CN111438631A - A dressing ring and grinding and polishing equipment for grinding and polishing equipment - Google Patents
A dressing ring and grinding and polishing equipment for grinding and polishing equipment Download PDFInfo
- Publication number
- CN111438631A CN111438631A CN202010360864.XA CN202010360864A CN111438631A CN 111438631 A CN111438631 A CN 111438631A CN 202010360864 A CN202010360864 A CN 202010360864A CN 111438631 A CN111438631 A CN 111438631A
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- grinding
- ring
- mounting
- mounting hole
- piece
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- 238000005498 polishing Methods 0.000 title claims abstract description 30
- 238000013461 design Methods 0.000 claims description 12
- 238000009434 installation Methods 0.000 claims description 6
- 230000013011 mating Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 9
- 230000002035 prolonged effect Effects 0.000 abstract description 4
- 241001391944 Commicarpus scandens Species 0.000 abstract description 3
- 239000007788 liquid Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 230000001788 irregular Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 239000007769 metal material Substances 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 239000007767 bonding agent Substances 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 238000009966 trimming Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000010437 gem Substances 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The invention discloses a dressing ring for grinding and polishing equipment, wherein a first mounting hole and a second mounting hole are respectively formed on a bearing ring and a grinding piece, and then the two ends of a connecting piece respectively extend into the first mounting hole and the second mounting hole. The fixed bonding structure comprises a connecting pin structure, a surface bonding structure of the connecting pin and a bonding structure of the grinding piece and the bearing end, and the three fixed bonding modes are effectively combined, so that the technical problem that the two parts are easy to break due to the fact that the grinding piece and the surface of the bearing end are fixed only through bonding in the prior art is solved, the grinding effect is improved, and the service life of the grinding piece is prolonged; meanwhile, the grinding and polishing equipment using the dressing ring is also disclosed.
Description
Technical Field
The invention relates to the technical field of grinding and polishing, in particular to a trimming ring for grinding and polishing equipment and the grinding and polishing equipment.
Background
With the development of high-end manufacturing industry in China, special materials such as quartz crystal, piezoelectric crystal, silicon substrate, gem piece, GaAs, optical glass, magnetic material, ceramic material, hard and brittle non-metallic material test piece, metallic material, high-precision metal measuring tool, mechanical parts, mineral interface, composite material interface, TEM lens and the like need to be precisely ground and polished. In the process of grinding and polishing the above materials, grinding and polishing equipment is inevitably used, and in the equipment, a dressing ring structure is an important part for the precise grinding and polishing mentioned above. For example, chinese patent document CN208084106 discloses a dressing ring for a polishing and grinding apparatus, which includes a ring body and a grinding body, wherein the grinding body is composed of a plurality of cylinders, the end surfaces of the cylinders are fastened and connected with the end surfaces of the ring body, the connection is made by bonding, and the cylinders are uniformly and symmetrically distributed on the end surfaces of the ring body. The dressing ring structure can utilize the space between the cylindrical structures, and is beneficial to the flow of the grinding fluid on the grinding disc, so that the grinding fluid is more uniformly distributed on the grinding disc, and the grinding effect of the flatness of the workpiece is improved. Although the trimming ring can improve certain flatness of a workpiece, the cylindrical grinding body and the end face of the ring piece are intercepted in a bonding mode, the cylindrical grinding body and the end face of the ring piece are made of different materials, and meanwhile, because the grinding and polishing materials are materials with high hardness, in the grinding process, the bonding agent between the two parts is easy to break, so that the grinding piece and the ring piece are easy to crack, the connecting force between the grinding piece and the ring piece is reduced, the grinding effect is reduced, and the service life is prolonged.
Disclosure of Invention
In order to solve the above technical problem, the present invention provides a dressing ring for a polishing and grinding apparatus, comprising: the polishing device comprises a bearing ring and a plurality of polishing pieces arranged on the bearing ring; the bearing ring comprises a bearing end, a plurality of first mounting holes are formed in the bearing end, each grinding piece comprises a grinding end and a mounting end, and at least one second mounting hole is formed in the mounting end; the grinding piece is characterized by further comprising a plurality of connecting pieces, wherein two ends of each connecting piece extend into the first mounting hole and the second mounting hole respectively, and the mounting ends of the grinding pieces are attached to the bearing ends in a bonding mode.
