CN111365221B - Control method for integrated dry pump test board - Google Patents

Control method for integrated dry pump test board Download PDF

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Publication number
CN111365221B
CN111365221B CN201811601913.3A CN201811601913A CN111365221B CN 111365221 B CN111365221 B CN 111365221B CN 201811601913 A CN201811601913 A CN 201811601913A CN 111365221 B CN111365221 B CN 111365221B
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vacuum
plc
flow
vacuum chamber
control method
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CN111365221A (en
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刘坤
张漫漫
李昌龙
王光玉
张军
郭丽娟
迟小宇
巴要帅
姜玥
巴德纯
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Sky Technology Development Co ltd Of Chinese Academy Of Sciences
Northeastern University China
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Sky Technology Development Co ltd Of Chinese Academy Of Sciences
Northeastern University China
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B51/00Testing machines, pumps, or pumping installations

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

The invention relates to a control method of an integrated dry pump test board. The system is mainly characterized in that one control quantity can be independently controlled or a plurality of control quantities can be simultaneously controlled, and the performance of the dry pump under the condition of load can be simulated by controlling the temperature, the flow, the vacuum degree and the rotating speed. Measured data are integrated into the PLC for analysis and processing, all valves are electric control valves, and the system can comprehensively realize automation.

Description

Control method for integrated dry pump test board
Technical Field
The invention relates to the field of vacuum equipment control, in particular to a control method of a vacuum dry pump test bench.
Background
In recent years, the development of vacuum dry pumps has been facing a well-blow-out type of growth. Meanwhile, vacuum dry pump manufacturing enterprises also face huge challenges due to the harsh environment of the dry pump application. The domestic vacuum dry pump products have poor quality and become a bottleneck limiting the domestic dry pump industrialization. In order to improve the quality and the output capacity of the dry pump, the performance of the dry pump can be tested and monitored in the design stage or the design completion stage of the dry pump, so that a dry pump test bench is designed to carry out performance detection on the dry pump. The existing dry pump test system is completely manual in test process, complex in procedure, low in efficiency, easy to influence detection precision by human, and has potential safety hazards of personnel and equipment.
Disclosure of Invention
The invention aims to solve the problems that the performance test of the pump to be tested under various states is realized, the multi-direction detection of the pump to be tested can be realized, the full automation is realized, and the safety is ensured.
The technical scheme adopted by the invention for realizing the purpose is as follows: the influence of variables on the air suction performance of the dry pump is researched by adopting a test method of 'three fixing and one adjusting' and controlling any three of flow, vacuum degree, temperature and rotating speed to be kept unchanged.
The control method of the integrated dry pump test bench comprises the following steps:
firstly, providing background vacuum conditions for two vacuum chambers, and closing two vacuum obtaining devices after the vacuum degrees of the two vacuum chambers meet the requirements; after obtaining the background vacuum, opening a pipeline electromagnetic valve A between the two vacuum chambers and a pipeline electromagnetic valve B between the second balance chamber and the first vacuum chamber; after air is fed, the vacuum degree of the first vacuum chamber can change along with air feeding and air suction of the pump to be tested, and the vacuum degree is kept unchanged by controlling the opening degree of at least one valve in the electromagnetic valve A and the electromagnetic valve B; meanwhile, controlling the temperature;
flow control: the flow meters of the pipelines between the first balance chamber and the second balance chamber transmit the measured flow value to the programmable logic controller PLC, and the PLC compares the flow value with a set value and controls the flow size by controlling the opening degree of the electromagnetic valve of the corresponding pipeline;
controlling the vacuum degree: the gas enters the first vacuum chamber, the absolute pressure transmitter feeds back the measured value of the vacuum degree to the PLC, the PLC compares the measured value of the vacuum degree with a set value at the moment, and the valve between the vacuum obtaining equipment and the first vacuum chamber is adjusted to realize constant pressure;
temperature control: the gas is heated by a heating device, the thermocouple transmits the acquired data to the PLC, the acquired data is compared with the set data, and the temperature control is realized by a proportional-integral-derivative controller PID;
