CN111351478A

CN111351478A - Vibrating gyro element, gyro sensor and electronic equipment

Info

Publication number: CN111351478A
Application number: CN202010301172.8A
Authority: CN
Inventors: 朱京; 张琳琳; 廖兴才; 裴志强; 梁立兴
Original assignee: Beijing Chenjing Electronic Co ltd
Current assignee: Beijing Chenjing Electronic Co ltd
Priority date: 2020-04-16
Filing date: 2020-04-16
Publication date: 2020-06-30
Anticipated expiration: 2040-04-16
Also published as: CN111351478B

Abstract

The invention discloses a vibrating gyro element, a gyro sensor and an electronic device, the vibrating gyro element includes: a base including a pair of driving arms provided at one end of the base and a pair of detection arms provided at the other end of the base, respectively; the first groove is formed in a first surface and a second surface corresponding to the driving arm; two side groove walls of the first groove form an included angle C along the extending direction of the driving arm; the first electrode is arranged in the first groove. So set up, can make the width inequality between first recess cell wall and the actuating arm for actuating arm working mode stress distribution is more even, can guarantee to increase the slot part structure after, can promote drive efficiency. And when the driving arm vibrates, the part with larger strain has larger width, so that the non-ideal deformation such as micro distortion and the like caused by small groove thickness when large strain is applied can be avoided, thereby avoiding introducing structural noise and improving the signal-to-noise ratio.

Description

Vibrating gyro element, gyro sensor and electronic equipment

Technical Field

The present invention relates to the technical field of vibrating elements, and in particular, to a vibrating gyro element, a gyro sensor, and an electronic device.

Background

At present, the micromechanical gyroscope is a core component of modern inertial navigation and control technology, and is widely applied to aerospace, weaponry, industrial control and consumer electronics. The vibrating gyro element has high detection precision and is widely applied to the field of high-precision application. With the continuous improvement of application requirements, the detection sensitivity of the vibration gyro element with the traditional structure is difficult to further improve due to the limitation of a driving detection principle, so that the wide application of the vibration gyro element in the high-precision field is limited.

The key of realizing the angular velocity detection of the vibrating gyro element lies in the high-precision detection of weak Coriolis force, and the further improvement of the sensitivity of the vibrating gyro element is realized, so that on one hand, the driving efficiency of the vibrating gyro element needs to be improved, and the unit angular velocity can generate equal Coriolis force; on the other hand, the detection efficiency of the vibrating element needs to be improved, so that the unit Coriolis force can generate larger electric signal output. And noise is required to be avoided from being introduced in the whole process, so that the signal-to-noise ratio is prevented from being reduced due to the noise.

For high precision application fields, a vibrating gyro element is required to have higher structural sensitivity. However, in the prior art, due to the limitation of technical means, the prior art has difficulty in realizing breakthrough of sensitivity. The typical structure of the prior quartz tuning fork gyroscope is a double-end quartz tuning fork structure, and a pair of driving arms and a pair of detection arms are respectively arranged at two ends of a base part.

First, regarding the driving efficiency: the double-end quartz tuning fork structure driving arm resonates under the driving of driving voltage and is used for detecting angular velocity input perpendicular to the driving resonance direction. By improving the driving efficiency of the driving arm, a higher vibration amplitude can be obtained under a certain driving voltage, and higher structural sensitivity can be obtained.

The main solution for increasing the tuning fork driving efficiency is to increase the size of the driving arm, but the increase in size will directly result in the increase in volume of the vibrating gyro element, which is contrary to the trend of miniaturization. There is also a patent that the driving efficiency is further increased by arranging a groove portion on the driving arm to increase the driving electric field intensity. However, the prior art obtains a larger driving electric field strength by adding a slot parallel to the edge of the vibrating arm on the driving arm, and the driving electric field obtained in this way cannot be effectively converted into a driving force, resulting in a limited improvement of the driving efficiency. However, the electric field which cannot be effectively converted into the driving force causes the stress-strain imbalance of the upper part and the lower part of the groove wall, so that the electric field is converted into vibration noise, more structural noise is introduced while the driving efficiency is improved in a limited way, and the structural sensitivity cannot be greatly improved.

