CN111403501A - Manufacturing method of solar cell with touch function - Google Patents

Manufacturing method of solar cell with touch function Download PDF

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Publication number
CN111403501A
CN111403501A CN202010208144.1A CN202010208144A CN111403501A CN 111403501 A CN111403501 A CN 111403501A CN 202010208144 A CN202010208144 A CN 202010208144A CN 111403501 A CN111403501 A CN 111403501A
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China
Prior art keywords
electrode
solar cell
touch sensing
layer
manufacturing
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Inventor
李源
谢雄才
眭斌
张文进
杨亮
任国光
廖亿彬
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Truly Semiconductors Ltd
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Truly Semiconductors Ltd
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Priority to CN202010208144.1A priority Critical patent/CN111403501A/en
Publication of CN111403501A publication Critical patent/CN111403501A/en
Priority to PCT/CN2020/124406 priority patent/WO2021189841A1/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022408Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Human Computer Interaction (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Photovoltaic Devices (AREA)

Abstract

The invention discloses a manufacturing method of a solar cell with a touch function, which is provided with a first area and a second area and comprises the steps of providing a transparent substrate; the manufacturing method comprises the steps of simultaneously manufacturing a first electrode and a touch sensing electrode on the same side of a transparent substrate, wherein the first electrode and the touch sensing electrode are made of the same material, the touch sensing electrode is of a single-layer transparent conductive oxide film structure, and the touch sensing electrode is manufactured in a first area and the first electrode is manufactured in a second area; manufacturing a protective layer on the outer side of the touch sensing electrode to form a touch sensing unit; sequentially forming a photovoltaic layer and a second electrode on the first electrode; after cleaning, the second electrode and the photovoltaic layer are sequentially subjected to imaging etching to form the solar cell unit, the solar cell unit and the touch sensing unit do not need to be manufactured separately, manufacturing steps of the solar cell are reduced, and the processing complexity is reduced.

Description

Manufacturing method of solar cell with touch function
Technical Field
The invention relates to the technical field of solar cells, in particular to a manufacturing method of a solar cell with a touch function.
Background
At present, when a solar cell in the prior art realizes a touch function, a plug-in mode is usually adopted to attach a finished touch sensing structure to the finished solar cell and connect the touch sensing structure to a driving circuit to form a solar cell module with the touch function.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a method for manufacturing a solar cell with a touch function, which is completed in the same manufacturing process by setting the touch sensing electrode of the touch sensing unit and the first electrode of the solar cell unit to be made of the same material, and does not need to separately manufacture the solar cell unit and the touch sensing unit, thereby reducing the manufacturing steps of the solar cell and the complexity of processing, and having simple structure and thin thickness.
The technical effect to be achieved by the invention is realized by the following scheme: a method for manufacturing a solar cell with a touch function, wherein the solar cell is provided with a first area and a second area, comprises the following steps:
the method comprises the following steps: providing a transparent substrate;
step two: the manufacturing method comprises the steps of simultaneously manufacturing a first electrode and a touch sensing electrode on the same side of a transparent substrate, wherein the first electrode and the touch sensing electrode are made of the same material, the touch sensing electrode is of a single-layer transparent conductive oxide film structure, and the touch sensing electrode is manufactured in a first area and the first electrode is manufactured in a second area;
step three: manufacturing a protective layer on the outer side of the touch sensing electrode to form a touch sensing unit;
step four: sequentially forming a photovoltaic layer and a second electrode on the first electrode;
step five: and after cleaning, sequentially carrying out imaging etching on the second electrode and the photovoltaic layer to form the solar cell unit.
Preferably, the method further comprises the steps of manufacturing an insulating layer and manufacturing an auxiliary electrode layer on the first electrode, wherein the insulating layer is used for insulating and separating the auxiliary electrode layer from the second electrode.
Preferably, the method further comprises the step of binding the touch sensing unit and the solar cell unit, wherein the same flexible printed circuit board is adopted for binding the touch sensing unit and the solar cell unit.
