CN111463142A - Method for efficiently detecting corrosion of PERC aluminum paste - Google Patents
Method for efficiently detecting corrosion of PERC aluminum paste Download PDFInfo
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- CN111463142A CN111463142A CN202010274167.2A CN202010274167A CN111463142A CN 111463142 A CN111463142 A CN 111463142A CN 202010274167 A CN202010274167 A CN 202010274167A CN 111463142 A CN111463142 A CN 111463142A
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- aluminum paste
- aluminum
- passivation layer
- paste
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
Abstract
The invention relates to a method for efficiently detecting the corrosivity of PERC aluminum paste, which comprises the following steps of firstly preparing a PERC blue membrane, wherein a passivation layer is arranged on the back surface of the PERC blue membrane, and the method is characterized in that: burning a passivation layer on the PERC blue film by using laser to form a dot-shaped or linear light spot after burning, burning the passivation layer at the light spot, and measuring the width D of the light spot by using a two-dimensional microscope; and then, printing the PERC aluminum paste to be detected on the passivation layer burnt by the laser, forming an aluminum back layer by the PERC aluminum paste after a sintering process, gradually corroding the passivation layer near a light spot by the PERC aluminum paste in the sintering process, losing the protection of the passivation layer after the passivation layer is corroded, chemically reacting silicon on the PERC blue diaphragm with the aluminum paste, scraping the aluminum back layer, forming an aluminum-silicon alloy by the PERC aluminum paste and the silicon exposed on the back of the PERC blue diaphragm, measuring the width W of the aluminum-silicon alloy by using a 3D microscope, wherein the value of W/D represents the expansion rate of the PERC aluminum paste, and the expansion rate can indirectly represent the corrosive strength of the PERC aluminum paste.
Description
Technical Field
The invention relates to a method for detecting the corrosivity of PERC aluminum paste, in particular to a method for efficiently detecting the corrosivity of PERC aluminum paste.
Background
The back passivation local contact crystalline silicon solar cell (PERC cell) adopts a back passivation and local contact special structure, the back of a cell substrate has very low back recombination, high open-circuit voltage (Voc) is possessed, meanwhile, the back of the cell substrate has very good infrared reflection performance, short-circuit current (Isc) can be effectively improved, and the average efficiency of the cell substrate is improved by about 0.1 percent (single crystal) compared with that of a conventional cell.
The back of the PERC battery is formed with aluminum-silicon alloy by adopting a laser local hole opening mode, the groove opening area is generally between 2 and 5 percent, and the alloy can not be formed at the position without groove opening, so that the PERC aluminum paste is required to have lower corrosivity so as to reduce the damage to a back passivation layer, but stronger adhesive force is required to be formed between the aluminum paste and the passivation layer so as to prevent a sintered aluminum layer from falling off, and the proper corrosive aluminum paste plays an important role in the efficiency and reliability of the battery.
The particle size, inorganic phase content and type of the aluminum powder in the PERC aluminum paste determine the corrosion strength of the aluminum paste, and the corrosion strength of the aluminum paste and the aluminum expansion are in a positive correlation relationship. Generally, the smaller the aluminum expansion rate is, the weaker the aluminum paste is in corrosion, the damage of the aluminum paste to a back passivation film can be reduced, the influence on the open voltage of the battery is reduced, and the efficiency of the battery can be effectively improved. Therefore, the rapid and effective monitoring of the corrosivity of the aluminum paste plays an important role in the development and efficiency improvement of the PERC aluminum paste and the regulation and control of the laser opening area and the sintering furnace temperature by correspondingly adjusting the corrosivity of the aluminum paste in a battery factory.
Disclosure of Invention
The invention provides a method for efficiently detecting the corrosivity of PERC aluminum paste; the problem of exist detection efficiency among the prior art not high is solved.
The technical problem of the invention is mainly solved by the following technical scheme: a method for efficiently detecting the corrosivity of PERC aluminum paste comprises the steps of firstly preparing a PERC blue membrane, wherein a passivation layer is arranged on the back surface of the PERC blue membrane, and the method is characterized in that: burning a passivation layer on the PERC blue film by using laser to form a dot-shaped or linear light spot after burning, burning the passivation layer at the light spot, and measuring the width D of the light spot by using a two-dimensional microscope; and then, printing the PERC aluminum paste to be detected on the passivation layer burnt by the laser, forming an aluminum back layer by the PERC aluminum paste after a sintering process, gradually corroding the passivation layer near the facula in the sintering process, losing the protection of the passivation layer after the passivation layer is corroded, carrying out chemical reaction on silicon on the PERC blue membrane and the aluminum paste, scraping the aluminum back layer, forming aluminum-silicon alloy by the PERC aluminum paste and the silicon exposed on the back of the PERC blue membrane, wherein the shape of the aluminum-silicon alloy formed after sintering can be circular or rhombic. The width W of the aluminum-silicon alloy is measured by a 3D microscope, the value of W/D represents the expansion rate of the PERC aluminum paste, and the expansion rate can indirectly represent the corrosive strength of the PERC aluminum paste. The larger the expansion rate W/D is, the stronger the corrosion of the PERC aluminum paste is represented, the larger the damage to the passivation film is, the open-circuit voltage of the battery can be reduced, and the battery efficiency is further influenced.
