CN111261664A - Pixel structure and fine metal mask plate group - Google Patents

Pixel structure and fine metal mask plate group Download PDF

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Publication number
CN111261664A
CN111261664A CN201811460115.3A CN201811460115A CN111261664A CN 111261664 A CN111261664 A CN 111261664A CN 201811460115 A CN201811460115 A CN 201811460115A CN 111261664 A CN111261664 A CN 111261664A
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China
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color light
rounded rectangle
emitting layer
color
light emitting
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徐倩
吴建鹏
段芳芳
嵇凤丽
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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Priority to CN201811460115.3A priority Critical patent/CN111261664A/en
Publication of CN111261664A publication Critical patent/CN111261664A/en
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30Devices specially adapted for multicolour light emission
    • H10K59/35Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
    • H10K59/352Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels the areas of the RGB subpixels being different
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12Organic material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30Devices specially adapted for multicolour light emission
    • H10K59/35Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
    • H10K59/353Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels characterised by the geometrical arrangement of the RGB subpixels
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/16Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/164Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/16Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

A pixel structure and a fine metal mask set. The pixel structure comprises at least one pixel group, wherein in each pixel group, gaps are formed among adjacent first color light-emitting layers, second color light-emitting layers and third color light-emitting layers, the shape of each first color light-emitting layer comprises a first rounded rectangle and first protruding portions which are located at the round corners of the first rounded rectangle and protrude towards the gaps, and at least part of each first protruding portion protrudes from the extension line of the first rounded rectangle close to the straight edge of the second color light-emitting layer. Therefore, the pixel structure can reduce or even avoid the risks of poor color mixing, color cast and the like, and improve the yield.

Description

Pixel structure and fine metal mask plate group
Technical Field
Embodiments of the present disclosure relate to a pixel structure and a fine metal mask plate group.
Background
With the continuous development of Display technology, Organic Light Emitting Diode (OLED) Display devices have become mainstream directions in Display fields due to advantages of self-luminescence, bright color, low power consumption, wide viewing angle, and the like, and have gradually become research hotspots of various manufacturers.
Currently, the mainstream manufacturing process of the oled display device is to use a Fine Metal Mask (FMM) to evaporate the light emitting layer of the pixel structure of the oled. For example, the organic light emitting diode display device may include three colors of sub-pixels, and the fabrication process of the organic light emitting diode display device may separately fabricate the three colors of sub-pixels using three fine metal mask plates.
Disclosure of Invention
The disclosed embodiments provide a pixel structure and a fine metal mask set. The pixel structure comprises at least one pixel group, and each pixel group comprises: the first color light emitting layer and the third color light emitting layer are arranged along a first direction, the two second color light emitting layers are arranged along a second direction, a connecting line of the centers of the two second color light emitting layers is intersected with a connecting line of the centers of the first color light emitting layer and the third color light emitting layer, in each pixel group, a gap is formed between the adjacent first color light emitting layer, the second color light emitting layer and the third color light emitting layer, the shape of the first color light emitting layer comprises a first round-corner rectangle and a first bulge part which is positioned at the round corner of the first round-corner rectangle and protrudes towards the gap, and at least part of the first bulge part protrudes out of the extension line of the first round-corner rectangle close to the straight edge of the second color light emitting layer. From this, first colour luminescent layer has the first bellying to the space is convex to on the one hand multiplicable utilization ratio to this space, on the other hand still can increase the fillet edge of first colour luminescent layer and the distance (Margin) of being convenient for of the fillet of the positive pole that corresponds, thereby can reduce or even avoid taking place bad risks such as colour mixture, colour cast, and improve the yield.
At least one embodiment of the present disclosure provides a pixel structure, including: at least one pixel group, each of the pixel groups comprising: the first color light-emitting layer and the third color light-emitting layer are arranged along the first direction, the two second color light-emitting layers are arranged along the second direction, a connecting line of centers of the two second color light-emitting layers is intersected with a connecting line of centers of the first color light-emitting layer and the third color light-emitting layer, in each pixel group, a gap is included between the adjacent first color light-emitting layer, the second color light-emitting layer and the third color light-emitting layer, the shape of the first color light-emitting layer includes a first rounded rectangle, and the first bulge part is positioned at the round corner of the first rounded rectangle and bulges towards the gap, and at least part of the first bulge part is protruded from the extension line of the first rounded rectangle close to the straight side of the second color light-emitting layer.
For example, in the pixel structure provided by an embodiment of the present disclosure, in each pixel group, the shape of the second color light emitting layer includes a second rounded rectangle, a rounded corner of the second rounded rectangle near the gap is a second protrusion, and a distance between two adjacent second protrusions of two second color light emitting layers ranges from 14 to 20 micrometers.
For example, in the pixel structure provided by an embodiment of the present disclosure, in each of the pixel groups, the shape of the third color light emitting layer includes a third rounded rectangle and a third protruding portion located at a rounded corner of the third rounded rectangle and protruding toward the gap, and the third protruding portion at least partially protrudes from an extension line of a straight side of the third rounded rectangle close to the second color light emitting layer.
For example, in the pixel structure provided by an embodiment of the present disclosure, the first protrusion is located in a first triangular region, one end of a first short side of the first triangular region is a midpoint of a connecting line of centers of the adjacent second color light emitting layers, and extends toward the gap along the second direction and has a length L1, one end of a second short side of the first triangular region is an end point of the first short side located in the gap, and the other end intersects with a straight side of the first rounded rectangle close to the second color light emitting layer, and has a length R1, where L1 is greater than 4 micrometers, and R1 is in a range of 5-15 micrometers.
For example, in the pixel structure provided by an embodiment of the present disclosure, a distance between an end point of the second short side on a straight side of the first rounded rectangle near the second color light-emitting layer and a midpoint of the first rounded rectangle near the straight side of the second color light-emitting layer is greater than 5 micrometers.
For example, in the pixel structure provided by an embodiment of the present disclosure, the third protrusion is located in the second triangular region, one end of a third short side of the second triangular region is a midpoint of a connecting line of centers of the adjacent second color light emitting layers, and extends toward the gap along the second direction and has a length L2, one end of a fourth short side of the second triangular region is an end point of the third short side located in the gap, and the other end intersects with a straight side of the third circular-angular rectangular shape close to the second color light emitting layer, and has a length R2, where L2 is greater than 4 micrometers, and R2 is in a range of 5-15 micrometers.
