CN111421816B - Multi-axis photocuring 3D micro-nano processing equipment and method for matching resin material with corresponding light source - Google Patents
Multi-axis photocuring 3D micro-nano processing equipment and method for matching resin material with corresponding light source Download PDFInfo
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- CN111421816B CN111421816B CN202010131780.9A CN202010131780A CN111421816B CN 111421816 B CN111421816 B CN 111421816B CN 202010131780 A CN202010131780 A CN 202010131780A CN 111421816 B CN111421816 B CN 111421816B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/10—Processes of additive manufacturing
- B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
- B29C64/124—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified
- B29C64/129—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
- B29C64/227—Driving means
- B29C64/232—Driving means for motion along the axis orthogonal to the plane of a layer
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
- B29C64/227—Driving means
- B29C64/236—Driving means for motion in a direction within the plane of a layer
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
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- B29C64/241—Driving means for rotary motion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
- B29C64/245—Platforms or substrates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
- B29C64/264—Arrangements for irradiation
- B29C64/268—Arrangements for irradiation using laser beams; using electron beams [EB]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
- B29C64/264—Arrangements for irradiation
- B29C64/277—Arrangements for irradiation using multiple radiation means, e.g. micromirrors or multiple light-emitting diodes [LED]
- B29C64/282—Arrangements for irradiation using multiple radiation means, e.g. micromirrors or multiple light-emitting diodes [LED] of the same type, e.g. using different energy levels
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
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Abstract
The invention discloses multi-axis photocuring 3D micro-nano processing equipment and a method thereof for matching a resin material with a corresponding light source, and belongs to the technical field of 3D micro-nano processing. The multi-shaft linkage printing machine comprises a machine body base, four material groove control devices, a central rotating platform, a servo motor, a coupling and four optical machine control devices, wherein the multi-shaft linkage printing machine can improve the printing precision; compared with the current digital micromirror device chip, the mask imaging principle is adopted for imaging, so that large-area printing can be realized while the printing precision is ensured, and the equipment cost is saved. Because the light curing properties of the photosensitive resin are different, light sources with different wavelengths are required to be used for exposure curing, the invention can improve the efficiency of matching the photosensitive resin material with the optimal light source by exposing and printing 1 material groove and alternately switching 4 light machines. And 4 parts can be synchronously exposed and printed.
Description
Technical Field
The invention relates to multi-axis photocuring 3D micro-nano processing equipment and method, belongs to the technical field of 3D micro-nano processing, and particularly relates to photocuring 3D micro-nano processing equipment and method for matching resin materials with corresponding light sources.
Background
With the rapid development of 3D printing and micro-nano technology, in order to meet the requirements of different fields and industries, researchers at home and abroad have developed various micro-nano scale 3D printing processes and printing materials in recent years, and the printing materials are applied to various fields and industries. The 3D printing (RP) technology is an additive manufacturing technology based on a discrete accumulation thought, and is a material accumulation manufacturing method from bottom to top, wherein materials are connected and accumulated layer by layer according to a three-dimensional digital model of a part through a computer technology, so that a solid part is manufactured.
The technology uses photosensitive resin liquid as a raw material, and the photosensitive property of the resin enables the material to be subjected to polymerization reaction and cured after being irradiated by light (mostly ultraviolet wave bands) with special wave bands.
Currently, the photocuring 3D micro-nano printing at home and abroad basically adopts one axial movement and layer-by-layer exposure printing, so that only cylindrical parts can be printed without theoretical errors, and gradient errors exist in inclined plane printing,
the existing photo-curing digital micro-mirror device (DMD) chip has the defects of high cost and small single scanning and printing area. Aiming at the situation, the invention provides multi-axis 3D micro-nano processing equipment and a processing method, the equipment adopts multi-axis linkage to better solve the problem that the printing of the existing photocuring 3D printing equipment has gradient, the printing size precision and the printing quality are improved, large-area scanning printing can be realized and the printing cost is effectively reduced by adopting mask imaging according to the specific product model requirements, and meanwhile, the device is provided with 4 switchable photomachines and 4 printing liquid tanks, so that synchronous printing can be better realized; because each resin material has better corresponding exposure light wave, the device can better complete finding the optimal light source matched with the materials by using a single control variable method.
