CN111349213B - Polyurethane resin composition and polishing pad - Google Patents
Polyurethane resin composition and polishing pad Download PDFInfo
- Publication number
- CN111349213B CN111349213B CN201911275010.5A CN201911275010A CN111349213B CN 111349213 B CN111349213 B CN 111349213B CN 201911275010 A CN201911275010 A CN 201911275010A CN 111349213 B CN111349213 B CN 111349213B
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- CN
- China
- Prior art keywords
- polyurethane resin
- range
- resin composition
- polyol
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 229920005749 polyurethane resin Polymers 0.000 title claims abstract description 59
- 239000011342 resin composition Substances 0.000 title claims abstract description 32
- 238000005498 polishing Methods 0.000 title claims abstract description 20
- 229920005862 polyol Polymers 0.000 claims abstract description 24
- 150000003077 polyols Chemical class 0.000 claims abstract description 24
- 239000005056 polyisocyanate Substances 0.000 claims abstract description 20
- 229920001228 polyisocyanate Polymers 0.000 claims abstract description 20
- 239000004970 Chain extender Substances 0.000 claims abstract description 16
- 238000005481 NMR spectroscopy Methods 0.000 claims abstract description 11
- 239000002994 raw material Substances 0.000 claims abstract description 10
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 22
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 claims description 18
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 claims description 14
- 239000001361 adipic acid Substances 0.000 claims description 9
- 235000011037 adipic acid Nutrition 0.000 claims description 9
- 239000000376 reactant Substances 0.000 claims description 6
- UPMLOUAZCHDJJD-UHFFFAOYSA-N 4,4'-Diphenylmethane Diisocyanate Chemical group C1=CC(N=C=O)=CC=C1CC1=CC=C(N=C=O)C=C1 UPMLOUAZCHDJJD-UHFFFAOYSA-N 0.000 claims description 5
- 229920005906 polyester polyol Polymers 0.000 claims description 5
- XXMIOPMDWAUFGU-UHFFFAOYSA-N hexane-1,6-diol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 31
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 17
- 239000004793 Polystyrene Substances 0.000 description 16
- 229920002223 polystyrene Polymers 0.000 description 16
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 13
- 238000005227 gel permeation chromatography Methods 0.000 description 8
- 238000000576 coating method Methods 0.000 description 7
- -1 polytetramethylene Polymers 0.000 description 7
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000003960 organic solvent Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 239000004721 Polyphenylene oxide Substances 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 229920000570 polyether Polymers 0.000 description 3
- SDQROPCSKIYYAV-UHFFFAOYSA-N 2-methyloctane-1,8-diol Chemical compound OCC(C)CCCCCCO SDQROPCSKIYYAV-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- GLUUGHFHXGJENI-UHFFFAOYSA-N Piperazine Chemical compound C1CNCCN1 GLUUGHFHXGJENI-UHFFFAOYSA-N 0.000 description 2
- 239000005062 Polybutadiene Substances 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 2
- 230000000844 anti-bacterial effect Effects 0.000 description 2
- 239000003963 antioxidant agent Substances 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- NAQMVNRVTILPCV-UHFFFAOYSA-N hexane-1,6-diamine Chemical compound NCCCCCCN NAQMVNRVTILPCV-UHFFFAOYSA-N 0.000 description 2
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- TZIHFWKZFHZASV-UHFFFAOYSA-N methyl formate Chemical compound COC=O TZIHFWKZFHZASV-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- XNLICIUVMPYHGG-UHFFFAOYSA-N pentan-2-one Chemical compound CCCC(C)=O XNLICIUVMPYHGG-UHFFFAOYSA-N 0.000 description 2
- 238000005191 phase separation Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 229920002857 polybutadiene Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000003381 stabilizer Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- XSMIOONHPKRREI-UHFFFAOYSA-N undecane-1,11-diol Chemical compound OCCCCCCCCCCCO XSMIOONHPKRREI-UHFFFAOYSA-N 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 239000002759 woven fabric Substances 0.000 description 2
- BJZYYSAMLOBSDY-QMMMGPOBSA-N (2s)-2-butoxybutan-1-ol Chemical compound CCCCO[C@@H](CC)CO BJZYYSAMLOBSDY-QMMMGPOBSA-N 0.000 description 1
- NNOZGCICXAYKLW-UHFFFAOYSA-N 1,2-bis(2-isocyanatopropan-2-yl)benzene Chemical compound O=C=NC(C)(C)C1=CC=CC=C1C(C)(C)N=C=O NNOZGCICXAYKLW-UHFFFAOYSA-N 0.000 description 1
- FKTHNVSLHLHISI-UHFFFAOYSA-N 1,2-bis(isocyanatomethyl)benzene Chemical compound O=C=NCC1=CC=CC=C1CN=C=O FKTHNVSLHLHISI-UHFFFAOYSA-N 0.000 description 1
