CN111473745A - Light-emitting surface microscopic three-dimensional measurement method based on multi-frequency phase shift scheme - Google Patents

Light-emitting surface microscopic three-dimensional measurement method based on multi-frequency phase shift scheme Download PDF

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CN111473745A
CN111473745A CN202010577091.0A CN202010577091A CN111473745A CN 111473745 A CN111473745 A CN 111473745A CN 202010577091 A CN202010577091 A CN 202010577091A CN 111473745 A CN111473745 A CN 111473745A
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phase
phase shift
light
emitting surface
frequency
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左超
张晓磊
沈德同
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Nanjing University Of Technology Intelligent Computing Imaging Research Institute Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2545Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with one projection direction and several detection directions, e.g. stereo

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Abstract

The invention discloses a micro three-dimensional measurement method for a luminous target based on a multi-frequency phase shift technology. The invention uses standard phase shift algorithm to calculate the phase value under the condition of no saturation; in the saturation region, calculating a wrapping phase by using a generalized phase shift algorithm; for oversaturated regions with an intensity of less than 3 for non-saturation, the final phase map is filled with the phases that might be extracted in the low frequency fringe image to improve the integrity of the measurement. And the high-precision three-dimensional reconstruction of the light-emitting surface is realized by the double-vision telecentric measurement system after phase expansion and stereo matching. The invention calculates the phase of the highlighted area from the subset of the phase shift stripe image which is not affected by light intensity saturation, provides a multi-frequency phase shift scheme to improve the integrity of the final phase diagram of the luminous surface, and realizes complete and high-precision three-dimensional reconstruction by combining a micro telecentric stereo vision system on the basis.

Description

Light-emitting surface microscopic three-dimensional measurement method based on multi-frequency phase shift scheme
Technical Field
The invention belongs to the technical field of optical measurement, and particularly relates to a light-emitting surface micro three-dimensional measurement method based on a multi-frequency phase shift scheme.
Background
The structured light and triangulation principles find wide application in the field of three-dimensional optical metrology. A periodic sinusoidal fringe pattern is projected onto the object to be inspected, and the modulation of the object to be inspected distorts the fringes. In order to quantitatively calculate the modulation amount and reconstruct the three-dimensional result of the target, it is necessary to accurately retrieve the phase values encoded in the fringe pattern. Currently, two commonly used phase recovery algorithms are fourier transform-based algorithms and phase shift-based algorithms. The dynamic measurement algorithm based on Fourier transform is a commonly used algorithm in dynamic measurement, and the dynamic measurement algorithm based on phase shift is more suitable for high-precision measurement due to the independent mathematical operation characteristic of pixels. Recent work has shown that with phase-based stereo matching methods, the intrinsic non-linear response function of digital projectors can be neglected, since the phase errors in the different views are automatically eliminated. However, the phase-based stereo matching method is prone to fail when dealing with objects with glossy surfaces. The integrity of the reconstructed model is affected by the highlight regions because the phase of these regions cannot be computed with dense fringe images.
The glossy surface has strong reflectivity, so the light intensity cannot be linearly changed due to the limited dynamic range of the digital camera. For this case, one of the most advanced techniques is called high dynamic range three-dimensional shape measurement, and can be divided into two categories: device-based techniques and algorithm-based techniques. For this set of device-based technologies, the optimal parameters of the device, such as the exposure time of the camera or the exposure time of the projector, are needed to help form visible stripes in light and dark areas. Other optically-based methods, such as scanning luminescent objects using polarizers, have also been investigated, based on which the polarized light intensity can be effectively suppressed. Furthermore, there are also hybrid methods by modifying the camera exposure, but strategies to introduce additional devices, change the viewing position, or adjust the projector parameters to capture high speed dynamic range images are also contemplated. Based on maximum intensity modulation, a fast high-speed dynamic range solution is proposed that employs a high-speed projector that projects a fringe image of light intensity variations at 700 Hz.
However, for glossy surfaces, the saturation problem may sometimes not be easily solved merely by reducing the exposure time or the intensity of the projection light. Therefore, researchers have also developed algorithm-based techniques that rely primarily on well-designed algorithms to extract phase values from the original fringe image without allowing the camera or projector exposure time to change freely or without additional equipment.
However, in microscopic imaging, due to the short depth of field of the microscopic projection system, the portion of the light emitting illuminated by the black stripe is no longer purely black, but rather is affected by the white stripe. In this case, there are more saturation regions when higher frequency fringes are used.
