CN111238671A - High-precision flexible temperature sensor protected by inert gas and preparation method thereof - Google Patents
High-precision flexible temperature sensor protected by inert gas and preparation method thereof Download PDFInfo
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- CN111238671A CN111238671A CN202010066647.XA CN202010066647A CN111238671A CN 111238671 A CN111238671 A CN 111238671A CN 202010066647 A CN202010066647 A CN 202010066647A CN 111238671 A CN111238671 A CN 111238671A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/08—Protective devices, e.g. casings
- G01K1/12—Protective devices, e.g. casings for preventing damage due to heat overloading
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Abstract
The invention relates to a high-precision flexible temperature sensor protected by inert gas and a preparation method thereof, wherein the flexible temperature sensor can isolate the interference of the external environment under the protection of ultra-low thermal conductivity media such as argon, krypton or xenon, even under the condition of high or low temperature of sudden change of the external environment, the developed flexible temperature sensor can still accurately measure the temperature of the surface of an object, and due to the flexible and bendable characteristics, the flexible temperature sensor can be conformally attached to the surface layer of skin to be used as a wearable device to accurately measure the temperature change.
Description
Technical Field
The invention particularly relates to the technical field of sensors, and particularly relates to a high-precision flexible temperature sensor protected by inert gas and a preparation method thereof.
Background
Temperature sensors have extremely wide applications in industry and life, such as diagnosing human body temperature, measuring heating of electronic devices, and the like. In recent years, flexible temperature sensors have been studied due to their wearable characteristics and the ability to measure the surface temperature of curved objects in real time. However, the temperature sensor based on the flexible sheet is susceptible to external environment interference when measuring the surface temperature of a human body or an object, resulting in a decrease in measurement accuracy. The super-cooling and super-heating of the external environment causes the measured temperature to be lower or higher than the actual object or human epidermis temperature.
In order to solve the problems, people utilize a thermal barrier layer with an air cavity to protect flexible temperature sensing so as to shield the interference of the external environment. Because the air has relatively low thermal conductivity (0.026 Wm-1K-1), the heat transfer process between the temperature sensor and the external environment can be inhibited to a certain extent, and the measurement accuracy is improved. However, experiments have shown that using a 1.5 mm thick air chamber as the thermal insulation layer, the measured temperature of the surface layer of the object still differs from the actual temperature value by 0.2 ℃ under the influence of ice cubes.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides a high-precision flexible temperature sensor protected by inert gas, which comprises a polyimide film base layer, the polyimide film base layer is provided with a polydimethylsiloxane thermal insulation layer which is provided with a concave cavity, the polyimide film base layer is tightly attached to the polydimethylsiloxane heat insulation layer, an inert gas cavity is formed between the concave cavity and the polyimide film base layer, the inert gas cavity is filled with inert gas, a temperature sensor is arranged in the inert gas cavity, silver paste is printed and prepared on the polyimide film base layer to serve as an electrode, the temperature sensor is printed on the electrode on the polyimide film base layer, the temperature sensor is also covered with a parylene film for protecting the temperature sensor.
The inert gas is one of argon, krypton or xenon.
The depth of the concave cavity is 2 mm.
The thickness of the polyimide film base layer is 40 mu m.
A method for preparing a high-precision flexible temperature sensor protected by inert gas comprises the following steps:
(1) taking a flexible polyimide film as a called bottom, printing and preparing silver paste on the called bottom by utilizing a screen printing method to serve as an electrode, and baking the called bottom in a baking oven at 90 ℃ for 1 hour;
(2) uniformly mixing 3:1 poly (3, 4-ethylenedioxythiophene) -polystyrene sulfonic acid (PEDOT/PSS) and a carbon nanotube solution, printing the mixture on the silver electrode prepared in the step (1) by using a mask plate, and baking the silver electrode in a 70 ℃ baking oven for 1 hour to form a stable flexible temperature sensor;
(3) depositing a parylene film on the prepared flexible temperature sensor by using a meteorological deposition method to protect the sensor;
(4) pouring Polydimethylsiloxane (PDMS) colloid into a 3D printing mold, curing in a 90 ℃ oven for 2 hours, and stripping the cured Polydimethylsiloxane (PDMS) colloid from the mold to obtain a polydimethylsiloxane heat insulation layer structure with a concave cavity;
(5) and (3) tightly combining the prepared polydimethylsiloxane heat insulation layer structure with the concave cavity and the prepared flexible temperature sensor in an inert gas environment, and finally obtaining the flexible temperature sensor protected by inert gas.
