CN111265788A - Flexible ultrasonic device for ultrasonic therapy and preparation method thereof - Google Patents
Flexible ultrasonic device for ultrasonic therapy and preparation method thereof Download PDFInfo
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- CN111265788A CN111265788A CN202010099120.7A CN202010099120A CN111265788A CN 111265788 A CN111265788 A CN 111265788A CN 202010099120 A CN202010099120 A CN 202010099120A CN 111265788 A CN111265788 A CN 111265788A
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N7/00—Ultrasound therapy
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/03—Assembling devices that include piezoelectric or electrostrictive parts
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N7/00—Ultrasound therapy
- A61N2007/0004—Applications of ultrasound therapy
- A61N2007/0017—Wound healing
Abstract
A flexible ultrasonic device for ultrasonic therapy and a method of manufacturing the same are provided. The flexible ultrasonic device comprises an excitation circuit, a target flexible substrate, an acoustic matching layer and a plurality of piezoelectric devices with different natural frequencies; the excitation circuit is electrically connected with the piezoelectric devices so that the piezoelectric devices can emit ultrasonic waves with different frequencies, the piezoelectric devices are combined with the target flexible substrate, the target flexible substrate is used for being attached to the surface of a human body, and the acoustic matching layer is combined with the target flexible substrate so as to package the piezoelectric devices. The flexible ultrasound device mechanically stimulates the wound, which reverses aged fibroblasts, thereby effectively promoting healing of chronic wounds. Moreover, the flexible ultrasonic device can be tightly attached to the skin like a wound plaster, has small volume, light weight and good treatment effect, and is convenient to use.
Description
Technical Field
The invention relates to the technical field of biology, medical treatment and medical instruments, in particular to a flexible ultrasonic device for ultrasonic treatment and a preparation method thereof.
Background
Healing of acute wounds can be largely divided into four processes: inflammation, fibroblast-dependent wound contraction, re-epithelialization and angiogenesis. The delay in acute wound healing leads to the formation of chronic wounds. Chronic wound healing is one of the major factors affecting human health, and about 5% of the world's population has long been plagued by recurrent inflammatory ulceration of wounds that can cause amputation, especially for people with diabetes, obesity, tobacco and alcohol addiction, and elderly and infirm people.
Two key problems were found in examining the cellular defects of chronic wounds: chronic inflammatory response and fibroblast senescence. At present, for the treatment of chronic wounds, most treatment means are control on bacterial infection and chronic inflammatory response, such as debridement and antibiotic treatment, but the treatment is often difficult to achieve satisfactory effects, only delays the further development of the disease, and has little curative effect on the repair of skin, and the complete healing of the wound is very difficult.
The technical problem to be solved by the skilled person is urgently needed to be how to promote the healing of chronic wounds.
Disclosure of Invention
The present invention has been made in view of the state of the art described above. The present invention is directed to a flexible ultrasonic device for ultrasonic therapy, which is soft and light, can be closely attached to a human body, and can promote healing of a chronic wound by emitting ultrasonic waves to the wound, and a method for manufacturing the same.
A flexible ultrasonic device for ultrasonic therapy is provided, the flexible ultrasonic device comprising an excitation circuit, a target flexible substrate, an acoustic matching layer, and a plurality of piezoelectric devices having different natural frequencies;
the excitation circuit is electrically connected with the piezoelectric devices to enable the piezoelectric devices to emit ultrasonic waves of different frequencies, the piezoelectric devices are combined with the target flexible substrate, the target flexible substrate is used for being attached to the surface of a human body, and the acoustic matching layer is combined with the target flexible substrate to encapsulate the piezoelectric devices.
Preferably, the plurality of piezoelectric devices are divided into a plurality of groups, the piezoelectric devices of the same group have the same natural frequency, and the target flexible substrate includes a plurality of treatment regions that combine the piezoelectric devices of the plurality of groups in a one-to-one correspondence.