Disclosure of Invention
The invention provides a light-emitting surface microscopic three-dimensional measurement method based on a multi-frequency phase shift scheme.
The specific technical scheme of the invention is as follows:
a light-emitting surface microscopic three-dimensional measurement method based on a multi-frequency phase shift scheme comprises the following steps:
calculating a phase value by using a standard phase shift algorithm in an unsaturated area of a light-emitting surface, and calculating a wrapping phase by using a generalized phase shift algorithm in a saturated area of the light-emitting surface;
for the oversaturated area with the unsaturated intensity less than 3, filling a final phase diagram by using phases possibly extracted from the low-frequency fringe image so as to improve the integrity of measurement;
and step three, the high-precision three-dimensional reconstruction of the light-emitting surface is realized by the double-vision telecentric measurement system after phase expansion and stereo matching.
Preferably, in step one, based on the controllable phase shift amount, the recorded phase shift fringe pattern is represented by formula (1),
Figure 61306DEST_PATH_IMAGE001
(1),
wherein
Figure 447288DEST_PATH_IMAGE002
Is the pixel coordinates of the camera and,
Figure 820501DEST_PATH_IMAGE003
is the average intensity,
Figure 950131DEST_PATH_IMAGE004
Is the contrast of the fringes,
Figure 92399DEST_PATH_IMAGE005
is the phase distribution to be measured and,
Figure 649282DEST_PATH_IMAGE006
is a shifted reference phase, N =1, …, N;
wrapped phase
Figure 385157DEST_PATH_IMAGE007
Corresponding measured phase distribution
Figure 177533DEST_PATH_IMAGE005
Represented by the formula (2),
Figure 580832DEST_PATH_IMAGE008
(2),
wherein,
Figure 308617DEST_PATH_IMAGE009
(3),
coefficient of performance
Figure 656421DEST_PATH_IMAGE010
,i=1,2,3,j=1,2,3,
Figure 127854DEST_PATH_IMAGE011
Figure 244715DEST_PATH_IMAGE012
(4),
Due to the fact that
Figure 408980DEST_PATH_IMAGE006
Is strictly controlled, and can obtain two-dimensional wrapping phase distribution
Figure 119447DEST_PATH_IMAGE013
Preferably, if
Figure 253625DEST_PATH_IMAGE006
Quilt
Figure 365937DEST_PATH_IMAGE014
Integer within the range
Figure 435525DEST_PATH_IMAGE015
Equally dividing, the standard phase shift algorithm is simplified as in equation (5),
Figure 757922DEST_PATH_IMAGE016
(5)。
preferably, the second step is as follows:
step 2.1, considering the saturation degree of different fringe periods, and referring to the stored information in the phase expansion stage to calculate the saturation intensity of each pixel in the image;
step 2.2, calculating the phase of the partially saturated phase shift fringe image through general phase shift by applying a generalized phase shift algorithm corresponding to an equation;
and 2.3, automatically fusing to ensure the correctness of phase unwrapping through a multi-frequency high dynamic range.
Preferably, step three is as follows:
step 3.1. projecting the sine curve graph encoded with the horizontally increasing phase diagram from the digital projector in sequence, and obtaining the absolute phase values of the two cameras by using the proposed method based on the multi-frequency fringe
Figure 571157DEST_PATH_IMAGE017
Step 3.2, performing telecentric polarity correction on the stripe pattern, taking the left camera as a main camera on the premise of not losing generality, and regarding the left camera with a phase value
Figure 397030DEST_PATH_IMAGE018
Is formed by a plurality of pixels
Figure 903098DEST_PATH_IMAGE019
Task is the second in the right image
Figure 447212DEST_PATH_IMAGE020
Find the corresponding pixel in the line
Figure 64138DEST_PATH_IMAGE021
Step 3.3. obtaining integral pixels
Figure 885463DEST_PATH_IMAGE022
The pixel is at
Figure 687066DEST_PATH_IMAGE023
The phase value in the row being closest to
Figure 593842DEST_PATH_IMAGE024
In a phase of
Figure 748880DEST_PATH_IMAGE025
And then calculating sub-pixel coordinates based on inverse linear interpolation
Figure 814925DEST_PATH_IMAGE026
Figure 662795DEST_PATH_IMAGE027
(6);
And 3.4, after the left and right consistency check is completed in the stereo matching, obtaining matched pixel pairs, and realizing the three-dimensional reconstruction of the high-precision light-emitting surface.
