CN111285107B - Contactless mobile operating device and control method - Google Patents

Contactless mobile operating device and control method Download PDF

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Publication number
CN111285107B
CN111285107B CN202010114040.4A CN202010114040A CN111285107B CN 111285107 B CN111285107 B CN 111285107B CN 202010114040 A CN202010114040 A CN 202010114040A CN 111285107 B CN111285107 B CN 111285107B
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vacuum pump
air
holes
plate
porous medium
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CN111285107A (en
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钟伟
林以恒
杨锐
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Jiangsu University of Science and Technology
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Jiangsu University of Science and Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/917Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers control arrangements

Abstract

The invention discloses a non-contact mobile operating device, which comprises a circular upper layer plate, a circular lower porous medium plate and a position sensor, the upper layer plate is provided with a groove, the lower porous medium plate is fixedly connected with the upper layer plate to form a cavity, four first through holes are uniformly arranged on the upper layer plate in the circumferential direction, corresponding second through holes are arranged at corresponding positions of the lower layer porous medium plate, the first through holes are connected with a first vacuum pump, the other two opposite first through holes are connected with a second vacuum pump, a third through hole is arranged at the center of the upper layer plate, an air inlet joint is arranged on the third through hole, four brackets are evenly arranged on the side wall of the upper plate, each support is provided with a 2-position 3-way electromagnetic reversing valve, a position sensor and an air jet, the first vacuum pump and the second vacuum pump are connected with the 2-position 3-way electromagnetic reversing valve through pipelines, and the 2-position 3-way electromagnetic reversing valve is connected with the air jet. The invention changes the strength and the direction of the airflow on the surface of the object by means of the suction of the micro vacuum pump so as to realize the movement of the object and realize complete non-contact.

Description

Contactless mobile operating device and control method
Technical Field
The invention relates to a contactless moving operation device and a control method, belonging to the field of contactless moving operation of light and thin objects.
Background
The traditional rubber type vacuum chuck has the problems of pollution and the like due to contact with an object, and simultaneously scratches and cracks are easy to occur on the surface of the object. Non-contact vacuum chucks including bernoulli chucks and cyclone chucks are widely used in non-contact transportation modes. As shown in figure 1, the part with high flow velocity by applying Bernoulli principle has low pressure, the object (2) is grabbed by the vacuum chuck (1) under the action of negative pressure, the supply air flow flows out from the gap between the device and the object, and the device and the object are not contacted. Such as "a simple Bernoulli chuck" (published: CN108068136A, 5.25.2018) ". As shown in fig. 2, the object is grasped by suction force generated by the swirling air flow. See patent "cyclone type non-contact sucker" (publication number: CN101264844, published 2008, 9/17). However, this method only provides a vertical lifting force, and cannot drive the object to move horizontally, because there is no contact between the object and the suction cup. In order to prevent the object from falling off, the object needs to be contacted with the positioning pin when the object is moved and operated in the horizontal direction, which is easy to cause the pollution of the object.
Disclosure of Invention
The purpose of the invention is as follows: in order to overcome the defects in the prior art, the invention provides a control method of a non-contact moving operation device, which realizes the movement of an object by changing the strength and the direction of air flow on the surface of the object through the suction of a micro vacuum pump, and can realize complete non-contact.
The technical scheme is as follows: in order to solve the technical problem, the non-contact mobile operation device comprises a circular upper layer plate, a circular lower layer porous medium plate and a position sensor, wherein the upper layer plate is provided with a groove, the lower layer porous medium plate is fixedly connected with the upper layer plate to form a cavity, four first through holes are uniformly arranged in the circumferential direction of the upper layer plate, corresponding second through holes are arranged at corresponding positions of the lower layer porous medium plate, two opposite first through holes are connected with a first vacuum pump, the other two opposite first through holes are connected with a second vacuum pump, a third through hole is arranged in the center of the upper layer plate, an air inlet joint is arranged on the third through hole, four supports are uniformly arranged on the side wall of the upper layer plate, 2-to-3 electromagnetic reversing valves, the position sensor and an air jet are respectively arranged on each support, the first vacuum pump and the second vacuum pump are connected with the 2-to-3 electromagnetic reversing valves through pipelines, the 2-position 3 electrified magnetic reversing valve is connected with an air jet; and the lower porous medium plate is provided with a plurality of fourth through holes, and the position sensor and the 2-position 3-way electromagnetic reversing valve are both connected with a controller.
