CN111458384A - Catalytic combustion type gas sensor - Google Patents

Catalytic combustion type gas sensor Download PDF

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Publication number
CN111458384A
CN111458384A CN202010379055.3A CN202010379055A CN111458384A CN 111458384 A CN111458384 A CN 111458384A CN 202010379055 A CN202010379055 A CN 202010379055A CN 111458384 A CN111458384 A CN 111458384A
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detection
reference element
detection element
temperature
electrode
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荆高山
樊晓华
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Jiangsu Jicui Intelligent Integrated Circuit Design Technology Research Institute Co ltd
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Jiangsu Jicui Intelligent Integrated Circuit Design Technology Research Institute Co ltd
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    • G01MEASURING; TESTING
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    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/16Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas

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Abstract

The invention relates to a catalytic combustion type gas sensor which comprises a catalytic gas sensing element, a constant power output circuit and a high linearity difference detection circuit. The catalytic gas sensing element includes a sensing element and a reference element. The constant power output circuit is respectively connected with the detection element and the reference element and is used for applying the same power to the detection element and the reference element so as to enable the detection element and the reference element to reach the same ignition temperature. The constant power output circuit comprises a voltage/current sensing circuit and a negative feedback control circuit. The high-linearity differential detection circuit is respectively connected with the detection element and the reference element, and is used for enabling the detection element and the reference element to form a Wheatstone bridge and outputting an electric signal capable of reflecting the concentration of the combustible gas based on the Wheatstone bridge. The invention can detect the explosion gas such as methane with high accuracy and high linearity.

Description

Catalytic combustion type gas sensor
Technical Field
The invention relates to the technical field of gas sensing, in particular to a catalytic combustion type gas sensor.
Background
Alkane gases are a common class of gases in daily life and include methane, ethane, propane, butane, pentane, and isomers thereof. Among them, methane gas is the most common alkane gas in national production and life. As a main fuel and a raw material for industry and civil use, methane widely exists in a plurality of fields such as energy, chemical industry, municipal administration and the like, and has important application value. Methane is a combustion and explosion gas and a greenhouse gas, and people need to detect the methane in real time and distribution when developing and utilizing the methane.
The mainstream combustible gas sensing detection technology and method for explosive gases including methane, ethane, propane, butane, pentane and isomers thereof, hydrogen and carbon monoxide mainly comprise a catalytic combustion type, a metal oxide semiconductor type, an optical absorption type, a thermal conduction type and an electrochemical type, and further comprise a resonance type, a mass spectrum ion spectrum analysis type and a biological detection type. The catalytic combustion sensor is widely applied due to the comprehensive advantages of simple structure, low manufacturing cost, higher detection precision, stronger harsh environment resistance, smaller volume, simple subsequent circuit and the like. Over a million worldwide markets each year, catalytic combustion sensors have significant demand in the field of gas detection.
The catalytic combustion type sensor utilizes the thermal effect principle of catalytic combustion, and a Wheatstone bridge is formed by pairing a detection element and a reference element. Under the condition of a certain ignition temperature, the combustible gas is flameless combusted on the surface of the carrier of the detection element and under the action of the catalyst, the temperature of the carrier of the detection element is increased, and the resistance of the platinum wire passing through the carrier is correspondingly increased. The carrier temperature of the reference element is not changed (the ignition temperature is not changed), so that the balance bridge is out of balance, and an electric signal which is in direct proportion to the concentration of the combustible gas is output. By measuring the magnitude of the resistance change of the detection element, the concentration of the combustible gas is known.
There are two important parameters for evaluating the performance of a catalytic combustion sensor: accuracy and linearity detection range. For a catalytic combustion sensor, the stability of the light-off temperature, the sensor design and its control detection circuitry have the following effects on the two parameters:
(1) the sensor accuracy is determined by the stability of the light-off temperature. The more stable the light-off temperature, the more stable the sensor sensitivity, and the higher the sensor detection accuracy.
(2) The sensor linearity range is determined by the sensor control detection circuit. The detection element and the reference element form a pair of differential elements, and the sensor control circuit enables the ignition temperature of the detection element and the reference element to be same and constant if the same input excitation is provided for the detection element and the reference element; the sensor detection circuit can obtain a high linearity detection range if it can linearly convert the temperature difference between the detection element and the reference element into an electrical signal output.
