CN109514434A - A kind of polishing pad trimmer of adjustable polishing pad face type - Google Patents
A kind of polishing pad trimmer of adjustable polishing pad face type Download PDFInfo
- Publication number
- CN109514434A CN109514434A CN201811595330.4A CN201811595330A CN109514434A CN 109514434 A CN109514434 A CN 109514434A CN 201811595330 A CN201811595330 A CN 201811595330A CN 109514434 A CN109514434 A CN 109514434A
- Authority
- CN
- China
- Prior art keywords
- polishing pad
- trimmer
- face type
- pellet
- finishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 54
- 239000008188 pellet Substances 0.000 claims abstract description 20
- 239000007769 metal material Substances 0.000 claims description 3
- 230000008439 repair process Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 5
- 239000002421 finishing Substances 0.000 description 16
- 238000010586 diagram Methods 0.000 description 8
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The present invention provides a kind of polishing pad trimmer of adjustable polishing pad face type, including trimmer ontology, finishing pellet and connector, the circumferencial direction of trimmer ontology is equipped with several putting holes, it modifies and is equipped with external screw thread below the side wall of pellet, connector includes casing, annular convex platform and elastic foot piece.The polishing pad trimmer of adjustable polishing pad face type provided by the invention, it can will modify that pellet is selectable to be placed in putting hole according to process requirements, and then be modified the finishing, it can be achieved that a variety of burnishing surface types to polishing pad, reduce the trimmer investment of different size, effectively control cost.
Description
Technical field
The present invention relates to technical field of semiconductors, in particular it relates to a kind of throwing of adjustable polishing pad face type
Light dresser.
Background technique
In the single-sided polishing processing procedure of semi-conductor silicon chip and part photoelectric material, in order to maintain polishing pad flatness,
Polishing efficiency and service life need periodically to modify polishing pad using polishing pad trimmer；Traditional polishing pad finishing
Device is using the trimmer of fixed finishing area and shape, such as trimmer of monoblock type as shown in Figure 1 or group as shown in Figure 2
Polishing pad finishing can only be gone out a fixed face type by the trimmer of dress formula, these traditional polishing pad trimmers, these are fixed
Face type can not often reach the optimum state of wafer polishing precision, the polishing pad face type as caused by the structure of trimmer is not
It can adjust, so that the flexibility of polishing process has received very big restriction, also affect the machining accuracy of product.
Summary of the invention
In order to solve problems in the prior art, the present invention provides a kind of polishing pad finishings of adjustable polishing pad face type
Device can adjust polishing pad face type as needed, improve polishing precision.
The invention patent provides a kind of polishing pad trimmer of adjustable polishing pad face type, including trimmer ontology, repairs
Whole pellet and connector, the circumferencial direction of the trimmer ontology are equipped with several putting holes, under the side wall of the finishing pellet
Side is equipped with external screw thread, and the connector includes casing, annular convex platform and elastic foot piece, and the inner wall of described sleeve pipe has several use
In the internal screw thread of connection trimmer ontology, the top edge of described sleeve pipe has an annular convex platform, and the annular convex platform is for buckling
In the upper surface of the trimmer ontology, the lower edge of described sleeve pipe has elastic foot piece, and the end of the elastic foot piece has
Hook portion, the hook portion are used for against the lower surface of the trimmer ontology.
Preferably, the consistency of thickness of the height and the trimmer ontology of described sleeve pipe and elastic foot piece.
Preferably, the putting hole is uniformly distributed on the circumferencial direction of the trimmer ontology.
Preferably, described sleeve pipe is threadedly coupled with the finishing pellet.
Preferably, the quantity of the putting hole is greater than the quantity of the finishing pellet.
Preferably, the elastic foot piece is metal material.
Preferably, the internal diameter of the putting hole and the outer diameter of described sleeve pipe are consistent.
Technical solution provided by the invention has the benefit that
1, the polishing pad trimmer of adjustable polishing pad face type provided by the invention can will modify pellet according to process requirements
It is selectable to be placed in putting hole, and then the finishing, it can be achieved that a variety of burnishing surface types is modified to polishing pad, it reduces different
The trimmer of specification is put into, effectively control cost；
2, finishing pellet is detachably arranged in putting hole by the present invention, is dismantled install convenient, is conveniently adjusted correction-plate
The distributed areas of upper finishing pellet.
Detailed description of the invention
It, below will be to required use in embodiment description in order to illustrate more clearly of the technical solution in the invention patent
Attached drawing be briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for this
For the those of ordinary skill of field, without creative efforts, it can also be obtained according to these attached drawings others
Attached drawing.
Fig. 1 is the structural schematic diagram of traditional monoblock type trimmer；
Fig. 2 is the structural schematic diagram of traditional assembly type trimmer；
Fig. 3 is the structural schematic diagram that the polishing pad trimmer of polishing pad face type is adjusted in the present invention；
Fig. 4 is the structural schematic diagram of connector in the present invention.
