CN111398708A - Microwave heating equipment and method for comprehensive test of electromagnetic material - Google Patents
Microwave heating equipment and method for comprehensive test of electromagnetic material Download PDFInfo
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- CN111398708A CN111398708A CN202010192463.8A CN202010192463A CN111398708A CN 111398708 A CN111398708 A CN 111398708A CN 202010192463 A CN202010192463 A CN 202010192463A CN 111398708 A CN111398708 A CN 111398708A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/003—Environmental or reliability tests
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/64—Heating using microwaves
- H05B6/6447—Method of operation or details of the microwave heating apparatus related to the use of detectors or sensors
- H05B6/645—Method of operation or details of the microwave heating apparatus related to the use of detectors or sensors using temperature sensors
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/64—Heating using microwaves
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- H05B6/806—Apparatus for specific applications for laboratory use
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Abstract
A microwave heating device and a microwave heating method for comprehensive testing of electromagnetic materials belong to the technical field of electromagnetic material testing devices and methods and are used for heating electromagnetic materials at high temperature. The technical scheme is as follows: the vector network analyzer is connected with the microwave heating furnace, the rack is fixed on the lower portion in the microwave heating furnace, the ventilating device, the vacuumizing device and the power distribution control box are installed in the rack, the microwave sealing cavity is arranged above the rack, the microwave generating devices are respectively arranged on the upper surface, the lower surface and the rear surface of the outer wall of the microwave sealing cavity, the modular heating cavity is arranged in the microwave sealing cavity, the sample clamp is placed in the modular heating cavity, the wave guide devices are installed on two sides of the modular heating cavity and are connected with the vector network analyzer, and the furnace door device is installed in front of the microwave sealing cavity. The invention can carry out high-efficiency and rapid temperature rise on the material, rapidly measure the electric and magnetic parameters of the material, break through the monopoly of foreign technologies and realize the major breakthrough of the high-temperature parameter testing technology of the electromagnetic material.
Description
Technical Field
The invention relates to microwave heating equipment and a microwave heating method for comprehensive testing of an electromagnetic material, and belongs to the technical field of electromagnetic material testing equipment and methods.
Background
The electromagnetic material is an important material in the aerospace industry, and the parameter test of the electromagnetic material is an important content in the process of manufacturing the electromagnetic material, and is related to the research and production of the high-quality electromagnetic material. At present, the high-temperature heating test of electromagnetic materials is always monopolized by foreign technologies, and has great influence on the rapid development of the Chinese aviation and aerospace industry. The domestic electromagnetic material parameter test is carried out under the normal temperature condition, the conventional high-temperature material parameter test is carried out by adopting an electric heating mode, the electric heating rate is low, the energy consumption is high, the conventional high-temperature material parameter test belongs to an external heating mode, a thermocouple is used for measuring the ambient temperature to express the temperature of a sample, and the relation between the measurement parameter and the temperature of the sample to be tested under the program control temperature is researched. Due to the fact that the materials, the shapes and the sizes of the samples to be tested are different, and the samples to be tested can generate certain chemical reactions or physical changes under the condition of high temperature for a long time, the chemical composition and the structure of the samples are changed, so that the measured parameters of the samples cannot truly reflect the properties of the materials, the machine occupation time, the test cost and the test cost of the test are increased, and the research requirements of vast aerospace researchers cannot be met. The research of the electric and magnetic parameters of the material under the high temperature condition is very difficult. In summary, the disadvantages and shortcomings of the prior art are mainly reflected in two aspects, namely that the electromagnetic material comprehensive test equipment is non-high temperature equipment; and secondly, the comprehensive test equipment for the electromagnetic material cannot be fused with the conventional heating technology.
At present, the requirement for solving the high-temperature comprehensive test of electromagnetic materials is to realize high-efficiency and rapid temperature rise under the condition of atmosphere or pressure under the condition of not changing the properties of the materials so as to finish the test of samples. Microwave heating can meet this requirement throughout modern physical heating technologies. The microwave is transmitted in the space in the form of electromagnetic wave, is an energy form, can be converted into heat energy in a medium, has the remarkable advantages of rapid heating, low energy consumption, good heating uniformity inside and outside simultaneously and the like, and can realize the test of high-temperature electromagnetic parameters of the material.
Therefore, the realization of the rapid temperature rise of the material and the test of the high-temperature electromagnetic parameters of the material under the condition of not influencing the property of the material are important in the research and development of domestic researchers, and the development of the equipment and the method for the high-temperature comprehensive test of the electromagnetic material by utilizing the microwave heating mode is necessary and possible.
Disclosure of Invention
The invention aims to solve the technical problem of providing microwave heating equipment and a method for comprehensively testing electromagnetic materials, which can realize high-efficiency and quick temperature rise under the condition of atmosphere or pressure without changing the properties of the materials, quickly measure the electric and magnetic parameters of the materials and finish the test of samples, thereby breaking through the monopoly of foreign technologies and realizing the major breakthrough of the high-temperature parameter testing technology of the electromagnetic materials.