Preferably, the position sensor is a non-contact sensor.
Preferably, the position sensor is an infrared or laser sensor.
The control method of the contactless moving operation device comprises the following steps:
(1) setting parameters, namely setting an acceleration critical value; .
(2) The controller collects the position information of the five groups of position sensors through the collecting device and stores the position information in the controller;
(3) the controller samples the output signals of the position sensors through the data acquisition module, determines the displacements x1, x2, x3 and x4 of the object relative to the device, and calculates the relative acceleration of the object;
(4) calculating relative acceleration through the displacement data, judging whether the relative acceleration is larger than a critical value, if so, opening the electromagnetic valve, supplying air into the gap through the air jet, and increasing the air flow driving force; if not, the electromagnetic valve does not need to be opened;
(5) transmitting the difference components of the X-direction position deviation and the Y-direction position deviation into a controller, wherein the difference of the X-direction position deviation is X1-X3, the difference of the Y-direction position deviation is X2-X4, calculating the pulse frequency variation of a motor of the vacuum pump according to the algorithm of the controller, and controlling the motor to adjust the air suction volume of the vacuum pump;
(6) and (4) repeating the step (3) until the target position is reached.
Preferably, the formula for calculating the pulse frequency input to the motor of the vacuum pump according to the controller algorithm is as follows
Figure BDA0002390302880000021
e (t) is the actual and theoretical position deviation, and Kp and Ki are parameters of the controller and are set to values empirically.
Preferably, the four vacuum pumps corresponding to the four positions x1, x2, x3 and x4 are a first vacuum pump, a second vacuum pump, a third vacuum pump and a fourth vacuum pump, and the frequency of the first vacuum pump is
Figure BDA0002390302880000022
e1(t)=x1-x3-△x1,△x1The frequency u of the third vacuum pump from the first vacuum pump to the third vacuum pump for the theoretical position calculation result3=U-u1The frequency of the second vacuum pump is
Figure BDA0002390302880000023
Frequency u of the fourth vacuum pump4=U-u2U is a set constant value, Kp、Ki、K′p、K′iIs a constant value set empirically.
Preferably, the theoretical position
Figure BDA0002390302880000024
V0The initial speed is calculated by the displacement obtained by the last detection,
Figure BDA0002390302880000025
iterative solution is carried out on the air film pressure expression by using a finite volume method, and the pressure value of each air film grid can be obtained, so that the air film pressure gradient can be obtained
Figure BDA0002390302880000026
In the formula, Deltax is theoretical displacement variation, Deltat is a sampling period, F is theoretical force, m is object mass, A is upper surface area of the object, h is gas film spacing, measured by a laser displacement sensor, p is gas film pressure, omega is omega0Mu is the air viscosity for the superficial gas flow rate.
The non-contact moving operation device of the invention comprises an upper circular plate and a lower circular plate. The upper surface of the upper plate is provided with an air joint, the lower surface of the upper plate is provided with a groove, and compressed air can enter the cavity through the air joint. Through holes are symmetrically distributed near the edge of the upper plate, a micro vacuum pump is arranged at the through holes, and an air suction port of the vacuum pump is connected with the through holes. The lower porous medium plate is a porous material plate (the material can be sintered powder metal, fiber, foamed ceramic and the like), the diameter of the lower porous medium plate is the same as that of the upper plate, through holes are formed in the positions corresponding to the through holes of the upper plate, and the vacuum pump can suck air through the two through holes. After the upper and lower two-layer plates are bonded, a cavity is formed between the two-layer plates, so that the air supply pressure is stable to a certain extent. The outer side of the upper plate is symmetrically provided with a plurality of brackets, the position sensor and the two-position three-way micro valve are fixedly arranged on the brackets, and a control gas port of the three-way micro valve is connected with a vacuum pump exhaust port on the opposite side of the position of the three-way micro valve. A small-sized air nozzle is also arranged on the bracket and faces to the center of the plate.
