CN111185667A

CN111185667A - Pumping device and laser cutting device

Info

Publication number: CN111185667A
Application number: CN202010068547.0A
Authority: CN
Inventors: 杨晓伟; 王理华
Original assignee: Shanghai Precision Measurement Semiconductor Technology Inc
Current assignee: Shanghai Precision Measurement Semiconductor Technology Inc
Priority date: 2020-01-21
Filing date: 2020-01-21
Publication date: 2020-05-22
Anticipated expiration: 2040-01-21
Also published as: CN111185667B

Abstract

The invention provides a pump drainage device and a laser cutting device, wherein the pump drainage device comprises: the sucking disc forms a suction chamber, an air channel pipeline is connected above the suction chamber, a cyclone ring which is embedded in the suction chamber and provided with a first hollow chamber, at least one air inlet pipe connected to the cyclone ring, and a suction pipeline communicated with the air channel pipeline; the top of the suction pipeline forms a covering part for laser to penetrate through the suction pipeline, the gas path pipeline and the suction chamber to cut materials, and the cyclone ring is provided with an air outlet hole for forming cyclone airflow. The invention realizes the high-efficiency collection and discharge of the smoke, dust and toxic and harmful gases generated in the material cutting process by adopting the laser beam, thereby not only ensuring the product yield of the cut materials, but also effectively avoiding the possible pollution of the smoke, dust and toxic and harmful gases on the surface of a field lens of a light path system of the laser cutting device, and being suitable for the use in a clean room environment.

Description

Pumping device and laser cutting device

Technical Field

The invention relates to the technical field of laser cutting equipment, in particular to a pumping device and a laser cutting device based on the pumping device.

Background

The laser cutting is based on laser emitted by a laser, and is performed on an object by a high-energy high-power laser beam formed by a specific optical path system and a focusing system. Relative movement is formed between the laser beam and the object based on a servo mechanism so as to finally cut a workpiece with a specified shape by the laser beam. Laser cutting has many advantages such as cutting accuracy is high, cutting speed is fast, the incision is narrow, becomes the comparatively ideal means in scenes such as cutting panel, wafer, silicon ingot.

During the process of cutting an object by using a laser beam, certain smog, dust and toxic and harmful gas byproducts are still generated. The smoke, dust and toxic and harmful gases pollute Clean rooms (Clean rooms) for producing photovoltaic modules, wafers, semiconductor chips and OLED panels; meanwhile, the smoke, dust and toxic and harmful gases are also adhered to the surface of the product, so that the yield of the product is influenced; in addition, since the smoke and dust have a light weight, there is a field lens surface adhering to the optical path system of the laser cutting apparatus; finally, the fumes and dust generated during the laser cutting process are small in size and highly adhesive, so that the internal structure of the laser cutting device is contaminated, and even a part of the components may fail.

In view of the above, there is a need to improve the collecting and discharging device for the fume and dust generated during the laser cutting process and the related art, so as to solve the above problems.

Disclosure of Invention

The invention aims to disclose a pumping device and a laser cutting device comprising the same, which are used for efficiently collecting and discharging smoke, dust and toxic and harmful gas byproducts generated in the process of cutting materials by using laser beams and solving the defects in the background technology.

To achieve the first object, the present invention first discloses a pumping device, comprising:

the suction cup forms a suction chamber, an air channel pipeline is connected above the suction chamber, a cyclone ring which is embedded in the suction chamber and provided with a first hollow chamber, at least one air inlet pipe connected to the cyclone ring, and a suction pipeline communicated with the air channel pipeline;

a cavity formed by the suction chamber, the gas path pipeline and the suction pipeline forms a main pumping and exhausting channel;

the top of the suction pipeline forms a covering part for laser to penetrate through the suction pipeline, the gas path pipeline and the suction chamber to a cut material, and the cyclone ring is provided with an air outlet for forming cyclone airflow.

As a further improvement of the present invention, the sucker has a second hollow chamber;

the pumping device further comprises:

at least one air outlet pipe communicated with the second hollow cavity of the sucker,

the bottom of the sucker is provided with a plurality of auxiliary suction ports, and the auxiliary suction ports, the second hollow chamber and the air outlet pipe form an auxiliary pumping and exhausting channel.