Preferably, the plurality of treatment regions are arranged side by side, the piezoelectric devices within each of the treatment regions being arranged in an array.
Preferably, the treatment area is annular, the annular plurality of treatment areas being arranged concentrically.
Preferably, the piezoelectric devices of the plurality of groups are connected in parallel to the excitation circuit.
Preferably, the excitation circuit comprises a portable dc power supply and a resonant circuit which is powered by the portable dc power supply and excites the piezoelectric device.
Preferably, the target flexible substrate includes a treatment region to which the plurality of piezoelectric devices are bonded and an excitation region to which the excitation circuit is bonded.
Preferably, the excitation circuit comprises a voltage-regulated direct current power supply.
Preferably, the excitation circuit comprises a conditioning circuit that conditions an excitation frequency of the excitation circuit, the flexible ultrasound device comprising a switch that controls the conditioning circuit.
There is also provided a method for manufacturing the flexible ultrasonic device for ultrasonic therapy according to any one of the above-described technical aspects, comprising the steps of:
the preparation method comprises the following steps: sequentially combining a sacrificial layer, a high polymer film and a metal layer on a hard substrate;
the flexible circuit preparation step: preparing a flexible circuit by adopting a photoetching process, wherein the flexible circuit comprises the metal layer, the high polymer film and the sacrificial layer;
a transfer printing step: transferring the flexible circuit to the target flexible substrate;
piezoelectric device bonding step: bonding or soldering the piezoelectric device to the target flexible substrate and connecting the piezoelectric device to the flexible circuit.
The technical scheme provided by the disclosure at least has the following beneficial effects:
the flexible ultrasonic device can mechanically stimulate the wound, namely, the ultrasonic wave with a certain frequency is used for irradiating cells at the wound, so that aged fibroblasts can be reversed, and the remarkable effect of activating Rac1 protein (the activity of Rac1 protein in the fibroblasts plays an important role in repairing the skin) is achieved, and the healing of the chronic wound is effectively promoted.
Moreover, the flexible ultrasonic device can be tightly attached to the skin like a wound plaster, has small volume, light weight and convenient use, avoids the inconvenience caused by the large size, hard material and difficult close attachment to the skin of the existing ultrasonic transducer, and has good treatment effect.
Drawings
FIG. 1 is a schematic diagram of electrical connections of one embodiment of a flexible ultrasound device for ultrasound therapy provided by the present disclosure.
Fig. 2 is a schematic structural diagram of a therapy patch of a flexible ultrasound device.
Description of reference numerals:
1 piezoelectric device, 2 target flexible substrates, 21 high-frequency region, 22 medium-frequency region, 23 low-frequency region, 3 acoustic matching layer and 4 exciting circuit.
Detailed Description
Exemplary embodiments of the present invention are described below with reference to the accompanying drawings. It should be understood that the detailed description is intended only to teach one skilled in the art how to practice the invention, and is not intended to be exhaustive or to limit the scope of the invention.
The present disclosure provides a flexible ultrasonic device for ultrasonic therapy for emitting ultrasonic waves to a chronic wound to promote healing of the chronic wound, thereby performing a therapeutic action.
As shown in fig. 1, in one embodiment, the flexible ultrasound device comprises a therapy patch for attaching to a wound and emitting ultrasound waves toward the wound and excitation electronics comprising an excitation circuit 4, the excitation circuit 4 being electrically connected to the therapy patch to provide electrical signals to the therapy patch. The therapeutic patch includes a target flexible substrate 2, an acoustic matching layer 3, and a plurality of piezoelectric devices 1 having different natural frequencies, the piezoelectric devices 1 being bonded (e.g., bonded or welded) to the target flexible substrate 2, and the target flexible substrate 2 being bonded, for example, with medical cement so as to be attached to a surface of a human body. The plurality of piezoelectric devices 1 are connected by a flexible circuit, the flexible circuit has good stretchability, the flexible circuit may include a serpentine or wavy lead, and the piezoelectric devices 1 and the flexible circuit form an "island-bridge" structure.