For example, in the pixel structure provided in an embodiment of the present disclosure, a distance between an end point of the third short side on the straight side of the third rectangular shape close to the second color light emitting layer and a midpoint of the straight side of the third rectangular shape close to the second color light emitting layer is greater than 5 micrometers.
For example, in the pixel structure provided in an embodiment of the present disclosure, each of the pixel groups further includes: one first color anode, two second color anodes, and one third color anode configured to drive one of the first color light emitting layers, two of the second color light emitting layers, and one of the third color light emitting layers to emit light, the shape of the first color anode comprises a fourth rounded rectangle, the shape of the second color anode comprises a fifth rounded rectangle, the shape of the third color anode comprises a sixth rounded rectangle, the shortest distance between the straight side of the fourth rounded rectangle and the straight side of the fifth rounded rectangle is P, the shortest distance between the straight side of the fifth rounded rectangle and the straight side of the sixth rounded rectangle is P, the center of the fourth rounded rectangle is approximately at the center of the first rounded rectangle, and the shortest distance between the straight side of the fourth rounded rectangle and the straight side of the first rounded rectangle is 1/2 × P.
For example, in the pixel structure provided by an embodiment of the present disclosure, the shape of the first color anode further includes a fourth protruding portion protruding toward the gap at a rounded corner of the fourth rounded rectangle, and the fourth protruding portion at least partially protrudes from an extension line of a straight side of the fourth rounded rectangle close to the second color light emitting layer.
For example, in the pixel structure provided in an embodiment of the present disclosure, each of the pixel groups further includes: one first color anode, two second color anodes, and one third color anode configured to drive one of the first color light emitting layers, two of the second color light emitting layers, and one of the third color light emitting layers, respectively, to emit light, the shape of the first color anode comprises a fourth rounded rectangle, the shape of the second color anode comprises a fifth rounded rectangle, the shape of the third color anode comprises a sixth rounded rectangle, the shortest distance between the straight side of the fourth rounded rectangle and the straight side of the fifth rounded rectangle is P, the shortest distance between the straight side of the fifth rounded rectangle and the straight side of the sixth rounded rectangle is P, the center of the fifth rounded rectangle is approximately located at the center of the second rounded rectangle, and the shortest distance between the straight side of the fifth rounded rectangle and the straight side of the second rounded rectangle is 1/2 × P.
For example, in the pixel structure provided in an embodiment of the present disclosure, each of the pixel groups further includes: one first color anode, two second color anodes, and one third color anode configured to drive one of the first color light emitting layers, two of the second color light emitting layers, and one of the third color light emitting layers, respectively, to emit light, the shape of the first color anode comprises a fourth rounded rectangle, the shape of the second color anode comprises a fifth rounded rectangle, the shape of the third color anode comprises a sixth rounded rectangle, the shortest distance between the straight side of the fourth rounded rectangle and the straight side of the fifth rounded rectangle is P, the shortest distance between the straight side of the fifth rounded rectangle and the straight side of the sixth rounded rectangle is P, the center of the sixth rounded rectangle is approximately at the center of the third rounded rectangle, and the shortest distance between the straight side of the sixth rounded rectangle and the straight side of the third rounded rectangle is 1/2 × P.
For example, in the pixel structure provided by an embodiment of the present disclosure, the third color anode further includes a fifth protruding portion protruding toward the gap at a rounded corner of the sixth rounded rectangle, and the fifth protruding portion at least partially protrudes from an extension line of a straight side of the sixth rounded rectangle close to the second color light-emitting layer.
For example, in a pixel structure provided in an embodiment of the present disclosure, the first direction and the second direction are perpendicular.
For example, in the pixel structure provided by an embodiment of the present disclosure, the shapes of the first color light-emitting layer, the second color light-emitting layer, and the third color light-emitting layer are all axisymmetric patterns.
At least one embodiment of the present disclosure also provides a fine metal mask plate group for evaporating the above pixel structure, including: and the first mask plate comprises a plurality of first openings, and each first opening is used for forming the first color light-emitting layer.
For example, in the fine metal mask plate group provided in an embodiment of the present disclosure, the shape of the first opening is substantially the same as the shape of the first color light emitting layer.
For example, in a fine metal mask plate group provided in an embodiment of the present disclosure, in each of the pixel groups, the shape of the second color light emitting layer includes a second rounded rectangle, a rounded corner of the second rounded rectangle near the gap is a second protrusion, and a distance D between two adjacent second protrusions of two second color light emitting layers is in a range of 14 to 20 micrometers, the fine metal mask plate group further includes: and the second mask plate comprises a plurality of second openings, and each second opening is used for forming the second color light-emitting layer.
For example, in the fine metal mask plate group provided in an embodiment of the present disclosure, the shape of the second opening is substantially the same as the shape of the second color light emitting layer. For example, in a fine metal mask plate group provided in an embodiment of the present disclosure, in each of the pixel groups, a shape of the third color light emitting layer includes a third rounded rectangle and a third protruding portion located at a rounded corner of the third rounded rectangle and protruding toward the gap, the third protruding portion protruding at least partially from an extension line of a straight side of the third rounded rectangle near the second color light emitting layer, and the fine metal mask plate group further includes: and the third mask plate comprises a plurality of third openings, and each third opening is used for forming the third color light-emitting layer.
For example, in the fine metal mask plate group provided in an embodiment of the present disclosure, the shape of the third opening is substantially the same as the shape of the third color light emitting layer.
Drawings
To more clearly illustrate the technical solutions of the embodiments of the present disclosure, the drawings of the embodiments will be briefly introduced below, and it is apparent that the drawings in the following description relate only to some embodiments of the present disclosure and are not limiting to the present disclosure.
FIG. 1 is a schematic plan view of a pixel structure;
FIG. 2 is a partial schematic view of a fine metal mask blank;
FIG. 3 is a partial schematic view of another fine metal mask;
FIG. 4 is a partial schematic view of another fine metal mask blank;
fig. 5 is a partial schematic view of a pixel structure according to an embodiment of the disclosure;
fig. 6 is a schematic arrangement diagram of a pixel structure according to an embodiment of the disclosure;
fig. 7 is a partial schematic view of another pixel structure provided in accordance with an embodiment of the present disclosure;
fig. 8 is a comparison diagram of a pixel structure and a general pixel structure provided according to an embodiment of the present disclosure;
fig. 9 is a partial schematic view of another pixel structure provided in accordance with an embodiment of the present disclosure;
fig. 10 is a partial schematic view of a first mask blank according to an embodiment of the disclosure;
fig. 11 is a partial schematic view of a second mask blank according to an embodiment of the disclosure;
fig. 12 is a partial schematic view of a third mask blank according to an embodiment of the disclosure;
fig. 13 is a comparison of a first opening on a first mask plate and a conventional opening on a mask plate according to an embodiment of the disclosure;
fig. 14 is a comparison of a second opening on a second mask plate and a conventional mask plate according to an embodiment of the disclosure; and
fig. 15 is a comparison between the third opening of the third mask plate and the opening of the conventional mask plate according to an embodiment of the disclosure.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present disclosure more apparent, the technical solutions of the embodiments of the present disclosure will be described clearly and completely with reference to the drawings of the embodiments of the present disclosure. It is to be understood that the described embodiments are only a few embodiments of the present disclosure, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the disclosure without any inventive step, are within the scope of protection of the disclosure.