Disclosure of Invention
The invention aims to provide 3D micro-nano processing equipment and a method which are stable and flexible in structure and suitable for free design.
The invention has the technical innovation points as follows:
1. the printing precision can be improved by multi-axis linkage; for example, hollow conical micro-needles can be rotated by a light machine to realize non-gradient printing.
2. Compared with the current digital micro-mirror device (DMD) chip, the mask imaging principle is adopted, large-area printing can be realized while the printing precision is ensured, and the equipment cost is saved.
3. Because the light curing properties of the photosensitive resin are different, light sources with different wavelengths are required to be used for exposure curing, the invention can improve the efficiency of matching the photosensitive resin material with the optimal light source by exposing and printing 1 material groove and alternately switching 4 light machines. And 4 parts can be synchronously exposed and printed.
The technical scheme adopted by the invention is as follows: a multi-axis photocuring 3D micro-nano processing device for matching a resin material with a corresponding light source comprises a machine body base (10), four trough control devices (9-1, 9-2, 9-3 and 9-4), a central rotating table (29), a servo motor (30), a coupler (21) and four optical machine control devices (13-1, 13-2, 13-3 and 13-4); the four trough control devices are the same device, and the four optical machine control devices are the same device. Four edges of a square machine body base (10) are respectively fixed with an X-axis guide rail bracket (9) through screws, so that four trough control devices (9-1, 9-2, 9-3 and 9-4) are fixed, and a servo motor (30) of the machine body base (10) at the center position accurately controls a center rotating table (29); the machine body base (10) and the servo motor (30) are fixed by threads, and a shaft of the servo motor (30) is connected with the central rotating platform (29) through a coupler (21). The central rotating table (29) rotates to move the optical mechanical devices ((13-1, 13-2, 13-3, 13-4) below the troughs of the corresponding trough control devices (9-1, 9-2, 9-3, 9-4).
Each trough control device comprises a first shaft seat (1), a Z-axis guide rail (2), a Z-axis linear motor (4), a cantilever (3), a workbench (5), a solution trough (19), a solution trough bracket (20), an upright post (6), an X-axis linear motor (8), an X-axis guide rail (7) and an X-axis guide rail bracket (9); the optical machine control device comprises a B-axis servo motor (22), a B-axis coupler (23), a B-axis bracket (15), an optical machine (25), an A-axis servo motor (18), an A-axis coupler (17), an A-axis bracket (16), a Y-axis linear motor (14), a Y-axis guide rail (12), a rotating table (13), a rotating table coupler (21), a rotating servo motor (11) and a second shaft base (1-1). The first shaft seat (1) is fixedly connected with the upright post (6) through screws, the Z-axis guide rail (2) is parallel to and overlapped with the upright post (6) in the vertical direction and is fixedly connected with the upright post through screws, and two ends of a secondary (27) of the Z-axis linear motor are fixed on the shaft seats; the Z-axis linear motor primary (26) and the Z-axis guide rail are guided through clearance fit; the length direction of the cantilever (3) is vertical to the moving direction of the Z-axis linear motor (4), one end of the cantilever (3) is overlapped with the Z-axis linear motor primary (26) and is fixedly connected with the Z-axis linear motor primary through a screw, and the cantilever (3) is fixedly connected with the workbench (5) through a screw; the solution tank bracket is vertical to the upright post (6) and is fastened and connected by a screw; the solution tank (19) is in clearance fit with the solution tank bracket (20), and the movement of the workbench on the Z axis is realized by controlling the working state of the Z axis linear motor (4); the upright post is tightly connected with the primary level of the X-axis linear motor through screws, and two ends of the secondary level of the X-axis linear motor are fixed on the shaft seat; the shaft seats are fixed at two ends of an X-axis guide rail bracket (9) through screws, the primary X-axis linear motor and the X-axis guide rail are guided through clearance fit, and the X-axis guide rail (7) is parallel to and coincided with the X-axis guide rail bracket; the long edges of the X-axis guide rail bracket are overlapped with one edge of the machine body base (10), two ends of the X-axis guide rail bracket are overlapped with two adjacent parallel edges of the X-axis guide rail bracket, and the X-axis guide rail bracket is fixed on the machine body base (10) by screws;