Specific embodiment
To keep the contents of the present invention more clear and easy to understand, below in conjunction with Figure of description, the contents of the present invention are made into one
Walk explanation.Certainly the invention is not limited to the specific embodiment, general replacement known to those skilled in the art
It is included within the scope of protection of the present invention.Secondly, the present invention has carried out detailed statement using schematic diagram, it is real the present invention is described in detail
When example, for ease of description, schematic diagram is not partially enlarged in proportion to the general scale, should not be in this, as limitation of the invention.
Above and other technical characteristic and beneficial effect, will in conjunction with the embodiments and attached drawing is to adjustable polishing pad of the invention
The polishing pad trimmer of face type is described in detail.As shown, Fig. 3 is the polishing pad that polishing pad face type is adjusted in the present invention
The structural schematic diagram of trimmer；Fig. 4 is the structural schematic diagram of connector in the present invention.
As shown in Figure 3,4, the present invention provides a kind of polishing pad trimmer of adjustable polishing pad face type, including trimmer sheet
The circumferencial direction of body 100, finishing pellet 200 and connector 300, trimmer ontology 100 is equipped with several putting holes, trimmer sheet
Body 100 is in oblate column structure, and finishing pellet 200 is substantially in cylindrical structure, is equipped with external screw thread below side wall.
The polishing pad trimmer of adjustable polishing pad face type provided by the invention can will modify pellet according to process requirements
200 it is selectable be placed in putting hole, and then modified the finishing, it can be achieved that a variety of burnishing surface types to polishing pad, reduced
The trimmer of different size is put into, effectively control cost.
Specifically, connector 300 includes casing 310, annular convex platform 320 and elastic foot piece 330, set in the present embodiment
The inner wall of pipe 310 has several internal screw threads for being used to connect trimmer ontology 100, and the top edge of casing 310 has a convex annular
Platform 320, annular convex platform 320 are used to be buckled in the upper surface of trimmer ontology 100, and the lower edge of casing 310 has elastic foot piece
330, the end of elastic foot piece 330 has hook portion 340, and hook portion 340 is used for against the lower surface of trimmer ontology 100.
The present invention is detachably arranged in pellet 200 is modified in putting hole, and is dismantled install convenient, is conveniently adjusted conditioner discs
The distributed areas of upper finishing pellet 200.
Specifically, the putting hole in the present embodiment is uniformly distributed on the circumferencial direction of trimmer ontology 100, putting hole
Quantity is greater than the quantity of finishing pellet 200, and the internal diameter of putting hole is consistent with the outer diameter of casing 310, and casing 310 is inserted in putting hole
It is interior.
Wherein, the consistency of thickness of the height and trimmer ontology 100 of casing 310 and elastic foot piece, casing 310 and finishing ball
Piece 200 is threadedly coupled；In addition, elastic foot piece 330 is preferably metal material.
Although the present invention essentially describes above embodiments, example is intended only as to be described, and the present invention is simultaneously
It is without being limited thereto.Those of ordinary skill in the art can make the essential characteristics of a variety of modifications and application without departing from embodiment.For example,
Each component that embodiment is shown in detail can be modified and be run, be believed that and be included in the modification and the relevant difference of application
In protection scope of the present invention as defined in the appended claims.
Embodiment involved in this specification is meant that specially feature, structure or the spy described in conjunction with the embodiment
Property is included at least one embodiment of the present invention.These terms for coming across everywhere in specification are not necessarily directed to same
Embodiment.In addition, it is common all to think that it falls into this field when describing a particular feature, structure, or characteristic in conjunction with any embodiment
In the range of these a particular feature, structure, or characteristics that technical staff combines other embodiments that can realize.
Claims (7)
1. a kind of polishing pad trimmer of adjustable polishing pad face type, which is characterized in that including trimmer ontology, finishing pellet with
And connector, the circumferencial direction of the trimmer ontology are equipped with several putting holes, are equipped with below the side wall of the finishing pellet outer
Screw thread, the connector include casing, annular convex platform and elastic foot piece, and the inner wall of described sleeve pipe is repaired with several for connecting
The internal screw thread of whole device ontology, the top edge of described sleeve pipe have an annular convex platform, and the annular convex platform is for being buckled in described repair
The upper surface of whole device ontology, the lower edge of described sleeve pipe have elastic foot piece, and the end of the elastic foot piece has hook portion, described
Hook portion is used for against the lower surface of the trimmer ontology.
2. the polishing pad trimmer of adjustable polishing pad face type according to claim 1, which is characterized in that described sleeve pipe with
The consistency of thickness of the height of elastic foot piece and the trimmer ontology.
