CN111326615A - Belt type electrophoresis Micro LED element continuous arrangement robot assembly line and arrangement method - Google Patents

Belt type electrophoresis Micro LED element continuous arrangement robot assembly line and arrangement method Download PDF

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Publication number
CN111326615A
CN111326615A CN202010268518.9A CN202010268518A CN111326615A CN 111326615 A CN111326615 A CN 111326615A CN 202010268518 A CN202010268518 A CN 202010268518A CN 111326615 A CN111326615 A CN 111326615A
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micro led
fixing film
electrophoresis
tank
plate
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CN202010268518.9A
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CN111326615B (en
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刘敬斌
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Shaoxing Bingo Technology Co ltd
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Shaoxing Bingo Technology Co ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005Processes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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    • H01L21/67271Sorting devices

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  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
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  • Condensed Matter Physics & Semiconductors (AREA)
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Abstract

The invention discloses a belt-type electrophoresis Micro LED element continuous arrangement robot assembly line, which comprises two arrangement robots symmetrically arranged left and right, wherein a mechanical operation arm is arranged between the two arrangement robots, a negative plate is arranged on a second roller shaft member, a heat exchanger is provided with a liquid outlet plate and a liquid inlet plate, the liquid outlet plate and the liquid inlet plate are respectively arranged on two opposite inner walls of an electrophoresis tank, and the negative plate is arranged close to the liquid inlet plate; wherein, the two first roll shaft parts are respectively provided with a preheating nitrogen nozzle and a cooling nitrogen nozzle; the invention can carry out continuous directional uniform arrangement operation on a large number of Micro LED elements and has high efficiency.