the rotating shaft of the optical machine (25) is in clearance fit with the shaft hole of the A-shaft bracket (16), and the shaft of the A-shaft servo motor (18) and the rotating shaft of the optical machine (25) are on the same axis; the shaft A is tightly connected with a shaft coupling (17) for transmission, and the shaft A servo motor is tightly connected with the shaft A bracket through a bolt; the rotation of a light source emitted by the optical machine (25) on the B axis is realized by controlling the working state of the A axis servo motor (18);
the rotating shaft of the A-shaft support (16) is in clearance fit with the shaft hole of the B-shaft support (15), the shaft of the B-shaft servo motor (22) and the rotating shaft of the B-shaft support (15) are on the same axis and are in fastening connection transmission by a B-shaft coupling (23), the B-shaft servo motor (22) and the B-shaft support (15) are in fastening connection through bolts, and the rotation of the optical machine (25) on the B shaft is realized by controlling the working state of the B-shaft servo motor (22);
the B-axis support (15) is fixedly connected with the primary axis of the Y-axis linear motor through screws, the two ends of the secondary axis of the Y-axis linear motor are fixed on a second axis seat (1-1), the axis of the secondary axis coincides with the symmetry line of the rotating table, the axis seats are fixed on the rotating table (13) through screws, the Y-axis guide rails (12) are symmetrically arranged on the two sides of the axis of the rotating table and are fixedly connected through screws, and the movement of the optical machine (25) on the Y axis is realized by controlling the working state of the Y-axis linear motor (14); the shaft of the rotating platform (13) and the shaft of the rotating servo motor (11) are on the same straight line and are fixedly connected and transmitted by a rotating shaft coupler (21), the rotating servo motor (11) and the central rotating platform (29) are fixedly connected at a reserved position by screws, the rotation of the optical machine on the horizontal plane is realized by controlling the working state of the rotating servo motor (11), and the corresponding sequence of the four material groove control devices (9-1, 9-2, 9-3 and 9-4) and the four optical machine control devices (13-1, 13-2, 13-3 and 13-4) is switched;
the X-axis linear motor (8), the Y-axis linear motor (14) and the Z-axis linear motor (4) belong to linear motors, and the linear motors are transmission devices which directly convert electric energy into linear motion mechanical energy without any intermediate conversion mechanism, so that the precision is high, and the repeated positioning precision can generally reach about 1 um; the first shaft seats (1) matched with the X-axis linear motor (8), the Y-axis linear motor (14) and the Z-axis linear motor (4) belong to the same shaft seat; the mask belongs to a photoetching mask; the highest precision of the digital micromirror device chip is 5.4 um.
The linear motor has high transmission precision, and the repeated positioning precision can reach the micron level; the solution tank is made of transparent resin material; the shaft guide rail is of a T-shaped structure; the servo motor rotates only within 0 to 360 degrees.
The invention has the technical advantages that:
1. because the photocuring properties of the photosensitive resin are different, light sources with different wavelengths are required to be used for exposure and curing, the photosensitive resin material can be used for exposure and printing through 4 material tanks, 4 photomasks are switched in turn, and the efficiency of matching the photosensitive resin material with the optimal light source can be improved by adopting a single control variable method.
The specific printing process comprises the following steps: the four light machine control devices are debugged to output laser with different wavelengths, the curing exposure light wave of the liquid photosensitive resin is generally between 365nm and 405nm (such as 365nm, 380nm, 395nm and 400nm), a certain liquid photosensitive resin material is put into the four solution tanks to realize synchronous printing, the printing effect is detected, and the optimal light source of the photosensitive resin material is found.
2. The technology can realize micro-nano level processing, and the technology can realize the micro-nano level of precision due to the fact that the repeated positioning precision of the linear motor can reach the micron level (about 1 um), and the size of the mask plate can easily reach the submicron level (0.1 um-1 um called submicron).
3. The technology can realize multi-axis linkage, further improve the printing precision, and realize synchronous exposure printing of 4 parts and improve the printing efficiency.