The existing catalytic combustion type gas sensor control detection circuit has the following defects: the sensor serves two functions simultaneously, heating to the light-off temperature and detecting the gas concentration by temperature change.
(1) The sensitivity is relatively stable only at certain gas concentrations (low concentrations). In the presence of combustible gas, the resistance of the detection element rises, the heating power drops under the same input voltage condition, and the input excitation provided by the control circuit is not a constant value.
(2) The sensing element and the reference element are connected in a wheatstone bridge. Conventional wheatstone bridge detection circuits are not ideal linear detection circuits and are only relatively linear at certain gas concentrations (low concentrations).
Based on the above, the detection of alkane gas, especially methane gas, has an urgent need for a high-accuracy and high-linearity sensor, which is widely applied to the daily life of the people.
Disclosure of Invention
The object of the present invention is to provide a catalytic combustion type gas sensor with high accuracy and high linearity.
In order to achieve the purpose, the invention adopts the technical scheme that:
a catalytic combustion gas sensor comprising:
a catalytic gas sensing element comprising a detection element and a reference element;
the constant power output circuit is respectively connected with the detection element and the reference element and is used for applying the same power to the detection element and the reference element so as to enable the detection element and the reference element to reach the same ignition temperature;
the two constant power output circuits are respectively and correspondingly connected with the detection element and the reference element; the constant power output circuit includes:
the voltage/current sensing circuit is connected with the detection element/the reference element and is used for sensing the current and the voltage of the detection element/the reference element and outputting a corresponding output voltage signal;
and the negative feedback control circuit is respectively connected with the detection element/the reference element and the voltage/current sensing circuit and is used for controlling the voltage loaded on the detection element/the reference element based on the output voltage signal output by the voltage/current sensing circuit so as to make the applied power constant.
The voltage/current sensing circuit includes:
the first end of the sensing resistor is connected with a working power supply, and the second end of the sensing resistor is connected with the detection element/the reference element in series;
the operational amplifier is connected with the induction resistor and used for acquiring voltages at two ends of the induction resistor and outputting an induction voltage signal;
and two input ends of the multiplier are respectively connected with the induction voltage signal and the input voltage signal, and the multiplier outputs the output voltage signal.
The negative feedback control circuit includes:
and two input ends of the voltage comparator are respectively connected with the output voltage signal and a preset voltage signal, and the output end of the voltage comparator is connected with the detection element/the reference element.
The output end of the voltage comparator is connected with the grid or the base of the triode, the drain or the collector of the triode is connected with the second end of the induction resistor, and the source or the emitter of the triode is connected with the detection element/the reference element.
The source electrode or the emitting electrode of the triode is connected with the first end of a first matching resistor, the second end of the first matching resistor is divided into two paths, one path is connected with the multiplier to input the input voltage signal, and the other path is grounded through a second matching resistor.
The catalytic combustion gas sensor further includes:
a high linearity difference detection circuit, which is respectively connected with the detection element and the reference element, and is used for enabling the detection element and the reference element to form a Wheatstone bridge and outputting an electric signal capable of reflecting the concentration of the combustible gas based on the Wheatstone bridge;
the high linearity differential detection circuit includes:
the detection element and the reference element form a first bridge arm of the Wheatstone bridge, the Wheatstone bridge further comprises two series resistors forming a second bridge arm, and one end of each of the two bridge arms is connected with a constant power supply;
a negative input end of the first operational amplifier is connected to the midpoint of a first bridge arm of the Wheatstone bridge, a positive input end of the first operational amplifier is grounded, and an output end of the first operational amplifier is connected to the other ends of the two bridge arms;
a positive input end of the second operational amplifier is connected with the midpoint of a second bridge arm of the Wheatstone bridge, and an output end of the second operational amplifier is an output end of the high linearity difference detection circuit;
a first end of the first resistor is connected with a negative input end of the second operational amplifier, and a second end of the first resistor is connected with an output end of the second operational amplifier;
and the first end of the second resistor is connected with the negative input end of the second operational amplifier, and the second end of the second resistor is grounded.