Second, regarding the detection sensitivity: when angular velocity is input in the sensitive direction of the tuning fork gyroscope, the detection arm can vibrate due to the Coriolis effect, and when the input driving efficiency is fixed, the vibration amplitude of the detection arm is positively correlated with the angular velocity to be detected; the input angular velocity can be detected by collecting and demodulating the charges generated by the strain of the detection arm through the piezoelectric effect of the quartz.

The intensity of electric charge generated by the quartz piezoelectric effect is positively correlated with the strain thereof, the surface of the detection arm is maximum due to the strain of the detection arm, and the center strain of the detection arm is zero, so that the density of the electric charge on the surface of the detection arm is maximum, which is limited by the current electrode processing technology of the detection arm, and the surface electric charge is not effectively collected in the prior art, so that the detection sensitivity of the detection arm is difficult to improve, and the structural sensitivity of the vibration gyro element is also difficult to improve.

Disclosure of Invention

Therefore, the present invention is directed to overcome the problem in the prior art that it is difficult to improve the structural sensitivity of a vibrating gyro element, and to provide a vibrating gyro element, a gyro sensor, and an electronic device.

To achieve the above object, an embodiment of the present invention provides a vibrating gyro element including: a base including a pair of driving arms provided at one end of the base and a pair of detection arms provided at the other end of the base, respectively; the first groove is formed in a first surface and a second surface corresponding to the driving arm; two side groove walls of the first groove form an included angle C along the extending direction of the driving arm; the first electrode is arranged in the first groove.

Optionally, the included angle C ranges from 0.01 ° to 2 °.

Optionally, the first groove has a gradually decreasing groove width in a direction approaching the base.

Optionally, the width of the first groove at one end close to the base is DX2, the depth of the first groove is DH2, 5 μm & lt DX2 & lt 20 μm, and 1 & lt DH2/DX2 & lt 4.

Optionally, one end of the driving arm close to the base is provided with a connecting groove, and the connecting groove is communicated with the first groove; the first electrode extends along the connection groove to the drive arm surface.

Optionally, the width of the connecting groove is AX, and the length of the connecting groove is AY, AX > 0.5 × DH2, AY > 0.5 × DH 2.

Optionally, the vibrating gyroscopic element further comprises: the groove part is arranged on a first surface and a second surface corresponding to the detection arm; the groove part is formed by a plurality of second grooves; the length of the second groove in the extension direction of the detection arm is larger than that in the width direction of the detection arm; the plurality of second grooves are arranged along the width direction of the detection arm; the second groove is a V-shaped groove; and the second electrode is arranged in the second groove.

Optionally, a distance between a groove wall on two sides of the groove portion and the edge of the detection arm is SX1, wherein SX1 is less than or equal to 5 μm and less than or equal to 20 μm.

Optionally, the second grooves 311 are arranged at equal intervals, the interval is SD0, the width of the second grooves is SD, and 0 < SD0 ≦ SD.

Optionally, the second electrode is made by the following preparation method:

A. preparing an electrode film on the surface of the detection arm;

B. coating photoresist on the surface of the electrode film;

C. defining the topography of the second electrode by planar lithography;

D. and etching according to the appearance of the second electrode to obtain the second electrode.

The embodiment of the invention also provides a gyro sensor which comprises the vibrating gyro element.

An embodiment of the present invention further provides an electronic device, including the vibration gyro element described in any one of the above or the gyro sensor described above.

