CN111290059A - Coherent light source device based on CVD diamond and manufacturing method thereof - Google Patents
Coherent light source device based on CVD diamond and manufacturing method thereof Download PDFInfo
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- CN111290059A CN111290059A CN202010238063.6A CN202010238063A CN111290059A CN 111290059 A CN111290059 A CN 111290059A CN 202010238063 A CN202010238063 A CN 202010238063A CN 111290059 A CN111290059 A CN 111290059A
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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Abstract
The invention relates to the technical field of photoelectron, and discloses a coherent light source device based on CVD diamond and a manufacturing method thereof, wherein the coherent light source device comprises the following devices: the surface of the CVD diamond is subjected to photoetching treatment, the surface of the CVD diamond is subjected to special processing treatment, hemispherical structures with the spacing of 10 micrometers and the diameter of 100 nanometers are distributed on the surface of the CVD diamond, the model of the monochromatic laser is 400-plus 532-nanometer monochromatic laser, and the model of the transmission electron microscope is a TEM-type transmission electron microscope; the method comprises the following steps: the method comprises the following steps: implanting nitrogen atoms at a concentration of 1ppb into the hemisphere of the surface of said CVD diamond using a transmission electron microscope of said TEM type; step two: annealing the CVD diamond at one thousand degrees celsius. The CVD diamond-based coherent light source device and the manufacturing method thereof are convenient for manufacturing 675 nanometer coherent light sources.
Description
Technical Field
The invention relates to the technical field of photoelectron, in particular to a coherent light source device based on CVD diamond and a manufacturing method thereof.
Background
Optically, coherent light means "light in which all parameters of the light can be predicted and correlated at any point in time or space, in particular in a region in a plane perpendicular to the direction of propagation of the light, or at all times at a particular point in space". Colloquially, say a little: "the characteristic of having a fixed phase relationship between points on such a lightwave". I.e. all light is parallel to the same propagation axis, forming a very fine, highly focused beam, and only such coherent light can be used to transmit information. The radiation of a Laser (Laser) can produce coherent light with good coherence.
The conventional methods for obtaining coherent light include: (1) the wavefront division method divides a beam emitted from the same point or a very small area (which can be regarded as a point light source) on the same light source into two beams, makes the two beams meet after passing through different propagation paths, and at this time, the frequency and the vibration direction of the light split from the same beam are the same, and the phase difference at the meeting point is also constant, so that the light is coherent light. Such as young's double slit interference experiments. (2) The amplitude division method is a method in which a beam of light is reflected and refracted by a dielectric film to form two beams of light which interfere with each other. Such as thin film interference. (3) The laser light source is adopted, and the frequency, the phase, the vibration direction and the propagation direction of the laser light source are the same.
However, the conventional method is inconvenient to operate, has high requirements for devices, and is more inconvenient for the common 675 nm coherent light manufacturing, so that a CVD diamond-based coherent light source device and a manufacturing method thereof are provided.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides a CVD diamond-based coherent light source device and a manufacturing method thereof, which have the advantage of facilitating 675 nanometer coherent light and solve the problems that the existing coherent light manufacturing method is inconvenient to operate, has high requirements on devices and is more inconvenient for manufacturing commonly used 675 nanometer coherent light.
(II) technical scheme
In order to realize the purpose of facilitating 675 nanometer coherent light, the invention provides the following technical scheme: a CVD diamond based coherent light source apparatus comprising:
the surface of the CVD diamond is subjected to photoetching treatment, the surface of the CVD diamond is subjected to special processing treatment, hemispherical structures with the spacing of 10 micrometers and the diameter of 100 nanometers are distributed on the surface of the CVD diamond, the model of the monochromatic laser is 400-plus-532 nanometer type monochromatic laser, and the model of the transmission electron microscope is a TEM type transmission electron microscope.
