CN111404019A - Optical fiber coupling structure and method of high-power semiconductor laser - Google Patents
Optical fiber coupling structure and method of high-power semiconductor laser Download PDFInfo
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- CN111404019A CN111404019A CN202010235701.9A CN202010235701A CN111404019A CN 111404019 A CN111404019 A CN 111404019A CN 202010235701 A CN202010235701 A CN 202010235701A CN 111404019 A CN111404019 A CN 111404019A
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 80
- 239000004065 semiconductor Substances 0.000 title claims abstract description 27
- 238000010168 coupling process Methods 0.000 title claims abstract description 22
- 230000008878 coupling Effects 0.000 title claims abstract description 20
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 20
- 238000000034 method Methods 0.000 title claims abstract description 17
- 230000003287 optical effect Effects 0.000 claims abstract description 61
- 238000007493 shaping process Methods 0.000 claims abstract description 9
- 238000007796 conventional method Methods 0.000 claims abstract description 7
- 239000000835 fiber Substances 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 230000004927 fusion Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000012994 industrial processing Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004297 night vision Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
- H01S5/0085—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for modulating the output, i.e. the laser beam is modulated outside the laser cavity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0225—Out-coupling of light
- H01S5/02251—Out-coupling of light using optical fibres
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
The invention discloses an optical fiber coupling structure and method of a high-power semiconductor laser, which relates to the technical field of semiconductor lasers and is used for solving the problem of poor laser output power stability of the existing high-power semiconductor laser, and comprises an optical waveguide component, wherein the optical waveguide component is formed by sequentially connecting an optical inlet, an optical inlet section, a connecting port, an optical outlet section and an optical outlet, the outer diameter of the optical inlet section is gradually reduced from the optical inlet to the connecting port, the outer diameter of the optical outlet section is matched with a corresponding optical fiber, the optical outlet is connected with the corresponding optical fiber, light emitted by a plurality of laser chips is projected to the optical inlet after being subjected to optical shaping and beam combining by a conventional method, then sequentially passes through the optical inlet section, the connecting port, the optical outlet section and the optical outlet, then is guided in from one end of the optical fiber, is output from the other end of the optical fiber after being transmitted by the optical fiber, the laser has the advantage of small output power loss even if the incident light beam and the light inlet are slightly misaligned.
Description
Technical Field
The invention relates to the technical field of semiconductor lasers, in particular to an optical fiber coupling structure and an optical fiber coupling method of a high-power semiconductor laser, which are used for coupling between the semiconductor laser with power of hundreds of watts to thousands of watts and an optical fiber.
Background
The high-power semiconductor laser output by the optical fiber can be applied to the fields of laser industrial processing, night vision illumination, medical cosmetology and the like, and the working process of the laser generally comprises the steps of firstly generating laser by a plurality of to hundreds of semiconductor laser chip light-emitting units, then carrying out optical shaping and beam combination, then converging the laser into a thin spot-shaped light beam by a converging lens, directly projecting the light beam onto a fiber core at one end of the optical fiber at an angle which can be received by the optical fiber, transmitting the light beam in the optical fiber and outputting the light beam from the other end of the optical fiber.
However, in the manufacturing and application processes of the conventional high-power semiconductor laser, since the core diameter of the optical fiber itself is relatively small, generally several hundred microns or less, it is difficult for the projected beam to align with the incident end of the core, and the projected beam is easily deviated from the core, and the internal components of the laser are easily displaced or slightly changed in angle under the action of factors such as temperature variation, mechanical deformation, etc., and the projected beam is also difficult to stably align with the core of the optical fiber due to the slight change, so that the projected beam is easily deviated or partially deviated from the incident end of the core when the fine optical fiber is used for performing optical fiber coupling on the high-power semiconductor laser.
However, the deviation or partial deviation of the projected beam relative to the fiber core of the optical fiber inevitably results in that all or part of the projected beam cannot be output from the optical fiber, which causes a serious loss of the laser output power, so that in the actual working process, the conventional high-power semiconductor laser is easy to have a serious loss of the output power, and the laser output power stability is poor.
In addition, since the power of the projected beam is high, typically several hundred watts or even several kilowatts, and the spot formed by the projected beam is small, typically a rectangular spot with a diagonal of 100-.
Disclosure of Invention
The invention aims to: in order to solve the problem that the stability of laser output power of the conventional high-power semiconductor laser is poor when the laser is coupled and output by using a fine optical fiber, the invention provides an optical fiber coupling structure and an optical fiber coupling method of the high-power semiconductor laser, which can effectively improve the stability of the laser output power of the high-power semiconductor laser.
