CN111316081A - Pressure sensor - Google Patents
Pressure sensor Download PDFInfo
- Publication number
- CN111316081A CN111316081A CN201780095759.4A CN201780095759A CN111316081A CN 111316081 A CN111316081 A CN 111316081A CN 201780095759 A CN201780095759 A CN 201780095759A CN 111316081 A CN111316081 A CN 111316081A
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- Prior art keywords
- pressure
- receiving portion
- pressure receiving
- diaphragm
- fluid
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
A pressure sensor (100) is provided with: a diaphragm (2) that is displaced by receiving a pressure; a first pressure receiving portion (3) that is pressed by the diaphragm (2) and deformed; a second pressure receiving portion (4) that is pressed by the diaphragm (2) together with the first pressure receiving portion (3) and deforms when the deformation of the first pressure receiving portion (3) becomes a predetermined value or more; a first strain gauge (5) attached to the first pressure receiving portion (3) and detecting a strain of the first pressure receiving portion (3); and an amplifier unit (6) that calculates the pressure acting on the diaphragm (2) based on the deformation of the first pressure receiving portion (3).
Description
Technical Field
The present invention relates to a pressure sensor.
Background
Japanese unexamined patent publication No. 7-29436 discloses an in-cylinder pressure detection device for detecting an in-cylinder pressure of an internal combustion engine using a strain gauge.
Disclosure of Invention
However, the pressure sensor using the strain gauge has a problem that the measurement accuracy in the low-pressure region deteriorates if the upper limit of the measurement range is increased.
The present invention has been made in view of the above-described problems, and an object of the present invention is to improve the upper limit of the measurement range while maintaining the measurement accuracy in the low-pressure region.
In order to solve the above problem, a pressure sensor according to an aspect of the present invention includes: a diaphragm that is displaced by receiving a pressure; a first pressure receiving portion that is pressed by the diaphragm and deformed; a second pressure receiving portion that is pressed by the diaphragm together with the first pressure receiving portion and deforms when the deformation of the first pressure receiving portion becomes equal to or greater than a predetermined value; a first strain gauge attached to the first pressure receiving portion to detect a strain of the first pressure receiving portion; and an amplifier unit that calculates a pressure acting on the diaphragm based on the deformation of the first pressure receiving portion.
According to the pressure sensor of this aspect of the present invention, the upper limit of the measurement range can be increased while maintaining the measurement accuracy in the low-pressure region.
Drawings
Fig. 1 is a schematic perspective view of a pressure sensor according to a first embodiment of the present invention.
Fig. 2 is a schematic sectional view of the pressure sensor along line II-II of fig. 1.
Fig. 3 is a schematic cross-sectional view of the pressure sensor after the vertical strain of the first pressure receiving portion becomes equal to or greater than a predetermined value.
Fig. 4 is a diagram showing a relationship between a pressure (pressure of a fluid to be measured) acting on a diaphragm of the pressure sensor according to the first embodiment of the present invention and a vertical strain generated in the first pressure receiving portion.
Fig. 5 is a flowchart illustrating a method of calculating the pressure P of the fluid to be measured according to the first embodiment of the present invention.
Fig. 6 is a graph for calculating the pressure of the measurement target fluid based on the vertical deformation of the first pressure receiving portion.
Fig. 7 is a flowchart illustrating a method of calculating the pressure of a fluid to be measured according to a second embodiment of the present invention.
Fig. 8 is a schematic perspective view of a pressure sensor according to a third embodiment of the present invention.
Fig. 9 is a schematic sectional view of the pressure sensor along line IX-IX of fig. 8.
Fig. 10 is a flowchart illustrating a method of calculating the pressure of a fluid to be measured according to a third embodiment of the present invention.
Detailed Description
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the following description, the same components are denoted by the same reference numerals.
(first embodiment)
Fig. 1 is a schematic perspective view of a pressure sensor 100 according to a first embodiment of the present invention. Fig. 2 is a schematic sectional view of the pressure sensor 100 taken along line II-II of fig. 1.
As shown in fig. 1 and 2, the pressure sensor 100 of the present embodiment includes a housing 1, a diaphragm 2, a first pressure receiving portion 3, a second pressure receiving portion 4, a strain gauge 5, and an amplifier unit 6, and detects the pressure of a fluid to be measured, such as gas or liquid.
