CN111416525A - Inductive energy storage type PCB copper plating high-speed positive and negative pulse power supply - Google Patents
Inductive energy storage type PCB copper plating high-speed positive and negative pulse power supply Download PDFInfo
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- CN111416525A CN111416525A CN202010347083.7A CN202010347083A CN111416525A CN 111416525 A CN111416525 A CN 111416525A CN 202010347083 A CN202010347083 A CN 202010347083A CN 111416525 A CN111416525 A CN 111416525A
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/22—Conversion of dc power input into dc power output with intermediate conversion into ac
- H02M3/24—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
- H02M3/28—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
- H02M3/325—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal
- H02M3/335—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/33569—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements
- H02M3/33576—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements having at least one active switching element at the secondary side of an isolation transformer
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/0003—Details of control, feedback or regulation circuits
- H02M1/0009—Devices or circuits for detecting current in a converter
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/0003—Details of control, feedback or regulation circuits
- H02M1/0012—Control circuits using digital or numerical techniques
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/0048—Circuits or arrangements for reducing losses
- H02M1/0054—Transistor switching losses
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B70/00—Technologies for an efficient end-user side electric power management and consumption
- Y02B70/10—Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes
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Abstract
The invention provides an inductive energy storage type PCB copper plating high-speed positive and negative pulse power supply which comprises a positive power supply direct current power supply, a reverse pulse inductive energy storage charging power supply, an energy storage inductor module, a positive and negative pulse switching power module and a positive and negative pulse power supply digital control system. The invention solves the systematic problems of low electric energy conversion efficiency, low system stability, output current distortion and the like in the conventional realization scheme of using the positive and negative pulse power supply for PCB copper plating, realizes a high-efficiency and reliable positive and negative pulse power supply output system, greatly reduces the switching loss compared with the prior art scheme, also improves the reliability of a switching machine, and has the overall efficiency of 85-92%; the output current control robustness is high, and the influence of the inductance and the resistance of a lead between a power supply and a load is fully overcome, so that an undistorted reverse pulse waveform is generated.
Description
Technical Field
The invention relates to the technical field of pulse power, in particular to an inductive energy storage type PCB copper plating high-speed positive and negative pulse power supply.
Background
With the popularization and application of the current 5G communication technology, new process requirements are met for printed circuit boards (pcbs) as carriers of electronic components. Copper plating is used as an important link in the manufacturing process of the PCB, and the new process requirements comprise: the blind hole filling process has the advantages of thickened plate thickness, thinner line width, higher and higher thickness-diameter ratio and high aspect ratio, and the carrier plate is filled with through holes and the like.
The traditional copper electroplating process of the PCB is processed and produced by a direct current power supply, and cannot meet the process requirements of a 5G PCB. At present, the pulse electroplating process can meet the requirement of a 5G PCB copper plating process, and the core of the pulse electroplating process is positive and negative pulse power supply equipment. In order to meet the requirement of the pulse electroplating process, the peak value of the pulse current is required to be higher and higher, and according to different applications, the output current range is 400-5000A, and the pulse time width needs to reach the control precision of 0.1 ms. Therefore, with the development of 5G and other electronic industries, energy-saving, efficient and reliable pulse power supply equipment is an important link for supporting the development of the electronic industry.
The technical scheme of the currently adopted positive and negative pulse power supply in the PCB industry is a two-step power conversion mode, and the power conversion process is as follows: the power conversion for the first time is realized by converting high-voltage alternating current of a power grid commercial power into low-voltage direct current with constant voltage through a rectification power supply device, and the main mode is that high-frequency (15-20Khz) inversion is carried out through an IGBT switching device, and then the conversion from the commercial power into the low-voltage direct current is realized through a high-frequency transformer and a rectification circuit. The second power conversion is the output of the inversion of low-voltage direct current into set positive and negative pulse current through a high-frequency bridge circuit, and the main mode is that a bridge circuit (a full-bridge or half-bridge circuit is adopted according to different power supply forms) formed by connecting a large number of discrete Mosfet devices in parallel is used for high-frequency chopping (50-100Khz), and then the high-frequency chopping is output to a load 6 of a PCB electroplating tank body through a filter network consisting of an inductor and a capacitor. There are three main disadvantages of the above solution:
(1) the power conversion efficiency of the power supply is low:
in view of the chemical potential requirement of the copper electroplating, the output voltage of the copper electroplating power supply is generally below 4V, and the output current can reach 400-5000A, so the copper electroplating power supply belongs to power supply equipment with low voltage and large current. The existing power supply scheme adopts twice power conversion, and the efficiency of the first conversion when converting from commercial power to low-voltage direct current is generally between 80 and 90 percent in the low-voltage high-current conversion occasion. And because the dynamic response of 100us level needs to be realized, the switching frequency of the bridge type chopper circuit needs to reach 50-100Khz, and the on-off current is KA level, so the secondary power conversion efficiency is less than 80%. The overall system efficiency is between 64-72%, 36-28% of the power is consumed with heat, and the plant is required to have a larger power cooling system for cooling, thereby consuming more power.