Unless otherwise defined, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this disclosure belongs. The use of "first," "second," and similar terms in this disclosure is not intended to indicate any order, quantity, or importance, but rather is used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect.
Currently, in the process of vapor deposition (FMM) using a fine metal mask, the distance (Margin) between the FMM opening and the edge of the anode in each sub-pixel is a critical parameter for ensuring the yield of vapor deposition. However, since a typical FMM is affected by a manufacturing process, a distance between a rounded edge of an actual FMM opening and an edge of an anode cannot reach a theoretical design value, so that in one FMM group, openings of different FMMs, that is, gaps between adjacent light emitting layers of different colors are large and are not fully utilized, and risks of occurrence of poor color mixing, color misregistration and the like are increased. Thus, the inventors of the present application think that: through designing a neotype FMM and utilizing foretell space for the open-ended fillet edge of FMM who makes and the fillet edge's of positive pole distance (Margin) is great, compensates (increase size) above-mentioned open-ended fillet of FMM promptly, thereby reduces or even avoids foretell bad risks such as emergence colour mixture, colour cast, and improves the yield. The distance between the FMM aperture and the edge of the anode is a distance between an edge of an orthographic projection of the FMM aperture on the substrate on which the anode is mounted and the edge of the anode, and is not a distance in three-dimensional space.
Fig. 1 is a partial plan view of a pixel structure. FIG. 2 is a partial schematic view of a fine metal mask blank; FIG. 3 is a partial schematic view of another fine metal mask; fig. 4 is a partial schematic view of another fine metal mask. Fig. 1 shows three color sub-pixels, and as shown in fig. 1, the pixel structure includes a first color sub-pixel 10 including a first color light emitting layer 11 and a first color anode 18; a second color sub-pixel 20 including a second color light emitting layer 21 and a second color anode electrode 28; and a third color sub-pixel 30 including a third color light emitting layer 31 and a third color anode 38. The first color luminescent layer 11 can be formed by vapor deposition through the fine metal mask plate 70 shown in fig. 2, and the shape of the first color luminescent layer 11 is the same as the shape of the opening 71 on the fine metal mask plate 70 shown in fig. 2; the second color light emitting layer 21 can be formed by vapor deposition through a fine metal mask plate 80 as shown in fig. 3, and the shape of the second color light emitting layer 21 is the same as the shape of the opening 81 on the fine metal mask plate 80 as shown in fig. 3; the third color luminescent layer 31 may be formed by vapor deposition through a fine metal mask plate 90 as shown in fig. 4, and the shape of the third color luminescent layer 31 is the same as the shape of the opening 91 on the fine metal mask plate 90 as shown in fig. 4. As shown in fig. 1, the gaps (shown by the dashed line frames in fig. 1) between the adjacent first color light-emitting layer 11, second color light-emitting layer 21, and third color light-emitting layer 11 are large and are not fully utilized. In addition, fig. 1 also shows the positional relationship of the anode and the light-emitting layer in each sub-pixel, and as shown in fig. 1, the center of the first color anode 18 is disposed at the center of the first color light-emitting layer 11, the center of the second color anode 28 is disposed at the center of the second color light-emitting layer 21, and the center of the third color anode 38 is disposed at the center of the third color light-emitting layer 31. At this time, due to reasons such as an FMM manufacturing process, in one FMM group, the openings of different FMMs, that is, gaps between the first color light-emitting layer 11, the second color light-emitting layer 21, and the third color light-emitting layer 31 are large and are not fully utilized, so that the distance (Margin) between the rounded edge of the actually formed light-emitting layer and the edge of the corresponding anode is reduced, and the risk of occurrence of poor color mixing, color misregistration, and the like at the positions of the rounded edges of the first color light-emitting layer 11, the second color light-emitting layer 21, and the third color light-emitting layer 31 is increased. Thus, the inventors of the present application think that: the light emitting layer of each sub-pixel is manufactured by designing a novel FMM opening, the gaps among the adjacent first color light emitting layer 11, the second color light emitting layer 21 and the third color light emitting layer 11 are fully utilized, and the distances (Margin) between the fillet edges of the first color light emitting layer 11, the second color light emitting layer 21 and the third color light emitting layer 11 and the corresponding fillet edges of the first color anode 18, the second color anode 28 and the third color anode 38 are increased, so that the risks of color mixing, color cast and other defects are reduced or even avoided, and the yield is improved.
The disclosed embodiments provide a pixel structure and a fine metal mask set. The pixel structure comprises at least one pixel group, and each pixel group comprises: the first color light emitting layer and the third color light emitting layer are arranged along a first direction, the two second color light emitting layers are arranged along a second direction, a connecting line of centers of the two second color light emitting layers is intersected with a connecting line of centers of the first color light emitting layer and the third color light emitting layer, in each pixel group, the adjacent first color light emitting layers are connected with the third color light emitting layer, gaps are formed among the adjacent first color light emitting layers, the second color light emitting layers and the third color light emitting layers, the shape of each first color light emitting layer comprises a first rounded rectangle and a first bulge part, the first bulge part is located at a round corner of the first rounded rectangle and protrudes towards the gaps, and at least part of the first bulge part protrudes out of the first rounded rectangle and is close to an extension line of a straight edge of the second color light emitting layer. From this, first colour luminescent layer has the first bellying to the space is convex to on the one hand multiplicable utilization ratio to this space, on the other hand still can increase the fillet edge of first colour luminescent layer and the distance (Margin) of being convenient for of the fillet of the positive pole that corresponds, thereby can reduce or even avoid taking place bad risks such as colour mixture, colour cast, and improve the yield.
Hereinafter, a pixel structure and a fine metal mask provided in the embodiments of the present disclosure will be described in detail with reference to the drawings.