The technical scheme for solving the technical problems is as follows:
a microwave heating device for comprehensive test of electromagnetic material comprises a vector network analyzer and a microwave heating furnace, wherein the vector network analyzer is connected with the microwave heating furnace through a coaxial cable and a cable adapter, the microwave heating furnace comprises a rack, a microwave sealing chamber, a microwave generating device, a modular heating cavity, a wave guide device, a vacuumizing device, a ventilating device and a furnace door device, the rack is fixed at the lower part in the microwave heating furnace, the ventilating device, the vacuumizing device and a distribution control box are installed in the rack, the microwave sealing chamber is arranged above the rack, the microwave generating devices are respectively arranged on the upper surface, the lower surface and the rear surface of the outer wall of the microwave sealing chamber, the modular heating cavity is arranged in the microwave sealing chamber, the wave guide device comprises a sealing sleeve, a carbon fiber square wave guide, a fine-adjustment welding corrugated pipe, an impedance welding corrugated pipe, a, The sample clamp is placed in the modularized heating cavity, two carbon fiber square guided waves are respectively horizontally connected to two sides of the sample clamp, the other end of one carbon fiber square guided wave penetrates through the side wall of the modularized heating cavity to be connected with the impedance welding corrugated pipe, the outer end of the impedance welding corrugated pipe is connected with the conversion flange, the other end of the other carbon fiber square guided wave penetrates through the side wall of the modularized heating cavity to be connected with the fine adjustment welding corrugated pipe, the outer end of the fine adjustment welding corrugated pipe is connected with the conversion flange, two sealing sleeves are respectively connected to the left side and the right side outside the microwave sealing cavity, the two sealing sleeves are respectively sleeved on the periphery of the carbon fiber square guided wave, two ends of the two sealing sleeves are respectively connected with the conversion flange, the two conversion flanges are respectively connected with the vector network analyzer through a cable, the upper end of the lead screw guide rail sliding table is connected with a fine-tuning welding corrugated pipe, and the furnace door device is installed in front of the microwave sealing cavity.
The microwave generating device comprises a circular waveguide tube, a quartz glass vessel, a sealing flange, a magnetron power supply and a power distribution control box, wherein the circular waveguide tubes of the three microwave generating devices are respectively connected to the side walls above, behind and below the microwave sealing cavity, the quartz glass vessel is sleeved in the circular waveguide tube, the sealing flange seals the upper end of the circular waveguide tube, a flange hole is formed in the middle of the sealing flange and connected with a microwave excitation cavity, the upper end of the microwave excitation cavity is connected with the magnetron, the magnetron is connected with the magnetron power supply, and the magnetron power supply is connected with the power distribution control box.
The modularized heating cavity is of an upper and lower split type double-layer structure, the outer layer is short fiber light heat-insulation wave-transmission heat-insulation material, the inner layer is a wave-absorbing heating coating, the light heat-insulation wave-transmission heat-insulation material is a polycrystalline mullite short fiber product or a high-purity aluminum silicate short fiber product, and the wave-absorbing heating coating is composed of one or more of carbon, boron carbide, silicon carbide, molybdenum disilicide, iron oxide and zirconium diboride.
According to the microwave heating equipment for the comprehensive test of the electromagnetic materials, the temperature sensor insertion holes are formed in the outer wall of the microwave sealing cavity, the corresponding temperature sensor holes are formed in the wall of the modular heating cavity, and the front ends of the temperature sensors are inserted into the modular heating cavity through the temperature sensor insertion holes and the temperature sensor holes.
The vacuumizing device comprises a vacuum pump, a pressure gauge and a vacuum connector, the vacuum pump is fixed on the lower portion of the rack, the pressure gauge is installed in an exhaust pipe of the vacuum pump, and the exhaust pipe of the vacuum pump is communicated with the microwave sealing cavity through the vacuum connector.
Above-mentioned electromagnetic material integrated test microwave heating equipment, aerating device includes gas cylinder, gas mixing tank, gas flowmeter, admission valve and air outlet valve, and the gas cylinder is fixed in the frame lower part with mixing the gas tank, and the gas cylinder is connected with mixing the gas tank, installs gas flowmeter on mixing the gas-supply pipe of gas tank, and the gas-supply pipe of mixing the gas tank is connected with the sealed sleeve pipe of the outside left and right sides of microwave seal cavity through the admission valve, and the air outlet valve is installed on the outer wall of microwave seal cavity.
The microwave heating equipment for the comprehensive test of the electromagnetic materials comprises a furnace cover, a sealing rubber ring, a cover tightening knob and a microwave suppressor, wherein one side of the furnace cover is connected with the outer wall of a microwave sealing cavity through a rotating shaft, the cover tightening knob is installed on the other side of the furnace cover, the sealing rubber ring is arranged between the furnace cover and the outer wall of the microwave sealing cavity, and the microwave suppressor is arranged on the inner side of the furnace cover.