Preferably, the auxiliary electrode layer and/or the second electrode are also used for manufacturing a binding electrode of the touch sensing unit.
The invention has the following advantages:
1. according to the manufacturing method of the solar cell with the touch function, the touch sensing electrode of the touch sensing unit and the first electrode of the solar cell unit are made of the same material and are finished in the same manufacturing process, the solar cell unit and the touch sensing unit are not required to be manufactured separately, manufacturing steps of the solar cell are reduced, the processing complexity is reduced, the problem of position deviation of the touch sensing unit and the solar cell unit during separate manufacturing can be solved, the binding complexity of a flexible printed circuit board for electrical connection is reduced, and the number and the binding times of the flexible printed circuit board are reduced;
2. the solar cell unit and the touch sensing unit are arranged in an insulated mode, and the solar cell unit and the touch sensing unit can be separated in an insulated mode through a protective layer of the touch sensing unit, so that the solar cell unit and the touch sensing unit are prevented from being influenced mutually. In addition, because the solar cell unit and the touch sensing unit are arranged in parallel and separately, when the solar cell is applied to other display equipment, the solar cell unit avoids the display area, the solar cell unit does not influence the display area corresponding to the touch sensing unit, the electric energy of the solar cell is provided for the display equipment with larger power consumption, and the cruising ability of the display equipment is effectively improved. The arrangement of the touch sensing unit is equivalent to hollowing out the whole solar cell into a first area, and then integrating the touch sensing unit in the solar cell to realize that the solar cell has a touch function;
3. the flexible printed circuit board is electrically connected with the solar cell unit and the touch sensing unit at the same time, so that one flexible printed circuit board can be used as the output of two functions of the solar cell unit and the touch sensing unit at the same time, the binding processing difficulty of devices and the design complexity and the overall dimension of the driving main board are effectively reduced, and the integration level of the solar cell is favorably improved.
Drawings
Fig. 1 is a process flow diagram of a method for manufacturing a solar cell with a touch function according to the present invention;
fig. 2 is a schematic side view of a solar cell with a touch function according to the present invention;
fig. 3 is a schematic plan view of a solar cell with a touch function according to the present invention;
FIG. 4 is a schematic diagram of a side view structure of a solar cell display insulating layer and an auxiliary electrode layer with a touch function and a display touch sensing electrode binding terminal according to the present invention;
FIG. 5 is a schematic diagram of a planar structure of the flexible printed circuit board of the present invention bonded to a solar cell;
fig. 6 is a schematic plan view of a flexible printed circuit board of a solar cell with a touch function according to the present invention.
Detailed Description
The invention is described in detail below with reference to the drawings, wherein examples of the embodiments are shown in the drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
In the description of the present invention, it is to be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be construed as limiting the present invention.
Furthermore, the terms "first", "second", "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," or "third" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," "disposed," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or may be connected through the interconnection of two elements or through the interaction of two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
Example one
As shown in fig. 1-3, a method for manufacturing a solar cell with a touch function is provided in an embodiment of the present invention, wherein the solar cell has a first region 10-b and a second region 10-a, and the second region 10-a shown in fig. 2 is disposed around the first region 10-b and is formed at a peripheral edge of the first region 10-b, and it should be understood by those skilled in the art that the distribution of the first region 10-b and the second region 10-a in the drawings is merely an example and should not be limited thereto, and may also be, for example, the first region 10-b and the second region 10-a are disposed in parallel. The solar cell is integrally in a film shape or a plate shape, can be used on electronic display equipment or electronic wearable equipment, and provides photoelectric conversion electric energy for the electronic display equipment and the electronic wearable equipment.
Specifically, the method for manufacturing the solar cell with the touch function comprises the following steps:
the method comprises the following steps: a transparent substrate 10 is provided.
The transparent substrate 10 may be a transparent inorganic material such as glass and quartz, or a transparent organic polymer material, and the like, and the transmittance of light is only 90% or more, and the normal display and photoelectric conversion efficiency is not affected.