The specific printing process comprises the following steps: the four solution tanks realize synchronous printing, the printing process is consistent, the printing process in a single solution tank is only introduced here, a mask plate of a corresponding model is placed in a light machine of 3D printing equipment, a workbench (5) driven by a Z-axis linear motor enters a tank (9) with a transparent bottom end until the bottom surface of the tank and the bottom surface of the tank keep a vertical gap of 25-100 mu m (determined by the thickness of a slice layer during printing), and projection light of a projector is contacted with liquid photosensitive resin after penetrating through the bottom of the transparent tank. At the moment, the liquid photosensitive resin in optical contact is instantly polymerized and cured, and the liquid photosensitive resin not in optical contact is still kept in a liquid state, so that one layer of the liquid photosensitive resin is formed; then a Z-axis linear motor (3) drives the workbench to move upwards by 25-100 mu m (determined by the thickness of the slicing layer during printing) to form the next layer; the processes are alternately repeated, and the photocuring 3D printing part forming is realized through superposition manufacturing. Meanwhile, the rotation of a light source emitted by the optical machine on an A axis or a B axis is realized by controlling the working states of the A axis servo motor (18) and the B axis servo motor (22); the rotating table (13) realizes that the optical mechanical device rotates in the horizontal plane by controlling the working state of the rotary servo motor (11); controlling an X-axis linear motor (8) and a Y-axis linear motor (14) to realize the movement of printing on a horizontal plane; thereby forming a plurality of degrees of freedom combined control molding;
4. in the optical mechanical device part, because a (digital micro-mirror device, DMD) chip has the defects of low resolution and high price, the technology adopts mask imaging to replace DMD chip imaging proposed by the current scholars, further improves the printing precision and realizes large-area scanning; because the size of DMD pixel is mostly 14 μm × 14 μm (or 16 μm × 16 μm), the printing precision is further reduced by the zoom lens, so that the printing area is reduced, the printing of large parts cannot meet the requirements of precision and size, the mask technology is mature, the precision is easy to realize submicron or even nanometer, and the defect can be better overcome.
Drawings
FIG. 1 is a view showing the overall structure of the apparatus of the present invention
FIG. 2 is a partial structural view of the apparatus of the present invention
FIG. 3 is a partial structural view (II) of the apparatus of the present invention
Fig. 4 is a light engine control device mechanism diagram of the device of the present invention.
Fig. 5 is a schematic view of a linear motor structure.
FIG. 6 is a diagram of the optical-mechanical components and flow chart of the present invention.
Detailed Description
The invention is further described with reference to the above figures.
A multi-axis photocuring 3D micro-nano processing device for matching resin materials with corresponding light sources,
the mechanical arm comprises a machine body base (10), four trough control devices (9-1, 9-2, 9-3 and 9-4), a central rotating table (29), a servo motor (30), a coupler (21) and four optical machine control devices (13-1, 13-2, 13-3 and 13-4), wherein the four trough control devices and the four optical machine control devices belong to the same device. Four sides of a square machine body base (10) are respectively fixed with an X-axis guide rail support (9) through screws, so that four trough control devices (9-1, 9-2, 9-3 and 9-4) are fixed, a servo motor (30) of the machine body base (10) at the center position accurately controls a center rotating table (29), wherein the machine body base (10) and the servo motor (30) are fixed through threads, and a shaft of the servo motor (30) is connected with the center rotating table (29) through a coupler (21). The central rotating table (29) rotates to move the optical mechanical devices ((13-1, 13-2, 13-3, 13-4) below the troughs of the corresponding trough control devices (9-1, 9-2, 9-3, 9-4).