Description

Belt type electrophoresis Micro LED element continuous arrangement robot assembly line and arrangement method
Technical Field
The invention relates to a belt type electrophoresis Micro LED element continuous arrangement robot assembly line.
Background
At present, the bottleneck limiting the development of Micro LED (Micro light emitting diode) display technology mainly includes bulk transfer technology, Micro LEDs often use bulk transfer technology in the field of display technology, that is, a large amount of Micro LEDs with Micro scale are transferred onto a large-sized transfer plate, but before the Micro LEDs are transferred individually, the Micro LEDs need to be aligned and homogenized, and there is no device for aligning Micro elements with such size.
Disclosure of Invention
The invention aims to overcome the defects and provide a belt-type electrophoresis Micro LED element continuous arrangement robot assembly line.
In order to achieve the purpose, the invention adopts the following specific scheme:
the utility model provides a belt electrophoresis Micro LED component arranges robot assembly line in succession, includes the range robot that two bilateral symmetry set up, is equipped with a mechanical operation arm in the middle of two range robots.
Each arrangement robot comprises a bottom plate, a top plate connected to the bottom plate through support columns, an element fixing film material coil arranged on the bottom plate and provided with element accommodating wells uniformly distributed on the film surface, and an electrophoresis arrangement tank, a first rinsing tank, a second rinsing tank and a normal-temperature nitrogen drying box which are sequentially arranged along the conveying direction of the element fixing film, wherein a U-shaped notch is formed in one end of the top plate along the length direction of the top plate, the electrophoresis arrangement tank, the first rinsing tank and the second rinsing tank are arranged on the bottom plate and are respectively positioned below the U-shaped notches of the top plate, the normal-temperature nitrogen drying box is arranged at the other end of the top plate, and a plurality of first roller shaft pieces used for conveying the element fixing film are correspondingly arranged on the top plate;
the electrophoresis arrangement tank comprises an electrophoresis tank, a heat exchanger, an anode plate, a cathode plate and a second roller shaft part for conveying a component fixing film, the electrophoresis tank is fixed on a bottom plate, the heat exchanger is fixed on the outer wall of the electrophoresis tank, the second roller shaft part is fixed at the bottom in the electrophoresis tank, the anode plate is fixed on the inner wall of the electrophoresis tank and is parallel to the second roller shaft part, the heat exchanger and the anode plate are respectively arranged on two adjacent tank walls of the electrophoresis tank, the cathode plate is fixed on the second roller shaft part and is parallel to the anode plate, the heat exchanger is provided with a liquid outlet plate and a liquid inlet plate, the liquid outlet plate and the liquid inlet plate are respectively arranged on two opposite inner walls of the electrophoresis tank and are both parallel to the anode plate and the cathode plate, the liquid outlet plate is positioned between the anode plate and the inner wall of the electrophoresis tank;
two first roll shaft members positioned above the electrophoresis arrangement groove are respectively and correspondingly provided with a row of preheating nitrogen nozzles and a row of cooling nitrogen nozzles, and the preheating nitrogen nozzles are arranged close to the element fixing film material roll;
third roller shaft pieces used for conveying element fixing films are respectively arranged at the bottoms in the first rinsing tank and the second rinsing tank;
the normal temperature nitrogen gas stoving case includes nitrogen gas stoving cover and two static pressure nitrogen gas jet plates of locating nitrogen gas stoving cover bottom and interior top respectively, nitrogen gas stoving cover is fixed on the roof through two stoving cover supports.
In the invention, the outer wall of the first rinsing bath is provided with a filter, and the filter is used for filtering and concentrating liquid containing a Micro LED element in the first rinsing bath and then injecting the concentrated liquid into the heat exchanger.
The invention also comprises an electron beam defect detection mechanism which is arranged at the other end of the top plate and is positioned in front of the conveying direction of the component fixing film.
The invention also comprises a laser ablation mechanism which is arranged at the other end of the top plate and is positioned between the normal-temperature nitrogen drying box and the electron beam defect detection mechanism.