The detection element comprises a detection element heating electrode for heating the detection element to a required light-off temperature, a detection element temperature detection electrode for detecting the temperature of the detection element, and the reference element comprises a reference element heating electrode for heating the reference element to the required light-off temperature, a reference element temperature detection electrode for detecting the temperature of the reference element; the constant power output circuit is respectively connected with the detection element heating electrode and the reference element heating electrode. The high linearity difference detection circuit is respectively connected with the detection element temperature detection electrode and the reference element temperature detection electrode and is used for enabling the detection element temperature detection electrode and the reference element temperature detection electrode to form a Wheatstone bridge.
Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages: the invention can detect the explosion gas such as methane with high accuracy and high linearity.
Drawings
Fig. 1 is a schematic view of the detection principle of the catalytic combustion gas sensor of the present invention.
Fig. 2 is a schematic view showing the operation of the catalytic combustion gas sensor of the present invention.
FIG. 3 is a schematic diagram of the voltage/current sensing circuit of the constant power output circuit in the catalytic combustion gas sensor of the present invention.
FIG. 4 is a schematic diagram of a constant power output circuit in the catalytic combustion gas sensor of the present invention.
FIG. 5 is a schematic diagram of the constant power output result of the constant power output circuit in the catalytic combustion gas sensor of the present invention.
Fig. 6 is a schematic diagram of a high linearity differential detection circuit in the catalytic combustion gas sensor of the present invention.
In the above drawings: 1. a film substrate; 2. a detection element heating electrode; 3. a detection element temperature detection electrode; 4. a reference element heating electrode; 5. a reference element temperature detection electrode; 6. a porous support containing a catalyst; 7. a porous support free of catalyst; 8. a hollowed-out area; 9. a constant power output circuit; 10. a high linearity difference detection circuit.
Detailed Description
The invention will be further described with reference to examples of embodiments shown in the drawings to which the invention is attached.
The first embodiment is as follows: as shown in fig. 2, a catalytic combustion gas sensor includes a catalytic gas sensing element, a constant power output circuit (control circuit), and a high linearity difference detection circuit (detection circuit). The catalytic gas sensing element includes a sensing element and a reference element. As shown in fig. 1, the detection principle of the catalytic combustion gas sensor is as follows: the same constant power is respectively applied to the detection element and the reference element through the constant power output circuit (control circuit), so that the detection element and the reference element reach the same ignition temperature, the combustible gas generates flameless combustion on the surface of the detection element carrier, the temperature of the detection element is increased, the bridge formed by the detection element and the reference element loses balance, and the high linearity difference detection circuit (detection circuit) outputs an electric signal which is in direct proportion to the concentration of the combustible gas.
1. Catalytic gas sensing element
As shown in fig. 2, the catalytic gas sensor element includes a film substrate 1, a sensing element and a reference element processed on the film substrate 1, and a porous deposition layer deposited on the sensing element.
Compared with the traditional catalytic combustion gas sensor (the detection element and the reference element are both single electrodes), the scheme isolates the heating function from the detection function, namely the detection element comprises a detection element heating electrode 2 for heating the detection element to the required ignition temperature and a detection element temperature detection electrode 3 for detecting the temperature of the detection element; the reference element includes a reference element heating electrode 4 for heating the reference element to a desired light-off temperature, a reference element temperature detecting electrode 5 for detecting the temperature of the reference element.
The porous deposition layer comprises a porous support 6 containing a catalyst deposited on the detection element, a porous support 7 containing no catalyst deposited on the reference element.
The film substrate 1 is also provided with a hollow area 8 for isolating the detection element from the reference element.
2. Constant power output circuit
The constant power output circuit is respectively connected with the detection element heating electrode 2 of the detection element and the reference element heating electrode 4 of the reference element and is used for applying the same power to the detection element heating electrode 2 of the detection element and the reference element heating electrode 4 of the reference element so as to enable the detection element and the reference element to reach the same ignition temperature. The stable light-off temperature results in a more stable gas sensitivity of the sensing element and a higher sensing accuracy of the sensor. The same light-off temperature so that the sensing element and the reference element are always at the same temperature starting point. The two constant power output circuits are respectively and correspondingly connected with the detection element heating electrode 2 of the detection element and the reference element heating electrode 4 of the reference element.
