CN111238643A - Fourier transform spectrometer - Google Patents

Fourier transform spectrometer Download PDF

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Publication number
CN111238643A
CN111238643A CN201811435011.7A CN201811435011A CN111238643A CN 111238643 A CN111238643 A CN 111238643A CN 201811435011 A CN201811435011 A CN 201811435011A CN 111238643 A CN111238643 A CN 111238643A
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China
Prior art keywords
semi
transparent
reflective membrane
light
reflector
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Pending
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CN201811435011.7A
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Chinese (zh)
Inventor
吴砺
贺坤
孙正国
陈卫民
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Fuzhou Photop Optics Co ltd
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Fuzhou Photop Optics Co ltd
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Priority to CN201811435011.7A priority Critical patent/CN111238643A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/45Interferometric spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106General arrangement of respective parts
    • G01N2021/0112Apparatus in one mechanical, optical or electronic block

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

The invention discloses a Fourier transform spectrometer, which realizes the scanning of the spectrometer from a single machine to the order of magnitude of millimeter to centimeter by utilizing the characteristic that an optical pyramid has a certain acceptance angle and moves in an arc and a quasi-straight line and driving the optical pyramid by a motor and a rotating rod, and reduces the size occupation of the structure on the basis of reducing the size occupation of the structure so that the spectrometer can keep a small volume state.