The invention has the beneficial effects that: compared with the prior art, the method can realize continuous directional uniform arrangement operation of a large number of Micro LED elements before mass transfer by utilizing the principle of particle electromigration deposition, has high efficiency, is convenient for the implementation of mass transfer technology in the later period, and is favorable for breaking the development bottleneck of the Micro LED display technology.
Drawings
FIG. 1 is a front view of the present invention;
FIG. 2 is a schematic diagram of a Micro LED element for use in the present invention;
FIG. 3 is a schematic structural view of the present invention;
FIG. 4 is a schematic cross-sectional view of the present invention;
FIG. 5 is an enlarged partial schematic view at I of FIG. 4;
FIG. 6 is a schematic view of the hidden element of the present invention after it has secured a roll of film;
FIG. 7 is a schematic diagram of the structure of an electrophoretic alignment chamber of the present invention;
FIG. 8 is a schematic view of a part of a fixing film for an element used in the present invention;
description of reference numerals: 1-a bottom plate; 2-a top plate; 3-roll of element fixing film; 4-electrophoresis arrangement tank; 41-an electrophoresis tank; 42-a heat exchanger; 421-liquid outlet plate; 422-liquid inlet plate; 43-an anode plate; 44-a cathode plate; 45-a second roller element; 5-a first rinsing bath; 51-a filter; 6-a second rinsing bath; 7-normal temperature nitrogen drying box; 8-electron beam defect detection mechanism; 9-laser ablation mechanism; 10-preheating a nitrogen nozzle; 20-cooling nitrogen nozzle; the robot operates arm-a.
Detailed Description
The invention will be described in further detail with reference to the following figures and specific examples, without limiting the scope of the invention.
In order to be used with the apparatus of the present embodiment, as shown in fig. 1, two arrangement robots are provided symmetrically, and a mechanical operation arm a is provided between the two arrangement robots.
Each arrangement robot deposits an electric polarization deposition layer between the bottom pins of the Micro LED elements in the production process, the center of gravity of the electric polarization deposition layer and the center of gravity of the Micro LED elements are offset, so that the Micro LED elements are oriented conveniently, and meanwhile, the electric polarization deposition layer is organic large-long-chain molecular structure salts, such as sodium stearate and the like, and can be dissolved in water and adsorb cations in the solution, so that element particles are polarized and charged.
As shown in fig. 1 to 8, the belt electrophoresis Micro LED element continuous arrangement robot assembly line according to the present embodiment includes a bottom plate 1, a top plate 2 connected to the bottom plate 1 through a support column, and an element fixing film roll 3 mounted on the bottom plate 1 and having element accommodating wells uniformly distributed on the film surface, an electrophoresis arrangement tank 4, a first rinsing tank 5, a second rinsing tank 6 and a normal temperature nitrogen drying box 7 which are arranged in sequence along the conveying direction of the element fixing film, one end of the top plate 2 is provided with a U-shaped gap along the length direction, the electrophoresis arrangement tank 4, the first rinsing tank 5 and the second rinsing tank 6 are arranged on the bottom plate 1 and are respectively positioned below the U-shaped gap of the top plate 2, the normal-temperature nitrogen drying box 7 is arranged at the other end of the top plate 2, and a plurality of first roller shaft parts for conveying element fixing films are correspondingly arranged on the top plate 2;
the electrophoresis arrangement tank 4 comprises an electrophoresis tank 41, a heat exchanger 42, an anode plate 43, a cathode plate 44 and a second roller part 45 used for conveying a component fixing film, the electrophoresis tank 41 is fixed on the bottom plate 1, the heat exchanger 42 is fixed on the outer wall of the electrophoresis tank 41, the second roller part 45 is fixed at the bottom of the electrophoresis tank 41, the anode plate 43 is fixed on the inner wall of the electrophoresis tank 41 and is parallel to the second roller part 45, the heat exchanger 42 and the anode plate 43 are respectively arranged on two adjacent tank walls of the electrophoresis tank 41, the cathode plate 44 is fixed on the second roller part 45 and is parallel to the anode plate 43, the heat exchanger 42 is provided with a liquid outlet plate 421 and a liquid inlet plate 422, the liquid outlet plate 421 and the liquid inlet plate 422 are respectively arranged on two opposite inner walls of the electrophoresis tank 41 and are both parallel to the anode plate 43 and the cathode plate 44, the liquid outlet plate 421 is positioned between the anode plate 43 and the inner wall of, the cathode plate 44 is disposed adjacent to the liquid inlet plate 422;