Preferably, the connector is a cylinder.
Preferably, the structure of the connecting piece comprises at least one edge.
Further, the grinding piece and the connecting piece are integrally formed, during installation, the free end of the connecting piece extends into the first installation hole, and the installation end of the grinding piece is attached to the bearing end in a bonding mode.
Further, the grinding member is of a fan-shaped design.
Furthermore, the number of the connecting pieces on each grinding piece is two.
Furthermore, the included angle between each two side edges of the grinding piece is designed to be a chamfer.
Preferably, the connecting piece is of a fan-shaped design, the first mounting hole is of a fan-shaped design, and the first mounting hole is matched with the connecting piece.
Furthermore, a connecting piece is formed on each grinding piece, a threaded hole is formed in each connecting piece, a bolt column matched with the threaded hole is formed in the first mounting hole, and when the connecting piece extends into the first mounting hole for mounting, the threaded hole and the bolt column are designed to be screwed tightly; the mounting end of the abrasive article is attached to the carrier end by a threaded connection and bonding.
The invention also discloses grinding and polishing equipment comprising any one of the trimming rings.
Compared with the prior art, the technical scheme of the invention has the following advantages:
(1) according to the dressing ring, the first mounting hole and the second mounting hole are formed in the bearing ring and the grinding piece respectively, and then the two ends of the connecting piece extend into the first mounting hole and the second mounting hole respectively. The fixed bonding structure comprises the surface bonding structure of the connecting pin structure and the connecting pin and the bonding structure of the grinding piece and the bearing end, and three fixed bonding modes are effectively combined, so that the technical problem that in the prior art, the two parts are easy to break due to the fact that the grinding piece and the bearing end are only bonded to each other in the surface is solved, the grinding effect is improved, and the service life of the grinding piece is prolonged.
(2) According to the dressing ring, the grinding piece and the connecting piece are integrally formed, the strength of the integrated structure exceeds the effect of splicing and bonding through the connecting piece, the grinding effect is further improved, and the service life is further prolonged; meanwhile, the integrated structure prevents the surface of the connecting piece and the grinding body from having small difference due to the inconsistent wear coefficients when the grinding piece is worn to the position of the connecting piece with the split structure, thereby reducing the grinding or polishing effect; further, split type structure is because the binder is at the bonding in-process, can't accomplish to fill completely, so, the gap that does not fill the production makes the bight of grinding piece or split type connecting piece to and the drill way bight damage of mounting hole drops, reduces grinding effect and life and destroys techniques and incident such as grinding device, and the emergence of above-mentioned technique and incident is avoided to the structure of integration.
(3) According to the dressing ring, the grinding piece is designed in a fan shape, so that the grinding area can be increased to the greatest extent by the fan-shaped structure, and the grinding effect is improved; further, the design of contained angle chamfer between every both sides limit of grinding piece, this chamfer design can be when guaranteeing the lapping liquid circulation lock partial lapping liquid, can solve circular grinding piece and be difficult to pin at the grinding in-process lapping liquid, lead to the problem that needs add the lapping liquid, reduce the loss of lapping liquid to a certain extent.
(4) The dressing ring of the present invention has fan-shaped connecting parts to increase the connecting area and to realize high strength connection in ultra-thin and ultra-narrow bearing ring structure.
(5) According to the dressing ring, a threaded hole is formed in the connecting piece, the bolt column matched with the threaded hole is formed in the first mounting hole, and when the connecting piece extends into the first mounting hole for mounting, the threaded hole and the bolt column are screwed.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art to derive other drawings without creative efforts.
FIG. 1 is a schematic view of a trim ring of the present invention;
FIG. 2 is a schematic view of a trim ring of the present invention;
FIG. 3 is a schematic view of a trim ring of the present invention;
FIG. 4 is a schematic structural view of a dressing ring of the present invention;
the reference numbers in the figures denote: 1-a carrier ring; 2-a grinding member; 3-a connector; 4-a threaded hole; 5-bolt columns; 11-a carrying end; 12-a first mounting hole; 21-grinding end; 22-a mounting end; 23-second mounting hole.
Detailed Description
The present invention now will be described more fully hereinafter with reference to the accompanying drawings, in which some, but not all embodiments of the invention are shown. The embodiments in the present invention, other embodiments obtained by persons skilled in the art without any inventive work, belong to the protection scope of the present invention.