A method of coherent light fabrication based on CVD diamond comprising the steps of:
the method comprises the following steps: implanting nitrogen atoms at a concentration of 1ppb into the hemisphere of the surface of said CVD diamond using a transmission electron microscope of said TEM type;
step two: annealing the CVD diamond at one thousand ℃ to form an NV color center;
step three: focusing laser on any hemisphere of the surface of the CVD diamond by using the monochromatic laser and the lens group, collecting time of laser fluorescence signals, recording the time of the collected laser fluorescence signals, sorting the time of the collected laser fluorescence signals, calculating the time of the collected fluorescence signals according to the time, making the time of the collected fluorescence signals into a curve by using a computer, and calculating an autocorrelation function of the time curve of the collected fluorescence signals, wherein if the characteristic of the monochromatic center is met, only a single NV color center in the hemisphere can be determined, and if the characteristic of the monochromatic center is not met, at least more than two NV color centers can be formed in the hemisphere;
step four: selecting the CVD diamond meeting the characteristic of a single color center in the third step, taking out the liquid helium refrigerating device, taking out the liquid in the liquid helium refrigerating device, adopting a container to carry out bearing to form a low-temperature liquid helium environment, placing the CVD diamond, the laser and the lens group in the container, further enabling the CVD diamond, the laser and the lens group to be in the low-temperature liquid helium environment, and carrying out the semi-spherical structure to be a good 637nm coherent light source because the fluorescence energy of NV color center in the semi-spherical structure on the CVD diamond is concentrated to the position of a zero phonon line at low temperature.
Preferably, the PPb in step two is a dimensionless quantity, and is the concentration in the solution expressed in parts per billion, also called the concentration in parts per billion, i.e. parts per billion, of the mass of solute in the total mass of the solution, and the PPb is often used in very small concentrations.
Preferably, the step one implanted nitrogen atom forms an N-C bond with any surrounding nitrogen atom within the CVD diamond and three N-C bonds are formed around any one nitrogen atom.
Preferably, in the third step, the distance between the monochromatic laser and the lens group needs to be adjusted and measured for multiple times, and data of multiple lasers focused on any hemisphere of the surface of the CVD diamond is collected.
Preferably, the CVD diamond not meeting the single color center feature in step three is subjected to the operation of step two and then to the operation of step four until the single color center feature is met.
Preferably, the device also comprises a fixing device for fixing the CVD diamond and a container (III) for bearing liquid nitrogen
Compared with the prior art, the invention provides a coherent light source device based on CVD diamond and a manufacturing method thereof, which have the following beneficial effects:
the CVD diamond based coherent light source device and the manufacturing method thereof need to operate in a low-temperature liquid helium environment. The device comprises CVD diamond with the surface processed specially, a 400-532nm monochromatic laser, a liquid helium refrigerating device and a lens group. The surface of the CVD diamond is subjected to photoetching treatment, and hemispherical structures with the interval of 10um and the diameter of 100nm are distributed on the surface of the CVD diamond. Using a TEM transmission electron microscope, nitrogen atoms were implanted at a concentration of 1ppb into a hemisphere of the CVD diamond surface, and then annealed at 1000 ℃ to form an NV color center. Using a monochromatic laser and a lens set, the laser is focused in one hemisphere, and the autocorrelation function of the time profile of the collected fluorescence signal is calculated. If the single color center feature is satisfied, it can be determined that there is only a single NV color center within the hemisphere. The diamond, the laser and the lens group are placed in a low-temperature liquid helium environment, and the fluorescence energy of the NV color center is concentrated to the position of a zero phonon line at low temperature, so that the optical fiber is a good 637nm coherent light source.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
A CVD diamond based coherent light source apparatus comprising:
the surface of the CVD diamond is subjected to photoetching treatment, the surface of the CVD diamond is subjected to special processing treatment, hemispherical structures with the intervals of 10 micrometers and the diameters of 100 nanometers are distributed on the surface of the CVD diamond, the model of the monochromatic laser is a 400-plus 532-nanometer monochromatic laser, and the model of the transmission electron microscope is a TEM-type transmission electron microscope.