The microwave heating method for comprehensively testing the microwave heating equipment by using the electromagnetic material comprises the following steps of:
step 1: opening a furnace cover of the microwave sealing chamber, and sequentially placing a stainless steel support and the lower half part of the modular heating cavity;
step 2: one end of one carbon fiber side guided wave is connected with an impedance welding corrugated pipe through a conversion flange, the other end of the carbon fiber side guided wave is connected with a sample clamp, one end of the other carbon fiber side guided wave is connected with a fine tuning welding corrugated pipe through the conversion flange, the other end of the other carbon fiber side guided wave is connected with the sample clamp, the sample clamp is located in the middle of the lower half part of the modularized heating cavity, and the fine tuning welding corrugated pipe is adjusted in a micro mode to enable the carbon fiber side guided;
and step 3: connecting the carbon fiber square guided waves on two sides with a cable adapter through a conversion flange, sequentially connecting the cable adapter with a coaxial cable and a vector network analyzer, and opening a vector network analyzer calibration instrument;
and 4, step 4: adjusting the sliding table of the lead screw guide rail outwards, stretching and finely adjusting the length of the welded corrugated pipe 9, driving the carbon fiber square guided wave 31 to pull open the distance between the sample clamps, putting a sample to be measured into the sample clamps, and adjusting the sliding table of the lead screw guide rail inwards to enable the sample clamps to clamp and fix the sample;
and 5: inserting a temperature sensor into a temperature sensor jack of a microwave sealing cavity 5, inserting the front end of the temperature sensor into a modular heating cavity, enabling the distance between the measuring end of the temperature sensor and a sample to be 5-10 mm, screwing the temperature sensor by using a sealing nut, covering the upper half part of the modular heating cavity tightly, closing a furnace cover and screwing a cover knob tightly;
step 6: closing an air inlet valve on a sealing sleeve, sequentially opening an air outlet valve, opening a vacuum pump to pump vacuum, closing the vacuum pump after the vacuum degree is less than 10Pa, opening an air bottle, an air mixing tank and the air inlet valve, introducing gas required by the test, observing a pressure gauge, opening the air outlet valve when the gauge pressure is slightly greater than one atmosphere pressure to ensure smooth air flow, and simultaneously adjusting parameters of a gas flowmeter according to the test requirement;
and 7: turning on a power supply of the device, setting program parameters on a man-machine interface, heating and raising the temperature, and carrying out sample parameter testing in the temperature raising process;
and 8: and after the test is finished, stopping heating, cooling to below 100 ℃, closing the gas cylinder, the gas mixing tank, the gas inlet valve and the gas outlet valve in sequence, opening the furnace cover, taking out the upper half part of the modularized heating cavity, and taking down the sample.
According to the microwave heating method for the comprehensive test of the electromagnetic material, the microwave generating frequency of the microwave generating device is 2.45GHz, the microwave output power is 400-4000W, and the average heating rate is 100-150 ℃/min.
The invention has the beneficial effects that:
the microwave heating furnace adopts microwave as a heating source, a light heat-insulating wave-transmitting material as a heat-insulating material and an internal coating as a heating element, can directly or indirectly heat a test material, and simultaneously carries out anti-oxidation protection in an inflation or air exhaust mode, the microwave input power is continuously adjustable, the heating temperature and the heating pressure are controllable, the rapid temperature rise in the microwave heating furnace can be realized, and the material electromagnetic parameter testing precision under the high-temperature condition of a sample can be improved.
The invention is the initiative of the high-temperature parameter testing technology of the electromagnetic material, realizes the electromagnetic parameter testing of the material under the high-temperature condition of microwave heating, and is a major breakthrough of the China aerospace industry in breaking through the monopoly of foreign technologies and mastering the high-temperature complex dielectric constant, complex permeability, loss, reflectivity, wave transmittance and other electromagnetic parameter testing technologies of the material. The invention greatly saves the test time, has stable microwave test signals, makes great contribution to the development of aerospace career, and has innovation and practicability.
Drawings
FIG. 1 is a front view of a microwave heating apparatus for comprehensive testing of electromagnetic materials;
FIG. 2 is a side view of FIG. 1;
FIG. 3 is a top view of FIG. 1;
figure 4 is a schematic view of the structure of the oven door arrangement;
FIG. 5 is a side view of FIG. 4;
FIG. 6 is a rear view of FIG. 4;
FIG. 7 is a schematic structural view of a microwave generating device;
FIG. 8 is a schematic structural view of a modular heating chamber;
FIG. 9 is a sectional view A-A of FIG. 8;
fig. 10 is a schematic view of the separated state of fig. 9.
The figures are labeled as follows: the device comprises a vector network analyzer 1, a coaxial cable 2, a microwave heating furnace 3, a microwave generating device 4, a microwave sealing chamber 5, a furnace cover 6, a human-computer interface 7, a sealing sleeve 8, a fine-tuning welding corrugated pipe 9, a conversion flange 10, a cable conversion joint 11, a lead screw guide rail sliding table 12, a gas flowmeter 13, a gas cylinder 14, a distribution control box 15, a vacuum pump 16, a pressure gauge 17, a frame 18, a temperature sensor jack 19, an impedance welding corrugated pipe 20, a modular heating cavity 21, a cover tightening knob 22, a temperature sensor 23, a stainless steel bracket 24, a gas mixing tank 25, a vacuum joint 26, a sealing rubber ring 27, a microwave suppressor 28, an air inlet valve 29, a circular waveguide pipe 30, a carbon fiber square waveguide 31, an air outlet valve 32, a sample clamp 33, a magnetron 34, a magnetron power supply 35, a microwave excitation cavity 36, a sealing flange 37, a quartz glass 38, an upper light, An upper inner acoustic wave heating coating 40, a lower inner acoustic wave heating coating 41 and a lower outer light heat insulation wave-transparent heat preservation material 42.