The trough control device comprises a first shaft seat (1), a Z-axis guide rail (2), a Z-axis linear motor (4), a cantilever (3), a workbench (5), a solution trough (19), a solution trough bracket (20), an upright post (6), an X-axis linear motor (8), an X-axis guide rail (7) and an X-axis guide rail bracket (9); the optical machine control device comprises a B-axis servo motor (22), a B-axis coupler (23), a B-axis bracket (15), an optical machine (25), an A-axis servo motor (18), an A-axis coupler (17), an A-axis bracket (16), a Y-axis linear motor (14), a Y-axis guide rail (12), a rotating table (13), a rotating table coupler (21), a rotating servo motor (11) and a second shaft base (1-1). The first shaft seat (1) is fixedly connected with the upright post (6) through screws, the Z-axis guide rail (2) is parallel to and overlapped with the upright post (6) in the vertical direction and is fixedly connected with the upright post through screws, and two ends of a secondary (27) of the Z-axis linear motor are fixed on the shaft seats; the Z-axis linear motor primary (26) and the Z-axis guide rail are guided through clearance fit; the length direction of the cantilever (3) is vertical to the moving direction of the Z-axis linear motor (4), one end of the cantilever (3) is overlapped with the Z-axis linear motor primary (26) and is fixedly connected with the Z-axis linear motor primary through a screw, and the cantilever (3) is fixedly connected with the workbench (5) through a screw; the solution tank bracket is vertical to the upright post (6) and is fastened and connected by a screw; the solution tank (19) is in clearance fit with the solution tank bracket (20) and can be taken out, and the movement of the workbench on the Z axis is realized by controlling the working state of the Z axis linear motor (4);
the upright post is tightly connected with the primary level of the X-axis linear motor through screws, and two ends of the secondary level of the X-axis linear motor are fixed on the shaft seat; the shaft seats are fixed at two ends of an X-axis guide rail bracket (9) through screws, the primary X-axis linear motor and the X-axis guide rail are guided through clearance fit, and the X-axis guide rail (7) is parallel to and coincided with the X-axis guide rail bracket; the long edges of the X-axis guide rail bracket are overlapped with one edge of the machine body base (10), two ends of the X-axis guide rail bracket are overlapped with two adjacent parallel edges of the X-axis guide rail bracket, and the X-axis guide rail bracket is fixed on the machine body base (10) by screws;
the rotating shaft of the optical machine (25) is in clearance fit with the shaft hole of the A-shaft bracket (16), and the shaft of the A-shaft servo motor (18) and the rotating shaft of the optical machine (25) are on the same axis; the shaft A is tightly connected with a shaft coupling (17) for transmission, and the shaft A servo motor is tightly connected with the shaft A bracket through a bolt; the rotation of a light source emitted by the optical machine (25) on the B axis is realized by controlling the working state of the A axis servo motor (18);
the rotating shaft of the A-shaft support (16) is in clearance fit with the shaft hole of the B-shaft support (15), the shaft of the B-shaft servo motor (22) and the rotating shaft of the B-shaft support (15) are on the same axis and are in fastening connection transmission by a B-shaft coupling (23), the B-shaft servo motor (22) and the B-shaft support (15) are in fastening connection through bolts, and the rotation of the optical machine (25) on the B shaft is realized by controlling the working state of the B-shaft servo motor (22);
the B-axis support (15) is fixedly connected with the primary axis of the Y-axis linear motor through screws, the two ends of the secondary axis of the Y-axis linear motor are fixed on a second axis seat (1-1), the axis of the secondary axis coincides with the symmetry line of the rotating table, the axis seats are fixed on the rotating table (13) through screws, the Y-axis guide rails (12) are symmetrically arranged on the two sides of the axis of the rotating table and are fixedly connected through screws, and the movement of the optical machine (25) on the Y axis is realized by controlling the working state of the Y-axis linear motor (14); the shaft of the rotating platform (13) and the shaft of the rotating servo motor (11) are on the same straight line and are fixedly connected and transmitted by a rotating shaft coupler (21), the rotating servo motor (11) and the central rotating platform (29) are fixedly connected at a reserved position by screws, the rotation of the optical machine on the horizontal plane is realized by controlling the working state of the rotating servo motor (11), and the corresponding sequence of the four material groove control devices (9-1, 9-2, 9-3 and 9-4) and the four optical machine control devices (13-1, 13-2, 13-3 and 13-4) is switched;
the optical machine (25) comprises the following components and a flow chart, as shown in fig. 5, the main functions of each part are as follows:
the X-axis linear motor (8), the Y-axis linear motor (14) and the Z-axis linear motor (4) belong to linear motors, and the linear motors are transmission devices which directly convert electric energy into linear motion mechanical energy without any intermediate conversion mechanism, so that the precision is high, and the repeated positioning precision can generally reach about 1 um; the first shaft seats (1) matched with the X-axis linear motor (8), the Y-axis linear motor (14) and the Z-axis linear motor (4) belong to the same shaft seat; the mask belongs to a photoetching mask, the precision of the domestic mask can reach submicron level, and the imported mask can reach nanoscale; the DMD chip has a highest precision of 5.4um, which is one of the DMD supply companies with the highest global maximum precision, and is developed by the American TI company (Texas instruments).
