene targets.
Patent document CN109029726B issued in 2021 discloses a window integrated spectrum/polarization imaging system, which is characterized in that a multichannel micro-nano filter chip with specific filter performance and polarization characteristics is designed, and is adhered to a detector protection window by adopting specific curing glue, so that target spectrum and polarization dimension information is obtained in real time, and the window integrated spectrum/polarization imaging system has the advantages of high integration level, short research and development period and lower cost. However, the window integration mode of dispensing fixation cannot quickly replace micro-nano filter chips with different spectrum/polarization characteristics according to the actual detection requirement, and larger parallax exists between different channels. Therefore, there is a need to develop a spectral polarization real-time imaging system that is widely adaptable, microminiaturized, highly integrated, easily adjustable, and low cost.
Disclosure of Invention
The invention solves the problems of lower information detection dimension of an imaging system, difficult dynamic real-time imaging, solidification of a spectrum polarization filtering channel and the like.
In order to solve the problems, the invention provides a plug-in integrated spectrum polarization real-time imaging system, which comprises a front telescope lens, a plug-in spectrum polarization filtering module and an image sensor which are sequentially arranged on an incident light path;
the pluggable spectral polarization filtering module comprises a pressing plate, a multichannel spectral polarization filtering chip, a cover plate, a lens array, a bottom plate and a clamping sleeve; the cover plate is provided with a limiting groove for axially fixing the multichannel spectrum polarization filter chip, the cover plate and the bottom plate are provided with a first through hole array and a second through hole array which are used for accommodating the lens array in a penetrating mode, the bottom plate is attached to one end face of the cover plate, the pressing plate is attached to the other end face of the cover plate, and the pressing plate, the cover plate and the bottom plate are connected through bolts and are arranged in the mounting groove of the cutting sleeve;
the front-end telescope lens is connected with the image sensor, and the pluggable spectral polarization filtering module is inserted into the aperture position of the front-end telescope lens and is fastened with the front-end telescope lens through a screw; the incident light is compressed by the front telescope lens and is incident to the pluggable spectral polarization filtering module, and the light beams with different spectral polarization characteristics are formed by the sub-channel filtering of the pluggable spectral polarization filtering module and are converged on the image sensor.
In the system, an incident light field firstly enters a prepositive telescope lens to be compressed and converged; obtaining scene images with different spectral polarization characteristics through a spectral polarization filter chip at the aperture; converging light beams with different spectral polarization characteristics onto an image sensor by utilizing a spectral polarization filter chip and a lens array; the spectrum polarization filter chip and the lens array are combined into a pluggable spectrum polarization filter module, and the pluggable spectrum polarization filter module is integrated into the optical imaging system in a plug-in manner.
Further, the front telescope lens comprises a converging lens, a diverging lens and an aperture stop, and incident light sequentially passes through the converging lens, the diverging lens and the aperture stop.
Further, the multi-channel spectrum polarization filter chip is a halfConductor-based optical functional chip having m×n number of filter channels with different spectral polarization characteristics, and side length or diameter ρ of each square or circular filter channel ij May not be uniform.
Further, the lens array is composed of m×n lenses, each lens corresponds to one spectrum or polarization filter channel, and light beams with corresponding spectrum or polarization characteristics are converged, and the arrangement mode of the lens array is consistent with that of the multichannel spectrum polarization filter chip.
In the system, the multi-channel spectral polarization filter chip is provided with x polarization filter channels and y spectral filter channels, so that the condition that the polarization filter directions of the x polarization filter channels are arbitrary within a range of 0-180 degrees and the spectral filter wavelengths of the y spectral filter channels are arbitrary within an imaging wave band range is satisfied.
Further, the converging lens and the diverging lens are made of resin or fused quartz material in the visible light band, semiconductor material, chalcogenide glass and the like in the infrared band, and an anti-reflection film layer is evaporated on both sides.
Further, the polarization filtering channel of the multichannel spectrum polarization filtering chip is of a sub-wavelength metal wire grid structure, and the spectrum filtering channel is of a multilayer film system structure.