When the object is moved, compressed air flows in from the air inlet of the upper layer plate, and the input pulse frequency of the motor of the vacuum pump is changed to control the rotating speed of the motor to suck, so that partial vacuum is formed between the object and the lower porous medium plate. Under the action of suction force, the object is lifted to be close to the lower porous medium plate, meanwhile, gas flowing out of the surface of the porous medium plate forms a pressure film on the surface of the object, and under the combined action of the suction force and the pressure, the object can realize non-contact suspension.
The operating device is arranged on the horizontal sliding table or the mechanical arm for use. In the initial state, after the airflow flows out through the porous material plate, one part of the airflow in a symmetrical radial shape is sucked and flows out from the edge through hole, the other part of the airflow flows out from the gap, and the object is in a horizontal stress balance state. When the operating device moves the object, the center of the object will deviate from the center of the porous medium plate because the surface between the object and the device is not contacted, the position sensor at the edge detects the position change of the object, and the difference between the two position sensors in the same direction is used as an input to be transmitted to the controller. Correcting input through theoretical model position state observation value to obtain error state quantity e (t), and calculating control pulse frequency u of motor 1 and motor 3 by using PI control algorithm1And u3(u1And u3The sum of which is a fixed value) u1And u3Are in a group u2And u4The different vacuum pumps are used for generating difference in suction flow rate. Thereby creating a directional air flow over the upper surface of the article that provides a horizontal driving force for the article. The corresponding relation between the suction flow rate of the vacuum pump and the control pulse frequency is determined by the characteristics of the vacuum pump. And calculating the surface gas flow rate through the suction flow rates Q1 and Q2, and then solving the viscous driving force of the gas flow acting on the surface of the object in a theoretical model, thereby determining the position state of the object according to a kinematic equation. And (4) correcting the input of the controller by taking the observed value of the theoretical position state of the object as feedback, and continuously repeating the steps.
When the object is located at the central position, the two-position three-way electromagnetic valve is in a power-off state, and the airflow at the outlet of the vacuum pump is exhausted to the atmosphere. When the object deviates from the center and exceeds a certain threshold value (measured by a displacement sensor), the three-way electromagnetic valve is electrified, the exhaust gas of the vacuum pump outlet enters the gap through the air jet, the airflow driving force is enhanced, the control effect is improved, and the occurrence of touch phenomenon is reduced. In this case, unlike the above steps, when calculating the theoretical position state of the object, the calculation condition needs to be modified in consideration of the intake air from both sides.
In the pulse frequency solution, firstly, the rotation speed of the motor is controlled to change the suction flow, the rotation speed of the motor of the vacuum pump and the pulse frequencyThe suction flow rate is in a relationship determined by the operating characteristics of the pump, as can be generally observed in the description, the pulse frequency is determined by the position error input by the position sensor by means of the PI algorithm in the figure, so that the rotation speed and the suction flow rate are determined, and u is obtained1A relationship of → Q;
secondly, after the suction flow is changed, the flow velocity of the air flow on the surface of the object is changed, the change of the flow velocity causes the driving force F of the air flow on the object to be changed, and the relationship between the flow velocity u and the force F is
Figure BDA0002390302880000041
(z is vertical), this section is derived with some expertise. Briefly, a simplified one-dimensional NaviStokes equation for the inside of a gap
Figure BDA0002390302880000042
Integration in the vertical z-direction, taking into account the boundary conditions u-0 (z-0) and u-0 (z-h)), an expression for the flow velocity can be obtained
Figure BDA0002390302880000043
From Newton's law of viscosity, F and pressure gradients can be obtained
Figure BDA0002390302880000044
The relation between
Figure BDA0002390302880000045
While
Figure BDA0002390302880000046
Is calculated by solving
Figure BDA0002390302880000047
Obtaining, using finite volume method to iteratively solve the air film pressure expression, namely obtaining the pressure value of each air film grid, thereby obtaining the air film pressure gradient
Figure BDA0002390302880000048
Thus, by pumpingThe suction flow rate determines the Q → F relationship.
Again, the theoretical position of the object is determined from the force F according to the kinematic equation (newton's second law). The displacement of the object is calculated by formula
Figure BDA0002390302880000049
V0The initial velocity is calculated from the displacement obtained from the last detection. Thus, the relationship F → Δ x is established.