two first roll shaft members positioned above the electrophoresis arrangement tank 4 are respectively and correspondingly provided with a row of preheating nitrogen nozzles 10 and a row of cooling nitrogen nozzles 20, and the preheating nitrogen nozzles 10 are arranged close to the component fixing film material roll 3;
third roller shaft pieces used for conveying element fixing films are respectively arranged at the bottoms in the first rinsing tank 5 and the second rinsing tank 6;
normal atmospheric temperature nitrogen gas stoving case 7 includes nitrogen gas stoving cover and two static pressure nitrogen gas jet plates of locating nitrogen gas stoving cover bottom and interior top respectively, nitrogen gas stoving cover is fixed on roof 2 through two stoving cover supports.
The working mode of the embodiment is as follows: the method comprises the steps of conveying the front end of an element fixing film roll 3 through a first roll shaft and a second roll shaft, enabling the front end of the element fixing film to enter an electrophoresis arrangement tank 4, mixing a Micro LED element with a NaCl solution and additives such as a surfactant according to a proportion to obtain a suspension of the Micro LED element, enabling the surface of the Micro LED element in a single state to adsorb a large amount of cations in the solution when the Micro LED element is suspended in an ionic solution so as to present electropositivity, adding the proportioned suspension into an electrophoresis tank 41 of the electrophoresis arrangement tank 4, enabling the suspension to reach a working temperature, preferably 50-55 ℃ in a circulating heating state of a heat exchanger 42, and simultaneously preheating a preheating nitrogen nozzle 10 arranged on the first roll shaft to preheat the element fixing film entering the electrophoresis tank 41 so as to enable a projection area of an element accommodating well on the element fixing film to be increased due to thermal expansion, the probability of the Micro LED elements entering the element accommodating well is improved, after the suspension and the element fixing film reach the working temperature, direct current is conducted on the anode plate 43 and the cathode plate 44, an electric field with certain strength is generated between the two electrode plates, when the element fixing film is conveyed by the second roller shaft, the cathode plate 44 is separated between the film layers, at the moment, the Micro LED elements with positive electricity are migrated and gathered towards the cathode plate 44 under the action of the electric field force, due to the blocking of the element fixing film, a large number of Micro LED elements are gathered on the surface of the element fixing film between the anode plate 43 and the cathode plate 44, the Micro LED elements which arrive earlier fall into the element accommodating well on the element fixing film, due to the electrode deposition layer on the Micro LED elements, the Micro LED elements directionally fall into the element accommodating well under the action of the electric field force, then along with the movement of the element fixing film, the part of the element fixing film moves out of an electric field area between the two electrode plates and enters the back of the cathode, at this time, the Micro LED elements which are attached to the surface of the part of the element fixing film and do not enter the element holding well fall off from the element fixing film, the element fixing film moves continuously and moves out of the electrophoresis tank 41, at this time, the cooling nitrogen nozzle 20 arranged on the first roller shaft sprays low-temperature nitrogen to cool the element fixing film, the element holding well on the element fixing film shrinks along with the cooling of the element fixing film, so that the Micro LED elements are fixed in the element holding well, the arrangement yield and the fixing effect of the Micro LED elements can be improved by matching the preheating nitrogen nozzle 10 and the cooling nitrogen nozzle 20, then the element fixing film sequentially enters the first water washing tank 5 and the second water washing tank 6 to be washed, and after washing, the element fixing film enters a nitrogen drying cover of a normal-temperature nitrogen drying box 7, and the two static-pressure nitrogen spraying plates simultaneously dry the upper surface and the lower surface of the element fixing film, after the drying treatment, the element fixing film is gradually moved out of the nitrogen drying cover, so that the Micro LED elements are directionally and uniformly arranged, and thus, with the continuous transmission of the element fixing film, the directional and uniform arrangement of a large number of Micro LED elements can be continuously carried out.
The continuous directional uniform arrangement operation of a large number of Micro LED elements before the mass transfer can be realized by utilizing the principle of particle electromigration deposition, the efficiency is high, the mass transfer technology in the later period is convenient to implement, and the development bottleneck of the Micro LED display technology is broken.
