CN111185831A - Chemical mechanical polishing equipment - Google Patents
Chemical mechanical polishing equipment Download PDFInfo
- Publication number
- CN111185831A CN111185831A CN202010022650.1A CN202010022650A CN111185831A CN 111185831 A CN111185831 A CN 111185831A CN 202010022650 A CN202010022650 A CN 202010022650A CN 111185831 A CN111185831 A CN 111185831A
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- China
- Prior art keywords
- plate
- grinding
- chemical mechanical
- mechanical polishing
- bottom plate
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0046—Column grinding machines
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses a chemical mechanical grinding device, which structurally comprises a bottom plate, an upright post, a level detection device, a grinding plate, a liquid outlet pipe, a liquid storage tank, a top plate, an air cylinder, a pressing plate and a rotating shaft, wherein the bottom plate is parallel to the top plate arranged above the bottom plate, two sides of the bottom plate are respectively connected with the top plate through the upright post, the air cylinder is vertically connected to the bottom of the top plate, the bottom of the air cylinder is vertically connected with the pressing plate, the grinding plate is arranged below the pressing plate, the grinding plate is arranged on the bottom plate through the rotating shaft, the liquid storage tank is connected to the upright post, the bottom of the liquid storage tank is provided with the liquid outlet pipe, the: can change according to the altitude variation of lapping plate through 2 spring levers, enlarge through lever structure again, judge the horizontality of lapping plate through whether the level of alarm main unit, can in time remind the staff, be convenient for in time adjust to guarantee the quality of grinding.
Description
Technical Field
The invention relates to the field of machinery, in particular to chemical mechanical polishing equipment.
Background
The chemical mechanical polishing is to change the chemical bond of the surface by the chemical reaction between the chemical solution mixed with the tiny abrasive particles and the processing surface to generate a product which is easy to remove in a mechanical way, and then remove the chemical reactant by mechanical friction to obtain the ultra-smooth and damage-free flattened surface.
The existing chemical mechanical polishing plate is also rotated to polish, and the horizontal direction is easy to incline after the polishing plate rotates for a long time, so that the polishing quality is affected.
Disclosure of Invention
The invention mainly aims to overcome the defects of the prior art and provide chemical mechanical polishing equipment.
The invention is realized by adopting the following technical scheme: a chemical mechanical grinding device comprises a bottom plate, a column, a level detection device, a grinding plate, a liquid outlet pipe, a liquid storage tank, a top plate, a cylinder, a pressing plate and a rotating shaft, the bottom plate is parallel to the top plate arranged above, two sides of the bottom plate are respectively connected with the top plate through upright posts, the cylinder is vertically connected with the bottom of the top plate, the bottom of the cylinder is vertically connected with the pressing plate, the grinding plate is arranged below the pressing plate, the grinding plate is arranged on the bottom plate through a rotating shaft, the liquid storage tank is connected on the upright post, a liquid outlet pipe is arranged at the bottom of the liquid storage tank, the mouth of the liquid outlet pipe is arranged above the grinding plate, the level detection device is arranged on the bottom plate and comprises a height change structure, an amplification structure and an alarm device, the height change structure is provided with 2 and establishes respectively in lapping plate below both sides, and 2 height change structures are connected with alarm device transmission through enlarged structure respectively.
Preferably, the height change structure comprises a spring rod, a rod sleeve and a spring, wherein the bottom of the rod sleeve is vertically connected with the bottom plate, and the bottom of the spring rod is arranged in the rod sleeve and is connected with the bottom in the rod sleeve through the spring.
Preferably, the top of the spring rod is provided with a mounting groove, and a ball is arranged in the mounting groove.
Preferably, the side surface of the rod sleeve is provided with a strip-shaped notch parallel to the axis of the rod sleeve.
Preferably, the amplifying structure comprises a first sliding block, a lever, a fulcrum shaft and a second sliding block, the lever is installed on the outer side of the fulcrum shaft installation rod sleeve, sliding grooves are formed in two ends of the lever respectively, and the first sliding block and the second sliding block are arranged in the sliding grooves in two ends of the lever respectively.