The method comprises the steps of obtaining a relation between a rotating speed and an air suction flow according to the characteristics of a vacuum pump, determining suction flows Q1 and Q2, obtaining a flow speed according to the comparison between the flow and an area, introducing the flow speed into a model as a calculation condition, calculating a shear stress tau (F tau A) according to a Newton's law of viscosity, obtaining an air flow viscous force for driving an object, determining the theoretical position of the object according to a kinematic equation (Newton's second law), and correcting the input of a controller by taking the observed value of the theoretical position state of the object as feedback "
Figure BDA00023903028800000410
And e (t) is the difference value between the position deviation difference component X1-X3 or X2-X4 and the theoretical position, and the X direction and the Y direction are controlled respectively. I.e. two motors in the X direction, grouped by a u1And u3Controlling the rotating speed of the motor; and the two motors in the Y direction are in another group, passing through another group u2And u4And controlling the rotating speed of the motor. Kp and Ki are parameters of the controller and are empirically set to values that correlate to, and are determined from, the motor speed and the suction flow. Here, the two directions are controlled independently, written as
Figure BDA0002390302880000051
And
Figure BDA0002390302880000052
in the present invention, the theoretical position is calculated based on theory and is used to feedback the theoretical position status to make a correction to the controller input (meaning that if the theoretical calculation finds that the object is greatly displaced, the position deviation input is further increased, allowing the pump to operate at a higher pumping power). In the invention, the acceleration needs to be solved and judged in each sampling period, because the position is always in an adjustable state even if the acceleration is small, the rotating speed power of the pump is low at this moment, and the effect of changing the position is weak. Whether the acceleration exceeds a critical value is judged, whether the electromagnetic valve needs to be opened to supply air into the gap is judged, and the force output can be greatly increased after the electromagnetic valve is opened.
In the invention, the object is calculated according to the displacement of the uniform acceleration linear motion, wherein, Deltax is the theoretical displacement variation, Deltat is a sampling period, F is the theoretical force, m is the object mass, A is the object upper surface area, h is the air film interval, p is the air film pressure,
Figure BDA0002390302880000053
iterative solution is carried out on the air film pressure expression by using a finite volume method, and the pressure value of each air film grid can be obtained, namely the calculated value, omega0At the surface of the porous medium for the surface gas flow rate, omega0Q/A, dividing the supplied air flow by the surface area to obtain the flow speed; at the suction opening, i.e. the through-hole, omega, of the vacuum pump0Q1/area of through hole, or Q2/area of through hole), μ is the air viscosity (constant value of 1.82 × 10-5Pa·s)。
Has the advantages that: due to the adoption of the technical scheme, compared with the prior art, the invention has the following beneficial effects:
1) the intensity and the direction of the airflow on the surface of the object are changed by means of suction of the micro vacuum pump, so that the object is moved, and complete non-contact can be realized.
2) The exhaust channel of the micro vacuum pump is switched by the electromagnetic directional valve, when the electromagnetic valve is powered off, the exhaust channel of the micro vacuum pump is communicated with the atmosphere, and when the electromagnetic valve is powered on, the exhaust channel of the micro vacuum pump is communicated with the air jet, the air flow entering the gap is increased, and therefore the air flow driving force can be effectively increased.
3) The position sensor is arranged on the side surface of the device to detect the position change of the object and is used as a feedback input control module to detect and control the moving state of the object.
4) The porous medium plate is used as an air supply element, so that the surface stress concentration of the object can be avoided, and the deformation is not easily caused to the moving operation of the thin object.
Drawings
FIG. 1 is a schematic view of the operation of a contact vacuum chuck;
FIG. 2 is a schematic view of the operation of a Bernoulli contact-less vacuum chuck;
FIG. 3 is a schematic view of the operation of the spin-on-reflow non-contact vacuum chuck;
FIG. 4 is a schematic diagram of the working principle of the present invention;
FIG. 5 is a graph illustrating the variation of airflow over the surface of an object for illustrating the operation of the present invention; wherein, the graph (a) is a graph of the airflow variation on the surface of the object when the position sensor 5 detects that the object is located at the center of the device; FIG. b is a diagram showing the variation of airflow on the surface of the object when the position sensors on the left and right sides detect the deviation of the object; and (c) detecting the airflow change diagram on the surface of the object when the position sensors on the upper side and the lower side detect the deviation of the object.
