CN111189584B - Vacuum plugging mechanism, vacuum plugging method and vacuum testing equipment - Google Patents
Vacuum plugging mechanism, vacuum plugging method and vacuum testing equipment Download PDFInfo
- Publication number
- CN111189584B CN111189584B CN202010032067.9A CN202010032067A CN111189584B CN 111189584 B CN111189584 B CN 111189584B CN 202010032067 A CN202010032067 A CN 202010032067A CN 111189584 B CN111189584 B CN 111189584B
- Authority
- CN
- China
- Prior art keywords
- vacuum
- plugging
- hole
- cavity wall
- vacuum cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/022—Test plugs for closing off the end of a pipe
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
Abstract
The invention relates to the technical field of vacuum testing, and discloses a vacuum plugging mechanism, a vacuum plugging method and vacuum testing equipment. Wherein, vacuum shutoff mechanism includes end cap, fixed block and the different lantern rings of a plurality of external diameters. The end cap comprises a plugging portion and a fixing portion, the diameter of the plugging portion is larger than that of the through hole, and the plugging portion can be attached to one side of the wall of the vacuum cavity. The lantern ring can be sleeved on the fixing portion and can be detachably clamped in the through hole. The fixed block can be laminated with the opposite side of vacuum cavity wall, and the fixed part can pass fixed block and fastener detachably fixed connection to make shutoff portion and the close laminating of vacuum cavity wall and shutoff through-hole. According to the vacuum plugging mechanism provided by the invention, only the lantern rings with different sizes are required to be replaced according to the size of the through hole, and the plugs with different sizes are not required to be replaced.
Description
Technical Field
The invention relates to the technical field of vacuum testing, in particular to a vacuum plugging mechanism, a vacuum plugging method and vacuum testing equipment.
Background
With the development of economy, a vacuum cavity is required in more and more industries, namely, a sealed cavity is vacuumized, and various processing, treatment and operation are performed in the vacuum environment, such as the semiconductor industry, the panel display industry, the film coating industry, the solar power generation industry, the outer space environment simulation and the like.
During the production of the vacuum chamber, it is often necessary to leak the vacuum chamber to ensure the hermeticity of the vacuum chamber. At present, the most common method is helium mass spectrometer leak detection, and the principle is to seal a vacuum cavity and pump out helium from the outside, if there is a leak point, the helium is sucked into the vacuum cavity and then pumped into a helium mass spectrometer leak detector, so as to obtain the leak rate. Because one or more through holes with different sizes are usually arranged on the wall of the vacuum cavity to be used as interfaces, the through holes with different sizes need to be blocked in the leak detection process.
In the prior art, a plug matched with the size of each through hole is generally processed, and then the plugs are used for plugging a plurality of through holes with different sizes one by one. However, this method is costly, and the plugs are of various kinds and have no compatibility, which is not favorable for standardization of the plugs.
Therefore, a new vacuum plugging mechanism is needed to solve the above technical problems.
Disclosure of Invention
The invention aims to provide a vacuum plugging mechanism which can reduce the cost, improve the compatibility and the standardization of a plug, prevent the plug from generating air leakage caused by lateral movement and improve the sealing reliability of the plug.
The invention also aims to provide a vacuum plugging method, and by adopting the vacuum plugging mechanism, the plugging method is simple and has strong operability, and the sealing reliability can be ensured.
Another object of the present invention is to provide a vacuum test apparatus, which can ensure the reliability of sealing and improve the accuracy of the test result by applying the vacuum plugging mechanism.
In order to achieve the purpose, the invention adopts the following technical scheme:
a vacuum plugging mechanism for plugging a through hole in a wall of a vacuum chamber, comprising:
the plug comprises a plugging part and a fixing part, the diameter of the plugging part is larger than that of the through hole, and the plugging part can be attached to one side of the vacuum cavity wall;
the lantern rings can be sleeved on the fixing part and can be detachably clamped in the through hole;
the fixing block can be attached to the other side of the vacuum cavity wall, and the fixing part can penetrate through the fixing block and be fixedly connected with the fastener in a detachable mode, so that the blocking part is closely attached to the vacuum cavity wall and blocks the through hole.