Example 1
As shown in fig. 1, the present embodiment discloses a dressing ring for a grinding and polishing apparatus, which includes a carrier ring 1 and a plurality of grinding members 2 mounted on the carrier ring 1; the bearing ring 1 is an annular structure, the annular structure can adopt an annular structure of an existing bearing ring, the bearing ring 1 includes a bearing end 11, and the bearing end 11 is formed with a plurality of first mounting holes 12, preferably, the plurality of first mounting holes 12 are uniformly arranged along the single or combined circumferential direction of the annular structure of the bearing ring, the structure of the first mounting holes 12 is not particularly limited, such as circular holes, trapezoidal holes, fan-shaped holes, square holes, strip-shaped holes and other structures, and can also be irregular holes, in this embodiment, the first mounting holes 12 are circular holes; each of the grinding members 2 includes a grinding end 21 and a mounting end 22, the grinding end 21 is used for grinding and polishing, the mounting end 22 is used for being mounted with the carrying end 11, at least one second mounting hole 23 is formed on the mounting end 22, the number of the second mounting holes 23 on each grinding member 2 is not specifically limited, in this embodiment, preferably 2, and the structure of the second mounting holes 23 is not specifically limited, such as a circular hole, a trapezoidal hole, a fan-shaped hole, a square hole, a strip-shaped hole, and the like, and may also be an irregular hole, in this embodiment, the second mounting holes 23 are circular holes, and of course, when the number of the second mounting holes 23 on each grinding member 2 is greater than or equal to 2, the shape of the second mounting holes 23 may be uniform or non-uniform, and the structure of the grinding member 2 is not specifically limited, such as a cylindrical shape, a fan-shaped cylinder, a trapezoidal cylinder, etc., in this embodiment, the grinding member 2 is a fan-shaped cylinder; the grinding piece 2 is characterized by further comprising a plurality of connecting pieces 3, two ends of each connecting piece 3 respectively extend into the first mounting hole 12 and the second mounting hole 23, the mounting end 22 of the grinding piece 2 is attached to the bearing end 11 in a bonding mode through a bonding agent, the shape of each connecting piece 11 is not particularly limited, and can be a cylindrical regular cylinder or an irregular cylinder, and a cylinder or a structure with at least one edge is preferred, and in the embodiment, each connecting piece 11 is a cylinder.
Further, be provided with the gap between two adjacent grinding member 2, the contained angle chamfer design between every both sides limit of grinding member 2, this side is preferred the side between installation end 22 and the grinding end 21 through the chamfer design for the lapping liquid can conveniently circulate, and simultaneously, the grinding member 2 of fan-shaped cylinder helps the lapping liquid to pin partly.
The material of the bearing ring 1 is preferably a metal material; the material of the grinding element 2 and the connecting element 3 is preferably a ceramic material.
Example 2
As shown in fig. 2, the present embodiment discloses a dressing ring for a grinding and polishing apparatus, which includes a carrier ring 1 and a plurality of grinding members 2 mounted on the carrier ring 1; the bearing ring 1 is an annular structure, the annular structure can adopt an annular structure of an existing bearing ring, the bearing ring 1 includes a bearing end 11, and the bearing end 11 is formed with a plurality of first mounting holes 12, preferably, the plurality of first mounting holes 12 are uniformly arranged along the single or combined circumferential direction of the annular structure of the bearing ring, the structure of the first mounting holes 12 is not particularly limited, such as circular holes, trapezoidal holes, fan-shaped holes, square holes, strip-shaped holes and other structures, and can also be irregular holes, in this embodiment, the first mounting holes 12 are circular holes; each grinding member 2 includes a grinding end 21 and a mounting end 22, the grinding end 21 is used for grinding and polishing, the mounting end 22 is used for being mounted in cooperation with the bearing end 11, the structure of the grinding member 2 is not particularly limited, such as a cylinder, a sector cylinder, a trapezoidal cylinder, etc., in this embodiment, the grinding member 2 is a sector cylinder; the grinding piece 2 is integrally formed with the connecting pieces 3, the free ends of the connecting pieces 3 extend into the first mounting holes 12, the mounting end 22 of the grinding piece 2 is attached to the bearing end 11 in a bonding mode by using a bonding agent, and after the connecting pieces 3 and the grinding piece 2 are integrally formed, a structural second mounting hole disappears, at this time, the shape of the connecting pieces 11 exceeding the mounting end 22 is not specifically limited, such as a cylindrical regular cylinder shape or an irregular cylinder shape, preferably a cylinder or a structure with at least one edge, and in the embodiment, the connecting pieces 11 are cylinders; the number of the connecting members 2 formed on each of the grinding bodies 2 is not particularly limited, and preferably 2.