The housing 1 is a frame having an opening at one end side in the axial direction (upper side in the drawing).
The diaphragm 2 is attached to the case 1 so as to cover the opening of the case 1. The diaphragm 2 receives the pressure P of the fluid to be measured on its surface, and is displaced toward the other end side (lower side in the drawing) in the axial direction.
The first pressure receiving portion 3 is an object extending substantially parallel to the axial direction of the housing 1, and is housed in the housing 1 so as to be pressed by the fluid to be measured via the diaphragm 2 and to be vertically deformed when the diaphragm 2 receives the pressure P from the fluid to be measured.
The second pressure receiving portion 4 is a body that extends substantially parallel to the axial direction of the housing 1 and has a housing axial length shorter than that of the first pressure receiving portion 3, and is housed inside the housing 1 so as to be pressed by the fluid to be measured together with the first pressure receiving portion 3 via the diaphragm 2 and generate vertical distortion when the diaphragm 2 receives the pressure P from the fluid to be measured since the vertical distortion epsilon 1 of the first pressure receiving portion 3 becomes equal to or greater than a predetermined value α.
In the present embodiment, the first pressure receiving portion 3 is formed in a cylindrical shape, the second pressure receiving portion 4 is formed in a hollow cylindrical shape, and the first pressure receiving portion 3 is accommodated in the hollow portion 42 of the second pressure receiving portion 4, but the shape and the arrangement method of the first pressure receiving portion 3 and the second pressure receiving portion 4 are not limited to the above-described embodiments. For example, the first pressure receiving portion 3 may be shaped like a plate, and the second pressure receiving portion 4 may be shaped like a hollow plate, and may be arranged in the same manner as in the present embodiment. For example, the first pressure receiving portion 3 and the second pressure receiving portion 4 may be formed in a plate shape and arranged side by side.
The strain gauge 5 is attached to the first pressure receiving portion 3, and detects the vertical strain ∈ 1 of the first pressure receiving portion 3. The strain gauge 5 is connected to the amplifier unit 6 via a sensor cable 7, and inputs an output signal corresponding to the vertical strain ∈ 1 to the amplifier unit 6.
The amplifier unit 6 is a unit in which an amplifier for amplifying the output signal of the strain gauge 5, a CPU (microprocessor) for calculating the pressure P of the fluid to be measured based on the output signal of the strain gauge 5 (i.e., the vertical strain ∈ 1) amplified by the amplifier unit 6, and the like are integrated.
As described above, the pressure sensor 100 of the present embodiment is configured to be able to receive the pressure P of the fluid to be measured first by the first pressure receiving portion 3 and then by the first pressure receiving portion 3 and the second pressure receiving portion 4 when detecting the pressure P of the fluid to be measured, which is the pressure acting on the diaphragm 2, based on the vertical strain ∈ 1 of the first pressure receiving portion 3. The reason for this structure will be explained below.
When the pressure acting on the diaphragm 2, that is, the pressure of the fluid to be measured is P, the area of the contact surface 31 where the diaphragm 2 and the first pressure receiving portion 3 are in contact (hereinafter referred to as "first contact area") is a1, and the young's modulus of the first pressure receiving portion 3 is E1, the vertical strain ∈ 1 of the first pressure receiving portion 3 can be expressed as in the following formula (1).
ε1＝P/(E1·A1)…(1)
Here, when the vertical strain ε 1 is equal to a predetermined yield value ε 1yieldAs described above, since the first pressure receiving portion 3 is plastically deformed, the upper limit value P of the measurement range of the pressure sensor 100 is setmaxIt is required to be smaller than the yield pressure P expressed as the following formula (2)yield。
Pyield＝ε1yield·E1·A1…(2)
However, if the first contact area a1 is increased, the rate of change of the vertical distortion ∈ 1 with respect to the pressure P of the fluid to be measured becomes smaller according to the formula (1). As a result, the sensitivity of the pressure sensor 100 to changes in the pressure P of the fluid to be measured decreases, and the measurement accuracy of the pressure sensor 100 deteriorates when the pressure P of the fluid to be measured is low. As described above, the pressure sensor 100 using the strain gauge 5 has a problem that the measurement accuracy in the low-pressure region deteriorates if the upper limit of the measurement range is increased.