The invention has the beneficial effects that: the invention provides a high-precision flexible temperature sensor protected by inert gas and a preparation method thereof, the flexible temperature sensor can isolate the interference of the external environment under the protection of ultra-low heat conductivity medium argon, krypton or xenon, even under the condition of higher or lower temperature of sudden change of the external environment, the developed flexible temperature sensor can still accurately measure the temperature of the surface of an object, and due to the flexible bendable characteristic, the flexible temperature sensor can be conformally attached to the surface layer of the skin to be used as a wearable device to accurately measure the temperature change.
Drawings
FIG. 1 shows a thermal insulation layer of polydimethylsiloxane with a recessed cavity.
FIG. 2 is a schematic diagram of a high accuracy flexible temperature sensor design protected by inert gas.
Fig. 3 is a flexible wearable temperature sensor of the bendable type.
FIG. 4 illustrates the internal heat transfer pattern of different thermal insulation layers based on finite element analysis. Wherein T2 and T1 represent the temperature of the bottom layer (in direct contact with the surface of the object to be measured) and the top layer (temperature sensor layer) of the polyimide film, respectively.
Fig. 5 shows the temperature difference between the bottom layer (T2) and the top layer (T1) of the polyimide film under protection of different thermal insulation layers by finite element calculation.
Detailed Description
For a better understanding of the nature of the invention, the invention will now be further described with reference to figures 1,2 and 3,
a high-precision flexible temperature sensor protected by inert gas comprises a polyimide film base layer, wherein a polydimethylsiloxane heat insulation layer is arranged on the polyimide film base layer, a concave cavity is formed in the polydimethylsiloxane heat insulation layer, the polyimide film base layer is tightly attached to the polydimethylsiloxane heat insulation layer, an inert gas cavity is formed between the concave cavity and the polyimide film base layer, and the inert gas cavity is filled with inert gas which is one of argon, krypton or xenon. Inert gas intracavity be equipped with temperature sensor, polyimide film basic unit on the printing preparation have silver thick liquid as the electrode, temperature sensor print on the electrode on polyimide film basic unit, temperature sensor on still cover and be used for protecting temperature sensor's parylene film.
The depth of the concave cavity is 2 mm.
The thickness of the polyimide film base layer is 40 mu m.
The preparation method comprises the following steps:
1) this patent uses flexible polyimide film as the title end, utilizes the screen printing method to print preparation silver thick liquid on it as the electrode, places and toasts 1 hour in 90 ℃ oven.
2) Uniformly mixing poly (3, 4-ethylenedioxythiophene) -polystyrene sulfonic acid (PEDOT/PSS) and a carbon nanotube solution in a ratio of 3:1, printing the mixture on the silver electrode prepared in the step 1) by using a mask plate, and baking the silver electrode in a 70 ℃ oven for 1 hour to form a stable temperature sensor.
3) Protecting sensor by depositing parylene film on the temperature sensor by vapor deposition
4) Pouring Polydimethylsiloxane (PDMS) colloid into a mold for 3D printing, curing in an oven at 90 ℃ for 2 hours, and peeling the cured Polydimethylsiloxane (PDMS) colloid from the mold to obtain a polydimethylsiloxane thermal insulation layer with a concave cavity, as shown in fig. 1.
5) Tightly combining the polydimethylsiloxane thermal insulation layer with the concave cavity prepared in the step 4) with the flexible temperature sensor prepared in the steps 1,2 and 3, and completing the operation in a glove box with inert gas to finally obtain the flexible temperature sensor protected by the inert gas, wherein the operation is as shown in fig. 2. The bending property ensures that the temperature change of the surface layer of the skin or the surface of a curved object can be measured.