Compared with the prior art, the invention has the beneficial effects that:

1. the present invention provides a vibrating gyro element including: a base including a pair of driving arms provided at one end of the base and a pair of detection arms provided at the other end of the base, respectively; the first groove is formed in a first surface and a second surface corresponding to the driving arm; two side groove walls of the first groove form an included angle C along the extending direction of the driving arm; the first electrode is arranged in the first groove. According to the embodiment of the invention, the included angle C is formed between the extending direction of the groove wall of the first groove and the extending direction of the edge of the driving arm, so that the widths of the groove wall of the first groove and the driving arm are unequal, the structural rigidity of the driving arm at different positions is modulated, the stress distribution of the working mode of the driving arm is more uniform, the driving electric field increased after the first groove is added can be more efficiently converted into the driving force, and the driving efficiency is improved. And when the driving arm vibrates, the part with larger strain has larger width, so that the situation that the strain is generated by the small groove thickness when the strain is applied to the non-ideal deformation such as tiny distortion can be avoided, the introduction of structural noise is avoided, and the signal-to-noise ratio is improved.

2. The invention provides an embodiment of a driving arm, wherein the groove width of the driving arm is DX2, the groove depth is DH2, DX2 is more than or equal to 5 mu m and less than or equal to 20 mu m, and DH2/DX2 is more than or equal to 1 and less than or equal to 4. A higher driving force can be obtained for the driving arm due to the reduced wall thickness, but a smaller wall width will cause a slight distortion of the driving arm, thereby introducing structural noise. Through setting up above-mentioned parameter, can guarantee that cell wall width can also guarantee to introduce minimum vibration noise at minimum to effectively improve the drive efficiency of actuating arm.

3. The connecting groove is arranged, so that the first electrode can be led to the surface of the driving arm from the first groove, the vibration gyro element is reliably electrically connected during working, the vibration gyro element is prevented from being broken, and the normal working of the vibration gyro element is ensured.

4. The present invention provides a vibrating gyro element including: the groove part is arranged on a first surface and a second surface corresponding to the detection arm; the groove part is formed by a plurality of second grooves; the length of the second groove in the extension direction of the detection arm is larger than that in the width direction of the detection arm; the plurality of second grooves are arranged along the width direction of the detection arm; and the second electrode is arranged in the second groove. So set up, through detect the arm and set up a plurality of second recesses that set up side by side and the three-dimensional electrode that matches with it along its extending direction, can effectual increase detect the positive and negative surface effective electrode area of arm. The charge density is the highest on the front and back surfaces of the detection arm, and the detection sensitivity is proportional to the product of the effective electrode area and the charge density. Therefore, the detection sensitivity of the detection arm can be effectively improved.

5. The invention provides that the distance between the groove part and the edge of the detection arm is SX1, and SX1 is more than or equal to 5 mu m and less than or equal to 20 mu m; the width of the second grooves is SD, the distance between the second grooves is SD0, SX1 with the size of 5 mu m and the size of 20 mu m are more than or equal to 5 mu m, and SD0 with the size of 0 and the size of SD is more than or equal to 0. Based on the anisotropy of quartz crystal corrosion, different crystal orientation corrosion rates are different, and the parameters of the second groove body of the detection arm are controlled, so that the driving arm and the detection arm have different depths and appearances through one-time thinning corrosion. Meanwhile, a three-dimensional electrode pattern can be obtained through plane lithography on the basis of the W-shaped structure consisting of the V-shaped second groove parts obtained through the parameters, the problem that the detection arm cannot be provided with a plurality of grooves and electrodes are arranged in the grooves in the prior art is solved, and higher detection sensitivity can be obtained.

6. The embodiment of the invention provides a preparation method of a second electrode, and the second electrode is arranged on a detection arm only by arranging the second electrode on the groove wall of a groove part, and the detection sensitivity of the detection arm is insensitive to the groove depth of the groove part and sensitive to the groove wall width and the number of second grooves, so that the structure of the second electrode is complex and cannot be realized. By the preparation method, high-precision plane photoetching can be performed, the high-precision preparation of the complex wave-shaped slotting electrode is realized, and the limitation of the traditional process is broken through.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.