Further, be provided with the gap between two adjacent grinding member 2, the contained angle chamfer design between every both sides limit of grinding member 2, this side is preferred the side between installation end 22 and the grinding end 21 through the chamfer design for the lapping liquid can conveniently circulate, and simultaneously, the grinding member 2 of fan-shaped cylinder helps the lapping liquid to pin partly.
The material of the bearing ring 1 is preferably a metal material; the material of the grinding element 2 and the connecting element 3 is preferably a ceramic material.
Example 3
As shown in fig. 3, this embodiment discloses a dressing ring for a grinding and polishing apparatus, which is a modification of embodiment 2, in this embodiment, the number of the connecting members 3 on each grinding member 2 is 1, and the dressing ring is in the shape of a sector cylinder with a chamfered side included angle.
Example 4
As shown in fig. 4, the present embodiment discloses a dressing ring for a grinding and polishing device, which is a modification of embodiment 2, in this embodiment, the shape of the first mounting hole 12 is not particularly limited, such as a circular hole, a trapezoidal hole, a fan-shaped hole, a square hole, a strip-shaped hole, etc., in this embodiment, a circular hole is preferred, and a bolt column is formed in the first mounting hole 12, and an external thread is formed thereon; the number of the connecting pieces 3 on each grinding piece 2 is one, a threaded hole 4 is formed in each connecting piece, the shape of each connecting piece 3 is not particularly limited, such as a cylindrical regular cylinder shape or an irregular cylinder shape, preferably a cylinder or a structure with at least one edge, in this embodiment, each connecting piece 11 is a cylinder, and when the connecting pieces 3 extend into the first mounting holes 12 for mounting, the threaded holes 4 and the bolt columns 5 are designed to be screwed; the mounting end of the abrasive article is attached to the carrier end by a threaded connection and bonding.
Example 5
This embodiment discloses a grinding and polishing apparatus including the dressing ring according to any one of embodiments 1 to 4.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.
Claims (10)
1. A dressing ring for an abrasive polishing apparatus, comprising: the polishing device comprises a bearing ring and a plurality of polishing pieces arranged on the bearing ring; the bearing ring comprises a bearing end, a plurality of first mounting holes are formed in the bearing end, each grinding piece comprises a grinding end and a mounting end, and at least one second mounting hole is formed in the mounting end; the grinding piece is characterized by further comprising a plurality of connecting pieces, wherein two ends of each connecting piece extend into the first mounting hole and the second mounting hole respectively, and the mounting ends of the grinding pieces are attached to the bearing ends in a bonding mode.
2. The trim ring of claim 1, wherein the connector is a cylinder.
3. The trim ring of claim 1 wherein the configuration of the attachment member includes at least one edge.
4. The dressing ring of any one of claims 1-3, wherein the abrasive element is integrally formed with the attachment element, and wherein during installation, the free end of the attachment element extends into the first mounting hole and the mounting end of the abrasive element is adhesively bonded to the carrier end.
5. The dressing ring of claim 4 wherein the abrasive elements are of a fan-shaped design.
6. The dressing ring of claim 5 wherein there are two of the connecting members on each grinding member.
7. The dressing ring of claim 6 wherein the included angle between each side of the abrasive article is chamfered.
8. The dressing ring of claim 5 wherein the connecting member is of a fan-shaped design, the first mounting hole is of a fan-shaped design, and the first mounting hole mates with the connecting member.
9. The dressing ring of claim 4 wherein each grinding member has a connecting member formed thereon and a threaded bore formed therein, the first mounting bore having a stud post formed therein for mating with the threaded bore, the connecting member extending into the first mounting bore for mounting with the threaded bore in a tightened configuration with the stud post; the mounting end of the abrasive article is attached to the carrier end by a threaded connection and bonding.