In the present embodiment, the pressure sensor 100 is configured to be able to receive the pressure P of the fluid to be measured by the first pressure receiving portion 3, and to receive the pressure P of the fluid to be measured by the first pressure receiving portion 3 and the second pressure receiving portion 4 from the time when the vertical strain ∈ 1 of the first pressure receiving portion 3 becomes equal to or greater than the predetermined value α.
Accordingly, as shown in fig. 3, after the pressure P of the fluid to be measured becomes high and the vertical strain ∈ 1 of the first pressure receiving portion 3 becomes equal to or greater than the predetermined value α, the diaphragm 2 contacts the contact surface 31 of the first pressure receiving portion 3 and the contact surface 41 of the second pressure receiving portion 4, respectively, and therefore, if the area of the contact surface 41 where the diaphragm 2 contacts the second pressure receiving portion 4 (hereinafter referred to as "second contact area") is a2, the vertical strain ∈ 1 of the first pressure receiving portion 3 from when the vertical strain ∈ 1 becomes equal to or greater than the predetermined value α can be expressed as in the following formula (3).
ε1＝α+P/{E1·(A1+A2)}…(3)
In this way, the pressure P of the fluid to be measured is received in stages by the first pressure receiving portion 3 and the second pressure receiving portion 4, and it can be regarded that the first contact area a1 has increased by the second contact area a2 since the vertical strain ∈ 1 becomes equal to or greater than the predetermined value αmaxOn the other hand, while the vertical distortion ∈ 1 is smaller than the predetermined value α, the diaphragm 2 only contacts the first pressure receiving portion 3, and therefore the rate of change of the vertical distortion ∈ 1 with respect to the pressure P of the fluid to be measured does not decrease.
Therefore, according to the pressure sensor 100 of the present embodiment, the upper limit of the measurement range can be increased while maintaining the measurement accuracy in the low-pressure region.
Fig. 4 is a diagram showing a relationship between the pressure P of the fluid to be measured, which is the pressure acting on the diaphragm 2 of the pressure sensor 100 of the present embodiment, and the vertical strain ∈ 1 generated in the first pressure receiving portion 3.
As shown in fig. 4, in the region (low pressure region) where the vertical strain ∈ 1 of the first pressure receiving portion 3 is smaller than the predetermined value α, the diaphragm 2 only contacts the contact surface 31 of the first pressure receiving portion 3, and therefore the rate of change of the vertical strain ∈ 1 with respect to the pressure P of the fluid to be measured becomes large.
In the region (middle-high pressure region) where the vertical strain ∈ 1 of the first pressure receiving portion 3 is equal to or greater than the predetermined value α, the diaphragm 2 contacts the contact surface 31 of the first pressure receiving portion 3 and the contact surface 41 of the second pressure receiving portion 4, respectively, so the rate of change of the vertical strain ∈ 1 with respect to the pressure P of the fluid to be measured becomes small, and as a result, the yield value ∈ 1 can be reached at the vertical strain ∈ 1yieldThe upper limit of the pressure P of the fluid to be measured that has previously acted on the first pressure receiving portion 3 via the diaphragm 2 becomes high. Therefore, the upper limit of the measurement range of the pressure sensor 100 can be increased. It is to be noted thatIn the medium-high pressure region, since the occurrence of minute pressure fluctuations is small compared to the low pressure region, the rate of change of the vertical strain ∈ 1 with respect to the pressure P of the fluid to be measured becomes small, but the influence on the measurement accuracy is small.
Fig. 5 is a flowchart for explaining a method of calculating the pressure P of the fluid to be measured according to the present embodiment by the amplifier unit 6.
In step S1, the amplifier unit 6 reads the output signal of the strain gauge 5, that is, the vertical strain ∈ 1 of the first pressure receiving portion 3.
In step S2, the amplifier unit 6 refers to the previously created graph of fig. 6 showing the same relationship as fig. 4, and calculates the pressure P of the fluid to be measured based on the vertical strain ∈ 1 of the first pressure receiving portion 3.
