CN111215766A - SiC晶片制造方法 - Google Patents
SiC晶片制造方法 Download PDFInfo
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- CN111215766A CN111215766A CN201911367656.6A CN201911367656A CN111215766A CN 111215766 A CN111215766 A CN 111215766A CN 201911367656 A CN201911367656 A CN 201911367656A CN 111215766 A CN111215766 A CN 111215766A
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- sic
- gas
- sic wafer
- ingot
- radiation path
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Laser Beam Processing (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
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CN201911367656.6A CN111215766A (zh) | 2019-12-26 | 2019-12-26 | SiC晶片制造方法 |
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CN201911367656.6A CN111215766A (zh) | 2019-12-26 | 2019-12-26 | SiC晶片制造方法 |
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CN111215766A true CN111215766A (zh) | 2020-06-02 |
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CN201911367656.6A Pending CN111215766A (zh) | 2019-12-26 | 2019-12-26 | SiC晶片制造方法 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111986986A (zh) * | 2020-08-24 | 2020-11-24 | 松山湖材料实验室 | 一种晶圆的剥离方法及剥离装置 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1785576A (zh) * | 2005-12-16 | 2006-06-14 | 上海汽车股份有限公司 | 齿轮激光焊接加工方法 |
CN101032785A (zh) * | 2006-03-07 | 2007-09-12 | 索尼株式会社 | 激光加工装置,激光加工头及激光加工方法 |
CN103831540A (zh) * | 2014-02-20 | 2014-06-04 | 江南大学 | 一种激光复合打孔陶瓷的方法 |
CN204195059U (zh) * | 2014-10-24 | 2015-03-11 | 宝钛集团有限公司 | 一种除渣器 |
JP2017022283A (ja) * | 2015-07-13 | 2017-01-26 | 株式会社ディスコ | 多結晶SiCウエーハの生成方法 |
CN106735888A (zh) * | 2016-12-07 | 2017-05-31 | 深圳市海目星激光科技有限公司 | 一种臭氧辅助切割装置及方法 |
CN108145307A (zh) * | 2016-12-02 | 2018-06-12 | 株式会社迪思科 | SiC晶片的生成方法 |
CN108161215A (zh) * | 2016-12-06 | 2018-06-15 | 株式会社迪思科 | SiC 晶片的生成方法 |
CN108735578A (zh) * | 2017-04-25 | 2018-11-02 | 株式会社迪思科 | SiC晶片的生成方法 |
-
2019
- 2019-12-26 CN CN201911367656.6A patent/CN111215766A/zh active Pending
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1785576A (zh) * | 2005-12-16 | 2006-06-14 | 上海汽车股份有限公司 | 齿轮激光焊接加工方法 |
CN101032785A (zh) * | 2006-03-07 | 2007-09-12 | 索尼株式会社 | 激光加工装置,激光加工头及激光加工方法 |
CN103831540A (zh) * | 2014-02-20 | 2014-06-04 | 江南大学 | 一种激光复合打孔陶瓷的方法 |
CN204195059U (zh) * | 2014-10-24 | 2015-03-11 | 宝钛集团有限公司 | 一种除渣器 |
JP2017022283A (ja) * | 2015-07-13 | 2017-01-26 | 株式会社ディスコ | 多結晶SiCウエーハの生成方法 |
CN108145307A (zh) * | 2016-12-02 | 2018-06-12 | 株式会社迪思科 | SiC晶片的生成方法 |
CN108161215A (zh) * | 2016-12-06 | 2018-06-15 | 株式会社迪思科 | SiC 晶片的生成方法 |
CN106735888A (zh) * | 2016-12-07 | 2017-05-31 | 深圳市海目星激光科技有限公司 | 一种臭氧辅助切割装置及方法 |
CN108735578A (zh) * | 2017-04-25 | 2018-11-02 | 株式会社迪思科 | SiC晶片的生成方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111986986A (zh) * | 2020-08-24 | 2020-11-24 | 松山湖材料实验室 | 一种晶圆的剥离方法及剥离装置 |
CN111986986B (zh) * | 2020-08-24 | 2024-05-03 | 松山湖材料实验室 | 一种晶圆的剥离方法及剥离装置 |
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Effective date of registration: 20220214 Address after: Building A1, innovation city, Songshanhu University, Dongguan, Guangdong 523000 Applicant after: Material Laboratory of Songshan Lake Applicant after: Institute of physics, Chinese Academy of Sciences Address before: Building A1, innovation city, Songshanhu University, Dongguan, Guangdong 523000 Applicant before: Material Laboratory of Songshan Lake |
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Effective date of registration: 20220824 Address after: Building A1, innovation city, Songshanhu University, Dongguan, Guangdong 523000 Applicant after: Material Laboratory of Songshan Lake Applicant after: Zhongke Huizhu (Dongguan City) Consulting Management Enterprise (L.P.) Address before: Building A1, innovation city, Songshanhu University, Dongguan, Guangdong 523000 Applicant before: Material Laboratory of Songshan Lake Applicant before: INSTITUTE OF PHYSICS, CHINESE ACADEMY OF SCIENCES |
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Effective date of registration: 20221010 Address after: 523000 Room 309, Building 12, No.1 Xuefu Road, Songshan Lake Park, Dongguan, Guangdong Applicant after: Dongguan Zhongke Huizhu Semiconductor Co.,Ltd. Address before: Building A1, innovation city, Songshanhu University, Dongguan, Guangdong 523000 Applicant before: Material Laboratory of Songshan Lake Applicant before: Zhongke Huizhu (Dongguan City) Consulting Management Enterprise (L.P.) |
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