- MTZUIIAIAKMWLI-UHFFFAOYSA-N 1,2-diisocyanatobenzene Chemical compound O=C=NC1=CC=CC=C1N=C=O MTZUIIAIAKMWLI-UHFFFAOYSA-N 0.000 description 1
- ZXHZWRZAWJVPIC-UHFFFAOYSA-N 1,2-diisocyanatonaphthalene Chemical compound C1=CC=CC2=C(N=C=O)C(N=C=O)=CC=C21 ZXHZWRZAWJVPIC-UHFFFAOYSA-N 0.000 description 1
- ALVZNPYWJMLXKV-UHFFFAOYSA-N 1,9-Nonanediol Chemical compound OCCCCCCCCCO ALVZNPYWJMLXKV-UHFFFAOYSA-N 0.000 description 1
- MJGXPIYXMGYKTR-UHFFFAOYSA-N 2,3-dimethylpentane-1,5-diol Chemical compound OCC(C)C(C)CCO MJGXPIYXMGYKTR-UHFFFAOYSA-N 0.000 description 1
- ZJWDJIVISLUQQZ-UHFFFAOYSA-N 2,4-dimethylpentane-1,5-diol Chemical group OCC(C)CC(C)CO ZJWDJIVISLUQQZ-UHFFFAOYSA-N 0.000 description 1
- NSMWYRLQHIXVAP-UHFFFAOYSA-N 2,5-dimethylpiperazine Chemical compound CC1CNC(C)CN1 NSMWYRLQHIXVAP-UHFFFAOYSA-N 0.000 description 1
- AJKXDPSHWRTFOZ-UHFFFAOYSA-N 2-ethylhexane-1,6-diol Chemical compound CCC(CO)CCCCO AJKXDPSHWRTFOZ-UHFFFAOYSA-N 0.000 description 1
- DEPDXIXAMMDTBV-UHFFFAOYSA-N 2-ethylpentane-1,5-diol Chemical compound CCC(CO)CCCO DEPDXIXAMMDTBV-UHFFFAOYSA-N 0.000 description 1
- DFDXFFVIMFIZMQ-UHFFFAOYSA-N 2-methyldecane-1,10-diol Chemical compound OCC(C)CCCCCCCCO DFDXFFVIMFIZMQ-UHFFFAOYSA-N 0.000 description 1
- DYHGIZFXHVQIEA-UHFFFAOYSA-N 2-methylhexane-1,6-diol Chemical compound OCC(C)CCCCO DYHGIZFXHVQIEA-UHFFFAOYSA-N 0.000 description 1
- JTSHIECRADAUEX-UHFFFAOYSA-N 2-methylnonane-1,7-diol Chemical compound CCC(O)CCCCC(C)CO JTSHIECRADAUEX-UHFFFAOYSA-N 0.000 description 1
- BYPFICORERPGJY-UHFFFAOYSA-N 3,4-diisocyanatobicyclo[2.2.1]hept-2-ene Chemical compound C1CC2(N=C=O)C(N=C=O)=CC1C2 BYPFICORERPGJY-UHFFFAOYSA-N 0.000 description 1
- RNLHGQLZWXBQNY-UHFFFAOYSA-N 3-(aminomethyl)-3,5,5-trimethylcyclohexan-1-amine Chemical compound CC1(C)CC(N)CC(C)(CN)C1 RNLHGQLZWXBQNY-UHFFFAOYSA-N 0.000 description 1
- IVAVWMHMKCYKEQ-UHFFFAOYSA-N 3-methyldecane-1,10-diol Chemical compound OCCC(C)CCCCCCCO IVAVWMHMKCYKEQ-UHFFFAOYSA-N 0.000 description 1
- SQAJRDHPLTWZQT-UHFFFAOYSA-N 3-methylhexane-1,6-diol Chemical compound OCCC(C)CCCO SQAJRDHPLTWZQT-UHFFFAOYSA-N 0.000 description 1
- IOXWXIIYBASADA-UHFFFAOYSA-N 3-methylnonane-1,7-diol Chemical compound CCC(O)CCCC(C)CCO IOXWXIIYBASADA-UHFFFAOYSA-N 0.000 description 1
- ACWBYVIQVCTYBJ-UHFFFAOYSA-N 3-methyloctane-1,8-diol Chemical compound OCCC(C)CCCCCO ACWBYVIQVCTYBJ-UHFFFAOYSA-N 0.000 description 1
- BGDHWNOUSVSQJK-UHFFFAOYSA-N 4-methylnonane-1,7-diol Chemical compound CC(CCCO)CCC(CC)O BGDHWNOUSVSQJK-UHFFFAOYSA-N 0.000 description 1
- DMIUMZKUIYPNLB-UHFFFAOYSA-N 4-methyloctane-1,8-diol Chemical compound OCCCC(C)CCCCO DMIUMZKUIYPNLB-UHFFFAOYSA-N 0.000 description 1
- 229920002972 Acrylic fiber Polymers 0.000 description 1
- FERIUCNNQQJTOY-UHFFFAOYSA-M Butyrate Chemical compound CCCC([O-])=O FERIUCNNQQJTOY-UHFFFAOYSA-M 0.000 description 1
- 244000025254 Cannabis sativa Species 0.000 description 1
- 235000012766 Cannabis sativa ssp. sativa var. sativa Nutrition 0.000 description 1
- 235000012765 Cannabis sativa ssp. sativa var. spontanea Nutrition 0.000 description 1
- 241000931705 Cicada Species 0.000 description 1
- 229920000742 Cotton Polymers 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- 241000219146 Gossypium Species 0.000 description 1
- 239000005057 Hexamethylene diisocyanate Substances 0.000 description 1
- 239000005058 Isophorone diisocyanate Substances 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
- OMRDSWJXRLDPBB-UHFFFAOYSA-N N=C=O.N=C=O.C1CCCCC1 Chemical compound N=C=O.N=C=O.C1CCCCC1 OMRDSWJXRLDPBB-UHFFFAOYSA-N 0.000 description 1
- PULHRJBWHYSMLE-UHFFFAOYSA-N OCCCC(C)CCCCCCO Chemical compound OCCCC(C)CCCCCCO PULHRJBWHYSMLE-UHFFFAOYSA-N 0.000 description 1
- 229920000297 Rayon Polymers 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 1
- KXBFLNPZHXDQLV-UHFFFAOYSA-N [cyclohexyl(diisocyanato)methyl]cyclohexane Chemical compound C1CCCCC1C(N=C=O)(N=C=O)C1CCCCC1 KXBFLNPZHXDQLV-UHFFFAOYSA-N 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229920006221 acetate fiber Polymers 0.000 description 1
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 1
- 239000005456 alcohol based solvent Substances 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000003242 anti bacterial agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 235000009120 camo Nutrition 0.000 description 1
- 150000001718 carbodiimides Chemical class 0.000 description 1
- 235000005607 chanvre indien Nutrition 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- SSJXIUAHEKJCMH-UHFFFAOYSA-N cyclohexane-1,2-diamine Chemical compound NC1CCCCC1N SSJXIUAHEKJCMH-UHFFFAOYSA-N 0.000 description 1