Fig. 1 is a schematic view of the entire structure of a vibrating gyro element of the present embodiment;

fig. 2 is a front view of the vibrating gyro element of the present embodiment;

fig. 3 is an enlarged view of a portion of the vibrating gyro element E of the present embodiment;

fig. 4 is an enlarged view of a portion of the vibrating gyro element D of the present embodiment;

fig. 5 is a sectional view in the direction of the vibrating gyro element B of the present embodiment;

fig. 6 is a sectional view of the vibrating gyro element a of the present embodiment;

fig. 7 is a view showing a vibration mode of the driving arm of the present embodiment;

FIG. 8 is an overall view of the vibration mode of the detection arm of the present embodiment;

FIG. 9 is an enlarged view of a part of the structure of the entire view of the vibration mode of the detecting arm according to the present embodiment;

FIG. 10 is a side view of the vibration mode of the detection arm of the present embodiment;

FIG. 11 is an enlarged view of a part of the structure of the side view of the vibration mode of the detecting arm in the present embodiment;

fig. 12 is an enlarged view of a part of the structure of the driving arm of the present embodiment;

FIG. 13 is an enlarged view showing a structure of a portion of the coupling groove in this embodiment F;

FIG. 14 is a schematic view of a second electrode of this embodiment fabricated on a detection arm;

FIG. 15 is a diagram showing the charge distribution of the detection arm after the second electrode is disposed in the present embodiment;

FIG. 16 is a schematic structural diagram of another embodiment of the present embodiment;

fig. 17 is a perspective view of another embodiment of the present embodiment.

Description of reference numerals:

1-a driving arm; 11-a first groove; 12-a connecting trough;

2-a base;

3-a detection arm; 31-a trough portion; 311-a second groove;

4-photoresist; 5-a second electrode.

Detailed Description

The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; the two elements may be directly connected or indirectly connected through an intermediate medium, or may be communicated with each other inside the two elements, or may be wirelessly connected or wired connected. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

In the prior art, a driving arm is additionally provided with a slot parallel to the edge of a vibrating arm to obtain larger driving electric field intensity, and the obtained driving electric field cannot be effectively converted into driving force, so that the improvement of the driving efficiency is limited. However, the electric field which cannot be effectively converted into the driving force causes the stress-strain imbalance of the upper part and the lower part of the groove wall, so that the electric field is converted into vibration noise, more structural noise is introduced while the driving efficiency is improved in a limited way, and the structural sensitivity cannot be greatly improved. In addition, the surface of the detection arm has the largest strain, and the center of the detection arm has zero strain, so that the charge density of the surface of the detection arm is the largest, the detection arm is limited by the current electrode processing technology of the detection arm, and the surface charges are not effectively collected in the prior art, so that the detection sensitivity of the detection arm is difficult to improve.

The vibrating gyro element, the gyro sensor and the electronic device provided by the embodiment of the invention can solve the problem that the structural sensitivity of the vibrating gyro element is difficult to improve in the prior art.

The working principle of the quartz tuning fork is as follows:

the width direction of the quartz tuning fork is set as the X-axis direction, the thickness direction is set as the Z-axis direction, and the length direction is set as the Y-axis direction. When an angular velocity is input, the driving arm of the quartz tuning fork generates vibration in the X-axis direction under the action of a driving electric field, and generates a Coriolis force in a third direction perpendicular to the X-axis direction and the rotation direction (Y-axis direction) of the angular velocity, namely in the Z-axis direction by the Coriolis effect, so that the tuning fork generates a vibration component in the Y-axis direction, and the vibration is transmitted to the detection arm by the base. The second electrode 5 on the detection arm generates charge accumulation by the piezoelectric effect of quartz and outputs an electric signal containing information of the input angular velocity, and the input angular velocity can be detected by detecting the electric signal.