Step two: the manufacturing of the first electrode 21 and the manufacturing of the touch sensing electrode 31 are simultaneously performed on the same side of the transparent substrate 10, the first electrode 21 and the touch sensing electrode 31 are made of the same material, the touch sensing electrode 31 is of a single-layer transparent conductive oxide film structure, and the touch sensing electrode 31 is manufactured in a first area 10-b and the first electrode 21 is manufactured in a second area 10-a.
In this manufacturing step, the first electrode 21 and the touch sensing electrode 31 may be formed into a film, and then the first electrode 21 and the touch sensing electrode 31 may be imaged and etched into a pattern. The film forming temperature of the first electrode 21 and the touch sensing electrode 31 can be room temperature, or the film forming can be performed at a high temperature of 230-350 ℃, and the film forming thickness is 20nm-1000 nm. The first side of the first electrode 21 facing away from the transparent substrate 10 may be optionally textured with low-concentration HCl or alkaline substances to form an uneven plane, so as to improve the absorption of ambient light.
The first electrode 21 and the touch sensing electrode 31 may be made of TCO materials including but not limited to AZO (aluminum-doped zinc oxide), ITO (tin oxide), nano silver, magnesium-silver alloy, graphene, or other transparent conductive oxide films, so as to improve transmittance and reduce influence on display effect.
The touch sensing electrode 31 of the embodiment of the invention adopts a single-layer transparent conductive oxide film to realize the touch function, and has a simple structure. In the conventional structure, the touch sensing electrode 31 includes an emitter and a receiver, which is a prior art in the prior art and is not described in detail herein.
Step three: a protective layer 32 is formed on the outer surface of the touch sensing electrode 31 to form a touch sensing unit 30.
Preferably, the protective layer 32 covers the outer side of the touch sensing electrode 31 and extends to contact with the transparent substrate 10, so as to achieve a comprehensive sealing protection effect on the touch sensing electrode 31. The material of the protection layer 32 may be one or more of inorganic silicon oxide, silicon nitride, or organic materials such as acrylic resin, epoxy resin, polyurethane resin, polyester resin, and polypropylene resin.
Step four: the photovoltaic layer 22 and the second electrode 23 are sequentially formed on the first electrode 21.
Specifically, the photovoltaic layer 22 can be divided into a P layer, an I layer and an N layer, wherein the thickness of the P layer is 10nm to 30nm, the film forming temperature is 150 ℃ to 250 ℃, the thickness of the I layer is 300 nm to 500nm, the film forming temperature is 150 ℃ to 250 ℃, the thickness of the N layer is 20nm to 40nm, and the film forming temperature is 150 ℃ to 250 ℃.
The photovoltaic layer 22 may be, but is not limited to, a PN or PIN device made of polysilicon, amorphous silicon, or gallium arsenide.
The second electrode 23 may be a single-layer electrode film or a multi-layer electrode film, and may be, but not limited to, a single metal material, an alloy material, or a metal oxide/nitride/halide material, and the metal element contained in the single metal material, the alloy material, or the metal oxide/nitride/halide material is one of gold, silver, copper, aluminum, nickel, molybdenum, or the like, which has a low resistivity.
Step five: and after cleaning, sequentially carrying out imaging etching on the second electrode 23 and the photovoltaic layer 22 to form the solar cell unit 20.
The second electrode 23 may be chemically etched after photoresist is exposed and imaged, and the photovoltaic layer 22 may be etched in a dry etching manner.
In the method for manufacturing a solar cell with a touch function according to the first embodiment of the present invention, the touch sensing electrode 31 of the touch sensing unit 30 and the first electrode 21 of the solar cell unit 20 are made of the same material and completed in the same manufacturing process, and the solar cell unit 20 and the touch sensing unit 30 do not need to be manufactured separately, so that the manufacturing steps of the solar cell are reduced, the complexity of processing is reduced, and the problem of position deviation between the touch sensing unit 30 and the solar cell unit 20 during separate manufacturing can be solved.