As a preferable scheme of the vacuum blocking mechanism, the lantern ring is of an integrally formed structure.
Preferably, the collar comprises a plurality of rigid sub-collars, and the rigid sub-collars can be nested to form collars with different outer diameters.
Preferably, the collar comprises a plurality of elastic sub-collars, and the elastic sub-collars can be nested to form collars with different outer diameters.
Preferably, the collar comprises a rigid sub-collar and an elastic sub-collar, and the rigid sub-collar and the elastic sub-collar can be nested to form the collars with different outer diameters.
As a preferable scheme of the vacuum blocking mechanism, the lantern ring is circular, rectangular, oblong or triangular.
Preferably, the vacuum blocking mechanism further comprises a sealing member, each blocking portion is provided with the sealing member, and the sealing member can abut against a side wall of the vacuum cavity wall.
As a preferable mode of the vacuum blocking mechanism, an installation groove is provided on the blocking portion, and the sealing member is fixed in the installation groove.
A vacuum plugging method using the vacuum plugging mechanism as described above, the vacuum plugging method comprising:
s1, selecting a lantern ring with a corresponding size according to the size of a through hole in the wall of the vacuum cavity, and sleeving the lantern ring with the corresponding size on a fixing part of the plug;
s2, enabling the fixing part to penetrate through the through hole, enabling the plugging part of the plug to be attached to one side of the wall of the vacuum cavity, and enabling the lantern ring to be clamped in the through hole;
s3, the fixing block is sleeved on the fixing portion, the fastening piece is installed on the fixing portion, the fastening piece is abutted to the fixing block, the fixing block abuts against the other side of the vacuum cavity wall, the relative position of the fastening piece and the fixing portion is adjusted, and the plugging portion is tightly attached to the vacuum cavity wall to plug the through hole.
A vacuum test apparatus comprising a vacuum plugging mechanism as described above.
The invention has the beneficial effects that:
when the vacuum plugging mechanism is used, the lantern rings with different sizes are only needed to be replaced aiming at the through holes with different sizes, the plugs with different sizes are not needed to be replaced, the lantern ring is simple in structure compared with the plugs and is easy to process, so that the cost can be reduced, the compatibility of the plugs and the standardization of the plugs are facilitated to be improved, in addition, the lantern ring is clamped in the through holes, the air leakage caused by the fact that the plugs move laterally can be prevented, the fixing part is positioned at the center of the through holes, the sealing reliability of the plugging part is improved, and meanwhile the unbalanced stress of the fixing block can be avoided.
The vacuum plugging method provided by the invention adopts the vacuum plugging mechanism, so that the plugging method is simple and strong in operability, and the sealing reliability can be ensured.
According to the vacuum test equipment provided by the invention, the vacuum plugging mechanism is applied, so that the sealing reliability can be ensured, and the accuracy of a test result is improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments of the present invention will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the contents of the embodiments of the present invention and the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a vacuum plugging mechanism provided in an embodiment of the present invention at a first angle;
FIG. 2 is a schematic structural diagram of a vacuum plugging mechanism at a second angle according to an embodiment of the present invention;
FIG. 3 is a cross-sectional view of a vacuum plugging mechanism according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a plug in the vacuum plugging mechanism according to an embodiment of the present invention;
FIG. 5 is a schematic structural diagram of a first collar provided in accordance with a fourth embodiment of the present invention;
fig. 6 is a schematic structural diagram of a second collar according to a fourth embodiment of the present invention.
In the figure:
100-vacuum chamber wall; 101-a through hole;
1-plug; 11-a blocking part; 111-mounting grooves; 12-a fixed part;
2-a collar; 21-a roller;
3, fixing blocks;
4-a fastener;
5-sealing element.
Detailed Description
In order to make the technical problems solved, technical solutions adopted and technical effects achieved by the present invention clearer, the technical solutions of the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only or to distinguish between different structures or components and are not to be construed as indicating or implying relative importance. Wherein the terms "first position" and "second position" are two different positions.