Example 1

As shown in fig. 1 to 15, the present invention provides a vibrating gyro element including: the detection device comprises a base 2, a pair of driving arms 1 and a pair of detection arms 3, wherein the driving arms 1 are arranged at one end of the base 2, and the detection arms 3 are arranged at the other end of the base 2. The first surface and the second surface of the driving arm 1, which correspond to each other, are provided with first grooves 11, as shown in fig. 5. The two side walls of the first recess 11 form an angle C along the extension direction of the driving arm 1, as shown in fig. 12. A first electrode for collecting electric charges generated on the surface of the driving arm 1 is disposed in the first groove 11.

This embodiment through with the extending direction of 11 cell walls of first recess with the extending direction at driving arm 1 edge forms contained angle C, can make the width inequality between 11 cell walls of first recess and the driving arm 1 to the different position structural rigidity of modulation driving arm 1 makes 1 working mode stress distribution of driving arm more even, can guarantee like this that the drive electric field that increases after increasing 11 first recesses more efficient turns into drive power, promotes drive efficiency.

In this embodiment, the included angle C may range from 0.01 ° to 2 °. The range of the included angle C is determined according to the length, width and height of the driving arm 1.

In the present embodiment, the groove width of the first groove 11 is gradually reduced in a direction approaching the base 2. As shown in fig. 12, the extending direction of the groove wall of the first groove 11 forms an included angle C with the extending direction of the edge of the driving arm 1. This case is merely exemplified in the present embodiment.

The vibration mode of the driving arm 1 is shown in fig. 7, and darker colors represent larger strain amplitudes. When the driving arm 1 vibrates, the strain applied to the driving arm 1 gradually decreases from the end close to the base 2 to the end far from the base 2, that is, the portion of the driving arm 1 close to the base 2 is subjected to the largest strain, and the end far from the base 2 is subjected to the smallest strain. By tapering the groove width of the first groove 11 in the direction close to the base 2, the portion of the drive arm 1 that is strained more when vibrating can be made to have a larger width. Therefore, the non-ideal deformation that the small groove thickness is subjected to micro-distortion when strain is applied, the introduction of structural noise is avoided, and the signal-to-noise ratio is improved.

Of course, as another embodiment, it is also possible to approach the two side walls of the first groove 11 to each other at the end away from the base 2. On this basis, as shown in fig. 16 and 17, the arm width of the drive arm 1 is gradually reduced in a direction away from the base 2. And the value range of the included angle C is also between 0.01 and 2 degrees.

A higher driving force of the driving arm 1 can be obtained due to the reduced wall thickness of the first recess 11, but a smaller wall thickness will cause a slight distortion of the driving arm 1 upon driving, thereby introducing structural noise. Therefore, in the present embodiment, the groove width DX2 of the first groove 11 at the end closer to the base 2 is set to 5 μm DX2 20 μm, and the groove depth DH2 is set to 1 DH2/DX2 4.

Due to the arrangement, the minimum vibration noise can be ensured to be introduced while the width of the groove wall of the first groove 11 is ensured to be minimum, so that the driving efficiency of the driving arm 1 is effectively improved.

As shown in fig. 13, one end of the driving arm 1 near the base 2 is provided with a connecting groove 12, the connecting groove 12 communicates with the first groove 11, while a first electrode is disposed to the connecting groove 12, and then the first electrode is led from the connecting groove 12 to the surface of the driving arm 1, the groove width of the connecting groove 12 is AX, the length of the connecting groove 12 is AY, AX > 0.5 × DH2, AY > 0.5 × dh2 by providing the connecting groove 12, the first electrode can be led from the first groove 11 to the surface of the driving arm 1, thereby enabling the vibration gyro element to obtain reliable electrical connection during operation, preventing the vibration gyro element from breaking, ensuring normal operation of the vibration gyro element, and also enabling the connecting groove 12 to be a U-shaped groove, such that the bottom of the connecting groove 12 is on the same plane as the bottom of the first groove 11, while, the connecting groove 12 can be ensured to operate normally by making AX > 0.5 × DH2, AY > 0.5 × DH 2.