As shown in fig. 3 and 4, the constant power output circuit includes a voltage/current sensing circuit and a negative feedback control circuit. The voltage/current sensing circuit is connected with the detection element heating electrode 2/the reference element heating electrode 4 of the reference element, and is used for sensing the current and the voltage of the detection element heating electrode 2/the reference element heating electrode 4 of the reference element and outputting a corresponding output voltage signal. The negative feedback control circuit is respectively connected with the detection element heating electrode 2/the reference element heating electrode 4 of the reference element and the voltage/current sensing circuit, and is used for controlling the voltage loaded on the detection element heating electrode 2/the reference element heating electrode 4 of the reference element based on the output voltage signal output by the voltage/current sensing circuit so as to make the applied power constant.
The voltage/current sensing circuit comprises a sensing resistor RsenseAn operational amplifier and a multiplier. Induction resistance RsenseFirst terminal and working power supply VCCConnected, sense resistor RsenseIs connected in series with the detection element heating electrode 2/the reference element heating electrode 4 of the reference element, the detection element heating electrode 2/the reference element heating electrode 4 of the reference element corresponds to the variable resistance RL(load). Operational amplifier and sensing resistor RsenseConnected for obtaining the voltage at two ends of the sensing resistor and outputting a sensing voltage signal Vsense. The two input ends of the multiplier are respectively connected with an induced voltage signal VsenseAnd an input voltage signal VinOutput a voltage signal VpoutIs output by the output end of the multiplier.
The negative feedback control circuit mainly comprises a voltage comparator and two voltage comparatorsThe input ends are respectively connected with an output voltage signal VpoutAnd a preset voltage signal VsetThe output end of the voltage comparator is connected with the detection element/reference element, specifically, the output end of the voltage comparator is connected with the grid electrode or the base electrode of the triode, and the drain electrode or the collector electrode of the triode is connected with the induction resistor RsenseIs connected to the second terminal of the transistor, and the source or emitter of the transistor is connected to the sensing element heater 2/reference element heater 4 of the reference element, i.e. the source or emitter of the transistor is connected to the variable resistor RLAre connected. The source electrode or the emitter electrode of the triode is connected with the first matching resistor 24RoFirst terminal of (1), first matching resistor 24RoThe second end of the first amplifier is divided into two paths, one path is connected with a multiplier to input a voltage signal VinAn input multiplier, the other path passing through a second matching resistor RoAnd (4) grounding.
The core component of the constant power output circuit is a voltage/current sensing circuit. As shown in FIG. 3, the voltage/current sensing circuit pair passes through the sensing resistor RsenseVoltage V ofsenseCurrent IsenseAnd (6) sensing. The voltage input of the voltage/current sensing circuit is VinThe voltage output of the circuit is Vpout。VpoutIs obtained by the following formula:
Vpout=Vsense×Vin×AV
wherein A isVIs a constant, e.g. A V25, unit (/ V).
For the voltage/current sensing circuit, a constant power output circuit can be constructed as shown in fig. 4. In the constant power output circuit, VsetIs a set voltage, a constant. V in voltage/current sensing circuitspoutAnd VsetThe comparison is performed by a voltage comparator. Due to VpoutIs given an output value of Vpout=Vsense×Vin×AVObtained if AV=25,Vin=1/25×VoR sense1 ohm, then from the value, VpoutObtained from the following equation:
Vpout=Vo×Isense
i.e. VpoutThe value of (1) is output as a load RLValue of power above, VoFor loading on variable resistor RLThe voltage of (c).
Thus, for a negative feedback control circuit, if the variable resistor R isLThe resistance value varies (10-500 ohm), and the negative feedback control circuit will adjust the variable resistor RLThe voltage of (c). Finally, the variable resistor RLHas a power value equal to VsetThe voltage value of (c). For example, if V is setset150mV, then the variable resistance RLThe power above was clamped at a constant value of 150 mW. As shown in fig. 5, adjust VsetThe voltage can be adjusted to adjust the variable resistor RLThe output power of the power amplifier fluctuates between 2mW and 95 mW.