The excitation circuit 4 is electrically connected with the piezoelectric device 1 to excite the piezoelectric device 1 to emit ultrasonic waves, and the radiation sound power of the flexible ultrasonic device can be changed by changing the voltage of the excitation circuit 4, for example, the radiation sound power is controlled not to exceed 30mW/cm2Thereby the flexible ultrasonic device emits safe ultrasonic radiation to human body.
The frequency range of the ultrasonic waves emitted by the piezoelectric device 1 is 0.5MHz to 5MHz, and the ultrasonic waves with different frequencies can obtain different treatment effects. The piezoelectric devices 1 may be divided into a plurality of groups, and the piezoelectric devices 1 of the same group have the same natural frequency. The piezoelectric devices 1 are divided into three groups, for example, and the three groups of piezoelectric devices 1 have natural frequencies of about 0.5MHz, about 1.5MHz, and about 2.5MHz, respectively, and emit ultrasonic waves of about 0.5MHz, about 1.5MHz, and about 2.5MHz, and the therapeutic frequencies are highly applicable.
A flexible ultrasonic device can send the ultrasonic wave of a plurality of frequencies simultaneously, and flexible ultrasonic device's treatment frequency is diversified, and therapeutic effect is better.
The target flexible substrate 2 may include a plurality of treatment regions that incorporate a plurality of groups of piezoelectric devices 1 in a one-to-one correspondence. In this embodiment, the target flexible substrate 2 comprises, for example, three treatment zones: a high frequency region 21, a medium frequency region 22, and a low frequency region 23. The piezoelectric devices 1 having natural frequencies of about 2.5MHz, about 1.5MHz, and about 0.5MHz are coupled to the high frequency region 21, the intermediate frequency region 22, and the low frequency region 23, respectively.
A plurality of treatment regions may be arranged side by side, for example, the target flexible substrate 2 is rectangular, the treatment regions are arranged in sequence along the length direction of the rectangle, and the piezoelectric devices 1 in each treatment region are arranged in an array, for example, a square array.
The flexible ultrasonic device with the rectangular target flexible substrate 2 has strong universality and high utilization rate.
In this embodiment, the number of piezoelectric devices 1 in each treatment area may be 9, and the 9 piezoelectric devices form a square array. The larger the number of piezoelectric devices 1 in the treatment region, the larger the treatment area, and a treatment patch having an appropriate number of piezoelectric devices 1 can be selected according to the size of the wound.
In other embodiments, the treatment region may be annular, with a plurality of annular treatment regions arranged concentrically.
The treatment patch having the treatment region of an appropriate shape may be selected according to the shape of the wound.
The piezoelectric devices 1 of a plurality of treatment zones can be connected in parallel to the excitation circuit 4, so that a desired treatment frequency can be obtained by selectively controlling the piezoelectric devices 1 of the respective treatment zones.
Within each treatment area, the piezoelectric devices 1 may be connected in series, which reduces the complexity of electrical connections and control.
The excitation circuit 4 may comprise a portable dc power supply which supplies the resonance circuit with power, and a resonance circuit which converts the dc power into an ac power and excites the piezoelectric device 1. The excitation circuit 4 is designed by adopting a pulse resonance circuit, generates high-frequency oscillation in the circuit, is connected to the piezoelectric device 1 after power and amplitude amplification, and generates ultrasonic waves by the vibration of the piezoelectric device 1.
The portable direct current power supply is, for example, a button cell or the like, and the portable direct current power supply is convenient to carry, so that the flexible ultrasonic device is miniaturized and is convenient to carry.
The excitation circuit 4 may further comprise a conditioning circuit that conditions the excitation frequency of the excitation circuit 4, and the flexible ultrasound device comprises a switch that controls the conditioning circuit. By operating the switch, the excitation circuit 4 can be caused to emit different excitation frequencies, and the piezoelectric device 1 can be caused to emit ultrasonic waves of different frequencies.