The solar cell 20 of the embodiment of the invention may be a transparent structure, an opaque structure or a semi-transparent structure, and the material of the second electrode 23 may be selected according to actual requirements to determine whether the solar cell 20 is transparent or not. The solar cell 20 may be a solar cell 20 with a single junction structure, or a solar cell 20 with a multi-junction structure connected in series, and the specific arrangement manner of the structure may be conventional in the prior art, which is not to be construed as being too much and limited in the present invention. The area of the solar cell unit 20 is in direct proportion to the photoelectric conversion effect, that is, the area of the solar cell unit 20 is increased for receiving external light irradiation, so that a better photoelectric conversion effect can be obtained, more electric energy is provided for the applied equipment, and the service life is prolonged.
It should be understood that the solar cell 20 and the touch sensing unit 30 are arranged in an insulated or disconnected manner, and in particular, the protective layer 32 of the touch sensing unit 30 can be used to insulate and separate the solar cell 20 and the touch sensing unit 30 from each other, so as to prevent the solar cell 20 and the touch sensing unit 30 from affecting each other. Moreover, because the solar cell unit 20 and the touch sensing unit 30 are separately arranged in parallel, when the solar cell is applied to other electronic devices with display, the touch sensing unit 30 is correspondingly formed in the display area, the solar cell unit 20 avoids the display area, and the solar cell unit 20 does not affect the display area corresponding to the touch sensing unit 30, and then the electric energy of the solar cell is provided to the display device with larger power consumption, thereby effectively improving the cruising ability of the display device. The arrangement of the touch sensing unit 30 of the invention is equivalent to hollowing out the whole solar cell into the first region 10-b, and then integrating the touch sensing unit 30 in the solar cell to realize that the solar cell has a touch function.
As shown in fig. 4, as a further improvement of the first embodiment of the present invention, the method for manufacturing a solar cell further includes manufacturing an auxiliary electrode layer 50 on the first electrode 21, and the auxiliary electrode layer 50 is formed by a physical vapor deposition method through one-time film formation. This step also includes the fabrication of an insulating layer 40, said insulating layer 40 insulating the auxiliary electrode layer 50 from the second electrode 23. The auxiliary electrode layer 50 can reduce the resistance of the first electrode 21, improve the conversion efficiency of the thin-film solar cell unit 20 under strong light, and facilitate the extraction of the first electrode 21. It should be understood by those skilled in the art that the auxiliary electrode layer 50 shown in fig. 4 is disposed at the uppermost layer, so as to facilitate the disposition of the auxiliary electrode layer 50 in a large area to reduce the resistance of the first electrode 21 to the maximum, when the auxiliary electrode layer 50 is connected to the first electrode 21 in a contact manner, the auxiliary electrode layer 50 may extend to be connected to the first electrode 21 in a contact manner through the hole by perforating the second electrode 23 and the photovoltaic layer 22 (the connection is conventional in the art and is not shown in fig. 4), and the influence of the auxiliary electrode layer 50 on the photoelectric conversion area may be reduced to the maximum by perforating in a small area.
Further, the solar cell manufacturing method of the present invention further includes a binding process of the touch sensing unit 30 and a binding process of the solar cell unit 20, and the binding process of the touch sensing unit 30 and the binding process of the solar cell unit 20 are preferably performed by using the same flexible printed circuit board, so that the binding complexity of the flexible printed circuit board for electrical connection can be reduced, and the number of the flexible printed circuit boards and the number of binding times can be reduced.
Specifically, as shown in fig. 5 and fig. 6, the lead electrode area of the solar cell unit 20 (i.e., the lead electrode area of the first electrode 21 and the lead electrode area of the second electrode 23) and the electrode binding area of the touch sensing unit 30 may be arranged in parallel in the same direction of the transparent substrate 10, so that a flexible printed circuit board may be used as the output of two functions of the solar cell unit 20 and the touch sensing unit 30, which effectively reduces the binding processing difficulty of the device and the design complexity and the external dimension of the driving main board, and is beneficial to improving the integration level of the solar cell.