The linear motor has high transmission precision, and the repeated positioning precision can reach the micron level; the solution tank is made of transparent resin material; the shaft guide rail is of a T-shaped structure; the servo motor only rotates within 0 to 360 degrees; the structure of the linear motor is shown in figure 6.
The invention has the technical advantages that: because the photocuring properties of the photosensitive resin are different, light sources with different wavelengths are required to be used for exposure and curing, the photosensitive resin material can be used for exposure and printing through 4 material tanks, 4 photomasks are switched in turn, and the efficiency of matching the photosensitive resin material with the optimal light source can be improved by adopting a single control variable method.
The specific printing process comprises the following steps: the four light machine control devices are debugged to output laser with different wavelengths, the curing exposure light wave of the liquid photosensitive resin is generally between 365nm and 405nm (such as 365nm, 380nm, 395nm and 400nm), a certain liquid photosensitive resin material is put into the four solution tanks to realize synchronous printing, the printing effect is detected, and the optimal light source of the photosensitive resin material is found. The technology can realize micro-nano level processing, and the technology can realize the micro-nano level of precision due to the fact that the repeated positioning precision of the linear motor can reach the micron level (about 1 um), and the size of the mask plate can easily reach the submicron level (0.1 um-1 um called submicron). The technology can realize multi-axis linkage, further improve the printing precision, and realize synchronous exposure printing of 4 parts and improve the printing efficiency.
The specific printing process comprises the following steps: the four solution tanks realize synchronous printing, the printing process is consistent, the printing process in a single solution tank is only introduced here, a mask plate of a corresponding model is placed in a light machine of 3D printing equipment, a workbench (5) driven by a Z-axis linear motor enters a tank (9) with a transparent bottom end until the bottom surface of the tank and the bottom surface of the tank keep a vertical gap of 25-100 mu m (determined by the thickness of a slice layer during printing), and projection light of a projector is contacted with liquid photosensitive resin after penetrating through the bottom of the transparent tank. At the moment, the liquid photosensitive resin in optical contact is instantly polymerized and cured, and the liquid photosensitive resin not in optical contact is still kept in a liquid state, so that one layer of the liquid photosensitive resin is formed; then a Z-axis linear motor (3) drives the workbench to move upwards by 25-100 mu m (determined by the thickness of the slicing layer during printing) to form the next layer; the processes are alternately repeated, and the photocuring 3D printing part forming is realized through superposition manufacturing. Meanwhile, the rotation of a light source emitted by the optical machine on an A axis or a B axis is realized by controlling the working states of the A axis servo motor (18) and the B axis servo motor (22); the rotating table (13) realizes that the optical mechanical device rotates in the horizontal plane by controlling the working state of the rotary servo motor (11); controlling an X-axis linear motor (8) and a Y-axis linear motor (14) to realize the movement of printing on a horizontal plane; thereby forming a plurality of degrees of freedom combined control molding;
in the optical mechanical device part, because a (digital micro-mirror device, DMD) chip has the defects of low resolution and high price, the technology adopts mask imaging to replace DMD chip imaging proposed by the current scholars, further improves the printing precision and realizes large-area scanning; because the size of DMD pixel is mostly 14 μm × 14 μm (or 16 μm × 16 μm), the printing precision is further reduced by the zoom lens, so that the printing area is reduced, the printing of large parts cannot meet the requirements of precision and size, the mask technology is mature, the precision is easy to realize submicron or even nanometer, and the defect can be better overcome.