A method of coherent light fabrication based on CVD diamond comprising the steps of:
the method comprises the following steps: injecting nitrogen atoms at a concentration of 1ppb into the hemisphere of the surface of the CVD diamond using a TEM type transmission electron microscope;
step two: annealing the CVD diamond at one thousand ℃ to form an NV color center;
step three: focusing laser on any hemisphere of the surface of the CVD diamond by using a monochromatic laser and a lens group, collecting the time of a laser fluorescence signal, recording the time of the collected laser fluorescence signal, sorting the time of the collected laser fluorescence signal, calculating the time of the collected fluorescence signal according to the time, making the time of the collected fluorescence signal into a curve by using a computer, and calculating an autocorrelation function of the time curve of the collected fluorescence signal;
step four: selecting the CVD diamond meeting the characteristic of a single color center in the third step, taking out the liquid helium refrigerating device, taking out the liquid in the liquid helium refrigerating device, adopting a container to carry out bearing to form a low-temperature liquid helium environment, placing the CVD diamond, the laser and the lens group in the container, further enabling the CVD diamond, the laser and the lens group to be in the low-temperature liquid helium environment, concentrating the fluorescence energy of the NV color center in the hemispherical structure on the CVD diamond to the position of a zero phonon line at low temperature, and carrying out the hemispherical structure to obtain a good 637nm coherent light source which needs to operate in the low-temperature liquid helium environment. The device comprises CVD diamond with the surface processed specially, a 400-532nm monochromatic laser, a liquid helium refrigerating device and a lens group. The surface of the CVD diamond is subjected to photoetching treatment, and hemispherical structures with the interval of 10um and the diameter of 100nm are distributed on the surface of the CVD diamond. Using a TEM transmission electron microscope, nitrogen atoms were implanted at a concentration of 1ppb into a hemisphere of the CVD diamond surface, and then annealed at 1000 ℃ to form an NV color center. Using a monochromatic laser and a lens set, the laser is focused in one hemisphere, and the autocorrelation function of the time profile of the collected fluorescence signal is calculated. If the single color center feature is satisfied, it can be determined that there is only a single NV color center within the hemisphere. The diamond, the laser and the lens group are placed in a low-temperature liquid helium environment, and the fluorescence energy of the NV color center is concentrated to the position of a zero phonon line at low temperature, so that the optical fiber is a good 637nm coherent light source.
In step two, PPb is a dimensionless quantity, and is the concentration in the solution expressed as the parts per billion (billion) ratio of the mass of solute to the mass of the total solution, also known as the parts per billion concentration, i.e., parts per billion (billion), and is commonly used in situations where the concentration is very small.
Step one implanted nitrogen atom forms an N-C bond with any surrounding nitrogen atom within the CVD diamond and three N-C bonds around any one nitrogen atom.
In the third step, the distance between the monochromatic laser and the lens group needs to be adjusted and measured for multiple times, and data of multiple lasers focused on any hemisphere of the surface of the CVD diamond is collected.
And repeating the second operation and the fourth operation until the single-color-center feature is met on the CVD diamond which does not meet the single-color-center feature in the third step.
Also comprises a fixing device for fixing the CVD diamond and a container for bearing liquid nitrogen
The CVD diamond based coherent light source device and the manufacturing method thereof need to operate in a low-temperature liquid helium environment. The device comprises CVD diamond with the surface processed specially, a 400-532nm monochromatic laser, a liquid helium refrigerating device and a lens group. The surface of the CVD diamond is subjected to photoetching treatment, and hemispherical structures with the interval of 10um and the diameter of 100nm are distributed on the surface of the CVD diamond. Using a TEM transmission electron microscope, nitrogen atoms were implanted at a concentration of 1ppb into a hemisphere of the CVD diamond surface, and then annealed at 1000 ℃ to form an NV color center. Using a monochromatic laser and a lens set, the laser is focused in one hemisphere, and the autocorrelation function of the time profile of the collected fluorescence signal is calculated. If the single color center feature is satisfied, it can be determined that there is only a single NV color center within the hemisphere. The diamond, the laser and the lens group are placed in a low-temperature liquid helium environment, and the fluorescence energy of the NV color center is concentrated to the position of a zero phonon line at low temperature, so that the optical fiber is a good 637nm coherent light source.