In other embodiments, the excitation circuit 4 may include a voltage-adjustable dc power supply, such as an adjustable dc regulated power supply, and the emitted acoustic power may be adjusted by adjusting the voltage of the dc power supply.
In other embodiments, the target flexible substrate 2 may further include an excitation area, and the excitation circuit 4 is bonded to the excitation area, such that the piezoelectric device 1 and the excitation circuit 4 are integrated with the same target flexible substrate 2, resulting in a higher degree of portability of the flexible ultrasonic device.
As shown in FIG. 2, in consideration of the contact coupling effect of the ultrasonic wave and the human skin, the flexible ultrasonic device is packaged by selecting a suitable acoustic matching layer 3, that is, the acoustic matching layer 3 is combined with the target flexible substrate 2 to package the piezoelectric device 1 and the flexible lead.
The flexible ultrasonic device can mechanically stimulate the wound, namely, the ultrasonic wave with a certain frequency is used for irradiating cells at the wound, so that aged fibroblasts can be reversed, and the remarkable effect of activating Rac1 protein (the activity of Rac1 protein in the fibroblasts plays an important role in repairing the skin) is achieved, and the healing of the chronic wound is effectively promoted.
Moreover, the flexible ultrasonic device can be tightly attached to the skin like a wound plaster, has small volume, light weight and convenient use, avoids the inconvenience caused by the large size, hard material and difficult close attachment to the skin of the existing ultrasonic transducer, and has good treatment effect.
The flexible ultrasonic device can be prepared by the following steps:
the preparation method comprises the following steps: sequentially combining a sacrificial layer (such as a PMMA layer: a polymethyl methacrylate layer), a high polymer film (such as a PI film: a polyimide film) and a metal layer on a hard substrate;
the flexible circuit preparation step: preparing a flexible circuit by adopting a photoetching process, wherein the flexible circuit comprises a metal layer, a high polymer film and a sacrificial layer;
a transfer printing step: transferring the flexible circuit to the target flexible substrate 2;
piezoelectric device bonding step: the piezoelectric device 1 is bonded or welded to the objective flexible substrate 2, and the piezoelectric device 1 is connected to a flexible circuit.
Next, a specific example of the above-mentioned production method is described.
A piezoelectric ceramic piece is selected as the piezoelectric device 1, for example, a circular piezoelectric ceramic piece with the diameter of 4mm is selected, an electrode on the piezoelectric ceramic piece is a flanging electrode, and the material of the piezoelectric ceramic piece can be PZT-4.
A silicon wafer is selected as a hard substrate.
Polydimethylsiloxane (PDMS) was chosen as the target flexible substrate 2.
And manufacturing a photoetching mask according to the structure of the flexible circuit.
In the preparation step:
firstly, spin-coating PMMA (sacrificial layer) on a silicon wafer, drying on a drying table after uniform spin-coating, wherein the drying temperature is about 180 ℃, and the drying time is about 10 min;
then, uniformly spin-coating a PI film (high polymer film) on the PMMA layer, and drying in a step heating mode, wherein the spin-coating of PMMA is to reduce the adhesion between PI and a silicon wafer so as to facilitate transfer printing;
after drying, performing electron beam evaporation to form a metal film (metal layer) on the silicon wafer (by using an E-beam evaporation principle), specifically, plating a layer of metal chromium with the thickness of about 10nm on the PI film by using electron beam evaporation plating equipment, and then plating a layer of metal gold with the thickness of about 150nm, wherein the chromium plating is used for increasing the adhesive force between the gold and the PI.