The main direction of use of this device is the effect that produces between different light and the different photocuring material of test. A multi-axis photocuring 3D micro-nano processing method for matching resin materials with corresponding light sources is characterized in that at most four liquid materials and four light rays are simultaneously tested by one device. Firstly, selecting a liquid material to be tested, and pouring the selected resin liquid material into a solution tank; the method comprises the steps of guiding a three-dimensional model with designed parameters and sliced well into equipment, selecting a model required by the equipment, setting different light and material combinations, starting the equipment by pressing down, enabling an X axis, a Y axis, a Z axis, an A axis and a B axis of the equipment to return to the origin of a reference coordinate, adjusting the position of the corresponding light and material combination by a central rotating platform, processing the equipment by a processor according to the set model, enabling a lens to emit light, enabling the material irradiated by the light to be rapidly solidified, enabling the material in a lightless place to be in an original state, enabling the equipment to move in the X axis, the Y axis and the Z axis and enabling the light emitted by the lens to rotate around the A axis and the B axis according to the requirement of three-dimensional model processing of a product, and accordingly achieving five-axis linkage. When the next layer is processed, the workbench automatically ascends one layer according to the parameters to process the next layer, the equipment stops working after the last layer is processed, the part is completed at the moment, the part stops on the liquid material, the worker can take down the part at the moment, and when the next part is printed, the worker only needs to press the start key.
Note that: the origin of the reference coordinate of the device is X, Y, A, B axes, so that the lens is opposite to the center right below the solution tank and the position of the workbench coincident with the bottom of the solution tank.
Claims (3)
1. A multiaxis photocuring 3D that resin material matches corresponding light source usefulness receives processing equipment a little which characterized in that: the machine comprises a machine body base (10), four trough control devices, a central rotating platform (29), a servo motor (30), a coupler (21) and four optical-mechanical control devices; the four trough control devices are the same device, and the four optical-mechanical control devices are the same device; four sides of a square machine body base (10) are respectively fixed with an X-axis guide rail bracket (9) through screws, so that a servo motor (30) which fixes the machine body base (10) of the four trough control devices at the central position controls a central rotating table (29); the machine body base (10) and the servo motor (30) are fixed by threads, and a shaft of the servo motor (30) is connected with the central rotating platform (29) through a coupler (21); the central rotating platform (29) rotates to move the optical mechanical device to the position below the trough of the corresponding trough control device;
each trough control device comprises a first shaft seat (1), a Z-axis guide rail (2), a Z-axis linear motor (4), a cantilever (3), a workbench (5), a solution trough (19), a solution trough bracket (20), an upright post (6), an X-axis linear motor (8), an X-axis guide rail (7) and an X-axis guide rail bracket (9); the optical machine control device comprises a B-axis servo motor (22), a B-axis coupler (23), a B-axis bracket (15), an optical machine (25), an A-axis servo motor (18), an A-axis coupler (17), an A-axis bracket (16), a Y-axis linear motor (14), a Y-axis guide rail (12), a rotating platform (13), a rotating platform coupler, a rotating servo motor (11) and a second shaft seat (1-1); the first shaft seat (1) is fixedly connected with the upright post (6) through screws, the Z-axis guide rail (2) is parallel to and overlapped with the upright post (6) in the vertical direction and is fixedly connected with the upright post through screws, and two ends of a secondary (27) of the Z-axis linear motor are fixed on the first shaft seat (1); the Z-axis linear motor primary (26) and the Z-axis guide rail are guided through clearance fit; the length direction of the cantilever (3) is vertical to the moving direction of the Z-axis linear motor (4), one end of the cantilever (3) is overlapped with the Z-axis linear motor primary (26) and is fixedly connected with the Z-axis linear motor primary through a screw, and the cantilever (3) is fixedly connected with the workbench (5) through a screw; the solution tank bracket is vertical to the upright post (6) and is fastened and connected by a screw; the solution tank (19) is in clearance fit with the solution tank bracket (20), and the movement of the workbench on the Z axis is realized by controlling the working state of the Z axis linear motor (4); the second shaft seats (1-1) are fixed at two ends of an X-axis guide rail bracket (9) through screws, the primary X-axis linear motor and the X-axis guide rail are guided through clearance fit, and the X-axis guide rail (7) is parallel to and coincided with the X-axis guide rail bracket; the long edges of the X-axis guide rail bracket are overlapped with one edge of the machine body base (10), two ends of the X-axis guide rail bracket are overlapped with two adjacent parallel edges of the X-axis guide rail bracket, and the X-axis guide rail bracket is fixed on the machine body base (10) by screws;