3. the polishing pad trimmer of adjustable polishing pad face type according to claim 1, which is characterized in that the putting hole
It is uniformly distributed on the circumferencial direction of the trimmer ontology.
4. the polishing pad trimmer of adjustable polishing pad face type according to claim 1, which is characterized in that described sleeve pipe with
The finishing pellet is threadedly coupled.
5. the polishing pad trimmer of adjustable polishing pad face type according to claim 1, which is characterized in that the putting hole
Quantity be greater than it is described finishing pellet quantity.
6. the polishing pad trimmer of adjustable polishing pad face type according to claim 1, which is characterized in that the elastic foot
Piece is metal material.
7. the polishing pad trimmer of adjustable polishing pad face type according to claim 1, which is characterized in that the putting hole
Internal diameter it is consistent with the outer diameter of described sleeve pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811595330.4A CN109514434A (en) | 2018-12-25 | 2018-12-25 | A kind of polishing pad trimmer of adjustable polishing pad face type |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811595330.4A CN109514434A (en) | 2018-12-25 | 2018-12-25 | A kind of polishing pad trimmer of adjustable polishing pad face type |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109514434A true CN109514434A (en) | 2019-03-26 |
Family
ID=65797272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811595330.4A Pending CN109514434A (en) | 2018-12-25 | 2018-12-25 | A kind of polishing pad trimmer of adjustable polishing pad face type |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109514434A (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1075898A2 (en) * | 1999-08-13 | 2001-02-14 | Mitsubishi Materials Corporation | Dresser and dressing apparatus |
| JP2010125567A (en) * | 2008-11-28 | 2010-06-10 | Mitsubishi Materials Corp | Cmp pad conditioner |
| CN103330532A (en) * | 2013-07-18 | 2013-10-02 | 厦门瑞尔特卫浴科技股份有限公司 | Preassembled component for rapidly dismounting and mounting toilet lid and toilet |
| CN103671396A (en) * | 2013-12-13 | 2014-03-26 | 惠州柯林电器有限公司 | Buckle structure |
| CN103697034A (en) * | 2013-12-13 | 2014-04-02 | 惠州柯林电器有限公司 | Fastener structure |
| TWI590914B (en) * | 2016-08-09 | 2017-07-11 | 中國砂輪企業股份有限公司 | A chemical mechanical polishing dresser to adjust the height of the abrasive particles |
| CN206998616U (en) * | 2017-03-21 | 2018-02-13 | 江苏吉星新材料有限公司 | A kind of diamond pellet polishing pad finishing wheel tool |
| CN108098590A (en) * | 2017-12-21 | 2018-06-01 | 东莞华晶粉末冶金有限公司 | The trimmer and its dressing method of a kind of grinding and polishing pad |
| CN208084148U (en) * | 2018-03-13 | 2018-11-13 | 上海致领半导体科技发展有限公司 | A kind of polishing cloth conditioner discs |
| CN209364389U (en) * | 2018-12-25 | 2019-09-10 | 上海致领半导体科技发展有限公司 | A kind of polishing pad trimmer of adjustable polishing pad face type |
-
2018
- 2018-12-25 CN CN201811595330.4A patent/CN109514434A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1075898A2 (en) * | 1999-08-13 | 2001-02-14 | Mitsubishi Materials Corporation | Dresser and dressing apparatus |
| JP2010125567A (en) * | 2008-11-28 | 2010-06-10 | Mitsubishi Materials Corp | Cmp pad conditioner |
| CN103330532A (en) * | 2013-07-18 | 2013-10-02 | 厦门瑞尔特卫浴科技股份有限公司 | Preassembled component for rapidly dismounting and mounting toilet lid and toilet |
| CN103671396A (en) * | 2013-12-13 | 2014-03-26 | 惠州柯林电器有限公司 | Buckle structure |
| CN103697034A (en) * | 2013-12-13 | 2014-04-02 | 惠州柯林电器有限公司 | Fastener structure |
| TWI590914B (en) * | 2016-08-09 | 2017-07-11 | 中國砂輪企業股份有限公司 | A chemical mechanical polishing dresser to adjust the height of the abrasive particles |
| CN206998616U (en) * | 2017-03-21 | 2018-02-13 | 江苏吉星新材料有限公司 | A kind of diamond pellet polishing pad finishing wheel tool |
| CN108098590A (en) * | 2017-12-21 | 2018-06-01 | 东莞华晶粉末冶金有限公司 | The trimmer and its dressing method of a kind of grinding and polishing pad |
| CN208084148U (en) * | 2018-03-13 | 2018-11-13 | 上海致领半导体科技发展有限公司 | A kind of polishing cloth conditioner discs |
| CN209364389U (en) * | 2018-12-25 | 2019-09-10 | 上海致领半导体科技发展有限公司 | A kind of polishing pad trimmer of adjustable polishing pad face type |
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