Compared with the prior art, the invention has the following remarkable advantages: microscopic fringe projection profilometry is a powerful three-dimensional measurement technique with theoretical measurement accuracy better than one micron, however, defocusing of dense fringes and complex surface reflection characteristics often result in saturation of the intensity and degradation of the quality of the fringes, which makes complete three-dimensional reconstruction difficult. In order to solve the problem, the invention calculates the phase of the highlighted area from the subset of the phase shift fringe image which is not affected by light intensity saturation, provides a multi-frequency phase shift scheme to improve the integrity of the final phase diagram of the luminous surface, and realizes complete and high-precision three-dimensional reconstruction by combining a microscope telecentric stereo vision system on the basis.
Drawings
Fig. 1 is a schematic flow chart of a three-dimensional measurement method according to an embodiment of the present invention.
FIG. 2 is a comparison of fringe saturation for different frequencies according to an embodiment of the present invention; (a) and (b) an untreated fringe image; (c) and (d) amplifying details of the saturated portion; (e) and (f) an index showing a region where the unsaturated state is less than 3.
Fig. 3 is a flowchart of algorithm 1 in the embodiment of the present invention.
Fig. 4 is a flowchart of algorithm 2 in an embodiment of the present invention.
Fig. 5 is a flowchart of algorithm 3 in an embodiment of the present invention.
FIG. 6 is a comparison of an embodiment of the present invention when processing partially saturated targets with a conventional method.
FIG. 7 is a schematic diagram of an experiment performed on a nickel plated plate of a mechanical watch according to an embodiment of the present invention.
FIG. 8 is a graph of data from experiments conducted on a nickel plate of a mechanical watch in accordance with an embodiment of the present invention.
FIG. 9 is another data plot of experiments performed on a nickel plate of a mechanical watch according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
In the present embodiment, the method for measuring the microscopic three-dimensional size of the light-emitting surface based on the multi-frequency phase shift scheme includes the following steps.
Calculating a phase value by using a standard phase shift algorithm in an unsaturated area of the light-emitting surface, and calculating a wrapping phase by using a generalized phase shift algorithm in a saturated area of the light-emitting surface.
Based on the controllable phase shift amount, the recorded phase shift fringe pattern is represented by formula (1),
Figure 181501DEST_PATH_IMAGE001
(1),
wherein
Figure 140230DEST_PATH_IMAGE002
Is the pixel coordinates of the camera and,
Figure 670569DEST_PATH_IMAGE003
is the average intensity of the light emitted by the light source,
Figure 554254DEST_PATH_IMAGE004
is the contrast of the fringes,
Figure 435623DEST_PATH_IMAGE005
is the phase distribution to be measured and,
Figure 322676DEST_PATH_IMAGE006
is a shifted reference phase, N =1, …, N;
wrapped phase
Figure 973100DEST_PATH_IMAGE007
Corresponding measured phase distribution
Figure 897194DEST_PATH_IMAGE005
Represented by the formula (2),
Figure 390492DEST_PATH_IMAGE008
(2),
wherein,
Figure 691023DEST_PATH_IMAGE028
(3),
coefficient of performance
Figure 586167DEST_PATH_IMAGE010
,i=1,2,3,j=1,2,3,
Figure 681162DEST_PATH_IMAGE029
Figure 537123DEST_PATH_IMAGE012
(4)。
Due to the fact that
Figure 765979DEST_PATH_IMAGE006
Is strictly controlled, and can obtain two-dimensional wrapping phase distribution
Figure 125416DEST_PATH_IMAGE013
. If it is not
Figure 656891DEST_PATH_IMAGE006
Quilt
Figure 859202DEST_PATH_IMAGE014
Integer within the range
Figure 767116DEST_PATH_IMAGE015
Equally dividing, the standard phase shift algorithm is simplified as in equation (5),
Figure 371272DEST_PATH_IMAGE016
(5)。
and step two, for the oversaturated region with the unsaturated intensity less than 3, filling a final phase map by using phases possibly extracted from the low-frequency fringe image so as to improve the integrity of measurement.