The working principle of the temperature sensor is as follows:
according to the electron hopping mechanism, the resistance change of the temperature sensor at different temperatures is obtained by the expression (1):
where R is a resistance value of the temperature sensor at a certain temperature, R0 is an initial resistance of the temperature sensor, k is a boltzmann constant, Ea is an activation energy, and T is a temperature value to be measured.
Protection mechanism of thermal insulation layer:
when different temperature differences are generated above and below the thermal insulation layer, heat can be transmitted from a high-temperature area to a low-temperature area according to steady-state heat conduction, and the Fourier law is followed, and the formula (2) can be obtained:
where q is the heat flux, k is the thermal conductivity, and T is the temperature gradient.
When a cold source is applied to the temperature sensor protected by the thermal insulation layer, for constant heat flux, when the effective thermal conductivity of the thermal insulation layer is lower, a larger temperature gradient is generated between the cold source and the temperature sensor layer, so that the temperature difference between the sensor layer and the surface of the object to be detected is reduced, and the detection accuracy is greatly improved. As shown in fig. 4, the thermal insulation of polydimethylsiloxane with xenon cavities significantly inhibited the transfer of heat more than the thermal insulation of polydimethylsiloxane without xenon cavities. Fig. 5 shows that even if a cooling source with a temperature of 0 c is applied on the top of the thermal insulation layer, the temperature difference generated on both sides of the polyimide film is only 0.1 c for the thermal insulation layer of polydimethylsiloxane having a xenon cavity, which is nearly 1.4 c for the thermal insulation layer of polydimethylsiloxane not having a xenon cavity. This shows that the polydimethylsiloxane thermal insulation layer with the xenon cavity serves as a thermal barrier layer of the flexible temperature sensor, greatly improving the detection accuracy.
This patent utilizes lower heat conductivity medium inert gas chamber to protect temperature sensor in order to further improve flexible temperature sensor measurement accuracy. Because inert gases such as argon (with the thermal conductivity coefficient of 0.0169 Wm-1K-1), krypton (with the thermal conductivity coefficient of 0.0087 Wm-1K-1) and xenon (with the thermal conductivity coefficient of 0.005 Wm-1K-1) have lower thermal conductivity than air, the heat transfer process between the sensor layer and the external environment can be effectively inhibited, and the detection accuracy is greatly improved. Based on the flexible characteristic of the flexible temperature sensor, the flexible temperature sensor can be conformally and tightly attached to the surface of the skin and used as wearable equipment to accurately measure the temperature change of the surface layer of the skin, so that the aim of health diagnosis is fulfilled.
The skilled person should understand that: although the invention has been described in terms of the above specific embodiments, the inventive concept is not limited thereto and any modification applying the inventive concept is intended to be included within the scope of the patent claims.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments, and all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention. It should be noted that modifications and embellishments within the scope of the invention may occur to those skilled in the art without departing from the principle of the invention, and are considered to be within the scope of the invention.
Claims (5)
1. The utility model provides a flexible temperature sensor of high accuracy of inert gas protection, its characterized in that, includes polyimide film basic unit, polyimide film basic unit on be equipped with polydimethylsiloxane thermal insulation layer, polydimethylsiloxane thermal insulation layer on have sunken cavity, polyimide film basic unit and polydimethylsiloxane thermal insulation layer closely laminate, sunken cavity and polyimide film basic unit between form the inert gas chamber, the inert gas intracavity fill have inert gas, the inert gas intracavity be equipped with temperature sensor, polyimide film basic unit on the printing preparation have silver thick liquid as the electrode, temperature sensor print on the electrode on polyimide film basic unit, temperature sensor on still cover and be used for protecting temperature sensor's poly-p-xylene film.
2. An inert gas protected high accuracy flexible temperature sensor according to claim 1, wherein said inert gas is one of argon, krypton or xenon.
3. An inert gas protected high accuracy flexible temperature sensor according to claim 1, wherein said recessed cavity has a depth of 2 mm.
4. An inert gas protected high accuracy flexible temperature sensor according to claim 1, wherein said polyimide film substrate has a thickness of 40 μm.