Detailed Description
FIG. 1 shows that the invention comprises a vector network analyzer 1 and a microwave heating furnace 3, wherein the vector network analyzer 1 is connected with the microwave heating furnace 3 through a coaxial cable 2 and a cable adapter 11, and the vector network analyzer 1 can provide electromagnetic parameter measurement of 45 MHz-325 GHz full-band materials through frequency expansion.
Fig. 1 and 2 show that the microwave heating furnace 3 is composed of a frame 18, a microwave sealing chamber 5, a microwave generating device 4, a modular heating cavity 21, a wave guide device, a vacuum pumping device, a ventilation device and a furnace door device.
The microwave oven comprises a rack 18, a ventilating device, a vacuumizing device and a power distribution control box 15, wherein the rack 18 is fixed at the inner lower part of the microwave heating oven 3, the rack 18 is internally provided with a microwave sealing chamber 5, the upper surface, the lower surface and the rear surface of the outer wall of the microwave sealing chamber 5 are respectively provided with a microwave generating device 4, a modular heating cavity 21 is arranged in the microwave sealing chamber 5, a wave guide device is connected with the modular heating cavity 21, and an oven door device is arranged right in front of the microwave sealing chamber 5.
Fig. 1, 2 and 7 show that the microwave generating device 4 includes a circular waveguide 30, a quartz glass dish 38, a sealing flange 37, a magnetron 34, a magnetron power supply 35 and a power distribution control box 15.
The circular wave guide tubes 30 of the three microwave generating devices 4 are respectively connected to the upper side wall, the rear side wall and the lower side wall of the microwave sealing chamber 5, a quartz glass vessel 38 is sleeved in the circular wave guide tubes 30, the sealing flange 37 seals the upper end of the circular wave guide tubes 30, a flange hole is formed in the middle of the sealing flange 37 and is connected with a microwave excitation cavity 36, the upper end of the microwave excitation cavity 36 is connected with a magnetron 34, the magnetron 34 is connected with a magnetron power supply 35, and the magnetron power supply 35 is connected with the power distribution control box 15.
Fig. 1, 2 and 3 show that the wave guide device comprises a sealing sleeve 8, a carbon fiber square wave guide 31, a fine tuning welding corrugated pipe 9, an impedance welding corrugated pipe 20, a conversion flange 10, a screw guide rail sliding table 12 and a sample clamp 33.
The sample clamp 33 is placed in the modularized heating cavity 21, two carbon fiber side guided waves 31 are respectively horizontally connected to two sides of the sample clamp 33, the other end of one carbon fiber side guided wave 31 penetrates through the side wall of the modularized heating cavity 21 to be connected with the impedance welding corrugated pipe 20, the outer end of the impedance welding corrugated pipe 20 is connected with the conversion flange 10, the other end of the other carbon fiber side guided wave 31 penetrates through the side wall of the modularized heating cavity 21 to be connected with the fine adjustment welding corrugated pipe 9, and the outer end of the fine adjustment welding corrugated pipe 9 is connected with the other conversion flange 10.
The two sealing sleeves 8 are respectively connected to the left side and the right side of the outer portion of the microwave sealing cavity 5, the two sealing sleeves 8 are respectively sleeved on the periphery of the carbon fiber square guided wave 31, two ends of the two sealing sleeves 8 are respectively connected with the conversion flange 10, and the two conversion flanges 10 are respectively connected with the vector network analyzer 1 through the cable conversion connector 11 and the coaxial cable 2.
The lower extreme of lead screw guide rail slip table 12 is fixed in the upper end of frame 18, and the upper end of lead screw guide rail slip table 12 is connected with fine setting welding bellows 9. The screw guide rail sliding table 12 can drive the fine tuning welding corrugated pipe 9 to stretch and compress, and the distance between the sample clamps 33 is pulled open, so that a sample to be measured is placed into the sample clamps 33 and then pulled back to be fixed in place.
Fig. 1 and 2 show that a temperature sensor jack 19 is arranged on the outer wall of the microwave sealing chamber 5, a corresponding temperature sensor hole is arranged on the wall of the modular heating cavity 21, and the front end of a temperature sensor 23 is inserted into the modular heating cavity 21 through the temperature sensor jack 19 and the temperature sensor hole to monitor the temperature in the modular heating cavity 21.
Fig. 4, 5 and 6 show that the furnace door device comprises a furnace cover 6, a sealing rubber ring 27, a cover tightening knob 22 and a microwave suppressor 28. The furnace door device is arranged in front of the microwave sealing chamber 5, one side of the furnace cover 6 is connected with the outer wall of the microwave sealing chamber 5 through a rotating shaft, the other side of the furnace cover 6 is provided with a cover tightening knob 22, a sealing rubber ring 27 is arranged between the furnace cover 6 and the outer wall of the microwave sealing chamber 5, and the inner side of the furnace cover 6 is provided with a microwave suppressor 28.
Fig. 1 and 2 show that the vacuum pumping device comprises a vacuum pump 16, a pressure gauge 17 and a vacuum joint 26, the vacuum pump 16 is fixed at the lower part of the frame 18, the pressure gauge 17 is installed in an exhaust pipe of the vacuum pump 16, and the exhaust pipe of the vacuum pump 16 is communicated with the microwave sealed chamber 5 through the vacuum joint 26 to perform vacuum pumping operation on the microwave sealed chamber 5.