Description

Fourier transform spectrometer
Technical Field
The invention relates to the field of optical devices, in particular to a Fourier transform spectrometer.
Background
Most of existing Fourier transform spectrometers are complex in structure, and especially in a structure for realizing Michael interference, a reflector in one wall needs to be subjected to distance control so that the reflector can move at a constant speed to form a scanning element, so that interference light intensity spectrums can be scanned, and spectrum information can be obtained. One half of the methods of PZT control, relay control and the like are difficult to realize constant-speed long-distance scanning, and in addition, the scanning adjustment difficulty of the accuracy of the method from single-stage several millimeters to centimeter magnitude is large.
Disclosure of Invention
In view of the above-mentioned problems in the prior art, it is an object of the present invention to provide a fourier transform spectrometer with simple structure, easy implementation and simple adjustment.
This patent adopts micro motor to drive single or a set of folding light path pyramid with the rotor arm pole, utilizes one section pyramid of light rotor arm approximate linear motion characteristics as Fourier transform spectrometer scanning element constitution simple and easy Fourier transform spectrometer.
In order to achieve the technical purpose, the invention adopts the technical scheme that:
a Fourier transform spectrometer comprises a motor, a rotating rod, two pairs of optical pyramids, a first PD detector, a first reflector, a first semi-transparent semi-reflective membrane, a second PD detector, a second reflector, a second semi-transparent semi-reflective membrane and a laser, wherein the first semi-transparent semi-reflective membrane and the second semi-transparent semi-reflective membrane are arranged at 45 degrees relative to incident light and are arranged vertically to each other;
the first PD detector is arranged on the opposite side of the first semi-transparent semi-reflective membrane far away from the connecting rod, the first reflector is arranged on one of the other two sides of the first semi-transparent semi-reflective membrane, the other side of the other two sides of the first semi-transparent semi-reflective membrane is used for inputting light to be detected, when the light to be detected enters the first semi-transparent semi-reflective membrane, 50% of the light penetrates the first semi-transparent semi-reflective membrane and is reflected back by the original path, the light is reflected at 45 degrees at the first semi-transparent semi-reflective membrane, the other 50% of the light is reflected to the opposite optical pyramid angle, the light is reflected back to the first semi-transparent semi-reflective membrane by the optical pyramid and passes through the first semi-reflective membrane, and the two paths of signal light to be detected which are divided by the first semi-transparent semi-reflective membrane realize interference and are transmitted into the first PD detector and detect the light intensity signal of;
the first PD detector, the first semi-transparent semi-reflective membrane, the optical pyramid opposite to the first semi-transparent semi-reflective membrane, the first reflector and the like form a first Michael interference structure, the pyramid is driven to move through the rotation of the motor, the scanning function is realized, and further the Fourier spectrum measurement of the light to be measured is realized.
The second PD detector is arranged on the opposite side of the second semi-transparent semi-reflective membrane far away from the connecting rod, the second reflector and the laser are arranged on the other opposite sides of the second semi-transparent semi-reflective membrane, when light emitted by the laser enters the second semi-transparent semi-reflective membrane, the light is divided into 50% of two strands by the second semi-transparent semi-reflective membrane, one strand of the two strands is reflected by the second semi-transparent semi-reflective membrane to enter an optical pyramid opposite to the second semi-transparent semi-reflective membrane in sequence and is reflected back to the second semi-transparent semi-reflective membrane by the optical pyramid and is transmitted through the second semi-transparent semi-reflective membrane to be received by the second PD detector, the other strand of the two strands passes through the second semi-transparent semi-reflective membrane and is reflected back to the second semi-transparent semi-reflective membrane by the second reflector and is reflected to the second PD detector by the second semi-transparent semi-reflective;
the second PD detector, the second semitransparent film, the optical pyramid corresponding to the second semitransparent film, the second reflector and the like form a second Michael interference structure, and the pyramid is driven to move through the rotation of the motor to realize a scanning function. The laser is a single-frequency or double-frequency laser, and due to the characteristics of a single-frequency or double-frequency Michael interference structure, the moving distance of the corresponding second pyramid can be obtained by analyzing the interference signal received by the real-time PD signal. And since the first pyramid and the second pyramid are in the same position at the end point of the motor drive rod, they move the same distance. Therefore, the single-frequency or double-frequency second Michael interference structure is used for calibrating the moving distance of the pyramid, and further realizing the Fourier scanning measurement analysis of the first Michael interference structure on the light to be measured.
The distance length from the center of the motor connecting rod to the pyramid is R, the rotation radius of the motor is R, when the rotation angle theta is small enough, the movement direction of the pyramid moves approximately linearly along the direction perpendicular to the connecting rod, the movement distance L = R theta, the motor rotates at a constant speed, and when the pyramid reaches the position close to the vertical position of the single-frequency or double-frequency reference light and the light to be detected, the first and second Michael interference structures can detect interference signals within a period of time and a period of distance. As described above, the scan test of the light to be measured is realized, and the fourier transform spectrum is obtained.
Furthermore, the first reflector and the second reflector are all total reflectors.
Further, the laser is a single-frequency laser or a double-frequency laser.
Further, the optical pyramid is a 45-degree right-angle optical pyramid.
By adopting the technical scheme, the invention has the beneficial effects that: the invention realizes the scanning of the spectrometer from a single machine to the order of magnitude of millimeter to centimeter by utilizing the characteristic that the optical pyramid has a certain acceptance angle and moves in an arc and a quasi-straight line and driving the optical pyramid by utilizing the motor and the rotating rod, and reduces the size occupation of the structure on the basis of the scanning, so that the spectrometer can keep a small-volume state.