As shown in fig. 6, the electrode binding of the touch sensing unit 30 can be directly led out to the binding sites 30-a of the touch sensing unit 30 through the touch sensing electrode 31, the binding sites 30-a of the touch sensing unit 30 are formed between the binding sites 20-a of the solar cell unit 20, and the binding sites 30-a of the touch sensing unit 30 are spaced apart from the binding sites 20-a of the solar cell unit 20. The flexible printed circuit board is also provided with an output terminal 30-b of the touch sensing unit 30 and an output terminal 20-b of the solar cell unit 20.
Further, as shown in fig. 4, the auxiliary electrode layer 50 and/(or) the second electrode 23 may also be used for manufacturing the binding electrode of the touch sensing unit 30, that is, when the auxiliary electrode layer 50 and/(or) the second electrode 23 are manufactured, the auxiliary electrode layer 50 and/(or) the second electrode 23 may be simultaneously manufactured on the binding site 30-a of the touch sensing unit, so as to increase the thickness of the binding electrode of the touch sensing unit 30, and further make the thicknesses of the binding electrode of the solar cell unit 20 and the binding electrode of the touch sensing unit 30 consistent. Specifically, in order to improve the flatness of the binding electrodes of the solar cell 20 and the touch sensing unit 30, the binding electrodes of the touch sensing unit 30 may further include an auxiliary electrode layer 50 and/or a second electrode 23, so that the thickness of the binding electrodes is increased, and at this time, the auxiliary electrode layer 50 and the second electrode 23 for the binding electrodes should be insulated and separated from the auxiliary electrode layer 50 and the second electrode 23 of the solar cell 20 to form independent portions, so as to prevent short circuit.
According to the invention, the binding electrodes of the solar cell unit 20 and the binding electrodes of the touch sensing unit 30 are arranged in the same area, the lamination thicknesses of the binding electrode output terminals with different functions can also be designed into structures with the same thickness, and the ACF (anisotropic conductive film) is used as an electrical connection process with the flexible printed circuit board, so that the ACF can adopt the same model, width and binding condition, the binding of the solar cell unit 20 and the touch sensing unit 30 can be completed at one time, and compared with the condition that the binding electrodes are respectively and independently opened and respectively bound, the processing times are reduced, the processing difficulty is reduced, and the utilization rate and the yield of materials are improved.
The auxiliary electrode layer 50 may be, but not limited to, made of a metal simple substance, an alloy material, a metal oxide/nitride/halide material, or a nano conductive material, and may include, but is not limited to, a film forming process such as evaporation, ion plating, magnetron sputtering, or CVD; the metal simple substance may be Al, Ag, etc., the alloy material may be magnesium-silver alloy, molybdenum-silver alloy, etc., the metal oxide/nitride/halide material may be ITO, IZO, etc., and the nano conductive material may be graphene, etc. The auxiliary electrode layer 50 formed of these metal simple substances, alloy materials, metal oxide/nitride/halide materials, or nano conductive materials can achieve a transparent optical effect when the thickness is less than a certain value.
When the insulating layer adopts organic matter, the insulating layer can be prepared in a gluing exposure development mode, a transfer printing mode or a silk screen printing mode, and the process is simpler. When the insulating layer is protected by nonmetal such as SiNx and SiO2, the insulating layer can be formed by Chemical Vapor Deposition (CVD) or magnetron sputtering, and then is subjected to yellow light exposure to form a pattern, and then the pattern is dry-etched to form the pattern.
Example two
Referring to fig. 2 and 3, a second embodiment of the present invention provides a solar cell with a touch function, which has a first region 10-b and a second region 10-a, where the second region 10-a shown in fig. 2 is disposed around the first region 10-b and is formed at a peripheral edge of the first region 10-b, and those skilled in the art should understand that the distribution of the first region 10-b and the second region 10-a in the drawings is merely an example and should not be limited thereto, and may also be, for example, that the first region 10-b and the second region 10-a are disposed in parallel. The solar cell is integrally in a film shape or a plate shape, can be used on electronic display equipment or electronic wearable equipment, and provides photoelectric conversion electric energy for the electronic display equipment and the electronic wearable equipment.