Fig. 1 and 2 show that the aeration device comprises a gas cylinder 14, a gas mixing cylinder 25, a gas flow meter 13, an inlet valve 29 and an outlet valve 32. The gas cylinder 14 and the gas mixing tank 25 are fixed at the lower part of the frame 18, the gas cylinder 14 is connected with the gas mixing tank 25, the gas flow meter 13 is installed on the gas pipe of the gas mixing tank 25, the gas pipe of the gas mixing tank 25 is connected with the sealing sleeve 8 at the left side and the right side outside the microwave sealing chamber 5 through the gas inlet valve 29, and the gas outlet valve 32 is installed on the outer wall of the microwave sealing chamber 5.
Fig. 8, 9 and 10 show that the modular heating cavity 21 is a split-type double-layer structure, and the outer layers are an upper outer light heat-insulating wave-transmitting heat-insulating material 39, a lower outer light heat-insulating wave-transmitting heat-insulating material 42, an upper inner acoustic wave heating coating 40 and a lower inner acoustic wave heating coating 41. The light heat-insulating wave-transmitting heat-insulating material has the advantages of light weight, small heat capacity, low heat conductivity coefficient and excellent high-temperature resistance; the wave-absorbing coating has strong wave-absorbing and oxidation resistance, can work under the conditions of atmosphere, pressure and the like, can quickly raise the ambient temperature of the modular heating cavity 21 to the working temperature under the condition of atmosphere or pressure by absorbing and converting microwave energy through the wave-absorbing coating, has the average temperature rise rate of 100-150 ℃/min, has the thermal conversion efficiency 15-30 times that of a conventional electric furnace, and can quickly measure the electric and magnetic parameters of the material under the condition of not changing the characteristics of the material at the high temperature stage.
The microwave heating method for the comprehensive test of the electromagnetic material is carried out by adopting the following steps:
step 1: opening a furnace cover 6 of the microwave sealing chamber 5, and sequentially placing a stainless steel bracket 24 and the lower half part of the modular heating cavity 21;
step 2: one end of one carbon fiber square guided wave 31 is connected with an impedance welding corrugated pipe 20 through a conversion flange 10, the other end of the carbon fiber square guided wave is connected with a sample clamp 33, one end of the other carbon fiber square guided wave 31 is connected with a fine adjustment welding corrugated pipe 9 through the conversion flange 10, the other end of the other carbon fiber square guided wave is connected with the sample clamp 33, the sample clamp 33 is positioned in the middle of the lower half part of the modularized heating cavity 21, and the fine adjustment welding corrugated pipe 9 is adjusted in a micro-adjustment mode to enable the carbon fiber square guided;
and step 3: connecting the carbon fiber side guided waves 31 on the two sides with a cable conversion joint 11 through a conversion flange 10, sequentially connecting the cable conversion joint 11 with a coaxial cable 2 and a vector network analyzer 1, and opening a vector network analyzer calibration instrument;
and 4, step 4: adjusting the lead screw guide rail sliding table 12 outwards, stretching and finely adjusting the length of the welded corrugated pipe 9, driving the carbon fiber square guided wave 31 to pull the distance between the sample clamps 33, putting a sample to be measured into the sample clamps 33, and adjusting the lead screw guide rail sliding table 12 inwards to enable the sample clamps 33 to clamp and fix the sample;
and 5: inserting a temperature sensor into a temperature sensor jack 19 of a microwave sealed cavity 5, inserting the front end of a temperature sensor 23 into a modular heating cavity 21, enabling the distance between the measuring end of the temperature sensor 23 and a sample to be 5-10 mm, screwing the temperature sensor 23 by using a sealing nut, tightly covering the upper half part of the modular heating cavity 21, closing a furnace cover 6 and screwing a cover knob 22;
step 6: closing an air inlet valve 29 on a sealing sleeve 8, sequentially opening an air outlet valve 32, opening a vacuum pump 16 for vacuumizing, closing the vacuum pump 16 after the vacuum degree is less than 10Pa, opening an air bottle 14, a mixed air tank 25 and the air inlet valve 29, introducing gas required for testing, observing a pressure gauge 17, opening the air outlet valve 32 when the gauge pressure is slightly greater than one atmosphere, ensuring smooth air flow, and simultaneously adjusting parameters of a gas flowmeter 13 according to the testing requirement;
and 7: turning on a power supply of the device, setting program parameters on a man-machine interface, heating and raising the temperature, and carrying out sample parameter testing in the temperature raising process;
and 8: and after the test is finished, stopping heating, cooling to below 100 ℃, closing the gas cylinder 14, the gas mixing tank 25, the gas inlet valve 29 and the gas outlet valve 32 in sequence, opening the furnace cover 6, taking out the upper half part of the modular heating cavity 21, and taking down the sample.
In the microwave heating process of the comprehensive test of the electromagnetic material, the microwave generating frequency of the microwave generating device is 2.45GHz, the microwave output power is 400W-4000W, and the average heating rate is 100-150 ℃/min.