In the description of the present invention, it should be noted that unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection or a removable connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Example one
As shown in fig. 1 to 3, the present embodiment provides a vacuum plugging mechanism for plugging the through hole 101 in the vacuum chamber wall 100 during the vacuum test. Specifically, the vacuum plugging mechanism comprises a plug 1, a fixing block 3 and a plurality of lantern rings 2 with different outer diameters. The stopper 1 includes a blocking portion 11 and a fixing portion 12, the diameter of the blocking portion 11 is larger than that of the through hole 101, and the blocking portion 11 can be attached to one side of the vacuum chamber wall 100. The lantern ring 2 can be sleeved on the fixing portion 12 and the lantern ring 2 can be detachably clamped in the through hole 101. The fixing block 3 can be attached to the other side of the vacuum chamber wall 100, and the fixing portion 12 can be detachably and fixedly connected with the fastening member 4 through the fixing block 3, so that the blocking portion 11 is closely attached to the vacuum chamber wall 100 and blocks the through hole 101. Specifically, in the present embodiment, the stopper 11 can be attached to the inside of the vacuum chamber wall 100. The fixing block 3 can be attached to the outside of the vacuum chamber wall 100. Of course, in other embodiments, the fixed block 3 may be attached to the inner side of the vacuum cavity wall 100, and the blocking portion 11 may be attached to the outer side of the vacuum cavity wall 100, as long as the fixed block 3 and the blocking portion 11 are respectively located at two sides of the vacuum cavity wall 100, which is not limited herein.
The vacuum plugging mechanism that this embodiment provided, when using, only need to change the lantern ring 2 of unidimensional not to the through-hole of unidimensional not, and need not to change unidimensional end cap 1, because the structure of the lantern ring 2 is compared in end cap 1's simple structure, it is easier to process, so can reduce cost, still be favorable to improving end cap 1's compatibility and end cap 1's standardization simultaneously, establish in through setting up lantern ring 2 card in through-hole 101 in addition, can prevent that end cap 1 from taking place lateral shifting and leading to leaking gas, ensure that fixed part 12 is fixed a position at the central point of through-hole 101, improve the reliability that shutoff portion 11 is sealed, can avoid fixed block 3 atress unbalanced simultaneously.
Optionally, the number of plugs 1 is multiple, and the sizes of the multiple plugs 1 are the same. Alternatively, the number of the fixed blocks 3 is plural, and the sizes of the plural fixed blocks 3 are the same. Since the vacuum cavity wall 100 is usually provided with a plurality of through holes 101, the plurality of through holes 101 can be simultaneously sealed by the cooperation of the plurality of plugs 1, the plurality of fixing blocks 3 and the plurality of collars 2. Further, the length of the fixing block 3 is greater than the diameter of the through hole 101 having the largest diameter among the plurality of through holes 101. The width of the fixing block 3 is smaller than the diameter of the through-hole 101 having the largest diameter among the plurality of through-holes 101.
Optionally, the collar 2 is of integrally formed construction. The lantern ring 2 formed integrally has good structural stability and high working reliability. Optionally, the collar 2 is circular, rectangular, oblong or triangular. Of course, the collar 2 is not limited to the above shapes, as long as the shape of the collar 2 is matched with the shape of the through hole 101.
Optionally, the outer diameter of the collar 2 is less than or equal to 150 mm. Usually, more than 95% of the through holes 101 are usually smaller than 150mm in diameter, so the outer diameter of the lantern ring 2 can be controlled below 150mm, and when the lantern ring 2 with the outer diameter larger than 150mm is needed in individual cases, the lantern ring 2 with the corresponding size is processed in a targeted mode.
Specifically, the fixing portion 12 is screwed to the fastening member 4 in this embodiment. Further, the fastener 4 is a wing nut. The fixing part 12 is in threaded fit with the fastener 4, so that the fixing part can be conveniently mounted and dismounted.