detecting a pump to be detected: the frequency converter is used for controlling the variable frequency motor to change the rotating speed and detecting the air pumping performance of the pump to be detected at different rotating speeds.
Four pipelines with different thicknesses are arranged in front of the vacuum chamber, different flow rates can pass through the pipelines, and each pipeline is provided with a valve with an adjustable opening degree.
6 paths of flowmeters with different measuring ranges are arranged between the first balance chamber and the second balance chamber, and a flowmeter channel with the corresponding measuring range is selected and opened according to a set flow value.
4 absolute pressure transmitters with different ranges are arranged on the first vacuum chamber, and the PLC executes an opening instruction on the absolute pressure transmitter with the corresponding range according to the actual vacuum degree.
Balance chambers are arranged at the front and the rear of the flowmeter for stabilizing the airflow so as to avoid impacting the flowmeter.
The temperature is collected by adopting a plurality of thermocouples and is transmitted to the PLC after being processed by the temperature transmitter, data comparison is carried out inside the PLC, the control requirement is output according to the corresponding PID algorithm, and the temperature of the armored heating wire is increased or the water cooling device is started.
And a heating and heat-insulating device is arranged on a pipeline between the outlet of the vacuum chamber and the inlet of the pump to be tested.
The motor speed is adjusted from a level to a ten thousand level to a minute RPM range by adopting frequency conversion control, and the motor speed adjusting device is used for monitoring and adjusting experimental conditions of current and power.
And a safety valve is arranged on the vacuum chamber, and when the pressure in the vacuum chamber reaches a set dangerous value, the PLC executes an opening instruction on the valve according to a numerical value fed back by the film gauge.
The control method of the integrated dry pump test board is used for monitoring pumps to be tested of different models.
The invention has the following beneficial effects and advantages:
the details of the system can be monitored at any time through a human-computer interface consisting of the industrial personal computer, the touch screen and the PLC. The system is characterized in that an industrial personal computer, a PLC (programmable logic controller) and a touch screen are associated through configuration software, the touch screen is used as an input and display unit of the industrial personal computer, an operation interface and a variable data setting interface of the system are realized on the touch screen, and the industrial personal computer is responsible for collecting data of the whole system and forming a data curve so as to facilitate experimental analysis.
The system can comprehensively realize automation, and all valves are electric control valves.
The system considers that the factors influencing the running performance of the dry pump comprise temperature, pressure, flow and rotating speed, and can change one variable to observe the influence of the variable on the performance of the dry pump under the condition that three quantities are not changed.
Drawings
Fig. 1 is a schematic diagram of a hardware structure according to the present invention.
Fig. 2 is a control schematic diagram of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
The utility model relates to a control system of integrated testboard of dry pump, the system is by PLC as the control subject, by flow control unit, temperature control unit, pressure control unit and the pump detecting element that awaits measuring as the control object, the host computer is as the control media. The system is mainly characterized in that one control quantity can be controlled independently or multiple control quantities can be controlled simultaneously, the air pumping performance of the pump to be tested under the load condition of different pressures, temperatures, flow rates and rotating speeds can be realized, and the whole system can be fully automated.
The control system of the integrated dry pump test bench comprises a gas cylinder, a first balance chamber, a second balance chamber, a first vacuum chamber and a second vacuum chamber;
the gas cylinder, the first balance chamber, the second balance chamber and the first vacuum chamber are sequentially connected, the first vacuum chamber is connected with an inlet of the pump to be tested, and the second vacuum chamber is connected with an outlet of the pump to be tested.
The gas cylinder is filled with compressed gas.
The first balance chamber and the second balance chamber are connected through a plurality of pipelines with different diameters, each pipeline is provided with an electric control valve and a flow meter, and the electric control valves and the flow meters are connected with the PLC.