Further, the polarization filtering channels and the spectrum filtering channels of the multi-channel spectrum polarization filtering chip are arranged in a space symmetry mode.
In the system, the polarization filter channel of the multichannel spectrum polarization filter chip is prepared by adopting a contact photoetching, stripping or etching technology, and the spectrum filter channel is prepared by adopting a plurality of overlay and electronic book evaporation technologies.
The technical scheme adopted by the invention has the following beneficial effects:
the invention can acquire the spectrum image and the polarization image of the scene in real time through the spectrum polarization real-time imaging system, effectively improves the contrast ratio of the target and the background in the complex scene, and enhances the target detection capability of the imaging system. The spectral filter film system and the polarized filter micro-nano structure are prepared on the substrate in a zoned manner through the semiconductor manufacturing process, so that the multichannel filtering function of the incident light beam is realized. The multi-channel spectral polarization filter chip and the lens array are combined into the pluggable spectral polarization filter module, so that the modules with different spectral polarization filter characteristics can be quickly plugged and replaced, and the target detection requirement of a specific imaging scene is met. The scene image is copied through the lens array at the aperture, and different spectral polarization components of the scene image are converged on the same detector to be imaged in real time, so that the problems that the information detection dimension of an imaging system is low, dynamic real-time imaging is difficult, a spectral polarization filtering channel is solidified and the like are solved.
Drawings
Fig. 1 is a schematic diagram of a plug-in integrated spectral polarization real-time imaging system according to an embodiment of the present invention;
FIG. 2 is an optical path diagram of an imaging system of a plug-in integrated spectral polarization real-time imaging system according to an embodiment of the present invention;
FIG. 3 is a graph of the layout of the channels and the polarization spectrum performance of the multi-channel spectral polarization filter chip of the plug-in integrated spectral polarization real-time imaging system according to the embodiment of the present invention;
FIG. 4 is a graph showing the modulation transfer function of the imaging channels corresponding to the center lens, the upper lens, the lower lens, the left lens, the right lens and the four corner lens of the plug-in integrated spectral polarization real-time imaging system according to the embodiment of the present invention;
FIG. 5 is a diagram of imaging point columns of imaging channels corresponding to a center lens, an upper lens, a lower lens, a left lens, a right lens and a four-corner lens of the plug-in integrated spectral polarization real-time imaging system provided by the embodiment of the invention;
FIG. 6 is a block diagram of a pluggable spectral polarization filter module of a pluggable integrated spectral polarization real-time imaging system provided by an embodiment of the present invention;
fig. 7 is a block diagram of a plug-in integrated spectral polarization real-time imaging system of the plug-in integrated spectral polarization real-time imaging system provided by an embodiment of the present invention;
reference numerals illustrate:
100-a front telescope lens; 101-a converging lens; 102-a divergent lens; 103-aperture stop; 200-an exchangeable spectral polarization filter module; 201-a pressing plate; 202-a multichannel spectral polarization filter chip; 203-cover plate; 2031-a limit groove; 2032-a first array of vias; 204-a lens array; 205-a bottom plate; 2051-a second array of vias; 206-cutting sleeve; 300-an image sensor;
a-TM polarization transmittance curve; b-extinction ratio curve; c-transmittance curve with a transmittance peak of 9 μm; a d-transmittance curve with a transmittance peak of 9.5 μm; e-transmittance curve with a peak at 10 μm; a transmittance curve having an f-transmittance peak of 10.5 μm; the g-transmittance peak is a transmittance curve of 11 μm.
Detailed Description
In order that the above objects, features and advantages of the invention will be readily understood, a more particular description of the invention will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings.
The following are specific embodiments of the present invention and the technical solutions of the present invention will be further described with reference to the accompanying drawings, but the present invention is not limited to these embodiments.