10. An abrasive polishing device comprising the dressing ring according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010360864.XA CN111438631A (en) | 2020-04-30 | 2020-04-30 | A dressing ring and grinding and polishing equipment for grinding and polishing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010360864.XA CN111438631A (en) | 2020-04-30 | 2020-04-30 | A dressing ring and grinding and polishing equipment for grinding and polishing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111438631A true CN111438631A (en) | 2020-07-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010360864.XA Pending CN111438631A (en) | 2020-04-30 | 2020-04-30 | A dressing ring and grinding and polishing equipment for grinding and polishing equipment |
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| CN (1) | CN111438631A (en) |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012011510A (en) * | 2010-07-01 | 2012-01-19 | Honda Motor Co Ltd | Brush grinding method of metal ring and device therefor |
| CN104416463A (en) * | 2013-08-29 | 2015-03-18 | 株式会社荏原制作所 | Dressing Device, Chemical Mechanical Polishing Apparatus Including The Same, And Dresser Disc Used In The Same |
| CN105150033A (en) * | 2015-08-12 | 2015-12-16 | 华侨大学 | Large-size axial ultrasound-assisted end face grinding abrasive disk |
| TW201634184A (en) * | 2015-03-19 | 2016-10-01 | Kojem Internat Co Ltd | Retaining ring for chemical-mechanical polishing process |
| CN206982456U (en) * | 2017-08-03 | 2018-02-09 | 蓝思科技（长沙）有限公司 | Dressing tool |
| CN107671725A (en) * | 2017-10-20 | 2018-02-09 | 德淮半导体有限公司 | Repair disc system, chemical mechanical polishing device and Ginding process |
| CN108098590A (en) * | 2017-12-21 | 2018-06-01 | 东莞华晶粉末冶金有限公司 | The trimmer and its dressing method of a kind of grinding and polishing pad |
| CN208084106U (en) * | 2018-03-13 | 2018-11-13 | 上海致领半导体科技发展有限公司 | A kind of finishing ring for polishing grinding equipment |
| CN208451389U (en) * | 2018-07-18 | 2019-02-01 | 蓝思科技(东莞)有限公司 | A kind of grinding pad finishing jig and grinding pad trimming device |
| CN109514434A (en) * | 2018-12-25 | 2019-03-26 | 上海致领半导体科技发展有限公司 | A kind of polishing pad trimmer of adjustable polishing pad face type |
| CN210335553U (en) * | 2019-07-26 | 2020-04-17 | 江苏双阳机械科技有限公司 | Split type grinding disc |
| CN212145965U (en) * | 2020-04-30 | 2020-12-15 | 苏州珂玛材料科技股份有限公司 | A dressing ring and grinding and polishing equipment for grinding and polishing equipment |
-
2020
- 2020-04-30 CN CN202010360864.XA patent/CN111438631A/en active Pending
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012011510A (en) * | 2010-07-01 | 2012-01-19 | Honda Motor Co Ltd | Brush grinding method of metal ring and device therefor |
| CN104416463A (en) * | 2013-08-29 | 2015-03-18 | 株式会社荏原制作所 | Dressing Device, Chemical Mechanical Polishing Apparatus Including The Same, And Dresser Disc Used In The Same |
| TW201634184A (en) * | 2015-03-19 | 2016-10-01 | Kojem Internat Co Ltd | Retaining ring for chemical-mechanical polishing process |
| CN105150033A (en) * | 2015-08-12 | 2015-12-16 | 华侨大学 | Large-size axial ultrasound-assisted end face grinding abrasive disk |
| CN206982456U (en) * | 2017-08-03 | 2018-02-09 | 蓝思科技（长沙）有限公司 | Dressing tool |
| CN107671725A (en) * | 2017-10-20 | 2018-02-09 | 德淮半导体有限公司 | Repair disc system, chemical mechanical polishing device and Ginding process |
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| CN208084106U (en) * | 2018-03-13 | 2018-11-13 | 上海致领半导体科技发展有限公司 | A kind of finishing ring for polishing grinding equipment |
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| CN210335553U (en) * | 2019-07-26 | 2020-04-17 | 江苏双阳机械科技有限公司 | Split type grinding disc |
| CN212145965U (en) * | 2020-04-30 | 2020-12-15 | 苏州珂玛材料科技股份有限公司 | A dressing ring and grinding and polishing equipment for grinding and polishing equipment |
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