As a further improvement of the invention, the cyclone ring is embedded in the inner wall surface of the suction chamber, and the first hollow chamber is annular;

the air inlet pipe penetrates through the second hollow cavity of the sucker and is transversely connected with the cyclone ring.

As a further improvement of the present invention, the cover is a sealed lens or a plate glass.

As a further improvement of the invention, the end parts of the two ends of the suction pipeline are in an open structure, the first end is connected with the air conveying device, and the second end is connected with the suction device.

As a further improvement of the invention, the air passage pipeline forms a conical cavity which is contracted upwards and communicated with the suction pipeline.

As a further improvement of the invention, the auxiliary suction ports are configured as a plurality of arc-shaped slits.

As a further improvement of the invention, the auxiliary suction opening comprises at least two circles of slit rings consisting of a plurality of separated arc-shaped slits, and the arc-shaped slit rings contained in the two adjacent circles of slit rings are partially overlapped along the radial direction of the sucker.

As a further improvement of the invention, the sucker is provided with an even number of air outlet pipes which are axially symmetrically arranged and are communicated with the second hollow cavity chamber of the sucker.

Based on the same invention idea, the invention also discloses a laser cutting device, comprising:

the device comprises a carrying platform for carrying materials, a laser generator and a pumping device which is arranged between the carrying platform and the laser generator and is disclosed by any one of the inventions;

the laser generator includes a carbon dioxide laser generator and/or a UV laser generator.

Compared with the prior art, the invention has the beneficial effects that:

the pumping device and the laser cutting device disclosed by the invention can generate upward pumping suction force, and realize the efficient collection and discharge of smoke, dust and toxic and harmful gas byproducts generated in the process of cutting materials by adopting laser beams, so that the product yield of the cut materials is ensured, the possible pollution of the smoke, the dust and the toxic and harmful gas byproducts on the surface of a field lens of a light path system of the laser cutting device is effectively avoided, and the laser cutting device and the method are suitable for clean room environment.

Drawings

FIG. 1 is a perspective view of an evacuation device according to the present invention;

FIG. 2 is a top view of an evacuation device according to the present invention;

FIG. 3 is a cross-sectional view taken along line B-B of FIG. 2;

FIG. 4 is a perspective view showing only the suction cup and the outlet tube;

FIG. 5 is a bottom view of an extractor device according to the present invention;

FIG. 6 is a perspective view of a cyclone ring included in the pumping device;

FIG. 7 is a top view of an evacuation device according to the present invention;

FIG. 8 is a half-sectional view of an evacuation device of the present invention;

figure 9 is a bottom view of a pumping device according to a variant of the invention;

figure 10 is a cross-sectional view of an alternative version of the evacuation device of the present invention taken along line B-B of figure 2.

Detailed Description

The present invention is described in detail with reference to the embodiments shown in the drawings, but it should be understood that these embodiments are not intended to limit the present invention, and those skilled in the art should understand that functional, methodological, or structural equivalents or substitutions made by these embodiments are within the scope of the present invention.

It is to be understood that in the description of the various embodiments of the invention, the terms "central", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", and "longitudinal" are used to describe various elements of the invention,

Front, back, left, right, vertical, horizontal and top,

The terms "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," "positive," "negative," and the like are used in the appended drawings to indicate orientations and positional relationships that are based on the orientation shown in the drawings for ease of describing the invention and to simplify the description, but do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the invention. Meanwhile, it should be noted that, in the embodiments of the present application, the term "cavity" or "chamber" refers to a space region that is relatively fixed in space and is formed by enclosing a solid component, and it is not limited that the "cavity" or "chamber" must be a closed space, which may be a relatively closed and independent space, or a section or a specific area of space.

The first embodiment is as follows:

please refer to fig. 1 to 8, which illustrate an embodiment of a pumping device according to the present invention.

In this embodiment, the pumping device is used for removing smoke, dust and toxic and harmful gases (hereinafter referred to as "smoke, dust and harmful gases") generated during the process of cutting the material 90 by the laser beam "Material to be aspirated") is sucked and discharged, the suction device comprising: a suction cup 10, the suction cup 10 forming a suction chamber 11, a gas path pipeline 50 connected to the upper part of the suction chamber 11 and embedded in the suction chamber 11And has a cyclone ring 60 having a first hollow chamber 66, at least one air inlet tube 40 connected to the cyclone ring 60, and a suction duct 2 communicating with the air path duct.

The air passage pipeline 50 is communicated with the suction pipeline 2, and forms a three-way structure. The top of the suction pipe 2 forms a cover 70 for the laser to penetrate through the suction pipe 2, the air passage pipe 50, the suction chamber 11 to the cut material, and the cyclone ring 60 is provided with an air outlet hole 62 for forming a cyclone air flow 621. The outer contour of the suction cup 10 may be circular, square, rectangular, oval or any other shape, and is preferably of an axisymmetric configuration, and most preferably circular.

In the embodiment, the suction pipeline 2 is provided with a step 25 at the top of the air channel pipeline 50, the bottom of the step 25 is provided with a through hole 24 for the laser beam to penetrate through the suction pipeline 2, the covering part 70 is arranged on the step 25, and the covering part 70 is a sealed lens or a flat glass. As shown in fig. 3, after passing through the field lens 80, the Laser Beam (Laser Beam) transmits through the cover 70 and passes through the evacuation device and reaches the material 90 located below and separated from the evacuation device to cut the material 90 in a set shape by the Laser Beam; and, in the process of cutting the material 90, the pumping device is suspended on the surface of the material 90, the material to be pumped generated in the process of cutting the material 90 by the laser beam is pumped away from the surface of the material 90 along the direction indicated by the arrow 105 in fig. 3 through the main pumping channel composed of the pumping chamber 11, the gas pipeline 50 and the pumping pipeline 2 in sequence, and meanwhile, the material to be pumped which has fine particles and light weight is prevented from being dissipated to the surface of the clean room or the field lens 80 of the light path system of the laser cutting device.

The end parts of the two ends of the suction pipeline 2 are of an open structure, the first end of the suction pipeline is connected with an air conveying device, the second end of the suction pipeline is connected with a suction device, the air conveying device forms transverse compressed air flow 202 for air conveyed by the suction device, the compressed air flow 202 carries the substances to be sucked to form suction air flow 201, and the suction air flow 201 is sucked by the suction device and is discharged out of the laser cutting device. Optionally, the connection of the suction line 2 to the suction device may be fitted with a filtering device (e.g. HEPA) to purify the suction gas flow 201 and then deliver the purified suction gas flow to the gas treatment device.

The ends of the suction line 2 at both ends have different internal diameters, the first end forming a tube section 22 with a smaller internal diameter. The duct 22 forms a cavity 23 for the compressed air flow 202 entering the suction duct 2; the second end forms a tube section 20 with a larger inner diameter, the tube section 20 forms a cavity 21 for the flow 201 of the suction line 2, and the first end and the second end of the suction line 2 are located at the ends of the suction line 2. The pipe section 22 and the pipe section 20 are located on the same axis, and after the compressed air flow 202 enters the suction pipeline 2 from the pipe section 22, the swirling air flow 621 formed by the cyclonic ring 60 in the air passage pipeline 50 can be entrained, so that the material to be sucked carried by the swirling air flow 621 in the rising process can be smoothly discharged out of the suction device from the pipe section 20. The cross-sectional area of the chamber 23 (the cross-sectional area formed by cutting the tube section 22 in a direction perpendicular to the plane of the drawing sheet of fig. 3) is smaller than the cross-sectional area of the chamber 21 (the cross-sectional area formed by cutting the tube section 20 in a direction perpendicular to the plane of the drawing sheet of fig. 3), so that the flow rate of the compressed air 202 is greater than the flow rate of the pumping air 201, which prevents the reverse flow of the material to be pumped into the tube 22, and further improves the pumping capacity of the pumping device for the material to be pumped into the pumping tube 2. The pumping device is suspended on the surface of the material 90 and moves integrally, and the pipe section 20 can be connected with the filtering device through a hose, and the pipe section 22 can be connected with the air conveying device through a hose.

Preferably, a second hollow chamber 15 may be further formed inside the suction cup 10, and the second hollow chamber 15 is located radially outside the suction chamber 11. Specifically, in the present embodiment, the cross-sectional shape of the second hollow chamber 15 formed by the suction cup 10 in the radial direction thereof is not particularly limited, and a rectangular shape is selected in the present embodiment. As shown in fig. 3, 4 and 5, in order to further improve the effect of the pumping device in pumping the substance to be pumped, the pumping device disclosed in this embodiment further includes: at least one air outlet duct 30 communicating with the second hollow chamber 15 of the suction cup 10, two air outlet ducts 30 being shown in this embodiment. The bottom of the suction cup 10 is provided with a plurality of auxiliary suction ports to form an auxiliary pumping passage through the auxiliary suction ports, the second hollow chamber 15 and the air outlet pipe 30.

An upward pumping airflow 301 is formed in the auxiliary pumping passage to pump the substance to be pumped from the auxiliary pumping port through the second hollow chamber 15 and the air outlet pipe 30 in sequence. The outlet pipe 30 containing the exhaust gas flow 301 may be connected to the pipe section 20 through a pipeline or directly connected to the pipe section 22 through a tee joint assembly, and the outlet pipe 30 forms a hollow passage 31, and the hollow passage 31 is connected to the second hollow chamber 15. By forming the auxiliary suction passage, a partial omission phenomenon which may exist during the process of sucking the material to be sucked only through the main suction passage is compensated. It should be understood that the air outlet tube 30 shown in fig. 3 may also introduce the substance to be pumped into the air passage tube 50 by connecting into the air passage tube 50 along one or more pumping paths shown by

arrows

101 and 104 in the auxiliary pumping passage, and then the substance is pumped into the pumping tube 2. Of course, the air outlet duct 30 may be separately connected through a pipe to a suction device (not shown) for generating an air suction force.

As shown in fig. 3, in the present embodiment, by providing the covering member 70, not only the incidence of the laser beam can be ensured to meet the technical requirements of cutting the material 90, but also the effective sealing of the suction pipe 2 can be realized to protect the field lens 80 above the covering member 70, prevent the material to be sucked from polluting the field lens 80, and increase the suction effect of the auxiliary suction passage and the main suction passage on the material to be sucked. Specifically, in the present embodiment, the suction chamber 11, the air passage duct 50, and the suction duct 2 together form a main suction passage. The air outlet pipe 30, the second hollow chamber 15 and the auxiliary suction opening formed at the bottom of the suction cup 10 form an auxiliary suction passage, wherein the number of the auxiliary suction passages may be one or more.

In the present embodiment, the cyclone ring 60 is embedded in the inner wall surface of the suction chamber 11, and the first hollow chamber 66 has a ring shape. Meanwhile, the air inlet pipe 40 penetrates into the second hollow chamber 15 of the suction cup 10 and transversely enters the cyclone ring 60, and the air inlet pipe 40 vertically penetrates into the suction cup 10. The air inlet pipe 40 has a hollow passage 41 inside, and due to the small diameter of the hollow passage 41, the compressed air flow 401 with high flow rate can be favorably formed to be introduced into the first hollow chamber 66 of the cyclone ring 60.

The pumping device of the present embodiment is provided with four air inlet pipes 40, and four through holes 113 are formed on the end surface of the top of the suction cup 10. The pumping chamber 11 may be cylindrical, may be elliptical cylindrical or may have other axisymmetric solid shapes, and is most preferably cylindrical. The suction chamber 11 has an inner side 111 formed with a through hole 112 through which the air intake duct 40 extends laterally inwardly and is connected to the through hole 65 provided on the outer side of the cyclone ring 60. The number of the through holes 112 may be the same as the number of the intake pipes 40, but it is also possible to arrange the number of the through holes 112 in a manner smaller than the number of the intake pipes 40 and arrange two or more intake pipes 40 so as to share one through hole 112.

The bottom of the suction chamber 11 is open and suspended on the surface of the material 90. The air delivery device delivers air to the intake duct 40 to form a compressed airflow 401. The compressed air flow 401 laterally enters the first hollow chamber 66 formed inside the cyclone ring 60 through the through holes 65. The cyclone ring 60 is circular, a circle of air outlet holes 62 are formed in the upper surface 61 of the cyclone ring 60, the air outlet holes 62 can be circular or any other opening capable of forming an upward inclined air flow, so that the compressed air flow 401 conveyed into the first hollow chamber 66 is ejected through the air outlet holes 62, the plurality of upward inclined air flows jointly form a spiral lifting air flow 621, and therefore the material to be sucked generated in the cutting process of the material 90 by the laser beam can be gathered inwards, the material to be sucked is quickly sucked into the air passage pipeline 50 upwards along the direction shown by the arrow 201a, the suction device at the exhaust end of the suction pipeline 2 is facilitated to suck the material to be sucked, and the suction efficiency of the suction device to suck the material is improved.

Preferably, a conical ring surface 63 is formed on the lower surface of the cyclone ring 60 for better convergence and suction of the material to be sucked. Preferably, in this embodiment, a conical portion 51 is disposed between the air channel pipe 50 and the suction cup 10, and a conical cavity 511 which is upwardly contracted and communicated with the air channel pipe 50 is formed inside the conical portion 51, so that the ascending air flow 621 can be better converged and guided by the conical cavity 511, and the ascending air flow 621 flowing upwards can enter the suction channel 2 more smoothly to be discharged out of the suction device. The conical portion 51 may be formed integrally with the suction cup 10, or may be embedded in the inner surface 111 of the suction chamber 11, or a step may be formed at an outer edge of the conical portion 51 and may be engaged with the inner surface 111 of the suction chamber 11 and the upper surface of the suction cup 10.

As shown in connection with fig. 3, the cyclonic ring 60 provided on the inner wall surface of the suction chamber 11 creates a swirling airflow 621 that focuses the material to be suctioned upward along a path indicated by arrow 105 to exit the evacuation device through the main evacuation passage. In the present embodiment, by forming the spiral lifting airflow 621, the substance to be sucked is accelerated to converge and flow, so that the suction effect of the substance to be sucked is improved, and the yield of the product (for example, OLED display panel) formed by cutting the material 90 by the laser beam is improved.

It should be noted that although the air inlet tube 40 of the pumping device disclosed in the present embodiment extends into the second hollow chamber 15 and transversely connects to the through hole 65 formed on the outer side surface of the cyclone ring 60, the applicant also points out that one air inlet tube 40 or all air inlet tubes 40 can be embedded on the inner side wall of the suction cup 10 at the same time.

Meanwhile, in this embodiment, the suction cup 10 is provided with an even number of air outlet pipes 30 which are axially symmetrically arranged and communicated with the second hollow chamber 15 of the suction cup 10, specifically, the two air outlet pipes 30 of the suction cup 10 are axially symmetrically arranged relative to the air path pipeline 50, so that the suction force generated by the auxiliary suction channel is more uniform, and the realization principle and specific description of the more uniform suction force generated by the auxiliary suction channel are described below.

In the present embodiment, as shown in fig. 5 and 8, the auxiliary suction ports are configured as a plurality of arc-shaped slits, and preferably, the auxiliary suction ports are composed of a plurality of separated arc-shaped slits. For example, the auxiliary suction port is composed of four separate arc-shaped slits 103 and four arc-shaped slits 102. The arc-shaped slits 103 and the four arc-shaped slits 102 are all communicated with the second hollow chamber 15. Configuring the auxiliary suction ports as arc-shaped slits facilitates increasing the flow rate of air from the arc-shaped slits into the second hollow chamber 15, thereby increasing the suction effect of the one or more auxiliary suction channels formed through the auxiliary suction ports on the material to be sucked.

The four arc-shaped slits 102 are separated in the embodiment, that is, the four arc-shaped slits 102 are separated in the direction similar to the circular ring, and the four arc-shaped slits 103 are separated in the direction similar to the circular ring, which does not require that the four arc-shaped slits 102 or the four arc-shaped slits 103 form a circular shape, as long as it is ensured that any connecting line between any position on the circular cross section formed by horizontally cutting the suction cup 10 and the lower edge of the outer circumferential surface of the suction cup 10 can be blocked by the arc-shaped slits 102 and/or the arc-shaped slits 103. By this arrangement, it is avoided that the evacuation material is sucked through the auxiliary suction channel formed by the curved slits 102 and/or 103 even if it is not sucked through the main suction channel during the horizontal movement of the evacuation device. For example, referring to fig. 5, a partition 12 is formed between two adjacent arc-shaped slits 102, a partition 13 is formed between two adjacent arc-shaped slits 103, and the partitions 12 and the partitions 13 are arranged in a staggered manner. Meanwhile, in the present embodiment, the four arc-shaped slits 102 and the four arc-shaped slits 103 are sleeved with each other and spaced apart from each other in the radial direction of the ring formed at the bottom of the suction cup 10.

Further, the arc-shaped slit separation structure shown in the present embodiment may also refer to the separation of the arc-shaped slit 102 and the arc-shaped slit 103 along the radial direction of the suction cup 10. For example, referring to fig. 5, the auxiliary suction opening comprises at least two circles of slit rings consisting of a plurality of separated arc-shaped slits, and the arc-shaped slit rings included in two adjacent circles of slit rings are partially overlapped along the radial direction of the sucker. The auxiliary suction port is provided with a plurality of separated arc-shaped slits, and particularly the auxiliary suction port is provided with at least two circles of slit rings formed by the plurality of separated arc-shaped slits, and the arc-shaped slit rings contained in two adjacent circles of slit rings are partially overlapped along the radial direction of the suction cup 10, so that the suction and discharge device is ensured not to be omitted in the process of sucking the substances to be sucked suspended on the surface of the material 90; even if there is a small amount of missing material to be sucked, it can be separated from the surface of the material 90 along the suction path shown by the

arrows

101 and 104 through the plurality of arc-shaped slits 102 and/or the plurality of arc-shaped slits 103, sucked into the second hollow chamber 15, and finally discharged from the plurality of outlet pipes 30 along the paths shown by the

arrows

302 and 301.

The suction path formed by the arrow 101 is formed by a circle of arc-shaped slits 102 and the suction path formed by the arrow 104 is formed by a circle of arc-shaped slits 103. The suction path indicated by the arrow 101 and/or the arrow 104 forms an auxiliary suction channel and, in cooperation with the main suction channel formed by the suction chamber 11, increases the suction effect on the material to be sucked formed during the cutting of the material 90 by the laser beam. The high velocity airflow in the suction path shown by

arrows

101 and 104 carries the material to be suctioned out of the evacuation device in the direction shown by

arrows

302 and 301 in the second hollow chamber 15.

Referring again to fig. 3 and 7, the applicant has also noted that the cyclonic ring 60 included in the evacuation device disclosed in this embodiment may also be embedded in the inner sidewall of the suction cup 10, and even the cyclonic ring 60 may be included as part of the suction cup 10. For example, the cyclone ring 60 and the suction cup 10 can be integrated, the ring of the first hollow chamber 66 formed by the cyclone ring 60 is integrally disposed on the inner sidewall of the suction cup 10, the air inlet pipe 40 is disposed in a manner of penetrating the second hollow chamber 15 or being embedded or partially embedded in the inner sidewall of the suction cup 10, as long as the air delivered by the air inlet pipe 40 can be delivered to the first hollow chamber 66, and the ring of the air outlet holes 62 opened on the upper surface 61 of the cyclone ring 60 can be exposed out of the suction chamber 11 to form the cyclone flow 621.

The pumping device disclosed by the embodiment can reduce the high-efficiency collection and discharge of various smog, dust and toxic and harmful gases generated in the cutting process of the material 90, thereby not only ensuring the product yield of the cut material, but also effectively avoiding the possible pollution of the smog, dust and toxic and harmful gases on the surface of a field lens of an optical path system of the laser cutting device, and being suitable for being used in a clean room environment. Meanwhile, the defect that the traditional suction device is insufficient in suction force or missing in the suction process is overcome, and the shutdown maintenance time and shutdown times of the pumping device can be remarkably reduced.

Example two:

as shown in fig. 9, the main difference between the pumping device disclosed in this embodiment and the pumping device disclosed in the first embodiment is that the auxiliary pumping port formed on the bottom surface of the suction cup 10 of this embodiment is configured as two circles of the slit ring 103a and the slit ring 102a which are nested with each other and are arranged in concentric circles, and the slit ring 103a and the slit ring 102a are separated from each other in the radial direction. In connection with the extraction device according to the first embodiment, the applicant has pointed out that it is also possible to provide the slit rings 103a or 102a spaced apart in the radial direction of the ring. For example, the slit ring 103a may be configured to be composed of four arc-shaped slits 103 in common.

The pumping device disclosed in this embodiment has the same technical solutions as those in the first embodiment, please refer to the description of the first embodiment, and details are not repeated herein.

Example three:

as shown in fig. 10, the main difference between the pumping device disclosed in the present embodiment and the pumping device disclosed in the first and/or second embodiments is that the air passage 53 in the present embodiment is a straight cylinder, the conical portion 51 disclosed in the first embodiment is omitted, and the conical portion 51 forms a conical cavity 511 which is upwardly contracted and communicated with the suction pipe 2. It should be noted that the air passage pipeline connected above the suction chamber 11 is not limited to the technical solutions disclosed in the first to third embodiments, and only the air passage pipeline 53 is ensured to be communicated with the suction pipeline 2, and a three-way structure is formed.

The pumping device disclosed in this embodiment has the same technical solutions as those in the first embodiment and/or the second embodiment, please refer to the description of the first embodiment and/or the second embodiment, and the description thereof is omitted here.

Example four:

based on the technical scheme of the pumping device disclosed by any one or more of the first embodiment to the third embodiment in combination, the embodiment also discloses a laser cutting device.

In this embodiment, the laser cutting apparatus includes:

a carrier for carrying the material 90, a laser generator, and a pumping device as disclosed in any one of the first to third embodiments and disposed between the carrier and the laser generator;

the laser generator includes a carbon dioxide laser generator and/or a UV laser generator. The laser generator is selected according to the property of the material to be cut carried by the carrier.

Please refer to the first to third embodiments, and details are not repeated herein for a specific technical scheme of the pumping device included in the laser cutting device in this embodiment.

The above-listed detailed description is only a specific description of a possible embodiment of the present invention, and they are not intended to limit the scope of the present invention, and equivalent embodiments or modifications made without departing from the technical spirit of the present invention should be included in the scope of the present invention.

It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. An extraction device, comprising:

the top of the suction pipeline forms a covering part for laser to penetrate through the suction pipeline, the gas path pipeline and the suction chamber to cut materials, and the cyclone ring is provided with an air outlet for forming cyclone airflow.

2. The extraction apparatus according to claim 1,

the sucker is provided with a second hollow cavity;

the pumping device further comprises:

3. The extraction apparatus as claimed in claim 1, wherein the cyclonic ring is embedded in an inner wall surface of the pumping chamber, and the first hollow chamber is annular;

4. The extraction apparatus as claimed in claim 1, wherein the cover is a sealed lens or a flat glass.

5. The extraction apparatus according to claim 1, wherein the end of the extraction duct is open, the first end of the extraction duct being connected to the air delivery device and the second end of the extraction duct being connected to the extraction apparatus.

6. An evacuation device according to any one of claims 1 to 5, wherein the air passage conduit forms a tapered cavity which converges upwardly and communicates with the suction conduit.

7. The evacuation device of claim 2, wherein the auxiliary suction port is configured as a plurality of arcuate slits.

8. The extraction apparatus according to claim 7, wherein the auxiliary suction opening comprises at least two separate rings of arcuate slits, the arcuate slit rings of two adjacent rings partially overlapping in the radial direction of the suction cup.

9. The extraction apparatus according to claim 2, wherein the suction cup arrangement comprises an even number of outlet ducts arranged axisymmetrically and communicating with the second hollow chamber of the suction cup.

10. A laser cutting apparatus, comprising:

a carrier for carrying a material, a laser generator, and the pumping device of any one of claims 1 to 9 disposed between the carrier and the laser generator;