The plug-in integrated spectrum polarization real-time imaging system provided by the embodiment mainly comprises the following design steps:
step 1: the design requirements of the system are as follows: the system works in a long-wave infrared band, the visual field range is larger than 80m multiplied by 80m, and the object with the 1m line scale which is 350m away can reach the recognition level observation level, namely the target occupies 6 pixels of the target surface of the detector. When the focal length of the imaging system is 35.7mm, the uncooled long-wave infrared detector with 17 mu m pixel size and 640 multiplied by 512 resolution can meet the design requirements.
The convergent aperture-dividing imaging system is designed according to the basic parameters of the lens camera and comprises a front telescope lens and lens arrays, and 3X 3 scene images are copied to the target surface of the camera through the lens arrays with the number of 3X 3 at the aperture. The optical characteristics of the imaging system obtained by actual design are as follows: the focal length is 36.0mm, the working wave band is 8-12 mu m, the total length is 122mm, the entrance pupil diameter is 41.05mm, the working aperture coefficient of each channel is 2.82, and the field range is +/-2.50 degrees. The optical system structure parameters of this embodiment are shown in table 1:
table 1 the optical system structure parameter table of the present embodiment
Referring to fig. 1 and 2, the system includes a converging lens 101, a diverging lens 102, an aperture stop 103, a multi-channel spectral polarization filter chip 202, a lens array 204, and an image sensor 300, which are sequentially disposed on an incident light path; specifically, the converging lens 101 is responsible for compressing and converging the incident beam, the diverging lens 102 is responsible for eliminating spherical aberration and field curvature in the designed band range, and the aperture stop 103 is responsible for limiting the system aperture; the multichannel spectral polarization filter chip 202 performs spectral polarization filtering on the incident light beams in a multichannel way, the lens array 204 converges the light beams with different spectrums and polarization characteristics on the image sensor 300, and the lens array serves as a field stop limiting the field range of a system, so that images formed by the channels on the detector are ensured not to overlap and the target surface of the images is fully utilized.
Referring to fig. 3 and 4, the system has different spot radii and modulation transfer functions at different imaging channels, indicating different aberration characteristics for different imaging channels. Specifically, the central lens imaging channel is superior to the upper, lower, left and right lens imaging channels, which are superior to the four-corner imaging channels. Each imaging channel is close to the diffraction limit, the spot array spots are all in the Airy spot and smaller than the size of one pixel, and the imaging quality meets the requirement. The MTF of the central lens imaging channel is >0.2@20lp/mm, the MTF of the upper, lower, left and right lens imaging channels is >0.2@18lp/mm, and the MTF of the four-corner lens imaging channel is >0.2@10lp/mm. Because the detector adopted by the system is an uncooled focal plane detector and the energy loss of the infrared lens is high, the system is not suitable for correcting aberration by using excessive infrared lenses.
Step 2: according to the requirement of a certain scene characteristic, the embodiment adopts a 9-channel spectrum polarization filter chip in a 3×3 arrangement, wherein the 9-channel spectrum polarization filter chip comprises 0 °, 45 °, 90 °, 135 ° polarization channels and 9 μm, 9.5 μm, 10 μm, 10.5 μm and 11 μm spectrum channels, the size of each channel is 3.5mm×3.5mm, and the center distance between the channels is 4mm. The polarized light filtering structure is a periodic sub-wavelength metal wire grid, the wire width of the wire grid is 1.1 mu m, the period is 2.2 mu m, and the wire grid material is 800nm germanium plus 400nm aluminum. The spectral filter system parameters of this example are shown in table 2:
TABLE 2 spectral filter system parameter table
| Sequence number | Parameters of the film system | Transmission peak wavelength |
| c | Ge(90nm)-ZnS(60nm)-Ge(90nm) | 9μm |
| d | Ge(120nm)-ZnS(100nm)-Ge(120nm) | 9.5μm |
| e | Ge(140nm)-ZnS(275nm)-Ge(140nm) | 10μm |
| f | Ge(200nm)-ZnS(280nm)-Ge(200nm) | 10.5μm |
| g | Ge(240nm)-ZnS(320nm)-Ge(240nm) | 11μm |
Referring to FIG. 5, the multi-channel spectral polarization filter chip used in the present invention comprises periodic sub-wavelength metal wire grids with polarization filter directions of 0 °, 45 °, 90 ° and 135 °, and three layers of Ge-ZnS-Ge film systems with transmission peaks of 9 μm, 9.5 μm, 10 μm, 10.5 μm and 11 μm, respectively. Specifically, as shown in a multi-channel spectral polarization filter chip channel layout mode: the arrangement of the spectral or polarization channels in the same information dimension has symmetry to eliminate spatial symmetry errors due to non-idealities of the optical imaging system. As shown by the polarization spectrum performance curve: the TM polarization transmittance curve a of the polarization channel is kept in the range of 70% +/-10% between 8 and 12 mu m; the extinction ratio curves b are all kept above 50; the transmittance curve c of the spectrum channel reaches a peak value at 9 μm, the transmittance curve d reaches a peak value at 9.5 μm, the transmittance curve e reaches a peak value at 10 μm, the transmittance curve f reaches a peak value at 10.5 μm, the transmittance curve g reaches a peak value at 11 μm, the peak values are all close to 100%, and the half-peak bandwidths are all about 2 μm.