Drawings
The invention will be further elucidated with reference to the drawings and the detailed description:
FIG. 1 is a schematic structural diagram of a schematic implementation of the scheme of the invention;
fig. 2 is a schematic diagram of a schematic trace of the rotation rod driving the optical pyramid to move.
Detailed Description
As shown in fig. 1 or 2, the present invention includes a motor 1, a rotating rod 2, two pairs of optical pyramids 3, a first PD detector 6, a first reflector 5, a first transflective membrane 4, a second PD detector 9, a second reflector 10, a second transflective membrane 8, and a laser 7, wherein the first transflective membrane 4 and the second transflective membrane 8 are disposed at 45 degrees with respect to incident light, one end of the rotating rod 2 is disposed between the first transflective membrane 4 and the second transflective membrane 8, the center of the rotating rod 2 is connected to a rotating shaft of the motor 1 and the rotating rod 2 is driven by the motor 1 to rotate, and the two pairs of optical pyramids 3 are respectively fixed at two ends of the rotating rod 2 and are respectively used for being opposite to the first transflective membrane 4 and the second transflective membrane 8, so as to reflect incident light and return to its original path;
the first PD detector 6 is arranged on the opposite side of the first semi-transparent and semi-reflective membrane 4 far away from the connecting rod 2, the first reflector 5 is arranged on one of the other two sides of the first semi-transparent and semi-reflective membrane 4, the other side of the other two sides of the first semi-transparent and semi-reflective membrane 4 is used for inputting light to be detected, when the light to be detected is incident into the first semi-transparent and semi-reflective membrane 4, 50% of the light is incident into the first reflector 5 and reflected back by an original circuit after being transmitted into the first semi-transparent and semi-reflective membrane 4, the light is reflected at 45 degrees at the first semi-transparent and semi-reflective membrane 4, the other 50% of the light is reflected onto the optical pyramid 3 opposite to the first semi-transparent and semi-reflective membrane 4 and passes through the first semi-transparent and semi-reflective membrane 4, and two paths of signal light to be detected divided by the first semi-transparent and semi-reflective membrane 4 realize interference incidence into the first PD detector 6 and;
the first PD detector 6, the first semi-transparent semi-reflective membrane 4, the optical pyramid 3 opposite to the first semi-transparent semi-reflective membrane 4, the first reflector 5 and the like form a first Michael interference structure, the optical pyramid 3 is driven to move through the rotation of the motor 1, the scanning function is realized, and then the Fourier spectrum measurement of light to be measured is realized.
The second PD detector is arranged on the opposite side of the second semi-transparent semi-reflective membrane far away from the connecting rod, the second reflector and the laser are arranged on the other opposite sides of the second semi-transparent semi-reflective membrane, when light emitted by the laser enters the second semi-transparent semi-reflective membrane, the light is divided into 50% of two strands by the second semi-transparent semi-reflective membrane, one strand of the two strands is reflected by the second semi-transparent semi-reflective membrane to enter an optical pyramid opposite to the second semi-transparent semi-reflective membrane in sequence and is reflected back to the second semi-transparent semi-reflective membrane by the optical pyramid and is transmitted through the second semi-transparent semi-reflective membrane to be received by the second PD detector, the other strand of the two strands passes through the second semi-transparent semi-reflective membrane and is reflected back to the second semi-transparent semi-reflective membrane by the second reflector and is reflected to the second PD detector by the second semi-transparent semi-reflective;
the second PD detector 9, the second transflective film 8, the optical pyramid 3 corresponding to the second transflective film 8, the second reflector 10, etc. form a second michael interference structure, and the optical pyramid 3 is driven to move by the rotation of the motor 1, thereby realizing the scanning function. The laser is a single-frequency or double-frequency laser, and due to the characteristics of a single-frequency or double-frequency Michael interference structure, the moving distance of the corresponding optical pyramid can be obtained by analyzing the interference signal received by the real-time PD signal. And since the two pairs of optical pyramids are at the same position at the end points of the motor driver rod, the distance they move is the same. Therefore, the single-frequency or double-frequency second Michael interference structure is used for calibrating the moving distance of the pyramid, and further realizing the Fourier scanning measurement analysis of the first Michael interference structure on the light to be measured.
Wherein, the distance length from the center of the connecting rod of the motor 1 to the pyramid is R, and the rotating radius of the motor 1 is R, when the rotating angle theta is small enough, the moving direction of the pyramid is approximately linear motion along the direction perpendicular to the connecting rod, and the moving distance L = R theta, the motor rotates at a uniform speed, when the pyramid reaches the position near the vertical position of the single-frequency or double-frequency reference light and the light to be detected, the first and second Michael interference structures can detect the interference signal within a period of time and a period of distance. As described above, the scan test of the light to be measured is realized, and the fourier transform spectrum is obtained.
Wherein, the first reflector 5 and the second reflector 10 are all total reflectors; the laser 7 is a single-frequency laser or a double-frequency laser; the optical pyramid 3 is a 45-degree right-angle optical pyramid 3.
By adopting the technical scheme, the optical pyramid 3 has the characteristics of a certain acceptance angle, circular arc and quasi-linear motion, and the motor 1 and the rotating rod 2 are used for driving the optical pyramid to move, so that the scanning of the spectrometer from a single machine to the order of magnitude of millimeter to centimeter is realized, and on the basis, the size occupation of the structure is reduced, so that the spectrometer can keep a small-volume state.
The foregoing is directed to embodiments of the present invention, and equivalents, modifications, substitutions and variations such as will occur to those skilled in the art, which fall within the scope and spirit of the appended claims.