The flexible circuit preparation step:
firstly, spin-coating photoresist on a silicon wafer plated with a metal film, and after the photoresist is uniformly spin-coated, drying the silicon wafer on a drying table at the drying temperature of about 110 ℃ for about 90 s;
after drying, carrying out photoetching, wherein the silicon wafer is placed at an exposure position of a photoetching machine, a mask plate is placed at a corresponding position, the silicon wafer is fixed after adjustment is finished, then an exposure source is moved right above the silicon wafer, exposure is carried out for about 8 to 9 seconds, and then the mask plate is taken out;
after photoetching is finished, developing the silicon wafer, wherein the silicon wafer is placed in a developing solution for developing for 40s, during the developing period, the silicon wafer is slightly shaken to ensure uniform developing, and after the developing is finished, the silicon wafer is washed by deionized water and dried;
then etching, wherein the silicon wafer is firstly put into a gold etching solution to remove gold by etching for 60s, then the silicon wafer is cleaned by deionized water and dried, and then the metal chromium is removed by etching in the same way, wherein the etching time is about 10 s;
and washing the silicon wafer with acetone to remove gold and chromium to remove the photoresist on the surface, washing with ethanol after complete removal, and drying.
A transfer printing step:
the flexible circuit on the silicon wafer was transferred to PDMS.
Piezoelectric device bonding step:
the piezoelectric ceramic plate prepared before is selected and is adhered to the target flexible substrate 2 with the flexible circuit by using conductive silver adhesive according to the corresponding position.
After the steps are completed, testing signals, and after the signals pass the testing, selecting the acoustic matching layer 3 matched with the skin for packaging, wherein the acoustic matching layer 3 and the target flexible substrate 2 are positioned on two opposite sides of the piezoelectric device 1.
It should be understood that the above embodiments are only exemplary and are not intended to limit the present invention. Various modifications and alterations of the above-described embodiments may be made by those skilled in the art in light of the teachings of the present invention without departing from the scope thereof.
Claims (10)
1. A flexible ultrasonic device for ultrasonic therapy, characterized in that it comprises an excitation circuit (4), a target flexible substrate (2), an acoustic matching layer (3) and a plurality of piezoelectric devices (1) having different natural frequencies;
the excitation circuit (4) is electrically connected with the piezoelectric devices (1) to enable the piezoelectric devices (1) to emit ultrasonic waves of different frequencies, the piezoelectric devices (1) are combined with the target flexible substrate (2), the target flexible substrate (2) is used for being attached to the surface of a human body, and the acoustic matching layer (3) is combined with the target flexible substrate (2) to encapsulate the piezoelectric devices (1).
2. The flexible ultrasonic device for ultrasonic treatment according to claim 1, wherein said plurality of piezoelectric devices (1) are divided into a plurality of groups, said piezoelectric devices (1) of the same group have the same natural frequency, said target flexible substrate (2) includes a plurality of treatment regions, said plurality of treatment regions bonding said piezoelectric devices (1) of said plurality of groups in one-to-one correspondence.
3. Flexible ultrasound device for ultrasound treatment according to claim 2, wherein the plurality of treatment zones are arranged side by side, the piezoelectric devices (1) within each treatment zone being arranged in an array.
4. A flexible ultrasound device for ultrasound treatment according to claim 2, wherein the treatment region is annular, the annular plurality of treatment regions being arranged concentrically.
5. Flexible ultrasound device for ultrasound treatment according to claim 2, characterized in that the piezoelectric devices (1) of the groups are connected in parallel to the excitation circuit (4).
6. Flexible ultrasound device for ultrasound treatment according to claim 1, characterized in that the excitation circuit (4) comprises a portable DC power supply and a resonance circuit, which is powered by the portable DC power supply and excites the piezoelectric device (1).
7. The flexible ultrasonic device for ultrasonic treatment according to claim 6, wherein said target flexible substrate (2) comprises a treatment region to which said plurality of piezoelectric devices (1) are bonded and an excitation region to which said excitation circuit (4) is bonded.
8. Flexible ultrasound device for ultrasound treatment according to claim 1, characterized in that the excitation circuit (4) comprises a voltage-adjustable direct current power supply.
