CN111337519A - Method for measuring physical parameters in film production - Google Patents

Method for measuring physical parameters in film production Download PDF

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Publication number
CN111337519A
CN111337519A CN202010199282.8A CN202010199282A CN111337519A CN 111337519 A CN111337519 A CN 111337519A CN 202010199282 A CN202010199282 A CN 202010199282A CN 111337519 A CN111337519 A CN 111337519A
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CN
China
Prior art keywords
film
rho
microwave sensor
physical parameters
microwave
Prior art date
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Pending
Application number
CN202010199282.8A
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Chinese (zh)
Inventor
徐程松
刘伟雄
谢明
贺伟
赵全山
曾来荣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xu Chengsong
Original Assignee
Mianyang Renzhongren Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mianyang Renzhongren Technology Co ltd filed Critical Mianyang Renzhongren Technology Co ltd
Priority to CN202010199282.8A priority Critical patent/CN111337519A/en
Publication of CN111337519A publication Critical patent/CN111337519A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N22/00Investigating or analysing materials by the use of microwaves or radio waves, i.e. electromagnetic waves with a wavelength of one millimetre or more
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N22/00Investigating or analysing materials by the use of microwaves or radio waves, i.e. electromagnetic waves with a wavelength of one millimetre or more
    • G01N22/04Investigating moisture content

Abstract

The invention belongs to the technical field of microwave measurement, and particularly relates to a method for measuring physical parameters in film production. The method mainly comprises the following steps: detecting the energy r attenuated by the film passing through the microwave sensor by the microwave sensorQAnd the frequency deviation delta of the film passing through the microwave sensor is obtained according to the set 10 coefficientsQAnd delta, establishing the unknown quantity as the water content rho of the filmWAnd film basis weight rhoPThe water content rho of the film is obtained by solving the equation systemWAnd film basis weight rhoP. The invention has the beneficial effects that: the method is used for measuring the film parameters, can replace a radiation source, avoids the harm of the radiation source to human bodies and the environment, reduces the management cost and improves the production efficiency; at the same time, can replace the optical measurement method, canThe measurement precision can be greatly improved.

Description

Method for measuring physical parameters in film production
Technical Field
The invention belongs to the technical field of microwave measurement, and particularly relates to a method for measuring physical parameters in film production.
Background
The measurement of physical parameters during production is very important in order to ensure efficient, economical and high quality production of thin films. In the traditional production, the physical parameter monitoring of the film is detected by two methods, namely a radiation method and an optical method. The radiation method causes radiation pollution to the environment, damages production personnel and increases the production cost; although the optical method is pollution-free, the detection range and the detection precision are limited, and the production requirement is difficult to meet.
The microwave can be used for measuring the physical parameters of the film, which has been determined earlier, and a plurality of documents are reported at present, but only microwave moisture detection products are used in the production practice, and other reports are not found. In the film production, the first concerned physical parameter is the weight of a unit square, and the second is the water concentration, the thickness measurement in the film production mainly adopts a radiation method and a small amount of an optical method, and the film thickness and the water concentration are measured by using the same device without reports.
Disclosure of Invention
In view of the above problems, the present invention proposes a method for simultaneously obtaining two physical quantities of thickness and moisture concentration of a thin film by microwave measurement. The traditional microwave resonant cavity method cannot measure the water concentration and the thickness simultaneously because the physical parameters cannot form a proper equation set to solve two physical quantities of the thickness and the water concentration, so the key point of the method is to provide an equation set capable of solving the two physical quantities of the thickness and the water concentration.
The technical scheme of the invention is as follows:
a method for measuring physical parameters in film production comprises the following steps:
s1, detecting two physical parameters r through a microwave sensorQAnd δ, wherein rQRepresents the energy attenuated by the film passing through the microwave sensor, and delta represents the frequency offset of the film passing through the microwave sensor;
s2, according to two physical parameters rQAnd delta for establishing a binary system of quadratic equationsAfter solving the water content rho of the filmWAnd film basis weight rhoP
rQ=K11ρW+K12ρP+K13ρW 2+K14ρP 2+K15ρPρW
δ=K21ρW+K22ρP+K23ρW 2+K24ρP 2+K25ρPρW
Wherein, K11~K15,K21~K25The values of the 10 set coefficients are respectively as follows: -30<K11~K15<50,0<K21<500,0<K24<500,-20<K22<70,-20<K23<70,-20<K25<70;
S3, obtaining the physical parameter r according to the step S1 in the actual productionQAnd delta solving the system of binary quadratic equations established in the step S2 to obtain the water content rho of the filmWAnd film basis weight rhoP
According to the technical scheme, aiming at the problem that the traditional microwave sensor cannot measure the film quantification and only can measure the water content of the film, a binary quadratic equation set is formed by using measurement parameters obtained by the microwave sensor, and two physical parameters of the water content and the thickness of the film (the film quantification and the thickness can be mutually converted) can be obtained simultaneously by solving the equation set. In the scheme of the invention, K11~K15,K21~K25The 10 coefficients are pre-calibrated values, specific values need to be set according to different targets, and the value range provided by the invention comprises most of film products and can be suitable for most of conditions.
The invention has the beneficial effects that: the method is used for measuring the film parameters, can replace a radiation source, avoids the harm of the radiation source to human bodies and the environment, reduces the management cost and improves the production efficiency; meanwhile, an optical measurement method can be replaced, and the measurement precision can be greatly improved.
Detailed Description
The present invention is further illustrated by the following examples to demonstrate the effectiveness and utility of the invention.
Examples
In this example, the target film is set to be quantitative 95g and the water content is set to be 13.2g, and the measurement is carried out by adopting the method of the invention, which specifically comprises the following steps:
detection of r by a microwave sensorQAnd δ, each being rQ=0.16472,δ=12.66495;
For the purposes of this example, the set coefficients are:
K11=0.70384,K12=-0.00202,K13=-0.00407,K14=0.01936,K15=0.08,
K21=12.8165,K22=6.6898,K23=-5.7145,K24=60.034,K25=0.04;
substituting the parameters into a binary quadratic equation set, and solving to obtain:
ρP94.45g, error percentage: -0.58%;
ρW13.23g, the error percentage is: -0.227%;
if the conventional radioactive source is adopted to measure and obtain the paper quantification of 92.8g, the error percentage is as follows: -1.28%.
If the paper quantitative determination is 90g by adopting an optical method, the error percentage is as follows: -4.44%, paper moisture 12.8g, error percentages: -3.03%.
Therefore, the method of the invention not only meets the requirement of simultaneously measuring the thickness and the water concentration of the film, but also obviously improves the precision compared with the prior art, thereby having stronger practicability.