In the conventional multi-frequency phase shift method, a reference phase diagram is provided for phase unwrapping by using a fringe image with a lower frequency, and the final measurement accuracy is determined by using a fringe image with a highest frequency. In fact, in the saturation region, the final phase value may be replaced by the phase value of the low-density fringe image with lower saturation intensity. In this way, the three-dimensional reconstruction can be made as complete as possible. Therefore, a high-speed dynamic range surface measurement scheme based on multi-frequency stripes is provided. The high-precision microscopic three-dimensional measurement of the light-emitting surface is realized through three steps of image data preprocessing, saturation detection and compensation algorithm, phase three-dimensional matching and the like.
The first step is an image data pre-processing stage, which includes image acquisition, image correction and classification according to streak frequency. The fringe pattern is projected in turn with the trigger signal to achieve camera synchronization. The second step is the main part, corresponding to the proposed scheme based on multi-frequency fringes, i.e. the unwrapped phase map is calculated by three algorithms, as shown in figures 3, 4 and 5, respectively.
Algorithm program algorithm 1 is used to calculate the saturation intensity of each pixel in the image, see 3, 4, 5. The stored information will be referenced during the phase unwrapping phase, taking into account the degree of saturation of the different fringe periods. Algorithm 2 is an algorithm that calculates the phase of the partially saturated phase shifted fringe image by general phase shifting. We eliminate the invalid intensity at each pixel and apply a generalized phase shift algorithm corresponding to the equation. The formula is used for phase calculation. Algorithm 3 is an automatic fusion method to ensure the correctness of phase unwrapping over a multi-frequency high dynamic range.
And step three, the high-precision three-dimensional reconstruction of the light-emitting surface is realized by the double-vision telecentric measurement system after phase expansion and stereo matching.
Sinusoidal plots encoded with horizontally increasing phase maps are projected sequentially from a digital projector. By using the proposed method based on multi-frequency fringes, the absolute phase values of two cameras can be obtained
Figure 73649DEST_PATH_IMAGE030
And the method is used for stereo matching. The fringe image is first telecentrically polarity corrected. And on the premise of no loss of generality, the left camera is taken as a main camera. For left camera with phase value
Figure 638623DEST_PATH_IMAGE031
Image ofVegetable extract
Figure 209281DEST_PATH_IMAGE032
Task is the second in the right image
Figure 543311DEST_PATH_IMAGE033
Find the corresponding pixel in the line
Figure 416589DEST_PATH_IMAGE034
. Since the fringe direction is vertical, the unwrapped phase values increase in the horizontal direction. First, integral pixels are obtained
Figure 593492DEST_PATH_IMAGE035
The pixel is at
Figure 577629DEST_PATH_IMAGE036
The phase value in the row being closest to
Figure 156377DEST_PATH_IMAGE037
In a phase of
Figure 200557DEST_PATH_IMAGE038
. Then, sub-pixel coordinates are calculated based on inverse linear interpolation
Figure 740123DEST_PATH_IMAGE039
Figure 652584DEST_PATH_IMAGE027
(6),
And after the left-right consistency check is completed in the stereo matching, a matched pixel pair is obtained, and the high-precision three-dimensional reconstruction of the light-emitting surface is realized.
Fig. 6, 7, 8 and 9 are experimental graphs of the present example. Specifically, fig. 6 is a comparison of the embodiment to a conventional method when dealing with partially saturated targets, wherein (a) shows an edge image of a logo applied to a metal wristband; (e) representing an edge image of the printed circuit board. FIG. 7 is a graph showing the experiment of applying the method of the present embodiment to mechanically surface a nickel-plated plateWhere, graph (a) is a sample picture, graph (b) is a fringe image of the bottom surface of the sample, graph (c) is a fringe image of the top of the sample, graph (D) is a reconstructed 3D model of the bottom, and graph (e) is a reconstructed 3D model of the top. FIG. 8 and FIG. 9 are data graphs showing the mechanical chart of the nickel-plated sheet according to the method of the present embodiment, wherein (A), (B), (C), (D), (E), (
Figure 961205DEST_PATH_IMAGE040
)-(
Figure 35341DEST_PATH_IMAGE041
) A cross-sectional view of data represented by the line marked in (d), (b)
Figure 796623DEST_PATH_IMAGE042
)-(
Figure 388142DEST_PATH_IMAGE043
) The cross-sectional view of the data is indicated by the line marked in (e).