the upright post is tightly connected with the primary shaft of the X-axis linear motor through screws, and two ends of the secondary shaft of the X-axis linear motor are fixed on a second shaft seat (1-1);
the rotating shaft of the optical machine (25) is in clearance fit with the shaft hole of the A-shaft bracket (16), and the shaft of the A-shaft servo motor (18) and the rotating shaft of the optical machine (25) are on the same axis; the shaft A is tightly connected with a shaft coupling (17) for transmission, and the shaft A servo motor is tightly connected with the shaft A bracket through a bolt; the rotation of a light source emitted by the optical machine (25) on an A axis is realized by controlling the working state of the A axis servo motor (18);
the rotating shaft of the A-shaft support (16) is in clearance fit with the shaft hole of the B-shaft support (15), the shaft of the B-shaft servo motor (22) and the rotating shaft of the B-shaft support (15) are on the same axis and are in fastening connection transmission by a B-shaft coupling (23), the B-shaft servo motor (22) and the B-shaft support (15) are in fastening connection through bolts, and the rotation of the optical machine (25) on the B shaft is realized by controlling the working state of the B-shaft servo motor (22);
the B-axis support (15) is fixedly connected with the primary axis of the Y-axis linear motor through screws, the two ends of the secondary axis of the Y-axis linear motor are fixed on a second axis seat (1-1), the axis of the secondary axis coincides with the symmetry line of the rotating table, the axis seats are fixed on the rotating table (13) through screws, the Y-axis guide rails (12) are symmetrically arranged on the two sides of the axis of the rotating table and are fixedly connected through screws, and the movement of the optical machine (25) on the Y axis is realized by controlling the working state of the Y-axis linear motor (14); the shaft of the rotating platform (13) and the shaft of the rotating servo motor (11) are on the same straight line and are in fastening connection transmission through a rotating shaft coupler, the rotating servo motor (11) and the central rotating platform (29) are in fastening connection at a reserved position through screws, the rotation of the optical machine on the horizontal plane is realized by controlling the working state of the rotating servo motor (11), and the corresponding sequence of the four material groove control devices and the corresponding sequence of the four optical machine control devices are switched.
2. The multi-axis photocuring 3D micro-nano processing equipment for matching the resin material with the corresponding light source according to claim 1, wherein the equipment comprises: the X-axis linear motor (8), the Y-axis linear motor (14) and the Z-axis linear motor (4) are linear motors; the shaft seats matched with the X-axis linear motor (8), the Y-axis linear motor (14) and the Z-axis linear motor (4) belong to the same type of shaft seat.
3. The multi-axis photocuring 3D micro-nano processing method for matching the resin material with the corresponding light source by using the equipment of claim 1, which is characterized in that: one device supports at most four liquid materials and four lights to be tested simultaneously; firstly, selecting a liquid material to be tested, and pouring the selected resin liquid material into a solution tank; the method comprises the steps of guiding a three-dimensional model with designed parameters and sliced into a device, selecting a needed model, setting different light and material combinations, starting the model by pressing, returning an X axis, a Y axis, a Z axis, an A axis and a B axis of the device to a reference coordinate origin, adjusting the position of the corresponding light and material combination by a central rotating platform, processing the model by a processor in the device according to the set model, enabling a lens to emit light, enabling the material irradiated by the light to be rapidly solidified, enabling the material in a lightless place to be in an original state, and enabling the part to move in the X axis, the Y axis and the Z axis and the light emitted by the lens to rotate around the A axis and the B axis according to the requirement of the three-dimensional model processing of a product, thereby realizing five-axis linkage; when the next layer is processed, the workbench automatically ascends one layer according to the parameters to process the next layer, when the last layer is processed, the equipment stops working, the part is finished, the part stops on the liquid material, the part is taken down, and when the next part is printed, the start key is pressed.
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