In the embodiment, the heat exchanger 42 is arranged on the electrophoresis tank 41, the suspension is circularly heated through the heat exchanger 42, and the suspension in the electrophoresis tank 41 is directionally conveyed and stirred, so that deposition and delamination of Micro LED elements are prevented.
In this embodiment, specifically, the first roller, the second roller, the structure of third roller is the same, all include roller support and roller, the roller rotates to be connected on roller support, roller support of first roller is fixed on roof 2 through a roller bottom plate 1, preheat nitrogen gas nozzle 10, cooling nitrogen gas nozzle 20 all fixes on roller support of first roller, roller support of second roller fixes in electrophoresis tank 41 bottom, negative plate 44 fixes on roller support of second roller through two polar plate supports, roller support of third roller fixes in first wash bowl 5 or second wash bowl 6 bottom.
In this embodiment, the anode plate 43 and the cathode plate 44 are both planar structures and are made of graphite material.
When the element fixing film enters the first rinsing bath 5 after passing through the electrophoresis arrangement tank 4, the Micro LED elements which are not firmly fixed on the element fixing film can fall into the liquid in the first rinsing bath 5, therefore, based on the above embodiment, further, the outer wall of the first rinsing bath 5 is provided with the filter 51, the filter 51 is used for filtering and concentrating the liquid containing the Micro LED elements in the first rinsing bath 5 and then injecting the concentrated liquid into the heat exchanger 42, and the Micro LED elements can be recovered by the arrangement.
On the basis of the above embodiment, further, the device further comprises an electron beam defect detecting mechanism 8, wherein the electron beam defect detecting mechanism 8 is arranged at the other end of the top plate 2 and is positioned in front of the conveying direction of the component fixing film; the number and the positions of the missing parts of the elements are detected by the electron beam defect detection mechanism 8, so that the arrangement yield of the Micro LED elements can be ensured, the detection efficiency is high, and the positioning preparation is realized.
Specifically, the electron beam defect detecting mechanism 8 that this embodiment adopted is including film layer board support, defect detection case, electron beam emergence source, electron beam transmission board, electron beam receiver plate and the receiver plate support that has the quad slit, film layer board support fixes on roof 2, the defect detection case is located roof 2 and is located film layer board support's quad slit under, the defect detection incasement is located to electron beam emergence source, electron beam transmission board lid closes the top at the defect detection case, the receiver plate support is fixed on roof 2 and is set up perpendicularly with film layer board support, the electron beam receiver plate is located the interior top of receiver plate support and is located film layer board support's quad slit directly over.
Based on the above embodiment, further, the device further comprises a laser ablation mechanism 9, wherein the laser ablation mechanism 9 is arranged at the other end of the top plate 2 and is positioned between the normal-temperature nitrogen drying box 7 and the electron beam defect detection mechanism 8; during operation, the element fixing film fixed with the Micro LED element enters the area of the laser ablation mechanism 9 after passing through the normal-temperature nitrogen drying box 7, and the thin film layer at the bottom of the element accommodating well is ablated and removed by the laser ablation mechanism 9, so that the pin part of the Micro LED element is exposed, and the Micro LED element can be grabbed and placed in the later stage.
Specifically, the laser ablation mechanism 9 adopted in this embodiment includes an ablation support fixed on the top plate 2 and a laser ablation head disposed at the inner top of the ablation support.
Preferably, the front surface of the element fixing film of the embodiment is a fixing layer, element accommodating wells with profiles slightly smaller than the profiles of the Micro LED elements at normal temperature are uniformly distributed according to the arrangement requirements of the Micro LED elements, and the back surface of the element fixing film is made of a material easy to decompose at high temperature, so that the material is decomposed by laser ablation after the element fixing film is dried, and the pins of the element are exposed, thereby facilitating the grabbing and placing of the Micro LED elements.
The above description is only a preferred embodiment of the present invention, and all equivalent changes or modifications of the structure, characteristics and principles described in the present patent application are included in the protection scope of the present patent application.

Claims (8)

1. The utility model provides a belt electrophoresis Micro LED component arranges robot assembly line in succession which characterized in that, including two bilateral symmetry's arrangement robot, is equipped with a mechanical operation arm (a) in the middle of two arrangement robots.
2. The belt electrophoresis Micro LED element serial arrangement robot assembly line of claim 1,
each arrangement robot comprises a bottom plate (1), a top plate (2) connected with the bottom plate (1) through a support column, and an element fixing film material roll (3) which is arranged on the bottom plate (1) and is provided with element accommodating wells uniformly distributed on the film surface, and an electrophoresis arrangement tank (4), a first rinsing tank (5), a second rinsing tank (6) and a normal temperature nitrogen drying box (7) which are arranged in sequence along the conveying direction of the element fixing film, one end of the top plate (2) is provided with a U-shaped gap along the length direction, the electrophoresis arrangement tank (4), the first rinsing tank (5) and the second rinsing tank (6) are arranged on the bottom plate (1) and are respectively positioned below the U-shaped gap of the top plate (2), the normal temperature nitrogen drying box (7) is arranged at the other end of the top plate (2), a plurality of first roller parts for conveying the component fixing film are correspondingly arranged on the top plate (2);
the electrophoresis arrangement tank (4) comprises an electrophoresis tank (41), a heat exchanger (42), an anode plate (43), a cathode plate (44) and a second roller part (45) for conveying a component fixing film, the electrophoresis tank (41) is fixed on the bottom plate (1), the heat exchanger (42) is fixed on the outer wall of the electrophoresis tank (41), the second roller part (45) is fixed at the bottom of the electrophoresis tank (41), the anode plate (43) is fixed on the inner wall of the electrophoresis tank (41) and is parallel to the second roller part (45), the heat exchanger (42) and the anode plate (43) are respectively arranged on two adjacent tank walls of the electrophoresis tank (41), the cathode plate (44) is fixed on the second roller part (45) and is parallel to the anode plate (43), the heat exchanger (42) is provided with a liquid outlet plate (421) and a liquid inlet plate (422), the liquid outlet plate (421), The liquid inlet plates (422) are respectively arranged on two opposite inner walls of the electrophoresis tank (41) and are parallel to the anode plate (43) and the cathode plate (44), the liquid outlet plate (421) is positioned between the anode plate (43) and the inner wall of the electrophoresis tank (41), and the cathode plate (44) is arranged close to the liquid inlet plates (422);
two first roll shaft members positioned above the electrophoresis arrangement tank (4) are respectively and correspondingly provided with a row of preheating nitrogen nozzles (10) and a row of cooling nitrogen nozzles (20), and the preheating nitrogen nozzles (10) are arranged close to the element fixing film material roll (3);
third roller shaft pieces used for conveying element fixing films are respectively arranged at the bottoms in the first rinsing tank (5) and the second rinsing tank (6);
and the normal-temperature nitrogen drying box (7) comprises a nitrogen drying cover and two static-pressure nitrogen ejection plates which are respectively arranged at the bottom and the top in the nitrogen drying cover, and the nitrogen drying cover is fixed on the top plate (2) through two drying cover supports.
3. The belt electrophoresis Micro LED element continuous arrangement robot assembly line as claimed in claim 1, wherein a filter (51) is arranged on the outer wall of the first rinsing bath (5), and the filter (51) is used for filtering and concentrating liquid containing Micro LED elements in the first rinsing bath (5) and then injecting the concentrated liquid into the heat exchanger (42).
4. A belt electrophoresis Micro LED element continuous arrangement robot assembly line according to claim 1, further comprising an electron beam defect detecting mechanism (8), wherein the electron beam defect detecting mechanism (8) is provided at the other end of the top plate (2) and in front of the component holding film conveying direction.
5. A belt electrophoresis Micro LED element continuous arrangement robot assembly line according to claim 3, further comprising a laser ablation mechanism (9), wherein the laser ablation mechanism (9) is arranged at the other end of the top plate (2) and is positioned between the normal temperature nitrogen drying box (7) and the electron beam defect detection mechanism (8).
6. A belt electrophoresis Micro LED element continuous arrangement robot assembly line according to claims 1-3, further comprising a laser ablation mechanism (9), wherein the laser ablation mechanism (9) is arranged at the other end of the top plate (2) and is located between the normal temperature nitrogen drying box (7) and the electron beam defect detecting mechanism (8).
7. A belt electrophoresis Micro LED element continuous arrangement robot assembly line according to claims 1-3, further comprising a laser ablation mechanism (9), wherein the laser ablation mechanism (9) is arranged at the other end of the top plate (2) and is located between the normal temperature nitrogen drying box (7) and the electron beam defect detecting mechanism (8).
8. A Micro LED element arrangement method comprises the following steps: the method is characterized in that: the method comprises the steps of conveying the front end of an element fixing film roll 3 through a first roll shaft and a second roll shaft, enabling the front end of the element fixing film to enter an electrophoresis arrangement tank 4, mixing a Micro LED element with a NaCl solution and additives such as a surfactant according to a proportion to obtain a suspension of the Micro LED element, enabling the surface of the Micro LED element in a single state to adsorb a large amount of cations in the solution when the Micro LED element is suspended in an ionic solution so as to present electropositivity, adding the prepared suspension into an electrophoresis tank 41 of the electrophoresis arrangement tank 4, enabling the suspension to reach a working temperature, preferably 50-55 ℃ in a circulating heating state of a heat exchanger 42, and simultaneously preheating a preheating nitrogen nozzle 10 arranged on the first roll shaft to preheat the element fixing film entering the electrophoresis tank 41 so that a projection area of an element accommodating well on the element fixing film is increased due to thermal expansion, the probability of the Micro LED elements entering the element accommodating well is improved, after the suspension and the element fixing film reach the working temperature, direct current is conducted on the anode plate 43 and the cathode plate 44, an electric field with certain strength is generated between the two electrode plates, when the element fixing film is conveyed by the second roller shaft, the cathode plate 44 is separated between the film layers, at the moment, the Micro LED elements with positive electricity are migrated and gathered towards the cathode plate 44 under the action of the electric field force, due to the blocking of the element fixing film, a large number of Micro LED elements are gathered on the surface of the element fixing film between the anode plate 43 and the cathode plate 44, the Micro LED elements which arrive earlier fall into the element accommodating well on the element fixing film, due to the electrode deposition layer on the Micro LED elements, the Micro LED elements directionally fall into the element accommodating well under the action of the electric field force, then along with the movement of the element fixing film, the part of the element fixing film moves out of an electric field area between the two electrode plates and enters the back of the cathode, at this time, the Micro LED elements which are attached to the surface of the part of the element fixing film and do not enter the element holding well fall off from the element fixing film, the element fixing film moves continuously and moves out of the electrophoresis tank 41, at this time, the cooling nitrogen nozzle 20 arranged on the first roller shaft sprays low-temperature nitrogen to cool the element fixing film, the element holding well on the element fixing film shrinks along with the cooling of the element fixing film, so that the Micro LED elements are fixed in the element holding well, the arrangement yield and the fixing effect of the Micro LED elements can be improved by matching the preheating nitrogen nozzle 10 and the cooling nitrogen nozzle 20, then the element fixing film sequentially enters the first water washing tank 5 and the second water washing tank 6 to be washed, and after washing, the element fixing film enters a nitrogen drying cover of a normal-temperature nitrogen drying box 7, and the two static-pressure nitrogen spraying plates simultaneously dry the upper surface and the lower surface of the element fixing film, after the drying treatment, the element fixing film is gradually moved out of the nitrogen drying cover, so that the Micro LED elements are directionally and uniformly arranged, and thus, with the continuous transmission of the element fixing film, the directional and uniform arrangement of a large number of Micro LED elements can be continuously carried out.
CN202010268518.9A 2020-04-08 2020-04-08 Belt type electrophoresis Micro LED element continuous arrangement robot assembly line and arrangement method Active CN111326615B (en)