Preferably, the alarm device comprises a telescopic guide rod, an iron bar, a movable contact piece, a support, an alarm host and a static contact piece, the support is fixed on the bottom plate, the iron bar is connected with the top of the support through the telescopic guide rod, the alarm host is arranged below the iron bar, the movable contact piece and the static contact piece are arranged on two sides of the top of the alarm host respectively, and the movable contact piece and the static contact piece are arranged on the same horizontal line.
Preferably, the first sliding block is arranged at the notch and is vertically connected with the spring rod, and the second sliding block is connected with the alarm host.
As optimization, the number of the telescopic guide rods is 2, and the telescopic guide rods are respectively and vertically connected with the iron bars.
Preferably, the 3/5 balls are arranged in the mounting groove.
Preferably, the fulcrum shaft is connected to 1/5 of the length of the lever, the short end of the lever is provided with the second sliding block, and the long end of the lever is provided with the first sliding block.
Preferably, the spring is a compression spring.
Advantageous effects
When the automatic grinding machine is used, a workpiece is clamped at the bottom of the pressing plate, the bottom of the workpiece is attached to the top surface of the grinding plate, grinding liquid in the liquid storage tank flows to the grinding plate through the liquid outlet pipe to immerse the bottom surface of the workpiece, the grinding plate is driven to rotate and grind through the rotating shaft, when the grinding plate rotates and deviates in the horizontal direction, the spring can push the spring rod upwards so that the balls are always tightly attached to the bottom surface of the grinding plate, so that the 2 height change structures can drive the spring rod to lift according to the change of the height of the grinding plate, the short end of the lever is driven to move, the long end of the lever is amplified and drives the alarm main machine to move, when the 2 spring rods are positioned on the same horizontal line, the first sliding blocks at the two sides of the alarm main machine can be kept horizontal, when the 2 spring rods are positioned on different horizontal lines, the 2 first sliding blocks of the alarm main machine are, The static contact piece is inclined, so only one of the contact pieces can be in contact with the iron bar in a horizontal state, and the alarm main machine can be powered off to give an alarm, so that a worker is reminded.
Compared with the prior art, the invention has the beneficial effects that: can change according to the altitude variation of lapping plate through 2 spring levers, enlarge through lever structure again, judge the horizontality of lapping plate through whether the level of alarm main unit, can in time remind the staff, be convenient for in time adjust to guarantee the quality of grinding.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a schematic structural diagram of a chemical mechanical polishing apparatus according to the present invention.
FIG. 2 is a schematic structural diagram of the level detecting device of the present invention.
Fig. 3 is a schematic structural diagram of the height variation structure of the present invention.
Fig. 4 is a schematic structural diagram of an enlarged structure of the present invention.
Fig. 5 is a schematic structural diagram of the alarm device of the invention.
In the figure: the device comprises a bottom plate 1, a stand column 2, a level detection device 3, a grinding plate 4, a liquid outlet pipe 5, a liquid storage tank 6, a top plate 7, a cylinder 8, a pressing plate 9, a rotating shaft 10, a height change structure 30, an amplification structure 31, an alarm device 32, a spring rod 30a, a rod sleeve 30b, a spring 30c, a ball 30d, a notch 30e, a first sliding block 31a, a lever 31b, a fulcrum shaft 31c, a second sliding block 31d, a telescopic guide rod 32a, an iron bar 32b, a movable contact piece 32c, a support 32d, an alarm host 32e and a static contact piece 32 f.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
Referring to fig. 1-2, the present invention provides a chemical mechanical polishing apparatus, comprising: the structure of the grinding device comprises a bottom plate 1, a stand column 2, a horizontal detection device 3, a grinding plate 4, a liquid outlet pipe 5, a liquid storage tank 6, a top plate 7, a cylinder 8, a pressing plate 9 and a rotating shaft 10, wherein the bottom plate 1 is parallel to the top plate 7 arranged above the bottom plate, two sides of the bottom plate 1 are respectively connected with the top plate 7 through the stand column 2, the cylinder 8 is vertically connected to the bottom of the top plate 7, the bottom of the cylinder 8 is vertically connected with the pressing plate 9, the grinding plate 4 is arranged below the pressing plate 9, the grinding plate 4 is arranged on the bottom plate 1 through the rotating shaft 10, the liquid storage tank 6 is connected on the stand column 2, the liquid outlet pipe 5 is arranged at the bottom of the liquid storage tank 6, a pipe orifice of the liquid outlet pipe 5 is arranged above the grinding plate 4, the horizontal detection device 3 is arranged on the bottom plate 1, the horizontal detection device 3 comprises a height change structure 30, the 2 height change structures 30 are in transmission connection with the alarm device 32 through the amplifying structures 31 respectively, and the amplifying structures 31 can amplify the change of the height difference.