As shown in fig. 1 to 4, the detection arm 3 of the vibration gyro device is provided with a groove 31, and the groove 31 is provided on the first surface and the second surface corresponding to the detection arm 3. The groove portion 31 includes a plurality of second grooves 311, the second grooves 311 are arranged side by side in the width direction of the detection arm 3, and the length of the second grooves 311 in the extending direction of the detection arm 3 is longer than the length in the width direction of the detection arm 3. The second recess 311 is further provided with a second electrode 5 for collecting charges generated on the surface of the detection arm 3.

Since the charges are generated in the X-axis direction, that is, in the width direction of the detection arm 3, and only the electrode in the X-axis direction is the effective electrode, the second electrode 5 is a three-dimensional electrode by disposing a plurality of second grooves 311 arranged side by side and the second electrode 5 matching with the second grooves along the extension direction of the detection arm 3. Thus, the area of the effective electrode on the front and back surfaces of the detection arm 3 can be effectively increased.

The vibration mode of the detection arm 3 is as shown in fig. 8 to 11, and darker colors represent larger strain amplitudes. Since the strain experienced by the detection arm 3 itself is gradually reduced from the end close to the base 2 to the end far from the base 2 when the detection arm 3 vibrates, that is, the strain experienced by the portion of the detection arm 3 close to the base 2 is the largest, and the strain experienced by the end far from the base 2 is the smallest.

Because the larger the amount of strain of the detection arm 3, the more electric charge is generated. The charge density of the front and back surfaces of the detecting arm 3 is the maximum, and the detection sensitivity of the detecting arm 3 is in direct proportion to the product of the effective electrode area and the charge density, so that the detection sensitivity of the detecting arm 3 can be effectively improved.

The distance between the two side walls of the groove part 31 and the edge of the detection arm 3 is SX1, wherein SX1 is more than or equal to 5 mu m and less than or equal to 20 mu m. The second grooves 311 are V-shaped grooves, the width of the second grooves 311 is SD, the plurality of second grooves 311 are arranged at equal intervals, the interval is SD0, and SD0 is greater than 0 and less than or equal to SD.

Based on the anisotropy of quartz crystal corrosion, different crystal orientation corrosion rates are different, and the parameters of the second groove 311 are controlled, so that the driving arm 1 and the detection arm 3 which have different depths and appearances can be obtained through one-time thinning corrosion. And the depth and the morphology determine whether three-dimensional electrode preparation can be realized by planar lithography.

Since the second recess 311 is a V-shaped groove instead of a conventional U-shaped groove. If the groove is a U-shaped groove, the etching depth is positively correlated with the etching time, but if the groove is a V-shaped groove, the shape is not correlated with the etching time under the premise of unchanged angle and width. Therefore, the depth can be controlled by the slotting width, and under the condition of the same corrosion time, the slotting depth of the driving arm 1 and the slotting depth of the detection arm 3 are realized.

The arrangement of the second electrode 5 on the detection arm 3 only requires the arrangement of the second electrode 5 on the groove wall of the groove 31, and the detection sensitivity of the detection arm 3 is insensitive to the groove depth of the groove 31 and sensitive to the groove wall width and the number of the second grooves 311, so that the second electrode 5 cannot be realized due to the complex structure.

However, the groove 31 obtained based on the above parameters has a W-shaped structure, and the second electrode 5 pattern can be obtained by planar lithography as shown in fig. 6. The second electrode 5 can be prepared with high precision by high-precision plane lithography, so that the problem that the difficulty of arranging electrodes in multiple grooves of the detection arm 3 is high is solved, and higher detection sensitivity can be obtained.