The invention specifically adopts the following technical scheme for realizing the purpose:
an optical fiber coupling structure of a high-power semiconductor laser comprises an optical waveguide assembly, wherein the optical waveguide assembly is formed by sequentially connecting an optical inlet, an optical inlet section, a connecting port, an optical outlet section and an optical outlet, the outer diameter of the optical inlet section is gradually reduced from the optical inlet to the connecting port, the optical inlet section is a trapezoid table or a circular table or a rotating curved surface, the optical outlet section is in a matched cuboid shape when the optical inlet section is the trapezoid table, the optical outlet section is in a matched cylindrical shape when the optical inlet section is the circular table or the rotating curved surface, the outer diameter of the optical outlet section is matched with corresponding optical fibers, the optical outlet is connected with the corresponding optical fibers, the optical outlet and the corresponding optical fibers are connected in a hard connection mode that dislocation is not easy to occur, such as fusion welding or optical transmission glue bonding and the like, the optical waveguide assembly realizes mechanical processing or integral forming of an optical transparent material by a fused biconical taper method and realizes or integrally forms a guided wave reflection medium interface of the optical waveguide assembly by utilizing the optical total reflection principle of Plating a full-reflection film.
Further, the optical waveguide module also comprises a converging lens, and the optical waveguide module is positioned between the converging lens and the corresponding optical fiber.
Furthermore, a coating film is arranged on the light inlet.
Further, the incident light BPP of the light inlet is slightly smaller than the BPP of the corresponding optical fiber.
Furthermore, the light emitted by the plurality of laser chips is subjected to optical shaping and beam combination by a conventional method, then is projected to a light inlet, then sequentially passes through a light inlet section, a connecting port, a light outlet section and a light outlet, then is led in from one end of the optical fiber, is transmitted by the optical fiber and then is output from the other end of the optical fiber, the light inlet section is of a structure which is reduced from the light inlet to a connecting port component, according to the basic principle of geometric optics, the beam diameter is reduced and the beam divergence angle is increased in the process that the light beam is input from the light inlet to the optical fiber and is output, but the product of the beam diameter and the beam divergence angle (BPP) can be kept unchanged, and the input light beam with large or small caliber is converted into the output light beam with small or large caliber through the light beam conversion of the optical waveguide component.
Further, the light emitted from the plurality of laser chips is optically shaped and combined by a conventional method, passes through a converging lens and then is projected to an optical inlet, is converged to a certain degree by the converging lens, then passes through the optical inlet, the connecting port, the optical outlet and the optical outlet in sequence, is guided in from one end of the optical fiber, is transmitted by the optical fiber and then is output from the other end of the optical fiber.
The invention has the following beneficial effects:
1. the optical waveguide component with the large-aperture light inlet is used for receiving the laser beam, the range for receiving the laser beam is enlarged, the power loss caused by micro misalignment is small, the influence on the integral output power of the laser is small, the power stability is high, the problem that the power loss is large because of alignment offset when the high-power laser beam is directly projected to the end face of a fine optical fiber is effectively solved, and the burn of the laser to peripheral parts of a fiber core because of the alignment offset is also avoided;
2. the optical waveguide component with the large-aperture light inlet is used for receiving laser beams, the laser power density of the light inlet is greatly reduced, the light inlet and a coating film of the light inlet cannot be damaged under larger total laser power, and the problem that the input end face of a small optical fiber is damaged by laser under the projection of high-power laser is effectively solved;
3. the optical waveguide component is provided with a large-caliber light inlet, so that optical fiber coupling is easier to realize, and the process difficulty of laser alignment is effectively reduced;
4. the method is suitable for the optical fiber coupling of a semiconductor laser with thousands of watts and ultrahigh power, and is also suitable for the optical fiber coupling of dozens of microns with particularly small optical fiber core fiber diameter.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic structural view of the present invention;
the device comprises a 1-laser chip, a 2-beam shaping and beam combining device, a 3-light inlet, a 4-light inlet section, a 5-connecting port, a 6-light outlet section, a 7-light outlet, an 8-optical fiber, a 9-optical waveguide component and a 10-convergent lens.
Detailed Description
In order that those skilled in the art will better understand the present invention, the following examples are provided to illustrate the present invention in further detail. The following detailed description of embodiments of the invention is not intended to limit the scope of the invention as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
As shown in fig. 1, this embodiment provides an optical fiber coupling structure of high power semiconductor laser, including optical waveguide component 9, optical waveguide component 9 is formed by connecting in proper order light inlet 3, light inlet section 4, connector 5, light outlet section 6 and light outlet 7, the external diameter of light inlet section 4 reduces gradually from light inlet 3 to connector 5, the external diameter of light outlet section 6 matches with corresponding optical fiber 8, the connected mode of light outlet 7 and corresponding optical fiber 8 is the butt fusion, specifically, optical waveguide component 9 is realized through the method of melting tapering, for example with the core fiber for 600um large-caliber optical fiber 8, join the method of melting tapering, draw into 100um core diameter, then with the optical fiber 8 butt fusion of 100um, export after transmitting laser to certain distance through 100um optical fiber 8.
