CN111217325B - 一种超声辅助阳极键合方法及其超声辅助阳极键合系统 - Google Patents
一种超声辅助阳极键合方法及其超声辅助阳极键合系统 Download PDFInfo
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- CN111217325B CN111217325B CN201911241994.5A CN201911241994A CN111217325B CN 111217325 B CN111217325 B CN 111217325B CN 201911241994 A CN201911241994 A CN 201911241994A CN 111217325 B CN111217325 B CN 111217325B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C3/00—Assembling of devices or systems from individually processed components
- B81C3/001—Bonding of two components
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CN201911241994.5A CN111217325B (zh) | 2019-12-06 | 2019-12-06 | 一种超声辅助阳极键合方法及其超声辅助阳极键合系统 |
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CN111217325A CN111217325A (zh) | 2020-06-02 |
CN111217325B true CN111217325B (zh) | 2023-04-07 |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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US6645675B1 (en) * | 1999-09-02 | 2003-11-11 | Lithium Power Technologies, Inc. | Solid polymer electrolytes |
CN1580753A (zh) * | 2003-08-01 | 2005-02-16 | 北京博奥生物芯片有限责任公司 | 一种微阵列反应装置及其应用 |
CN102097545A (zh) * | 2010-11-19 | 2011-06-15 | 东南大学 | 发光二极管的玻璃-硅圆片级板上芯片封装方法 |
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DE4311762C2 (de) * | 1993-04-08 | 1995-02-02 | Josef Dr Kemmer | Verfahren zur Verbindung elektrischer Kontaktstellen |
US5454506A (en) * | 1994-03-01 | 1995-10-03 | International Business Machines Corporation | Structure and process for electro/mechanical joint formation |
US20030186521A1 (en) * | 2002-03-29 | 2003-10-02 | Kub Francis J. | Method of transferring thin film functional material to a semiconductor substrate or optimized substrate using a hydrogen ion splitting technique |
JP2007301600A (ja) * | 2006-05-11 | 2007-11-22 | Matsushita Electric Ind Co Ltd | 接合方法及びその装置 |
CN101439843B (zh) * | 2008-10-10 | 2011-08-31 | 北京大学 | 一种微型原子气室封装工艺方法 |
CN103234567B (zh) * | 2013-03-26 | 2015-07-15 | 中北大学 | 基于阳极键合技术的mems电容式超声传感器 |
CN103145096B (zh) * | 2013-03-27 | 2015-04-08 | 山东理工大学 | 一种硅片与玻璃片的低温超声阳极键合方法 |
CN103692648B (zh) * | 2014-01-03 | 2016-04-27 | 大连交通大学 | 一种微纳结构的超声波封接装置及其封接方法 |
CN103972165A (zh) * | 2014-05-24 | 2014-08-06 | 哈尔滨工业大学 | 一种实现硅通孔叠层芯片互连的方法 |
CN104112681A (zh) * | 2014-07-03 | 2014-10-22 | 上海交通大学 | 一种基于铜微针锥的固态超声键合方法 |
US10497968B2 (en) * | 2016-01-04 | 2019-12-03 | Global Graphene Group, Inc. | Solid state electrolyte for lithium secondary battery |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6645675B1 (en) * | 1999-09-02 | 2003-11-11 | Lithium Power Technologies, Inc. | Solid polymer electrolytes |
CN1580753A (zh) * | 2003-08-01 | 2005-02-16 | 北京博奥生物芯片有限责任公司 | 一种微阵列反应装置及其应用 |
CN102097545A (zh) * | 2010-11-19 | 2011-06-15 | 东南大学 | 发光二极管的玻璃-硅圆片级板上芯片封装方法 |
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