The outlet of the second balance chamber is connected with the inlet of the first vacuum chamber through a pipeline.
The first equilibrium chamber has a larger volume than the second equilibrium chamber.
The first vacuum chamber and the second vacuum chamber are respectively provided with an absolute pressure transmitter, and the absolute pressure transmitter is connected with the PLC.
The first vacuum chamber and the second vacuum chamber are respectively provided with vacuum obtaining equipment.
And a thermocouple is arranged on the first large vacuum chamber for measuring temperature. A heating device is arranged in the first vacuum chamber, and the heating device is a heating wire; the outside is provided with a water pipe for circulating cold water for cooling.
The control method of the integrated dry pump test bench comprises the following steps:
firstly, providing a background vacuum condition for a vacuum chamber, and closing the vacuum obtaining equipment after the vacuum degree meets the requirement. The system is started, the vacuum degree is changed when the flow enters the vacuum chamber and the adjustable pump pumps air, and the vacuum degree is kept unchanged by controlling the air inlet speed. The temperature control occurs simultaneously with the above process.
The flow control unit is used for transmitting the measured flow value to the PLC through each flowmeter of the pipeline between the first balance chamber and the second balance chamber, comparing the flow value with a set value by the PLC and controlling the flow value by controlling the opening of the electromagnetic valve of the same pipeline;
the vacuum degree control unit is used for feeding gas into the first vacuum chamber, the absolute pressure transmitter feeds a vacuum degree measured value back to the PLC, the PLC compares the vacuum degree measured value with a set value at the moment, and constant pressure is realized by adjusting a valve between the vacuum obtaining equipment and the first vacuum chamber;
and the temperature control unit heats the gas through the heating device, the thermocouple transmits the acquired data to the PLC, the acquired data is compared with the set data, and the temperature control is realized through PID.
And the pump detection unit to be detected controls the variable frequency motor to change the rotating speed through the frequency converter, and detects the air extraction performance of the pump to be detected at different rotating speeds.
The control system monitors the running condition by a human-computer interface consisting of an industrial personal computer, a touch screen and a PLC. The system can realize the independent control of one control quantity or the simultaneous control of a plurality of control quantities, so that the pump to be tested can operate in different physical environments. Data measured by the sensor are all integrated into the PLC, the control purpose is achieved by adjusting the electric valve, and full automation is achieved. The system is provided with an automatic alarm device and a safety valve, so that the safety of workers is guaranteed to a great extent.
In the flow control process, the influence of conductance is considered, four pipelines with different thicknesses are arranged in front of a vacuum chamber, flow with different sizes can pass through the pipelines, and an opening-adjustable valve is arranged on each pipeline.
And the flow control unit designs 6 paths of flowmeters with different measuring ranges in parallel connection for accurately measuring flow values with different sizes. And selecting and opening a flow meter channel with a corresponding measuring range according to the set flow value.
And the pressure control unit is used for designing and installing 4 pressure transmitters with different ranges on the first vacuum chamber, and the PLC executes an instruction on the pressure transmitter with the corresponding range according to the actual vacuum degree.
For the size of accurate control flow, improve the accuracy that the flowmeter measured, all set up the stable air current of balance chamber around the flowmeter to cause the impact to the flowmeter.
And the temperature control unit adopts a plurality of thermocouples to acquire temperature, the temperature is processed by the temperature transmitter and then is transmitted to the PLC, data comparison is carried out inside the PLC, the control requirement is output according to a corresponding PID algorithm, and the temperature of the armored heating wire is increased or the water cooling device is started.
The temperature control unit has a hysteresis effect due to temperature and easily dissipates heat, so that a heating and heat-insulating device is arranged on a pipeline between the outlet of the vacuum chamber and the inlet of the pump to be measured.
The method adopts frequency conversion control to realize the regulation of the rotating speed of the motor from a single-level RPM (revolution speed) range to a ten thousand-level RPM range, and monitors and regulates experimental conditions such as current and power under the coordination of a high-precision high-speed gear, a bearing and a coupler.