In the embodiment of the present invention, the solar cell includes a transparent substrate 10, a solar cell unit 20 and a touch sensing unit 30 are disposed on the same side of the transparent substrate 10 in parallel, the touch sensing unit 30 is formed in a first region 10-b, and the solar cell unit 20 is formed in a second region 10-a. The solar cell unit 20 includes a first electrode 21, a photovoltaic layer 22 and a second electrode 23 sequentially stacked on the transparent substrate 10, the touch sensing unit 30 includes a touch sensing electrode 31 disposed on the transparent substrate 10 and a protective layer 32 covering the touch sensing electrode 31, wherein the first electrode 21 and the touch sensing electrode 31 are formed of the same material and are formed simultaneously, that is, the first electrode 21 and the touch sensing electrode 31 are disposed on the transparent substrate 10 at the same horizontal plane instead of being stacked up and down, and of course, the thicknesses of the first electrode 21 and the touch sensing electrode 31 formed on the transparent substrate 10 may be different according to actual conditions. When the thicknesses of the first electrode 21 and the touch sensing electrode 31 formed on the transparent substrate 10 are different, in the PVD (physical vapor deposition), MASK time-sharing shielding is performed corresponding to the first region 10-b or the second region 10-a.
According to the invention, the touch sensing electrode 31 of the touch sensing unit 30 and the first electrode 21 of the solar cell unit 20 are made of the same material and completed in the same manufacturing process, and the solar cell unit 20 and the touch sensing unit 30 do not need to be manufactured separately, so that the manufacturing steps of the solar cell are reduced, the complexity of processing is reduced, and the problem of position deviation of the touch sensing unit 30 and the solar cell unit 20 during separate manufacturing can be solved.
As shown in fig. 4, as a further modification of the embodiment of the present invention, the solar cell unit 20 further includes an auxiliary electrode layer 50 connected to the first electrode 21. The solar cell unit 20 further comprises an insulating layer 40, and the auxiliary electrode layer 50 should be insulated and separated from the second electrode 23 by the insulating layer 40 to avoid short circuit. The auxiliary electrode layer 50 can reduce the resistance of the first electrode 21, improve the conversion efficiency of the thin-film solar cell unit 20 under strong light, and facilitate the extraction of the first electrode 21.
It should be understood by those skilled in the art that the auxiliary electrode layer 50 shown in fig. 4 is disposed at the uppermost layer, so as to facilitate the disposition of the auxiliary electrode layer 50 in a large area to reduce the resistance of the first electrode 21 to the maximum, when the auxiliary electrode layer 50 is connected to the first electrode 21 in a contact manner, the auxiliary electrode layer 50 may extend to be connected to the first electrode 21 in a contact manner through the hole by perforating the second electrode 23 and the photovoltaic layer 22 (the connection is conventional in the art and is not shown in fig. 4), and the influence of the auxiliary electrode layer 50 on the photoelectric conversion area may be reduced to the maximum by perforating in a small area.
Further, the auxiliary electrode layer 50 and/or the second electrode 23 may also be used for manufacturing the binding electrode of the touch sensing unit 30, that is, when the auxiliary electrode layer 50 and/or the second electrode 23 are manufactured, the auxiliary electrode layer 50 and/or the second electrode 23 may be simultaneously manufactured on the binding electrode of the touch sensing unit to increase the thickness of the binding electrode of the touch sensing unit 30, so that the thicknesses of the binding electrode of the solar cell unit 20 and the binding electrode of the touch sensing unit 30 are the same. Specifically, in order to improve the flatness of the solar cell 20 and the bonding electrodes of the touch sensing unit 30, the auxiliary electrode layer 50 and/or the second electrode 23 may be used for electrode bonding of the touch sensing unit 30, so that the thickness of the bonding electrodes is increased, and at this time, the auxiliary electrode layer 50 and the second electrode 23 for the bonding electrodes should be insulated and separated from the auxiliary electrode layer 50 and the second electrode 23 of the solar cell 20 to form independent portions so as to avoid short circuit.