The pressure sensor 100 of the present embodiment described above includes the diaphragm 2 that displaces upon receiving a pressure, the first pressure receiving portion 3 that is pressed by the diaphragm 2 and vertically deforms (deforms), the second pressure receiving portion 4 that is pressed by the diaphragm 2 together with the first pressure receiving portion 3 and vertically deforms when the vertical deformation ∈ 1 of the first pressure receiving portion 3 becomes equal to or greater than a predetermined value α, the first strain gauge 5 that is attached to the first pressure receiving portion 3 and detects the vertical deformation ∈ 1 of the first pressure receiving portion 3, and the amplifier unit 6 that calculates the pressure acting on the diaphragm 2, that is, the pressure P of the fluid to be measured, based on the vertical deformation ∈ 1 of the first pressure receiving portion 3.
This can increase the upper limit of the measurement range while maintaining the measurement accuracy in the low-pressure region.
(second embodiment)
Next, a pressure sensor 100 according to a second embodiment of the present invention will be described. The pressure sensor 100 of the present embodiment differs from the first embodiment in the method of calculating the pressure P of the fluid to be measured by the amplifier unit 6. Hereinafter, the difference will be mainly described.
In the first embodiment, in order to create the graph of fig. 6, it is necessary to obtain the relationship between the vertical strain ∈ 1 and the pressure P of the fluid to be measured by an experiment or the like in advance, and therefore, it takes a lot of time and the cost of the pressure sensor 100 may increase. In the present embodiment, the pressure P of the fluid to be measured is calculated using an equation.
Fig. 7 is a flowchart for explaining a method of calculating the pressure P of the fluid to be measured in the amplifier unit 6 according to the present embodiment.
In step S21, the amplifier unit 6 determines whether the vertical distortion ∈ 1 of the first pressure receiving portion 3 is equal to or less than a prescribed value α, and if the vertical distortion ∈ 1 is equal to or less than a prescribed value α, the amplifier unit 6 proceeds to the processing of step S22, and on the other hand, if the vertical distortion ∈ 1 is greater than the prescribed value α, the amplifier unit 6 proceeds to the processing of step S23.
In step S22, the amplifier unit 6 calculates the pressure P of the fluid to be measured based on the following equation (4) obtained by transforming the equation (1).
P＝ε1·E1·A1…(4)
In step S23, the amplifier unit 6 calculates the pressure P of the fluid to be measured based on the following equation (5) obtained by transforming the equation (3).
P＝(ε1-α){E1·(A1+A2)}…(5)
According to the pressure sensor 100 of the present embodiment described above, the same effects as those of the first embodiment can be obtained, and the number of steps can be reduced, so that the cost of the pressure sensor 100 can be reduced.
(third embodiment)
Next, a pressure sensor 100 according to a second embodiment of the present invention will be described. The pressure sensor 100 of the present embodiment is different from the first embodiment in that the strain gauge 5 is attached to the second pressure receiving portion 4 in addition to the first pressure receiving portion 3, and the method of calculating the pressure P of the fluid to be measured by the amplifier unit 6 is different from the first embodiment. Hereinafter, the difference will be mainly described.
In the following description, the strain gauge attached to the first pressure receiving portion 3 will be referred to as a "first strain gauge" for ease of distinction. On the other hand, the strain gauge attached to the second pressure receiving portion 4 is referred to as a "second strain gauge".
Fig. 8 is a schematic perspective view of a pressure sensor 100 according to a second embodiment of the present invention. Fig. 9 is a schematic cross-sectional view of pressure sensor 100 taken along line IX-IX of fig. 8.
As shown in fig. 8 and 9, the pressure sensor 100 of the present embodiment includes a second strain gauge 8 in addition to the housing 1, the diaphragm 2, the first pressure receiving portion 3, the second pressure receiving portion 4, the first strain gauge 5, and the amplifier unit 6 described in the first embodiment.
The second gauge 8 is attached to the second pressure receiving portion 4, and detects the vertical deformation ∈ 2 of the second pressure receiving portion 4. The second strain gauge 8 is connected to the amplifier unit 6 via a sensor cable, and inputs an output signal corresponding to the vertical strain ∈ 2 to the amplifier unit 6.