At least one embodiment of the present disclosure provides a pixel structure. Fig. 5 is a partial schematic view of a pixel structure according to an embodiment of the disclosure. As shown in fig. 5, the pixel structure includes at least one pixel group 100, each pixel group 100 includes one first color light emitting layer 111, two second color light emitting layers 121, and one third color light emitting layer 131; the first color light emitting layer 111 and the third color light emitting layer 131 are arranged in a first direction, the two second color light emitting layers 121 are arranged in a second direction, and a line connecting centers (geometric centers) of the two second color light emitting layers 121 intersects with a line connecting centers (geometric centers) of the first color light emitting layer 111 and the third color light emitting layer 131, for example, perpendicular to each other.
In each pixel group 100, the adjacent first color light-emitting layers 111 are connected with the third color light-emitting layer 131, and a gap 140 is formed among the adjacent first color light-emitting layers 111, second color light-emitting layers 121 and third color light-emitting layers 131; as shown in fig. 2, in the pixel group 100, two voids 140 are formed between one first color light-emitting layer 111, two second color light-emitting layers 121, and one third color light-emitting layer 131; the first color light emitting layer 111 comprises a first rounded rectangle 112 and a first protrusion 114 which is positioned at a rounded corner of the first rounded rectangle 112 and protrudes towards the gap 140, and the first protrusion 114 at least partially protrudes from an extension line of a straight side 113 of the first rounded rectangle 112 close to the second color light emitting layer 121. The rounded rectangle is a pattern formed by rounding the four corners of a rectangle.
In the pixel structure provided by the embodiment of the disclosure, in each pixel group, because the shape of the first color light emitting layer includes the first protruding portion which is located at the round corner of the first rounded rectangle and protrudes toward the gap, and at least part of the first protruding portion protrudes from the extension line of the first rounded rectangle near the straight side of the second color light emitting layer, compared with a common pixel structure, the first protruding portion of the first color light emitting layer occupies a part of the area of the gap, or reduces the area of the gap, so that on one hand, the utilization rate of the gap can be increased, on the other hand, the distance (Margin) between the rounded edge of the first color light emitting layer and the corresponding rounded edge of the anode can be increased, thereby reducing or even avoiding the risk of color mixing, color cast and the like, and improving the yield.
For example, as shown in fig. 5, the adjacent first color light emitting layers 121 are contiguous to the third color light emitting layer 131. Of course, the embodiments of the present disclosure include, but are not limited to, and in consideration of the manufacturing level of the evaporation process, the adjacent first color light emitting layers 121 and the third color light emitting layers 131 may also be disposed at an interval or overlapped.
For example, as shown in fig. 5, the first color light emitting layer 111 may be a red light emitting layer, the second color light emitting layer 121 may be a green light emitting layer, and the third color light emitting layer 131 may be a blue light emitting layer.
For example, as shown in fig. 5, since the lifetime of the blue light-emitting layer 131 is short, the area of the blue light-emitting layer 131 can be set large, for example, larger than the areas of the red light-emitting layer 111 and the green light-emitting layer 121.
For example, in some examples, as shown in fig. 5, in each pixel group 100, the second color light emitting layer 121 includes a second rounded rectangle 122, and rounded corners of the second rounded rectangle 122 near the voids 140 are the second protrusions 114. The shortest distance of the two second convex portions 114 of the two second color light emitting layers 121 ranges from 14 to 20 micrometers, that is, the distance D between the adjacent two second convex portions 114 of the two second color light emitting layers 121 ranges from 14 to 20 micrometers. In this case, compared with a normal pixel structure, the second protrusion of the second color light emitting layer occupies a part of the area of the gap, or the area of the gap is reduced, so that on one hand, the utilization rate of the gap is further increased, and on the other hand, the distance (Margin) between the rounded edge of the second color light emitting layer and the corresponding rounded edge of the anode is further increased, so that the risk of occurrence of poor color mixing, color cast and the like can be further reduced or even avoided, and the yield can be improved. Different from the first protruding portion, the second protruding portion does not protrude from an extension line of a straight side of the second rounded rectangle.
For example, the distance D between two adjacent second protrusions 114 of two second color light emitting layers 121 ranges from 13 to 17 micrometers in consideration of the level of the existing FMM manufacturing process.
For example, the distance D between adjacent two second protrusions 114 of two second color light emitting layers 121 is 15 micrometers.
For example, in some examples, as shown in fig. 5, in each pixel group 100, the third color light emitting layer 131 includes a third rounded rectangle 132 and a third protrusion 134 protruding from a rounded corner of the third rounded rectangle 132 toward the gap 140, and the third protrusion 134 protrudes at least partially from an extension line of the third rounded rectangle 132 close to the straight side 133 of the second color light emitting layer 121. Similar with first bellying, the third bellying is at least partly salient in the third fillet rectangle extension line that is close to the straight flange of second colour luminescent layer, for normal pixel structure, the third bellying of third colour luminescent layer has occupied a part area in space, or has reduced the area in space, thereby on the one hand further increases the utilization ratio to this space, on the other hand still further increases the fillet edge of third colour luminescent layer and the distance (Margin) of the fillet edge of the positive pole that corresponds, thereby can reduce or even avoid taking place bad risks such as colour mixture, colour cast, and improve the yield.
For example, in some examples, as shown in fig. 5, the shapes of the first color light-emitting layer 111, the second color light-emitting layer 121, and the third color light-emitting layer 131 are all axisymmetric patterns. That is, although the above description has been made only for the shapes of the corner of the first color light-emitting layer 111 near the void 140, the corner of the second color light-emitting layer 121 near the void 140, and the corner of the third color light-emitting layer 131 near the void 140, the other corners of the first color light-emitting layer 111 have the same shape as the corner of the first color light-emitting layer 111 near the void 140, the other corners of the second color light-emitting layer 121 have the same shape as the corner of the second color light-emitting layer 121 near the void 140, and the other corners of the third color light-emitting layer 131 have the same shape as the corner of the third color light-emitting layer 131 near the void 140.