The working principle is as follows: the workpiece is clamped at the bottom of the pressing plate 9, the bottom of the workpiece is attached to the top surface of the grinding plate 4, grinding fluid in the liquid storage tank 6 flows to the bottom surface of the workpiece immersed on the grinding plate 4 through the liquid outlet pipe 5, the grinding plate 4 is driven to rotate and grind through the rotating shaft 10, when the grinding plate 4 deviates in the horizontal direction during rotation, the height change structures 30 on two sides can drive the amplifying structures 31 to rotate according to the change of the heights of the two sides, so that the alarm host 32e is driven to move, when the alarm host 32e keeps the horizontal state, the alarm host 32e does not alarm, and when the alarm host 32e inclines, the alarm host 32e alarms.
Example 2
Referring to fig. 1-5, the present invention provides a chemical mechanical polishing apparatus, comprising: the structure of the grinding device comprises a bottom plate 1, a stand column 2, a horizontal detection device 3, a grinding plate 4, a liquid outlet pipe 5, a liquid storage tank 6, a top plate 7, a cylinder 8, a pressing plate 9 and a rotating shaft 10, wherein the bottom plate 1 is parallel to the top plate 7 arranged above the bottom plate, two sides of the bottom plate 1 are respectively connected with the top plate 7 through the stand column 2, the cylinder 8 is vertically connected to the bottom of the top plate 7, the bottom of the cylinder 8 is vertically connected with the pressing plate 9, the grinding plate 4 is arranged below the pressing plate 9, the grinding plate 4 is arranged on the bottom plate 1 through the rotating shaft 10, the liquid storage tank 6 is connected on the stand column 2, the liquid outlet pipe 5 is arranged at the bottom of the liquid storage tank 6, a pipe orifice of the liquid outlet pipe 5 is arranged above the grinding plate 4, the horizontal detection device 3 is arranged on the bottom plate 1, the horizontal detection device 3 comprises a height change structure 30, the 2 height change structures 30 are respectively in transmission connection with an alarm device 32 through an amplification structure 31, the amplification structure 31 can amplify changes of height differences to optimize the changes, each height change structure 30 comprises a spring rod 30a, a rod sleeve 30b and a spring 30c, the bottom of the rod sleeve 30b is vertically connected with the bottom plate 1, the bottom of the spring rod 30a is arranged in the rod sleeve 30b and is connected with the bottom in the rod sleeve 30b through the spring 30c, the rod sleeve 30b can ensure that the spring rod 30a moves vertically, the top of the spring rod 30a is provided with a mounting groove, a ball 30d is arranged in the mounting groove, the ball 30d can be in rolling contact with the grinding plate 4 to reduce friction and abrasion, the side face of the rod sleeve 30b is provided with a strip-shaped notch 30e parallel to the axis of the rod sleeve, so that the first sliding block 31a can move conveniently, and each amplification structure 31 comprises a first sliding block 31a, a lever, The alarm device 32 comprises a telescopic guide rod 32a, an iron bar 32b, a movable contact piece 32c, a bracket 32d, an alarm main machine 32e and a static contact piece 32f, wherein the bracket 32d is fixed on the bottom plate 1, the iron bar 32b is connected with the top of the bracket 32d through the telescopic guide rod 32a, the alarm main machine 32e is arranged below the iron bar 32b, the movable contact piece 32c and the static contact piece 32f are respectively arranged on two sides of the top of the alarm main machine 32e, and the movable contact piece 32c, the static contact piece 32f are respectively arranged on two sides of the top of the alarm main machine 32e, The static contact 32f is arranged on the same horizontal line, the first sliding block 31a is arranged at the notch 30e and is vertically connected with the spring rod 30a, the second sliding