(2) The power system has a plurality of fault points:
from the perspective of the power devices used in the power supply, both the IGBT and Mosfet are potentially at risk of failure because they are in a high frequency switching state. Moreover, since the range of the output current needs to reach 5000A, even according to the Infineon (english flying ice) Mosfet low-voltage product line of the german power semiconductor enterprise which is the world leader at present, more than 400 discrete mosfets need to be connected in parallel to realize a full-bridge or half-bridge chopper circuit, so that the reliability of the system is reduced along with the increase of the number of parallel elements.
(3) The output current control robustness is low:
the copper plating production of PCBs requires a stable current output. The existing output current control scheme is realized by adopting a high-frequency chopper circuit, and the dynamic feedback control of the output current is realized by a high-speed feedback circuit. In each application scenario, the inductance of the output line from the power supply to the tank body, and the change of the load capacitance and resistance on the tank body cause a large influence on the closed-loop control, so that the robustness of the closed loop of the system control is not strong, and finally the overshoot of the output current or the under-output distortion condition occurs, which directly causes the change of the copper crystal and the defect of the line.
Disclosure of Invention
In order to solve the technical problems, the invention provides an inductive energy storage type PCB copper plating high-speed positive and negative pulse power supply in a first aspect, which comprises a positive power supply direct current power supply 1, a reverse pulse inductive energy storage charging power supply 2, an energy storage inductive module 3, a positive and negative pulse switching power module 4 and a positive and negative pulse power supply digital control system 5; the positive and negative pulse power supply digital control system 5 controls the current output of the forward power supply direct current power supply 1 and the reverse pulse inductance energy storage charging power supply 2 in real time through interfaces; the reverse pulse inductance energy storage charging power supply 2 charges the energy storage inductance module 3 with constant current; and the positive and negative pulse switching power module 4 switches the output of the positive power supply direct current power supply 1 and the output of the energy storage inductance module 3 at a high speed according to the positive and negative pulse time set by the positive and negative pulse power supply digital control system 5.
As a preferred technical solution, the energy storage inductance module 3 outputs a reverse pulse current to the load 6 in a reverse output phase of a pulse cycle.
As a preferred technical scheme, the positive and negative pulse power supply digital control system 5 is also connected with an industrial control system of an upper computer through a digital interface.
As a preferred technical solution, the energy storage inductance module 3 includes a primary side current detection CT1, an energy storage transformer T1, and a first switching tube S1; one end of the primary side current detection CT1 and one end of the first switching tube S1 are connected with the reverse pulse inductance energy storage charging power supply 2, and the other end of the primary side current detection CT1 and the other end of the first switching tube S1 are connected with the energy storage transformer T1;
as a preferred technical solution, the positive and negative pulse switching power module 4 includes a reverse pulse output component and a forward pulse output component; the reverse pulse output assembly and the forward pulse output assembly are connected through a load 6.
As a preferable technical solution, the reverse pulse output assembly includes a secondary side current detection CT2, a second switch tube S2, and an isolation device.
As a preferred technical solution, one end of the second switching tube (S2) is connected with one end of the isolation device; the other end of the second switching tube (S2) is connected with an energy storage transformer (T1); one end of the secondary side current detection (CT2) is connected with an energy storage transformer (T1); the other end of the isolation device and the other end of the secondary side current detection (CT2) output reverse pulses and are connected with a load (6).
As a preferred technical solution, the forward pulse output assembly includes a third switching tube S3 and a current detection device CT 3.
Preferably, one end of the third switching tube S3 and one end of the current detection device CT3 are connected to the forward power supply dc power supply 1, and the other end outputs a forward pulse and is connected to the load 6.