In summary, in the constant power output circuit, the temperature of the detection element region increases in the presence of combustible gas, and the resistance of the detection element heating electrode increases. The external constant power circuit feeds back and adjusts the output power according to the resistance value change, so that the power applied to the heating electrode of the detection element is still constant, namely, the energy required by the ignition temperature is generated. The constant power output circuit is used for applying the same energy to the detection element and the reference element area, and the initial temperatures of the detection element and the reference element are consistent.
3. High-linearity differential detection circuit
The high linearity difference detection circuit is respectively connected with the detection element heating electrode 2 of the detection element and the reference element heating electrode 4 of the reference element, and is used for enabling the detection element heating electrode 2 of the detection element and the reference element heating electrode 4 of the reference element to form a Wheatstone bridge, and outputting an electric signal capable of reflecting the concentration of the combustible gas based on the Wheatstone bridge.
As shown in FIG. 6, the high linearity differential detection circuit comprises a Wheatstone bridge, a first operational amplifier, a second operational amplifier, and a first resistor R1And a second resistor R2. The detection element heating electrode 2 of the detection element and the reference element heating electrode 4 of the reference element form a first arm of a Wheatstone bridge, which also comprises two series resistors forming a second armRo1One end of two bridge arms is connected with a constant power supply and inputs a constant voltage VB. The negative input end of the first operational amplifier is connected to the midpoint of the first bridge arm of the Wheatstone bridge, the positive input end of the first operational amplifier is grounded, and the output end of the first operational amplifier is connected to the other ends of the two bridge arms. The positive input end of the second operational amplifier is connected with the midpoint of the second bridge arm of the Wheatstone bridge, the output end of the second operational amplifier is the output end of the high-linearity difference detection circuit, and the output signal is Vout. A first resistor R1The first end of the first resistor R is connected with the negative input end of the second operational amplifier1The second end of the second operational amplifier is connected with the output end of the second operational amplifier. A second resistor R2Is connected with the negative input end of the second operational amplifier, and a second resistor R2The second terminal of (a) is grounded.
For the high linearity difference detection circuit, its output voltage VoutComprises the following steps:
Figure BDA0002481244560000061
wherein R isoThe initial resistance values of the temperature detection electrode of the detection element and the temperature detection electrode of the reference element are delta R, and the resistance value of the temperature detection electrode of the detection element which is changed when the combustible gas is burnt is delta R. The differential detection circuit utilizes the excellent electrical characteristics (high input resistance, low output resistance and high amplification factor) of the operational amplifier to design an analog circuit and obtain high-linearity electrical output.
The temperature detection electrode in the scheme is made of platinum materials, and has good resistance temperature coefficient, and the resistance change and the temperature change of the electrode are highly linear. In addition, the input voltage VBIs a constant value. When a constant power output circuit applies a constant power to the sensing element and the reference element, the additional heat generated by the combustion of the combustible gas is highly linear with increasing temperature. Finally, the detection circuit can detect the combustible gas concentration in the environment with high linearity.
The invention utilizes the constant power and high linearity difference detection circuit and method, and simultaneously, the invention is based on the innovatively designed catalytic combustion type sensing element, and can carry out high-accuracy and high linearity detection on alkane gases such as methane and the like.
The above embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.

Claims (9)

1. A catalytic combustion gas sensor comprising:
a catalytic gas sensing element comprising a detection element and a reference element;
the constant power output circuit is respectively connected with the detection element and the reference element and is used for applying the same power to the detection element and the reference element so as to enable the detection element and the reference element to reach the same ignition temperature;
the method is characterized in that: the two constant power output circuits are respectively and correspondingly connected with the detection element and the reference element; the constant power output circuit includes:
the voltage/current sensing circuit is connected with the detection element/the reference element and is used for sensing the current and the voltage of the detection element/the reference element and outputting a corresponding output voltage signal;
and the negative feedback control circuit is respectively connected with the detection element/the reference element and the voltage/current sensing circuit and is used for controlling the voltage loaded on the detection element/the reference element based on the output voltage signal output by the voltage/current sensing circuit so as to make the applied power constant.