Step 3: the substrate of the spectrum polarization filter chip is 6 inches of high-resistance silicon with the thickness of 0.625mm, the sub-wavelength metal wire grid is prepared by utilizing the contact photoetching and stripping technology according to the content of the step 2, the Ge-ZnS-Ge spectrum filter film system is prepared by utilizing multiple overlay and electron beam evaporation processes, the spectrum polarization filter chip with the thickness of 12mm multiplied by 12mm is obtained by laser scribing, and the energy utilization efficiency of the chip is improved by evaporating a long-wave infrared antireflection film on the back surface.
Step 4: referring to fig. 6, a multi-channel micro-nano filter chip 202 and a lens array 204 are combined into a pluggable spectral polarizing filter module 200. The pluggable spectral polarization filter module comprises a pressing plate 201, a multi-channel spectral polarization filter chip 202, a cover plate 203, a lens array 204, a bottom plate 205 and a clamping sleeve 206; a limiting groove 2031 for axially and transversely fixing the multichannel spectral polarization filter chip 202 is formed in the cover plate 203, a first through hole array 2032 and a second through hole array 2051 for accommodating the lens array 204 are arranged on the cover plate 203 and the bottom plate 205 in a penetrating manner, and the pressure plate 201, the cover plate 203 and the bottom plate 205 are connected through bolts and are arranged in the mounting groove of the cutting sleeve 206; the pressing plate 201, the cover plate 203 and the bottom plate 205 are made of brass, and the surfaces of the pressing plate, the cover plate and the bottom plate are subjected to infrared blackening treatment; the ferrule 206 is made of aluminum alloy, and the surface is subjected to infrared blackening treatment.
Step 5: referring to fig. 7, a front-end telescope 100 is connected with an image sensor 300, and a pluggable spectral polarization filter module 200 is plugged into the front-end telescope 100 to form a pluggable integrated spectral polarization real-time imaging system according to the present invention; by inserting and replacing modules with different spectral polarization characteristics, customized imaging with different target detection requirements can be realized, and the plug-and-play characteristics are realized.
The system can acquire the spectral image and the polarized image of the scene in real time through the spectral polarization real-time imaging system, effectively improves the contrast ratio of the target and the background in the complex scene, and enhances the target detection capability of the imaging system. The spectral filter film system and the polarized filter micro-nano structure are prepared on the substrate in a zoned manner through the semiconductor manufacturing process, so that the multichannel filtering function of the incident light beam is realized. The multi-channel spectral polarization filter chip and the lens array are combined into the pluggable spectral polarization filter module, so that the modules with different spectral polarization filter characteristics can be quickly plugged and replaced, and the target detection requirement of a specific imaging scene is met. The scene image is copied through the lens array at the aperture, and different spectral polarization components of the scene image are converged on the same detector to be imaged in real time, so that the problems that the information detection dimension of an imaging system is low, dynamic real-time imaging is difficult, a spectral polarization filtering channel is solidified and the like are solved.