For example, in some examples, as shown in fig. 5, each pixel group 100 further includes one first color anode 118, two second color anodes 128, and one third color anode 138, respectively configured to emit light by the above-described one first color light emitting layer 111, two second color light emitting layers 121, and one third color light emitting layer 131. For example, the first color anode 118, two second color anodes 128, and one third color anode 138 are disposed on one first color light emitting layer 111, two second color light emitting layers 121, and one third color light emitting layer 131, respectively. In other words, one anode is correspondingly arranged on each light-emitting layer; the first color light emitting layer 111 and the first color anode 118 and other necessary layer structures (e.g., cathode, hole transport layer, hole injection layer, electron transport layer, electron injection layer) may constitute the first color sub-pixel 111, for example, the first color anode 118 and the cathode disposed at both sides of the first color light emitting layer 111 may drive the first color light emitting layer 111 to emit light by current. The second color light emitting layer 121 and the second color anode 128 and other necessary layer structures (e.g., cathode, hole transport layer, hole injection layer, electron transport layer, electron injection layer) may constitute the second color sub-pixel 120, for example, the second color anode 128 and the cathode disposed at both sides of the second color light emitting layer 121 may drive the second color light emitting layer 121 to emit light by current. The third color light emitting layer 131 and the first color anode 138 and other necessary layer structures (e.g., cathode, hole transport layer, hole injection layer, electron transport layer, electron injection layer) may constitute the third color sub-pixel 130, for example, the third color anode 138 and the cathode disposed at both sides of the third color light emitting layer 131 may drive the third color light emitting layer 131 to emit light by current. . The first color anode 118 may be shaped as a fourth rounded rectangle 119, the second color anode 128 may be shaped as a fifth rounded rectangle 129, the sixth color anode 138 may be shaped as a sixth rounded rectangle 139, the shortest distance between a straight side of the fourth rounded rectangle 119 and a straight side of the fifth rounded rectangle 129 is P, the shortest distance between a straight side of the fifth rounded rectangle 129 and a straight side of the sixth rounded rectangle 139 is P, that is: the distance (PDL gap) in the straight edge direction of the anodes of the adjacent different sub-pixels is P. At this time, the center of the fourth rounded rectangle 119 is substantially located at the center of the first rounded rectangle 112, for example, at the center region of the first rounded rectangle 112, and the shortest distance between the straight side of the fourth rounded rectangle 119 and the straight side of the first rounded rectangle 112 is 1/2 × P. That is, the first rounded rectangle 112 is a rounded rectangle formed by the outward expansion 1/2 of the fourth rounded rectangle 119. Note that in each sub-pixel, in order to clearly express the positional and dimensional relationship between the light-emitting layer and the anode, the anode in fig. 5 is provided on the light-emitting layer. However, the up-down positional relationship of the light emitting layer and the anode may be reversed, and the embodiments of the present disclosure are not limited herein; that is, the vertical position relationship between the light-emitting layer and the anode can be set according to the actual situation.
For example, in some examples, as shown in fig. 5, the center of the fifth rounded rectangle 129 is located approximately at the center of the second rounded rectangle 122, e.g., at the center region of the second rounded rectangle 112, and the shortest distance between the straight side of the fifth rounded rectangle 129 and the straight side of the second rounded rectangle 122 is 1/2 × P. That is, the second rounded rectangle 122 is a rounded rectangle formed by the outward expansion 1/2 × P of the fifth rounded rectangle 129.
For example, in some examples, as shown in fig. 5, the center of the sixth rounded rectangle 139 is located approximately at the center of the third rounded rectangle 132, e.g., in a central region of the third rounded rectangle 112, and the shortest distance between the straight side of the sixth rounded rectangle 139 and the straight side of the third rounded rectangle 132 is 1/2 × P. That is, the third rounded rectangle 132 is a rounded rectangle formed by the sixth rounded rectangle 139 flaring 1/2 × P.
Fig. 6 is a schematic arrangement diagram of a pixel structure according to an embodiment of the disclosure. As shown in fig. 6, each pixel group 100 is a repeating unit, and the pixel structure may include a plurality of pixel groups 100 arranged in two directions having an angle of 45 degrees with respect to the first direction. The four subpixels in each pixel group 100 form two pixels, one of the two second-color subpixels 120 (e.g., green subpixels) forms one pixel with one first-color subpixel 110 (e.g., red subpixel), the other of the two second-color subpixels 120 forms one pixel with one third-color subpixel 130 (e.g., blue subpixel), and the first-color subpixel 110 and the third subpixel 130 are respectively shared by the two pixels.
For example, in some examples, as shown in fig. 6, a plurality of first color sub-pixels 110, a plurality of second color sub-pixels 120, and a plurality of third color sub-pixels 130 may also be arranged as a plurality of first repeating units 101 and a plurality of second repeating units 102, each first repeating unit 101 including one first color sub-pixel 110 (e.g., a red sub-pixel) and one second color sub-pixel 120 (e.g., a green sub-pixel), and each second repeating unit 102 including one third color sub-pixel 130 (e.g., a blue sub-pixel) and one second color sub-pixel 120 (a green sub-pixel). The plurality of first repeating units 101 and the plurality of second repeating units 102 are alternately arranged in the first direction and the second direction. The plurality of first color sub-pixels 110 and the plurality of third color sub-pixels 130 are alternately arranged along the first direction and the second direction, the plurality of second color sub-pixels 120 are arrayed along the first direction and the second direction, and every four second color sub-pixels 120 surround one first color sub-pixel 110 or one third color sub-pixel 130.
Fig. 7 is a partial schematic view of another pixel structure provided in accordance with an embodiment of the present disclosure. As shown in fig. 7, the first protrusion 114 is located in the first triangular region 151, one end of a first short side 1511 of the first triangular region 151 is a midpoint of a connecting line of centers of the adjacent second color luminescent layers 121 and extends toward the gap 140 along the second direction and has a length L1, one end of a second short side 1512 of the first triangular region 151 is an end point of the first short side 1511 located in the gap 140, and the other end intersects with a straight side 113 of the first rounded rectangle 112 close to the second color luminescent layer 121 and has a length R1. That is, one end of the second short side 1512 is the end point of the first short side 1511 located in the gap 140, the other end is the intersection point of the circle with the first short side 1511 located in the gap 140 as the center, and R1 is the radius and the straight side 113 of the first rounded rectangle 112 close to the second color emitting layer 121. The L1 is greater than 4 microns, and the R1 is in the range of 5-15 microns. At this moment, the first protruding part has a better compensation effect on the round angle of the first color light-emitting layer close to the gap, and the existing FMM manufacturing process can be considered at the same time.
For example, R1 can be in the range of 8-12 microns, for example, R1 can be 10 microns, which has better compensation effect.
For example, in some examples, the distance of the end of the second short side 1512 on the straight side 113 of the first rounded rectangle 112 proximate to the second color light-emitting layer 121 to the midpoint of the first rounded rectangle 112 proximate to the straight side 113 of the second color light-emitting layer 121 is greater than 5 microns.
For example, as shown in fig. 7, the third protrusion 134 is located in the second triangular region 152, one end of a third short side 1523 of the second triangular region 152 is a midpoint of a connecting line of centers of the adjacent second color light-emitting layers 121 and extends to the gap 140 along the second direction and has a length L2, one end of a fourth short side 1524 of the second triangular region 152 is an end point of the third short side 1523 located in the gap 140, and the other end intersects with the straight side 133 of the third rectangular circle 132 close to the second color light-emitting layer 121 and has a length R2. That is, one end of the fourth short side 1524 is an end point of the third short side 1523 located in the gap 140, the other end is an intersection point of a circle with a radius R2 and the third angular rectangle 132 close to the straight side 133 of the second color light-emitting layer 121, where the circle is centered at the end point of the third short side 1523 located in the gap 140. The L2 is larger than 4 microns, and the R2 is in the range of 5-15 microns. At this time, the third protruding portion has a better compensation effect on the rounded corner of the third color light-emitting layer close to the gap, and the existing FMM manufacturing process can be considered at the same time. For example, when producing an FMM for depositing a third color light emitting layer, a combination of the second triangular region and the third rounded rectangle may be produced as an FMM opening design. For example, as shown in fig. 7, L1 may be equal to L2 and R1 may be equal to R2.
For example, R2 can be in the range of 8-12 microns, for example, R2 can be 10 microns, which has better compensation effect. For example, in some examples, as shown in fig. 7, the distance of the end of the third short side 1523 on the third rounded rectangle 132 near the straight side 133 of the second color light-emitting layer 121 from the midpoint of the third rounded rectangle 132 near the straight side 133 of the second color light-emitting layer 121 is greater than 5 microns.
It is to be noted that, the above embodiments respectively provide improvements for the first color light emitting layer, the second color light emitting layer and the third color light emitting layer, and when the improvements provided for the first color light emitting layer, the second color light emitting layer and the third color light emitting layer exist at the same time, the pixel structure provided by the embodiments of the disclosure has a higher utilization rate for the void, and can greatly reduce the probability of occurrence of undesirable risks such as color mixing and color shift, and improve the yield. Of course, the embodiments of the present disclosure include but are not limited thereto, and may also be modified only for one or two of the first color light emitting layer, the second color light emitting layer, and the third color light emitting layer.
Fig. 8 is a comparison diagram of a pixel structure and a general pixel structure according to an embodiment of the disclosure. The solid line in fig. 8 is a rounded edge of each light emitting layer in the pixel structure provided by the embodiment of the present disclosure, and the dotted line in fig. 8 is a rounded edge of each light emitting layer in a general pixel structure. In the case of ensuring that the anode size and the distance (PDL gap) in the straight-side direction of the anodes of the adjacent different sub-pixels are the same, as shown in fig. 8, the pixel structure provided by the embodiment of the present disclosure can significantly increase the distance (Margin) between the rounded edge of the first color light emitting layer 111 and the rounded edge of the first color anode 118, the distance (Margin) between the rounded edge of the second color light emitting layer 121 and the rounded edge of the second color anode 128, and the distance (Margin) between the rounded edge of the third color light emitting layer 131 and the rounded edge of the third color anode 138. For example, the increase in the distance (Margin) is 1 to 2 μm, which is a significant effect in comparison with a general manufacturing process, and can significantly reduce the probability of occurrence of defects such as color mixing and color shift, and improve the yield. Of course, the increment of the above distance (Margin) is closely related to parameters related to the sub-pixels, such as the pixel size, PDL gap, and the aperture area ratio of each sub-pixel. When the pixel size and the opening area proportion of each sub-pixel are not changed, the size of PDL gap does not influence the Margin increment; when the aperture area ratio and PDL gap of each sub-pixel are not changed, the larger the pixel size is, the larger the values of the parameters D, R1, L1, R2, L2, etc. can be in the value range, and the more obvious the compensation effect is. Of course, when the pixel size reaches a certain value, the compensation effect will not increase with the increase of the pixel size.
It is worth noting that, the pixel structure provided by this embodiment may also not increase the distance (Margin) between the rounded edge of the first color light emitting layer and the rounded edge of the corresponding first color anode, but correspondingly increase the size of the rounded corner of the first color anode corresponding to the first color light emitting layer for the first protrusion, thereby increasing the aperture ratio of the first color anode corresponding to the first color light emitting layer, and thus improving the product life. Similarly, the pixel structure provided by this embodiment may also increase the size of the rounded corner of the second color anode or the third color anode correspondingly for the second protruding portion or the third protruding portion without increasing the distance (Margin) between the rounded corner of the second color emitting layer or the third color emitting layer and the rounded corner of the corresponding second color anode or the third color anode, so as to increase the aperture ratio of the second color anode or the third color anode, thereby improving the product life. For example, fig. 9 is a schematic plan view of another pixel structure provided according to an embodiment of the present disclosure. As shown in fig. 9, the size of the rounded corner of the first color anode 118 is correspondingly increased for the first protruding portion 114, for example, extending toward the first protruding portion 114, so that the aperture ratio of the first color anode 118 is increased, and thus the product life can be improved. Likewise, as shown in fig. 9, the size of the rounded corners of the second color anode 128 or the third color anode 138 may be increased for the second protruding portion 124 or the third protruding portion 134, so as to increase the aperture ratio of the second color anode 128 or the third color anode 138, thereby improving the product life.
For example, in some examples, as shown in fig. 9, the shape of the first color anode 118 further includes a fourth protrusion 1185 protruding toward the gap 140 and located at a rounded corner of the fourth rounded rectangle 119, and the fourth protrusion 1185 at least partially protrudes from an extension line of the fourth rounded rectangle 119 close to a straight side of the second color light-emitting layer 121, so that the aperture ratio of the first color anode 118 can be increased, and the product life can be prolonged.
For example, in some examples, as shown in fig. 9, the third color anode 138 further includes a fifth protrusion 1385 protruding toward the gap 140 at a rounded corner of the sixth rounded rectangle 139, and the fifth protrusion 1385 at least partially protrudes from the sixth rounded rectangle 139 near an extension of a straight side of the second color light-emitting layer 121, so that the aperture ratio of the first color anode 118 can be increased, and the product life can be prolonged. The embodiment of the disclosure also provides a fine metal mask plate group for evaporating the pixel structure provided by the embodiment. The fine metal mask plate group includes a first mask plate 310, fig. 10 is a partial schematic view of a first mask plate provided according to an embodiment of the disclosure, and as shown in fig. 10, the first mask plate 310 includes a plurality of first openings 312, and each first opening 312 is used for forming a first color light emitting layer 111. For example, the shape 312 of the first opening is substantially the same as the shape of the first color light-emitting layer 111. That is, the first opening 312 may also include the first rounded rectangle and the first protrusion, which is at least partially protruded from the extension line of the straight side of the first rounded rectangle.
For example, in some examples, the fine metal mask plate group includes a second mask plate 320, fig. 11 is a partial schematic view of a second mask plate provided according to an embodiment of the present disclosure, as shown in fig. 11, the second mask plate 320 includes a plurality of second openings 322, and each second opening 322 is used for forming the second color light emitting layer 121. For example, the shape 322 of the second opening is substantially the same as the shape of the second color light emitting layer 121. . That is, the second opening 322 may also be the second rounded rectangle in the above-described embodiment.
For example, in some examples, the fine metal mask plate group includes a third mask plate 330, fig. 12 is a partial schematic view of a third mask plate provided according to an embodiment of the disclosure, as shown in fig. 12, the third mask plate 330 includes a plurality of third openings 332, each third opening 332 is used for forming a third color light emitting layer 131, for example, the shape 332 of the third opening is substantially the same as the shape of the third color light emitting layer 131. That is, the third opening 332 may also include the third rounded rectangle and the third protrusion, which is at least partially protruded from the extension line of the straight side of the third rounded rectangle.
For example, in some examples, the fine metal mask group includes a first mask plate 310, a second mask plate 320, and a third mask plate 330 that are used in combination such that a first color light emitting layer formed by evaporation using the first mask plate and a third color light emitting layer formed by evaporation using the third mask plate are arranged in a first direction, two second color light emitting layers formed by evaporation using the second mask plate are arranged in a second direction, and a line connecting the two second color light emitting layers intersects a line connecting the first color light emitting layer and the third color light emitting layer, thereby forming one pixel group.
Fig. 13 is a comparison between a first opening on a first mask and a general mask according to an embodiment of the disclosure. Solid lines in fig. 13 are rounded edges of the first opening on the first mask blank provided by the embodiment of the present disclosure, and broken lines in fig. 13 are rounded edges of the opening on the general mask blank. As shown in fig. 13, the distance (Margin) between the vertex of the rounded edge of the first opening 312 and the corresponding anode is 10.34 micrometers, while the distance between the rounded edge of the typical opening and the corresponding anode is 9.33 micrometers. In addition, as shown in fig. 13, the maximum distance between the rounded edge of the first opening 312 and the rounded edge of a typical opening is 1.51 μm.
Fig. 14 is a comparison between the second opening of the second mask plate and the opening of the conventional mask plate according to an embodiment of the disclosure. Solid lines in fig. 14 are rounded edges of the second opening in the second mask blank provided by the embodiment of the disclosure, and broken lines in fig. 14 are rounded edges of the opening in the general mask blank. As shown in fig. 14, the distance between the vertex of the rounded edge of the second opening 322 and the corresponding anode is 9.82 micrometers, while the distance between the rounded edge of a typical opening and the corresponding anode is 8.5 micrometers.
Fig. 15 is a comparison between the third opening on the first mask plate and the opening on the general mask plate according to an embodiment of the disclosure. Solid lines in fig. 15 are rounded edges of the third opening in the third mask blank provided by the embodiment of the present disclosure, and broken lines in fig. 15 are rounded edges of the opening in the general mask blank. As shown in fig. 15, the distance between the vertex of the rounded edge of the third opening 332 and the corresponding anode is 10.34 micrometers, while the distance between the rounded edge of a typical opening and the corresponding anode is 9.33 micrometers. In addition, the maximum distance between the rounded edge of the third opening 332 and the rounded edge of a typical opening is 1.50 μm.
An embodiment of the present disclosure further provides a display device including the pixel structure, where the display device is an Organic Light-Emitting Diode (OLED) display device, and the display device may be applied to any product or component with a display function, such as a television, a digital camera, a mobile phone, a watch, a tablet computer, a notebook computer, and a navigator, and the embodiment is not limited thereto.
The following points need to be explained:
(1) in the drawings of the embodiments of the present disclosure, only the structures related to the embodiments of the present disclosure are referred to, and other structures may refer to general designs.
(2) Features of the disclosure in the same embodiment and in different embodiments may be combined with each other without conflict.
The above is only a specific embodiment of the present disclosure, but the scope of the present disclosure is not limited thereto, and any person skilled in the art can easily conceive of changes or substitutions within the technical scope of the present disclosure, and shall be covered by the scope of the present disclosure. Therefore, the protection scope of the present disclosure shall be subject to the protection scope of the claims.

Claims (20)

1. A pixel structure, comprising:
at least one pixel group, each of the pixel groups comprising: the first color light-emitting layer and the third color light-emitting layer are arranged along the first direction, the two second color light-emitting layers are arranged along the second direction, a connecting line of centers of the two second color light-emitting layers is intersected with a connecting line of centers of the first color light-emitting layer and the third color light-emitting layer,
in each pixel group, a gap is formed among the adjacent first color light-emitting layer, the second color light-emitting layer and the third color light-emitting layer, the shape of the first color light-emitting layer comprises a first rounded rectangle and a first bulge part which is positioned at the round corner of the first rounded rectangle and protrudes towards the gap, and at least part of the first bulge part protrudes from the extension line of the first rounded rectangle close to the straight edge of the second color light-emitting layer.
2. The pixel structure according to claim 1, wherein in each of the pixel groups, the shape of the second color light emitting layer includes a second rounded rectangle, rounded corners of the second rounded rectangle near the gap are second protrusions, and a distance between two adjacent second protrusions of the two second color light emitting layers ranges from 14 to 20 micrometers.
3. The pixel structure of claim 1, wherein in each of the pixel groups, the shape of the third color light emitting layer includes a third rounded rectangle, and a third protrusion protruding toward the gap at a rounded corner of the third rounded rectangle, the third protrusion protruding at least partially from an extension of the third rounded rectangle near a straight side of the second color light emitting layer.
4. A pixel structure according to any one of claims 1-3, wherein the first protrusion is located in a first triangular region, a first short side of the first triangular region has one end being a midpoint of a line connecting centers of adjacent second color light emitting layers and extends toward the void along the second direction and has a length L1, a second short side of the first triangular region has one end being an end point of the first short side located at the void and the other end intersecting a straight side of the first rounded rectangle near the second color light emitting layer and has a length R1, wherein L1 is greater than 4 micrometers and R1 is in a range of 5-15 micrometers.