Specifically, as shown in fig. 13, the second electrode 5 may be manufactured by a manufacturing method including the steps of:

s1, preparing an electrode film on the surface of the detection arm 3;

s2, coating photoresist 4 on the surface of the electrode film;

s3, defining the appearance of the second electrode 5 through plane photoetching;

and S4, etching according to the appearance of the second electrode 5 to obtain the second electrode 5.

As another embodiment, as shown in fig. 16 and 17, the arm width of the detection arm 3 gradually decreases in a direction away from the base 2. The intervals between the plurality of second grooves 311 become gradually smaller in the extending direction of the detection arm 3 away from the base 2. At a portion where the detection arm 3 is connected to the base 2, a plurality of second grooves 311 are radially provided. The second recess 311 is a radially disposed portion, and functions as the coupling groove 12. And will not be described in detail herein.

Of course, the distribution of the second grooves 311 can be changed by those skilled in the art according to the actual situation of the detecting arm 3, and this embodiment is not limited to this, and is only an example.

An embodiment of the present invention further provides an electronic device including the vibration gyro element or the gyro sensor described above.

It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.

Claims

1. A vibratory gyroscopic element, comprising:

a base (2) including a pair of drive arms (1) respectively provided at one end of the base (2) and a pair of detection arms (3) at the other end;

the first groove (11) is formed in a first surface and a second surface corresponding to the driving arm (1); two side groove walls of the first groove (11) form an included angle C along the extending direction of the driving arm (1);

a first electrode arranged within the first recess (11).

2. A vibrating gyroscopic element according to claim 1, wherein said angle C is in the range 0.01 ° to 2 °.

3. A vibrating gyroscopic element according to claim 1, wherein the first recess (11) has a tapering groove width in a direction towards the base (2).

4. A vibrating gyroscopic element according to claim 3, in which the first recess (11) has a wall width DX2 at the end remote from the base (2) and a depth DH2, 5 μm DX2 20 μm, 1 DH2/DX2 4.

5. Vibrating gyroscopic element according to any of claims 1 to 4, wherein the end of the driving arm (1) close to the base part (2) is provided with a coupling slot (12), the bottom surface of the coupling slot (12) being in the same plane as the bottom surface of the first recess (11); the first electrode extends along the connection slot (12) to the surface of the drive arm (1).

6. A vibrating gyroscopic element according to claim 5, wherein the coupling slot (12) has a slot width AX and the coupling slot (12) has a length AY, AX > 0.5 × DH2, AY > 0.5 × DH 2.

7. A vibratory gyroscopic element as defined in claim 1, further comprising:

a groove (31) which is opened on a first surface and a second surface corresponding to the detection arm (3); the groove portion (31) is constituted by a plurality of second grooves (311); the length of the second groove (311) in the extension direction of the detection arm (3) is larger than that in the width direction of the detection arm; the second grooves (311) are arranged along the width direction of the detection arm (3); the second groove (311) is a V-shaped groove;

a second electrode (5) disposed within the second recess (311).

8. Vibrating gyroscopic element according to claim 7, in which both sides of the slot (31) are spaced from the edges of the detection arm (3) by SX1, where SX1 is 5 μm or less and 20 μm or less.

9. A vibrating gyroscopic element according to claim 8, wherein the plurality of second grooves (311) are arranged at equal spacing, the spacing being SD0, the second grooves (311) having a groove width SD, 0 < SD0 ≦ SD.

10. Vibrating gyroscopic element according to any of claims 7 to 9, said second electrode (5) being made by the following preparation method:

A. preparing an electrode film on the surface of the detection arm (3);

B. coating photoresist (4) on the surface of the electrode film;

C. -defining the topography of the second electrode (5) by planar lithography;

D. and etching according to the appearance of the second electrode (5) to obtain the second electrode (5).

11. A gyroscopic sensor comprising a vibrating gyroscopic element according to any one of claims 1 to 10.

12. An electronic device characterized by comprising a vibrating gyroscopic element according to any one of claims 1 to 10 or a gyroscopic sensor according to claim 11.