According to the invention, the binding electrodes of the solar cell unit 20 and the binding electrodes of the touch sensing unit 30 are arranged in the same area, the lamination thicknesses of the binding electrode output terminals with different functions can also be designed into structures with the same thickness, and the ACF (anisotropic conductive film) is used as an electrical connection process with the flexible printed circuit board, so that the ACF can adopt the same model, width and binding conditions, the binding of the solar cell unit 20 and the touch sensing unit 30 can be completed at one time, and compared with the condition that the electrodes are respectively and independently opened and respectively bound, the processing times are reduced, the processing difficulty is reduced, and the utilization rate and the yield of materials are improved.
As shown in fig. 5 and fig. 6, as a further improvement of the embodiment of the present invention, the solar cell further includes a flexible printed circuit board, and the flexible printed circuit board is preferably used for binding the solar cell unit 20 and the touch sensing unit 30 at the same time, so as to reduce the binding complexity of the flexible printed circuit board for electrical connection, and reduce the number of flexible printed circuit boards and the number of times of binding. Specifically, the binding region of the solar cell unit 20 (i.e., the binding region of the first electrode 21 and the second electrode 23) and the binding region of the touch sensing unit 30 may be arranged in parallel in the same direction of the transparent substrate 10, so that a flexible printed circuit board may be used as the output of two functions of the solar cell unit 20 and the touch sensing unit 30, which effectively reduces the binding processing difficulty of the device and the design complexity and the external dimension of the driving main board, and is beneficial to improving the integration level of the solar cell.
As shown in fig. 6, the binding bits 30-a of the touch sensing unit 30 are formed between the binding bits 20-a of the solar cell 20, and the binding bits 30-a of the touch sensing unit 30 are spaced apart from the binding bits 20-a of the solar cell 20. The flexible printed circuit board is also provided with an output terminal 30-b of the touch sensing unit 30 and an output terminal 20-b of the solar cell unit 20.
The first electrode 21 and the touch sensing electrode 31 may be made of TCO materials, including but not limited to AZO (aluminum-doped zinc oxide), ITO (tin oxide), nano silver, magnesium-silver alloy, or graphene and other transparent conductive oxide films. The touch sensing electrode 31 of the embodiment of the invention adopts a single-layer transparent conductive oxide film to realize the touch function, and has a simple structure.
The second electrode 23 may be a single-layer electrode film or a multi-layer electrode film, and may be, but not limited to, a single metal material, an alloy material, or a metal oxide/nitride/halide material, and the metal element contained in the single metal material, the alloy material, or the metal oxide/nitride/halide material is one of gold, silver, copper, aluminum, nickel, molybdenum, or the like, which has a low resistivity.
The auxiliary electrode layer 50 may be, but not limited to, made of a metal simple substance, an alloy material, a metal oxide/nitride/halide material, or a nano conductive material, and may include, but is not limited to, a film forming process such as evaporation, ion plating, magnetron sputtering, or CVD; the metal simple substance may be Al, Ag, etc., the alloy material may be magnesium-silver alloy, molybdenum-silver alloy, etc., the metal oxide/nitride/halide material may be ITO, IZO, etc., and the nano conductive material may be graphene, etc. The auxiliary electrode layer 50 formed of these metal simple substances, alloy materials, metal oxide/nitride/halide materials, or nano conductive materials can achieve a transparent optical effect when the thickness is less than a certain value.
The photovoltaic layer 22 may be, but is not limited to, a PN or PIN device made of polysilicon, amorphous silicon, or gallium arsenide.
The first electrode 21 and the second electrode 23 form a loop, so that charge carriers generated by the photovoltaic layer 22 excited by light irradiation form a current to provide power for the device, the first electrode 21 shown in fig. 1 is a front electrode irradiated by external light, the external light directly irradiates on the first electrode 21 through the transparent substrate 10, and the second electrode 23 is a back electrode irradiated by back light.