2. The catalytic combustion gas sensor according to claim 1, wherein: the voltage/current sensing circuit includes:
the first end of the sensing resistor is connected with a working power supply, and the second end of the sensing resistor is connected with the detection element/the reference element in series;
the operational amplifier is connected with the induction resistor and used for acquiring voltages at two ends of the induction resistor and outputting an induction voltage signal;
and two input ends of the multiplier are respectively connected with the induction voltage signal and the input voltage signal, and the multiplier outputs the output voltage signal.
3. The catalytic combustion gas sensor according to claim 1, wherein: the negative feedback control circuit includes:
and two input ends of the voltage comparator are respectively connected with the output voltage signal and a preset voltage signal, and the output end of the voltage comparator is connected with the detection element/the reference element.
4. The catalytic combustion gas sensor according to claim 3, wherein: the output end of the voltage comparator is connected with the grid or the base of the triode, the drain or the collector of the triode is connected with the second end of the induction resistor, and the source or the emitter of the triode is connected with the detection element/the reference element.
5. The catalytic combustion gas sensor according to claim 4, wherein: the source electrode or the emitting electrode of the triode is connected with the first end of a first matching resistor, the second end of the first matching resistor is divided into two paths, one path is connected with the multiplier to input the input voltage signal, and the other path is grounded through a second matching resistor.
6. The catalytic combustion gas sensor according to any one of claims 1 to 5, wherein: the catalytic combustion gas sensor further includes:
and the high-linearity differential detection circuit is respectively connected with the detection element and the reference element, is used for enabling the detection element and the reference element to form a Wheatstone bridge, and outputs an electric signal capable of reflecting the concentration of the combustible gas based on the Wheatstone bridge.
7. The catalytic combustion gas sensor according to claim 6, wherein: the high linearity differential detection circuit includes:
the detection element and the reference element form a first bridge arm of the Wheatstone bridge, the Wheatstone bridge further comprises two series resistors forming a second bridge arm, and one end of each of the two bridge arms is connected with a constant power supply;
a negative input end of the first operational amplifier is connected to the midpoint of a first bridge arm of the Wheatstone bridge, a positive input end of the first operational amplifier is grounded, and an output end of the first operational amplifier is connected to the other ends of the two bridge arms;
a positive input end of the second operational amplifier is connected with the midpoint of a second bridge arm of the Wheatstone bridge, and an output end of the second operational amplifier is an output end of the high linearity difference detection circuit;
a first end of the first resistor is connected with a negative input end of the second operational amplifier, and a second end of the first resistor is connected with an output end of the second operational amplifier;
and the first end of the second resistor is connected with the negative input end of the second operational amplifier, and the second end of the second resistor is grounded.
8. The catalytic combustion gas sensor according to any one of claims 1 to 5, wherein: the detection element comprises a detection element heating electrode for heating the detection element to a required light-off temperature, a detection element temperature detection electrode for detecting the temperature of the detection element, and the reference element comprises a reference element heating electrode for heating the reference element to the required light-off temperature, a reference element temperature detection electrode for detecting the temperature of the reference element; the constant power output circuit is respectively connected with the detection element heating electrode and the reference element heating electrode.
9. The catalytic combustion gas sensor according to claim 6 or 7, characterized in that: the detection element comprises a detection element heating electrode for heating the detection element to a required light-off temperature, and a detection element temperature detection electrode for detecting the temperature of the detection element, the reference element comprises a reference element heating electrode for heating the reference element to the required light-off temperature, and a reference element temperature detection electrode for detecting the temperature of the reference element, and the high linearity difference detection circuit is respectively connected with the detection element temperature detection electrode and the reference element temperature detection electrode and is used for enabling the detection element temperature detection electrode and the reference element temperature detection electrode to form a Wheatstone bridge.
CN202010379055.3A 2020-05-07 2020-05-07 Catalytic combustion type gas sensor Pending CN111458384A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117269254A (en) * 2023-11-21 2023-12-22 苏州亿波达微系统技术有限公司 Hydrogen sensor and preparation method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117269254A (en) * 2023-11-21 2023-12-22 苏州亿波达微系统技术有限公司 Hydrogen sensor and preparation method thereof
CN117269254B (en) * 2023-11-21 2024-02-06 苏州亿波达微系统技术有限公司 Hydrogen sensor and preparation method thereof

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