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CN202010268518.9A CN111326615B (en) 2020-04-08 2020-04-08 Belt type electrophoresis Micro LED element continuous arrangement robot assembly line and arrangement method

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CN111326615B CN111326615B (en) 2021-08-27

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112002792A (en) * 2020-07-06 2020-11-27 深圳市隆利科技股份有限公司 Method for preparing LED display by electrophoretic assembly

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Publication number Priority date Publication date Assignee Title
DE102011000815A1 (en) * 2011-02-18 2012-08-23 OCé PRINTING SYSTEMS GMBH Arrangement for optimizing transfer of toner image on printing material by electrophoretic printing apparatus, has transfer unit provided with rotating transfer element
US20190296184A1 (en) * 2017-08-18 2019-09-26 Intel Corporation Micro light-emitting diode (led) display and fluidic self-assembly of same
CN110518098A (en) * 2019-09-26 2019-11-29 京东方科技集团股份有限公司 A kind of the flood tide transfer method and system of micro-led chip

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011000815A1 (en) * 2011-02-18 2012-08-23 OCé PRINTING SYSTEMS GMBH Arrangement for optimizing transfer of toner image on printing material by electrophoretic printing apparatus, has transfer unit provided with rotating transfer element
US20190296184A1 (en) * 2017-08-18 2019-09-26 Intel Corporation Micro light-emitting diode (led) display and fluidic self-assembly of same
CN110518098A (en) * 2019-09-26 2019-11-29 京东方科技集团股份有限公司 A kind of the flood tide transfer method and system of micro-led chip

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112002792A (en) * 2020-07-06 2020-11-27 深圳市隆利科技股份有限公司 Method for preparing LED display by electrophoretic assembly
CN112002792B (en) * 2020-07-06 2022-02-22 深圳市隆利科技股份有限公司 Method for preparing LED display by electrophoretic assembly

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