The invention provides an application of the inductive energy storage type PCB copper plating high-speed positive and negative pulse power supply, which is used in the field of PCB copper plating.
Has the advantages that: the inductive energy storage type PCB copper plating high-speed positive and negative pulse power supply solves the systematic problems of low electric energy conversion efficiency, low system stability, output current distortion and the like in the conventional PCB copper plating realization scheme using the positive and negative pulse power supply, and realizes a high-efficiency and reliable positive and negative pulse power supply output system. The conversion efficiency of the reverse pulse inductance energy storage charging power supply and the forward power supply direct current power supply in the forward and reverse pulse power supply can reach 90-95%, compared with the prior art, the switching loss is greatly reduced, the reliability of a switching machine is also improved, and the overall efficiency can reach 85-92%; compared with other energy storage modes such as capacitance energy storage and the like, the electromagnetic energy storage mode is adopted, the capacity attenuation and service life problems do not exist, the output current control robustness is high, the influence of the inductance and the resistance of a lead between a power supply and a load is fully overcome, and an undistorted reverse pulse waveform is generated.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 shows the system structure of the inductive energy storage type PCB copper plating high-speed positive and negative pulse power supply of the invention.
Fig. 2 is a circuit structure diagram of the energy storage inductor module and the positive and negative pulse switching power module according to the present invention, and the isolation diode D1 is used as an isolation device.
Fig. 3 is a circuit structure diagram of the energy storage inductor module and the positive and negative pulse switching power module according to the present invention, and the isolation mosfet 4 is used as an isolation device.
Fig. 4 is an HDI board plating output waveform of the inductive energy storage PCB copper plating high-speed positive and negative pulse power supply in embodiment 1 of the invention.
FIG. 5 is a diagram showing an output waveform of the inductive energy storage type PCB copper plating high-speed positive and negative pulse power supply adopting a dual-output type for wafer electroplating in embodiment 1 of the present invention
Reference numerals: 1-forward power supply of a direct current power supply; 2-reverse pulse inductance energy storage charging source; 3-an energy storage inductance module; 4-positive and negative pulse switching power module; 5-positive and negative pulse power supply digital control system; 6-load; CT 1-primary current detection; CT 2-secondary current detection; CT 3-current detection device; t1-energy storage transformer; s1-a first switch tube; s2-a second switch tube; s3-a third switch tube; d1-isolation diode; s4-isolate the Mosfet.
Detailed Description
The present invention will be further understood in conjunction with the following detailed description of preferred embodiments of the invention. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. To the extent that a definition of a particular term disclosed in the prior art is inconsistent with any definitions provided herein, the definition of the term provided herein controls.
As used herein, a feature that does not define a singular or plural form is also intended to include a plural form of the feature unless the context clearly indicates otherwise. It will be further understood that the term "comprising," as used herein, is synonymous with "including," "comprising," "having," "including," and/or "containing," and the like, when used in this specification, means that the recited composition, step, method, article, or apparatus, but does not preclude the presence or addition of one or more other compositions, steps, methods, articles, or apparatuses. Further, when describing embodiments of the present application, the use of "preferred," "preferably," "more preferred," etc., refers to embodiments that may provide certain benefits under certain circumstances. However, other embodiments may be preferred, under the same or other circumstances. In addition, the recitation of one or more preferred embodiments does not imply that other embodiments are not useful, nor is it intended to exclude other embodiments from the scope of the invention.
The meaning of "and/or" in the present invention means that the respective single or both of them exist individually or in combination.
The meaning of "one end and the other end" in the present invention means that when a reader faces the drawings, one side of the reader is the one end, and the other side of the reader is the other end, and is not a specific limitation on the mechanism of the apparatus of the present invention.
The term "connected" as used herein may mean either a direct connection between the components or an indirect connection between the components via other components.
The words "preferred", "more preferred", and the like, in the present invention refer to embodiments of the invention that may provide certain benefits, under certain circumstances. However, other embodiments may be preferred, under the same or other circumstances. Furthermore, the recitation of one or more preferred embodiments does not imply that other embodiments are not useful, nor is it intended to exclude other embodiments from the scope of the invention.
In order to solve the technical problem, a first aspect of the invention provides an inductive energy storage type PCB copper plating high-speed positive and negative pulse power supply, which comprises a positive power supply direct current power supply 1, a reverse pulse inductive energy storage charging power supply 2, an energy storage inductive module 3, a positive and negative pulse switching power module 4 and a positive and negative pulse power supply digital control system 5.
(Forward supply DC power supply 1)
The forward power supply direct current power supply 1 provides adjustable forward output current within the forward power supply time in a pulse period.
The implementation device for the forward power supply dc power supply 1 is not particularly limited, and may be, but not limited to, a switching power supply with a control interface, an SCR silicon controlled rectifier power supply, a linear power supply, a synchronous rectification power supply, or other dc power supplies.
(reverse pulse inductance energy storage charging power supply 2)
The reverse pulse inductive energy storage charging power supply 2 outputs reverse output pulse current set according to the real-time process sent by the positive and negative pulse power supply digital control system 5.
The invention has no special limitation to the realization device used by the reverse pulse inductance energy storage charging power supply, and can use but not be limited to a switching power supply with a control interface, a resonant power supply, an SCR (silicon controlled rectifier) power supply, a linear power supply, a synchronous rectification power supply and other direct current power supplies.
In a preferred embodiment, the reverse pulse inductive energy storage charging power supply 2 performs constant current charging on the energy storage inductive module 3.
(energy storage inductance module 3)
The energy storage inductance module 3 is an inductance energy storage component formed by an inductor, a transformer or a combination of the inductor and the transformer.
In a preferred embodiment, the energy storage inductance module 3 outputs a reverse pulse current to the load 6 during a reverse output phase of a pulse cycle.
In a preferred embodiment, the energy storage inductance module 3 includes a primary side current detection CT1, an energy storage transformer T1, and a first switching tube S1.
In a preferred embodiment, one end of the primary current detection CT1 and the first switch tube S1 is connected to the reverse pulse inductance energy storage charging power supply 2, and the other end is connected to the energy storage transformer T1.
(Positive and negative pulse switching power module 4)
The positive and negative pulse switching power module 4 is an output switching module composed of a large current switch semiconductor module.
In a preferred embodiment, the positive and negative pulse switching power module 4 switches the output of the forward dc power supply 1 and the output of the energy storage inductor module 3 at a high speed according to the positive and negative pulse time set by the positive and negative pulse power supply digital control system 5.
In a preferred embodiment, the positive and negative pulse switching power module 4 comprises a reverse pulse output component and a forward pulse output component; the reverse pulse output assembly and the forward pulse output assembly are connected through a load 6.
The load 6 refers to PCB copper plating equipment.
Reverse pulse output assembly
In a preferred embodiment, the reverse pulse output assembly comprises a secondary side current detection CT2, a second switch tube S2 and an isolation device.
The first switch tube S1 and the second switch tube S2 are not particularly limited in the present invention, and various switch tubes known to those skilled in the art, such as Mosfet or IGBT, may be used.
The Mosfet (Metal-Oxide-Semiconductor Field-Effect Transistor) is a Metal-Oxide-Semiconductor Field Effect Transistor, referred to as a Mosfet for short, and can be widely used in analog circuits and digital circuits. The igbt (insulated Gate Bipolar transistor) is an insulated Gate Bipolar transistor, and is a composite fully-controlled voltage-driven power semiconductor device composed of a Bipolar triode and an insulated Gate field effect transistor.
In a preferred embodiment, one end of the second switching tube S2 is connected to one end of the isolation device; the other end of the second switch tube S2 is connected to the energy storage transformer T1.
In a preferred embodiment, one end of the secondary current detection CT2 is connected to the energy storage transformer T1.
In a preferred embodiment, the other end of the isolation device and the other end of the secondary side current detection CT2 output reverse pulses to connect to the load 6.
In a preferred embodiment, the isolation device is an isolation diode D1 or an isolation mosfet s 4.
In a more preferred embodiment, the isolation device is an isolation mosfet 4.
Forward pulse output assembly
In a preferred embodiment, the forward pulse output assembly includes a third switching tube S3 and a current detection device CT 3.
In a preferred embodiment, the third switching tube S3 and the current detection device CT3 are connected to a forward dc power supply 1 at one end, and connected to a load 6 at the other end to output a forward pulse.
(Positive and negative pulse power digital control system 5)
The positive and negative pulse power supply digital control system 5 is a system-level controller.
In a preferred embodiment, the positive and negative pulse power supply digital control system 5 controls the current output of the forward power supply dc power supply 1 and the reverse pulse inductive energy storage charging power supply 2 in real time through an interface, and sends a driving signal to the positive and negative pulse switching power module 4 to control the time of the positive and negative pulses according to the setting of the current output waveform.
In a preferred embodiment, the positive and negative pulse power supply digital control system 5 is further connected with an industrial control system of an upper computer through a digital interface.
The invention provides an application of the inductive energy storage type PCB copper plating high-speed positive and negative pulse power supply, which is used in the field of PCB copper plating.
In order to solve the systematic problems of low electric energy conversion efficiency, low system stability, output current distortion and the like in the conventional realization scheme of using the positive and negative pulse power supply for PCB copper plating, the high-speed positive and negative pulse power supply for the inductance energy storage type PCB copper plating provided by the invention utilizes the energy storage characteristic of the inductance on the current, and realizes a high-efficiency and reliable positive and negative pulse power supply output system. One pulse cycle of the inductive energy storage type PCB copper plating high-speed positive and negative pulse power supply provided by the invention consists of a positive output stage and a negative output stage.
1) A forward output stage:
when the first switch tube S1 and the third switch tube S3 are closed and the second switch tube S2 is open, the forward power supply dc power supply 1 is in a steady-current operating state, and outputs a constant current value to the load 6, and the set value thereof is transmitted by the positive-negative pulse power supply digital control system 5 through the control interface according to the process requirements. The reverse pulse inductance energy storage charging power supply 2 charges the energy storage inductance module 3 according to the reverse pulse current set value of the positive and negative pulse power supply digital control system 5 and constantly reaches the given current.
2) And a reverse output stage:
when the first switch tube S1 and the third switch tube S3 are turned off and the second switch tube S2 is turned on, the energy stored in the energy storage inductance module 3 begins to be released, and a reverse pulse current is output to the load 6. The forward direction power supply direct current power supply 1 and the reverse pulse inductance energy storage charging power supply 2 stop power output and are in a suspended state.
The conversion efficiency of the reverse pulse inductance energy storage charging power supply and the forward power supply direct current power supply can reach 90-95%, and the first switching tube S1, the second switching tube S2 and the third switching tube S3 are all in a low-frequency switching state in work. According to the requirement of a PCB copper plating process, the highest working frequency of the switch tube is less than 50Hz, so that the switch tube greatly reduces the switching loss compared with the prior art, improves the reliability of a switching machine, and has the overall efficiency of 85-92%.
The positive and negative pulse power supply digital control system is connected with an industrial control system of an upper computer through a digital interface, on one hand, the positive and negative pulse power supply, the reverse pulse inductance energy storage charging power supply, the energy storage inductance module and the positive and negative pulse switching power module which belong to the system can be monitored, on the other hand, the current output is controlled in real time through the interface, and according to the setting of the current output waveform, a driving signal is sent to the positive and negative pulse switching power module to control the time of positive and negative pulses; on the other hand, the operating parameters (input and output parameters and output waveforms), historical records and the like of the current power supply equipment can be displayed for a client through the HMI, manual input control information of field operators is received, the output voltage and current values are detected, and overcurrent and overvoltage protection of output is carried out.
The inductive energy storage mode used by the invention belongs to an electromagnetic energy storage mode, and compared with other energy storage modes such as capacitive energy storage and the like, the inductive energy storage mode has no capacity attenuation and service life problems, so that the system robustness can be fully improved. Because the PCB copper plating process needs stable current output waveform, and an inductive energy storage mode is adopted, the characteristic that the inductive current cannot change suddenly is utilized, the influence of the inductance and the resistance of a lead between a power supply and a load can be fully overcome, and undistorted reverse pulse waveform is generated.
Examples
The technical solution of the present invention is described in detail below with reference to the embodiments and the drawings, but the scope of the present invention is not limited to the embodiments and the drawings.
Example 1
As shown in fig. 3, the energy storage inductance module 3 includes a primary side current detection CT1, an energy storage transformer T1, and a first switching tube S1; one end of the primary side current detection CT1 and one end of the first switch tube S1 are connected with the reverse pulse inductance energy storage charging power supply 2, and the other end of the primary side current detection CT1 and the other end of the first switch tube S1 are connected with the energy storage transformer T1.
The positive and negative pulse switching power module 4 comprises a reverse pulse output component and a forward pulse output component. The reverse pulse output assembly and the forward pulse output assembly are connected through a load 6. The reverse pulse output assembly comprises a secondary side current detection CT2, a second switch tube S2 and an isolation mosfet S4. One end of the second switch tube S2 is connected with one end of the isolation mosfet S4; the other end of the second switch tube S2 is connected to the energy storage transformer T1. One end of the secondary side current detection CT2 is connected with the energy storage transformer T1. The other end of the isolation mosfet S4 and the other end of the secondary side current detection CT2 output reverse pulses and are connected with a load 6. The forward pulse output assembly includes a third switching tube S3 and a current detection device CT 3. One end of the third switching tube S3 and one end of the current detection device CT3 are connected with a forward power supply direct current power supply 1, and the other end outputs forward pulses to be connected with a load 6.
Performance testing
1. And (3) testing the electroplating output waveform of the HDI board: the inductive energy storage type PCB copper plating high-speed positive and negative pulse power supply obtained in the embodiment 1 is adopted to actually measure the power supply output waveform in the electroplating process of an HDI board (high-density interconnection board) with the thickness of 7mm and the thickness-diameter ratio of 24:1 used in a 5G base station. Specifically, a forward pulse current 400A is output, and the forward pulse time is 20 ms; reverse pulse current 1200A, reverse pulse time 1 ms. The current waveform which is undistorted, highly reliable and can be stably output as shown in fig. 4 is obtained.
2. Adopting a double-output machine type to carry out output waveform test of wafer electroplating: the inductive energy storage type PCB copper plating high-speed positive and negative pulse power supply obtained in the embodiment 1 is used for actually measuring the output waveform of the power supply in the wafer electroplating process by using a double-output MP2U10A model with a forward rated value of 10A and a reverse rated value of 30A. Wherein, the surface A outputs a forward pulse current of 8A, the forward pulse time is 5ms, the reverse output current is 20A, and the reverse pulse time is 0.5 ms; the surface B outputs a forward pulse current of 6A, the forward pulse time is 5ms, the reverse pulse time is 0.5ms, and the current is 16A. The current waveform which is undistorted, highly reliable and can be stably output as shown in fig. 5 is obtained.
3. Efficiency testing of different output powers: the efficiency test at different output powers was performed under the conditions of forward pulse time of 20ms and reverse pulse time of 1ms of the output waveform by using a dual-output MP2U1000A model with a forward maximum rated current of 1000A and a reverse maximum rated current of 3000A, and using the inductive energy storage PCB copper plating high-speed positive and negative pulse power supply obtained in example 1, and the results are shown in table 1.
TABLE 1MP2U1000A output efficiency test
| MV | V | I/A | Po | KW | Efficiency of | Rate of load |
| 30.5 | 2.973 | 406.6667 | 1209.02 | 1.39 | 0.852403 | 17.38％ |
| 38.2 | 3.64 | 509.3333 | 1853.973 | 2.07 | 0.877727 | 25.88％ |
| 45.8 | 4.32 | 610.6667 | 2638.08 | 2.92 | 0.885383 | 36.50％ |
| 53.6 | 5.01 | 714.6667 | 3580.48 | 3.89 | 0.902023 | 48.63％ |
| 61.4 | 5.72 | 818.6667 | 4682.773 | 5.04 | 0.910539 | 63.00％ |
| 69.2 | 6.41 | 922.6667 | 5914.293 | 6.34 | 0.914197 | 79.25％ |
| 77 | 7.1 | 1026.667 | 7289.333 | 7.76 | 0.92056 | 97.00％ |
According to the output efficiency test table, the overall efficiency of the inductive energy storage type PCB copper plating high-speed positive and negative pulse power supply can reach 85-92% within the output current range meeting the chemical potential requirement of the electrolytic copper plating, far exceeds 64-72% of the existing power supply scheme, and has strong practical application prospect.
The foregoing examples are illustrative only, and serve to explain some of the features of the present disclosure. The appended claims are intended to claim as broad a scope as is contemplated, and the examples presented herein are merely illustrative of selected implementations in accordance with all possible combinations of examples. Accordingly, it is applicants' intention that the appended claims are not to be limited by the choice of examples illustrating features of the invention. And that advances in science and technology will result in possible equivalents or sub-substitutes not currently contemplated for reasons of inaccuracy in language representation, and such changes should also be construed where possible to be covered by the appended claims.
Claims (10)
1. An inductive energy storage type PCB copper plating high-speed positive and negative pulse power supply is characterized by comprising a positive power supply direct current power supply (1), a reverse pulse inductive energy storage charging power supply (2), an energy storage inductance module (3), a positive and negative pulse switching power module (4) and a positive and negative pulse power supply digital control system (5); the positive and negative pulse power supply digital control system (5) controls the current output of the forward power supply direct current power supply (1) and the reverse pulse inductance energy storage charging power supply (2) in real time through interfaces; the reverse pulse inductance energy storage charging power supply (2) charges the energy storage inductance module (3) at constant current; and the positive and negative pulse switching power module (4) switches the output of the forward power supply direct current power supply (1) and the output of the energy storage inductance module (3) at a high speed according to the positive and negative pulse time set by the positive and negative pulse power supply digital control system (5).
2. The inductive energy storage type PCB copper-plated high-speed positive and negative pulse power supply as claimed in claim 1, wherein the energy storage inductive module (3) outputs a reverse pulse current for the load (6) in a reverse output stage of a pulse cycle.
3. The inductive energy storage type PCB copper-plating high-speed positive and negative pulse power supply as claimed in claim 1, wherein the positive and negative pulse power supply digital control system (5) is further connected with an industrial control system of an upper computer through a digital interface.
4. The inductive energy storage type PCB copper-plated high-speed positive and negative pulse power supply as claimed in claim 1, wherein the energy storage inductance module (3) comprises a primary side current detection (CT1), an energy storage transformer (T1), a first switch tube (S1); one end of the primary side current detection (CT1) and one end of the first switching tube (S1) are connected with the reverse pulse inductance energy storage charging power supply (2), and the other end of the primary side current detection (CT1) and one end of the first switching tube are connected with the energy storage transformer (T1).
5. The inductive energy storage type PCB copper-plating high-speed positive and negative pulse power supply according to claim 1, wherein the positive and negative pulse switching power module (4) comprises a reverse pulse output component and a forward pulse output component; the reverse pulse output assembly and the forward pulse output assembly are connected through a load (6).
6. The inductive energy storage type PCB copper-plated high-speed positive and negative pulse power supply of claim 1, wherein the reverse pulse output assembly comprises a secondary side current detection (CT2), a second switch tube (S2) and an isolation device.
7. The inductive energy storage type PCB copper-plated high-speed positive and negative pulse power supply as claimed in claim 1, wherein one end of the second switching tube (S2) is connected with one end of an isolation device; the other end of the second switching tube (S2) is connected with an energy storage transformer (T1); one end of the secondary side current detection (CT2) is connected with an energy storage transformer (T1); the other end of the isolation device and the other end of the secondary side current detection (CT2) output reverse pulses and are connected with a load (6).
8. The inductive energy storage type PCB copper-plated high-speed positive and negative pulse power supply of claim 1, wherein the positive pulse output assembly comprises a third switching tube (S3) and a current detection device (CT 3).
9. The inductive energy storage type PCB copper-plating high-speed positive and negative pulse power supply of claim 1, wherein one end of the third switch tube (S3) and the current detection device (CT3) is connected with a forward power supply DC power supply (1), and the other end outputs a forward pulse to be connected with a load (6).
10. The application of the inductive energy storage type PCB copper plating high-speed positive and negative pulse power supply is characterized in that the inductive energy storage type PCB copper plating high-speed positive and negative pulse power supply is used in the field of PCB copper plating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010347083.7A CN111416525A (en) | 2020-04-28 | 2020-04-28 | Inductive energy storage type PCB copper plating high-speed positive and negative pulse power supply |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010347083.7A CN111416525A (en) | 2020-04-28 | 2020-04-28 | Inductive energy storage type PCB copper plating high-speed positive and negative pulse power supply |
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| CN111416525A true CN111416525A (en) | 2020-07-14 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113179042A (en) * | 2021-05-25 | 2021-07-27 | 中国工程物理研究院机械制造工艺研究所 | Low-power high-precision pulse electroplating power supply |
-
2020
- 2020-04-28 CN CN202010347083.7A patent/CN111416525A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113179042A (en) * | 2021-05-25 | 2021-07-27 | 中国工程物理研究院机械制造工艺研究所 | Low-power high-precision pulse electroplating power supply |
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