Preferably, the vacuum plugging mechanism provided by the present embodiment further includes a sealing member 5, the sealing member 5 is disposed on each plugging portion 11, and the sealing member 5 can abut against the side wall of the vacuum chamber wall 100. The reliability of the seal can be further ensured by providing the seal 5. Optionally, the seal 5 is an O-ring seal.
Alternatively, as shown in fig. 4, the blocking portion 11 is provided with an installation groove 111, and the sealing member 5 is fixed in the installation groove 111. Through setting up mounting groove 111, be favorable to guaranteeing the firm nature of sealing member 5 fixed and the accuracy nature in position to be favorable to guaranteeing that sealing member 5 can play good sealed effect.
The embodiment further provides a vacuum plugging method, and with the vacuum plugging mechanism, the vacuum plugging method includes:
s1, selecting a lantern ring 2 with a corresponding size according to the size of a through hole 101 in a vacuum cavity wall 100, and sleeving the lantern ring 2 with the corresponding size on a fixing part 12 of a plug 1;
s2, enabling the fixing part 12 to penetrate through the through hole 101, enabling the plugging part 11 of the plug 1 to be attached to one side of the vacuum cavity wall 100, and enabling the lantern ring 2 to be clamped in the through hole 101;
s3, the fixing block 3 is sleeved on the fixing portion 12, the fastening piece 4 is installed on the fixing portion 12, the fastening piece 4 is abutted to the fixing block 3, the fixing block 3 is abutted to the other side of the vacuum cavity wall 100, and the relative position of the fastening piece 4 and the fixing portion 12 is adjusted, so that the plugging portion 11 is tightly attached to the vacuum cavity wall 100 to plug the through hole 101.
According to the vacuum plugging method provided by the embodiment, by adopting the vacuum plugging mechanism, the plugging method is simple, the operability is strong, and the sealing reliability can be ensured.
The embodiment also provides vacuum test equipment which comprises the vacuum plugging mechanism. The vacuum test equipment provided by the embodiment can ensure the sealing reliability and improve the accuracy of the test result by applying the vacuum plugging mechanism.
Example two
The present embodiment provides another vacuum plugging mechanism, and the difference between the present embodiment and the first embodiment is that the collar 2 is not an integrally formed structure, but is formed by nesting a plurality of rigid sub-collars. In particular, the collar 2 comprises a plurality of rigid sub-collars which are capable of nesting to form collars 2 of different outer diameters. Further, the outer diameters of the plurality of rigid sub-collars increase in sequence, and the outer diameter of the k-th rigid sub-collar is equal to the inner diameter of the k + 1-th rigid sub-collar. The nested form of a plurality of rigid sub-lantern rings is adopted, so that the flexibility of the size of the lantern ring 2 can be improved, and the application range of the lantern ring 2 is enlarged.
EXAMPLE III
The present embodiment provides another vacuum plugging mechanism, and the difference between the present embodiment and the first embodiment is that the collar 2 is not an integrally formed structure, but is formed by nesting a plurality of elastic sub-collars. In particular, the collar 2 comprises a plurality of elastic sub-collars which can be nested to form collars 2 of different external diameters. In the elastic form, nesting of the plurality of elastic sub-collars is facilitated, and removal of the collar 2 from the through hole 101 is also facilitated.
Example four
The present embodiment provides another vacuum plugging mechanism, and the difference between the present embodiment and the first embodiment is that the collar 2 is not an integrally formed structure, but is formed by nesting a rigid sub-collar and an elastic sub-collar. In particular, the collar 2 comprises a rigid sub-collar and an elastic sub-collar, which are able to nest the collar 2 constituting different outer diameters. Further, the collar 2 comprises a plurality of rigid sub-collars and a plurality of elastic sub-collars. Through the cooperation of the rigid sub-lantern ring and the elastic sub-lantern ring, nesting among the sub-lantern rings is facilitated, the lantern ring 2 can be taken out of the through hole 101 conveniently, meanwhile, the accuracy of the position of the fixing part 12 in the through hole 101 is guaranteed, and the fixing part 12 is prevented from moving in the through hole 101.