5. A method of making an inert gas protected high accuracy flexible temperature sensor according to claim 1, comprising the steps of:
(1) taking a flexible polyimide film as a called bottom, printing and preparing silver paste on the called bottom by utilizing a screen printing method to serve as an electrode, and baking the called bottom in a baking oven at 90 ℃ for 1 hour;
(2) uniformly mixing 3:1 poly (3, 4-ethylenedioxythiophene) -polystyrene sulfonic acid (PEDOT/PSS) and a carbon nanotube solution, printing the mixture on the silver electrode prepared in the step (1) by using a mask plate, and baking the silver electrode in a 70 ℃ baking oven for 1 hour to form a stable flexible temperature sensor;
(3) depositing a parylene film on the prepared flexible temperature sensor by using a meteorological deposition method to protect the sensor;
(4) pouring Polydimethylsiloxane (PDMS) colloid into a 3D printing mold, curing in a 90 ℃ oven for 2 hours, and stripping the cured Polydimethylsiloxane (PDMS) colloid from the mold to obtain a polydimethylsiloxane heat insulation layer structure with a concave cavity;
(5) and (3) tightly combining the prepared polydimethylsiloxane heat insulation layer structure with the concave cavity and the prepared flexible temperature sensor in an inert gas environment, and finally obtaining the flexible temperature sensor protected by inert gas.
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| Application Number | Priority Date | Filing Date | Title |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114152359A (en) * | 2020-09-08 | 2022-03-08 | 哈尔滨理工大学 | Flexible temperature sensor and preparation method thereof |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06258149A (en) * | 1991-07-04 | 1994-09-16 | Ulvac Japan Ltd | Thin-film thermocouple element |
| CN105444912A (en) * | 2015-11-05 | 2016-03-30 | 纳米及先进材料研发院有限公司 | Temperature sensor used for tracking body temperatures based on printable nanometer material thermal resistor |
| CN205568925U (en) * | 2015-12-10 | 2016-09-14 | 德阳市人民医院 | Adhesion formula body temperature measuring device's thermal -insulated structure |
| CN205748683U (en) * | 2016-01-26 | 2016-11-30 | 江苏润仪仪表有限公司 | A kind of temperature sensor |
| CN108344524A (en) * | 2017-01-24 | 2018-07-31 | 维瓦灵克有限公司 | A kind of wearable patch being used for measuring temperature and electric signal |
| CN207703344U (en) * | 2017-11-21 | 2018-08-07 | 宜昌宜控科技有限公司 | A kind of Anti-seismic fast temperature sensor |
| CN108801489A (en) * | 2018-06-22 | 2018-11-13 | 苏州大学 | temperature sensor and preparation method thereof |
-
2020
- 2020-01-20 CN CN202010066647.XA patent/CN111238671A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06258149A (en) * | 1991-07-04 | 1994-09-16 | Ulvac Japan Ltd | Thin-film thermocouple element |
| CN105444912A (en) * | 2015-11-05 | 2016-03-30 | 纳米及先进材料研发院有限公司 | Temperature sensor used for tracking body temperatures based on printable nanometer material thermal resistor |
| CN205568925U (en) * | 2015-12-10 | 2016-09-14 | 德阳市人民医院 | Adhesion formula body temperature measuring device's thermal -insulated structure |
| CN205748683U (en) * | 2016-01-26 | 2016-11-30 | 江苏润仪仪表有限公司 | A kind of temperature sensor |
| CN108344524A (en) * | 2017-01-24 | 2018-07-31 | 维瓦灵克有限公司 | A kind of wearable patch being used for measuring temperature and electric signal |
| CN207703344U (en) * | 2017-11-21 | 2018-08-07 | 宜昌宜控科技有限公司 | A kind of Anti-seismic fast temperature sensor |
| CN108801489A (en) * | 2018-06-22 | 2018-11-13 | 苏州大学 | temperature sensor and preparation method thereof |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114152359A (en) * | 2020-09-08 | 2022-03-08 | 哈尔滨理工大学 | Flexible temperature sensor and preparation method thereof |
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Application publication date: 20200605 |