Claims (4)

1. A fourier transform spectrometer, comprising: the laser detector comprises a motor, a rotating rod, two pairs of optical pyramids, a first PD detector, a first reflector, a first semi-transparent semi-reflective membrane, a second PD detector, a second reflector, a second semi-transparent semi-reflective membrane and a laser, wherein the first semi-transparent semi-reflective membrane and the second semi-transparent semi-reflective membrane are arranged in parallel at 45 degrees, one end of the rotating rod is arranged between the first semi-transparent semi-reflective membrane and the second semi-transparent semi-reflective membrane, the center of the rotating rod is connected with a rotating shaft of the motor and is driven by the motor to rotate, and the two pairs of optical pyramids are respectively fixed at two ends of the rotating rod and are respectively used for being opposite to the first semi-transparent semi-reflective membrane and the second semi-transparent semi-;
the first PD detector is arranged on the opposite side of the first semi-transparent semi-reflective membrane far away from the connecting rod, the first reflector is arranged on one of the other two sides of the first semi-transparent semi-reflective membrane, the other side of the other two sides of the first semi-transparent semi-reflective membrane is used for inputting light to be detected, when the light to be detected enters the first semi-transparent semi-reflective membrane, 50% of the light penetrates the first semi-transparent semi-reflective membrane and is reflected back by the original path, the light is reflected at 45 degrees at the first semi-transparent semi-reflective membrane, the other 50% of the light is reflected to the opposite optical pyramid angle, the light is reflected back to the first semi-transparent semi-reflective membrane by the optical pyramid and passes through the first semi-reflective membrane, and the two paths of signal light to be detected which are divided by the first semi-transparent semi-reflective membrane realize interference and are transmitted into the first PD detector and detect the light intensity signal of;
the second PD detector is arranged on the opposite side, far away from the connecting rod, of the second semi-transparent and semi-reflective membrane, the second reflector and the laser are arranged on the other opposite sides of the second semi-transparent and semi-reflective membrane, when light emitted by the laser enters the second semi-transparent and semi-reflective membrane, the light is divided into two parts by the second semi-transparent and semi-reflective membrane, one part of the light is reflected by the second semi-transparent and semi-reflective membrane to enter an optical pyramid opposite to the second semi-transparent and semi-reflective membrane in sequence, is reflected back to the second semi-transparent and semi-reflective membrane by the optical pyramid and penetrates through the second semi-transparent and semi-reflective membrane to be received by the second PD detector, and the other part of the light is reflected back to the second semi-transparent and semi-reflective membrane by the second reflector after penetrating through the second semi-transparent and.
2. A fourier transform spectrometer as claimed in claim 1, wherein: the first reflector and the second reflector are all total reflectors.
3. A fourier transform spectrometer as claimed in claim 1, wherein: the laser is a single-frequency laser or a double-frequency laser.
4. A fourier transform spectrometer as claimed in claim 1, wherein: the optical pyramid is a 45-degree right-angle optical pyramid.
CN201811435011.7A 2018-11-28 2018-11-28 Fourier transform spectrometer Pending CN111238643A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112797961A (en) * 2020-12-30 2021-05-14 中国工程物理研究院激光聚变研究中心 Optical alignment system

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102095498A (en) * 2010-11-12 2011-06-15 北京工业大学 High-accuracy Fourier transformation measuring method of scanning type
US20110194117A1 (en) * 2009-01-27 2011-08-11 University Of Florida Research Foundation, Inc. Mirror-tilt-insensitive fourier transform spectrometer
CN103076090A (en) * 2013-01-22 2013-05-01 李剑平 Laser interferometer optical path difference location method and system
CN103822718A (en) * 2014-03-10 2014-05-28 李剑平 Scanning interferometer device for measuring imaging Fourier transform spectrum
CN203869776U (en) * 2014-03-10 2014-10-08 李剑平 Scanning interferometer device for imaging Fourier transform spectrometry

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110194117A1 (en) * 2009-01-27 2011-08-11 University Of Florida Research Foundation, Inc. Mirror-tilt-insensitive fourier transform spectrometer
CN102095498A (en) * 2010-11-12 2011-06-15 北京工业大学 High-accuracy Fourier transformation measuring method of scanning type
CN103076090A (en) * 2013-01-22 2013-05-01 李剑平 Laser interferometer optical path difference location method and system
CN103822718A (en) * 2014-03-10 2014-05-28 李剑平 Scanning interferometer device for measuring imaging Fourier transform spectrum
CN203869776U (en) * 2014-03-10 2014-10-08 李剑平 Scanning interferometer device for imaging Fourier transform spectrometry

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112797961A (en) * 2020-12-30 2021-05-14 中国工程物理研究院激光聚变研究中心 Optical alignment system
CN112797961B (en) * 2020-12-30 2022-03-04 中国工程物理研究院激光聚变研究中心 Optical alignment system

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