One embodiment of the invention is as follows:
the vector network analyzer 1 is a medium electric scientific instrument 3672E;
the model of the coaxial cable 2 is Z3507-3.5 JK-3000;
the length of the frame 18 is 750mm, the width is 650mm, and the height is 625 mm;
the length of the microwave heating furnace 3 is 1190mm, the width is 850mm, and the height is 1365 mm;
the length of the microwave sealed chamber 5 is 420mm, the width is 420mm, and the height is 410 mm;
the modular heating cavity 21 has an outer diameter phi 195mm, a wall thickness of 40mm and a length of 200 mm;
the carbon fiber square guided wave 31 is a BJ100 square waveguide with the length of 500 mm;
the diameter of the fine tuning welding corrugated pipe 9 is phi 114mmX phi 98mm, the length is 118mm, and the stroke is 70mm;
the diameter of the resistance welding corrugated pipe 20 is phi 114mmX phi 98mm, and the length is 118 mm;
the diameter of the sealing sleeve 8 is phi 102mm, and the length is 204 mm;
the microwave generating device 4 has a length of 280mm, a width of 135mm and a height of 110 mm;
the diameter of the circular waveguide 30 is phi 104.5mm, the inner diameter is 98mm, and the length is 70mm;
the magnetron 34 has a model number of samsung OM75P (31) ESGN;
the temperature sensor 23 is a B-type thermocouple, the diameter phi is 6mm, and the length is 500 mm;
the types of the air inlet valve 29 and the air outlet valve 32 are Ningbo Lily NV-02M-02F-PT and NV-02F-02M-PT;
the vacuum pump 16 is a rotary vane vacuum pump TRP-12;
the model of the pressure gauge 17 is YN-63, -0.1MPa to 0.06 MPa;
the gas meter 13 is of the type OMEGA F L D2001.
One embodiment of the invention is carried out using the following steps:
step 1, preparing a test sample, namely preparing a sample material to be tested, namely a porous silicon nitride ceramic material, wherein the size of the sample to be tested is 22.86mm × 10.16.16 mm × 2 mm;
step 2: starting a main power supply of the equipment, and checking whether each part and a control instrument are normal;
and step 3: opening a furnace cover 6 of the microwave sealing chamber 5, and sequentially placing a stainless steel bracket 24 and the lower half part of the modular heating cavity 21;
and 4, step 4: one end of a carbon fiber square guided wave BJ100 is connected with an impedance welding corrugated pipe 20 through a conversion flange 10, and the other end is connected with a sample clamp 33;
and 5: adjusting the lead screw guide rail sliding table 12 outwards to drive the fine tuning welding corrugated pipe to be in a stretching state, then connecting one end of another carbon fiber square guided wave BJ100 with a fine tuning welding corrugated pipe 9 through a conversion flange 10, and connecting the other end with a sample clamp 33;
step 6: adjusting the lead screw guide rail sliding table 12 inwards to drive the fine tuning welding corrugated pipe to be in a compressed state, enabling the left sample clamp 33 and the right sample clamp 33 to be abutted together and to be located in the middle of the lower half part of the modular heating cavity 21, and enabling the carbon fiber square guided waves BJ100 on the two sides to be concentric and coaxial through the fine tuning welding corrugated pipe 9;
and 7: the carbon fiber square guided wave BJ100 on two sides is connected with a cable adapter 11 through a conversion flange 10, and the cable adapter 11 is sequentially connected with a coaxial cable 2 and a vector network analyzer;
and 8: turning on a power switch of the vector network analyzer, setting the test frequency to 2450MHz, and turning off the power supply after calibrating the vector network analyzer;
and step 9: adjusting the lead screw guide rail sliding table 12 outwards to drive the micro-adjustment welding corrugated pipe to be in a stretching state, simultaneously driving the carbon fiber square guided wave BJ100 to pull away the distance between the sample clamps 33, placing a sample to be detected into the sample clamps 33, and adjusting the lead screw guide rail sliding table 12 inwards to enable the sample clamps 33 to clamp and fix the sample;
step 10: inserting a B-type high-temperature thermocouple into a temperature sensor jack 19 of a microwave sealing chamber 5, inserting the front end of the B-type high-temperature thermocouple into a modular heating cavity 21, enabling the distance between the measuring end of the B-type high-temperature thermocouple and a sample to be measured to be 5mm, locking the B-type high-temperature thermocouple by using a sealing nut, tightly covering the upper half part of the modular heating cavity 21, closing a furnace cover 6 and screwing a cover knob 22;
step 11: closing the air inlet valve 29 and the air outlet valve 32 on the sealing sleeve 8 in sequence, opening the power supply of the vacuum pump 16 to start vacuumizing, closing the power supply of the vacuum pump 16 to stop vacuumizing after the vacuum count data is less than 10Pa,
step 13: the main power supply of the equipment is turned on, program parameters are set on a human-computer interface 7, and the test temperature is 1300 ℃; heating for 10 min; keeping the temperature at high temperature for 2 min; starting to heat up;
step 14: opening the vector network analyzer when the temperature reaches 1300 ℃, and measuring the high-temperature composite dielectric constant of the material;
step 15: and after the test is finished, stopping heating, naturally cooling to below 100 ℃, firstly closing the main power supply of the equipment, then sequentially closing the safety valve of the gas cylinder 14, the gas inlet valve 29 and the gas outlet valve 32, opening the furnace cover 6, taking out the upper half part of the modular heating cavity 21, and taking down the sample.