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (5)

1. A light-emitting surface microscopic three-dimensional measurement method based on a multi-frequency phase shift scheme is characterized by comprising the following steps:
calculating a phase value by using a standard phase shift algorithm in an unsaturated area of a light-emitting surface, and calculating a wrapping phase by using a generalized phase shift algorithm in a saturated area of the light-emitting surface;
for the oversaturated area with the unsaturated intensity less than 3, filling a final phase diagram by using phases possibly extracted from the low-frequency fringe image so as to improve the integrity of measurement;
and step three, the high-precision three-dimensional reconstruction of the light-emitting surface is realized by the double-vision telecentric measurement system after phase expansion and stereo matching.
2. The method of claim 1, wherein the method comprises:
in the first step, based on the controllable phase shift amount, the recorded phase shift fringe graph is represented by formula (1),
Figure 365751DEST_PATH_IMAGE001
(1),
wherein
Figure 482698DEST_PATH_IMAGE002
Is the pixel coordinates of the camera and,
Figure 180396DEST_PATH_IMAGE003
is the average intensity of the light emitted by the light source,
Figure 274254DEST_PATH_IMAGE004
is the contrast of the fringes,
Figure 602467DEST_PATH_IMAGE005
is the phase distribution to be measured and,
Figure 398254DEST_PATH_IMAGE006
is a shifted reference phase, N =1, …, N;
wrapped phase
Figure 571746DEST_PATH_IMAGE007
Corresponding measured phase distribution
Figure 582427DEST_PATH_IMAGE005
Represented by the formula (2),
Figure 956908DEST_PATH_IMAGE008
(2),
wherein,
Figure 53040DEST_PATH_IMAGE009
(3),
coefficient of performance
Figure 30223DEST_PATH_IMAGE010
,i=1,2,3,j=1,2,3,
Figure 160990DEST_PATH_IMAGE011
Figure 955640DEST_PATH_IMAGE012
(4),
Due to the fact that
Figure 539068DEST_PATH_IMAGE006
Is strictly controlled, and can obtain two-dimensional wrapping phase distribution
Figure 788784DEST_PATH_IMAGE013
3. The method of claim 2, wherein the method comprises: if it is not
Figure 305216DEST_PATH_IMAGE006
Quilt
Figure 614974DEST_PATH_IMAGE014
Integer within the range
Figure 92223DEST_PATH_IMAGE015
Halving, the standard phase shift algorithm is simplified as(5),
Figure 145630DEST_PATH_IMAGE016
(5)。
4. The method according to claim 1, wherein the second step is as follows:
step 2.1, considering the saturation degree of different fringe periods, and referring to the stored information in the phase expansion stage to calculate the saturation intensity of each pixel in the image;
step 2.2, calculating the phase of the partially saturated phase shift fringe image through general phase shift by applying a generalized phase shift algorithm corresponding to an equation;
and 2.3, automatically fusing to ensure the correctness of phase unwrapping through a multi-frequency high dynamic range.
5. The method according to claim 1, wherein the three steps are as follows:
step 3.1. projecting the sine curve graph encoded with the horizontally increasing phase diagram from the digital projector in sequence, and obtaining the absolute phase values of the two cameras by using the proposed method based on the multi-frequency fringe
Figure 985410DEST_PATH_IMAGE005
Step 3.2, performing telecentric polarity correction on the stripe pattern, taking the left camera as a main camera on the premise of not losing generality, and regarding the left camera with a phase value
Figure 997228DEST_PATH_IMAGE005
Figure 289669DEST_PATH_IMAGE017
Figure 802559DEST_PATH_IMAGE018
) Pixel of (a)
Figure 496845DEST_PATH_IMAGE017
Figure 148407DEST_PATH_IMAGE018
) Task is the second in the right image
Figure 724881DEST_PATH_IMAGE018
Find the corresponding pixel in the line
Figure 120091DEST_PATH_IMAGE019
Step 3.3. obtaining integral pixels
Figure 75408DEST_PATH_IMAGE020
The pixel is at
Figure 163450DEST_PATH_IMAGE018
The phase value in the row being closest to
Figure 961642DEST_PATH_IMAGE005
Figure 894963DEST_PATH_IMAGE017
Figure 219634DEST_PATH_IMAGE018
) In a phase of
Figure 478577DEST_PATH_IMAGE021
And then calculating sub-pixel coordinates based on inverse linear interpolation
Figure 967327DEST_PATH_IMAGE019
Figure 501076DEST_PATH_IMAGE022
(6);
And 3.4, after the left and right consistency check is completed in the stereo matching, obtaining matched pixel pairs, and realizing the three-dimensional reconstruction of the high-precision light-emitting surface.
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Application publication date: 20200731