Preferably, laser is used for burning short dashed lines, straight lines or point-shaped light spots distributed at continuous intervals, a plurality of points are taken for value taking, and the average value of W/D is taken, so that the measured expansion rate is more accurate and reliable.
Preferably, a plurality of spot-shaped light spots are formed by laser burning, and the width D of the light spots is 20-200 um.
Preferably, the PERC blue membrane may be a single-sided battery or a double-sided battery.
Preferably, the PERC aluminum paste can be divided into single-sided aluminum paste and double-sided aluminum paste, and different systems can be matched according to different requirements of paste manufacturers and battery terminals.
Therefore, compared with the prior art, the invention has the following characteristics: 1. the method comprises the steps of hole burning by laser, printing and sintering aluminum paste, scraping an aluminum layer and taking the average value of W/D, wherein the value of W/D represents the expansion rate of the PERC aluminum paste, the expansion rate can indirectly represent the corrosive strength of the PERC aluminum paste, the steps of the whole method are fewer, and the detection efficiency is high.
Drawings
FIG. 1 is a partial schematic view of a PERC blue membrane of the present invention after laser burning to form a spot;
FIG. 2 is a schematic representation of the PERC blue film of FIG. 1 being subjected to a sintering process to form an aluminum backing layer;
FIG. 3 is a schematic view of the aluminum-silicon alloy shown in FIG. 2 with the aluminum backing layer scraped away to expose the aluminum-silicon alloy;
FIG. 4 is a schematic view of the aluminum-silicon alloy exposed by scraping the aluminum back layer using a short-dashed light spot.
Detailed Description
The technical scheme of the invention is further specifically described by the following embodiments and the accompanying drawings.
Example 1: referring to fig. 1, fig. 2 and fig. 3, a method for efficiently detecting the corrosivity of PERC aluminum paste comprises the steps of firstly preparing a PERC blue membrane 1, arranging a passivation layer 2 on the back surface of the PERC blue membrane, burning the passivation layer 2 on the PERC blue membrane by using laser, forming a punctiform or linear light spot 3 after burning, burning the passivation layer at the light spot, and measuring the width D of the light spot by using a two-dimensional microscope; printing a PERC aluminum paste to be detected on a passivation layer 2 burnt by laser, forming an aluminum back layer 4 by the PERC aluminum paste after a sintering process, gradually corroding the passivation layer near a light spot in the sintering process, losing the passivation layer after the passivation layer is corroded, losing the protection of the passivation layer, enabling silicon on the PERC blue diaphragm to chemically react with the aluminum paste, scraping the aluminum back layer 4, forming an aluminum-silicon alloy 5 by the PERC aluminum paste and the exposed silicon on the back surface of the PERC blue diaphragm 1, measuring the width W of the aluminum-silicon alloy by using a 3D microscope, wherein the value of W/D represents the expansion rate of the PERC aluminum paste, and the expansion rate can indirectly represent the corrosive strength of the PERC aluminum paste. The larger the expansion rate W/D is, the stronger the corrosion of the PERC aluminum paste is represented, the larger the damage to the passivation film is, the open-circuit voltage of the battery can be reduced, and the battery efficiency is further influenced.
Referring to fig. 1 and 4, laser is used for burning short dashed lines, straight lines or point-like light spots 3 distributed at continuous intervals, values are taken at multiple positions, and the average value of W/D is taken, so that the measured expansion rate is more accurate and reliable.
And (3) burning a plurality of point-like light spots 3 by using laser, wherein the width D of each light spot is 20-200 um.
The PERC blue membrane 1 may be a single-sided battery or a double-sided battery.
The PERC aluminum paste can be divided into single-sided aluminum paste and double-sided aluminum paste, and different systems can be matched according to different requirements of paste manufacturers and battery terminals.
The shape of the aluminum-silicon alloy 5 formed after sintering may be circular or rhomboidal.
It will be obvious to those skilled in the art that the present invention may be varied in many ways, and that such variations are not to be regarded as a departure from the scope of the invention. All such modifications as would be obvious to one skilled in the art are intended to be included within the scope of this claim.