- GEQHKFFSPGPGLN-UHFFFAOYSA-N cyclohexane-1,3-diamine Chemical compound NC1CCCC(N)C1 GEQHKFFSPGPGLN-UHFFFAOYSA-N 0.000 description 1
- VKIRRGRTJUUZHS-UHFFFAOYSA-N cyclohexane-1,4-diamine Chemical compound NC1CCC(N)CC1 VKIRRGRTJUUZHS-UHFFFAOYSA-N 0.000 description 1
- FOTKYAAJKYLFFN-UHFFFAOYSA-N decane-1,10-diol Chemical compound OCCCCCCCCCCO FOTKYAAJKYLFFN-UHFFFAOYSA-N 0.000 description 1
- 239000002781 deodorant agent Substances 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 150000002009 diols Chemical class 0.000 description 1
- CZZYITDELCSZES-UHFFFAOYSA-N diphenylmethane Chemical compound C=1C=CC=CC=1CC1=CC=CC=C1 CZZYITDELCSZES-UHFFFAOYSA-N 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003480 eluent Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003759 ester based solvent Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- WBJINCZRORDGAQ-UHFFFAOYSA-N formic acid ethyl ester Natural products CCOC=O WBJINCZRORDGAQ-UHFFFAOYSA-N 0.000 description 1
- 238000007756 gravure coating Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011487 hemp Substances 0.000 description 1
- RRAMGCGOFNQTLD-UHFFFAOYSA-N hexamethylene diisocyanate Chemical compound O=C=NCCCCCCN=C=O RRAMGCGOFNQTLD-UHFFFAOYSA-N 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- GJRQTCIYDGXPES-UHFFFAOYSA-N iso-butyl acetate Natural products CC(C)COC(C)=O GJRQTCIYDGXPES-UHFFFAOYSA-N 0.000 description 1
- FGKJLKRYENPLQH-UHFFFAOYSA-M isocaproate Chemical compound CC(C)CCC([O-])=O FGKJLKRYENPLQH-UHFFFAOYSA-M 0.000 description 1
- NIMLQBUJDJZYEJ-UHFFFAOYSA-N isophorone diisocyanate Chemical compound CC1(C)CC(N=C=O)CC(C)(CN=C=O)C1 NIMLQBUJDJZYEJ-UHFFFAOYSA-N 0.000 description 1
- JMMWKPVZQRWMSS-UHFFFAOYSA-N isopropanol acetate Natural products CC(C)OC(C)=O JMMWKPVZQRWMSS-UHFFFAOYSA-N 0.000 description 1
- 229940011051 isopropyl acetate Drugs 0.000 description 1
- GWYFCOCPABKNJV-UHFFFAOYSA-N isovaleric acid Chemical compound CC(C)CC(O)=O GWYFCOCPABKNJV-UHFFFAOYSA-N 0.000 description 1
- OQAGVSWESNCJJT-UHFFFAOYSA-N isovaleric acid methyl ester Natural products COC(=O)CC(C)C OQAGVSWESNCJJT-UHFFFAOYSA-N 0.000 description 1
- 239000005453 ketone based solvent Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- AYLRODJJLADBOB-QMMMGPOBSA-N methyl (2s)-2,6-diisocyanatohexanoate Chemical compound COC(=O)[C@@H](N=C=O)CCCCN=C=O AYLRODJJLADBOB-QMMMGPOBSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- HGQPJWDYHDWFEH-UHFFFAOYSA-N nonane-1,7-diol Chemical compound CCC(O)CCCCCCO HGQPJWDYHDWFEH-UHFFFAOYSA-N 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- OEIJHBUUFURJLI-UHFFFAOYSA-N octane-1,8-diol Chemical compound OCCCCCCCCO OEIJHBUUFURJLI-UHFFFAOYSA-N 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920000747 poly(lactic acid) Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 239000004626 polylactic acid Substances 0.000 description 1
- 229920006389 polyphenyl polymer Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 229920006306 polyurethane fiber Polymers 0.000 description 1
- AOHJOMMDDJHIJH-UHFFFAOYSA-N propylenediamine Chemical compound CC(N)CN AOHJOMMDDJHIJH-UHFFFAOYSA-N 0.000 description 1
- 239000002964 rayon Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- DCKVNWZUADLDEH-UHFFFAOYSA-N sec-butyl acetate Chemical compound CCC(C)OC(C)=O DCKVNWZUADLDEH-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- 239000002002 slurry Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
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- 239000002904 solvent Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 238000009864 tensile test Methods 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- XSQUKJJJFZCRTK-UHFFFAOYSA-N urea group Chemical group NC(=O)N XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N urethane group Chemical group NC(=O)OCC JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 239000001993 wax Substances 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
- C08G18/72—Polyisocyanates or polyisothiocyanates
- C08G18/74—Polyisocyanates or polyisothiocyanates cyclic
- C08G18/76—Polyisocyanates or polyisothiocyanates cyclic aromatic
- C08G18/7657—Polyisocyanates or polyisothiocyanates cyclic aromatic containing two or more aromatic rings
- C08G18/7664—Polyisocyanates or polyisothiocyanates cyclic aromatic containing two or more aromatic rings containing alkylene polyphenyl groups
- C08G18/7671—Polyisocyanates or polyisothiocyanates cyclic aromatic containing two or more aromatic rings containing alkylene polyphenyl groups containing only one alkylene bisphenyl group
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L75/00—Compositions of polyureas or polyurethanes; Compositions of derivatives of such polymers
- C08L75/04—Polyurethanes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
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- C08G18/00—Polymeric products of isocyanates or isothiocyanates
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- C08G18/4202—Two or more polyesters of different physical or chemical nature
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- C08G18/4236—Polycondensates having carboxylic or carbonic ester groups in the main chain containing only aliphatic groups
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- C08G18/6607—Compounds of groups C08G18/42, C08G18/48, or C08G18/52 with compounds of group C08G18/32 or polyamines of C08G18/38 with compounds of group C08G18/3203
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- C08J2201/00—Foams characterised by the foaming process
- C08J2201/04—Foams characterised by the foaming process characterised by the elimination of a liquid or solid component, e.g. precipitation, leaching out, evaporation
- C08J2201/054—Precipitating the polymer by adding a non-solvent or a different solvent
- C08J2201/0542—Precipitating the polymer by adding a non-solvent or a different solvent from an organic solvent-based polymer composition
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Abstract
The present invention provides a polyurethane resin composition comprising a polyurethane resin (X) which is prepared from a polyol (a), a polyisocyanate (b) and a chain extender (c), wherein the polyurethane resin (X) has an amorphous phase present in a range of 20 to 50% and a crystalline phase present in a range of 20 to 50% as measured by a pulse NMR measurement method. The present invention also provides a polishing pad comprising a porous body obtained from the polyurethane resin composition. The weight average molecular weight of the polyurethane resin (X) is preferably in the range of 12 to 30 ten thousand. The proportion of the polyisocyanate (b) used in the raw material constituting the polyurethane resin (X) is preferably in the range of 30 to 45 mass%.
Description
Technical Field
The present invention relates to a polyurethane resin composition and a polishing pad.
Background
Polishing pads using polyurethane resin compositions are widely used in the fields of liquid crystal glass, hard disk glass, silicon wafers, semiconductors, and the like, where high surface flatness is required. Among them, a soft porous body is used in the final finish polishing, and the soft porous body is processed by a wet film forming method in which a polyurethane resin diluted with a solvent such as DMF (dimethylformamide) is solidified in water (for example, refer to patent document 1).
The characteristics required for the polishing pad based on the porous body include, for example, a high bulk modulus (=low compressibility) for maintaining flatness of the surface of the processed body, flexibility as a material for suppressing scratches on the surface, and fineness and uniformity (wet film forming property) of the porous unit for supporting maintenance and stable polishing of slurry (polishing liquid).
However, the low compressibility, flexibility and wet film forming property are the opposite physical properties, and for example, when attempting to reduce the compressibility of the polishing pad while paying attention to flatness, polyurethane resin is hardened and scratches are deteriorated. In addition, when the polyurethane resin is softened with importance attached to scratches, solidification in water becomes impossible to proceed rapidly, and uniformity of the porous unit is lost, resulting in unstable polishing. Thus, it is difficult to achieve both of the above physical properties at a high level.
Prior art literature
Patent literature
Patent document 1: japanese patent application laid-open No. 2004-256738
Disclosure of Invention
Problems to be solved by the invention
The problem to be solved by the present invention is to provide a polyurethane resin composition having low compressibility, flexibility and excellent wet film forming property.
Means for solving the problems
The present invention provides a polyurethane resin composition comprising a polyurethane resin (X) which is prepared from a polyol (a), a polyisocyanate (b) and a chain extender (c), wherein the polyurethane resin (X) has an amorphous phase present in a range of 20 to 50% and a crystalline phase present in a range of 20 to 50% as measured by a pulse NMR measurement method.
The present invention also provides a polishing pad comprising a porous body based on the polyurethane resin composition.
ADVANTAGEOUS EFFECTS OF INVENTION
The polyurethane resin composition of the present invention is excellent in low compressibility, flexibility and wet film forming property.
Therefore, the polyurethane resin composition of the present invention can be suitably used as a polishing pad for finishing polishing having a porous body obtained by a wet film forming method.
Detailed Description
The polyurethane resin composition of the present invention contains a polyurethane resin (X) which is prepared from a polyol (a), a polyisocyanate (b) and a chain extender (c), and the polyurethane resin (X) has an amorphous phase present in a range of 20% to 50% and a crystalline phase present in a range of 20% to 50% as measured by a pulse NMR measurement method, in view of a high level of both low compressibility, flexibility and wet film forming properties.
In general, polyurethane resins (X) are known to be composed of a soft segment containing polyol (a) and a hard segment composed of urethane groups, urea groups, or the like derived from polyisocyanate (b) and chain extender (c). Here, the "amorphous phase" obtained by the pulse NMR measurement means the soft segment, and the "crystalline phase" means the hard segment. Accordingly, by setting the balance of the soft segment and the hard segment within the above range, it is possible to achieve a high level of both low compressibility, flexibility and wet film forming property. The method of measuring pulse NMR is described in examples described below.
In the pulse NMR measurement method, there is a region called "mesophase" in addition to the above-mentioned "amorphous phase" and "crystalline phase". This is a region where the soft segment and the hard segment are mixed, and the existence rate of the intermediate phase can be reduced by controlling the structure to be a better phase separation between the soft segment and the hard segment.
In the present invention, in order that the above-mentioned presence ratios of the above-mentioned "amorphous phase" and "crystalline phase" are positioned to be relatively high ratios and controlled to be in a numerical range that is simultaneously satisfied, it is important how to reduce the presence ratio of the "intermediate phase". As a technical idea that the existence ratio of the "amorphous phase" and the "crystalline phase" can be set to a relevant range, for example, there are: a technical idea of increasing the existence ratio of the soft segment by using a polyol (a) having a relatively high molecular weight as a raw material; a technical idea of using a polyisocyanate (b) having a relatively short chain length and a chain extender (c); technical ideas to facilitate formation of a phase separation structure by taking work in order of raw material reactions.
The ratio of the amorphous phase of the urethane resin (X) based on the pulse NMR measurement is preferably in the range of 25% to 40% from the viewpoint of obtaining more excellent low compressibility and flexibility, and the ratio of the crystalline phase is preferably in the range of 25% to 40%.
Examples of the polyol (a) include polyester polyol, polyether polyol, polycarbonate polyol, polyacrylic polyol, polybutadiene polyol, hydrogenated polybutadiene polyol, and dimer diol. These polyols may be used alone or in combination of two or more. Among them, from the viewpoint of obtaining more excellent wet film forming properties, 1 or more selected from the group consisting of polyester polyols, polyether polyols and polycarbonate polyols are preferably used, and polypropylene glycol and/or polytetramethylene glycol are preferable as the polyether polyols.
The number average molecular weight of the polyol (a) is preferably 500 to 100000, more preferably 700 to 10000, and even more preferably 800 to 5000. The number average molecular weight of the polyol (a) is a value measured by Gel Permeation Chromatography (GPC).
The proportion of the polyol (a) used in the raw material constituting the polyurethane resin (X) is preferably in the range of 35 to 65 mass%, more preferably in the range of 40 to 60 mass%.
As the polyisocyanate (b), for example, aliphatic polyisocyanates such as hexamethylene diisocyanate and lysine diisocyanate; alicyclic polyisocyanates such as cyclohexane diisocyanate, isophorone diisocyanate, dicyclohexylmethane diisocyanate, tetramethylxylylene diisocyanate, and norbornene diisocyanate; aromatic polyisocyanates such as phenylene diisocyanate, toluene diisocyanate, diphenylmethane diisocyanate, xylylene diisocyanate, naphthalene diisocyanate, polymethylene polyphenyl polyisocyanate, and carbodiimide diphenylmethane polyisocyanate. These polyisocyanates may be used alone or in combination of two or more. From the viewpoint of obtaining more excellent wet film forming properties, it is preferable to use an aromatic polyisocyanate, and diphenylmethane diisocyanate is more preferable.
The proportion of the polyisocyanate (b) used in the raw material constituting the polyurethane resin (X) is preferably in the range of 30 to 45 mass%, more preferably in the range of 35 to 40 mass%, from the viewpoint of obtaining further excellent low compressibility, flexibility and wet film forming property.
The chain extender (c) is a chain extender having a molecular weight of less than 500 (preferably in the range of 50 to 450), and examples thereof include chain extenders having an amino group such as ethylenediamine, 1, 2-propylenediamine, 1, 6-hexamethylenediamine, piperazine, 2, 5-dimethylpiperazine, isophoronediamine, 1, 2-cyclohexanediamine, 1, 3-cyclohexanediamine, 1, 4-cyclohexanediamine, 4' -dicyclohexylmethane diamine, 3' -dimethyl-4, 4' -dicyclohexylmethane diamine, and hydrazine; chain extenders having hydroxyl groups such as 2, 4-dimethyl-1, 5-pentanediol, 2, 3-dimethyl-1, 5-pentanediol, 2-ethyl-1, 5-pentanediol, 2-methyl-1, 6-hexanediol, 3-methyl-1, 6-hexanediol, 1, 7-nonanediol, 2-ethyl-1, 6-hexanediol, 2-methyl-1, 7-nonanediol, 3-methyl-1, 7-nonanediol, 4-methyl-1, 7-nonanediol, 1, 8-octanediol, 2-methyl-1, 8-octanediol, 1, 9-nonanediol, 2-methyl-1, 8-octanediol, 3-methyl-1, 8-octanediol, 4-methyl-1, 8-octanediol, 1, 10-decanediol, 2-methyl-1, 10-decanediol, 3-methyl-1, 10-decanediol, 4-methyl-1, 10-decanediol, 1, 11-undecanediol, trimethylolpropane, and the like. These chain extenders may be used alone or in combination of two or more. The molecular weight of the chain extender (c) represents the formula weight calculated based on the chemical formula.
The proportion of the chain extender (c) used in the raw material constituting the polyurethane resin (X) is preferably in the range of 5 to 20 mass%, more preferably in the range of 5 to 15 mass%.
The method for producing the polyurethane resin (X) includes, for example, a method in which the polyol (a), the polyisocyanate (b), and the chain extender (c) are added and reacted with each other. These reactions are carried out, for example, at a temperature of 50℃to 100℃for 3 hours to 10 hours. The reaction may be carried out in an organic solvent (Y) described later.
The weight average molecular weight of the urethane resin (X) is preferably in the range of 12 to 30 tens of thousands, more preferably in the range of 14 to 25 tens of thousands, from the viewpoint of obtaining further excellent low compressibility and wet film forming property. The weight average molecular weight of the polyurethane resin (X) is a value measured by Gel Permeation Chromatography (GPC).
The content of the urethane resin (X) in the urethane resin composition is in the range of 5 to 80 mass%.
As the organic solvent (Y), for example, ketone solvents such as N, N-dimethylformamide, N-dimethylacetamide, N-methyl-2-pyrrolidone, methyl ethyl ketone, methyl N-propyl ketone, acetone, methyl isobutyl ketone, and the like can be used; ester solvents such as methyl formate, ethyl formate, propyl formate, methyl acetate, ethyl acetate, isopropyl acetate, isobutyl acetate, and sec-butyl acetate; alcohol solvents such as methanol, ethanol, isopropanol, butanol, etc. These organic solvents may be used alone or in combination of two or more.
The polyurethane resin composition of the present invention contains the polyurethane resin (X) as an essential component, and may contain other additives as required.
Examples of the other additives include pigments, flame retardants, plasticizers, softeners, stabilizers, waxes, defoamers, dispersants, penetrants, surfactants, fillers, mold inhibitors, antibacterial agents, ultraviolet absorbers, antioxidants, weather-resistant stabilizers, fluorescent brighteners, antioxidants, and thickeners. These additives may be used alone or in combination of two or more.
The film formed from the polyurethane resin composition preferably has a 100% modulus obtained in a tensile test under a crosshead speed of 300 mm/min, and from the viewpoint of obtaining more excellent flexibility, it is preferably in the range of 7 to 20MPa, more preferably in the range of 9 to 16 MPa. The method for measuring 100% modulus of the coating film is represented by the method according to JIS K: the values measured by the method of 1995 are specifically described in examples described later.
Next, a method for producing a porous body by a wet film forming method using the polyurethane resin composition will be described.
The wet film forming method means: and a method in which the polyurethane resin composition is applied or impregnated onto the surface of a substrate, and then water or steam is brought into contact with the applied surface or the impregnated surface, thereby solidifying the polyurethane resin (X) to produce a porous body.
As a substrate to which the polyurethane resin composition is applied, for example, a substrate composed of a nonwoven fabric, a woven fabric, or a woven fabric; resin films, and the like. As a material constituting the base material, for example, a chemical fiber such as a polyester fiber, a nylon fiber, an acrylic fiber, a polyurethane fiber, an acetate fiber, a rayon fiber, or a polylactic acid fiber; cotton, hemp, cicada silk, wool, blends thereof, and the like.
The surface of the base material may be subjected to antistatic treatment, mold release treatment, hydrophobic treatment, water absorption treatment, antibacterial/deodorant treatment, antibacterial treatment, ultraviolet blocking treatment, and the like, as required.
Examples of the method of coating or impregnating the surface of the substrate with the polyurethane resin composition include a gravure coating method, a doctor blade coating method, a tube coating method, and a comma coating method. In this case, the amount of the organic solvent (Y) used may be adjusted as needed in order to adjust the viscosity of the polyurethane resin composition to improve the coating workability.
The thickness of the dried film of the polyurethane resin composition applied or impregnated by the above method is, for example, in the range of 0.5mm to 5mm, preferably in the range of 0.5mm to 3 mm.
Examples of the method of bringing water or water vapor into contact with the coated surface formed by coating or impregnating the polyurethane resin composition include: a method of immersing a substrate provided with a coating layer or an impregnating layer containing the polyurethane resin composition in a water bath; a method of spraying water on the coated surface using spraying or the like. The impregnation may be carried out in a water bath at 5 to 60℃for 2 to 20 minutes, for example.
The porous body is preferably washed with water or warm water at normal temperature, and the surface is preferably subjected to extraction to remove the organic solvent (Y) and then dried. The washing is preferably performed with water at 5 to 60 ℃ for 20 to 120 minutes, and the water used for washing is preferably replaced with water more than 1 time or continuously replaced with running water. Preferably, the drying is performed for 10 minutes to 60 minutes using a dryer or the like adjusted to 80 ℃ to 120 ℃.
The porous body has a long spindle-shaped or tear-drop-shaped porous structure in the thickness direction of the surface. The size of the hole is preferably in the range of 1 μm to 70 μm in diameter at the portion having the largest width in the plane direction. The thickness of the porous body is preferably 0.4 to 1.2mm, more preferably 0.4 to 1mm, in terms of use in polishing pads and the like.
As described above, the polyurethane resin composition of the present invention is excellent in low compressibility, flexibility and wet film forming property.
Therefore, the polyurethane resin composition of the present invention can be suitably used as a polishing pad for finishing polishing having a porous body obtained by a wet film forming method.
Examples
Hereinafter, the present invention will be described in more detail using examples.
Example 1
Into a four-necked flask equipped with a stirrer, a thermometer and a nitrogen inlet tube, 100 parts by mass of a polyester polyol (reactant of ethylene glycol and adipic acid, number average molecular weight: 2000, hereinafter abbreviated as "PEs (1)"), 20 parts by mass of 1, 4-butanediol (hereinafter abbreviated as "BG"), 564 parts by mass of N, N-dimethylformamide (hereinafter abbreviated as "DMF"), and 68 parts by mass of 4,4' -diphenylmethane diisocyanate (hereinafter abbreviated as "MDI") were charged, and the reaction was carried out under stirring at 60 ℃ for 6 hours, followed by charging 1 part by mass of isopropyl alcohol, and further stirring at 60 ℃ for 1 hour, thereby obtaining a polyurethane resin composition. The polyurethane resin had a weight average molecular weight of 188100.
Examples 2 to 5 and comparative examples 1 to 3
As shown in tables 1 and 2, polyurethane resin compositions were obtained in the same manner as in example 1, except that the types and amounts of the materials were changed.
[ method for measuring number average molecular weight ]
The number average molecular weight of the polyol and the weight average molecular weight of the polyurethane resin used in examples and comparative examples represent values measured by Gel Permeation Chromatography (GPC) under the following conditions.
Measurement device: high-speed GPC apparatus (HLC-8220 GPC, manufactured by Tosoh Co., ltd.)
Chromatographic column: the following columns manufactured by Tosoh corporation were used in series.
"TSKgel G5000" (7.8 mmI.D..times.30 cm). Times.1 root
"TSKgel G4000" (7.8 mmI.D..times.30 cm). Times.1 root
"TSKgel G3000" (7.8 mmI.D..times.30 cm). Times.1 root
"TSKgel G2000" (7.8 mmI.D..times.30 cm). Times.1 root
A detector: RI (differential refractometer)
Column temperature: 40 DEG C
Eluent: tetrahydrofuran (THF)
Flow rate: 1.0 mL/min
Injection amount: 100. Mu.L (tetrahydrofuran solution with sample concentration of 0.4% by mass)
Standard sample: calibration curves were made using standard polystyrene as described below.
(Standard polystyrene)
TSKgel Standard polystyrene A-500 manufactured by Tosoh Co., ltd "
TSKgel Standard polystyrene A-1000 manufactured by Tosoh Co., ltd "
TSKgel Standard polystyrene A-2500 manufactured by Tosoh Co., ltd "
TSKgel Standard polystyrene A-5000 manufactured by Tosoh Co., ltd "
TSKgel Standard polystyrene F-1 manufactured by Tosoh Co., ltd "
TSKgel Standard polystyrene F-2 manufactured by Tosoh Co., ltd "
TSKgel Standard polystyrene F-4 manufactured by Tosoh Co., ltd "
TSKgel Standard polystyrene F-10 manufactured by Tosoh Co., ltd "
TSKgel Standard polystyrene F-20 manufactured by Tosoh Co., ltd "
TSKgel Standard polystyrene F-40 manufactured by Tosoh Co., ltd "
TSKgel Standard polystyrene F-80 manufactured by Tosoh Co., ltd "
TSKgel Standard polystyrene F-128 manufactured by Tosoh Co., ltd "
TSKgel Standard polystyrene F-288 manufactured by Tosoh Co., ltd "
TSKgel Standard polystyrene F-550 manufactured by Tosoh Co., ltd "
[ method for measuring 100% modulus ]
A coating film was produced by adding 40 parts by mass of DMF to 100 parts by mass of the polyurethane resin compositions obtained in examples and comparative examples, and applying the mixture to a flat release paper (manufactured by Lintec Co., ltd. "EK-100D") so that the film thickness after drying became 30. Mu.m, drying at 90℃for 2 minutes, and further drying at 120℃for 2 minutes. Next, the obtained film was cut into a long shape having a width of 5mm and a length of 70mm, and 100% modulus (MPa) was measured at a crosshead speed of 300 mm/min using an Autograph (AG-1 KNX, manufactured by Shimadzu corporation).
[ method of measuring pulse NMR ]
The presence ratio (%) of an amorphous phase, a crystalline phase and an intermediate phase was measured by a pulse NMR (nuclear magnetic resonance) measurement method using the following conditions for the film obtained in the above [100% modulus measurement method ].
The measuring method comprises the following steps: pulse NMR measurement-based "Solid Echo" method
Measurement device: JNM-MU25 manufactured by Japanese electronics Co., ltd "
Measurement conditions: 1H90 pulse: 2.9 mu S
Repetition time: 3s
Accumulating times: 32 times
Measuring temperature: 27 DEG C
[ method for evaluating Wet film Forming Property ]
100 parts by mass of the obtained polyurethane resin composition was coated on a polyethylene terephthalate (PET) film so as to have a thickness of 1mm, and then immersed in water at 25℃for 10 minutes to solidify it. Then, the film was washed in warm water at 50℃for 60 minutes and left to stand in a dryer at 100℃for 30 minutes, thereby obtaining a processed film. The cross-sectional state of the obtained processed film was observed by a scanning electron microscope "JSM-IT500" (magnification: 100 times) manufactured by japan electronics corporation, and the cell shape (fineness, uniformity) was confirmed, and if the cell having the maximum lateral width of 70 μm or less was 60% or more of the whole, the cell was evaluated as "o", and the other was evaluated as "x".
[ method of evaluating compression Rate ]
The compression ratio of the processed film obtained in the above [ method for evaluating wet film formability ] was evaluated in accordance with JISL-1021-6. Specifically, for "thickness under standard pressure" after applying an initial load of 2kpa for 30 seconds: t0 "is measured, and the" thickness under specific pressure "after 30 seconds of the load of 98kPa as a final load is applied: t1 "was measured and applied to the following equation to calculate the compression ratio.
Compression ratio (%) =100× (t 0-t 1)/t 0
The compression ratio thus obtained was 20% or less, and the other was evaluated as "o".
[ method for evaluating softness ]
The processed film obtained in the above [100% modulus measuring method ] was measured for storage modulus (E ') at 23℃by dynamic viscoelasticity analysis in accordance with JIS K7244-1999 under the following conditions, and the processed film was evaluated as "O" when E' was 200MPa or less, and otherwise evaluated as "X".
Measurement device: viscoelasticity spectrometer (SII technology company's DMS 6100')
Temperature range: 100-250 DEG C
Heating rate: 5 ℃/min
Frequency 1Hz, stretching mode
[ Table 1]
[ Table 2 ]
Abbreviations in tables 1 to 2 are explained.
"PEs (2)": 1, 4-butanediol and adipic acid, number average molecular weight: 2000
"PEs (3)": the reactants of ethylene glycol, 1, 4-butanediol and adipic acid, number average molecular weight: 2000
"PEs (4)": 1, 6-hexanediol and adipic acid, number average molecular weight: 2000
"PEs (5)": 1, 4-butanediol and adipic acid, number average molecular weight: 1000
"PTMG": polytetramethylene glycol, number average molecular weight: 2000
"EG": ethylene glycol
The amounts used in the tables represent parts by mass.
The proportion (mass%) of the polyisocyanate (b) used in the constituent raw materials represents a value obtained by rounding the first decimal point.
The polyurethane resin composition of the present invention is excellent in low compressibility, flexibility and wet film forming property.
On the other hand, comparative example 1 is an embodiment in which the presence ratio of the amorphous phase is lower than the range defined in the present invention and the presence ratio of the crystalline phase exceeds the range defined in the present invention, and the flexibility is poor.
Comparative example 2 is an embodiment in which the presence ratio of the amorphous phase is lower than the range defined in the present invention, and the low compressibility is poor.
Comparative example 3 is an embodiment in which the presence ratio of the amorphous phase exceeds the range defined in the present invention and the presence ratio of the crystalline phase is lower than the range defined in the present invention, and the low compressibility and wet film forming property are poor.
Claims (3)
1. A polyurethane resin composition comprising a polyurethane resin X, wherein the polyurethane resin X is prepared from a polyol a, a polyisocyanate b and a chain extender c,
the polyol a comprises a polyester polyol,
the polyester polyol is at least one selected from the group consisting of a reactant of ethylene glycol and adipic acid, a reactant of 1, 4-butanediol and adipic acid, a reactant of ethylene glycol and 1, 4-butanediol and adipic acid, and a reactant of 1, 6-hexanediol and adipic acid,
the number average molecular weight of the polyol a is in the range of 2000 to 5000,
the polyisocyanate b is diphenylmethane diisocyanate,
the chain extender c is ethylene glycol or 1, 4-butanediol,
the weight average molecular weight of the polyurethane resin X is in the range of 14 to 25 ten thousand,
the polyol a is used in a proportion of 40 to 65 mass% in the raw material constituting the polyurethane resin X,
the polyisocyanate b is used in a proportion of 30 to 45 mass% in the raw material constituting the polyurethane resin X,
the proportion of the chain extender c used in the raw material constituting the polyurethane resin X is in the range of 5 to 20 mass%,
the amorphous phase of the polyurethane resin X was present in a range of 20% to 50% and the crystalline phase was present in a range of 20% to 50% as measured based on pulse NMR measurement.
2. A polishing pad comprising a porous body obtained based on the polyurethane resin composition according to claim 1.
3. The polishing pad according to claim 2, which is used for finish polishing.
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JP2020100688A (en) | 2020-07-02 |
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