Further, as shown in fig. 5 and 6, a roller 21 is arranged between two adjacent rigid sub-collars; and/or a roller 21 is arranged between two adjacent elastic sub-lantern rings; and/or rollers 21 are provided between adjacent rigid and elastomeric sub-collars. Further, a plurality of rollers 21 are arranged between two adjacent rigid sub-lantern rings; and/or a plurality of rollers 21 are arranged between two adjacent elastic sub-lantern rings; and/or a plurality of rollers 21 are disposed between adjacent rigid and elastomeric sub-collars. A plurality of rollers 21 are arranged at intervals in the circumferential direction of the rigid or elastic sub-collars. The outer diameter of the collar 2 can be varied by the cooperation of the rollers 21 with the sub-collar, it being understood that the rollers 21 can also be other objects such as pads. By using rollers 21 of different diameters, the gap between the two sub-collars can be adjusted, and the position of the inner ring of the sub-collar at the center can be adjusted, so that the position of the fixing part 12 in the through hole 101 can be adjusted as desired.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (7)
1. A vacuum plugging mechanism for plugging a through hole (101) in a vacuum cavity wall (100), comprising:
the plug (1) comprises a plugging part (11) and a fixing part (12), the diameter of the plugging part (11) is larger than that of the through hole (101), and the plugging part (11) can be attached to one side of the vacuum cavity wall (100);
the lantern rings (2) with different outer diameters can be sleeved on the fixing portion (12) and the lantern rings (2) can be detachably clamped in the through holes (101);
the fixing block (3) can be attached to the other side of the vacuum cavity wall (100), and the fixing part (12) can penetrate through the fixing block (3) and be detachably and fixedly connected with a fastening piece (4) so that the blocking part (11) is closely attached to the vacuum cavity wall (100) and blocks the through hole (101);
the collar (2) comprises a plurality of rigid sub-collars which can be nested to form collars (2) of different outer diameters.
2. Vacuum plugging mechanism according to claim 1, wherein the collar (2) is of an integrally formed structure.
3. Vacuum plugging mechanism according to any of claims 1-2, wherein the collar (2) is circular, rectangular, oblong or triangular.
4. The vacuum plugging mechanism according to claim 1, further comprising a sealing member (5), wherein the sealing member (5) is arranged on each plugging portion (11), and the sealing member (5) can abut against the side wall of the vacuum cavity wall (100).
5. Vacuum plugging mechanism according to claim 4, wherein a mounting groove (111) is provided on the plugging portion (11), and the sealing member (5) is fixed in the mounting groove (111).
6. A vacuum plugging method using the vacuum plugging mechanism according to any one of claims 1 to 5, the vacuum plugging method comprising:
s1, selecting a lantern ring (2) with a corresponding size according to the size of a through hole (101) in a vacuum cavity wall (100), and sleeving the lantern ring (2) with the corresponding size on a fixing part (12) of a plug (1);
s2, enabling the fixing part (12) to penetrate through the through hole (101), enabling the plugging part (11) of the plug (1) to be attached to one side of the vacuum cavity wall (100), and enabling the lantern ring (2) to be clamped in the through hole (101);
s3, establish fixed block (3) cover on fixed part (12), install fastener (4) on fixed part (12), and make fastener (4) with fixed block (3) butt, fixed block (3) support and hold the opposite side of vacuum cavity wall (100), the adjustment fastener (4) with the relative position of fixed part (12), make shutoff portion (11) with vacuum cavity wall (100) closely laminate in order to block up through-hole (101).