5. The pixel structure of claim 4, wherein an end point of the second short side on a straight side of the first rounded rectangle near the second color light emitting layer is more than 5 microns from a midpoint of the first rounded rectangle near the straight side of the second color light emitting layer.
6. The pixel structure of claim 3, wherein the third protrusion is located in a second triangular region, a third short side of the second triangular region has one end being a midpoint of a line connecting centers of adjacent second color light emitting layers and extends toward the gap along the second direction and has a length L2, a fourth short side of the second triangular region has one end being an end point of the third short side located in the gap and the other end intersecting a straight side of the third rectangular near second color light emitting layer and has a length R2, wherein L2 is greater than 4 micrometers and R2 is in a range of 5-15 micrometers.
7. The pixel structure of claim 6, wherein an end point of the third short side on a straight side of the third rounded rectangle near the second color light emitting layer is more than 5 microns from a midpoint of the third rounded rectangle near the straight side of the second color light emitting layer.
8. A pixel structure according to any one of claims 1-3, wherein each of said pixel groups further comprises: a first color anode, two second color anodes, and a third color anode configured to drive one of the first color light emitting layers, two of the second color light emitting layers, and one of the third color light emitting layers, respectively, to emit light,
the shape of the first color anode comprises a fourth rounded rectangle, the shape of the second color anode comprises a fifth rounded rectangle, the shape of the third color anode comprises a sixth rounded rectangle, the shortest distance between the straight edge of the fourth rounded rectangle and the straight edge of the fifth rounded rectangle is P, the shortest distance between the straight edge of the fifth rounded rectangle and the straight edge of the sixth rounded rectangle is P, the center of the fourth rounded rectangle is approximately located at the center of the first rounded rectangle, and the shortest distance between the straight edge of the fourth rounded rectangle and the straight edge of the first rounded rectangle is 1/2P.
9. The pixel structure of claim 8, wherein the first color anode further comprises a fourth protrusion protruding from the gap at a rounded corner of the fourth rounded rectangle, the fourth protrusion at least partially protruding from an extension of a straight side of the fourth rounded rectangle near the second color light emitting layer.
10. The pixel structure of claim 2, wherein each of said pixel groups further comprises: one first color anode, two second color anodes, and one third color anode configured to drive one of the first color light emitting layers, two of the second color light emitting layers, and one of the third color light emitting layers, respectively, to emit light,
the shape of the first color anode comprises a fourth rounded rectangle, the shape of the second color anode comprises a fifth rounded rectangle, the shape of the third color anode comprises a sixth rounded rectangle, the shortest distance between the straight edge of the fourth rounded rectangle and the straight edge of the fifth rounded rectangle is P, the shortest distance between the straight edge of the fifth rounded rectangle and the straight edge of the sixth rounded rectangle is P, the center of the fifth rounded rectangle is located at the center of the second rounded rectangle, and the shortest distance between the straight edge of the fifth rounded rectangle and the straight edge of the second rounded rectangle is 1/2-P.
11. The pixel structure of claim 3, wherein each of said pixel groups further comprises: one first color anode, two second color anodes, and one third color anode configured to drive one of the first color light emitting layers, two of the second color light emitting layers, and one of the third color light emitting layers, respectively, to emit light,
the shape of the first color anode comprises a fourth rounded rectangle, the shape of the second color anode comprises a fifth rounded rectangle, the shape of the third color anode comprises a sixth rounded rectangle, the shortest distance between the straight edge of the fourth rounded rectangle and the straight edge of the fifth rounded rectangle is P, the shortest distance between the straight edge of the fifth rounded rectangle and the straight edge of the sixth rounded rectangle is P, the center of the sixth rounded rectangle is approximately located at the center of the third rounded rectangle, and the shortest distance between the straight edge of the sixth rounded rectangle and the straight edge of the third rounded rectangle is 1/2P.
12. The pixel structure of claim 11, wherein the third color anode further comprises a fifth protrusion protruding from the gap at a rounded corner of the sixth rounded rectangle, the fifth protrusion at least partially protruding from the sixth rounded rectangle in extension of a straight side of the second color light-emitting layer.
13. A pixel structure according to any one of claims 1-3, wherein the first and second directions are perpendicular.
14. The pixel structure according to any one of claims 1-3, wherein the first color light emitting layer, the second color light emitting layer, and the third color light emitting layer are each in an axisymmetric pattern in shape.
15. A fine metal mask plate set for evaporation of the pixel structure of claim 1, comprising:
and the first mask plate comprises a plurality of first openings, and each first opening is used for forming the first color light-emitting layer.
16. The set of fine metal mask plates of claim 15, wherein the shape of the first opening is substantially the same as the shape of the first color light emitting layer.
17. The fine metal mask plate group of claim 15, wherein in each of the pixel groups, the shape of the second color light emitting layer includes a second rounded rectangle, rounded corners of the second rounded rectangle near the voids are second protrusions, and a distance between adjacent two of the second protrusions of two of the second color light emitting layers ranges from D14 to 20 micrometers, the fine metal mask plate group further comprising:
and the second mask plate comprises a plurality of second openings, and each second opening is used for forming the second color light-emitting layer.
18. The set of fine metal mask plates of claim 17, wherein the shape of the second opening is substantially the same as the shape of the second color light emitting layer.
19. The set of fine metal mask plates according to any one of claims 15 to 18, wherein in each of the pixel groups, the shape of the third color light emitting layer includes a third rounded rectangle, and a third convex portion that is located at a rounded corner of the third rounded rectangle and is convex toward the void, the third convex portion being at least partially convex from an extension of a straight side of the third rounded rectangle that is close to the second color light emitting layer, the set of fine metal mask plates further comprising:
and the third mask plate comprises a plurality of third openings, and each third opening is used for forming the third color light-emitting layer.
20. The set of fine metal mask plates of claim 19, wherein the shape of the third opening is substantially the same as the shape of the third color light emitting layer.
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CN111739988A (en) * 2020-06-29 2020-10-02 山东大学 Vertical-structure broadband near-infrared LED and preparation method thereof
CN113549871A (en) * 2021-07-21 2021-10-26 合肥维信诺科技有限公司 Mask compensation method and evaporation system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111739988A (en) * 2020-06-29 2020-10-02 山东大学 Vertical-structure broadband near-infrared LED and preparation method thereof
CN113549871A (en) * 2021-07-21 2021-10-26 合肥维信诺科技有限公司 Mask compensation method and evaporation system

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