And the vacuum degree control unit is provided with a safety valve on the vacuum chamber, and when the pressure in the vacuum chamber reaches a set dangerous value, the PLC implements an opening instruction on the valve according to a numerical value fed back by the film gauge.
The system can monitor pumps to be tested with different models.
As shown in fig. 1, a control system of a dry pump integrated test bench is composed of a flow unit, a vacuum degree unit, a temperature unit, and a pump unit to be tested. The structure is as follows: the device comprises a gas cylinder → a large balance chamber → six flowmeters with different ranges in parallel connection (a valve is arranged in front of and behind each flowmeter) → a small balance chamber → four pipelines with different thicknesses in parallel connection (a valve is arranged on each pipeline) → a large vacuum chamber → a pump to be measured → a small vacuum chamber, wherein the large vacuum chamber and the small vacuum chamber are respectively provided with vacuum obtaining equipment, and a molecular pump and a scroll pump or a screw pump are selected according to the required vacuum degree.
And the flow unit is provided with compressed gas in a gas cylinder, and is connected with the gas mixing chamber in front and at the back of the flowmeter for pressure stabilization in order to prevent the gas from impacting the flowmeter to cause precision errors. And the flow unit is used for reducing the influence of pipeline conductance, 4 pipelines with different thicknesses are arranged in the large vacuum chamber, an electric control valve is arranged on each pipeline, and when the flow is small, a valve of the thick pipeline is opened. When the flow rate is large, the thin pipeline valve is opened. The electric control valves on the pipelines can control the opening degree.
And the vacuum degree unit provides background vacuum for the large vacuum chamber and the small vacuum chamber by using vacuum equipment. The vacuum degree reaches the control requirement mainly by adjusting the opening of a gate valve between the vacuum chamber and the main pump.
As shown in FIG. 2, the system can realize simultaneous control of multiple control quantities, and mainly controls temperature, flow and vacuum degree. Before the system is started, a background vacuum condition is provided for the vacuum chamber, and when the vacuum degree meets the requirement, the vacuum obtaining equipment is closed. The system is started, the flow enters the vacuum chamber and the adjustable pump pumps air to change the vacuum degree, and the vacuum degree is kept unchanged by controlling the air inlet speed. The temperature control occurs simultaneously with the above process.
The system can monitor the pumps to be tested with different rotor profiles and different rotor types.
8 points are taken from the large vacuum chamber to be provided with thermocouples for temperature measurement, and the temperature is controlled after multi-zone temperature measurement, so that the temperature control accuracy is improved.
The temperature unit, real empty room inside has heating device, and the outside has water-cooled tube heat sink. In order to improve the temperature control speed, heating wires are arranged on the inner wall and the central position of the large vacuum chamber.
For controlling the temperature, because the temperature has hysteresis effect and the heat is easy to dissipate, a heating and heat-insulating device is arranged on the pipeline between the outlet of the vacuum chamber and the inlet of the pump to be measured.
The variable frequency control is adopted, the adjustment of the rotating speed within the range of hundreds of thousands of RPM is realized by replacing the motors with different models, and the air suction performance of the dry pump under different rotating speeds can be observed.
In order to ensure safety, the safety valve is arranged on the vacuum chamber, and when the pressure in the vacuum chamber reaches a dangerous value, the PLC implements an opening instruction on the valve according to a numerical value fed back by the film gauge, so that potential safety hazards are eliminated.
And (4) setting the flow rate, wherein before the gas cylinder is opened, the vacuum chamber is vacuumized by the dry pump unit to a set value. The gas comes out from the gas cylinder, and in order to prevent the gas flow from impacting the flowmeter, a balance chamber is required to stabilize the flow in front of the flowmeter.
After the pressure is stabilized by the balance chamber, in order to control the pressure in the balance chamber to be higher than one atmosphere, the absolute pressure transmitter on the balance chamber transmits the measured pressure value standard voltage signal to the analog input module of the PLC in a form, and the PLC controls the pressure in the balance chamber 1 by controlling the opening of the adjustable valve. So as not to cause impact damage to the flowmeter.
And a flow value is set in the upper computer, and the upper computer transmits an instruction to an input module of the PLC in a communication mode and stores the instruction in a working data storage area. The PLC selects the flowmeter with the proper flow range according to the input flow value.
The flow meter transmits the measured flow to an analog quantity input module of the PLC in a standard signal mode, the PLC compares the value of the flow meter with a command value of the upper computer, and the flow is controlled by controlling the regulating valve in front of the flow meter.
The flow meter has high measuring accuracy under standard air pressure, and balance chambers are respectively arranged in front of and behind the flow meter, so that the balance chamber 2 is arranged after the air flow passes through the flow meter, and the pressure of the air flow is controlled to be one atmosphere. Be equipped with the transmitter of pressing absolutely on balance chamber 2, the analog input module that PLC was given to in the form of the pressure value standard voltage signal that the transmitter will be surveyed of pressing absolutely, PLC is inside carries out the data contrast, when pressure is less than an atmospheric pressure, explains that the inlet velocity of balance chamber is less than the speed of giving vent to anger, and PLC output module output standard signal of telecommunication is used in valve controller at this moment, slows down the inlet velocity through reducing the aperture. When the pressure of the balance chamber is higher than one atmosphere, the air inlet speed of the balance chamber is higher than the air outlet speed, and the air inlet speed is increased by increasing the opening.
Considering the influence of the pipeline conductance on the constant pressure of the balance chamber 2, a plurality of pipelines with different thicknesses are selected to be connected in parallel. When the required flow is large, a thick pipeline is selected; when the required flow is small, a thinner pipe is selected.
And (4) determining the vacuum degree, and vacuumizing the vacuum chamber according to the vacuum degree value set on the upper computer. The upper computer gives an instruction to the PLC, and the PLC receives the relevant instruction and gives an opening instruction to the electromagnetic valve between the vacuum chamber and the pre-pumping pump. And a pressure transmitter on the vacuum chamber measures the vacuum degree, and outputs a standard electric signal to be fed back to an input module of the PLC. Because the pressure change is large in the vacuum pumping process, pressure transmitters with different ranges are needed, and the PLC needs to start the pressure transmitters with different ranges according to the change of the pressure value.
The value is compared with the starting vacuum degree value of the main pump, when the vacuum degree reaches the range of the air pumping capacity of the main pump, the PLC executes an opening command to an electromagnetic baffle valve between the vacuum chamber and the main pump and an electromagnetic valve between the main pump and the pre-pumping pump, executes a closing command to the electromagnetic valve between the vacuum chamber and the pre-pumping pump, and serially connects a PLC switching signal in a starting loop of the main pump and starts the main pump to pump vacuum.
And finally, comparing the real-time vacuum degree with a set value, and when the error amount is within a set range, outputting a control signal to the molecular pump by using an electric butterfly valve between main pumps by using the PLC output module, and reducing the opening degree to obtain the accurate vacuum degree.
And (3) fixing the temperature, heating the gas in the vacuum chamber, and adopting an armored heating wire. A power switch is required to be turned on the electric control cabinet, a K-type thermocouple is used for measuring the temperature of the vacuum chamber, the thermocouple is connected with a temperature transmitter to output an analog quantity signal, and the PLC can receive the signal through an analog quantity module and convert the signal into a temperature value. And the PLC compares the collected temperature with a set value, when the temperature in the vacuum chamber is higher than the set value, the PLC executes an opening instruction on the cooling water pipe valve, reduces the heating power of the heating wire, and closes the pipeline valve after the temperature is slightly reduced.
The temperature has hysteresis effect, the distance of a section of pipeline is arranged between the outlet of the vacuum chamber and the inlet of the pump to be measured, the heat of the heated gas is lost after the heated gas passes through the pipeline, and therefore the heating devices are also arranged on the pipeline between the outlet of the vacuum chamber and the inlet of the pump to be measured, and the control accuracy is ensured.
A K-type thermocouple is adopted to carry out multi-point side temperature on a vacuum chamber, and the thermocouple is coiled on the vacuum chamber. The K-type thermocouple is arranged in the vacuum chamber through an interface flange, and the PLC calculates the PID algorithm of the data collected by the thermocouple. The PLC transmits the calculated data to the upper computer, so that an operator can check the temperature at any time.

Claims (10)

1. The control method of the integrated dry pump test bench is characterized by comprising the following steps of:
firstly, providing background vacuum conditions for two vacuum chambers, and closing two vacuum obtaining devices after the vacuum degrees of the two vacuum chambers meet the requirements; after obtaining the background vacuum, opening a pipeline electromagnetic valve A between the two vacuum chambers and a pipeline electromagnetic valve B between the second balance chamber and the first vacuum chamber; after air is fed, the vacuum degree of the first vacuum chamber can change along with air feeding and air suction of the pump to be tested, and the vacuum degree is kept unchanged by controlling the opening degree of at least one valve in the electromagnetic valve A and the electromagnetic valve B; meanwhile, controlling the temperature;
flow control: the flow meters of the pipelines between the first balance chamber and the second balance chamber transmit the measured flow value to the programmable logic controller PLC, and the PLC compares the flow value with a set value and controls the flow size by controlling the opening degree of the electromagnetic valve of the corresponding pipeline;
controlling the vacuum degree: the gas enters the first vacuum chamber, the absolute pressure transmitter feeds back the measured value of the vacuum degree to the PLC, the PLC compares the measured value of the vacuum degree with a set value at the moment, and the valve between the vacuum obtaining equipment and the first vacuum chamber is adjusted to realize constant pressure;
temperature control: the gas is heated by a heating device, the thermocouple transmits the acquired data to the PLC, the acquired data is compared with the set data, and the temperature control is realized by a proportional-integral-derivative controller PID;
detecting a pump to be detected: the frequency converter is used for controlling the variable frequency motor to change the rotating speed and detecting the air pumping performance of the pump to be detected at different rotating speeds.
2. The control method for the integrated dry pump test bench of claim 1, wherein four pipes with different diameters are arranged in front of the vacuum chamber for the flow with different sizes to pass through, and each pipe is provided with a valve with adjustable opening degree.
3. The control method of the integrated dry pump test bench of claim 1, wherein 6 flowmeters with different ranges are arranged between the first balance chamber and the second balance chamber, and a flowmeter channel with a corresponding range is selectively opened according to a set flow value.
4. The control method of the integrated dry pump test bench of claim 1, wherein 4 absolute pressure transducers with different ranges are installed on the first vacuum chamber, and the PLC performs command on the absolute pressure transducer with the corresponding range according to the actual vacuum degree.
5. The control method of an integrated dry pump test bench as defined in claim 1, wherein balancing chambers are provided before and after the flow meter for stabilizing the air flow so as not to cause impact on the flow meter.
6. The control method of the integrated dry pump test bench according to claim 1, wherein a plurality of thermocouples are used for collecting temperature, the temperature is processed by the temperature transmitter and then is transmitted to the PLC, the PLC compares the data and outputs the control requirement according to the corresponding PID algorithm, and the temperature of the armored heating wire is increased or the water cooling device is started.
7. The control method for integrated dry pump test bench as claimed in claim 1, wherein a heating and thermal insulating device is provided on the pipeline between the outlet of the vacuum chamber and the inlet of the pump to be tested.
8. The control method of an integrated dry pump test bench as claimed in claim 1, wherein the motor speed is adjusted from individual level to ten thousand level RPM by adopting variable frequency control, and the control method is used for monitoring and adjusting experimental conditions of current and power.
9. The method as claimed in claim 1, wherein a safety valve is installed on the vacuum chamber, and the PLC opens the valve according to the value fed back from the membrane gauge when the pressure in the vacuum chamber reaches a set dangerous value.
10. The integrated dry pump test stand control method as claimed in claim 1, for monitoring different models of pumps under test.
CN201811601913.3A 2018-12-26 2018-12-26 Control method for integrated dry pump test board Active CN111365221B (en)

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Application Number Priority Date Filing Date Title
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CN111365221B true CN111365221B (en) 2021-06-01

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000161215A (en) * 1998-12-01 2000-06-13 Sony Corp Processing chamber furnished with evacuating system
CN104632604B (en) * 2013-11-15 2017-03-15 中国科学院沈阳科学仪器股份有限公司 Dry vacuum pump air aspiration process analog detection method and test system
CN104481856B (en) * 2014-10-11 2017-02-22 浙江万安科技股份有限公司 Vacuum pump detection device and detection method of sealing performance, reliability and vacuum degree
CN206158987U (en) * 2016-10-28 2017-05-10 安徽江淮汽车集团股份有限公司 Vacuum pump performance testing system
JP3213237U (en) * 2017-08-15 2017-10-26 寧波愛発科真空技術有限公司 Vacuum drying equipment

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