block 31d is connected with the alarm host 32e, 2 telescopic guide rods 32a are arranged and are respectively vertically connected with the iron bars 32b, so that the iron bars 32b can freely lift and keep a horizontal state all the time, 3/5 of the ball 30d is arranged in the mounting groove to prevent the ball 30d from falling off, the fulcrum shaft 31c is connected with 1/5 of the length of the lever 31b, the short end of the lever 31b is provided with the second sliding block 31d, the long end of the lever 31b is provided with the first sliding block 31a, so that the first sliding block 31a amplifies the moving distance of the second sliding block 31d, and the spring 30c is a compression spring, so that the spring rod 30a can be pushed upwards.
The working principle is as follows: based on the working principle of the above embodiment 1, since the spring 30c can push the spring rod 30a upwards to make the ball 30d always cling to the bottom surface of the grinding plate 4, the 2 height-varying structures 30 can drive the spring rod 30a to move up and down according to the height variation of the grinding plate 4, thereby driving the short end of the lever 31b to move, thereby amplifying the long end of the lever 31b and driving the alarm main unit 32e to move, when the 2 spring rods 30a are located on the same horizontal line, the first sliders 31a on both sides of the alarm main unit 32e can be kept horizontal, when the 2 spring rods 30a are located on different horizontal lines, the 2 first sliders 31a of the alarm main unit 32e are located on different horizontal planes, so that the movable contact piece 32c and the static contact piece 32f on the alarm main unit 32e are inclined, therefore only one contact piece can contact with the iron strip 32b kept horizontal, therefore, the alarm host 32e will be powered off to alarm, thereby reminding the staff.
Compared with the prior art, the invention has the technical progress that: can change according to the altitude variation of lapping plate through 2 spring levers, enlarge through lever structure again, judge the horizontality of lapping plate through whether the level of alarm main unit, can in time remind the staff, be convenient for in time adjust to guarantee the quality of grinding.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that various changes in the embodiments and/or modifications of the invention can be made, and equivalents and modifications of some features of the invention can be made without departing from the spirit and scope of the invention.
Claims (8)
1. A chemical mechanical grinding device structurally comprises a bottom plate (1), a stand column (2), a level detection device (3), a grinding plate (4), a liquid outlet pipe (5), a liquid storage tank (6), a top plate (7), an air cylinder (8), a pressing plate (9) and a rotating shaft (10), wherein the bottom plate (1) is parallel to the top plate (7) arranged above the grinding plate, the two sides of the bottom plate (1) are respectively connected with the top plate (7) through the stand column (2), the air cylinder (8) is vertically connected to the bottom of the top plate (7), the bottom of the air cylinder (8) is vertically connected with the pressing plate (9), the grinding plate (4) is arranged below the pressing plate (9), the grinding plate (4) is arranged on the bottom plate (1) through the rotating shaft (10), the liquid storage tank (6) is connected to the stand column (2), the liquid outlet pipe (5) is arranged at the bottom of the liquid storage tank (6), and the pipe orifice of the, the method is characterized in that:
level detection device (3) are installed on bottom plate (1), level detection device (3) are including altitude variation structure (30), enlarged structure (31), alarm device (32), altitude variation structure (30) are equipped with 2 and establish respectively in lapping plate (4) below both sides, and 2 altitude variation structures (30) are connected with alarm device (32) transmission through enlarged structure (31) respectively.