However, due to manufacturing errors, deterioration over time, and the like of the first pressure receiving part 3, there is a possibility that the diaphragm 2 does not contact the second pressure receiving part 4 even if the vertical strain ∈ 1 of the first pressure receiving part 3 becomes the predetermined value α, or conversely, the diaphragm 2 may already contact the second pressure receiving part 4 before the vertical strain ∈ 1 of the first pressure receiving part 3 becomes the predetermined value α.
In the above-described situation, in the method of calculating the pressure P of the fluid to be measured according to the first and second embodiments, the accuracy of measuring the pressure P of the fluid to be measured is lowered in the region where the vertical distortion ∈ 1 is a value near the predetermined value α.
Then, in the present embodiment, the second gauge 8 is attached to the second pressure receiving portion 4. By attaching the second gauge 8 to the second pressure receiving portion 4, the time point at which the second pressure receiving portion 4 is deformed can be known. That is, the time point when the diaphragm 2 starts to contact the second pressure receiving portion 4 and the second pressure receiving portion 4 is pressed by the fluid to be measured via the diaphragm 2 can be known.
Therefore, in the second embodiment described above, if the calculation formula of the pressure P of the fluid to be measured is changed at the time point when the second pressure receiving portion 4 is deformed, it is possible to suppress a decrease in the measurement accuracy of the pressure P of the fluid to be measured in a region where the vertical deformation ∈ 1 is a value near the predetermined value α.
Fig. 10 is a flowchart for explaining a method of calculating the pressure P of the fluid to be measured in the amplifier unit 6 according to the present embodiment.
In step S31, the amplifier unit 6 reads the output signal of the second strain gauge 8, that is, the vertical strain ∈ 2 of the second pressure receiving portion 4.
In step S32, the amplifier unit 6 determines whether the vertical distortion ∈ 2 of the second pressure receiving portion 4 is greater than zero, that is, whether the diaphragm 2 starts to contact the second pressure receiving portion 4 and the second pressure receiving portion 4 is pressed by the fluid to be measured via the diaphragm 2. if the vertical distortion ∈ 2 of the second pressure receiving portion 4 is zero, the amplifier unit 6 proceeds to the processing of step S22, whereas if the vertical distortion ∈ 1 is greater than the predetermined value α, the amplifier unit 6 proceeds to the processing of step S23.
The pressure sensor 100 of the present embodiment described above further includes the second strain gauge 8 attached to the second pressure receiving portion 4 and detecting the vertical strain ∈ 2 (strain) of the second pressure receiving portion 4, and the amplifier unit 6 is configured to change the pressure acting on the diaphragm 2, that is, the method of calculating the pressure P of the fluid to be measured, based on the vertical strain ∈ 2 of the second pressure receiving portion 4.
Thus, in addition to the same effects as those of the first and second embodiments described above, the pressure P of the fluid to be measured can be measured with high accuracy even when the vertical strain ε 1 of the first pressure-receiving portion 3 becomes the predetermined value α due to manufacturing errors, deterioration with time, or the like of the first pressure-receiving portion 3, the diaphragm 2 does not contact the second pressure-receiving portion 4, or conversely, the diaphragm 2 contacts the second pressure-receiving portion 4 before the vertical strain ε 1 of the first pressure-receiving portion 3 becomes the predetermined value α.
While the embodiments of the present invention have been described above, the above embodiments are merely some of application examples of the present invention, and are not intended to limit the technical scope of the present invention to the specific configurations of the above embodiments.
For example, in each of the above embodiments, two pressure receiving portions, i.e., the first pressure receiving portion 3 and the second pressure receiving portion 4, are provided, but a pressure receiving portion that receives the pressure P of the fluid to be measured may be further provided after the second pressure receiving portion 4. That is, 3 or more pressure receiving portions that receive pressure in stages may be provided.
