CN111247472A - 一种多级mems光开关单元和光交叉装置 - Google Patents

一种多级mems光开关单元和光交叉装置 Download PDF

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CN111247472A
CN111247472A CN201780096047.4A CN201780096047A CN111247472A CN 111247472 A CN111247472 A CN 111247472A CN 201780096047 A CN201780096047 A CN 201780096047A CN 111247472 A CN111247472 A CN 111247472A
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micro
mirror
electrodes
stage
array
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CN111247472B (zh
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闫云飞
赵晗
冯志勇
邹冰
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Huawei Technologies Co Ltd
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Huawei Technologies Co Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

一种多级MEMS光开关单元和光交叉装置。在多级MEMS光开关单元中，微反射镜通过悬臂梁与基底建立有可活动连接；悬臂梁，用于在N个电极都未产生作用力时使得微反射镜保持初始状态；在N个电极中的至少一个电极产生作用力时使得微反射镜处于目标偏转状态；当作用力为零时，使微反射镜恢复初始状态；微反射镜和基底之间形成有腔体空间，N个电极和M个阻挡器都设置在腔体空间内，N个电极和M个阻挡器固定在基底；N个电极中的至少一个电极，用于产生作用力，控制微反射镜进入偏转状态；微反射镜，用于在N个电极中的至少一个电极的作用力下进入偏转状态；M个阻挡器中的至少一个阻挡器，用于阻挡微反射镜，使得微反射镜停止到目标偏转状态。

Description

PCT国内申请，说明书已公开。

Claims (14)

  1. PCT国内申请，权利要求书已公开。
CN201780096047.4A 2017-10-30 2017-10-30 一种多级mems光开关单元和光交叉装置 Active CN111247472B (zh)

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CN110954142B (zh) * 2019-12-10 2021-12-28 京东方科技集团股份有限公司 一种光学微电机传感器、基板及电子设备

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012226157A (ja) * 2011-04-20 2012-11-15 Sumitomo Precision Prod Co Ltd ミラーデバイス及びその製造方法
CN103926689A (zh) * 2013-01-10 2014-07-16 中芯国际集成电路制造(上海)有限公司 Mems反射系统阵列、mems反射系统及其制作方法
CN104620155A (zh) * 2013-08-22 2015-05-13 华为技术有限公司 一种波长选择开关
CN105223657A (zh) * 2014-05-27 2016-01-06 华为技术有限公司 光开关和波分复用光系统
US20170123161A1 (en) * 2014-03-31 2017-05-04 Lumentum Operations Llc Cross-connect switch using 1d arrays of beam steering elements

Family Cites Families (5)

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Publication number Priority date Publication date Assignee Title
JP2012215691A (ja) * 2011-03-31 2012-11-08 Furukawa Electric Co Ltd:The Ｍｅｍｓ素子、光スイッチ装置およびディスプレイ装置、ならびにｍｅｍｓ素子の製造方法
JP2013205799A (ja) * 2012-03-29 2013-10-07 Furukawa Electric Co Ltd:The Ｍｅｍｓ素子、光スイッチ、波長選択光スイッチ、波長ブロッカー、およびビームステアリング方法
CN203941342U (zh) * 2014-05-05 2014-11-12 深圳市盛喜路科技有限公司 一种mems光开关
CN105068190B (zh) * 2015-08-31 2018-06-01 北京航天控制仪器研究所 一种mems光开关
CN105137592B (zh) * 2015-10-13 2018-03-27 京东方科技集团股份有限公司 Mems开关装置及其制造方法、驱动方法、显示装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012226157A (ja) * 2011-04-20 2012-11-15 Sumitomo Precision Prod Co Ltd ミラーデバイス及びその製造方法
CN103926689A (zh) * 2013-01-10 2014-07-16 中芯国际集成电路制造(上海)有限公司 Mems反射系统阵列、mems反射系统及其制作方法
CN104620155A (zh) * 2013-08-22 2015-05-13 华为技术有限公司 一种波长选择开关
US20170123161A1 (en) * 2014-03-31 2017-05-04 Lumentum Operations Llc Cross-connect switch using 1d arrays of beam steering elements
CN105223657A (zh) * 2014-05-27 2016-01-06 华为技术有限公司 光开关和波分复用光系统

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CN111247472B (zh) 2022-02-25
WO2019084710A1 (zh) 2019-05-09

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