Preferably, the optical waveguide assembly 9 is integrally formed and coated with a total reflection film on the outer side.
Preferably, the incident light BPP of the light inlet 3 is slightly smaller than the BPP of the corresponding optical fiber 8.
A method for coupling optical fiber 8 of high-power semiconductor laser, concretely, the light emitted by a plurality of laser chips 1 is processed by optical shaping and beam combination through a conventional method, then is projected to a light inlet 3, then sequentially passes through a light inlet section 4, a connecting port 5, a light outlet section 6 and a light outlet 7, then is led in from one end of the optical fiber 8, and is output from the other end of the optical fiber 8 after being transmitted through the optical fiber 8, the light inlet section 4 is a structure that the components from the light inlet 3 to the connecting port 5 are reduced, according to the basic principle of geometric optics, in the process that the light beam is input from the light inlet 3 to the optical fiber 8 and is output, the diameter of the light beam is reduced, the divergence angle of the light beam is increased, but the product (BPP) of the diameter of the light beam and the divergence angle of the light beam can be kept unchanged, and the BPP does not exceed the upper limit of the BPP parameter of the light beam which can be transmitted by the corresponding optical fiber, the input light beam with large caliber and small angle is converted into the output light beam with small caliber and large angle.
The working principle is as follows: light emitted by a plurality of laser chips 1 passes through the conventional beam shaping and beam combining device 2, enters the optical waveguide component 9 from the light inlet 3, passes through the light inlet section 4, the connecting port 5, the light outlet section 6 and the light outlet 7, enters one end of the optical fiber 8, and is output from the other end of the optical fiber 8, even if the internal components of the laser are influenced by external factors such as temperature change, mechanical stress deformation and the like to generate displacement or angle micro change, so that micro misalignment occurs, only small power is lost, the influence on the overall output power of the laser is small, the power stability is high, the problem that the power loss is large due to alignment deviation when a high-power laser beam is directly projected to the end face of the fine optical fiber 8 is effectively solved, and the problem that fiber core peripheral components are burnt by the laser due to the alignment deviation is also avoided.
Example 2
As shown in fig. 2, this embodiment is further improved on the basis of embodiment 1, and specifically, the present embodiment further includes a converging lens 10, and the optical waveguide assembly 9 is located between the converging lens 10 and the corresponding optical fiber 8.
A method for coupling optical fibers 8 of a high-power semiconductor laser is characterized in that light emitted by a plurality of laser chips 1 is subjected to optical shaping and beam combination by a conventional method, then is projected to a light inlet 3 after passing through a converging lens 10, is converged to a certain degree by the converging lens 10, then sequentially passes through a light inlet section 4, a connecting port 5, a light outlet section 6 and a light outlet 7, then is guided in from one end of the optical fiber 8, is transmitted by the optical fiber 8 and then is output from the other end of the optical fiber 8.
Preferably, the light inlet 3 is provided with a coating, the laser power density of the light inlet 3 is greatly reduced, the light inlet 3 and the coating thereof are not damaged under larger total laser power, and the problem that the input end face of the fine optical fiber 8 is damaged by laser under high-power laser projection is effectively solved.
The above description is only a preferred embodiment of the present invention, and not intended to limit the present invention, and the scope of the present invention is defined by the appended claims, and all changes that come within the meaning and range of equivalency of the specification are therefore intended to be embraced therein.
Claims (6)
1. An optical fiber coupling structure of a high-power semiconductor laser is characterized in that: including optical waveguide subassembly (9), optical waveguide subassembly (9) are formed by connecting gradually income light mouth (3), income light section (4), connector (5), light-emitting section (6) and light-emitting mouth (7), the external diameter that goes into light section (4) reduces from going into light mouth (3) to connector (5) gradually, the external diameter of light-emitting section (6) cooperatees with corresponding optic fibre (8), light-emitting mouth (7) are connected with corresponding optic fibre (8).
2. A fiber coupling structure for high power semiconductor lasers as claimed in claim 1 wherein: and the optical waveguide component (9) is positioned between the convergent lens (10) and the corresponding optical fiber (8).
3. An optical fiber coupling structure of a high power semiconductor laser as claimed in claim 1 or 2, wherein: the light inlet (3) is provided with a coating film.
4. An optical fiber coupling structure of a high power semiconductor laser as claimed in claim 1 or 2, wherein: the BPP of the incident light of the light inlet (3) is slightly smaller than that of the corresponding optical fiber (8).