Description of reference numerals:
2 diaphragm
3 first pressed part
4 second pressed part
5 deformation meter (first deformation meter)
6 amplifier unit
8 second deformation meter
100 pressure sensor
Claims (2)
1. A pressure sensor, wherein,
the pressure sensor includes:
a diaphragm that is displaced by receiving a pressure;
a first pressure receiving portion that is pressed by the diaphragm and deformed;
a second pressure receiving portion that is pressed by the diaphragm together with the first pressure receiving portion and deforms when the deformation of the first pressure receiving portion becomes equal to or greater than a predetermined value;
a first strain gauge attached to the first pressure receiving portion to detect a strain of the first pressure receiving portion; and
an amplifier unit that calculates a pressure acting on the diaphragm based on the deformation of the first pressure receiving portion.
2. The pressure sensor of claim 1,
the pressure sensor further includes a second strain gauge attached to the second pressure receiving portion and detecting a strain of the second pressure receiving portion,
the amplifier unit changes a calculation method of the pressure acting on the diaphragm (2) based on the deformation of the second pressure receiving portion.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2017/037076 WO2019073582A1 (en) | 2017-10-12 | 2017-10-12 | Pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111316081A true CN111316081A (en) | 2020-06-19 |
| CN111316081B CN111316081B (en) | 2021-10-29 |
Family
ID=66100675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201780095759.4A Active CN111316081B (en) | 2017-10-12 | 2017-10-12 | Pressure sensor |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6793928B2 (en) |
| KR (1) | KR20200066311A (en) |
| CN (1) | CN111316081B (en) |
| DK (1) | DK181276B1 (en) |
| WO (1) | WO2019073582A1 (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU555300A1 (en) * | 1976-01-06 | 1977-04-25 | Предприятие П/Я А-1891 | Multi-Range Dynamometer |
| JPH10300602A (en) * | 1997-04-25 | 1998-11-13 | Hitachi Ltd | Semiconductor pressure sensor |
| CN106033005A (en) * | 2016-01-20 | 2016-10-19 | 滁州贝腾特电器有限公司 | Intelligent weighing electronic scale |
| CN106092295A (en) * | 2016-01-20 | 2016-11-09 | 申俊 | Improved multifunctional double rank electronic scale |
| CN106289477A (en) * | 2016-01-20 | 2017-01-04 | 滁州贝腾特电器有限公司 | A kind of adjustable double precision LOAD CELLS |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0729436A (en) | 1993-07-07 | 1995-01-31 | Toshiba Corp | Gas insulated bushing |
-
2017
- 2017-10-12 WO PCT/JP2017/037076 patent/WO2019073582A1/en active Application Filing
- 2017-10-12 JP JP2019547867A patent/JP6793928B2/en active Active
- 2017-10-12 KR KR1020207010399A patent/KR20200066311A/en not_active Application Discontinuation
- 2017-10-12 CN CN201780095759.4A patent/CN111316081B/en active Active
-
2020
- 2020-05-05 DK DKPA202070287A patent/DK181276B1/en active IP Right Grant
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU555300A1 (en) * | 1976-01-06 | 1977-04-25 | Предприятие П/Я А-1891 | Multi-Range Dynamometer |
| JPH10300602A (en) * | 1997-04-25 | 1998-11-13 | Hitachi Ltd | Semiconductor pressure sensor |
| CN106033005A (en) * | 2016-01-20 | 2016-10-19 | 滁州贝腾特电器有限公司 | Intelligent weighing electronic scale |
| CN106092295A (en) * | 2016-01-20 | 2016-11-09 | 申俊 | Improved multifunctional double rank electronic scale |
| CN106289477A (en) * | 2016-01-20 | 2017-01-04 | 滁州贝腾特电器有限公司 | A kind of adjustable double precision LOAD CELLS |
Non-Patent Citations (1)
| Title |
|---|
| 王朝阳: "一种双量程压力传感器的动态特性研究", 《中国优秀硕士学位论文全文数据库信息科技辑》 * |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2019073582A1 (en) | 2020-11-05 |
| KR20200066311A (en) | 2020-06-09 |
| DK202070287A8 (en) | 2020-11-03 |
| DK202070287A1 (en) | 2020-05-11 |
| WO2019073582A1 (en) | 2019-04-18 |
| DK181276B1 (en) | 2023-06-19 |
| CN111316081B (en) | 2021-10-29 |
| JP6793928B2 (en) | 2020-12-02 |
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