Claims (6)
1. A method for efficiently detecting the corrosivity of PERC aluminum paste comprises the steps of firstly preparing a PERC blue membrane (1), arranging a passivation layer (2) on the back of the PERC blue membrane, and being characterized in that: the passivation layer (2) on the PERC blue film is burnt by laser, a spot-shaped or linear light spot (3) is formed after burning, and then the width D of the light spot is measured by a two-dimensional microscope; and then, printing the PERC aluminum paste to be detected on the passivation layer (2) burned by laser, forming an aluminum back layer (4) by the PERC aluminum paste after a sintering process, scraping the aluminum back layer (4), forming an aluminum-silicon alloy (5) by the PERC aluminum paste and exposed silicon on the back surface of the PERC blue diaphragm (1), measuring the width W of the aluminum-silicon alloy by using a 3D microscope, wherein the value of W/D represents the expansion rate of the PERC aluminum paste, and the expansion rate can indirectly represent the corrosive strength of the PERC aluminum paste.
2. The method for efficiently detecting the corrosiveness of the PERC aluminum paste as claimed in claim 1, wherein: and (3) burning a short dashed line, a straight line or a continuous interval distribution of punctiform light spots (3) by using laser, taking values at multiple positions, and taking the average value of W/D.
3. The method for efficiently detecting the corrosiveness of the PERC aluminum paste as claimed in claim 1 or 2, wherein: a plurality of point-like light spots (3) are burnt by laser, and the width D of the light spots is 20-200 um.
4. The method for efficiently detecting the corrosiveness of the PERC aluminum paste as claimed in claim 3, wherein: the PERC blue membrane (1) may be a single-sided battery or a double-sided battery.
5. The method for efficiently detecting the corrosiveness of the PERC aluminum paste as claimed in claim 4, wherein: the PERC aluminum paste may be classified into a single-sided aluminum paste and a double-sided aluminum paste.
6. The method for efficiently detecting the corrosiveness of the PERC aluminum paste as claimed in claim 3, wherein: the shape of the aluminum-silicon alloy (5) formed after sintering can be round or rhombus.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010274167.2A CN111463142B (en) | 2020-04-09 | 2020-04-09 | Method for efficiently detecting corrosion of PERC aluminum paste |
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| CN202010274167.2A CN111463142B (en) | 2020-04-09 | 2020-04-09 | Method for efficiently detecting corrosion of PERC aluminum paste |
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| CN111463142B CN111463142B (en) | 2023-03-24 |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW407328B (en) * | 1998-04-17 | 2000-10-01 | Applied Materials Inc | Improved endpoint detection for semiconductor processes |
| US20150279695A1 (en) * | 2014-03-31 | 2015-10-01 | Stmicroelectronics, Inc. | Control of wafer surface charge during cmp |
| CN105470337A (en) * | 2015-12-30 | 2016-04-06 | 无锡赛晶太阳能有限公司 | PERC solar cell and preparation method thereof |
| CN106373902A (en) * | 2015-07-20 | 2017-02-01 | 上海太阳能工程技术研究中心有限公司 | Detection method and detection mesh plate for detecting reliability of silver paste for solar cell |
| CN107968132A (en) * | 2017-08-21 | 2018-04-27 | 江西瑞安新能源有限公司 | The test method of Al-BSF and EVA adhesive film adhesion strength in a kind of photovoltaic module |
| WO2018120432A1 (en) * | 2016-12-30 | 2018-07-05 | 常州亿晶光电科技有限公司 | Aluminum paste with permeability for back surface field of solar cell, and preparation method therefor and use thereof |
| CN109493992A (en) * | 2018-10-15 | 2019-03-19 | 海宁市瑞银科技有限公司 | High adhesion force PERC crystal silicon solar energy battery aluminium paste and preparation method thereof |
-
2020
- 2020-04-09 CN CN202010274167.2A patent/CN111463142B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW407328B (en) * | 1998-04-17 | 2000-10-01 | Applied Materials Inc | Improved endpoint detection for semiconductor processes |
| US20150279695A1 (en) * | 2014-03-31 | 2015-10-01 | Stmicroelectronics, Inc. | Control of wafer surface charge during cmp |
| CN106373902A (en) * | 2015-07-20 | 2017-02-01 | 上海太阳能工程技术研究中心有限公司 | Detection method and detection mesh plate for detecting reliability of silver paste for solar cell |
| CN105470337A (en) * | 2015-12-30 | 2016-04-06 | 无锡赛晶太阳能有限公司 | PERC solar cell and preparation method thereof |
| WO2018120432A1 (en) * | 2016-12-30 | 2018-07-05 | 常州亿晶光电科技有限公司 | Aluminum paste with permeability for back surface field of solar cell, and preparation method therefor and use thereof |
| CN107968132A (en) * | 2017-08-21 | 2018-04-27 | 江西瑞安新能源有限公司 | The test method of Al-BSF and EVA adhesive film adhesion strength in a kind of photovoltaic module |
| CN109493992A (en) * | 2018-10-15 | 2019-03-19 | 海宁市瑞银科技有限公司 | High adhesion force PERC crystal silicon solar energy battery aluminium paste and preparation method thereof |
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