5. A method for coupling optical fibers of a high power semiconductor laser as claimed in claim 1 wherein: the light emitted by the laser chips (1) is subjected to optical shaping and beam combination by a conventional method, then is projected to a light inlet (3), then sequentially passes through a light inlet section (4), a connecting port (5), a light outlet section (6) and a light outlet (7), then is led in from one end of an optical fiber (8), is transmitted through the optical fiber (8), and then is output from the other end of the optical fiber (8).
6. A method for coupling optical fibers of a high power semiconductor laser as claimed in claim 2 wherein: light emitted by a plurality of laser chips (1) is subjected to optical shaping and beam combination by a conventional method, then is projected to a light inlet (3) after passing through a converging lens (10), then sequentially passes through a light inlet section (4), a connecting port (5), a light outlet section (6) and a light outlet (7), then is led in from one end of an optical fiber (8), is transmitted through the optical fiber (8), and then is output from the other end of the optical fiber (8).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010235701.9A CN111404019A (en) | 2020-03-30 | 2020-03-30 | Optical fiber coupling structure and method of high-power semiconductor laser |
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| CN202010235701.9A CN111404019A (en) | 2020-03-30 | 2020-03-30 | Optical fiber coupling structure and method of high-power semiconductor laser |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112164975A (en) * | 2020-09-27 | 2021-01-01 | 西安立芯光电科技有限公司 | Beam combining method and beam combining device for semiconductor laser chip |
| WO2023103359A1 (en) * | 2021-12-08 | 2023-06-15 | 青岛海信激光显示股份有限公司 | Light source and laser projection device |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201017078Y (en) * | 2007-03-17 | 2008-02-06 | 中国工程物理研究院电子工程研究所 | High-power laser injection optical fiber coupling device |
| CN101162829A (en) * | 2007-07-13 | 2008-04-16 | 昂纳明达数字显示技术（深圳）有限公司 | High power semiconductor laser device coupling packaging component |
| CN102882128A (en) * | 2012-09-27 | 2013-01-16 | 山西傲维光视光电科技有限公司 | Optical fiber light cone coupling based high-power high-brightness laser source |
| CN103094837A (en) * | 2013-01-15 | 2013-05-08 | 北京工业大学 | Direction-controllable laser device system |
| CN103280688A (en) * | 2013-05-23 | 2013-09-04 | 纽敦光电科技（上海）有限公司 | End face protection structure of high-power laser optical fiber |
| CN104009395A (en) * | 2014-05-06 | 2014-08-27 | 深圳市博锐浦科技有限公司 | Optical fiber coupling module with multiple single-diode semiconductor lasers |
| CN105826800A (en) * | 2016-04-21 | 2016-08-03 | 宁波大学 | All-optical fiber broadband flat intermediate-infrared super-continuum spectrum light source |
| CN211605644U (en) * | 2020-03-30 | 2020-09-29 | 深圳活力激光技术有限公司 | Optical fiber coupling structure of high-power semiconductor laser |
-
2020
- 2020-03-30 CN CN202010235701.9A patent/CN111404019A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201017078Y (en) * | 2007-03-17 | 2008-02-06 | 中国工程物理研究院电子工程研究所 | High-power laser injection optical fiber coupling device |
| CN101162829A (en) * | 2007-07-13 | 2008-04-16 | 昂纳明达数字显示技术（深圳）有限公司 | High power semiconductor laser device coupling packaging component |
| CN102882128A (en) * | 2012-09-27 | 2013-01-16 | 山西傲维光视光电科技有限公司 | Optical fiber light cone coupling based high-power high-brightness laser source |
| CN103094837A (en) * | 2013-01-15 | 2013-05-08 | 北京工业大学 | Direction-controllable laser device system |
| CN103280688A (en) * | 2013-05-23 | 2013-09-04 | 纽敦光电科技（上海）有限公司 | End face protection structure of high-power laser optical fiber |
| CN104009395A (en) * | 2014-05-06 | 2014-08-27 | 深圳市博锐浦科技有限公司 | Optical fiber coupling module with multiple single-diode semiconductor lasers |
| CN105826800A (en) * | 2016-04-21 | 2016-08-03 | 宁波大学 | All-optical fiber broadband flat intermediate-infrared super-continuum spectrum light source |
| CN211605644U (en) * | 2020-03-30 | 2020-09-29 | 深圳活力激光技术有限公司 | Optical fiber coupling structure of high-power semiconductor laser |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112164975A (en) * | 2020-09-27 | 2021-01-01 | 西安立芯光电科技有限公司 | Beam combining method and beam combining device for semiconductor laser chip |
| WO2023103359A1 (en) * | 2021-12-08 | 2023-06-15 | 青岛海信激光显示股份有限公司 | Light source and laser projection device |
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