FIG. 6 is an isometric view of a contactless mobile manipulator of the present invention;
FIG. 7 is a front view of the contactless mobile operating device of the present invention;
FIG. 8 is a top view of the non-contact moving operator of the present invention;
FIG. 9 is a sectional view A-A of FIG. 8;
fig. 10 is an exploded view of the entire contactless moving operation device;
FIG. 11 is a schematic control diagram of a contactless mobile manipulator;
FIG. 12 is a schematic diagram of a particular control principle;
FIG. 13 is a program flow diagram of a method of controlling the contactless mobile manipulator;
fig. 14 is a schematic view of a plurality of contactless moving operation devices in use.
Detailed Description
As shown in fig. 1 to 14, the non-contact mobile operating device of the present invention comprises a circular upper plate 1, a circular lower porous medium plate 2 and a position sensor 5, wherein the upper plate 1 is provided with a groove, the lower porous medium plate 2 is fixedly connected with the upper plate 1 to form a cavity, four first through holes are uniformly arranged in the circumferential direction of the upper plate 1, corresponding second through holes are arranged at corresponding positions of the lower porous medium plate 2, two opposite first through holes are connected with a first vacuum pump 7, the other two opposite first through holes are connected with a second vacuum pump, a third through hole is arranged in the center of the upper plate 1, an air inlet connector 8 is arranged on the third through hole, four supports 3 are uniformly arranged on the side wall of the upper plate 1, a 2-position 3 energizing magnetic reversing valve 4, a position sensor 5 and an air jet 6 are respectively arranged on each support 3, the first vacuum pump 7 and the second vacuum pump are connected with the 2-position 3 energizing magnetic reversing valve 4 through a pipeline, the 2-position 3 electrified magnetic reversing valve 4 is connected with an air jet 6; the lower porous medium plate 2 is provided with a plurality of fourth through holes, the position sensors 5 and the 2-position 3 electrified magnetic reversing valves 4 are both connected with a controller, the position sensors 5 are non-contact sensors, and the position sensors 5 are infrared or laser sensors.
A control method of a contactless mobile operation device, comprising the steps of:
(1) setting parameters, namely setting an acceleration critical value;
(2) the controller collects the position information of the five groups of position sensors 5 through the collecting device and stores the position information in the controller;
(3) the controller samples the output signal of the position sensor 5 through the data acquisition module, determines the displacements x1, x2, x3 and x4 of the object relative to the device, calculates the relative acceleration of the object 12, and calculates the acceleration calculation instruction: assuming that the positions of three consecutive sampling periods are x, x 'and x' (x, x 'and x' are each derived from x1-x3 or x2-x 4), the relative acceleration is
Figure BDA0002390302880000071
(4) Calculating relative acceleration through displacement data, judging whether the relative acceleration is larger than a critical value, if so, opening the electromagnetic valve, supplying air into the gap through the air jet 6, and increasing the air flow driving force; if not, the electromagnetic valve does not need to be opened;
(5) transmitting the position deviation difference components in the X direction and the Y direction into a controller, calculating the pulse frequency input to a motor of the vacuum pump according to a controller algorithm, and controlling the motor to adjust the suction capacity of the vacuum pump;
(6) and (4) repeating the step (3) until the target position is reached.
Fig. 4 is a schematic diagram of the working principle of the device of the present invention. When the object 12 is moved, the object is suspended below the device under the combined action of the positive surface pressure of the porous medium plate 2 and the negative pressure of the air suction port of the micro vacuum pump 7. When the device is moved, the object and the air floating platform do not contact with each other, so that the object and the air floating platform generate a relative motion trend. When the position sensor 5 arranged outside the device detects the deviation of the object below, the detected quantity is transmitted into the controller to control the corresponding micro vacuum pump 7 to enhance the suction air flow, and the increase of the suction flow enables the air flow on the surface of the object to be uneven, so that the object can move along with the device. For example, if the object is shifted to the right with respect to the apparatus, the controller controls the vacuum pump on the opposite side (the left vacuum pump in the figure) to increase the amount of suction. The exhaust hole 7-1 of the micro vacuum pump is connected with the electromagnetic directional valve 4 on the opposite side of the exhaust hole, and the exhaust channel of the micro vacuum pump is switched under the control of power on and power off. When the electromagnetic valve is powered off, the exhaust channel of the micro vacuum pump is communicated with the atmosphere, and when the electromagnetic valve is powered on, the exhaust channel of the micro vacuum pump is communicated with the air jet, the air flow entering the gap is increased, and therefore the air flow driving force can be increased. And the laser displacement sensor 13 is used for detecting the distance h between the object and the surface of the porous medium. The laser displacement sensor 13 is fixed on the adjustable bracket 14, and the bracket 14 is fixedly connected with the operating device. When the object is initially grabbed and loaded, the displacement sensor is firstly moved away to be convenient for grabbing from the upper part, and after the initial loading is completed, the bracket 14 is adjusted to move the sensor 13 to the central position of the object, and then the detection is started.
FIG. 5 is a graph illustrating the variation of airflow over the surface of an object for illustrating the operation of the present invention. When the position sensor 5 detects that the object is positioned at the center of the device, the suction flow of each vacuum pump is the same, air flows to the edge and the air suction port in a symmetrical radial shape after passing through the porous medium plate 2, and the object is balanced in lateral force and does not have a movement trend. As shown in the figure b, the position sensors at the left side and the right side detect the deviation of the object, the vacuum pump 7 at the right side is controlled to increase the air suction volume, so that the air flow on the surface of the object flows out from the right side more than the air flow on the left side, and the object is restored to the original position through the action of the air flow. And c, similarly, when the position sensors on the upper side and the lower side detect the deviation of the object, the suction amount is increased by controlling the vacuum pump on the lower side, so that the airflow on the surface of the object flows out from the lower side more than the airflow on the upper side.
As shown in fig. 6, 7 and 8, the non-contact mobile operation device mainly comprises a micro vacuum pump 7, an upper plate 1, a lower porous medium plate 2, an air inlet joint 8, an outer bracket 3, a 2-position 3 electrified magnetic reversing valve 4 and a position sensor 5. In the operating device, micro vacuum pumps are symmetrically arranged above an upper plate, supports with the number equivalent to that of the vacuum pumps are arranged on the side surface of the upper plate, and a magnetic reversing valve 4 and an air jet opening 6 are electrified through a support fixed position sensor 5, a position 2 and a position 3. The air source is connected with the air inlet joint 8 through a connecting hose, the signal output port of the position sensor 5 is connected with the input conversion module 9, the input conversion module is connected with the data acquisition module 10, and the data acquisition module is connected with the controller 11. The input conversion module is a signal conditioning circuit and can transmit the analog current and voltage signals output by the position sensor 5 to the data acquisition module. The data acquisition module is an A/D conversion circuit and is used for converting analog quantity signals output by the position sensor into digital quantity signals. The controller can be an industrial personal computer, a singlechip or a programmable controller. According to a set control algorithm, the suction flow is changed by controlling the vacuum pump so as to enable the object to move synchronously with the device.
Fig. 9 is a cross-sectional view of the contactless moving operation device. The device comprises an upper circular plate and a lower circular plate, wherein the bottom of the upper circular plate 1 is provided with a groove, 4 through holes 1-2 which are symmetrically distributed are formed near the edge, 1 micro vacuum pump 7 is respectively arranged at each through hole, and an air suction port 7-2 of the vacuum pump is connected with the through holes. The lower porous medium plate 2 is a porous material plate, the surface of the porous material plate uniformly gives out air, the diameter of the lower porous medium plate is the same as that of the upper plate, and through holes 2-1 are formed in the positions corresponding to the through holes of the upper plate. After the upper and lower two-layer plates are connected through viscose or bolts, a cavity is formed between the two-layer plates, and the vacuum pump can suck air through the two through holes. 4 supports 3 are symmetrically distributed and installed on the outer side of the upper plate, a position sensor 5 and a two-position three-way micro valve 4 are installed and fixed on the supports, and a control gas port A of the three-way micro valve is connected with a vacuum pump exhaust port on the opposite side of the position of the three-way micro valve. A small gas jet 6 is also mounted on the support, facing the centre of the plate.
The parts in fig. 10 are as follows: 1. an upper plate; 2. a lower porous dielectric slab; 3. mounting a bracket; 4. a two-position three-way electromagnetic directional valve; 5. a position sensor; 6. an air jet; 7. a first vacuum pump; 8. an air inlet joint; 13. and (5) sealing rings.
Fig. 11 is a control schematic block diagram. By reading the signals of the position sensors, 4 direction displacement amounts x1, x2, x3, and x4 are obtained. If the relative acceleration is smaller than gamma, the electromagnetic valve does not need to be opened at the moment, and the exhaust of the vacuum pump is exhausted into the atmosphere through the electromagnetic valve; if the relative acceleration is larger than gamma, the electromagnetic valve is opened at the moment, the exhaust of the vacuum pump is connected with the air nozzle through the electromagnetic valve and is supplied into the gap between the porous medium plate and the object, and the air flow driving force is increased. And differential signals of the position sensors are input into 2 controllers, and each controller independently controls the suction volumes of 2 vacuum pumps in the X direction and the Y direction according to a control algorithm, so that the distribution state of airflow on the surface of the object is changed, and the object moves along with the device in a non-contact manner.
Fig. 12 is a schematic diagram showing a specific control principle. The supplied air flows through the porous medium plate, enters a gap formed by the porous medium plate and the object, and is sucked out by the micro vacuum pump through the gap. The pressure distribution of air in the gap and the viscous driving force can be calculated by simultaneous simplified navier-stokes equations and continuity equations. A simplified expression of each of the basic equations is as follows,
the x-direction navier-stokes equation:
Figure BDA0002390302880000091
wherein p is the gas film pressure, x and z are the positions, uxFlow rate in x-direction, μ is air viscosity.
The z-direction navier-stokes equation:
Figure BDA0002390302880000092
wherein z is the position, uzThe z-direction flow rate, μ is the air viscosity.
Continuity equation:
Figure BDA0002390302880000093
wherein p is the gas film pressure, x and z are the positions, uxIs the flow velocity in the x direction, uzThe z-direction flow rate and t is the time.
The above equations can be combined
Figure BDA0002390302880000094
The specific method comprises the following steps: dividing the surface grid area by the flow to obtain the surface average flow velocity omega0. Meanwhile, iterative solution is carried out on the air film pressure expression by using a finite volume method, and the pressure value of each air film grid can be obtained. After the pressure value of the air film is obtained, the pressure gradient of the air film can be obtained
Figure BDA0002390302880000095
The airflow driving force F is calculated. In the formula, ω0The surface outflow gas flow rate or the suction gas flow rate are opposite in flow direction.
The gas film between the device and the object is divided into n one-dimensional grids. In the grids on the surface of the porous medium plate, gas flows out from top to bottom at a flow velocity omega0The throughput is compared to the area. In the mesh on the surface of the suction port, gas flows out from the bottom to the top, and the flow velocity is also obtained by comparing the flow rate with the area. The specific control process is as follows: the differential signal of the position sensor is transmitted into the controller, when the value is smaller than the critical threshold value, the electromagnetic valve is not opened, the theoretical position state observation value is used as feedback to correct the input of the controller and then control the rotating speed of the motor 1 and the motor 2 of the micro vacuum pump, and the PI algorithm is used
Figure BDA0002390302880000096
The calculation of (d) obtains the pulse frequency u input to the vacuum pump motor1And u2. The relationship between the rotating speed and the suction flow can be obtained according to the characteristics of the vacuum pump, so as to determine the suction flow Q1And Q2And the flow rate is obtained by comparing the flow rate with the area. The flow velocity is used as a calculation condition and led into a model, the shearing stress tau can be calculated through a Newton's law of viscosity, so that the airflow viscous force for driving the object is obtained, the theoretical position of the object is further determined through a kinematic equation (Newton's second law), and the observed value of the theoretical position state of the object is used as feedback to correct the input of the controller. When the electromagnetic valve is opened, the exhaust gas of the vacuum pump enters the gap through the airflow nozzle, the air inlet conditions at two sides need to be considered at the moment, the calculation conditions are modified, and the air film pressure calculation formula is changed into
Figure BDA0002390302880000101
α is a fixed value determined empirically, 1<α<2。
Fig. 13 is a flowchart showing a control procedure of the contactless moving operation device. And (3) starting a program, entering the step (2) after the initialization setting of the parameters and the states is finished, and sampling the output signals of the position sensor through the data acquisition module. Proceeding to step 3, the displacements x1, x2, x3 and x4 of the object relative to the device are determined. And 4, calculating the relative acceleration through the displacement data, and judging whether the relative acceleration is greater than a critical value. If yes, the electromagnetic valve is opened in the step 5, gas is supplied into the gap through the gas nozzle in the step 6, and the driving force of the gas flow is increased; if not, the electromagnetic valve does not need to be opened. And step 7, transmitting the position deviation difference components in the X direction and the Y direction into the controller. And 8, calculating the pulse frequency input into the motor of the vacuum pump according to the algorithm of the controller. And 9, controlling a motor to adjust the air suction amount of the vacuum pump. In step 10, judging whether the object is synchronous with the device according to the data of the position sensor, if not, returning to step 2 to repeat the process; if so, the current working state of the vacuum pump is kept.
Fig. 14 is a schematic view showing the working condition of 4 non-contact mobile operation devices in use, which can be used for moving and operating large-sized objects. The 4 operating devices are mounted on a cross-shaped support 14 which is mounted and fixed on the robot arm. When a plurality of devices are used in combination, only the bracket 3 located outside the object is left for mounting the position sensor 5, the solenoid valve 4, and the air ejection port 6.
The above description is only of the preferred embodiments of the present invention, and it should be noted that: it will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the principles of the invention and these are intended to be within the scope of the invention.

Claims (3)

1. A contactless mobile operating device characterized by: the device comprises a circular upper plate, a circular lower porous medium plate and a position sensor, wherein the upper plate is provided with a groove, the lower porous medium plate is fixedly connected with the upper plate to form a cavity, four first through holes are uniformly formed in the circumferential direction of the upper plate, corresponding second through holes are formed in the corresponding positions of the lower porous medium plate, two opposite first through holes are connected with a first vacuum pump, the other two opposite first through holes are connected with a second vacuum pump, a third through hole is formed in the center of the upper plate, an air inlet joint is arranged on the third through hole, four supports are uniformly arranged on the side wall of the upper plate, each support is respectively provided with a 2-position 3 electromagnetic reversing valve, a position sensor and an air jet, the first vacuum pump and the second vacuum pump are connected with the 2-position 3 electromagnetic reversing valve through pipelines, and the 2-position 3 electromagnetic reversing valve is connected with the air jet; and the lower porous medium plate is provided with a plurality of fourth through holes, and the position sensor and the 2-position 3-way electromagnetic reversing valve are both connected with a controller.
2. The contactless mobile operation device according to claim 1, characterized in that: the position sensor is a non-contact sensor.
3. The contactless mobile operation device according to claim 2, characterized in that: the position sensor is an infrared or laser sensor.
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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107444910A (en) * 2016-04-05 2017-12-08 费斯托股份有限两合公司 Grabbing assembly, bogey and holding meanss for temporary transient fixed workpiece

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57189947A (en) * 1981-05-15 1982-11-22 Hitachi Ltd Substrate transportation device
DE102006033296A1 (en) * 2006-07-17 2008-01-31 Manz Automation Ag Plant for structuring solar modules
KR101038844B1 (en) * 2006-10-10 2011-06-03 가부시키가이샤 니혼 셋케이 고교 Sheet-like material conveying device
JP5239606B2 (en) * 2007-10-04 2013-07-17 株式会社Ihi Levitation transport device and levitation unit
KR101142959B1 (en) * 2009-06-29 2012-05-08 김영태 Precision plate flotation system
NL2005049C2 (en) * 2010-07-07 2012-01-10 Levitech B V Method and apparatus for contactlessly advancing substrates.
EP2967124B1 (en) * 2013-03-14 2023-05-03 Altria Client Services LLC Fiber-wrapped smokeless-tobacco product
CN205328207U (en) * 2015-11-16 2016-06-22 钟伟 Glass substrate's air supporting conveyer
CN106586552B (en) * 2016-12-15 2019-04-12 天津金海通自动化设备制造有限公司 A kind of parallel chip conveying device of expandable type modularization
CN209834992U (en) * 2018-12-29 2019-12-24 王�华 Intelligent workpiece transplanting equipment

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107444910A (en) * 2016-04-05 2017-12-08 费斯托股份有限两合公司 Grabbing assembly, bogey and holding meanss for temporary transient fixed workpiece

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
一种气浮输运导轨的建模仿真与实验研究;葛志远,钟伟等;《江苏科技大学学报(自然科学版)》;20160831;338-343 *

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