It is to be noted that the term "comprises," "comprising," or any other variation thereof is intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. A coherent light source device based on CVD diamond, comprising: the device comprises the following devices:
the surface of the CVD diamond is subjected to photoetching treatment, the surface of the CVD diamond is subjected to special processing treatment, hemispherical structures with the spacing of 10 micrometers and the diameter of 100 nanometers are distributed on the surface of the CVD diamond, the model of the monochromatic laser is 400-plus-532 nanometer type monochromatic laser, and the model of the transmission electron microscope is a TEM type transmission electron microscope.
2. A method of coherent light production based on CVD diamond, comprising: the method comprises the following steps:
the method comprises the following steps: implanting nitrogen atoms at a concentration of 1ppb into the hemisphere of the surface of said CVD diamond using a transmission electron microscope of said TEM type;
step two: annealing the CVD diamond at one thousand ℃ to form an NV color center;
step three: focusing laser on any hemisphere of the surface of the CVD diamond by using the monochromatic laser and the lens group, collecting time of laser fluorescence signals, recording the time of the collected laser fluorescence signals, sorting the time of the collected laser fluorescence signals, calculating the time of the collected fluorescence signals according to the time, making the time of the collected fluorescence signals into a curve by using a computer, and calculating an autocorrelation function of the time curve of the collected fluorescence signals, wherein if the characteristic of the monochromatic center is met, only a single NV color center in the hemisphere can be determined, and if the characteristic of the monochromatic center is not met, at least more than two NV color centers can be formed in the hemisphere;
step four: selecting the CVD diamond meeting the characteristic of a single color center in the third step, taking out the liquid helium refrigerating device, taking out the liquid in the liquid helium refrigerating device, adopting a container to carry out bearing to form a low-temperature liquid helium environment, placing the CVD diamond, the laser and the lens group in the container, further enabling the CVD diamond, the laser and the lens group to be in the low-temperature liquid helium environment, and carrying out the semi-spherical structure to be a good 637nm coherent light source because the fluorescence energy of NV color center in the semi-spherical structure on the CVD diamond is concentrated to the position of a zero phonon line at low temperature.
3. A method of coherent light fabrication of CVD diamond according to claim 2, wherein: the PPb in step two is a dimensionless quantity, and is the concentration in the solution expressed as the mass of solute in parts per billion, also known as the concentration in parts per billion, i.e., parts per billion, of the total solution mass, and is commonly used in situations where the concentration is very small.
4. A method of coherent light fabrication of CVD diamond according to claim 2, wherein: the step one implanted nitrogen atom forms an N-C bond with any surrounding nitrogen atom within the CVD diamond and three N-C bonds around any one nitrogen atom.
5. A method of coherent light fabrication of CVD diamond according to claim 2, wherein: and in the third step, the distance between the monochromatic laser and the lens group needs to be adjusted and measured for multiple times, and data of focusing a plurality of lasers on any hemisphere of the surface of the CVD diamond is collected.
6. A method of coherent light fabrication of CVD diamond according to claim 2, wherein: and repeating the second step of the CVD diamond which does not meet the single color core characteristic in the third step, and then performing the fourth step of the CVD diamond until the single color core characteristic is met.
7. A CVD diamond based coherent light source apparatus according to claim 1, wherein: also comprises a fixing device for fixing the CVD diamond and a container for bearing liquid nitrogen.
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110309265A1 (en) * | 2010-04-19 | 2011-12-22 | President And Fellows Of Harvard College | Diamond nanowires |
| CN103180241A (en) * | 2010-08-04 | 2013-06-26 | 六号元素有限公司 | A diamond optical element |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110309265A1 (en) * | 2010-04-19 | 2011-12-22 | President And Fellows Of Harvard College | Diamond nanowires |
| CN103180241A (en) * | 2010-08-04 | 2013-06-26 | 六号元素有限公司 | A diamond optical element |
Non-Patent Citations (2)
| Title |
|---|
| 张琪 等: "《基于室温单自旋磁共振技术的量子精密测量》", 《中国科学: 信息科学》 * |
| 王知权 等: "《NV色心浓度与退火温度的Boltzmann模型》", 《人工晶体学报》 * |
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