Claims (1)

1. A method for measuring physical parameters in film production is characterized by comprising the following steps:
s1, detecting two physical parameters by a microwave sensorrQAnd δ, wherein rQRepresents the energy attenuated by the film passing through the microwave sensor, and delta represents the frequency offset of the film passing through the microwave sensor;
s2, establishing a binary quadratic equation set:
rQ=K11ρW+K12ρP+K13ρW 2+K14ρP 2+K15ρPρW
δ=K21ρW+K22ρP+K23ρW 2+K24ρP 2+K25ρPρW
wherein, K11~K15,K21~K25The values of the 10 set coefficients are respectively as follows: -30<K11~K15<50,0<K21<500,0<K24<500,-20<K22<70,-20<K23<70,-20<K25<70;ρWIs the water content of the film, rhoPQuantifying the film;
s3, adopting the physical parameter r obtained in the step S1QAnd delta solving the system of binary quadratic equations established in the step S2 to obtain the water content rho of the filmWAnd film basis weight rhoP
CN202010199282.8A 2020-03-20 2020-03-20 Method for measuring physical parameters in film production Pending CN111337519A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010199282.8A CN111337519A (en) 2020-03-20 2020-03-20 Method for measuring physical parameters in film production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010199282.8A CN111337519A (en) 2020-03-20 2020-03-20 Method for measuring physical parameters in film production

Publications (1)

Publication Number Publication Date
CN111337519A true CN111337519A (en) 2020-06-26

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ID=71180278

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010199282.8A Pending CN111337519A (en) 2020-03-20 2020-03-20 Method for measuring physical parameters in film production

Country Status (1)

Country Link
CN (1) CN111337519A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2786526C2 (en) * 2021-05-27 2022-12-21 Федеральное государственное бюджетное учреждение науки Институт проблем управления им. В.А. Трапезникова Российской академии наук Method for measurement of physical quantity

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2786526C2 (en) * 2021-05-27 2022-12-21 Федеральное государственное бюджетное учреждение науки Институт проблем управления им. В.А. Трапезникова Российской академии наук Method for measurement of physical quantity

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Effective date of registration: 20221219

Address after: 621000 203, Building 5, Hongse Jingyuan, No. 128, Keyuan Road, Fucheng District, Mianyang City, Sichuan Province

Applicant after: Xu Chengsong

Address before: 621000 No. 35 Mian'an Road, Fucheng District, Mianyang City, Sichuan Province (Software Industry Park, China (Mianyang) Science and Technology City)

Applicant before: Mianyang renzhongren Technology Co.,Ltd.

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WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20200626