Although the present disclosure is described above, the scope of protection of the present disclosure is not limited thereto. Various changes and modifications may be made by one skilled in the art without departing from the spirit and scope of the disclosure, and these changes and modifications will fall within the scope of the invention.
Claims (7)
1. The plug-in integrated spectrum polarization real-time imaging system is characterized by comprising a front telescope lens (100), a plug-in spectrum polarization filtering module (200) and an image sensor (300) which are sequentially arranged on an incident light path;
the pluggable spectral polarization filter module (200) comprises a pressing plate (201), a multichannel spectral polarization filter chip (202), a cover plate (203), a lens array (204), a bottom plate (205) and a clamping sleeve (206); the cover plate (203) is provided with a limiting groove (2031) for axially fixing the multichannel spectral polarization filter chip (202), the cover plate (203) and the bottom plate (205) are provided with a first through hole array (2032) and a second through hole array (2051) which are used for accommodating the lens array (204) in a penetrating mode, the bottom plate (205) is attached to one end face of the cover plate (203), the pressing plate (201) is attached to the other end face of the cover plate (203), and the pressing plate (201), the cover plate (203) and the bottom plate (205) are connected through bolts and are arranged in a mounting groove (2061) of the cutting sleeve (206);
the front telescope lens (100) is connected with the image sensor (300), and the pluggable spectral polarization filter module (200) is inserted at the aperture position of the front telescope lens (100) and is fastened with the front telescope lens (100) through a screw; the incident light is compressed by the front telescope lens (100) and is incident to the interchangeable spectral polarization filter module (200), and the light beams with different spectral polarization characteristics formed by the split-channel filtering of the interchangeable spectral polarization filter module (200) are converged on the image sensor (300).
2. The plug-in integrated spectral polarization real-time imaging system according to claim 1, wherein the front telescope lens (100) comprises a converging lens (101), a diverging lens (102) and an aperture stop (103), and the converging lens (101), the diverging lens (102) and the aperture stop (103) are sequentially arranged along the incident light direction.
3. The plug-in integrated spectral polarization real-time imaging system according to claim 2, wherein the converging lens (101) and the diverging lens (102) are made of any one of a resin material and a fused silica material in a visible light band, and the converging lens (101) and the diverging lens (102) are made of any one of a semiconductor material and a chalcogenide glass material in an infrared band.
4. The plug-in integrated spectral polarization real-time imaging system according to claim 1, wherein the multi-channel spectral polarization filter chip (202) adopts a semiconductor-based optical function chip, and the multi-channel spectral polarization filter chip (202) is provided with m×n number of filter channels with different spectral polarization characteristics.
5. The plug-in integrated spectral polarization real-time imaging system according to claim 4, wherein the lens array (204) is composed of m x n number of lenses, and each of the lenses corresponds to a spectral or polarization filtering channel for converging a spectral or polarization characteristic beam.
6. The plug-in integrated spectral polarization real-time imaging system according to claim 4, wherein the polarization filter channels of the multi-channel spectral polarization filter chip (202) are sub-wavelength metal wire grids, and the spectral filter channels of the multi-channel spectral polarization filter chip (202) are multi-layer film systems.
7. The plug-in integrated spectral polarization real-time imaging system according to claim 4, wherein the polarization filter channels and the spectral filter channels of the multi-channel spectral polarization filter chip (202) are spatially symmetrically arranged.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117462073A (en) * | 2023-12-25 | 2024-01-30 | 西北工业大学宁波研究院 | Hand-held polarization imaging intraocular pressure detection device and method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117462073A (en) * | 2023-12-25 | 2024-01-30 | 西北工业大学宁波研究院 | Hand-held polarization imaging intraocular pressure detection device and method |
| CN117462073B (en) * | 2023-12-25 | 2024-04-19 | 西北工业大学宁波研究院 | Hand-held polarization imaging intraocular pressure detection device and method |
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