In the embodiment of the present invention, the transparent substrate 10 may be a transparent inorganic material such as glass and quartz, or a transparent organic high molecular polymer material, and the transmittance of light is only 90% or more, and the normal display and photoelectric conversion efficiency is not affected. The protective layer 32 for covering the touch sensing electrode 31 is preferably, but not limited to, a transparent photoresist (organic polymer material), an inorganic SiO2, SiNx, or the like.
It should be understood that the solar cell 20 and the touch sensing unit 30 are disposed in an insulating manner, and particularly, the solar cell 20 and the touch sensing unit 30 can be separated from each other by the protective layer 32 of the touch sensing unit 30, so as to avoid the solar cell 20 and the touch sensing unit 30 from affecting each other. Moreover, because the solar cell unit 20 and the touch sensing unit 30 are separately arranged in parallel, when the solar cell is applied to other devices with display, the solar cell unit 20 avoids the display area, and the solar cell unit 20 does not affect the display area corresponding to the touch sensing unit 30, and then the electric energy of the solar cell is provided to the display device with larger power consumption, thereby effectively improving the cruising ability of the display device. The arrangement of the touch sensing unit 30 of the invention is equivalent to hollowing out the whole solar cell into the first region 10-b, and then integrating the touch sensing unit 30 in the solar cell to realize that the solar cell has a touch function.
The solar cell 20 of the embodiment of the invention may be a transparent structure, an opaque structure or a semi-transparent structure, and the material of the second electrode 23 may be selected according to actual requirements to determine whether the solar cell 20 is transparent or not. The solar cell 20 may be a solar cell 20 with a single junction structure, or a solar cell 20 with a multi-junction structure connected in series, and the specific configuration manner of the structure may be conventional in the prior art, which is not to be construed as being too much and limited in the present invention. The area of the solar cell unit 20 is in direct proportion to the photoelectric conversion effect, that is, the area of the solar cell unit 20 is increased for receiving external light irradiation, so that a better photoelectric conversion effect can be obtained, more electric energy is provided for the applied equipment, and the service life is prolonged.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the embodiments of the present invention and not for limiting the same, and although the embodiments of the present invention are described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions can be made on the technical solutions of the embodiments of the present invention, and these modifications or equivalent substitutions cannot make the modified technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims (4)

1. A method for manufacturing a solar cell with a touch function, wherein the solar cell is provided with a first area and a second area, is characterized by comprising the following steps:
the method comprises the following steps: providing a transparent substrate;
step two: the manufacturing method comprises the steps of simultaneously manufacturing a first electrode and a touch sensing electrode on the same side of a transparent substrate, wherein the first electrode and the touch sensing electrode are made of the same material, the touch sensing electrode is of a single-layer transparent conductive oxide film structure, and the touch sensing electrode is manufactured in a first area and the first electrode is manufactured in a second area;
step three: manufacturing a protective layer on the outer side of the touch sensing electrode to form a touch sensing unit;
step four: sequentially forming a photovoltaic layer and a second electrode on the first electrode;
step five: and after cleaning, sequentially carrying out imaging etching on the second electrode and the photovoltaic layer to form the solar cell unit.
2. The method as claimed in claim 1, further comprising forming an insulating layer and forming an auxiliary electrode layer on the first electrode, wherein the insulating layer is used to insulate and separate the auxiliary electrode layer from the second electrode.
3. The method for manufacturing a solar cell with a touch control function according to claim 2, further comprising a binding process of the touch sensing unit and a binding process of the solar cell unit, wherein the binding process of the touch sensing unit and the binding process of the solar cell unit use the same flexible printed circuit board.
4. The method as claimed in claim 3, wherein the auxiliary electrode layer and/or the second electrode are used for fabricating a bonding electrode of the touch sensing unit.
CN202010208144.1A 2020-03-23 2020-03-23 Manufacturing method of solar cell with touch function Pending CN111403501A (en)

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