2. A chemical mechanical polishing apparatus as recited in claim 1, wherein: the height change structure (30) comprises a spring rod (30a), a rod sleeve (30b) and a spring (30c), the bottom of the rod sleeve (30b) is vertically connected with the bottom plate (1), and the bottom of the spring rod (30a) is arranged in the rod sleeve (30b) and is connected with the inner bottom of the rod sleeve (30b) through the spring (30 c).
3. A chemical mechanical polishing apparatus according to claim 2, wherein: the top of the spring rod (30a) is provided with a mounting groove, and a ball (30d) is arranged in the mounting groove.
4. A chemical mechanical polishing apparatus according to claim 2, wherein: the side surface of the rod sleeve (30b) is provided with a strip-shaped notch (30e) parallel to the axis of the rod sleeve.
5. A chemical mechanical polishing apparatus as recited in claim 1, wherein: the amplifying structure (31) comprises a first sliding block (31a), a lever (31b), a fulcrum shaft (31c) and a second sliding block (31d), the lever (31b) is installed on the outer side of a lever sleeve (30b) installed through the fulcrum shaft (31c), sliding grooves are formed in two ends of the lever (31b), and the first sliding block (31a) and the second sliding block (31d) are arranged in the sliding grooves in two ends of the lever (31b) respectively.
6. A chemical mechanical polishing apparatus as recited in claim 1, wherein: the alarm device (32) comprises a telescopic guide rod (32a), an iron bar (32b), a movable contact piece (32c), a support (32d), an alarm main machine (32e) and a static contact piece (32f), the support (32d) is fixed on the bottom plate (1), the iron bar (32b) is connected with the top of the support (32d) through the telescopic guide rod (32a), the alarm main machine (32e) is arranged below the iron bar (32b), the movable contact piece (32c) and the static contact piece (32f) are arranged on two sides of the top of the alarm main machine (32e) respectively, and the movable contact piece (32c) and the static contact piece (32f) are arranged on the same horizontal line.
7. A chemical mechanical polishing apparatus according to claim 5, wherein: the first sliding block (31a) is arranged at the notch (30e) and is vertically connected with the spring rod (30a), and the second sliding block (31d) is connected with the alarm host (32 e).
8. A chemical mechanical polishing apparatus as recited in claim 1, wherein: the number of the telescopic guide rods (32a) is 2, and the telescopic guide rods are respectively and vertically connected with the iron bars (32 b).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010022650.1A CN111185831A (en) | 2020-01-09 | 2020-01-09 | Chemical mechanical polishing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010022650.1A CN111185831A (en) | 2020-01-09 | 2020-01-09 | Chemical mechanical polishing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111185831A true CN111185831A (en) | 2020-05-22 |
Family
ID=70703466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010022650.1A Pending CN111185831A (en) | 2020-01-09 | 2020-01-09 | Chemical mechanical polishing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111185831A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012056011A (en) * | 2010-09-08 | 2012-03-22 | Ebara Corp | Polishing apparatus and method |
| CN107030589A (en) * | 2017-03-14 | 2017-08-11 | 黄河科技学院 | A kind of chemical-mechanical grinding device |
| CN207372285U (en) * | 2017-08-23 | 2018-05-18 | 佛山市至开金刚石工具有限公司 | One kind makes the uniform diamond composite sintering mold of component |
-
2020
- 2020-01-09 CN CN202010022650.1A patent/CN111185831A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012056011A (en) * | 2010-09-08 | 2012-03-22 | Ebara Corp | Polishing apparatus and method |
| CN107030589A (en) * | 2017-03-14 | 2017-08-11 | 黄河科技学院 | A kind of chemical-mechanical grinding device |
| CN207372285U (en) * | 2017-08-23 | 2018-05-18 | 佛山市至开金刚石工具有限公司 | One kind makes the uniform diamond composite sintering mold of component |
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