Step 16: and (4) performing data analysis by using a computer.
Claims (9)
1. The utility model provides an electromagnetic material integrated test microwave heating equipment which characterized in that: the microwave oven comprises a vector network analyzer (1) and a microwave oven (3), wherein the vector network analyzer (1) is connected with the microwave oven (3) through a coaxial cable (2) and a cable adapter (11), the microwave oven (3) consists of a rack (18), a microwave sealing chamber (5), a microwave generating device (4), a modular heating cavity (21), a wave guide device, a vacuumizing device, a ventilating device and an oven door device, the rack (18) is fixed at the inner lower part of the microwave oven (3), the ventilating device, the vacuumizing device and a power distribution control box (15) are arranged in the rack (18), the microwave sealing chamber (5) is arranged above the rack (18), the microwave generating devices (4) are respectively arranged on the upper surface, the lower surface and the rear surface of the outer wall of the microwave sealing chamber (5), the modular heating cavity (21) is arranged in the microwave sealing chamber (5), the wave guide device comprises a sealing sleeve (8), carbon fiber square guided waves (31), a fine-tuning welding corrugated pipe (9), an impedance welding corrugated pipe (20), a conversion flange (10), a lead screw guide rail sliding table (12) and a sample clamp (33), wherein the sample clamp (33) is placed in a modularized heating cavity (21), one ends of the two carbon fiber square guided waves (31) are respectively and horizontally connected with two sides of the sample clamp (33), the other end of one carbon fiber square guided wave (31) penetrates through the side wall of the modularized heating cavity (21) to be connected with the impedance welding corrugated pipe (20), the outer end of the impedance welding corrugated pipe (20) is connected with the conversion flange (10), the other end of the other carbon fiber square guided wave (31) penetrates through the side wall of the modularized heating cavity (21) to be connected with the fine-tuning welding corrugated pipe (9), the outer end of the, two sealing sleeve (8) are connected respectively in the outside left and right sides of microwave seal cavity (5), two sealing sleeve (8) overlap respectively in the periphery of carbon fiber side guided wave (31), the both ends of two sealing sleeve (8) are connected with conversion flange (10) respectively, two conversion flange (10) are respectively through cable crossover sub (11), coaxial cable (2) are connected with vector network analysis appearance (1), the upper end in frame (18) is fixed to the lower extreme of lead screw guide rail slip table (12), the upper end of lead screw guide rail slip table (12) is connected with fine setting welding bellows (9), the furnace gate device is installed in the front of microwave seal cavity (5).
2. The microwave heating apparatus for comprehensive testing of electromagnetic materials according to claim 1, wherein: the microwave generating device (4) comprises a circular waveguide tube (30), a quartz glass vessel (38), a sealing flange (37), a magnetron (34), a magnetron power supply (35) and a power distribution control box (15), circular waveguide tubes (30) of three microwave generating devices (4) are respectively connected to the upper side, the rear side and the lower side wall of a microwave sealing chamber (5), the quartz glass vessel (38) is sleeved in the circular waveguide tubes (30), the upper end of the circular waveguide tube (30) is sealed by the sealing flange (37), a flange hole is formed in the middle of the sealing flange (37) and connected with a microwave excitation cavity (36), the upper end of the microwave excitation cavity (36) is connected with the magnetron (34), the magnetron (34) is connected with the magnetron power supply (35), and the magnetron power supply (35) is connected with the power distribution control box (15).
3. The microwave heating apparatus for comprehensive testing of electromagnetic materials according to claim 1, wherein: the modularized heating cavity (21) is of an upper and lower split type double-layer structure, the outer layer is a short fiber light heat-insulation wave-transmission heat-insulation material, the inner layer is a wave-absorbing heating coating, the light heat-insulation wave-transmission heat-insulation material is a polycrystalline mullite short fiber product or a high-purity aluminum silicate short fiber product, and the wave-absorbing heating coating is composed of one or more of carbon, boron carbide, silicon carbide, molybdenum disilicide, iron oxide and zirconium diboride.
4. The microwave heating apparatus for comprehensive testing of electromagnetic materials according to claim 1, wherein: the microwave heating device is characterized in that a temperature sensor jack (19) is arranged on the outer wall of the microwave sealing cavity (5), a corresponding temperature sensor hole is formed in the wall of the modular heating cavity (21), and the front end of the temperature sensor (23) is inserted into the modular heating cavity (21) through the temperature sensor jack (19) and the temperature sensor hole.
5. The microwave heating apparatus for comprehensive testing of electromagnetic materials according to claim 1, wherein: the vacuumizing device comprises a vacuum pump (16), a pressure gauge (17) and a vacuum joint (26), the vacuum pump (16) is fixed on the lower portion of the rack (18), the pressure gauge (17) is installed in an exhaust pipe of the vacuum pump (16), and the exhaust pipe of the vacuum pump (16) is communicated with the microwave sealing cavity (5) through the vacuum joint (26).
6. The microwave heating apparatus for comprehensive testing of electromagnetic materials according to claim 1, wherein: the ventilating device comprises a gas cylinder (14), a gas mixing tank (25), a gas flowmeter (13), a gas inlet valve (29) and a gas outlet valve (32), the gas cylinder (14) and the gas mixing tank (25) are fixed on the lower portion of a rack (18), the gas cylinder (14) is connected with the gas mixing tank (25), the gas flowmeter (13) is installed on a gas pipe of the gas mixing tank (25), the gas pipe of the gas mixing tank (25) is connected with sealing sleeves (8) on the left side and the right side of the outer portion of the microwave sealing cavity (5) through the gas inlet valve (29), and the gas outlet valve (32) is installed on the outer wall of the microwave sealing cavity (5).
7. The microwave heating apparatus for comprehensive testing of electromagnetic materials according to claim 1, wherein: the furnace door device comprises a furnace cover (6), a sealing rubber ring (27), a cover tightening knob (22) and a microwave suppressor (28), wherein one side of the furnace cover (6) is connected with the outer wall of the microwave sealing cavity (5) through a rotating shaft, the cover tightening knob (22) is installed on the other side of the furnace cover (6), the sealing rubber ring (27) is arranged between the furnace cover (6) and the outer wall of the microwave sealing cavity (5), and the microwave suppressor (28) is arranged on the inner side of the furnace cover (6).
8. A microwave heating method for comprehensively testing microwave heating equipment by using the electromagnetic material is characterized by comprising the following steps of: the method comprises the following steps:
step 1: opening a furnace cover (6) of the microwave sealing chamber (5), and sequentially placing a stainless steel bracket (24) and the lower half part of the modular heating cavity (21);
step 2: one end of one carbon fiber square guided wave (31) is connected with an impedance welding corrugated pipe (20) through a conversion flange (10), the other end of the carbon fiber square guided wave is connected with a sample clamp (33), one end of the other carbon fiber square guided wave (31) is connected with a fine adjustment welding corrugated pipe (9) through the conversion flange (10), the other end of the carbon fiber square guided wave is connected with the sample clamp (33), the sample clamp (33) is positioned in the middle of the lower half part of a modularized heating cavity (21), and the fine adjustment welding corrugated pipe (9) enables the carbon fiber square guided waves (31) on two sides to be concentric and coaxial;
and step 3: connecting the carbon fiber square guided waves (31) on the two sides with a cable adapter (11) through a conversion flange (10), sequentially connecting the cable adapter (11) with a coaxial cable (2) and a vector network analyzer (1), and opening the vector network analyzer (1) to calibrate an instrument;
and 4, step 4: outwards adjusting the lead screw guide rail sliding table (12), stretching and finely adjusting the length of the welding corrugated pipe (9), driving the carbon fiber square guided wave 31 to pull away the distance between the sample clamps (33), putting a sample to be measured into the sample clamps (33), inwards adjusting the lead screw guide rail sliding table (12), and enabling the sample clamps (33) to clamp and fix the sample;
and 5: inserting a temperature sensor (23) into a temperature sensor jack (19) of a microwave sealed chamber (5), inserting the front end of the temperature sensor (23) into a modular heating cavity (21), enabling the distance between the measuring end of the temperature sensor (23) and a sample to be 5-10 mm, screwing the temperature sensor (23) by using a sealing nut, tightly covering the upper half part of the modular heating cavity (21), closing a furnace cover (6) and screwing a cover knob (22);
step 6: closing an air inlet valve (29) on a sealing sleeve (8), sequentially opening an air outlet valve (32), opening a vacuum pump (16) for vacuumizing, closing the vacuum pump (16) after the vacuum degree is less than 10Pa, opening an air bottle (14), an air mixing tank (25) and the air inlet valve (29), introducing gas required by a test, observing a pressure gauge (17), opening the air outlet valve (32) when the gauge pressure is slightly greater than one atmospheric pressure to ensure smooth air flow, and simultaneously adjusting parameters of a gas flowmeter (13) according to the test requirement;
and 7: turning on the power supply of the equipment, setting program parameters in a man-machine interface (7), heating and raising the temperature, and carrying out sample parameter test in the temperature raising process;
and 8: and after the test is finished, stopping heating, cooling to below 100 ℃, closing the gas cylinder (14), the gas mixing tank (25), the gas inlet valve (29) and the gas outlet valve (32) in sequence, opening the furnace cover (6), taking out the upper half part of the modularized heating cavity (21), and taking down the sample.
9. The microwave heating method for the comprehensive test of the electromagnetic materials as claimed in claim 8, wherein: the microwave generating frequency of the microwave generating device (4) is 2.45GHz, the microwave output power is 400W-4000W, and the average heating rate is 100-150 ℃/min.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112198468A (en) * | 2020-09-11 | 2021-01-08 | 中国科学院金属研究所 | Waveguide method microwave dielectric material ultralow temperature complex electromagnetic parameter testing device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112198468A (en) * | 2020-09-11 | 2021-01-08 | 中国科学院金属研究所 | Waveguide method microwave dielectric material ultralow temperature complex electromagnetic parameter testing device |
| CN112198468B (en) * | 2020-09-11 | 2022-01-14 | 中国科学院金属研究所 | Waveguide method microwave dielectric material ultralow temperature complex electromagnetic parameter testing device |
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