9. Flexible ultrasound device for ultrasound treatment according to claim 1, wherein the excitation circuit (4) comprises a conditioning circuit which conditions the excitation frequency of the excitation circuit (4), the flexible ultrasound device comprising a switch which controls the conditioning circuit.
10. A method for manufacturing a flexible ultrasound device for ultrasound therapy according to any of claims 1 to 9, characterized by the steps of:
the preparation method comprises the following steps: sequentially combining a sacrificial layer, a high polymer film and a metal layer on a hard substrate;
the flexible circuit preparation step: preparing a flexible circuit by adopting a photoetching process, wherein the flexible circuit comprises the metal layer, the high polymer film and the sacrificial layer;
a transfer printing step: transferring the flexible circuit to the target flexible substrate (2);
piezoelectric device bonding step: bonding or soldering the piezoelectric device (1) to the target flexible substrate (2) and connecting the piezoelectric device (1) to the flexible circuit.
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| CN202010099120.7A CN111265788A (en) | 2020-02-18 | 2020-02-18 | Flexible ultrasonic device for ultrasonic therapy and preparation method thereof |
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Citations (9)
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| WO1999056829A1 (en) * | 1998-05-06 | 1999-11-11 | Exogen, Inc. | Ultrasound bandages |
| US20060241522A1 (en) * | 2003-06-18 | 2006-10-26 | Chandraratna Premindra A | Ultrasound devices and methods for treating ischemia and other cardiovascular disorders |
| WO2006134754A1 (en) * | 2005-06-13 | 2006-12-21 | Takayuki Saguchi | Ultrasonic wave radiator for treatment |
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| US20080045882A1 (en) * | 2004-08-26 | 2008-02-21 | Finsterwald P M | Biological Cell Acoustic Enhancement and Stimulation |
| US20120065479A1 (en) * | 2010-04-26 | 2012-03-15 | Lahiji Rosa R | Ultrasound patch |
| CN107920922A (en) * | 2015-07-16 | 2018-04-17 | 卡拉格股份公司 | Multi-functional treatment of wounds dressing |
| CN109589507A (en) * | 2018-12-13 | 2019-04-09 | 清华大学 | The flexible ultrasonic instrument of biomaterial surface reparation |
| CN110786845A (en) * | 2019-11-06 | 2020-02-14 | 清华大学 | Preparation method of self-adjusting binding force flexible electronic system |
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2020
- 2020-02-18 CN CN202010099120.7A patent/CN111265788A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999056829A1 (en) * | 1998-05-06 | 1999-11-11 | Exogen, Inc. | Ultrasound bandages |
| US20060241522A1 (en) * | 2003-06-18 | 2006-10-26 | Chandraratna Premindra A | Ultrasound devices and methods for treating ischemia and other cardiovascular disorders |
| US20080045882A1 (en) * | 2004-08-26 | 2008-02-21 | Finsterwald P M | Biological Cell Acoustic Enhancement and Stimulation |
| CN101102815A (en) * | 2004-10-11 | 2008-01-09 | 格莱亚皮肤有限公司 | Apparatus for treatment of dermatological conditions |
| WO2006134754A1 (en) * | 2005-06-13 | 2006-12-21 | Takayuki Saguchi | Ultrasonic wave radiator for treatment |
| US20120065479A1 (en) * | 2010-04-26 | 2012-03-15 | Lahiji Rosa R | Ultrasound patch |
| CN107920922A (en) * | 2015-07-16 | 2018-04-17 | 卡拉格股份公司 | Multi-functional treatment of wounds dressing |
| CN109589507A (en) * | 2018-12-13 | 2019-04-09 | 清华大学 | The flexible ultrasonic instrument of biomaterial surface reparation |
| CN110786845A (en) * | 2019-11-06 | 2020-02-14 | 清华大学 | Preparation method of self-adjusting binding force flexible electronic system |
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