7. A vacuum test apparatus comprising a vacuum plugging mechanism according to any one of claims 1 to 5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010032067.9A CN111189584B (en) | 2020-01-13 | 2020-01-13 | Vacuum plugging mechanism, vacuum plugging method and vacuum testing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010032067.9A CN111189584B (en) | 2020-01-13 | 2020-01-13 | Vacuum plugging mechanism, vacuum plugging method and vacuum testing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111189584A CN111189584A (en) | 2020-05-22 |
| CN111189584B true CN111189584B (en) | 2022-03-22 |
Family
ID=70706209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010032067.9A Active CN111189584B (en) | 2020-01-13 | 2020-01-13 | Vacuum plugging mechanism, vacuum plugging method and vacuum testing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111189584B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2522684Y (en) * | 2001-12-18 | 2002-11-27 | 烙克赛克国际股份有限公司 | Cross-trough block sealing device |
| CN201651293U (en) * | 2009-12-18 | 2010-11-24 | 中电电气集团有限公司 | Sealing ring |
| CN108061216A (en) * | 2018-02-06 | 2018-05-22 | 钦州学院 | Plugging pipelines instrument with pressure relief |
| CN207906618U (en) * | 2018-03-10 | 2018-09-25 | 董冬梅 | A kind of plugging structure of civil air defense constructions and installations wall trepanning |
| CN209557653U (en) * | 2018-12-28 | 2019-10-29 | 北京铂阳顶荣光伏科技有限公司 | Sealing flange |
| CN110571731A (en) * | 2019-08-28 | 2019-12-13 | 中船重工(青岛)海洋装备研究院有限责任公司 | Embedded plugging device of ocean platform cable crossing cabin spare |
-
2020
- 2020-01-13 CN CN202010032067.9A patent/CN111189584B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2522684Y (en) * | 2001-12-18 | 2002-11-27 | 烙克赛克国际股份有限公司 | Cross-trough block sealing device |
| CN201651293U (en) * | 2009-12-18 | 2010-11-24 | 中电电气集团有限公司 | Sealing ring |
| CN108061216A (en) * | 2018-02-06 | 2018-05-22 | 钦州学院 | Plugging pipelines instrument with pressure relief |
| CN207906618U (en) * | 2018-03-10 | 2018-09-25 | 董冬梅 | A kind of plugging structure of civil air defense constructions and installations wall trepanning |
| CN209557653U (en) * | 2018-12-28 | 2019-10-29 | 北京铂阳顶荣光伏科技有限公司 | Sealing flange |
| CN110571731A (en) * | 2019-08-28 | 2019-12-13 | 中船重工(青岛)海洋装备研究院有限责任公司 | Embedded plugging device of ocean platform cable crossing cabin spare |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111189584A (en) | 2020-05-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP3372974A1 (en) | Negative-pressure airtightness testing apparatus and method | |
| CN104471700A (en) | Vacuum chuck | |
| CN201828385U (en) | Helium mass spectrometer leak detection apparatus for multilayer metal corrugated pipe | |
| CN111189584B (en) | Vacuum plugging mechanism, vacuum plugging method and vacuum testing equipment | |
| KR20180105672A (en) | On-line hermetically sealed inspection apparatus, multi-section type closed chamber processing apparatus and method | |
| CN109211481A (en) | Welding bellows device for detecting leak point | |
| CN108801563A (en) | Helium leak detection fixture, helium leak detection device and method | |
| CN113418002B (en) | Air tightness detection, interface sealing and quick access device | |
| CN107561000A (en) | A kind of sealing ring ageing test apparatus | |
| CN116558719A (en) | Leakage detection device and method for electrostatic chuck assembly | |
| CN207300835U (en) | A kind of sealing ring ageing test apparatus | |
| CN208187654U (en) | A kind of vacuum cavity KF flange leakage detector | |
| WO2017018405A1 (en) | Pump | |
| CN210863340U (en) | Bellows pressure test frock | |
| CN213452426U (en) | Helium examines equipment production and uses assembly work platform | |
| CN111834188B (en) | Observation window assembly and semiconductor processing equipment | |
| CN106979916A (en) | The test device of water vapor rejection film | |
| CN220187908U (en) | Pressure monitoring device of pressure pipeline convenient to installation | |
| CN220204982U (en) | Flange with good sealing effect | |
| CN104764599B (en) | Test fixture | |
| CN219915546U (en) | Air chamber for gas detection | |
| CN213889772U (en) | High canned type flange processingequipment for pipeline | |
| CN217637818U (en) | Pressure pipeline leakage detection device | |
| CN214008395U (en) | Accurate centering adjusting device for flange gasket | |
| US10571044B2 (en) | Adapter system for a check valve |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |